KR102144686B1 - Manufacturing method of ceramic slider applied to air floating ceramic linear stage - Google Patents

Abstract

The present invention relates to a method for manufacturing a ceramic slider to be applied to an air-floating ceramic linear stage. According to the present invention, the method for manufacturing a ceramic slider to be applied to an air-floating ceramic linear stage includes a preparation process (S10); a sintering process (S20); a polishing process (S30); a flow path processing process (S40); and an orifice processing process (S50). According to the present invention, excellent precision and stability can be secured.

Description

Manufacturing method of ceramic slider applied to air floating ceramic linear stage {Manufacturing method of ceramic slider applied to air floating ceramic linear stage}

The present invention relates to an air-floating ceramic linear stage and a method of manufacturing a ceramic slider applied thereto, and in more detail, it is made of ceramic, which is a high hardness material excellent in abrasion resistance, corrosion resistance, and heat resistance, so that excellent precision and stability can be secured. Of course, a high lifespan and superior quality can be guaranteed, and the orifice micro-floating flow path that induces injury by accelerating the flow rate of air is integrally formed, thereby making the process of manufacturing and combining the orifice brass member with a separate fine hole. As it can be omitted, the overall manufacturing process can be shortened and man-hours can be reduced, and as the fastening screw is integrally formed in the supply passage through which air is supplied, a tight coupling is possible compared to the adhesive joint method that directly connects the air hose. The present invention relates to an air-floating ceramic linear stage in which a hose can be easily detached with improved convenience, and a method of manufacturing a ceramic slider applied thereto.

A general linear stage is composed of a base fixed to the floor, a guide fixedly mounted on an upper end of the base, and a slide moving linearly along the guide.

Here, a ball or roller bearing that induces sliding is embedded in the slide engaged with the guide. Such a bearing has a limitation in realization of positional accuracy due to vibration in the vertical direction due to elastic deformation and uniformity of the ball, as well as vibration and heat generation due to friction caused by mechanical contact.

Therefore, in order to solve this problem, the base forming the stage, the guide, and the slide are formed of granite stone with excellent abrasion resistance and corrosion resistance, and the air bearing technology is applied to form an air layer between the slide and the guide so that the guide and the slide are not in contact. have.

That is, in order to implement the air bearing, an injection passage through which air is supplied to the slide, and a fine orifice discharge passage of 0.5 mm or less are required to discharge high-pressure air toward the guide by communicating with the injection passage.

However, granite has physical properties that are damaged by high-pressure air, so an orifice member with a separate fine hole was manufactured and bonded to the slide. Therefore, there is a problem of wasting man-hours due to manufacturing and assembly.

Moreover, in order to form a microchannel, it has no choice but to be made of brass material, and such brass has a weak durability, so it is difficult to implement a correct air bearing technology as the microchannel expands when exposed to high pressure air for a long time.

In recent years, in order to overcome all of these problems, there has been an attempt to manufacture a linear stage with ceramic, which is a high-hardness material having excellent wear resistance, corrosion resistance and heat resistance. However, ceramics have high hardness and brittle properties, which makes it difficult to process.

Of course, it is possible to process a shape or hole of a ceramic using a diamond electrodeposition drill, but there is a problem that it is practically impossible to apply it to a linear stage that requires high precision due to a high error rate.

In addition, even if hole processing is possible, thread processing is difficult and the air hose must be connected using an adhesive, and thus, there is a problem of high defect rate depending on the complicated assembly process and the skill of the operator.

Korean Patent Publication No. 10-1771440

The present invention has been proposed to solve the above problems, and is made of ceramic, which is a high-hardness material having excellent wear resistance, corrosion resistance, and heat resistance, so that excellent precision and stability can be secured, as well as high lifespan and superior quality. An object of the present invention is to provide an air-floating ceramic linear stage and a method of manufacturing a ceramic slider applied thereto.

In addition, in the present invention, the orifice micro-floating flow path that induces the floatation by accelerating the flow rate of air is integrally formed, so that the process of manufacturing and combining the orifice brass member with a separate fine hole perforated can be omitted, thus reducing the overall manufacturing process. It is an object of the present invention to provide an air-floating ceramic linear stage and a method of manufacturing a ceramic slider applied to the air-floating ceramic linear stage capable of reducing energy and labor.

