KR102067999B1 - Vapor deposition apparatus comprising heat elements assembly for easily assembling and dismantling - Google Patents

Abstract

The present invention relates to a vapor deposition apparatus having a heating assembly that is easy to assemble and dismantle. The present invention provides a deposition apparatus including a distribution tube receiving and distributing an evaporation source from an evaporation source, the deposition apparatus including at least two heating modules including a heater, the heating assembly being combined to surround the distribution tube. This provides an advantageous effect of increasing the convenience of maintenance work of the distribution pipe.

Description

Vapor deposition apparatus with heating assembly for easy assembly and disassembly {VAPOR DEPOSITION APPARATUS COMPRISING HEAT ELEMENTS ASSEMBLY FOR EASILY ASSEMBLING AND DISMANTLING}

The present invention relates to a deposition apparatus, and more particularly, to a deposition apparatus having a heating assembly that is easy to assemble and dismantle.

Deposition refers to the phenomenon that atoms, molecules, or particles evaporated in the gaseous state meet the substrate and condense on the surface to a solid state. A deposition apparatus is a series of devices for depositing a deposition material on a substrate to form a thin film. do.

In recent years, an organic electroluminescent element has been manufactured by forming an organic light emitting layer on a substrate under vacuum conditions using a vapor deposition apparatus. Here, organic light emitting diodes (OLEDs) are light injected into an organic light emitting layer formed between an electron injection electrode (cathode) and a hole injection electrode (anode), and electrons and holes are paired and then disappear. It is a display device that emits light.

Such a deposition apparatus has a vacuum chamber and an evaporation source for evaporating a source and supplying it into the vacuum chamber. The substrate is disposed in the vacuum chamber to face the evaporation source.

In addition, the deposition apparatus may be provided with a distribution tube. The distribution tube serves to distribute the supply of the evaporation source so that the evaporation source can be reached over the entire area of the substrate.

On the other hand, it is important to supply thermal energy to the evaporation source so that the evaporation source loses energy and does not cause uneven deposition on the substrate. The distribution pipe is also provided with a heating device for heating the evaporation source inside the distribution pipe.

On the other hand, since the evaporation source is often condensed and deposited in the distribution hole of the distribution pipe and its surroundings, it is necessary to clean the distribution hole of the distribution pipe and its surroundings regularly. Regularly cleaning the distribution tube is a very important maintenance factor in maintaining the deposition efficiency of the deposition apparatus.

To clean the distribution tube. The dismantling of the heating device from the distribution pipe is in progress. However, the conventional distribution pipe and the heating device have a problem that their structures are assembled integrally with each other, so that assembly and disassembly are not easy.

Accordingly, an object of the present invention is to provide a deposition apparatus having an improved heating assembly that can easily perform the maintenance work of the distribution pipe, to solve the above problems.

The present invention for achieving the above object is a deposition apparatus including a distribution pipe for receiving and distributing an evaporation source from an evaporation source, at least two heating modules including a heater is combined to form a heating assembly to surround the distribution pipe It provides a deposition apparatus comprising.

Preferably, the heating element may include at least one of a reflector plate and a heat shield plate.

Preferably, the reflector may be formed outside the heater in the radial direction.

Preferably, the heat shield plate may be formed on the outer side of the reflecting plate in a radial direction.

Preferably, the heating assembly may further include a support for supporting the heating assembly so as to surround the distribution pipe spaced apart.

Preferably, the heating assembly may include a first heating module provided on one side and a second heating module provided on the other side, based on the distribution hole of the distribution pipe.

Preferably, the heating assembly includes a hinge portion connecting the end portions of the first heating module and the second heating module, wherein the first heating module and the second heating module are rotated around the hinge portion. It may be disassembled from the distribution pipe or assembled into the distribution pipe.

Preferably, the heating assembly may be disassembled from the distribution pipe or assembled in the distribution pipe by moving the first heating module and the second heating module in opposite directions.

Preferably, the size of the region surrounding the distribution tube of the first heating module and the size of the region surrounding the distribution tube of the second heating module may be formed differently.

Preferably, the heating assembly may include a third heating module formed at a lower portion of the distribution pipe and a fourth heating module formed at an upper portion of the distribution pipe and provided at one side of the distribution pipe of the distribution pipe. And, it may be composed of a fifth heating module provided on the other side.

