KR102052612B1 - 3D shape measuring device - Google Patents

Abstract

The present invention relates to a 3D shape measuring device which is able to measure the degree of bending and thickness of an object to be measured by simultaneously measuring 3D information of an upper surface and a lower surface of the object to be measured. According to the present invention, the 3D shape measuring device may comprise: a projector which projects a pattern; a pair of first reflection mirrors into which a first projection pattern formed on a first surface of the object to be measured by a pattern is incident and which reflects the incident first projection pattern; a pair of second reflection mirrors, into which a second projection pattern formed on a second surface of the object to be measured is incident, reflecting the second projection pattern incident; a first splitter which includes a first incident surface into which the first projection pattern is incident from the pair of first reflection mirrors, and a second incident surface into which the second projection pattern is incident from the pair of second reflection mirrors; a camera which photographs the first projection pattern formed on the first incident surface and the second projection pattern formed on the second incident surface; and a control unit which acquires 3D shape information of the object to be measured based on the first projection pattern and the second projection pattern, photographed by the camera.

Description

3D shape measuring device {3D shape measuring device}

The present invention relates to a three-dimensional shape measuring apparatus, and more particularly to a three-dimensional shape measuring apparatus using a projection moire (projection moire).

Projection moire is a method of measuring three-dimensional information of an object to be measured by analyzing information in which the position of the grid line changes depending on the height when a grid line with a predetermined interval is projected on the object to be measured.

Projection moiré is used in various fields because it can conveniently measure the three-dimensional information of the object to be measured, and is mainly used to measure the height information of the object to be measured.

If the projection moiré is to measure the information such as the thickness, not the height of the measurement object, conventionally, the height information was measured on each of the upper and lower surfaces of the measurement object to calculate the thickness. However, in this case, if the height measurement on the upper surface and the height measurement on the lower surface are not performed at the same time, there is a problem in that the vibration generated during each height measurement causes an error and the accuracy of the thickness information is reduced.

An object of the present invention is to provide a three-dimensional shape measuring device that can obtain the bending information and thickness information of the object to be measured.

An object of the present invention is to provide a three-dimensional shape measuring apparatus capable of simultaneously acquiring double-sided information of a measurement target.

According to an embodiment of the present invention, a projector for projecting a pattern, a first camera for photographing a first projection pattern formed on the first surface of the object under measurement, and a second projection pattern formed on the second surface of the object under measurement And a controller configured to acquire 3D shape information of the object to be measured based on the second camera photographing the first projection pattern and the first projection pattern photographed by the first camera and the second projection pattern photographed by the second camera. Can be.

The projector includes a first projector and a second projector, the first projector projecting the pattern toward the first side of the object under test, and the second projector projecting the pattern toward the second side of the object under test. Can be.

A splitter for reflecting a part of the pattern projected by the projector in a first direction, a splitter for reflecting the other part in a second direction, and an agent for reflecting the pattern reflected in the first direction by the splitter to the first surface of the object to be measured The apparatus may further include a first pattern reflecting mirror and a second pattern reflecting mirror reflecting the pattern reflected by the splitter in the second direction to the second surface of the object to be measured.

The object to be measured may be located between the first camera and the second camera.

According to an embodiment of the present invention, a projector projecting a pattern, a first projection pattern formed on the first surface of the measurement object by the pattern is incident, a pair of first reflections reflecting the incident first projection pattern A mirror, a second projection pattern formed on a second surface of the object to be measured is incident, a pair of second reflection mirrors reflecting the incident second projection pattern, and a first projection pattern from the pair of first reflection mirrors A first splitter having an incident first incident surface, a second incident surface on which the second projection pattern is incident from the pair of second reflecting mirrors, a first projection pattern formed on the first incident surface, and the second incidence It may include a camera for photographing the second projection pattern formed on the surface and a control unit for obtaining three-dimensional shape information of the object to be measured based on the first projection pattern and the second projection pattern photographed by the camera.

A second splitter for reflecting a part of the pattern projected by the projector in a first direction and a second part for reflecting the other part in a second direction, and a pattern reflected in the first direction by the second splitter on a first surface of the object to be measured And a second pattern reflecting mirror reflecting the pattern reflected in the second direction by the second splitter to the second surface of the object to be measured.

The camera, the first splitter, the object to be measured, the second splitter, and the projector may be arranged in a straight line.

The projector includes a first projector and a second projector, the first projector projecting the pattern toward the first side of the object under test, and the second projector projecting the pattern towards the second side of the object under measurement. can do.

