KR102059809B1 - Sensible heat control unit for clean room - Google Patents

Abstract

The present invention relates to a sensible heat control unit for a clean room, which forms a sensible heat control coil, a bypass pipe module and a duct on one frame member in a modular shape, thereby enabling continuous connection without separation from an adjacent module. The sensible heat control coil, the duct and the bypass pipe module can be safely assembled and installed on the frame member.

Description

Clean room sensible heat control unit {SENSIBLE HEAT CONTROL UNIT FOR CLEAN ROOM}

The present invention relates to a clean room sensible heat control unit, and more particularly, by providing the sensible heat control coil, bypass pipe, and duct in a modular form to be installed in the field, to shorten the site construction time and improve the safe working environment. It relates to a clean room sensible heat control unit.

In general, semiconductor manufacturing processes can be divided into wafer FAB (FABrication) process, wafer sorting process, assembly process, inspection and modularization process, and have a very complicated work flow with continuity and manage air quality by volatile organic compounds generated in various processes. This is a very difficult field. In particular, the FAB process has a long process time that takes up more than 80% of the entire process and has a complicated production flow. Therefore, the FAB process is a bottleneck process in the semiconductor plant and a target of production management. The FAB process is performed in a clean room with high cleanliness, and incoming fresh air is supplied to the plenum chamber after being adjusted to a temperature and humidity suitable for semiconductor production.

Meanwhile, in the FAB in the clean room, sensible heat load is generated according to the operation of the machine when driving the equipment for semiconductor production. Cold water coil and fresh air are needed to remove the sensible heat generated at this time. The equipment for supplying the cold water coil and the fresh air is called a clean room sensible heat control unit.

The clean room sensible control unit generates cooling effect by passing the sensible load generated inside the FAB through the sensible control coil, and evenly distributes high clean air to the upper part of the FAB through the fan filter unit installed in the upper plenum. Distribute The clean room sensible heat control unit does not generate condensation and uses an OVAL-shaped heat pipe to reduce the passage resistance and is the most efficient system of air resistance reduction technology to date.

1 is a view schematically showing a general semiconductor equipment structure.

Referring to FIG. 1, the sensible heat load generated inside the FAB 1 is moved to the clean room sensible heat control unit 10, and then the upper plenum 2, the FFU FANTER UNIT 3, and the FAB 1. And back to the clean room sensible heat control unit 10 after passing through the lower plenum 4.

The clean room sensible heat control unit 10 requires a bypass pipe of the bypass type and a duct for supplying fresh air for adjusting the capacity when the sensible heat load changes therein. In general, one set of bypass pipes is connected to each three sets of sensible heat control coils to perform the function by increasing or decreasing the flow rate of the control valve. It is possible to secure the uniformity of the temperature distribution across the entire sensible heat control coil according to the low speed and stable air flow distribution, thereby minimizing the temperature variation for each part of the room. In order to secure the uniformity of the temperature distribution, air flow should not be biased over the entire sensible heat control coil.

2 is a view schematically showing a conventional clean room sensible heat control unit.

Referring to FIG. 2, in the conventional clean room sensible heat control unit, the sensible heat control coil 12 is first installed on the frame 11. Thereafter, the temperature control bypass pipe 13 and the duct 14 for supplying fresh air are sequentially installed in the field. However, after the sensible heat control coil 12 is installed on the frame 11 in the field, welding and assembly of the bypass pipe 13 and the duct 14 for temperature control are to be carried out as a post-process. It is possible to proceed to the post-process, there is a problem that the installation period takes a long time, due to the opening (a) opened downward, the lower work is not possible due to the falling object during the upper work, and the fall to the opening (a) in the working process Due to the industrial accidents, there was a need for improvement.

Domestic Patent Publication No. 10-0745087

An object of the present invention for solving the problems of the prior art as described above is to configure the sensible heat control coil, bypass piping module and the duct in a single frame member to enable continuous connection without separation from the adjacent module. It is to provide a clean room sensible heat control unit.

