JPH07218226A - Three-dimesional measuring apparatus of surface shape - Google Patents
Three-dimesional measuring apparatus of surface shapeInfo
- Publication number
- JPH07218226A JPH07218226A JP843994A JP843994A JPH07218226A JP H07218226 A JPH07218226 A JP H07218226A JP 843994 A JP843994 A JP 843994A JP 843994 A JP843994 A JP 843994A JP H07218226 A JPH07218226 A JP H07218226A
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- Japan
- Prior art keywords
- projection
- surface shape
- lens
- measured
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、非接触で計測対象物体
の表面形状を求める表面形状３次元計測装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a three-dimensional surface shape measuring apparatus for non-contactly obtaining the surface shape of an object to be measured.
【０００２】[0002]
【従来の技術】従来、機械部品や接点等の電気部品の表
面を非接触で高精度に計測する方法として、三角測量の
原理を応用した光触針を計測ヘッドとし、ＸＹテーブル
の上に計測対象物体を設置して、このＸＹテーブルを駆
動することにより表面形状を計測するものや、走査型電
子顕微鏡を用いて電子ビームを計測対象物体面にあて、
反射したビームを複数のセンサーで捕らえて演算により
形状に直す方法がある。2. Description of the Related Art Conventionally, as a method of highly accurately measuring the surfaces of electrical parts such as mechanical parts and contacts in a non-contact manner, an optical contact probe applying the principle of triangulation is used as a measuring head and measured on an XY table. A target object is installed and the surface shape is measured by driving this XY table, or an electron beam is applied to the measurement target object surface using a scanning electron microscope.
There is a method in which the reflected beam is captured by multiple sensors and the shape is calculated by calculation.
【０００３】しかし、三角測量の原理を応用したもの
は、ＸＹテーブルのスキャニングに時間を要するため実
用にならない場合があり、走査型電子顕微鏡を用いたも
のは、計測対象物体の前処理として蒸着が必要なため、
厳密には非接触とは言えず、計測対象物体が使用できな
くなることがある。However, an application of the principle of triangulation may not be practical because it takes time to scan an XY table, and an application of a scanning electron microscope requires evaporation as a pretreatment of an object to be measured. Because it is necessary
Strictly speaking, it cannot be said to be non-contact, and the object to be measured may become unusable.
【０００４】そこで、特開平４−２７８４０６に示すよ
うに、計測対象物体面に対し斜め方向より照明の照度分
布が正弦状態の格子を投影し、物体面にできた縞画像の
明度を格子の投影方向とは別の角度から計測する変形格
子投影法を用い、その縞画像を演算処理することによ
り、物体の３次元の表面形状を求める縞走査法がある。
この変形格子投影法を用いた計測装置は、図４に示すよ
うに、光を放出する光源1 と、一定間隔のピッチからな
る格子3 と、格子3 を通過した光を計測対象物体2 に投
影する投影レンズ13と、計測対象物体2 の表面の縞画像
を撮影する撮影レンズ14と、撮影レンズ14で撮影した縞
画像を入力し計測対象物体2 の表面形状を演算して求め
る制御部7 とを有している。Therefore, as disclosed in Japanese Patent Laid-Open No. 4-278406, a grid whose illumination illuminance distribution is sinusoidal is projected obliquely to the object surface to be measured, and the lightness of the striped image formed on the object surface is projected onto the grid. There is a fringe scanning method that obtains a three-dimensional surface shape of an object by using a modified grid projection method that measures from an angle different from the direction and processing the fringe image.
As shown in FIG. 4, the measuring apparatus using the modified grid projection method projects a light source 1 that emits light, a grid 3 with a constant pitch, and light that has passed through the grid 3 onto a measurement target object 2. A projection lens 13, a shooting lens 14 that captures a striped image of the surface of the measurement target object 2, and a control unit 7 that calculates the surface shape of the measurement target object 2 by inputting the striped image captured by the shooting lens 14. have.