The object to be measured may be positioned between the pair of first pattern reflection mirrors and the pair of second pattern reflection mirrors.

The three-dimensional shape information may include information on the degree of warpage and thickness of the object to be measured.

According to the embodiment of the present invention, it is possible to obtain the bending information and the thickness information of the object to be measured using only one three-dimensional shape measuring device, thereby ensuring the price competitiveness.

According to an exemplary embodiment of the present invention, there is an advantage in that information about the upper surface and the lower surface information of the object to be measured can be simultaneously measured. That is, according to an embodiment of the present invention, it is possible to obtain double-sided information of the object to be measured in one measurement, thereby minimizing the time required to measure the three-dimensional shape information of the object to be measured.

According to an embodiment of the present invention, the error due to the vibration generated in the object under measurement can be minimized to measure more accurate warpage information and thickness information of the object under measurement, thereby improving the reliability of the product. have.

1 is a view showing a three-dimensional shape measuring apparatus according to a first embodiment of the present invention.
2 is a view showing a three-dimensional shape measuring apparatus according to a second embodiment of the present invention.
3 is a view showing a three-dimensional shape measuring apparatus according to a third embodiment of the present invention.
4 is a view showing a three-dimensional shape measuring apparatus according to a fourth embodiment of the present invention.
5 is a perspective view of a three-dimensional shape measuring apparatus according to a fourth embodiment of the present invention.
6 is a view showing a three-dimensional shape measuring apparatus according to a fifth embodiment of the present invention.
7 is a control block diagram of a three-dimensional shape measuring apparatus according to an embodiment of the present invention.
8 is an exemplary view of a projection pattern photographed by the 3D shape measuring apparatus according to the first and second embodiments of the present invention.
9 is an exemplary view of a projection pattern photographed by the 3D shape measuring apparatus according to the third and fourth embodiments of the present invention.
10 is an exemplary diagram for describing a method of obtaining 3D shape information through a projection pattern image by a 3D shape measuring apparatus according to various embodiments of the present disclosure.

Hereinafter, specific embodiments of the present invention will be described in detail with reference to the accompanying drawings. The accompanying drawings are only for easily understanding the embodiments disclosed in the present specification, and the technical idea disclosed in the present specification is not limited by the accompanying drawings, and all changes and equivalents included in the spirit and technical scope of the present invention are included. It should be understood to include water or substitutes.

Terms including ordinal numbers such as first and second may be used to describe various components, but the components are not limited by the terms. The terms are used only for the purpose of distinguishing one component from another.

When a pattern, beam, light, etc. is referred to as being “projected” or “reflected” from one component to a particular component, it may be projected or reflected directly on that particular component. It may be understood that other components may be present in the middle. That is, when referred to as “projected” or “reflected”, it includes the meaning of being directly projected or reflected directly from one component to a particular component, as well as being reflected or refracted by another component present in between. It is to be understood that the meaning includes a meaning that is indirectly projected or reflected on a specific component after being made. On the other hand, when a component is referred to as "directly projected" or "directly reflected" to a specific component, it should be understood that no other component exists in the middle.

Singular expressions include plural expressions unless the context clearly indicates otherwise.

In this application, the term "comprises" and the like is intended to indicate that there is a feature, number, step, operation, component, part or combination thereof described in the specification, but one or more other features or numbers, step It is to be understood that the present invention does not exclude in advance the possibility of the presence or the addition of an operation, a component, a part, or a combination thereof.

1 to 10, a three-dimensional shape measuring apparatus according to an embodiment of the present invention will be described.

3D shape measurement apparatus according to an embodiment of the present invention may include at least some or all of the projector 10, the mirror 100, the camera 20 and the controller 30.

According to an embodiment, the projector 10, the mirror 100, or the camera 20 may be configured as one or a plurality.

In addition, according to an embodiment, the 3D shape measuring apparatus may further include other components such as the display 40.

The projector 10 may project a pattern.

Here, the pattern refers to an electron beam having a specific pattern. When the pattern is projected on a specific object, the projection pattern formed on the surface of the object may vary according to the surface shape of the object. That is, it may vary depending on the surface shape, height, etc. of the projection pattern object formed as the pattern is projected.

For example, the pattern may be a grid pattern at regular intervals. However, this is merely exemplary, and the pattern may have various patterns.

The projector 10 may project a pattern directly on the object to be measured.

Alternatively, the projector 10 may indirectly project the component to be measured by reflecting or refracting the pattern onto the object to be measured, such as by mirroring the component such as the mirror 100 or the like. You can project in a pattern.