In order to achieve the above object, the present invention provides a lower frame formed in an elongated shape in one longitudinal direction inside a clean room, an upper frame spaced upwardly of the lower frame, and interconnecting the lower frame and the upper frame. A frame member having a plurality of connecting frames; A sensible heat control coil installed on an upper side of the upper frame and having a temperature adjusting function for controlling sensible heat generated in a clean room; A duct installed at one side in the width direction of the lower frame to supply fresh air supplied from the outside to the clean room; And a bypass piping module installed on the other side in the width direction of the lower frame, and the sensible heat control coil and the bypass piping module are configured to be connected to each other.

The bypass piping module may include: a lower pipe frame arranged in series in a plurality of interconnected states, and an upper pipe frame formed so as to be spaced apart from an upper portion of the lower pipe frame and arranged in series in a plurality of connected lines; A support member having a plurality of connection piping frames interconnecting each of the lower and upper piping frames; And it provides a clean room sensible heat control unit comprising a bypass pipe portion disposed to be supported on the lower pipe frame or the upper pipe frame.

In addition, the frame member, the sensible heat control coil and the bypass piping module is composed of a plurality of each, a plurality of the frame member, a plurality of the sensible heat control coil and a plurality of the bypass piping module is arranged in series or in parallel The pair of bypass modules adjacent to each other among the plurality of bypass piping modules are connected to each other, and each of the sensible heat control coil and each of the bypass modules installed in each of the frame members is configured to be connected to each other. It provides a clean room sensible heat control unit, characterized in that.

The present invention also provides a clean room sensible heat control unit, wherein a catwalk is mounted between one side of the lower frame and the other side of the lower frame.

The lower frame may include a first lower frame and a second lower frame installed side by side on one side of the first lower frame, and the upper frame may be spaced apart from an upper portion of the first lower frame. And an upper frame and a second upper frame spaced apart from the upper portion of the second lower frame, wherein the connecting frame comprises: a first connecting frame interconnecting the first lower frame and the first upper frame; And a second connection frame interconnecting the lower frame and the second upper frame, wherein the sensible heat control coil comprises: a first sensible heat control coil seated on the first upper frame and having an inlet header; And a second sensible heat control coil having an outlet header, wherein the bypass pipe module is seated on the first lower frame, and the inlet header and the outlet header. It is configured to be connected, the duct provides a clean room sensible control unit, characterized in that seated on the second lower frame.

In addition, the bypass piping module is seated on the upper outer side of the first lower frame positioned in the opposite direction of the second lower frame, the first catwalk is formed on the upper inner side of the first lower frame to enable the worker to move. The duct may be seated on an upper outer side of the second lower frame, and a second catwalk may be formed on an upper inner side of the second lower frame to move an operator.

Further, after the first catwalk and the second catwalk are installed inside the first lower frame and inside the second lower frame, the bypass pipe module and the duct may be disposed outside the first lower frame and the first lower frame. Provides a clean room sensible heat control unit, characterized in that installed on the outside of the 2 lower frame.

In addition, the inlet header and the outlet header are positioned to face the first catwalk, the first connecting pipe connecting the bypass piping module and the inlet header, and the first connecting pipe connecting the bypass piping module and the outlet header. It provides a clean room sensible heat control unit, characterized in that it further comprises two connecting piping.

In the present invention, since the catwalk is provided in the frame member, no opening is generated, and the operator can safely assemble and install the sensible heat control coil, the duct, and the bypass pipe module while being supported by the catwalk.

In addition, since the bypass piping module is manufactured in a factory in the form of a module, it does not require an additional safety mount and a service space, and simply assembles the bypass piping to the frame member by simply installing a support member on the lower frame. And there is an effect that can be installed.

In addition, the frame member, sensible heat control coil, bypass piping module and the duct can be manufactured in the form of modules from the outside, so only a simple assembly work can be performed at the installation site, so that construction period can be shortened and cost can be reduced. It works.

In addition, the bypass piping module has an effect that can be installed in both the horizontal and vertical direction of the frame member according to the site conditions.