【０００５】[0005]
【発明が解決しようとする課題】前述した変形格子投影
法を用いた表面形状３次元計測装置は、投影レンズと撮
影レンズの２個のレンズを有しているため、装置が大き
くなりコンパクト化が困難であるとともに、コストが高
くなっていた。Since the three-dimensional surface shape measuring apparatus using the modified grid projection method described above has two lenses, a projection lens and a photographing lens, the apparatus becomes large and compact. It was difficult and costly.
【０００６】本発明は、かかる事由に鑑みてなしたもの
で、その目的とするところは、コンパクト化が実現でき
る表面形状３次元計測装置を提供するにある。The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a surface shape three-dimensional measuring apparatus which can be made compact.
【０００７】[0007]
【課題を解決するための手段】かかる課題を解決するた
めに、請求項１記載の表面形状３次元計測装置は、光を
放出する光源と、一定間隔のピッチからなる格子と、格
子を通過した光を計測対象物体に投影する投影レンズ
と、計測対象物体表面の縞画像を撮影する撮影レンズ
と、撮影レンズで撮影した縞画像を入力し計測対象物体
の表面形状を演算して求める制御部と、を有する表面形
状３次元計測装置において、上記両レンズと計測対象物
体の間に光を反射するミラーを設け、投影レンズと撮影
レンズを一体の投影撮影レンズとした構成としている。In order to solve such a problem, the three-dimensional surface profile measuring apparatus according to claim 1 is a light source which emits light, a grating having a pitch of a constant interval, and a grating which passes through the grating. A projection lens that projects light onto a measurement target object, a shooting lens that captures a striped image of the surface of the measurement target object, and a control unit that inputs the striped image captured by the shooting lens and calculates the surface shape of the measurement target object. In the surface shape three-dimensional measuring apparatus having ,, a mirror for reflecting light is provided between the both lenses and the object to be measured, and the projection lens and the photographing lens are integrated into a projection photographing lens.
【０００８】また、請求項２記載の表面形状３次元計測
装置は、請求項１記載のミラーを、計測対象物体に光を
投影する第１ミラーと、計測対象物体表面の縞画像を投
影撮影レンズに入力する第２ミラーにより構成してい
る。According to a second aspect of the present invention, there is provided a three-dimensional surface shape measuring apparatus comprising: the mirror according to the first aspect, a first mirror for projecting light onto an object to be measured, and a projection lens for projecting a fringe image on the surface of the object to be measured. It is composed of a second mirror for inputting to.
【０００９】[0009]
【作用】請求項１記載の構成によれば、投影撮影レンズ
で光を計測対象物体に投影し、それにより形成した縞画
像を撮影するに際し、光をミラーで反射することによ
り、投影系と撮影系の光軸をずらすことができるので、
計測対象物体を異なる角度から投影及び撮影する必要の
ある変形格子投影法が利用可能となる。According to the structure of claim 1, when the projection / photographing lens projects light onto the object to be measured and the fringe image formed thereby is photographed, the light is reflected by the mirror so that the projection system and the photographing system are imaged. Since the optical axis of the system can be shifted,
A modified grid projection method that requires projection and imaging of the measurement target object from different angles can be used.
【００１０】また、請求項２記載の構成によれば、請求
項１記載の発明の作用を奏するうえに、投影系と撮影系
の光軸が計測対象物体の法線方向に対しある角度を有す
ることにより、縞画像の格子ピッチを大きくすることが
できる。According to the structure of claim 2, in addition to the effect of the invention of claim 1, the optical axes of the projection system and the photographing system have an angle with respect to the normal direction of the object to be measured. As a result, the grid pitch of the striped image can be increased.
【００１１】[0011]
【実施例】以下、本発明の第１実施例を図１に基づいて
説明する。図１は本発明のシステム構成図であり、投影
系は計測対象物体の法線に対して一定角度を有し、撮影
系は計測対象物体の法線方向に設けられている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described below with reference to FIG. FIG. 1 is a system configuration diagram of the present invention. The projection system has a constant angle with respect to the normal line of the measurement target object, and the imaging system is provided in the normal direction of the measurement target object.
