KR102169581B1 - Vehicle maintenance lift - Google Patents

Abstract

Disclosed is a vehicle maintenance elevating device for vehicle maintenance of an overhead traveling transfer device moving along a traveling rail. The device is connected to the travel rail and provides a space for maintenance of the vehicle, and the upper position connected to the travel rail and the lower position where maintenance of the vehicle is performed. Support rails disposed in the work chamber and supporting the vehicle in the work chamber, an elevating mechanism for lifting the support rails, and a height of the driving wheels of the vehicle disposed above the support rails. Includes a height measurement sensor.

Description

Lifting device for vehicle maintenance {Vehicle maintenance lift}

Embodiments of the present invention relate to a lifting device for vehicle maintenance. More specifically, it relates to an elevating device for vehicle maintenance of a overhead traveling transport device such as an overhead hoist transport (OTT) device.

In general, a semiconductor or display device can be manufactured by repeatedly performing a series of manufacturing processes on a substrate such as a silicon wafer or a glass substrate. For example, manufacturing processes such as deposition, photo etching, oxidation, ion implantation, and cleaning may be selectively and/or repeatedly performed to form circuit patterns on the substrate.

The manufacturing processes as described above are performed in a clean room where cleanliness is managed to prevent contamination, and the substrate transfer between the manufacturing processes may be performed using a substrate storage container such as a cassette or FOUP. For example, the substrate storage container may be transported between the manufacturing processes by an unmanned transport device such as Rail Guided Vehicle (RGV), Overhead Hoist Transport (OTT), or the like.

A ceiling traveling transfer device such as the OHT device may include a traveling rail installed on the ceiling of a clean room and a vehicle configured to be movable on the traveling rail. A hoist module for transporting an object to be transported may be mounted under the vehicle, and the hoist module includes a gripper unit for gripping the object to be transported, a hoist unit for vertical movement of the gripper unit, and the gripper unit. It may include a robot for horizontal movement and rotation of the hoist unit.

Republic of Korea Patent Publication No. 10-2013-0057955 (Publication date: June 03, 2013)

Embodiments of the present invention provide a vehicle maintenance elevating device capable of elevating the vehicle in a vertical direction for maintenance of the vehicle of the overhead traveling transport device, and performing measurements and tests for maintenance of the vehicle. It has its purpose to provide.

According to embodiments of the present invention, in the vehicle maintenance elevating device for vehicle maintenance of a ceiling traveling transfer device moving along a traveling rail, the vehicle maintenance elevating device is connected to the traveling rail and the A work chamber providing a space for vehicle maintenance and an upper position connected to the traveling rail and a lower position at which the vehicle maintenance is performed are disposed in the working chamber so as to be elevated and lowered, and the working chamber It may include support rails supporting the vehicle, a lifting mechanism for lifting the support rails, and at least one height measurement sensor disposed on the support rails and measuring heights of the driving wheels of the vehicle. .

According to some embodiments of the present invention, a left height measurement sensor for measuring the heights of the left driving wheels of the vehicle and a right height measurement sensor for measuring the heights of the right driving wheels of the vehicle are provided above the support rails. Can be placed.

According to some embodiments of the present invention, the elevating device for vehicle maintenance may further include at least one second height measuring sensor disposed above the support rails and measuring heights of the support rails. .

According to some embodiments of the present invention, the elevating device for vehicle maintenance may further include at least one guide rail disposed above the support rails and supporting upper guide wheels of the vehicle.

According to some embodiments of the present invention, recesses corresponding to driving wheels of the vehicle may be provided on upper portions of the support rails.

According to some embodiments of the present invention, the elevating device for vehicle maintenance may further include spacers inserted into the recesses and having a thickness equal to the depth of the recesses.

According to some embodiments of the present invention, an opening for entering and exiting the vehicle may be provided at an upper front portion of the working chamber.

According to some embodiments of the present invention, the elevating device for vehicle maintenance may further include a test load port that is disposed under the front side of the working chamber and tests the operation of the vehicle.

According to some embodiments of the present invention, the vehicle maintenance elevating device is disposed on one side of the test load port, and may further include a first test jig for an operation test of a lower obstacle detection sensor of the vehicle. have.

According to some embodiments of the present invention, the vehicle maintenance lifting device may further include a second test jig disposed above the test load port and for testing the operation of the front obstacle detection sensor of the vehicle. have.

According to some embodiments of the present invention, the vehicle maintenance lifting device may further include a third test jig disposed above the test load port and for testing the operation of the front distance sensor of the vehicle. .