In addition, since the inlet header and the outlet header are positioned to face the first catwalk, the operator can safely connect one side of the bypass piping module to the inlet header by using the first connection pipe while being supported by the first catwalk. By using the second connection pipe has an effect that can safely connect the other side of the bypass pipe module and the outlet header.

1 is a view schematically showing a general semiconductor equipment structure.
2 is a view schematically showing a conventional clean room sensible heat control unit.
3 is a view schematically showing a clean room to which a clean room sensible heat control unit according to a first embodiment of the present invention is applied.
4 is a view illustrating a state in which a duct and a sensible heat control coil are mounted on a frame member of a clean room sensible heat control unit according to a first embodiment of the present invention.
5 is a view illustrating a bypass pipe module of a clean room sensible heat control unit according to a first embodiment of the present invention.
6 is a view illustrating a state in which a duct, a sensible heat control coil, and a bypass pipe module are mounted on a frame member of a clean room sensible heat control unit according to a first embodiment of the present invention.
7 is a diagram illustrating a state in which the clean room sensible heat control unit according to the second embodiment of the present invention is disassembled.
8 is a view showing a state in which a clean room sensible heat control unit according to a second embodiment of the present invention is coupled.
9 is a view showing an air movement path in the duct provided in the clean room sensible heat control unit according to a second embodiment of the present invention.
10 is a view showing a clean room sensible heat control unit according to a third embodiment of the present invention.

Hereinafter, a clean room sensible heat control unit according to a preferred embodiment of the present invention with reference to the accompanying drawings will be described in more detail.

3 is a view schematically showing a clean room to which a clean room sensible heat control unit according to a first preferred embodiment of the present invention is applied, and FIG. 4 is a view of a clean room sensible heat control unit according to a first preferred embodiment of the present invention. 2 is a view showing a state in which the duct and the sensible heat control coil are mounted to the frame member.

3 and 4, the clean room sensible heat control unit 1000 according to the first exemplary embodiment of the present invention relates to a facility structure for controlling sensible heat in a clean room by being applied to, for example, a semiconductor production line. , The frame member 100, the sensible heat control coil 200, the duct 300 and the bypass piping module 400 (shown in FIG. 5).

The frame member 100 is provided on one side of the inside of the clean room, for example, the lower side of the FAB 1, and includes the lower frame 110, the upper frame 120, the connection frame 130, and the catwalk 140. It includes. The lower frame 110 is formed in an elongated shape along one longitudinal direction inside the FAB 1. The lower frame 110 may be formed, for example, in a rectangular frame shape, and a plurality of rectangular frames may be continuously connected in a lengthwise direction of the lower side of the FAB 1. The upper frame 120 is positioned to be spaced apart above the lower frame 110 and is formed in an elongated shape along the lower frame 110. The connection frame 130 is composed of a plurality and formed to connect the lower frame 110 and the upper frame 120 to each other.

The sensible heat control coil 200 sucks air in the FAB 1 to absorb sensible heat, and enables the heat regulation with the air inside the FAB 1 by using cold water to control the temperature inside the FAB 1. Plays a common role. The sensible heat control coil 200 is installed above the upper frame 120. And the flow rate delivered to the sensible heat control coil 200 in order to maintain a constant temperature inside the FAB (1) is configured to control through a control valve (not shown), the control according to the increase or decrease of the sensible heat load of the FAB (1) The opening ratio of the valve is controlled by automatic control logic.

The duct 300 is installed at one side in the width direction of the lower frame 110 to supply fresh air supplied from the outside to the clean room. The duct 300 is connected to the communication pipe 310 across the FAB (1), the communication pipe 310 is connected to the air conditioner outside the FAB (1), fresh air supplied from the air conditioner duct It is supplied to 300, the duct 300 supplies fresh air into the FAB (1). Due to the fresh air supplied from the duct 300, the concentration of the organic compound generated inside the FAB 1 is maintained at a level below a certain level.

5 is a view illustrating a bypass pipe module of a clean room sensible heat control unit according to a first embodiment of the present invention.