【００１２】1 は光源であり、ランプ1a、レンズ1b、反
射板1cを有して光を放出する。光は後述する格子、投影
撮影レンズを通り、後述するミラーに反射して計測対象
物体2 に当てられる。Reference numeral 1 denotes a light source, which has a lamp 1a, a lens 1b, and a reflector 1c, and emits light. The light passes through a grating and a projection photographing lens, which will be described later, and is reflected by a mirror, which will be described later, to be applied to the measurement target object 2.
【００１３】3 は格子であり、一定間隔のピッチからな
る隙間を光が通過するよう構成されている。なお、この
格子は、光が通過する所としない所の２パターンだけで
なく、徐々に光の通過量が変化するような、例えば正弦
波形状の濃淡画像の液晶パターンで構成してもよい。Reference numeral 3 denotes a grating, which is configured to allow light to pass through a gap having a constant pitch. The grid may be formed not only in two patterns, that is, a place where light passes and a place where light does not pass, but may also be configured by a liquid crystal pattern of a gray-scale image of, for example, a sine wave in which the amount of passing light gradually changes.
【００１４】4 は投影撮影レンズであり、計測対象物体
2 の法線上に設けられ、格子3 を通過した光を投影する
とともに、計測対象物体2 の表面に形成される後述する
縞画像を撮影する。投影撮影レンズ4 の投影系の光軸は
格子3 に対して垂直になっており、また、投影撮影レン
ズ4 を通る投影系、撮影系の光軸は、角度が異なってい
る。なお、光源1 、格子3 、投影撮影レンズ4 、ミラ
ー、計測対象物体2 からなる光軸を投影系、計測対象物
体2 、投影撮影レンズ4 からなる光軸を撮影系と呼ぶ。Reference numeral 4 denotes a projection photographing lens, which is an object to be measured.
It is provided on the normal line of 2 and projects the light that has passed through the grating 3 and captures a stripe image described later formed on the surface of the measurement target object 2. The optical axis of the projection system of the projection shooting lens 4 is perpendicular to the grating 3, and the angles of the optical axes of the projection system and the shooting system passing through the projection shooting lens 4 are different. The optical axis consisting of the light source 1, the grating 3, the projection photographing lens 4, the mirror, and the measurement target object 2 is called a projection system, and the optical axis consisting of the measurement target object 2 and the projection photographing lens 4 is called a photographing system.
【００１５】5 はミラーであり、投影撮影レンズ4 と計
測対象物体2 の間に設けられて、投影撮影レンズ4 を通
過した光を反射して計測対象物体2 に当てる。計測対象
物体2 の表面には、投影系から見て等間隔のピッチの格
子からなる縞画像が形成される。なお、6 は計測台であ
る。Reference numeral 5 denotes a mirror, which is provided between the projection photographing lens 4 and the measurement target object 2 and reflects the light passing through the projection photographing lens 4 to impinge on the measurement target object 2. On the surface of the measurement target object 2, a fringe image composed of a grid with a pitch at equal intervals as viewed from the projection system is formed. In addition, 6 is a measuring stand.
【００１６】7 は制御部であり、ＣＣＤカメラ8 、カメ
ラコントローラ9 、画像入力ボード10、コンピュータ1
1、テーブルコントローラ12より構成されている。投影
撮影レンズ4 で撮影した縞画像は、ＣＣＤカメラ8 で写
されたのち、カメラコントローラ9 、画像入力ボード10
を介してコンピュータ11に入力される。テーブルコント
ローラ12は、格子3 の位置をピッチ方向に移動させるも
のであり、コンピュータ11で制御される。Reference numeral 7 denotes a control unit, which includes a CCD camera 8, a camera controller 9, an image input board 10, and a computer 1.
1 and table controller 12. The stripe image taken by the projection shooting lens 4 is taken by the CCD camera 8, and then the camera controller 9 and the image input board 10
Is input to the computer 11 via. The table controller 12 moves the position of the lattice 3 in the pitch direction and is controlled by the computer 11.
