KR102088869B1 - 광학적 위치 측정 장치 - Google Patents

광학적 위치 측정 장치 Download PDF

Info

Publication number
KR102088869B1
KR102088869B1 KR1020140126684A KR20140126684A KR102088869B1 KR 102088869 B1 KR102088869 B1 KR 102088869B1 KR 1020140126684 A KR1020140126684 A KR 1020140126684A KR 20140126684 A KR20140126684 A KR 20140126684A KR 102088869 B1 KR102088869 B1 KR 102088869B1
Authority
KR
South Korea
Prior art keywords
scanning
optical
measuring device
position measuring
scanning beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020140126684A
Other languages
English (en)
Korean (ko)
Other versions
KR20150040744A (ko
Inventor
볼프강 닥터. 홀자펠
요르그 닥터. 드레셔
로버트 닥터. 켈르너
마커스 닥터. 마이스너
Original Assignee
덕터 요한네스 하이덴하인 게엠베하
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 덕터 요한네스 하이덴하인 게엠베하 filed Critical 덕터 요한네스 하이덴하인 게엠베하
Publication of KR20150040744A publication Critical patent/KR20150040744A/ko
Application granted granted Critical
Publication of KR102088869B1 publication Critical patent/KR102088869B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
KR1020140126684A 2013-10-07 2014-09-23 광학적 위치 측정 장치 Active KR102088869B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102013220184.2 2013-10-07
DE102013220184 2013-10-07

Publications (2)

Publication Number Publication Date
KR20150040744A KR20150040744A (ko) 2015-04-15
KR102088869B1 true KR102088869B1 (ko) 2020-03-16

Family

ID=51541018

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020140126684A Active KR102088869B1 (ko) 2013-10-07 2014-09-23 광학적 위치 측정 장치

Country Status (8)

Country Link
US (1) US9410797B2 (https=)
EP (1) EP2857802B1 (https=)
JP (1) JP6320267B2 (https=)
KR (1) KR102088869B1 (https=)
CN (1) CN104515468B (https=)
DE (1) DE102014218623A1 (https=)
ES (1) ES2604157T3 (https=)
TW (1) TWI627379B (https=)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013220214A1 (de) 2013-10-07 2015-04-09 Dr. Johannes Heidenhain Gmbh Anordnung zur Positionierung eines Werkzeugs relativ zu einem Werkstück
US9829409B2 (en) * 2015-04-28 2017-11-28 Sumix Corporation Interferometric measurement method for guide holes and fiber holes parallelism and position in multi-fiber ferrules
DE102016200847A1 (de) 2016-01-21 2017-07-27 Dr. Johannes Heidenhain Gesellschaft Mit Beschränkter Haftung Optische Positionsmesseinrichtung
DE102017209093A1 (de) * 2017-05-31 2018-12-06 Osram Gmbh Lichtleiteranordnung für ein mobiles kommunikationsgerät zur optischen datenübertragung, mobiles kommunikationsgerät und verfahren zur optischen datenübertragung
DE102017213330A1 (de) * 2017-08-02 2019-02-07 Dr. Johannes Heidenhain Gmbh Abtastplatte für eine optische Positionsmesseinrichtung
JP7060370B2 (ja) 2017-12-18 2022-04-26 株式会社ミツトヨ スケールおよびその製造方法
FR3090904B1 (fr) * 2018-12-19 2021-02-19 Office National Detudes Rech Aerospatiales Composant optique monolithique a plusieurs voies
DE102019210023A1 (de) * 2019-07-08 2021-01-14 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
CN117128851A (zh) * 2022-05-20 2023-11-28 上海微电子装备（集团）股份有限公司 位置测量装置、位置测量方法以及光刻设备
JP2025536142A (ja) * 2022-11-10 2025-10-31 エーエスエムエル ネザーランズ ビー．ブイ． 位置測定システム及びリソグラフィ装置
CN115900782B (zh) * 2022-12-30 2025-05-27 四川云盾光电科技有限公司 一种绝对式测角装置及方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120032067A1 (en) * 2010-06-09 2012-02-09 Nikon Corporation Two dimensional encoder system and method