2 to 5, the bypass pipe module 400 includes a support member 410 and a bypass pipe part 420. The support member 410 is formed in a rectangular frame shape and is formed in a rectangular frame shape so as to be spaced apart from the upper portion of the lower pipe frame 412 arranged in series in a state where the plurality is connected to each other, and the upper portion of the lower pipe frame 412 and a plurality of the connected state The upper pipe frame 414 is arranged in series with each other, and each of the lower pipe frame 412 and a plurality of connecting pipe frame 416 interconnecting the upper pipe frame 414.

The bypass pipe part 420 is disposed to be supported by the lower pipe frame 412 or the upper pipe frame 414. When the sensible heat load of the FAB 1 decreases, the cold water delivered to the sensible heat control coil 200 is reduced and the remaining cold water is returned to the freezer through the bypass pipe 420.

FIG. 6 is a view illustrating a state in which a duct, a sensible heat control coil, and a bypass pipe module are mounted in a frame member of a clean room sensible heat control unit according to a first embodiment of the present invention.

2 to 6, the frame member 100 is mounted inside the FAB 1. And the upper frame 120 is installed sensible heat control coil 200. The duct 300 is installed at one side in the width direction of the lower frame 110, and the bypass piping module 400 is installed at the other side in the width direction of the lower frame 110. At this time, the catwalk 140 is installed for securing the passage section between one side and the other side in the width direction of the lower frame 110. Catwalk 140 may be configured so that a plurality of dogs are arranged in series, the catwalk 140 facing each other are coupled in a fitting manner, the plurality of catwalk 140 is closely contacted. Since the catwalk 140 is provided in the frame member 100 as described above, the worker can safely install the sensible heat control coil 200, the duct 300, and the bypass piping module 400 while being supported by the catwalk 140. It works.

In addition, since the bypass piping module 400 is manufactured in a factory in the form of a module, it does not require an additional safety mount and a service space, and only by installing the support member 410 on the lower frame 110, Pass pipe 420 has an effect that can be easily assembled and installed on the frame member 100. On the other hand, when the bypass pipe 420 is installed in the frame member 100, the first connection pipe 500 of the inlet header 202 and the bypass pipe 420 formed in the sensible heat control coil 200 One side is interconnected, and the second connection pipe 502 is connected to the outlet header 204 and the bypass pipe 420 formed in the sensible heat control coil 200, the sensible heat control coil 200 and Bypass piping 420 is to be connected to each other.

7 is a view showing a state in which the clean room sensible heat control unit according to the second preferred embodiment of the present invention is disassembled, and FIG. 8 is a state in which the clean room sensible heat control unit according to the second preferred embodiment of the present invention is coupled. 9 is a view showing an air movement path in the duct provided in the clean room sensible heat control unit according to a second embodiment of the present invention.

7 to 8, the frame member 100, the sensible heat control coil 200, and the bypass piping module 400 may be configured in plural numbers, for example, three in one set. In this case, each sensible heat control coil 200 and each bypass piping module 400 is installed in each frame member 100. Each sensible heat control coil 200 and each bypass pipe module 400 installed in each frame member 100 are connected to each other by the first and second connection pipes 500 and 502.

After the plurality of frame members 100, the plurality of sensible heat control coils 200, and the plurality of bypass piping modules 400 are disposed in series or in parallel, a pair adjacent to each other among the plurality of bypass piping modules 400. The bypass piping module 400 is interconnected. Here, the assembling directions of the plurality of frame members 100, the plurality of sensible heat control coils 200, and the plurality of bypass piping modules 400 may be adjusted in the horizontal direction or the vertical direction. In addition, when the plurality of frame members 100 are connected to each other, the sensible heat control coil 200, the bypass piping module 400 and the duct 300 may be fastened with bolts or the like to continuously extend the number of modules.

Referring to FIG. 9, one set, that is, one duct 300 may be provided in three frame members 100. The duct 300 receives fresh air from the outside and moves downward to the frame member 100. Discharge. At this time, the duct 300 discharges air to the lower longitudinal direction of the three frame members (100).