According to some embodiments of the present invention, a door for an operation test of a front obstacle detection sensor and a front distance sensor of the vehicle may be provided between the opening and the test load port.

According to the embodiments of the present invention as described above, the lifting device for vehicle maintenance includes a working chamber connected to the traveling rail and providing a space for maintenance of the vehicle, and an upper portion connected to the traveling rail. Support rails disposed in the working chamber to be elevating between a position and a lower position in which maintenance of the vehicle is performed, and supporting rails supporting the vehicle in the working chamber, an elevating mechanism for lifting the support rails, and the It is disposed above the support rails and may include a height measurement sensor for measuring the height of the driving wheels of the vehicle.

In particular, the elevating device for vehicle maintenance may include a guide rail for adjusting the position of the guide wheels of the vehicle, and recesses for adjusting the position of the guide wheels may be provided in the support rails. In addition, the vehicle maintenance lifting device may include test jigs for testing the operation of various sensors of the vehicle.

Accordingly, since various maintenance tasks for the vehicle can be performed in the work chamber, cost and time required for maintenance of the vehicle can be reduced. In particular, since a separate test device such as a test bench used in the prior art is not required, the cost required for maintenance of the vehicle can be further reduced, and the time required to move the vehicle to the test device is unnecessary. Therefore, the time required for maintenance of the vehicle can be further reduced.

1 is a schematic configuration diagram for explaining a lifting device for vehicle maintenance according to an embodiment of the present invention.
2 is a schematic plan view for explaining the driving modules shown in FIG. 1.
3 is an enlarged plan view illustrating the support structure shown in FIG. 2.
4 is a schematic enlarged configuration diagram for describing the support rails and the vehicle shown in FIG. 1.
5 is a schematic enlarged bottom view for explaining the base panel shown in FIG. 4.
6 is a schematic enlarged configuration diagram for explaining a method of adjusting the position of the guide wheels shown in FIG. 2.
7 is a schematic plan view for explaining the test load port shown in FIG. 1.
8 is a schematic side view illustrating a test load port shown in FIG. 1.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention does not have to be configured as limited to the embodiments described below, and may be embodied in various other forms. The following examples are provided to sufficiently convey the scope of the present invention to those skilled in the art, rather than provided to enable the present invention to be completely completed.

In the embodiments of the present invention, when one element is described as being disposed on or connected to another element, the element may be directly disposed on or connected to the other element, and other elements are interposed therebetween. It could be. Alternatively, if one element is described as being placed or connected directly on another element, there cannot be another element between them. Terms such as first, second, third, etc. may be used to describe various items such as various elements, compositions, regions, layers, and/or parts, but the above items are not limited by these terms. Won't.

The terminology used in the embodiments of the present invention is used only for the purpose of describing specific embodiments, and is not intended to limit the present invention. In addition, unless otherwise limited, all terms including technical and scientific terms have the same meaning that can be understood by those of ordinary skill in the art of the present invention. The terms, such as those defined in conventional dictionaries, will be interpreted as having a meaning consistent with their meaning in the context of the description of the related art and the present invention, and ideally or excessively external intuition unless explicitly limited. It will not be interpreted.

Embodiments of the present invention are described with reference to schematic diagrams of ideal embodiments of the present invention. Accordingly, changes from the shapes of the diagrams, for example changes in manufacturing methods and/or tolerances, are those that can be sufficiently anticipated. Accordingly, embodiments of the present invention are not described as limited to specific shapes of regions described as diagrams, but include variations in shapes, and elements described in the drawings are entirely schematic and their shapes Is not intended to describe the exact shape of the elements, nor is it intended to limit the scope of the present invention.

1 is a schematic configuration diagram for explaining a vehicle maintenance lifting apparatus according to an embodiment of the present invention, and FIG. 2 is a schematic plan view for explaining the traveling modules shown in FIG. 1.

Referring to FIG. 1, the vehicle maintenance elevating device 100 according to an embodiment of the present invention may elevate the vehicle 30 in a vertical direction for maintenance of the vehicle 30 for transporting goods. . For example, the vehicle maintenance lifting device 100 may be used for maintenance of the vehicle 30 of the overhead traveling transfer device 10 such as an OHT device.