【００１７】次に、以上の構成を用いた表面形状３次元
計測装置について説明する。光源1を点灯することで、
格子3 、投影撮影レンズ4 を通過した光は、ミラー5 で
反射して、計測対象物体2 の表面に投影系から見て等間
隔のピッチの格子からなる縞画像を形成する。それを投
影撮影レンズ4 で撮影系から観察することにより、計測
対象物体2 の表面の凹凸に応じた変形格子からなる縞画
像を撮影することができる。これが、変形格子投影法で
ある。その縞画像の画素データを、ＣＣＤカメラ8 、カ
メラコントローラ9 、画像入力ボード10を経て、コンピ
ュータ11に入力したあとで、テーブルコントローラ12に
より格子3 を格子の１／４ピッチだけピッチ方向に移動
させる。そして上記と同様に縞画像を撮影する。これを
４回繰り返し、４種類の縞画像（縞画像１、縞画像２、
縞画像３、縞画像４）を画素データとしてコンピュータ
11に入力する。Next, a surface shape three-dimensional measuring apparatus using the above configuration will be described. By turning on the light source 1,
The light passing through the grating 3 and the projection photographing lens 4 is reflected by the mirror 5 to form a striped image on the surface of the object 2 to be measured, which is composed of gratings having an equal pitch when viewed from the projection system. By observing it with the projection photographing lens 4 from the photographing system, it is possible to photograph a fringe image composed of a deformed lattice corresponding to the unevenness of the surface of the measurement target object 2. This is the modified grid projection method. After inputting pixel data of the striped image to the computer 11 via the CCD camera 8, the camera controller 9 and the image input board 10, the table controller 12 moves the lattice 3 in the pitch direction by ¼ pitch of the lattice. . Then, a striped image is captured in the same manner as above. This is repeated four times, and four types of striped images (striped image 1, striped image 2,
Computer with stripe image 3 and stripe image 4) as pixel data
Enter in 11.
【００１８】計測対象物体2 の任意の位置での各縞画像
の画素の光強度をＩ１，Ｉ２，Ｉ３，Ｉ４とすると、任
意の位置の位相φは、次の式で求められる。Assuming that the light intensities of the pixels of each fringe image at any position of the object to be measured 2 are I1, I2, I3 and I4, the phase φ at any position can be obtained by the following equation.
【００１９】 φ＝ｔａｎ-1（（Ｉ２−Ｉ４）／（Ｉ１−Ｉ３）） このデータを計測対象物体の表面全体にわたってつなぎ
合わせることで、全体の形状データが得られる。なお、
以上のような演算をすることを縞走査法と呼ぶ。また、
４画面利用の縞走査法について説明したが、特に４画面
に限定されるものではなく、３画面以上で利用すること
が可能である。Φ = tan −1 ((I 2 −I 4) / (I 1 −I 3)) By connecting this data over the entire surface of the measurement target object, the entire shape data can be obtained. In addition,
Performing the above calculation is called a stripe scanning method. Also,
Although the fringe scanning method using four screens has been described, the present invention is not particularly limited to four screens, and three or more screens can be used.
【００２０】以上により求められた形状データより正確
な計測対象物体の３次元表面形状が求められ、また、各
しきい値を用いて形状データを判定することにより、表
面のキズ、付着などの欠陥が簡単に求めることができ
る。An accurate three-dimensional surface shape of the object to be measured is obtained from the shape data obtained as described above, and the shape data is determined by using each threshold value, whereby defects such as surface scratches and adhesion are obtained. Can be easily requested.
【００２１】次に、本発明の変形例を図２に示す。光源
1 、格子3 、投影撮影レンズ4 、計測対象物体2 からな
る投影系を計測対象物体2 の法線方向である真上に設
け、計測対象物体2 、ミラー5 、投影撮影レンズ4 から
なる撮影系を計測対象物体2 の法線に対して一定の角度
を有するようにしたものである。Next, a modification of the present invention is shown in FIG. light source
A projection system consisting of 1, the grating 3, the projection photographing lens 4, and the measuring object 2 is provided directly above the measuring object 2 in the normal direction, and the photographing system consisting of the measuring object 2, the mirror 5, and the projection photographing lens 4. Is to have a constant angle with respect to the normal line of the object to be measured 2.