In addition, in the present invention, the fastening screw is integrally formed in the supply flow path through which air is supplied, so that a tight coupling is possible compared to the adhesive joint method that directly connects the air hose. An object of the present invention is to provide an air-floating ceramic linear stage and a method of manufacturing a ceramic slider applied thereto.

In addition, the present invention applies a cutting method that is optimized for high-hardness ceramic material through a relatively difficult micro-floating flow path, which minimizes tool damage and enables rapid processing, as well as lowering brittleness to the surface to be processed to prevent cracking. It is an object of the present invention to provide an air-floating ceramic linear stage capable of maximizing the completeness of a device with precise processability by coating a wax and a method of manufacturing a ceramic slider applied thereto.

An aspect of the present invention relates to an air-floating linear stage made of alumina, zirconia, and silicon nitride-based ceramic, comprising: a ceramic base having a predetermined size; One or more ceramic guides fixedly mounted on the top of the base; It consists of a ceramic slide floating on the guide and linearly reciprocating, wherein the base, the guide and the slide are integrally formed with a plurality of screw holes so that an insert nut for guiding other auxiliary members required for operation to be mounted is coupled, The slide is arranged in a plurality of supply passages through which high-pressure and low-speed air is supplied from the outside, and is arranged in plurality to communicate with the supply passage, and the slide is converted and discharged into low-pressure high-speed air toward a contact surface meshing with the guide so as to be in contact with the guide. A floating channel with a diameter of 0.5 mm or less to float is integrally formed, and a fastening screw for coupling a hose joint member is integrally formed on the inner surface of the supply channel, and from the inside to the outside to prevent cracks at the edge of the floating channel. It is characterized in that the inclined or curved surface that has been expanded to is integrally formed.

Another aspect of the present invention relates to a method of manufacturing a ceramic slide of an air-floating linear stage, comprising: a preparatory process of compressing ceramic powder to form a slide shape; A firing step of sintering the slide at a predetermined temperature; A polishing step of polishing the slide to a predetermined size; A flow path processing step of forming a supply path through which air is supplied to the slide; And an orifice processing step of forming a floating passage through which air is discharged in communication with the supply passage in the slide.

At this time, in the flow path processing process according to the present invention, a feed channel is formed by drilling with a twist-type tungsten carbide drill bit having an outer diameter corresponding to the fastening end of the hose joint member, and then a cutter having an outer diameter smaller than the inner diameter of the feed channel. It is characterized in that a fastening screw is formed on the inner surface of one end of the feed channel to the bit.

In addition, the cutter bit according to the present invention, a cutter shaft having a diameter smaller than the inner diameter of the supply passage; A cutter blade protruding in a direction perpendicular to the lower end of the cutter shaft and having the same cross-sectional shape as the thread of the fastening end; is formed integrally, the cutter blade is formed as a single unit, or in the same number as the thread of the fastening end It is characterized in that it is formed in multiple stages.

In addition, while the cutter bit according to the present invention rotates in the axial direction while entering the center of the supply passage at a predetermined depth, it approaches the inner surface of the supply passage and revolves in the opposite direction of the helix equal to the pitch of the fastening end. It is characterized in that the fastening screw is formed in the process of advancing.

In addition, the nozzle processing process according to the present invention is a twist-type diamond drill bit having an outer diameter corresponding to the diameter of the floating channel and having a thickness of at least 12 μm or more coated with a chemical vapor deposition method (CVD) to communicate with the supply channel. It is characterized in that it is perforated.

In addition, in the nozzle processing process according to the present invention, after rotating the diamond drill bit at 8000 RPM, the diamond drill bit is 1 mm from the surface of the slide along with the position where the floating flow path is to be formed at the origin where the diamond drill bit is located. Move the diamond drill bit at the maximum speed to the processing point spaced apart from the above, lower the diamond drill bit to a depth of 0.01 mm at a movement speed of 3 mm per minute, then return to the processing point at a movement speed of 10 mm per minute, and move to a movement speed of 3 mm per minute again. The process of descending to a depth of 0.02 mm increased or decreased by 0.01 mm from the depth point is repeated, but further descends 3 mm or more from the depth communicated with the injection passage and drilled.