According to the vapor deposition apparatus having a heating assembly that is easy to assemble and dismantle according to the present invention, by maintaining a distribution pipe by combining a plurality of heating modules integrally provided with a reflecting plate, a heat shield plate, and a heater, It provides a beneficial effect of increasing the convenience of management work.

In particular, the heating module of the heating assembly surrounding the distribution pipe is opened by a hinge driving method or moved in opposite directions by a linear movement method, thereby disassembling and assembling the heating assembly, thereby making maintenance of the distribution pipe more convenient. There is an advantage to doing it.

In addition, according to the deposition apparatus having a heating assembly that is easy to assemble and dismantle according to the present invention, by providing a heating module that does not form a coupling relationship with the distribution pipe, the distribution hole caused by the disassembly and assembly of the heating assembly This provides an advantageous effect of preventing the deposition conditions from changing due to the change in position.

1 is a view schematically showing a conventional deposition apparatus,
2 and 3 are views for explaining the general form of the distribution pipe and the heating device for heating it shown in FIG.
4 is a view for explaining a heating assembly of a deposition apparatus according to a first embodiment of the present invention,
5 is a view for explaining the heating assembly of the first embodiment assembled and disassembled in a linear movement manner,
FIG. 6 is a view for explaining the heating assembly of the first embodiment assembled and dismantled in a hinge driving manner; FIG.
7 is a view for explaining a heating assembly in which heating regions are differently formed;
8 is a view for explaining a heating assembly of a deposition apparatus according to a second embodiment of the present invention;
9 is a view for explaining the heating assembly of the second embodiment assembled and disassembled in a linear movement manner,
FIG. 10 is a view for explaining the heating assembly of the second embodiment which is assembled and dismantled in a hinge driving manner.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. First of all, in adding reference numerals to the components of each drawing, it should be noted that the same reference numerals have the same reference numerals as much as possible even if displayed on different drawings. In addition, preferred embodiments of the present invention will be described below, but the technical spirit of the present invention is not limited thereto, but may be variously modified and modified by those skilled in the art.

1 is a view schematically showing a conventional deposition apparatus, Figures 2 and 3 are views for explaining the general form of the distribution pipe and the heating device for heating it shown in FIG.

Referring to FIG. 1, the illustrated deposition apparatus comprises a distribution tube 3 in a vacuum chamber 4. The distribution pipe 3 is connected to the evaporation source 1 and the induction pipe 2 to receive an evaporation source. The distribution pipe 3 is configured in a linear manner, and the plurality of distribution holes 3a are arranged upward in the longitudinal direction. Two or more distribution pipes 3 may be provided in the vacuum chamber 4 by being formed in parallel according to a deposition method. The substrate S is arranged above this distribution tube 3.

2 and 3, the distribution pipe 3 is formed in a long cylindrical shape in the longitudinal direction, it can be seen that the heating device 10 is coupled to surround the distribution pipe (3).

That is, as a coupling configuration of the distribution pipe 3 and the heating device 10, a coupling block 3b for coupling with the heating device 10 is formed to protrude from the circumference of the distribution pipe 3. Further, the insulating support block 14-the heater 11-the insulating support block 14-the reflecting plate 12 to the coupling block 3b through a coupling member such as a bolt. The heat shield plate 13 is configured to sequentially engage in the radial direction.

As described above, the distribution pipe 3 and the heating device 10 that are generally configured have a distribution pipe because the elements constituting the heating device 10 are directly coupled to the distribution pipe 3 through coupling members such as bolts, respectively. When cleaning (3), the disassembly and assembly work of the heating apparatus 10 will increase. Considering that the maintenance work of the distribution pipe 3 is performed regularly, such assembling and dismantling of the heating device 10 has a very troublesome problem.

In addition, during the disassembly and assembling work for the heating device 10, there is a high risk that the distribution pipe 3 is moved to change the position of the distribution hole 3a. Since the position of the distribution hole 3a corresponds to an important deposition condition, when the position of the distribution hole 3a is changed, it is difficult to maintain the homeostasis of the deposition condition.

In addition, as can be specifically confirmed in Figure 3, the coupling block (3b) of the distribution pipe (3) and the innermost insulating support block 14 located in contact with each other is pressed. In this case, the insulating support block 14 made of a ceramic material may stick to the distribution pipe 3.