The ceiling traveling transfer device 10 may include a traveling rail 20 installed on the ceiling of a clean room and a vehicle 30 configured to be movable on the traveling rail 20. Although not shown in detail, the vehicle 30 is mounted under the driving modules 40 and the driving modules 40 to provide a driving force for moving along the travel rail 20, and transports objects. It may include a hoist module 70 for. The hoist module 70 may include a gripper unit for pickup of an object to be transferred, a hoist unit for vertical movement of the gripper unit, and a robot for horizontal movement and rotation of the gripper unit and the hoist unit.

Referring to FIG. 2, each of the traveling modules 40 includes traveling wheels 42 disposed on the traveling rail 20, a body 44 on which the traveling wheels 42 are mounted, and the main body ( 44) and may be provided with guide wheels 46 for supporting and guiding the driving module 40 at a branch point. Although not shown in detail, the main body 44 includes a first driving unit for rotating the driving wheels 42 and a second driving unit for moving the guide wheels 46 in the left and right directions with respect to the driving direction. can do. The guide wheels 46 may be disposed on the movable member 48 configured to be movable in the left and right direction, and in addition, support structures for supporting the movable member 48 on both upper sides of the main body 44 ( 50) can be arranged respectively.

3 is an enlarged plan view illustrating the support structure shown in FIG. 2.

Referring to FIG. 3, each of the support structures 50 includes a support frame 52 mounted on the main body 44, and a stopper made of metal such as aluminum disposed to be spaced apart from the support frame 52 by a predetermined distance. A member 54 and a support member 56 made of a plastic material such as polyacetal for supporting the movable member 48 and disposed on a side surface of the stopper member 54 may be included. The plastic support member 56 may be used to reduce particle generation, and the support member 56 and the stopper member 54 may be mounted on the support frame 52 by fastening members such as bolts. I can.

Meanwhile, shim plates 60 for adjusting the positions of the guide wheels 46 may be inserted between the support frame 52 and the stopper member 54. For example, shim plates 60 having a thickness of about 0.2 mm may be inserted between the support frame 52 and the stopper member 54, and the number of the inserted shim plates 60 Accordingly, the positions of the guide wheels 46 may be adjusted.

Referring to FIG. 1 again, the vehicle maintenance lifting device 100 includes a working chamber 110 connected to the traveling rail 20 and providing a space for maintenance of the vehicle 30, and the It is disposed in the work chamber 110 so as to be elevated between an upper position connected to the traveling rail 20 and a lower position where maintenance of the vehicle 30 is performed, and the vehicle 30 in the work chamber 110 ) Support rails 120, a lifting mechanism 130 for lifting the support rails 120, and driving wheels of the vehicle 30 disposed above the support rails 120 It may include a height measurement sensor 150 for measuring the height of 42.

The working chamber 110 may have a substantially rectangular shape, and an opening 112 for entering and exiting the vehicle 30 may be provided at an upper front of the working chamber 110. That is, as shown, an end of the running rail 20 may be disposed inside the opening 112, and the support rails 120 have an upper position adjacent to the end of the running rail 20 and the The vehicle 30 may be raised or lowered between lower positions for maintenance. In addition, an opening 114 for entering and exiting the vehicle 30 may be provided at an upper rear surface of the working chamber 110.

The lifting mechanism 130 may lower the support rails 120 to the lower position after the vehicle 30 is moved from the upper position onto the support rails 120. For example, although not shown in detail, the lifting mechanism 130 includes guide mechanisms for guiding the support rails 120 in a vertical direction and a driving unit for lifting the support rails 120 in a vertical direction. It may include. As an example, the driving unit may be configured using a motor and a timing belt. However, since the configuration of the driving unit can be variously changed, the scope of the present invention will not be limited thereby.

4 is a schematic enlarged configuration diagram for explaining the support rails and the vehicle shown in FIG. 1, and FIG. 5 is a schematic enlarged bottom view for explaining the base panel shown in FIG. 4.

4 and 5, the support rails 120 may be connected to each other by connection bridges 122, and a base panel 124 may be disposed on the connection bridges 122. . As an example, left and right height measurement sensors 150 for measuring the heights of the left and right driving wheels 142 of the driving module 40 may be mounted on the lower surface of the base panel 124. .

In addition, second height measurement sensors 152 for measuring the height of the support rails 120 may be mounted on the lower surface of the base panel 124. That is, the height of the driving wheels 42 measured by the left and right height measurement sensors 150 and the height of the support rails 120 measured by the second height measurement sensors 152 Compared to each other, the degree of wear of the driving wheels 42 may be determined, and whether to replace the driving wheels 42 may be determined according to the result.

However, differently from the above, the height of the support rails 120 may be measured by the left and right height measuring sensors 150. In this case, the second height measurement sensors 152 may be omitted.