In addition, the nozzle processing process according to the present invention comprises forming a floating channel in communication with the supply channel with the diamond drill bit, and then cutting the edge of the floating channel at an angle with a chamfer bit or a fillet bit to be chamfered into an inclined or curved surface. It features.

In addition, the nozzle processing process according to the present invention is to prevent cracking by lowering brittleness to the surface of the slide on which the floating channel is to be formed or the inner surface of the injection channel to which the floating channel is to be communicated, before drilling the floating channel with the diamond drill bit. It is characterized by coating a wax.

In addition, the wax according to the present invention is characterized in that coating to a thickness of 2.0 mm or more.

The present invention is made of ceramic, which is a high-hardness material having excellent wear resistance, corrosion resistance, and heat resistance, so that excellent precision and stability can be secured, as well as high lifespan and superior quality.

In addition, in the present invention, the orifice micro-floating flow path that induces the floatation by accelerating the flow rate of air is integrally formed, so that the process of manufacturing and combining the orifice brass member with a separate fine hole perforated can be omitted, thus reducing the overall manufacturing process. And there is an effect that can reduce labor.

In addition, in the present invention, the fastening screw is integrally formed in the supply flow path through which air is supplied, so that a tight coupling is possible compared to the adhesive joint method that directly connects the air hose. It works.

In addition, the present invention applies a cutting method that is optimized for high-hardness ceramic material through a relatively difficult micro-floating flow path, which minimizes tool damage and enables rapid processing, as well as lowering brittleness to the surface to be processed to prevent cracking. By coating the wax, there is an effect that can maximize the completeness of the device with precise processability.

In addition to the above-described effects, specific effects of the present invention will be described together while describing specific details for carrying out the present invention.

1 is a perspective view showing an overall linear stage according to the present invention.
2 is a detailed view showing an enlarged main part of the linear stage according to the present invention.
3 to 11 are configuration diagrams showing a process of manufacturing a linear stage according to the present invention.

Hereinafter, various embodiments of the present document will be described with reference to the accompanying drawings. However, this is not intended to limit the techniques described in this document to specific embodiments, and it should be understood to include various modifications, equivalents, and/or alternatives of the embodiments of this document. In connection with the description of the drawings, similar reference numerals may be used for similar elements.

In addition, expressions such as "first," "second," etc. used in this document can modify various elements regardless of their order and/or importance, and to distinguish one element from other elements. It is used only and does not limit the components. For example, the'first part' and the'second part' may represent different parts regardless of order or importance. For example, without departing from the scope of the rights described in this document, a first component may be referred to as a second component, and similarly, a second component may be renamed to a first component.

In addition, terms used in this document are only used to describe a specific embodiment, and may not be intended to limit the scope of other embodiments. Singular expressions may include plural expressions unless the context clearly indicates otherwise. Terms used herein, including technical or scientific terms, may have the same meaning as commonly understood by one of ordinary skill in the technical field described in this document. Among the terms used in this document, terms defined in a general dictionary may be interpreted as having the same or similar meaning as the meaning in the context of the related technology, and unless explicitly defined in this document, an ideal or excessively formal meaning Is not interpreted as. In some cases, even terms defined in this document cannot be interpreted to exclude embodiments of this document.

One aspect of the present invention relates to an air-floating ceramic linear stage 100, a ceramic base 10 having a predetermined size as shown in FIG. 1, one or more ceramic guides 20 fixedly mounted on the upper end of the base 10, and It is made of a ceramic slide 30 floating on the guide 20 and linearly reciprocating.

The base 10, the guide 20, and the slide 30 are made of a ceramic based on any one of alumina, zirconia, and silicon nitride.

Accordingly, the stage 100 of the present invention has excellent wear resistance, corrosion resistance, heat resistance, and insulation.

In addition, when the stage 100 of the present invention is driven, an air layer is generated between the guide 20 and the slide 30 and floats, thereby preventing abrasion of the guide 20 and the slide 30 from the source.