The mirror 100 may include one or more mirrors.

The mirror 100 may reflect a beam or light such as a pattern.

The mirror 100 may include a reflection mirror, a pattern reflection mirror, and a splitter.

Here, the reflective mirror and the pattern reflection mirror can reflect the incident pattern in the same direction.

The splitter may reflect the incident pattern in at least two directions. Thus, the splitter can separate the incident pattern into two or more components. The splitter may include two or more incident surfaces on which the pattern is incident.

Meanwhile, in the present invention, the mirror was changed to a mirror, a reflection mirror, a pattern reflection mirror, a splitter, etc., but the names are divided for convenience of description, and each is formed of the same or similar material to reflect the pattern. In the same, it is reasonable that the present invention is not limited thereto because the terms are different from each other according to shapes, positions, and placement angles.

The camera 20 may acquire a projection pattern.

Here, the projection pattern may refer to a pattern formed when the pattern projected by the projector 10 is projected onto the object to be measured. The projection pattern may be the same as or different from the pattern projected from the projector 10 depending on the surface shape of the object to be measured.

The camera 20 may sense the projection pattern reflected from the mirror 100. The camera 20 may photograph the projection pattern reflected from the mirror 100.

The controller 30 may measure the 3D shape of the object to be measured based on the projection pattern obtained by the camera 20. That is, the controller 30 may calculate the three-dimensional shape of the object to be measured by comparing the pattern projected by the projector 10 and the projection pattern sensed by the camera 20.

The display 40 may display information of the measured object measured by the controller 30. For example, the display 40 may display the warpage information or the thickness information of the object to be measured, or may display the state of the measured object according to the warpage information and the thickness information.

The three-dimensional measuring apparatus according to the embodiment of the present invention may simultaneously measure the upper and lower surfaces of the object to be measured.

First, referring to FIG. 1, a three-dimensional shape measuring apparatus according to a first embodiment of the present invention capable of simultaneously measuring the upper and lower surfaces of an object to be measured will be described.

1 is a view showing a three-dimensional shape measuring apparatus according to a first embodiment of the present invention.

In the three-dimensional shape measuring apparatus according to the first embodiment of the present invention, the first projector 11 and the second surface of the object 1 to project the pattern onto the first surface 1a of the object 1 to be measured. 2nd projector 12 which projects a pattern in 1b, the 1st camera 21 which photographs the 1st projection pattern formed in the 1st surface 1a of the to-be-measured object 1 by a pattern, and a pattern First projection pattern photographed by the second camera 22, the first camera 21, and the second camera 22 photographing the second projection pattern formed on the second surface 1b of the measurement object 1. And a controller 30 for acquiring three-dimensional shape information of the object to be measured 1 based on the second projection pattern.

Here, the first surface 1a and the second surface 1b may be upper and lower surfaces, or lower and upper surfaces, respectively.

The measurement object 1 may be disposed between the first camera 21 and the second camera 22.

The first camera 21 and the second camera 22 may be spaced apart in the first separation direction w1 with the object 1 interposed therebetween.

The first projector 11 is firstly spaced toward the first surface 1a of the object 1 under a position other than between the first surface 1a of the object 1 and the first camera 21. The pattern can be projected in the first projection direction k1 that intersects the direction w1.

The second projector 12 is first spaced toward the second surface 1b of the object 1 from a position other than between the second surface 1b of the object 1 and the second camera 22. The pattern can be projected in the second projection direction k2 that intersects the direction w1 and the first projection direction k1.

Accordingly, the first camera 21 and the second camera 22 can capture the first and second projection patterns without being obstructed by obstacles.

The separation distance between the first projector 11 and the object 1 may be equal to the separation distance between the second projector 12 and the object 1.

The angle between the first projection direction k1 in which the first projector 11 projects the pattern and the object to be measured 1 is equal to the second projection direction k12 in which the second projector 12 projects the pattern and is measured. It may be equal to the angle between the water (1).

In addition, the separation distance between the first camera 21 and the object 1 may be equal to the separation distance between the second camera 22 and the object 1.

The first camera 21 may photograph the first projection pattern formed on the first surface 1a, and the second camera 22 may photograph the second projection pattern formed on the second surface 1b. The first projection pattern and the second projection pattern may be the same or different.

The controller 30 receives the first projection pattern from the first camera 21, receives the second projection pattern from the second camera 22, and measures three-dimensional shape information of the object 1 to be measured. have.

