JP2001034344A - Temperature control system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a temperature control system capable of accurately controlling the temperature of a heating/cooling part and by which the number of pipes, installation space and equipment cost are reduced. SOLUTION: In the temperature control system for controlling the temperature of the heating/cooling part 3 by using various fluid, a fluid supply pump 2 and the heating/cooling part 3 are mutually connected through a circulation passage. The passage 4 is branched to 1st and 2nd passages 4a, 4b on the downstream side of the pump 2 and fluid on the 1st passage 4a is led into the heating/cooling part 3. A heat exchange 5 for executing heat exchange between fluid of the 1st and 2nd passages 4a, 4b by a thermoelectric transducing element 5a is arranged on the upstream side from the heating/cooling part 3.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to, for example, building air conditioning,
Alternatively, various fluids applicable to various industrial machines and devices such as a heating or cooling (hereinafter referred to as “heating / cooling”) device in a general molding machine and a temperature control device for an electrode in a semiconductor etching device are used. In particular, the present invention relates to a temperature control system capable of performing precise temperature control.

[0002]

2. Description of the Related Art For example, in an air-conditioning system for central control of a building, a heating / cooling fluid adjusted to a desired temperature by a fluid temperature adjusting means is sent from a fluid supply unit to a heating / cooling unit, and the heating / cooling unit is heated. A temperature control system that performs temperature control by the fluid in the section is used. In such an air conditioning system, for example, when cooling is performed using a compressor-type cooler as a cooling means, the compressor-type cooler is arranged on the first floor of a building because the compressor-type cooler involves vibration and the like. Fluid cooled to a desired temperature is sent to each floor and each room by piping to perform air conditioning.

At this time, if the fluid piping path from the compressor-type cooler to the heating / cooling section is long, the fluid is affected by the ambient temperature until it reaches the heating / cooling section, and the heating is carried out. / An error may occur in the temperature in the cooling unit.

[0004] Such a temperature control system can be employed in, for example, a semiconductor etching apparatus. However, in such an etching apparatus, a compressor-type cooler is separately provided since vibration on the installation floor of the apparatus is particularly disliked. It must be installed on the floor, and the fluid piping path from the compressor-type cooler to the heating / cooling section must be long. However, in an etching apparatus in which such temperature control is strict, a temperature error generated in a piping path of such a fluid becomes a serious problem.

Further, in an etching apparatus disclosed in, for example, Japanese Patent No. 2607381, the temperature of an airtight container in which a semiconductor wafer is installed, a wafer installation electrode, and a counter electrode are individually controlled. I have. However, it is impossible to simultaneously control different temperatures of a plurality of members with a constant temperature fluid supplied from a single compressor cooler.

In order to solve these problems, conventionally,
Precise temperature control is performed by disposing a heat exchanger immediately before each heating / cooling unit. In this way, even if the fluid piping path from the compressor-type cooler to the heating / cooling unit has a long distance and a temperature error occurs in the piping path, the heat exchanger is located immediately before the heating / cooling unit. Accordingly, the fluid can be set to a predetermined temperature again, so that precise temperature control in the heating / cooling unit is possible. Further, even when each of the plurality of heating / cooling units is controlled at a different temperature, the fluid of a constant temperature supplied from a single compressor-type cooler is distributed upstream of each heating / cooling unit. The set temperature can be controlled individually by the heat exchanger.

[0007]

Meanwhile, as described in, for example, Japanese Patent Application Laid-Open No. 8-193766, heat is transferred between the two systems of fluids via a thermoelectric conversion element. There is something to be done. Generally, a heat exchanger requires a fluid to be radiated or absorbed in a different system from the fluid that is adjusted to a predetermined temperature in the heat exchanger. Therefore,
Inevitably, separate pipes and pumps are required to introduce the fluid of the different system from the supply unit for the other system fluid to the exchanger, and a space for installing them is required.

Here, for example, the aforementioned Japanese Patent No. 2607381
In an etching apparatus as disclosed in Japanese Patent Application Laid-Open Publication No. H10-209, three sets of two reciprocating fluid pipes for connecting a heating / cooling unit and a compressor-type cooler require a total of six pipes. Further, three sets of six pipes for fluid of another system are required, and the number of pipes becomes extremely large. In addition, as described above, since the etching apparatus and the compressor-type cooler need to be installed on different floors, the piping path is also long. For this reason, the installation space and equipment costs of these pipes cannot be ignored.