In addition, since particles such as fine dust are not penetrated by the air layer, there is an advantage of maintaining a clean state at all times.

That is, in order to implement the floating of the slide 30 from the guide 20, the slide 30 must be provided with at least one supply channel 31 and the floating channel 35 as shown in FIG. 2.

The supply passage 31 is a hole having a diameter of 2.0 mm or more that receives high-pressure, low-velocity air from the outside, and serves to branch air into a plurality of floating passages 35 communicated therewith.

The floating passage 35 is an orifice hole having a diameter of 0.5 mm or less, which is arranged in plurality in communication with the supply passage 31 toward a contact surface engaged with the guide 20.

That is, the floating passage 35 converts and discharges the air supplied to the supply passage 31 into low-pressure, high-speed air to float the slide 30 in a non-contact state with the guide 20.

At this time, a fastening screw 32 for coupling the hose joint member N is integrally formed on the inner surface of one end of the supply passage 31.

In addition, an inclined surface 36 or a curved surface 37 extending from the inside to the outside to prevent cracking is integrally formed at the edge of the floating passage 35.

In general, ceramics with high hardness and high brittleness are classified as difficult-to-cut materials.

In the past, it was possible to process a large hole with a diameter of 2.0 mm or more using a diamond electrodeposited drill, but there was a problem that cracks occurred during threading.

In addition, fine holes of 1.0 mm or less lack the amount of diamond electrodeposited on the drill, making it difficult to precisely drill holes.

Therefore, there has been a problem in that it is difficult to maintain airtightness because the hose to which air is supplied has to be directly connected to the supply passage 31 using an adhesive.

In addition, the floating passage 35 was also drilled with a diameter of 2.0 mm or more, like the supply passage 31, and then a separate orifice metal member having a hole of 0.5 mm or less in diameter was combined.

However, there is a disadvantage that brass materials with relatively low hardness have to be applied to drill fine holes in metal members as well.

Therefore, when a brass member with low durability is exposed to high-pressure air for a long time, the micro-holes expand, making it difficult to implement correct air injury.

On the other hand, in the present invention, the fastening screw 32 may be integrally formed on the inner surface of one end of the supply passage 31 through the manufacturing method described later.

Therefore, as the hose can be closely coupled by the hose joint member (N), assembly is convenient and the hose is easily detached.

In addition, according to the present invention, a floating passage 35 having a diameter of 0.5 mm or less can be precisely integrally formed through a manufacturing method described later.

Therefore, the process of manufacturing and combining a separate orifice metal member can be omitted.

Above all, the slide 30 itself is made of high-hardness ceramic, and the inclined surface 36 or the curved surface 37 is formed at the edge of the floating passage 35 to prevent cracks, so that a high lifespan can be expected without separate maintenance. have.

On the other hand, the stage 100 of the present invention requires the installation of other equipment or auxiliary members in order to achieve the purpose through linear reciprocating motion.

Conventionally, in order to screw-fasten such an auxiliary member, a hole is drilled into a portion where the auxiliary member is to be mounted, and then a cylindrical nut having a screw formed on the inner surface is bonded or forced-fitting.

That is, although it is possible to screw-fasten the auxiliary member due to the inserted nut, there is a problem in that it is difficult to maintain the stable coupling of the auxiliary member as the nut is bonded by adhesion or force fitting.

However, according to the present invention, the screw hole 102 having a spiral formed in the base 10 to the slider 30 to which the auxiliary member is to be mounted may be integrally formed through the flow path processing step S40 to be described later.

Therefore, it is possible to ensure a stable coupling of the auxiliary member as it is possible to screw-fasten the insert nut 101 having both internal and external threads formed thereon.

Another aspect of the present invention relates to a method of manufacturing the ceramic slide 30 of the air-floating linear stage 100 as shown in FIG. 1, a preparation process (S10), a firing process (S20), a polishing process (S30), a flow path This is a method of manufacturing a ceramic slide through a processing step (S40) and an orifice processing step (S50).