According to the first embodiment of the present invention, since the projector 10 directly projects the pattern on the object 1 and the camera 20 directly photographs the projection pattern formed on the object 1, the three-dimensional image is three-dimensional. There is an advantage that the accuracy of the shape measurement results is high.

Next, FIG. 2 is a view showing a three-dimensional shape measuring apparatus according to a second embodiment of the present invention.

3D shape measurement apparatus according to the second embodiment of the present invention is a projector (10) for projecting a pattern, mirrors 110, 121 (reflecting the pattern projected from the projector 10 to the object to be measured (1) 122) The first camera 21 which photographs the 1st projection pattern formed in the 1st surface 1a of the to-be-measured object 1 by a pattern, and the 2nd surface 1b of the to-be-measured object 1 by a pattern. ) May include a second camera 22 photographing the second projection pattern.

The mirrors 110, 121, and 122 may include a splitter 110, a first pattern reflection mirror 121, and a second pattern reflection mirror 122.

The splitter 110 may reflect some of the patterns projected by the projector 10 in the first direction l1, and reflect the remaining parts of the pattern projected by the projector 10 in the second direction l2. In particular, the splitter 110 may reflect half of the pattern projected by the projector 10 in the first direction l1 and reflect the other half in the second direction l2.

The splitter 110 may include a first reflecting surface 110a and a second reflecting surface 110b that reflect the pattern projected from the projector 10.

The pattern incident on the first reflection surface 110a may be reflected by the first pattern reflection mirror 121, and the pattern incident on the second reflection surface 110b may be reflected by the second pattern reflection mirror 122.

The first pattern reflection mirror 121 directs the pattern incident from the splitter 110 at a position other than between the first camera 21 and the object 1 toward the first surface 1a of the object 1. Can be reflected.

The second pattern reflection mirror 122 directs a pattern incident from the splitter 110 at a position other than between the second camera 22 and the object 1 toward the second surface 1b of the object 1. Can be reflected.

The first camera 21 and the second camera 22 may be spaced apart in the first separation direction w1 with the object 1 interposed therebetween.

The first pattern reflection mirror 121 and the second pattern reflection mirror 122 may be spaced apart in parallel with the first separation direction w1.

The first camera 21 may photograph the first projection pattern formed on the first surface 1a, and the second camera 22 may photograph the second projection pattern formed on the second surface 1b. The first projection pattern and the second projection pattern may be the same or different.

The controller 30 receives the first projection pattern from the first camera 21, receives the second projection pattern from the second camera 22, and measures three-dimensional shape information of the object 1 to be measured. have.

According to the second embodiment of the present invention, since one projector 10 is used, it is possible to reduce the installation space and reduce the manufacturing cost.

3 is a view showing a three-dimensional shape measuring apparatus according to a third embodiment of the present invention.

In the three-dimensional shape measuring apparatus according to the third embodiment of the present invention, the first projector 11 and the second object 1 to project the pattern toward the first surface 1a of the object 1 to be measured. As long as the second projector 12 projecting the pattern toward the surface 1b and the first projection pattern formed on the first surface 1a of the measurement object 1 are incident and reflect the incident first projection pattern. The second projection pattern formed on the pair of first reflection mirrors 131 and 132 and the second surface 1b of the measurement object 1 is incident, and the pair of second reflections reflect the incident second projection pattern. Splitter 140 and a splitter 140 into which a first projection pattern and a second projection pattern are incident from the reflection mirrors 133 and 134, the first reflection mirrors 131 and 132, and the second reflection mirrors 133 and 134. 3 of the object to be measured 1 based on the camera 20 photographing the first projection pattern and the second projection pattern reflected by 140 and the first projection pattern and the second projection pattern photographed by the camera 20. Control to measure the dimensional shape information 30 may be included.

The first projector 11 and the second projector 12 may be arranged to be spaced apart in the first separation direction w1. The first projector 11 projects the pattern toward the first surface 1a of the measurement object 1 in the first projection direction k1, and the second projector 12 is provided with the first projection 11 of the object 1 to be measured. The pattern can be projected in the second projection direction k2 toward the second surface 1b.

The first projection direction k1 intersects the first separation direction w1 and the second projection direction k2, and the second projection direction k2 is the first separation direction w1 and the first projection direction k1. Can be crossed with

The object to be measured 1 may be located other than between the first projector 11 and the second projector 12.

The measurement object 1 may be positioned between the pair of first reflection mirrors 131 and 132 and the pair of second reflection mirrors 133 and 134.

In detail, the pair of first reflecting mirrors 131 and 132 include a first mirror 131 and a second mirror 132, and the pair of second reflecting mirrors 133 and 134 may include a third mirror. The mirror 133 and the fourth mirror 134 may be included.