The present invention has been made to solve such a conventional problem, and can precisely control the temperature in a heating / cooling unit, and has a small number of pipes, thereby reducing installation space and equipment costs. The purpose is to provide a temperature control system that can be used.

[0010]

This object is effectively achieved by the inventions according to claims 1 to 6 of the present invention as described below. That is, the temperature control system according to the first aspect of the present invention is a temperature control system that controls the temperature of the heating / cooling unit using various fluids, wherein the fluid flow path is downstream of the fluid supply unit. The fluid is branched into first and second flow paths, and the fluid in the first flow path is introduced into the heating / cooling section. The fluid between the first and second flow paths is located upstream of the heating / cooling section. Is characterized in that a heat exchanger for performing heat exchange by a thermoelectric conversion element is provided.

[0011] In this temperature control system, the fluid of the desired temperature supplied from the fluid supply section has the fluid flow path branched into the first and second flow paths upstream of the heating / cooling section. Is done. The fluids in the first and second flow paths are introduced into a heat exchanger disposed on the upstream side of the heating / cooling unit, and a thermoelectric fluid flows between the fluid in the first flow path and the fluid in the second flow path. Heat exchange is performed by the conversion element. As a result, the fluid in the first flow path is adjusted to a predetermined temperature, while the fluid in the second flow path radiates or absorbs heat generated by the temperature adjustment of the fluid in the first flow path. The fluid in the first flow path adjusted to a predetermined temperature is then introduced into a heating / cooling unit, where the fluid controls the temperature.

As described above, by disposing the heat exchanger upstream of the heating / cooling unit, the temperature of the fluid introduced into the heating / cooling unit can be finely adjusted to about 0.1 ° C. The fluid temperature can be controlled very precisely. Moreover, in the temperature control system of the present invention, the fluid flow path is branched into the first and second flow paths downstream of the fluid supply unit and upstream of the heating / cooling unit, and the two branched fluids are separated. Introduced to the heat exchanger. That is, another system fluid that radiates or absorbs heat to the fluid adjusted to a predetermined temperature by the heat exchanger is obtained by branching the downstream fluid flow path of the same fluid supply unit. This eliminates the need for long-distance piping and separate pumps that would be required when separate fluids were separately introduced from other fluid supply units, as in the past, thus significantly reducing equipment costs. In addition to this, the installation space for the temperature control system can be reduced.

According to the second aspect of the present invention, a fluid temperature adjusting means for heating / cooling the fluid introduced into the heat exchanger and adjusting the temperature to a desired temperature is provided upstream of the heat exchanger. Have been. Examples of the fluid temperature adjusting means include a compressor-type cooler and a heater. In this way, by arranging the fluid temperature adjusting means on the upstream side of the heat exchanger and adjusting the temperature of the fluid to a desired temperature in advance, it is possible to reduce the burden of adjusting the temperature in the heat exchanger.

According to the third aspect of the present invention, the fluid circulates between the fluid supply unit and the heating / cooling unit. By circulating the fluid in this way, the fluid can be used effectively. Of course, the fluid may be discharged to the outside of the system without being circulated.

According to the fourth aspect of the present invention, when the fluid is circulated between the fluid supply unit and the heating / cooling unit, the second flow path is located downstream of the heating / cooling unit. And joins the circulation flow path up to the branch point. In order to accurately grasp the temperature of the fluid introduced into the heat exchanger, it is preferable that the second flow path joins the circulation flow path upstream of the fluid temperature control means.

Further, a temperature control system according to a fifth aspect of the present invention is a temperature control system for controlling the temperature of a heating / cooling unit using various fluids, wherein the first of the fluids is controlled.
A plurality of heating / cooling units are arranged in series in the flow path,
A second flow path is branched from the first flow path on the upstream side of the cooling section, and a thermoelectric conversion element is provided between the fluids of the first flow path and the second flow paths on the upstream side of each heating / cooling section. It is characterized in that heat exchangers for exchange are arranged respectively.