In addition, a guide rail 160 for adjusting the positions of the guide wheels 46 may be disposed on a lower surface of the base panel 124. The guide rail 160 may be elongated in the driving direction of the vehicle 30, or two guide rails 160 may be disposed at a predetermined interval in the driving direction as shown.

6 is a schematic enlarged configuration diagram for explaining a method of adjusting the position of the guide wheels shown in FIG. 2.

Referring to FIG. 6, recesses 126 corresponding to the driving wheels 42 of the vehicle 30 may be provided above the support rails 120, and the recesses 126 Spacers 128 having the same thickness as the depth of the recesses 126 may be inserted. In particular, when the driving wheels 42 are located on the spacers 128, the guide wheels 46 may be located on the side surfaces of the guide rails 160.

When one of the spacers 128 is removed as shown in a state in which the guide wheels 46 are located on the side surfaces of the guide rails 160 as described above, the spacer 128 is removed. A predetermined gap G may be formed between the bottom surface of the recess 126 and the driving wheel 42 corresponding thereto. For example, the depth of the recess 126 may be about 2 mm.

On the other hand, as the number of shim plates 60 increases, the gap G may also increase, so that the number of mounting of the shim plate 60 may be adjusted so that the gap G becomes a preset value. have. For example, the number of mounting of the shim plate 60 may be adjusted so that the gap 60 is about 2.3 mm to 2.5 mm, and the step of adjusting the position of the guide wheels 46 as described above is performed by each of the driving wheels. It can be repeated 4 times for (42).

Referring back to FIG. 1, after the vehicle 30 is lowered to the lower position as described above, an operation state check of the vehicle 30 may be performed. Although not shown, a first door (not shown) for checking the operating state of the vehicle 30 may be provided on the side of the working chamber 110. After the vehicle 30 is lowered to the lower position, the operator may check the operating state of the vehicle 30 after opening the first door. For example, operation states of the traveling modules 40 and the hoist module 70, and operation states of various sensors may be checked by an operator.

On the other hand, when the operation state of the vehicle 30 is poor and failure repair or replacement of parts is required, the vehicle 30 may be carried out from the work chamber 110. To this end, a second door 116 for carrying in and out of the vehicle 30 may be provided at the rear of the working chamber 110.

In addition, a third door 118 for testing the operation of the various sensors may be provided on the front of the working chamber 110. The third door 118 may be located under the opening 112 and may be disposed above the test load port 140 to be described later. That is, the third door 118 may be located between the opening 112 and the test load port 140.

The test load port 140 may be used to test the operating state of the vehicle 30 positioned on the traveling rail 20 before the vehicle 30 is moved to the working chamber 110. For example, the test load port 140 may be configured in the same manner as a load port provided in a process facility, and may be configured to support a substrate storage container such as a cassette or FOUP. That is, the test load port 140 may be used to test a load/unload test of the substrate storage container, a teaching state of the hoist module, and the like.

The vehicle 30 may be equipped with a downward obstacle detection sensor 80, a front obstacle detection sensor 82, a front distance sensor 84, and the like. As an example, the lower obstacle detection sensor 80 may be mounted under the hoist module 70, and the front obstacle detection sensor 82 and the front distance sensor 84 are of the hoist module 70. It can be mounted on the front parts. The downward obstacle detection sensor 80 may be used to determine whether there is an obstacle under the hoist module 70 when loading or unloading the object to be transported, and the front obstacle detection sensor 82 may be used for the vehicle ( 30) can be used to determine whether there is an obstacle in front of it. In addition, the front distance sensor 84 may be used to measure a distance to another vehicle positioned in front.

FIG. 7 is a schematic plan view illustrating the test load port shown in FIG. 1, and FIG. 8 is a schematic side view illustrating the test load port shown in FIG. 1.

7 and 8, test jigs for testing the operation of the sensors may be mounted on the test load port 140. For example, as shown, a first test jig 170 for an operation test of the lower obstacle detection sensor 80 may be disposed on one side of the test load port 140, and the lower obstacle detection sensor ( The operation test of 80) may be performed before the vehicle 30 is moved into the working chamber 110.

In addition, a second test jig 172 and a third test jig 174 for testing the operation of the front obstacle detection sensor 82 and the front distance sensor 84 are disposed above the test load port 140 Can be. The operation test of the front obstacle detection sensor 82 and the front distance sensor 84 may be performed after the vehicle 30 is lowered to the lower position. At this time, the third door 118 may be opened, and the second and third test jigs 172 and 174 may be disposed to face the vehicle 30 lowered to the lower position as shown. have.