10 is a view showing a clean room sensible heat control unit according to a third embodiment of the present invention.

Referring to FIG. 10, the clean room sensible heat control unit 1000 according to the third exemplary embodiment of the present invention is configured such that the shapes of the frame member 150 and the sensible heat control coil 250 are different from those of the first embodiment.

The frame member 150 includes a lower frame, an upper frame, and a connecting frame. The lower frame may include a first lower frame 160 having a rectangular frame shape extending along a length direction, and a second lower frame 162 having a rectangular frame shape installed side by side on one side of the first lower frame 160. Include. The upper frame may include a first upper frame 170 having a rectangular frame shape spaced apart from an upper portion of the first lower frame 160, and a second upper frame having a square frame shape spaced apart from an upper portion of the second lower frame 162. 172. The connection frame is a first connection frame 180 interconnecting the first lower frame 160 and the first upper frame 170, and the second lower frame 162 and the second upper frame 172 interconnected. It includes a second connecting frame 182 to.

The sensible heat control coil 250 is configured to have a two-part symmetrical structure on the frame member 150 to arrange the inlet header 262 and the outlet header 272 at the center of the frame member 150. The first sensible heat control coil 260 seated on the upper frame 170 and having an inlet header 262, and the second sensible heat control coil 270 seated on the second upper frame 172 and having an outlet header 272. It includes.

 Bypass piping module 400 is mounted on the first lower frame 160 is configured to be connected to the inlet header 262 and the outlet header 272 by the first and second connection pipes (510, 512). The duct 300 is seated in the second lower frame 162. At this time, the bypass piping module 400 is seated on the upper outer side of the first lower frame 160 located in the opposite direction of the second lower frame 162, the first lower frame 162 is integrally connected to the second The first catwalk 190 is formed at an upper inner side of the first lower frame 160 to move the worker. And the duct 300 is seated on the upper outer side of the second lower frame 162, the second cat walk 192 is formed on the upper inner side of the second lower frame 162 to be movable. And a first connection pipe 510 for interconnecting the bypass pipe module 400 and the inlet header 262 and a second connection pipe 512 for interconnecting the bypass pipe module 400 and the outlet header 272. It includes more.

And the installation order of these, after the first catwalk 190 and the second catwalk 192 is installed inside the first lower frame 160 and the inside of the second lower frame 162, the first and second sensible heat The control coils 260 and 270 are installed on the upper sides of the first and second upper frames 170 and 172, and the bypass piping module 400 and the duct 300 are formed on the upper outer side and the first lower frame 160. 2 is installed on the upper outer side of the lower frame 162.

At this time, since the inlet header 262 and the outlet header 272 are positioned to face the first catwalk 190, the worker is supported by using the first connection pipe 510 in a state supported by the first catwalk 190. One side of the pass pipe module 400 and the inlet header 262 can be safely connected, and the other side of the bypass pipe module 400 and the outlet header 272 to be safely connected using the second connection pipe 512. It can be effective. In addition, the operator supports the bypass piping module 400 and the duct 300 by the upper and second lower frame 162 of the first lower frame 160 in a state supported by the first and second catwalks 190 and 192. There is an effect that can be safely installed on the upper outer side.

Thus, since the present invention includes the first and second catwalks 190 and 192, the sensible heat control coil 250, the bypass piping module 400 and the duct 300 can be safely installed on the frame member 150. have. In addition, the frame member 150, the sensible heat control coil 250, the bypass piping module 400 and the duct 300 can be manufactured in the form of modules from the outside, so only a simple assembly operation is required at the installation site, construction period This can shorten the cost and reduce the cost.

Although the present invention has been described in detail in the above embodiments, it is obvious that the present invention is not limited thereto, and it is obvious to those skilled in the art that various changes and modifications can be made within the technical scope of the present invention. If the technical scope falls within the scope of the claims, the technical spirit should also be regarded as belonging to the present invention.