【００２２】次に、本発明の第２実施例を図３に示す。
これは、投影系、撮影系とも計測対象物体2 の法線に対
して一定の角度を有するようにしたものである。Next, a second embodiment of the present invention is shown in FIG.
This is such that both the projection system and the imaging system have a constant angle with respect to the normal line of the measurement target object 2.
【００２３】5aは第１ミラーであり、投影撮影レンズ4
と計測対象物体2 の間に設けられて、計測対象物体に光
を投影する。5bは第２ミラーであり、同じく投影撮影レ
ンズ4 と計測対象物体2 の間に設けられて、計測対象物
体2 の表面の縞画像を投影撮影レンズ4 に入力する。な
お、光源1 、格子3 、投影撮影レンズ4 、第１ミラー5
a、計測対象物体2 で投影系を、計測対象物体2 、第２
ミラー5b、投影撮影レンズ4 で撮影系を構成している。Reference numeral 5a denotes a first mirror, which is a projection photographing lens 4
It is provided between the object to be measured 2 and the object to be measured to project light. Reference numeral 5b denotes a second mirror, which is also provided between the projection shooting lens 4 and the measurement target object 2 and inputs the striped image of the surface of the measurement target object 2 to the projection shooting lens 4. In addition, the light source 1, the grating 3, the projection photographing lens 4, the first mirror 5
a, the projection system with the measurement target object 2, the measurement target object 2, the second
The mirror 5b and the projection shooting lens 4 make up the shooting system.
【００２４】このような構成にすることにより、第１実
施例や変形例と比較して、撮影する格子のピッチが拡大
できて、表面形状の計測精度を高めることができる。With such a structure, the pitch of the grating to be photographed can be increased and the accuracy of measuring the surface shape can be increased, as compared with the first embodiment and the modification.
【００２５】[0025]
【発明の効果】請求項１記載の表面形状３次元計測装置
は、投影撮影レンズで光を計測対象物体に投影し、それ
により形成した縞画像を撮影するに際し、光をミラーで
反射することにより、投影系と撮影系の光軸をずらすこ
とができるので、計測対象物体を異なる角度から投影及
び撮影する必要のある変形格子投影法が利用可能とな
り、その結果、レンズが一個で済み、装置のコンパクト
化が図れるとともに、低コスト化も図れる。According to the three-dimensional surface shape measuring apparatus of the first aspect, the projection photographing lens projects the light onto the object to be measured, and when the fringe image formed thereby is photographed, the light is reflected by the mirror. Since the optical axes of the projection system and the imaging system can be shifted, it is possible to use the modified grid projection method in which it is necessary to project and image the object to be measured from different angles, and as a result, only one lens is required and the device Not only can it be made compact, but the cost can also be reduced.
【００２６】また、請求項２記載の表面形状３次元計測
装置は、請求項１記載の発明の効果を奏するうえに、投
影系と撮影系の光軸が計測対象物体の法線方向に対しあ
る角度を有することにより、縞画像の格子ピッチを大き
くすることができるので、計測精度の向上が図れる。In addition to the effect of the invention of claim 1, the three-dimensional surface shape measuring device of claim 2 has the optical axes of the projection system and the photographing system in the normal direction of the object to be measured. Since the grid pitch of the striped image can be increased by having the angle, the measurement accuracy can be improved.
【図１】本発明の第１実施例を示す表面形状３次元計測
装置のシステム構成図である。FIG. 1 is a system configuration diagram of a surface shape three-dimensional measuring apparatus showing a first embodiment of the present invention.
【図２】その変形例を示すシステム構成図である。FIG. 2 is a system configuration diagram showing a modified example thereof.
【図３】本発明の第２実施例を示す表面形状３次元計測
装置のシステム構成図である。FIG. 3 is a system configuration diagram of a surface shape three-dimensional measuring apparatus showing a second embodiment of the present invention.