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6249626B1 (en) * 1998-03-06 2001-06-19 Lucent Technologies, Inc. Multimode fiber optical power monitoring tap for optical transmission systems
DE10235669B4 (de) * 2002-08-03 2016-11-17 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
JP2005147828A (ja) * 2003-11-14 2005-06-09 Mitsutoyo Corp 変位検出装置
DE102005029917A1 (de) 2005-06-28 2007-01-04 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102005043569A1 (de) * 2005-09-12 2007-03-22 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US7602489B2 (en) 2006-02-22 2009-10-13 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7483120B2 (en) 2006-05-09 2009-01-27 Asml Netherlands B.V. Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method
JP2008098604A (ja) * 2006-09-12 2008-04-24 Canon Inc 露光装置及びデバイス製造方法
DE102006042743A1 (de) * 2006-09-12 2008-03-27 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US20080079920A1 (en) * 2006-09-29 2008-04-03 Heiko Hommen Wafer exposure device and method
DE102008007319A1 (de) * 2008-02-02 2009-08-06 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
JP5602420B2 (ja) 2009-12-10 2014-10-08 キヤノン株式会社 変位測定装置、露光装置、及び精密加工機器
US20130001412A1 (en) * 2011-07-01 2013-01-03 Mitutoyo Corporation Optical encoder including passive readhead with remote contactless excitation and signal sensing
DE102013203211A1 (de) * 2012-06-15 2013-12-19 Dr. Johannes Heidenhain Gmbh Vorrichtung zur interferentiellen Abstandsmessung

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120032067A1 (en) * 2010-06-09 2012-02-09 Nikon Corporation Two dimensional encoder system and method

Also Published As

Publication number Publication date
EP2857802A2 (de) 2015-04-08
KR20150040744A (ko) 2015-04-15
DE102014218623A1 (de) 2015-04-09
TW201527712A (zh) 2015-07-16
US9410797B2 (en) 2016-08-09
JP6320267B2 (ja) 2018-05-09
TWI627379B (zh) 2018-06-21
CN104515468B (zh) 2018-04-10
JP2015075486A (ja) 2015-04-20
EP2857802B1 (de) 2016-09-14
EP2857802A3 (de) 2015-07-01
CN104515468A (zh) 2015-04-15
US20150098090A1 (en) 2015-04-09
ES2604157T3 (es) 2017-03-03

Similar Documents

Publication Publication Date Title
KR102088869B1 (ko) 광학적 위치 측정 장치
US7471397B2 (en) Position-measuring device
EP1887324B1 (en) Fiber-optic miniature encoder for fine pitch scales
JP6524223B2 (ja) 干渉縞投影装置及び計測装置
US8822907B2 (en) Optical position-measuring device having two crossed scales
CN104457571B (zh) 光学位置测量装置
US9733069B2 (en) Optical position-measuring device
JP5976390B2 (ja) 位置測定装置
US10060765B2 (en) Optical position-measuring device
JP5343980B2 (ja) エンコーダ
US9068811B2 (en) Device for determining distance interferometrically
JP2012242389A5 (https=)
JP6285808B2 (ja) 干渉計
US7187451B2 (en) Apparatus for measuring two-dimensional displacement
US20140185057A1 (en) Optical Position-Measuring Device
CN102313509A (zh) 光学距离测量装置
JP6586459B2 (ja) 干渉縞投影光学系及び形状測定装置
JP6289609B2 (ja) 干渉式間隔測定装置
CN112882347B (zh) 一种光栅可切换位移测量装置、测量方法及光刻系统
Il'in Orthogonal microlens raster for two-coordinate displacement transducers

Legal Events

Date Code Title Description
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 20140923

PG1501 Laying open of application
A201 Request for examination
A302 Request for accelerated examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20190704

Comment text: Request for Examination of Application

Patent event code: PA02011R01I

Patent event date: 20140923

Comment text: Patent Application

PA0302 Request for accelerated examination

Patent event date: 20190704

Patent event code: PA03022R01D

Comment text: Request for Accelerated Examination

Patent event date: 20140923

Patent event code: PA03021R01I

Comment text: Patent Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20191025

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20200220

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20200309

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20200310

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
PR1001 Payment of annual fee

Payment date: 20240304

Start annual number: 5

End annual number: 5