As described above, when a plurality of heating / cooling units are arranged in series, the accuracy of temperature control in each heating / cooling unit is improved by arranging the heat exchangers on the upstream side thereof. be able to. In this case, similarly to the first aspect of the present invention, the flow path of the fluid is branched into first and second flow paths on the upstream side of the heating / cooling unit, and the heat exchanger is provided. Since the fluid of another system that radiates or absorbs heat to the fluid adjusted to a predetermined temperature can be obtained from the fluid supplied from the same fluid supply unit, the piping path can be shortened and the number of pumps can be greatly increased. The cost and the installation space of the system can be significantly reduced.

In the temperature control system for controlling the temperature of the heating / cooling section using various fluids according to the present invention, a plurality of heating / cooling sections are arranged in parallel in the first flow path of the fluid. And a second flow path is branched from a first flow path on the upstream side of each heating / cooling section, and a thermoelectric is provided upstream of each heating / cooling section between the fluids of the first flow path and the second flow path. It is characterized in that heat exchangers for exchanging heat with the conversion elements are provided.

In a temperature control system in which a plurality of heating / cooling units are arranged in parallel as described above, a plurality of heating / cooling units are arranged.
When all the cooling units are controlled to the same temperature, a single heat exchanger is disposed upstream of the plurality of heating / cooling units, and after adjusting the fluid to a predetermined temperature by the heat exchanger, Each heating /
The same fluid can be introduced into the cooling unit. When controlling a plurality of heating / cooling units to different temperatures,
By arranging a heat exchanger upstream of each heating / cooling unit, the fluid can be controlled to a predetermined temperature.

[0020]

Hereinafter, embodiments of the present invention will be described.
This will be specifically described. FIG. 1 is a schematic diagram of a temperature control system according to a first preferred embodiment of the present invention. The temperature control system 1 includes a fluid supply pump 2 that supplies the fluid at a predetermined flow rate as a fluid supply unit of the present invention, and a heating / cooling unit 3 that performs temperature control with the fluid. Further, in the embodiment shown in FIG. 1, the fluid supply pump 2 and the heating / cooling unit 3 are connected by an annular circulation channel 4, and the fluid circulates in the channel 4. Have been.

Further, in the present embodiment, the fluid supply pump 2
A fluid temperature adjusting means 7 for heating or cooling the fluid to adjust the temperature to a desired temperature is disposed on the upstream side. As the fluid temperature adjusting means 7, a heater, a compressor-type cooler, or the like can be employed. In the embodiment shown in the figure, the fluid temperature adjusting means 7 is arranged on the upstream side of the fluid supply pump 2, but the arrangement position of the fluid temperature adjusting means 7 may be on the upstream side of a heat exchanger described later. For example, it can be arranged downstream of the fluid supply pump 2.

In the above embodiment, the fluid temperature adjusting means 7 is provided, and the fluid is heated or cooled to adjust the temperature to a desired temperature. However, in the present invention, the fluid temperature adjusting means 7 is essential. Instead of, for example, the fluid temperature control means 7 may be omitted, and factory cooling water or the like may be supplied to the heating / cooling unit 3. The fluid is supplied to the fluid supply pump 2 and the heating / cooling unit 3 by the circulation flow path 4.
However, the present invention is not limited to this. The fluid can be discharged from the temperature control system without circulating the fluid that has passed through the heating / cooling unit 3 in the temperature control system.

Further, a heat exchanger 5 is arranged downstream of the heating / cooling means 7 and the fluid supply pump 2 and upstream of the heating / cooling section 3. Same heat exchanger 5
Is provided with a thermoelectric conversion element 5a, a main system flow path 5b for a fluid adjusted to a predetermined temperature, and a sub-system flow path 5c for a fluid for radiating or absorbing heat generated as a by-product. The temperature of the main system fluid is precisely adjusted by transferring heat between the two main and sub-system fluids via the thermoelectric conversion element 5a.