【図４】本発明の従来例を示す表面形状３次元計測装置
のシステム構成図である。FIG. 4 is a system configuration diagram of a surface shape three-dimensional measuring apparatus showing a conventional example of the present invention.
1 光源 2 計測対象物体 3 格子 4 投影撮影レンズ 5 ミラー 6 計測台 7 制御部 8 ＣＣＤカメラ 9 カメラコントローラ 10 画像入力ボード 11 コンピュータ 12 テーブルコントローラ 1 Light source 2 Object to be measured 3 Lattice 4 Projection shooting lens 5 Mirror 6 Measuring stand 7 Controller 8 CCD camera 9 Camera controller 10 Image input board 11 Computer 12 Table controller
Claims (2)
チからなる格子と、格子を通過した光を計測対象物体に
投影する投影レンズと、計測対象物体表面の縞画像を撮
影する撮影レンズと、撮影レンズで撮影した縞画像を入
力し計測対象物体の表面形状を演算して求める制御部
と、を有する表面形状３次元計測装置において、 上記両レンズと計測対象物体の間に光を反射するミラー
を設け、投影レンズと撮影レンズを一体の投影撮影レン
ズとしたことを特徴とする表面形状３次元計測装置。1. A light source that emits light, a grating having a constant pitch, a projection lens that projects light that has passed through the grating onto a measurement target object, and a photographing lens that captures a fringe image of the surface of the measurement target object. A surface shape three-dimensional measuring device having a controller for calculating a surface shape of an object to be measured by inputting a striped image taken by a taking lens, and reflecting light between the both lenses and the object to be measured. A three-dimensional surface shape measuring apparatus characterized in that a mirror is provided, and the projection lens and the photographing lens are integrated into a projection photographing lens.
影する第１ミラーと、計測対象物体表面の縞画像を投影
撮影レンズに入力する第２ミラーにより構成したことを
特徴とする請求項１記載の表面形状３次元計測装置。2. The mirror is composed of a first mirror that projects light on an object to be measured and a second mirror that inputs a fringe image of the surface of the object to be measured to a projection and photographing lens. The surface shape three-dimensional measuring device described.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP843994A JPH07218226A (en) | 1994-01-28 | 1994-01-28 | Three-dimesional measuring apparatus of surface shape |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP843994A JPH07218226A (en) | 1994-01-28 | 1994-01-28 | Three-dimesional measuring apparatus of surface shape |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07218226A true JPH07218226A (en) | 1995-08-18 |
Family
ID=11693166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP843994A Withdrawn JPH07218226A (en) | 1994-01-28 | 1994-01-28 | Three-dimesional measuring apparatus of surface shape |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07218226A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001099618A (en) * | 1999-07-01 | 2001-04-13 | Carl Zeiss Jena Gmbh | Method and device for selecting depth of microscopic image |
| JP2006153575A (en) * | 2004-11-26 | 2006-06-15 | Olympus Corp | Three-dimensional measuring instrument |
| CN107855648A (en) * | 2017-12-04 | 2018-03-30 | 天津大学 | The laser beam welding 3 D deformation measurement apparatus and measuring method of a kind of wind power bearing material |
| CN109099858A (en) * | 2018-09-14 | 2018-12-28 | 中国科学院长春光学精密机械与物理研究所 | A kind of reflecting mirror posture changing surface shape detection apparatus |
-
1994
- 1994-01-28 JP JP843994A patent/JPH07218226A/en not_active Withdrawn
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001099618A (en) * | 1999-07-01 | 2001-04-13 | Carl Zeiss Jena Gmbh | Method and device for selecting depth of microscopic image |
| JP2006153575A (en) * | 2004-11-26 | 2006-06-15 | Olympus Corp | Three-dimensional measuring instrument |
| CN107855648A (en) * | 2017-12-04 | 2018-03-30 | 天津大学 | The laser beam welding 3 D deformation measurement apparatus and measuring method of a kind of wind power bearing material |
| CN109099858A (en) * | 2018-09-14 | 2018-12-28 | 中国科学院长春光学精密机械与物理研究所 | A kind of reflecting mirror posture changing surface shape detection apparatus |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20010403 |