The first mirror 131 and the third mirror 133 are positioned to be spaced apart in the first separation direction w1, and the second mirror 132 and the fourth mirror 134 are spaced apart in the first separation direction w1. Can be positioned.

The first mirror 131 and the second mirror 132 are spaced apart in the second separation direction w2, and the third mirror 133 and the fourth mirror 134 are spaced apart in the second separation direction w2. Can be positioned.

The second separation direction w2 may cross the first separation direction w1.

The object 1 may be located between the first mirror 131 and the third mirror 133, and the splitter 140 may be located between the second mirror 132 and the fourth mirror 134.

The splitter 140 has a first incident surface 140a through which the first projection pattern is incident through the first reflection mirrors 131 and 132, and a second projection pattern through the second reflection mirrors 133 and 134. An incident second incident surface 140b may be formed.

The camera 20 may be positioned to be spaced apart from the splitter 140 in the second separation direction w2.

Preferably, the camera 20 may be positioned such that the center of the lens faces an intersection where the first incident surface 140a and the second incident surface 140b of the splitter 140 meet.

The pattern projected by the first projector 11 is projected on the first surface 1a of the measurement target 1, and the projection pattern formed on the first surface 1a includes the first mirror 131 and the second mirror ( The light may be reflected to the first incident surface 140a of the splitter 140 through 132.

The pattern projected by the second projector 12 is projected on the second surface 1b of the measurement target 1, and the projection pattern formed on the second surface 1b includes the third mirror 133 and the fourth mirror ( The light may be reflected to the second incident surface 140b of the splitter 140 through 134.

The camera 20 may photograph the first projection pattern reflected by the first incident surface 140a and the second projection pattern reflected by the second incident surface 140b together.

The controller 30 may measure three-dimensional shape information of the object 1 by analyzing the projection pattern image photographed by the camera 20. Here, the projection pattern image may include a projection pattern reflected from the first incident surface 140a and a projection pattern reflected from the second incident surface 140b.

4 is a view showing a three-dimensional shape measuring apparatus according to a fourth embodiment of the present invention.

The three-dimensional shape measuring apparatus according to the fourth embodiment of the present invention includes a projector 10 for projecting a pattern, and a material formed on the first surface 1a of the object to be measured 1 by the pattern projected from the projector 10. The first projection pattern is incident, and a pair of first reflection mirrors 131 and 132 reflecting the incident first projection pattern and a second projection pattern formed on the second surface 1b of the object 1 are The first incident surface 140a that is incident and receives the first projection pattern from the pair of second reflection mirrors 133 and 134 and the first reflection mirrors 131 and 132 that reflect the incident second projection pattern. ) And a first splitter 140 having a second incident surface 140b through which the second projection pattern is incident from the second reflecting mirrors 133 and 134, and a first projection pattern and a second reflected reflection from the splitter 140. A camera 20 for photographing the projection pattern, a controller 30 for measuring three-dimensional shape information of the object to be measured 1 based on the first projection pattern and the second projection pattern photographed by the camera 20; A second splitter having a first reflecting surface 110a reflecting a part of the pattern projected by the projector 10 in a first direction l1 and a second reflecting surface 110b reflecting a second direction l2 110, and first and second pattern reflecting mirrors 121 and 122 reflecting the pattern reflected from the second splitter 110 to the object 1 to be measured.

The first splitter 140 is positioned between the camera 20 and the measurement object 1, the measurement object 1 is positioned between the first splitter 140 and the second splitter 110, and the first The splitter 140 may be positioned between the object 1 and the projector 10.

The camera 20, the first splitter 140, the object 1, the second splitter 110, and the projector 10 may be positioned on the same line.

The projector 10 may project a pattern such that a part is incident on the first reflective surface 110a of the second splitter 110 and the remaining part is incident on the second reflective surface 110b of the second splitter 110. have.

The pattern incident on the first reflecting surface 110a of the second splitter 110 is reflected in the first direction l1 and transmitted to the first pattern reflecting mirror 121 and the second half of the second splitter 110. The pattern incident on the slope 110b may be reflected in the second direction l2 and transmitted to the second pattern reflection mirror 122.

The second splitter 110 may be positioned between the first pattern reflection mirror 121 and the second pattern reflection mirror 122, and may be spaced apart in the first separation direction w1.

The first pattern reflection mirror 121 reflects the incident pattern in a third direction l3 crossing the first direction l1, and the second pattern reflection mirror 122 reflects the incident pattern in the second direction l2. ) May be reflected in the fourth direction l4 that intersects.