By disposing the heat exchanger 5 in the vicinity of the heating / cooling unit 3, while flowing from the heat exchanger 5 to the heating / cooling unit 3, the fluid is affected by heat from the surrounding environment. This is preferable because the fluid can be maintained at the predetermined temperature.

The circulation passage 4 is provided with the fluid supply pump 2
Is branched into a first flow path 4a and a second flow path 4b on the downstream side. This branch point is provided with a flow control valve 6 for adjusting the flow rate of the fluid to the first flow path 4a and the second flow path 4b.
Is installed. The flow control valve 6 may be installed at any position between the branch point and a junction described later.

The first flow path 4a is connected to the main flow path 5b of the heat exchanger 5, and the second flow path 4b is connected to the sub flow path 5c of the heat exchanger 5. . Therefore, the fluid in the first flow path 4 a is adjusted to a predetermined temperature by the heat exchanger 5 and then introduced into the heating / cooling unit 3.

On the other hand, the fluid in the second flow path 4b radiates or absorbs the amount of heat generated by adjusting the fluid in the first flow path 4a in the heat exchanger 5 to a predetermined temperature. At the downstream side of the heating / cooling unit 3 and at the upstream side of the fluid temperature adjusting means 7, it joins the circulation flow path 4. The merging position of the second flow path 4b may be any position on the downstream side of the heating / cooling unit 3 and up to the branch point. For example, when the flow rate to the second flow path 4b is significantly smaller than that of the first flow path 4a, or when the amount of heat received by the heat exchanger 5 in the fluid of the second flow path 4b is small, Circulation flow path 4 just before
It is also possible to join. However, in order to accurately grasp the temperature of the fluid introduced into the heat exchanger 5, as in the present embodiment, on the downstream side of the heating / cooling unit 3 and on the upstream side of the fluid temperature adjusting means 7. It is preferable to join to the circulation flow path 4 in the above.

When the temperature is controlled in the heating / cooling section by the temperature control system 1, the fluid adjusted to a desired temperature by the fluid temperature adjusting means 7 is circulated at a constant flow rate by the fluid supply pump 2. 4. Thereafter, the flow rate of the fluid is adjusted by a flow rate adjusting valve 6 disposed at a branch point, so that the first flow path 4a and the second flow path
It branches into the flow path 4b.

The fluid in the first flow path 4a is supplied to the heat exchanger 5
Is introduced into the main system flow path 5b, and is heated when the temperature of the fluid is lower than a predetermined temperature, and is cooled when the temperature is higher than the predetermined temperature, and is precisely adjusted to the predetermined temperature. You. Then, the fluid in the first flow path 4a is heated /
It is introduced into the cooling unit 3 and performs temperature control. in this way,
By disposing the heat exchanger 5 immediately before the heating / cooling unit 3, even if an error occurs in the temperature of the fluid due to a long piping path from the fluid supply unit 2 to the heating / cooling unit 3, the heating is performed. Since the temperature of the fluid introduced into the cooling / cooling unit 3 is precisely controlled by the heat exchanger 5, the heating / cooling unit 3
Thus, precise temperature control becomes possible.

The fluid in the second flow path 4b is introduced into the sub-system flow path 5c of the heat exchanger 5, and
After adjusting the fluid in the first flow path 4a to a predetermined temperature, the heat generated as a secondary heat is radiated or absorbed, and then the downstream side of the heating / cooling section 3 and the upstream side of the fluid supply section 2 Merges into the circulation flow path 4 at. As described above, by branching the fluid to be introduced into the sub-system flow path 5c of the heat exchanger 5 from the circulation flow path 4, the sub-system fluid is introduced from a separate fluid supply unit as in the related art. This eliminates the need for piping and a separate pump over a long distance as in the case of the above, so that the equipment cost and installation space of the system can be significantly reduced.

FIG. 2 is a schematic diagram of a temperature control system according to a modification of the first embodiment. In the temperature control system 1 ', substantially the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

In this modification, the circulation flow path 4 is branched into a first flow path 4a and a second flow path 4b downstream of the fluid supply pump 2, and each of the flow paths 4a and 4b is , Fluid temperature control means 7, 7 '. The fluid temperature control means 7 disposed in the first flow path 4a is similar to the first embodiment,
It is a compressor-type cooler or a heater for heating / cooling a fluid introduced into the main system flow path 5b of the heat exchanger 5 to a desired temperature in advance. On the other hand, the fluid temperature adjusting means 7 'arranged in the second flow path 4b is provided with a sub-system flow path 5c of the heat exchanger 5.
This is for heating / cooling a relatively small amount of fluid to be introduced to a desired temperature in advance, and for example, a compact one such as a heating lamp or an air cooling fan can be employed.