The present invention, in order to solve this problem arising in the associated configuration of the distribution tube (3) and the heating device 10, by modularizing the elements constituting the heating device to generate heating modules, combining the heating modules in combination Consists of the technical features to facilitate the disassembly and assembly of the heating device. In addition, by coupling the heating assembly to a separate support, there is a technical feature that excludes the direct coupling relationship between the distribution pipe 3 and the heating device.

4 is a view for explaining the heating assembly of the deposition apparatus according to the first embodiment of the present invention.

As such, FIG. 4 clearly illustrates only the main features in order to conceptually clearly understand the present invention, and as a result, various modifications of the drawings are expected, and the scope of the present invention needs to be limited by the specific shapes shown in the drawings. There is no.

Referring to FIG. 4, the heating assembly 200 surrounding and heating the distribution pipe 100 shown in FIG. 4 is based on the distribution hole 110 of the distribution pipe 100. ) And a second heating module 220 formed on the right side. In FIG. 4, two heating modules having a semicircular shape are illustrated, but the present invention is not limited thereto, and the shape and number thereof may vary depending on the shape of the distribution pipe, the position of the distribution hole, and the elements constituting the heating module. It may change.

Here, the heating module refers to a heating device in which a heating element including a heater serving as a heat source (a reflection plate, a heat shield plate, etc. as an added element for increasing the heating efficiency and heating) is integrally formed and moves together.

Looking specifically at the heating elements constituting the first heating module 210 and the second heating module 220, the heater (211,221) for heating the distribution pipe 100, and the heater (211,221) in the direction of the distribution pipe 100 And reflecting plates 212 and 222 for reflecting heat, and shielding plates 213 and 223 for preventing heat from the heaters 211 and 221 to be discharged to the outside.

The heaters 211 and 221 are configured in the form of a coil so as to surround the outer surface of the distribution pipe 100. Then, the heaters 211 and 221 are formed long in the longitudinal direction along the distribution pipe 100. Meanwhile, the reflecting plates 212 and 222 are spaced apart from the heaters 211 and 221 in the radial direction.

Insulating support blocks 214 and 224 are interposed between the heaters 211 and 221 and the reflecting plates 212 and 222. The insulating support blocks 214 and 224 form a space between the heaters 211 and 221 and the reflecting plates 212 and 222, and support the heaters 211 and 221 and the reflecting plates 212 and 222 integrally.

The heat shield plates 213 and 223 are spaced apart from the reflecting plates 212 and 222 in the radial direction to prevent the heat of the heaters 211 and 221 from being discharged to the outside.

Insulating support blocks 214 and 224 are interposed between the reflecting plates 212 and 222 and the heat shield plates 213 and 223. The insulating support blocks 214 and 224 form a space between the reflecting plates 212 and 222 and the heat shielding plates 213 and 223, and are integrally fixed to the reflecting plates 212 and 222 and the heat shielding plates 213 and 223.

Meanwhile, in addition to the insulating support blocks 214 and 224, the heaters 211 and 221, the reflecting plates 212 and 222, and the heat shielding plates 213 and 223 may be additionally coupled to each other.

The external shapes of the above-described heaters 211 and 221, the reflecting plates 212 and 222 and the heat shielding plates 213 and 223 are formed to correspond to the circumferences of the reflecting plates 212 and 222.

4, as an element of the heating module. Although the reflection plates 212 and 222 including the heaters 211 and 221, the heat shield plates 213 and 223, and the insulating support blocks 214 and 224 are illustrated, and the sequential coupling relationship is illustrated, the present invention is not limited thereto. Various supporting elements for adding or preventing the transfer of heat or dissipating heat can be added and modified in various forms.

On the other hand, as shown in Figure 5 to be described later, the first heating module 210 and the second heating module 220 is fixed by a separate support 300. It is formed apart from the distribution pipe (100). The support part 300 is connected to the heat shield plates 213 and 223 positioned at the outermost sides of the first heating module 210 and the second heating module 220, and is coupled to a base (not shown) that supports the distribution pipe 100. Can be.

As such, the first heating module 210 and the second heating module 220 coupled to the support 300 do not form a direct coupling relationship with the distribution pipe 100. Thus, during the assembly or disassembly of the heating assembly 200, the distribution pipe 100 is moved to prevent the position of the distribution hole 100 from being changed.