In addition, the third direction l3 faces the first surface 1a of the measurement object 1, and the fourth direction l4 faces the second surface 1b of the measurement object 1, and the third direction The direction l3 and the fourth direction l4 may intersect.

A projection pattern is formed on the first surface 1a of the object to be measured 1 by a pattern incident from the first pattern reflection mirror 121, and the projection pattern is a pair of first reflection mirrors 131 and 132. It may be transmitted to the first incident surface 140a of the first splitter 140 through.

On the second surface 1b of the object to be measured 1, a projection pattern is formed by a pattern incident from the second pattern reflection mirror 122, and the projection pattern is a pair of second reflection mirrors 133 and 134. It may be transmitted to the second incident surface 140b of the first splitter 140 through.

The camera 20 may photograph the first projection pattern reflected from the first incident surface 140a and the second projection pattern reflected from the second incident surface 140b.

The controller 30 may calculate the 3D shape information of the object 1 by analyzing the first projection pattern and the second projection pattern photographed by the camera 20.

5 is a perspective view of a three-dimensional shape measuring apparatus according to a fourth embodiment of the present invention.

FIG. 5 is a diagram illustrating the shape of each component of the three-dimensional shape measuring apparatus.

That is, in the first splitter 140, the first incident surface 140a faces the second mirror 132, the second incident surface 140b faces the fourth mirror 134, and the first incident surface 140a. A connection surface 140d may be formed to connect an intersection point 140c where one side of the second incident surface 140b and a second side of the first incident surface 140a and the other side of the second incident surface 140b meet. have.

The reflective surface of the first mirror 131 faces the second mirror 132 and the third mirror 133, and the reflective surface of the second mirror 132 faces the first mirror 131 and the fourth mirror 134. The reflecting surfaces of the third mirror 133 are directed toward the first mirror 131 and the fourth mirror 134, and the reflecting surfaces of the fourth mirror 134 are the second mirror 132 and the third mirror 133. )

The reflecting surface of the first pattern reflecting mirror 121 faces the second splitter 110 and the object to be measured 1, and the reflecting surface of the second pattern reflecting mirror 122 is the second splitter 110 and the object to be measured. You can face (1).

The object to be measured 1 may be supported by the support 200. The support 200 may have a through hole formed so as not to obstruct a path in which the pattern moves or a path in which the projection pattern moves.

In addition, although not shown in FIG. 5, the projector 10, the camera 20, the first reflecting mirrors 131 and 132, the second reflecting mirrors 133 and 134, the first splitter 140 and the second Each of the splitters 110 may be supported by a support (not shown), and likewise, a through hole may be formed so as not to obstruct a path in which the pattern moves or a path in which the projection pattern moves.

Meanwhile, although FIG. 5 illustrates a three-dimensional shape measuring apparatus according to the fourth embodiment as an example, each of the components constituting the three-dimensional shape measuring apparatus according to the first to third embodiments (eg, the first The splitter 140 and the reflective mirrors 131, 132, 133, and 134 may be formed in the same and similar shapes as each of the components shown in FIG. 5.

According to the third and fourth embodiments of the present invention, since only one camera is used instead of a plurality of cameras, there is an advantage of reducing manufacturing costs.

Meanwhile, the 3D shape measuring apparatus may include other elements capable of beam separation instead of the splitter.

6 is a view showing a three-dimensional shape measuring apparatus according to a fifth embodiment of the present invention.

As shown in FIG. 6, a three-dimensional shape measuring apparatus according to a fifth embodiment of the present invention includes a pattern incident from a projector 10, a beam split apparatus 150, and a beam split apparatus 150 that project a pattern. First and second pattern reflecting mirrors 121 and 122 reflecting the light, and a pair of first reflecting mirrors 131 and 132 transferring the projection pattern formed on the object 1 to the splitter 140; On the first and second projection patterns photographed by the camera 20 and the camera 20 photographing the first and second projection patterns reflected by the second reflection mirrors 133 and 134 and the splitter 140. It may include a control unit 30 for measuring the three-dimensional shape of the object to be measured 1 based on.

Descriptions on the same components as those described above will be omitted.

The beam splitting apparatus 150 may transmit a part of the incident pattern in the first direction m1, and transmit the remaining part in the second direction m2. In this case, the projector 10 may not be positioned on the same line as the camera 20, the splitter 140, the object 1, and the beam split apparatus 150.