First, the preparation step (S10) according to the present invention is a process of compressing the ceramic powder to form a slide 30 shape.

That is, a ceramic powder based on any one of alumina, zirconia, and silicon nitride is introduced into a mold having a core in the shape of a slide 30 and compression-molded.

Here, a binder may be mixed with the ceramic powder to maintain the shape, but since the shrinkage rate increases due to evaporation of the binder in the firing step (S20), it is preferable to dry compression molding only with the ceramic powder.

And the firing process (S20) according to the present invention is a process of baking the compression-molded slide 30 at high temperature and sintering it.

That is, the slide 30 is placed in an oven and heated to a temperature of 1400° C. or higher, and the structure is grown to be aggregated in a dense state, and heat-treated into a metastable polycrystal.

Subsequently, the polishing step S30 according to the present invention is a process of polishing the sintered slide 30 to a predetermined size.

That is, by using a diamond electrodeposition drill bit, the slide 30 is polished to the design condition of the surface roughness and shape.

Subsequently, the flow path processing step S40 according to the present invention is a process of forming the supply flow path 31 through which air is supplied to the polished slide 10 as shown in FIG. 2.

Here, the supply passage 31 is a hole having a diameter of 2.0 mm or more through which high-pressure and low-speed air is supplied from the outside as described above.

A fastening screw 32 is formed on an inner surface of one end of the supply passage 31, and a hose joint member N for inducing the detachment of the hose is coupled to the fastening screw 32.

That is, as shown in FIG. 3, the slide 30 is drilled while the cutting oil is sprayed with the twisted tungsten carbide drill bit 40 having an outer diameter corresponding to the fastening end of the hose joint member N to form the supply passage 31 do.

In addition, as shown in FIGS. 4 and 5, a fastening screw 32 is formed on the inner surface of one end of the supply passage 31 with a cutter bit 45 having an outer diameter smaller than the inner diameter.

At this time, the cutter bit 45 protrudes in a direction perpendicular to the lower end of the cutter shaft 45a having a diameter smaller than the inner diameter of the supply passage 31 and the cutter shaft 45a, and has the same cross-sectional shape as the thread of the fastening end. It is formed with a vibrating cutter blade (45b).

Here, the cutter blade 45b may be formed as a single unit as shown in FIG. 4, and although not shown in a separate drawing, it may be formed in multiple stages with the same number of threads at the fastening end.

That is, while rotating at a predetermined RPM, the cutter bit 45 enters the center of the supply passage 31 by the length of the fastening end.

In this state, as shown in FIG. 5, the cutter bit 45 approaches the inner surface of the supply passage 31, and the cutter blade 45b cuts it by the height of the thread of the fastening end.

At the same time as the cutting starts, it revolves counterclockwise along the inner surface of the supply passage 31 in the opposite direction of the helix equal to the pitch of the fastening end and advances to the outside.

Upon completion of this processing process, the fastening screw 32 is integrally formed on the inner surface of the supply passage 31.

As an example, when the fastening end of the hose joint member (N) is made of 10 threads and the cutter blade (45b) is formed as a single unit, the cutter bit (45) is counterclockwise along the inner surface of the supply passage (31). Turns 10 times.

As another example, when the fastening end of the hose joint member (N) is made of 10 threads, and 10 cutter blades (45b) are formed in multiple stages, the cutter bit (45) is counterclockwise along the inner surface of the supply passage (31). It revolves once.

That is, the single cutter blade 45b has a slower processing speed than the multi-stage cutter blade 45b, but has a low cutting load, so the life of the cutter bit 45 is long.

On the other hand, the multi-stage cutter blade 45b has a higher processing speed than the single cutter blade 45b, but the cutting load is high and the life of the cutter bit 45 is short.

In some cases, those skilled in the art can selectively apply it in consideration of the manufacturing cost according to the processing speed and the cost according to the tool replacement.

Finally, the orifice processing step (S50) according to the present invention is a process of forming a floating passage 35 through which air is discharged by communicating with the supply passage 31 in the slide 30 as shown in FIG. 2.

Here, the floating passage 35 is an orifice hole having a diameter of 0.5 mm or less arranged in plurality in communication with the supply passage 31 toward a contact surface engaged with the guide 20 as described above.