Hereinafter, the assembling and disassembling process of the first heating module 210 and the second heating module 220 and the distribution pipe 100 will be described with reference to FIGS. 5 and 6.

FIG. 5 is a view for explaining the heating assembly of the first embodiment assembled and disassembled in a linear movement method.

The heating assembly 200 illustrated in FIG. 5 is disassembled from the distribution pipe 100 by moving away from each other by linearly moving the first heating module 210 and the second heating module 220. On the contrary, the first heating module 210 and the second heating module 220 are assembled with the distribution pipe 100 by linearly moving with the distribution pipe 100 interposed therebetween.

The support part 300 may be slidably coupled to a base member (not shown) supporting the distribution pipe 100 so that the first heating module 210 and the second heating module 220 can be linearly moved. In addition, the support part 300 may be formed to be mutually coupled or separated in a ratchet manner.

As described above, with reference to FIG. 5, the method of assembling and disassembling the heating assembly 200 is illustrated, but the present invention is not limited thereto, and heating modules constituting the heating assembly 200 are linearly moved away from each other or close to each other. If the heating assembly 200 is assembled or dismantled in the distribution pipe 100, the configuration of the distribution pipe 100, the number and shape of the heating module, various modifications according to the support structure of the distribution pipe 100, etc. It may be.

FIG. 6 is a view for explaining a heating assembly dismantled from the distribution pipe shown in FIG. 4 by a hinge driving method.

The heating assembly 200 illustrated in FIG. 6 is disassembled from the distribution pipe 100 by opening the first heating module 210 and the second heating module 220 about the hinge 400. On the contrary, the first heating module 210 and the second heating module 220 are assembled with the distribution pipe 100 by being collected around the hinge 400.

The hinge part 400 is formed to connect lower ends of the first heating module 210 and the second heating module 220. In addition, the hinge part 400 is formed to be long in the longitudinal direction of the first heating module 210 and the second heating module 220. Although not shown, the rotation axis of the hinge 400 may be rotatably coupled to a base member (not shown) supporting the distribution pipe 100.

In addition, the first heating module 210 and the second heating module 220 are not opened while the first heating module 210 and the second heating module 220 are assembled to surround the distribution pipe 100. Fixing means for preventing the rotation of the hinge portion 400 may be provided separately.

As described above, with reference to FIG. 6, the method of assembling and disassembling the heating assembly 200 is illustrated, but the present invention is not limited thereto, and heating modules constituting the heating assembly 200 may include at least one hinge unit 400. Rotate around the assembly, if assembled to the distribution pipe 100, or disassembled in the distribution pipe 100, the configuration of the distribution pipe 100, the number and shape of the heating module, the support structure of the distribution pipe 100, etc. According to the present invention, various modifications may be made.

FIG. 7 is a heating assembly illustrated in FIG. 4 and illustrates a heating assembly in which heating regions are differently formed.

On the other hand, the plurality of heating modules constituting the heating assembly 200, each may be formed to be different in size. If the heating module is formed in a different size, the heating area for the distribution pipe 100 is also different.

As shown in FIG. When the central axis N of the distribution hole 110 of the distribution pipe 100 is inclined based on the vertical axis C, the first heating module 210 surrounds the circumference of the distribution pipe 100 (H1). The size of the second heating module 220 and the size of the range (H2) surrounding the circumference of the distribution pipe 100 may be formed differently. Here, the vertical axis C is a virtual extension line passing through the center of the distribution pipe 100 and means a line orthogonal to the substrate.

In FIG. 7, the heating area of the second heating module 220 for the distribution pipe 100 is larger than the heating area of the first heating module 210.

8 is a view for explaining a heating assembly of a deposition apparatus according to a second embodiment of the present invention.

As such, FIG. 8 clearly shows only the main features in order to conceptually clearly understand the present invention, and as a result, various modifications of the drawings are expected, and the scope of the present invention needs to be limited by the specific shapes shown in the drawings. There is no.

Referring to FIG. 8, the heating assembly 200 that surrounds and heats the illustrated distribution pipe 100 includes a third heating module 230 formed below the distribution pipe 100 and a distribution pipe 100. The fourth heating module 240 is formed at the upper side and is formed at the left side based on the distribution hole 110 of the distribution pipe 100, and the fifth heating module 250 is formed at the right side.