Accordingly, there is an advantage that the positional limitation of the projector 10 can be reduced.

Next, a method of calculating a shape of an object to be measured by the 3D shape measuring apparatus according to various embodiments of the present disclosure will be described with reference to FIGS. 7 to 10.

First, FIG. 7 is a control block diagram of a three-dimensional shape measuring apparatus according to an embodiment of the present invention.

According to various embodiments of the present disclosure, in the apparatus for measuring a three-dimensional shape, the controller 30 may project the pattern from the projector 10, and the camera 20 may be applied to the object 1 by the pattern projected from the projector 10. It is possible to control to photograph the formed projection pattern.

The controller 30 may obtain three-dimensional shape information of the object to be measured 1 in a manner described below with reference to FIGS. 8 to 10.

The three-dimensional shape information may include information on the degree of warpage and the thickness of the object to be measured 1.

The controller 30 may simulate the shape of the object to be measured 1 using the obtained three-dimensional shape information.

The controller 30 may transmit the 3D shape information of the object 1 to the display 40. The display unit 40 may display at least some or all of three-dimensional shape information of the object to be measured 1, for example, a degree of warpage, thickness information, and a simulation shape.

Next, FIG. 8 is an exemplary diagram of a projection pattern photographed by the 3D shape measuring apparatus according to the first and second embodiments of the present invention.

The 3D shape measuring apparatus according to the first and second exemplary embodiments may include a first camera 21 and a second camera 22, and the first camera 21 may include a first of the measured object 1. The first projection pattern corresponding to the surface 1a may be photographed, and the second camera 22 may photograph the second projection pattern corresponding to the second surface 1b of the object 1 to be measured.

The first camera 21 and the second camera 22 may simultaneously photograph the first projection pattern and the second projection pattern, respectively.

FIG. 8A illustrates an example of the first projection pattern photographed by the first camera 21, and FIG. 8B illustrates an example of the second projection pattern photographed by the second camera 22. The first projection pattern and the second projection pattern may be the same or different according to the shape of the first surface 1a and the second surface 1b of the measurement object 1.

9 is an exemplary view of a projection pattern photographed by the 3D shape measuring apparatus according to the third and fourth embodiments of the present invention.

In detail, the image illustrated in FIG. 9A may be an image photographed by the camera 20 provided in the 3D shape measuring apparatus according to the third and fourth embodiments.

The three-dimensional shape measuring apparatus according to the third and fourth embodiments includes only one camera, and one camera captures both the first projection pattern and the second projection pattern. It may include all of the second projection pattern.

The controller 30 of the 3D shape measuring apparatus according to the third and fourth embodiments may include a first projection pattern corresponding to the first surface 1a of the object 1 in the image photographed by the camera 20. The second projection pattern corresponding to the second surface 1b may be separated. The controller 30 may generate an image representing the first projection pattern and an image representing the second projection pattern by analyzing the image photographed by the camera 20. FIG. 9B is an illustration of an image representing the first projection pattern, and FIG. 9C is an illustration of an image representing the second projection pattern.

On the other hand, the projector 10 according to various embodiments of the present invention when irradiating a pattern can be irradiated by moving the pattern by 1/4 λ, the camera 20 can be taken by moving 1/4 λ by the same manner. . That is, the pattern period may be λ, and the projector 10 and the camera 20 may obtain a projection pattern in which the pattern is shifted by 1/4 λ. The projectors according to the first to second embodiments acquire four first projection pattern images and the four second projection pattern images, and the projectors according to the third to fourth embodiments generate the first projection pattern and the second projection pattern. Four projection pattern images which have together can be obtained.

10 is an exemplary diagram for describing a method of obtaining 3D shape information through a projection pattern image by a 3D shape measuring apparatus according to various embodiments of the present disclosure.

10A is an exemplary diagram illustrating a projection pattern image obtained in FIGS. 8 and 9.

In particular, the left image of FIG. 10 (a) shows a projection pattern when the pattern is projected on a flat surface having a constant height, and the right image of FIG. If so, it is an exemplary diagram showing a projection pattern.

As shown in FIG. 10A, when there is a difference in height due to a curved surface of the object to be measured, the projected pattern may be deformed and formed on the surface of the object to be measured.

As described above, the controller 30 may obtain four images representing the projection pattern with respect to the first surface 1a and the second surface 1b of the object 1. Accordingly, the controller 30 may generate a phase image as shown in FIG. 10 (b) by applying a 4-bucket algorithm to the obtained projection pattern image.

The controller 30 may generate a depth image from which 2π ambiguity is removed by unwrapping the phase image.