An inclined surface 36 or a curved surface 37 extending from the inside to the outside to prevent uniformity is integrally formed at the edge of the floating passage 35.

That is, while cutting oil is injected into the twist-type diamond drill bit 50 having an outer diameter corresponding to the diameter of the floating passage 35 as shown in FIG. 6A, the drilling is performed in communication with the supply passage 31.

Here, in the diamond drill bit 50, a diamond layer 51 having a thickness of 12 μm or more is coated by a chemical vapor deposition method (CVD).

This diamond drill bit 50 is made of a twist, and the chip discharge is smooth compared to the conventional cylindrical diamond electrodeposited drill, so that the processing precision is excellent.

However, the twist-type diamond drill bit 50 has fewer diamond-coated areas where actual cutting friction occurs compared to an electrodeposited drill, so that the diameter and depth that can be processed are limited.

Therefore, it is not possible to process the floating passage 35 of 0.5 mm or less by applying the twist-type diamond drill bit 50 as a general drilling method.

That is, in order to increase the processing speed while forming the floating passage 35 of 0.5 mm or less in the slide 30 made of high-hardness ceramic, a processing process under the following conditions is required.

First, as shown in FIG. 6A, a position spaced by 1.0 mm or more from the surface of the slide 30 together with the XY coordinates where the floating passage 35 is to be formed is selected as the processing point P.

Then, the diamond drill bit 50 is rotated at 8000 RPM, and then the diamond drill bit 50 is moved from the machine origin to the selected machining point P at the maximum speed of the machine.

Subsequently, the diamond drill bit 50 is lowered to a depth of 0.01 mm at a moving speed of 3 mm per minute as shown in FIG. 6B, and returned to the processing point P at a moving speed of 10 mm per minute as shown in FIG. 6A.

And, as shown in Fig. 7a, it descends to a depth of 0.02 mm, which is increased or decreased by 0.01 mm from the previous depth point at a moving speed of 3 mm per minute, and returns to the processing point P at a moving speed of 10 mm per minute as shown in Fig. 7B.

Subsequently, as shown in FIG. 8A, it descends to a depth of 0.03 mm, which is increased or decreased by 0.01 mm from the previous depth point at a moving speed of 3 mm per minute, and returns to the processing point P at a moving speed of 10 mm per minute as shown in FIG. 8B.

By continuously repeating this process, as shown in FIG. 9, the processing is further lowered by 3 mm or more from the depth in communication with the injection passage 31.

Therefore, as the diamond drill bit 50 is sequentially cut to a depth of 0.01 mm, and the cutting chips are discharged while returning to the externally selected processing point P, the floating channel 35 with a diameter of 0.5 mm or less can be precisely formed. have.

At this time, when the processing of the floating channel 35 communicating with the supply channel 31 to the diamond drill bit 50 is completed, the chamfer bit 52 of FIG. 10A or the fillet bit of FIG. 10B is at the edge of the floating channel 35 Cut diagonally with (53).

Accordingly, the edge of the floating passage 35 is chamfered with the inclined surface 36 at a predetermined angle or the curved surface 37 with a predetermined radius of curvature, thereby preventing cracks at the edge with high brittleness.

Meanwhile, in the orifice processing step S50 according to the present invention, before drilling the floating passage 35 with the diamond drill bit 50, a process of coating the wax 55 as shown in FIG. 11 is performed.

That is, the wax 55 is coated on the surface of the slide 30 on which the floating channel 35 is to be formed as shown in FIG. 11A or the inner surface of the injection channel 31 to which the floating channel 35 is to be communicated, as shown in FIG. 11B.

Here, the wax 55 is a paraffinic having a melting point of 70° C. or higher, and is best coated with a thickness of 0.5 mm or more, preferably 2.0 mm or more.

The wax 55 serves to prevent cracks occurring during processing by supporting the processing portion where the floating passage 35 is to be formed to reduce brittleness.