In the heating assembly 200 shown in FIG. 8, all three heating modules are configured. The third heating module 230 shown in FIG. 8 is fixed, and the fourth heating module 240 and the fifth heating module 250 are moved to be disassembled from the distribution pipe 100 or assembled in the distribution pipe 100. do.

Same configuration as above. This is a configuration in consideration of the fact that deposition materials are often stuck to the distribution holes 110 and the surroundings of the distribution pipe 100. That is, it is a configuration for disassembling or assembling only the fourth heating module 240 and the fifth heating module 250 surrounding the upper portion of the distribution pipe 100 in which the distribution holes 110 are formed.

The fourth heating module 240 and the fifth heating module 250 are the same as in the first heating module 210 and the second heating module 220 described above. It is configured to be disassembled from the distribution pipe 100 or assembled in the distribution pipe 100 by a linear movement method or a hinge drive method.

FIG. 9 is a view for explaining a heating assembly in which the heating assembly shown in FIG. 8 is disassembled from a distribution tube in a linear movement manner, and FIG. 10 is a heating assembly dismantled from the distribution tube shown in FIG. 8 in a hinge driving manner. It is a figure for explaining.

As shown in FIG. 9, the support parts 300 connected to the fourth heating module 240 and the fifth heating module 250 are slidably respectively provided to a base member (not shown) supporting the distribution pipe 100. Combined.

Meanwhile, as shown in FIG. 10, end portions of the fourth heating module 240 and the fifth heating module 250 are connected to the end portions of the third heating module 230 and the hinge part 300, respectively.

The operation relationship between the fourth heating module 240 and the fifth heating module 250 is the same as the operation relationship between the first heating module 210 and the second heating module 220 described above, a detailed description thereof will be omitted. .

The above description is merely illustrative of the technical idea of the present invention, and those skilled in the art to which the present invention pertains may make various modifications, changes, and substitutions without departing from the essential characteristics of the present invention. will be. Accordingly, the embodiments disclosed in the present invention and the accompanying drawings are not intended to limit the technical spirit of the present invention but to describe the present invention, and the scope of the technical idea of the present invention is not limited by the embodiments and the accompanying drawings. . The protection scope of the present invention should be interpreted by the following claims, and all technical ideas within the scope equivalent thereto should be construed as being included in the scope of the present invention.

100: distribution pipe
110: distribution hole
200: heating assembly
210: first heating module
211,221: heater
212,222: Reflector
213,223: Heat shield plate
220: second heating module
230: third heating module
240: fourth heating module
250: fifth heating module

Claims (7)

A deposition apparatus comprising a distribution tube for receiving and distributing an evaporation source from an evaporation source,
At least two heating modules including a heater are combined to include a heating assembly formed to surround the distribution pipe,
Each heating module includes a heater for heating the distribution pipe, a reflecting plate for reflecting heat of the heater, and a heat shielding plate for preventing heat of the heater from being discharged to the outside,
The heating module is not directly coupled to the distribution pipe,
The at least two heating modules are separated from the distribution pipe by moving or rotating in opposite directions to each other,
And a support for supporting the heating assembly such that the heating assembly surrounds the distribution tube spaced apart. delete According to claim 1,
The heating assembly,
A deposition apparatus comprising a first heating module provided on one side and a second heating module provided on the other side, based on the distribution hole of the distribution pipe. The method of claim 3, wherein
The heating assembly,
A hinge portion connecting end portions of the first heating module and the second heating module, wherein the first heating module and the second heating module are rotated to be disassembled from the distribution pipe or rotated around the hinge portion; Deposition apparatus, characterized in that assembled in. The method of claim 3, wherein
The heating assembly,
And the first heating module and the second heating module move in opposite directions to be disassembled or assembled in the distribution pipe. The method of claim 3, wherein
And a size of a region surrounding the distribution tube of the first heating module and a size of the region surrounding the distribution tube of the second heating module are different from each other. According to claim 1,
The heating assembly,
A third heating module formed at a lower portion of the distribution pipe, a fourth heating module formed at an upper portion of the distribution pipe and provided at one side of the distribution pipe of the distribution pipe, and provided at the other side; Deposition apparatus comprising a heating module.

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