As an example, when optical sensors are used as the lower obstacle detection sensor 80, the front obstacle detection sensor 82, and the front distance sensor 84, the first, second, and third test jigs 170, 172 As 174), reflectors may be used.

According to the embodiments of the present invention as described above, the vehicle maintenance lifting device 100 is connected to the traveling rail 20 and provides a space for maintenance of the vehicle 30. It is disposed in the working chamber 110 so as to be elevated between an upper position connected to the driving rail 20 and a lower position where maintenance of the vehicle 30 is performed, and the working chamber 110 Support rails 120 supporting the vehicle 30 within, an elevating mechanism 130 for elevating the support rails 120, and disposed above the support rails 120 and the vehicle It may include height measurement sensors 150 for measuring the height of the driving wheels 42 of 30.

In particular, the vehicle maintenance elevating device 100 may include a guide rail 160 for adjusting the position of the guide wheels 46 of the vehicle 30, and the support rails 120 include the guide rails. Recesses 126 for adjusting the positions of the wheels 46 may be provided. In addition, the vehicle maintenance lifting device 100 may include test jigs 170, 172, 174 for testing the operation of various sensors of the vehicle 30.

Accordingly, since various maintenance tasks for the vehicle 30 can be performed in the work chamber 110, the cost and time required for maintenance of the vehicle 30 can be reduced. In particular, since a separate test device such as a test bench used in the prior art is not required, the cost required for maintenance of the vehicle 30 can be further reduced, and the vehicle 30 is moved to the test device. Since the time required to do so is unnecessary, the time required for maintenance of the vehicle 30 can be further shortened.

Although the above has been described with reference to the preferred embodiments of the present invention, those skilled in the art can variously modify and change the present invention without departing from the spirit and scope of the present invention described in the following claims. You will understand that there is.

10: ceiling traveling transfer device 20: traveling rail
30: vehicle 40: driving module
42: driving wheel 44: main body
46: guide wheel 48: movable member
50: support structure 60: shim plate
70: hoist module 80: downward obstacle detection sensor
82: front obstacle detection sensor 84: front distance sensor
100: elevating device for vehicle maintenance
110: working chamber 120: support rail
122: connection bridge 124: base panel
126: recess 128: spacer
130: lifting mechanism 140: test rod port
150: height measurement sensor 152: second height measurement sensor
160: guide rail 170: first test jig
172: second test jig 174: third test jig

Claims (12)

In the vehicle maintenance elevating device for vehicle maintenance of an overhead traveling transport device moving along a traveling rail,
A working chamber connected to the traveling rail and providing a space for maintenance of the vehicle;
Support rails disposed in the working chamber so as to be elevated between an upper position connected to the traveling rail and a lower position in which maintenance of the vehicle is performed, and supporting the vehicle in the working chamber;
A lifting mechanism for lifting the support rails; And
And at least one height measurement sensor disposed above the support rails and measuring heights of the driving wheels to determine the degree of wear of the driving wheels of the vehicle,
An elevating device for vehicle maintenance, characterized in that an opening for entering and exiting the vehicle is provided at an upper front of the working chamber, and a test load port for testing an operation of the vehicle is disposed at a lower front of the working chamber. The method of claim 1, wherein a left height measurement sensor for measuring the height of left driving wheels of the vehicle and a right height measurement sensor for measuring the height of right driving wheels of the vehicle are disposed above the support rails. Lifting device for vehicle maintenance. The elevating device for vehicle maintenance according to claim 1, further comprising at least one second height measuring sensor disposed above the support rails and measuring heights of the support rails. The elevating device for vehicle maintenance according to claim 1, further comprising at least one guide rail disposed above the support rails and supporting upper guide wheels of the vehicle. delete delete delete delete The elevating device for vehicle maintenance according to claim 1, further comprising a first test jig disposed on one side of the test load port and for testing an operation of a lower obstacle detection sensor of the vehicle. The lifting device for vehicle maintenance according to claim 1, further comprising a second test jig disposed above the test load port and for testing an operation of a front obstacle detection sensor of the vehicle. The lifting device for vehicle maintenance according to claim 1, further comprising a third test jig disposed above the test load port and for testing an operation of a front distance sensor of the vehicle. The elevating device for vehicle maintenance according to claim 1, wherein a door for testing an operation of a front obstacle detection sensor and a front distance sensor of the vehicle is provided between the opening and the test load port.

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