As described above, the first and second flow paths 4a, 4b
When the fluid temperature control means 7 and 7 'are disposed in each of the flow paths 4a and 4b after branching to the first path, the load on the fluid temperature control means 7 disposed in the first flow path 4a can be reduced, and Since the fluid temperature control means 7 'arranged in the second flow path is compact as described above, it does not obstruct the piping. Also, as in the first embodiment, the temperature control system requires only one fluid supply pump, and a separate fluid supply source for the fluid supplied to the sub-system flow path 5c of the heat exchanger 5. Also, there is no need for a fluid supply pump.

FIG. 3 is a schematic diagram of a temperature control system according to a second preferred embodiment of the present invention. In the temperature control system 10, the substantially same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

The temperature control system 10 according to the second embodiment
Is a fluid temperature adjusting means 7 for heating / cooling the fluid to adjust the temperature to a desired temperature;
And a heating / cooling unit 3 and 3 for controlling the temperature by the fluid.
The two heating / cooling units 3 and 3 have an annular first flow path 11.
And are arranged in series.

A second flow path 12 is branched from the first flow path 11 on the upstream side of each of the heating / cooling units 3 and 3, and the first flow path 11 and the second flow path 12 are provided at the branch point. Is provided with a flow control valve 6 for adjusting the respective flow rates. Further, upstream of each of the heating / cooling units 3, 3, the first
The heat exchangers 5 that perform heat exchange between the fluids in the flow path 11 and the second flow paths 12 are provided, respectively.
The first flow path 11 is connected to the main system flow path 5b, and the second flow path 12 is connected to the sub system flow path 5c.

In each of the heating / cooling units 3 and 3, the temperature is controlled by the fluid in the first flow path 11.
Since the heat exchanger 5 for performing heat conversion by the thermoelectric conversion element 5a is disposed on the upstream side of each of the heating / cooling units 3, the heat / cooling units 3 and 3 are heated up to about 0.1 ° C. by the heat exchanger 5. A finely tuned fluid is introduced. Therefore, precise temperature control is possible in the heating / cooling units 3 and 3. Further, even when a plurality of heating / cooling units 3 and 3 are provided,
The fluid of the second flow path 12 branched from the first flow path 11 at a position immediately before the heat exchanger 5 is introduced into the sub-system flow path 5c of the heat exchanger 5. Therefore, the piping path for the fluid introduced into the sub-system flow path 5c is short, and a separate pump is not required, so that the equipment cost and the installation space can be reduced. FIG.
FIG. 4 is a schematic diagram of a temperature control system according to a third preferred embodiment of the present invention. In the same temperature control system 20, the same reference numerals are given to substantially the same components as those in the first embodiment, and detailed description thereof will be omitted.

The temperature control system 20 according to the third embodiment
Is a fluid temperature adjusting means 7 for heating / cooling the fluid to adjust the temperature to a desired temperature;
And a heating / cooling unit 3 and 3 for controlling the temperature by the fluid.
The two heating / cooling units 3, 3 are formed in an annular first flow path 21.
And are arranged in parallel.

On the upstream side of each of the heating / cooling sections 3, a second flow path 22 is branched from the first flow path 21, and the first flow path 21 and the second flow path 22 are provided at the branch point. Is provided with a flow control valve 6 for adjusting the respective flow rates. Further, upstream of each of the heating / cooling units 3, 3, the first
The heat exchangers 5 for performing heat exchange between the fluids in the flow path 21 and the respective second flow paths 22 are provided, respectively.
The first flow path 21 is connected to the main system flow path 5b, and the second flow path 22 is connected to the sub system flow path 5c.