The controller 30 may extract height information (3D Height Map) from the depth image based on the calibration information.

Specifically, as shown in FIG. 10 (c), the controller 30 may obtain final 3D height information reflecting a physical dimension by converting actual height information corresponding to a phase map with respect to a phase image. . The controller 30 may model the shape of the object 1 in three dimensions by performing 3D reconstruction.

The method of extracting the phase image, the depth image, and the height information of one surface is a well-known technique, and thus a detailed description thereof will be omitted.

As such, the controller 30 may acquire height information, shape information, and warp information of the first surface 1a of the measurement object 1, and similarly, the second surface 1b of the measurement object 1. Height information, shape information, and warping information can be obtained.

The controller 30 may acquire thickness information of the measured object 1 through the sum of the height of the first surface 1a and the height of the second surface 1b, and the like. Based on this, shape information, warpage information, and the like can be calculated.

On the other hand, the three-dimensional shape measuring apparatus according to an embodiment of the present invention can measure the double-sided information of the measurement object 1 at the same time, the error may occur depending on the position of the measurement object (1). In order to minimize the occurrence of such an error, a correction coefficient may be applied through a reference sample before the measurement object 1 is measured.

Specifically, the first and second surfaces of the reference sample may be measured and three-dimensional shape information may be calculated by including a reference sample whose thickness has been verified in advance for thickness measurement calibration.

Since the controller 30 already knows the thickness of the reference sample, if there is a difference between the expected thickness information and the actually measured thickness information, the controller 30 may calculate noise and bias, and calculate a correction coefficient.

Thereafter, the controller 30 may apply the correction coefficient pre-calculated at the time of measuring the actual measured object 1 to correct the calculated 3D shape information of the measured object 1. Thereby, the accuracy of the three-dimensional shape information measurement of the to-be-measured object 1 can be improved.

The above-described three-dimensional shape measuring apparatus may not be limitedly applied to the configuration and method of the above-described embodiments, but the embodiments may be selectively combined with all or some of the embodiments so that various modifications may be made. It may be configured.

The above description is merely illustrative of the technical idea of the present invention, and those skilled in the art to which the present invention pertains may make various modifications and changes without departing from the essential characteristics of the present invention.

Therefore, the embodiments disclosed in the present invention are not intended to limit the technical idea of the present invention but to describe the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments.

The protection scope of the present invention should be interpreted by the following claims, and all technical ideas within the equivalent scope should be interpreted as being included in the scope of the present invention.

1: measuring object 10: projector
20: camera 30: control unit
40: display
140: first splitter 110: second splitter
121: first pattern reflection mirror 122: second pattern reflection mirror
131: first mirror 132: second mirror
133: third mirror 134: fourth mirror

Claims (10)

delete delete delete delete A projector for projecting a pattern;
A pair of first reflection mirrors in which the first projection pattern formed on the first surface of the object to be measured is incident by the pattern and reflects the incident first projection pattern;
A pair of second reflection mirrors on which the second projection pattern formed on the second surface of the object to be measured is incident and reflects the incident second projection pattern;
A first splitter having a first incident surface on which the first projection pattern is incident from the pair of first reflection mirrors and a second incident surface on which the second projection pattern is incident from the pair of second reflection mirrors;
A camera photographing a first projection pattern formed on the first incident surface and a second projection pattern formed on the second incident surface; And
And a controller configured to acquire three-dimensional shape information of the object to be measured based on the first projection pattern and the second projection pattern photographed by the camera.
And the second surface is a surface opposite to the first surface. The method of claim 5,
A second splitter reflecting a part of the pattern projected by the projector in a first direction and reflecting a part of the pattern projected in the second direction;
A first pattern reflecting mirror reflecting the pattern reflected by the second splitter in the first direction to the first surface of the object to be measured; And
And a second pattern reflecting mirror reflecting the pattern reflected by the second splitter in the second direction to the second surface of the object to be measured. The method of claim 6,
And a camera, the first splitter, the object to be measured, the second splitter, and the projector in a straight line in order. The method of claim 5,
The projector includes a first projector and a second projector,
The first projector projects a pattern toward the first side of the object to be measured,
And the second projector projects a pattern toward the second surface of the object to be measured. The method according to any one of claims 5 to 8,
And the object to be measured is positioned between the pair of first pattern reflection mirrors and the pair of second pattern reflection mirrors. The method according to any one of claims 5 to 8,
The three-dimensional shape information
3D shape measurement apparatus including the bending degree and thickness information of the measurement object.

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