1000: clean room sensible heat control unit
100: frame member 110: lower frame
120: upper frame 130: connecting frame
140: catwalk 150: frame member
160: first lower frame 162: second lower frame
170: first upper frame 172: second upper frame
180: first connection frame 182: second connection frame
190: first catwalk 192: second catwalk
200: sensible heat control coil 202: inlet header
204: outlet header 250: sensible heat control coil
260: first sensible heat control coil 262: inlet header
270: second sensible heat control coil 272: outlet header
300: duct 310: communication piping
400: bypass piping module 410: support member
412: lower piping frame 414: upper piping frame
416: connection piping frame 420: bypass piping
500: first connection pipe 502: second connection pipe
510: first connection pipe 512: second connection pipe

Claims (8)

A frame member having a lower frame formed in an elongated shape in one longitudinal direction inside the clean room, an upper frame spaced above the lower frame, and a plurality of connection frames interconnecting the lower frame and the upper frame;
A sensible heat control coil installed on an upper side of the upper frame and having a temperature adjusting function for controlling sensible heat generated in a clean room;
A duct installed at one side in the width direction of the lower frame to supply fresh air supplied from the outside to the clean room; And
It includes a bypass piping module installed on the other side of the lower frame in the width direction,
The sensible heat control coil and the bypass piping module is configured to be connected to each other clean room sensible control unit.
The method of claim 1,
The bypass piping module is:
A lower pipe frame arranged in series with a plurality of interconnections, an upper pipe frame formed to be spaced apart from an upper portion of the lower pipe frame, and a plurality of upper pipe frames arranged in series with each other, and respective lower pipe frames and upper pipe frames Support member having a plurality of connecting pipe frame for interconnecting the; And
Clean room sensible heat control unit comprising a bypass pipe disposed to be supported on the lower pipe frame or the upper pipe frame.
The method of claim 1,
The frame member, the sensible heat control coil and the bypass piping module are each composed of a plurality, the plurality of the frame member, the plurality of sensible heat control coil and the plurality of bypass piping modules are arranged in series or in parallel,
A pair of adjacent bypass piping modules of the plurality of bypass piping modules are connected to each other,
Each of the sensible heat control coil and each of the bypass piping module installed in each of the frame member is configured to be connected to each other clean room sensible control unit.
The method of claim 1,
Clean room sensible heat control unit, characterized in that the catwalk is mounted between the width direction one side and the other side of the lower frame.
The method of claim 1,
The lower frame includes a first lower frame and a second lower frame installed side by side on one side of the first lower frame,
The upper frame includes a first upper frame spaced above the first lower frame, and a second upper frame spaced above the second lower frame,
The connecting frame includes a first connecting frame interconnecting the first lower frame and the first upper frame, and a second connecting frame interconnecting the second lower frame and the second upper frame.
The sensible heat control coil includes a first sensible heat control coil seated on the first upper frame and having an inlet header, and a second sensible heat control coil seated on the second upper frame and having an outlet header,
The bypass pipe module is configured to be seated on the first lower frame but connected to the inlet header and the outlet header,
The duct is clean room sensible control unit, characterized in that seated on the second lower frame.
The method of claim 5, wherein
The bypass piping module is seated on the upper outer side of the first lower frame positioned in the opposite direction of the second lower frame, the first catwalk is formed on the upper inner side of the first lower frame to enable the worker to move,
The duct is seated on the upper outer side of the second lower frame, the upper inner portion of the second lower frame clean room sensible control unit, characterized in that the second catwalk is formed to be movable.
The method of claim 6,
After the first catwalk and the second catwalk are installed inside the first lower frame and inside the second lower frame, the bypass pipe module and the duct are outside the first lower frame and the second lower frame. Clean room sensible heat control unit, characterized in that installed on the outside of the frame.
The method of claim 7, wherein
The inlet header and the outlet header are positioned to face the first catwalk,
And a first connection pipe connecting the bypass pipe module and the inlet header, and a second connection pipe connecting the bypass pipe module and the outlet header.

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