In each of the heating / cooling units 3, 3, a fluid whose temperature has been precisely adjusted by the heat exchangers 5, 5 arranged upstream thereof is introduced. Temperature control becomes possible. Further, in this embodiment, since the heat exchangers 5, 5 are respectively arranged on the upstream side of the respective heating / cooling units 3, 3, the two heating / cooling units 3, 3 are precisely adjusted to different temperatures. Can be controlled. Further, since a fluid can be introduced into the sub-system flow path 5c of the heat exchanger 5 by connecting the second flow path 22 branched from the first flow path 21, the path of the fluid pipe of the sub-system flow path 5c is provided. And the need for a separate pump is eliminated, and equipment costs and installation space can be reduced. Also, if a temperature control system in which three heating / cooling units are arranged in parallel as shown in the figure is adopted for a semiconductor wafer etching apparatus, the three components of the airtight container, the wafer installation electrode, and the counter electrode are each different as desired. It is possible to control the temperature.

When the plurality of heating / cooling units 3 and 3 arranged in parallel are controlled to the same temperature, heat exchangers 5 and 5 are arranged upstream of the heating / cooling units 3 and 3 respectively. Alternatively, a single heat exchanger 5 may be arranged upstream of the plurality of heating / cooling units 3 and 3, and the fluid adjusted to a predetermined temperature by the heat exchanger 5 may be subjected to the plurality of heating / cooling units. It can also be introduced in parts 3,3.

[Brief description of the drawings]

FIG. 1 is a schematic diagram of a temperature control system according to a first preferred embodiment of the present invention.

FIG. 2 is a schematic diagram of a temperature control system according to a modification of the first embodiment.

FIG. 3 is a schematic diagram of a temperature control system according to a second preferred embodiment of the present invention;

FIG. 4 is a schematic diagram of a temperature control system according to a third preferred embodiment of the present invention;

[Explanation of symbols]

 1, 1 'Temperature control system 2 Fluid supply pump 3 Heating / cooling unit 4 Circulation flow path 4a First flow path 4b Second flow path 5 Heat exchanger 5a Thermoelectric conversion element 5b Main system flow path 5c Sub system flow path 6 Flow rate Adjustment valve 7, 7 'Fluid temperature adjusting means 10 Temperature control system 11 First flow path 12 Second flow path 20 Temperature control system 21 First flow path 22 Second flow path

Claims (6)

[Claims] 1. A temperature control system for controlling the temperature of a heating / cooling unit using various fluids, wherein a flow path of the fluid is branched into a first flow path and a second flow path downstream of a fluid supply unit, The fluid in the first flow path is introduced into the heating / cooling unit. The heat that exchanges heat between the fluids in the first and second flow paths by a thermoelectric conversion element is provided upstream of the heating / cooling unit. A temperature control system comprising an exchanger. 2. The temperature according to claim 1, wherein a fluid temperature adjusting means for heating / cooling the fluid introduced into the heat exchanger to adjust the temperature to a desired temperature is arranged upstream of the heat exchanger. Control system. 3. The method according to claim 1, wherein the fluid is connected to the fluid supply unit and the heating / heating unit.
3. The temperature control system according to claim 1, wherein the temperature control system circulates between the cooling unit and the cooling unit. 4. The temperature control system according to claim 3, wherein the second flow path joins the circulation flow path downstream of the heating / cooling unit and up to a branch point. 5. A temperature control system for controlling a temperature of a heating / cooling unit using various fluids, wherein a plurality of heating / cooling units are arranged in series in a first flow path of the fluid, A second flow path is branched from the first flow path on the upstream side of the cooling unit, and a thermoelectric conversion element is provided between the fluids of the first flow path and the second flow paths on the upstream side of each heating / cooling unit. A temperature control system comprising a heat exchanger for performing exchange. 6. A temperature control system for controlling the temperature of a heating / cooling unit using various fluids, wherein a plurality of heating / cooling units are arranged in parallel in a first flow path of the fluid, The second flow path is branched from the first flow path on the upstream side of the cooling unit, and heat exchange is performed between the fluids of the first flow path and the second flow path by the thermoelectric conversion element on the upstream side of each heating / cooling unit. A temperature control system, wherein a heat exchanger is provided.