In the above, preferred embodiments of the present invention have been illustrated and described, but the present invention is not limited to the specific embodiments described above, and is not departing from the gist of the present invention claimed in the claims. Of course, various modifications may be implemented by those skilled in the art, and these modified embodiments should not be individually understood from the technical spirit or perspective of the present invention.

P: machining point
N: hose joint member
10: base
20: guide
30: slide
31: supply flow
32: fastening screw
35: injury euro
36: slope
37: curved surface
40: tungsten carbide drill bit
45: cutter bit
45a: cutter shaft
45b: cutter blade
50: diamond drill bit
51: diamond layer
52: chamfer bit
53: fillet bit
55: wax
100: linear stage
101: insert nut
102: screw hole
S10: Preparation process
S20: firing process
S30: Polishing process
S40: Euro processing process
S50: Orifice processing process

Claims (10)

delete In the method of manufacturing the ceramic slide 30 of the air-floating linear stage 100,
Preparing step (S10) of compressing the ceramic powder to form a slide 30 shape;
A firing step (S20) of sintering the slide 30 at a predetermined temperature;
A polishing step (S30) of polishing the slide 30 to a predetermined size;
A flow path processing step (S40) of forming a supply flow path 31 through which air is supplied to the slide 30;
An orifice processing step (S50) of forming a floating passage 35 through which air is discharged by communicating with the supply passage 31 to the slide 30;
Including,
The flow path processing step (S40),
After drilling with a twist-type tungsten carbide drill bit 40 having an outer diameter corresponding to the fastening end of the hose joint member N to form a supply passage 31, the outer diameter of which is smaller than the inner diameter of the supply passage 31 It is characterized in that a fastening screw 32 is formed on the inner surface of one end of the supply passage 31 with the cutter bit 45,
The cutter bit 45,
A cutter shaft (45a) having a diameter smaller than the inner diameter of the supply passage (31);
A cutter blade 45b protruding in a direction perpendicular to the lower end of the cutter shaft 45a and having the same cross-sectional shape as the thread of the fastening end; is integrally formed,
The cutter blade (45b) is characterized in that it is formed as a single unit, or is formed in multiple stages with the same number of threads of the fastening end,
While the cutter bit 45 enters the center of the supply passage 31 at a predetermined depth and rotates in the axial direction, it approaches the inner surface of the supply passage 31 and revolves in the opposite direction of the helix equal to the pitch of the fastening end. And characterized in that the fastening screw 32 is formed in the process of advancing to the outside,
The orifice processing step (S50),
A diamond layer 51 having an outer diameter corresponding to the diameter of the floating channel 35 and having a thickness of at least 12 μm is coated with a chemical vapor deposition method (CVD) to the twist-type diamond drill bit 50 with the supply channel 31 and Characterized in that it is perforated to communicate,
The orifice processing step (S50),
After rotating the diamond drill bit 50 at 8000 RPM, the diamond drill bit 50 along with the position where the floating passage 35 is to be formed at the origin where the diamond drill bit 50 is located is located on the surface of the slide 30 Move at the maximum speed to the machining point (P) separated by more than 1mm from
The diamond drill bit 50 is lowered to a depth of 0.01 mm at a moving speed of 3 mm per minute, and then returned to a moving speed of 10 mm per minute to the processing point P, and 0.01 mm from the previous depth point at a moving speed of 3 mm per minute Repeat the process of descending to the increased or decreased 0.02㎜ depth,
It is characterized in that the drilling is further lowered by 3 mm or more from the depth communicating with the supply passage 31,
The orifice processing step (S50),
After forming the floating flow path 35 in communication with the supply flow path 31 through the diamond drill bit 50, the edge of the floating flow path 35 is obliquely cut with a chamfer bit 52 or a fillet bit 53 It is characterized in that it is chamfered with an inclined surface 36 or a curved surface 37,
The orifice processing step (S50),
Before drilling the floating channel 35 with the diamond drill bit 50, the surface of the slide 30 on which the floating channel 35 will be formed or the inner surface of the supply channel 31 to which the floating channel 35 will communicate A method of manufacturing a ceramic slide for an air-floating linear stage, characterized in that coating with wax (55) to reduce brittleness to prevent cracking. delete delete delete delete delete delete delete delete

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