KR102046951B1 - Air seperation apparatus having device for preventing fluctuation of flow - Google Patents

Abstract

An air separation device including a flow rate prevention device is disclosed. According to an aspect of the present invention, the air separation device is provided and supplied between the analysis pipe for analyzing the sample gas supplied from the rectification tower and the rectification tower and the supply pipe and supply piping and analysis system for supplying the sample gas from the rectification tower A flow fluctuation preventing device for preventing fluctuations in the flow rate of the sample gas, the flow fluctuation preventing device having one end connected to an outlet and an outlet through which the sample gas flows from the main body and the analyzer to the analyzer, and the other end having an opening And a second pipe including a first pipe including a first pipe and a second pipe including one end to which the sample gas is supplied and the other end disposed in the first pipe, at least a portion of the second pipe being inserted into an opening of the first pipe and It is arranged to translate within the first tube to regulate the flow rate of the gas.

Description

Air separation device including flow fluctuation preventing device {AIR SEPERATION APPARATUS HAVING DEVICE FOR PREVENTING FLUCTUATION OF FLOW}

The present invention relates to a device for preventing flow fluctuation of an air separation device, and more particularly, a sample supplied to an analytical system to analyze an accurate concentration of oxygen, nitrogen, and argon in a device that changes in real time during an air separation process in a short time. The present invention relates to an air separation apparatus including a sample gas flow rate preventing device for minimizing changes in pressure and flow rate of a sample gas to facilitate accurate analysis of an analytical system.

In general, when the compressed air is sent to the air separator from the air compressor during the oxygen production process, and the air separator is gradually cooled to cryogenic temperature using an expansion turbine, oxygen, nitrogen, It is separated into argon gas, and the separation process is separated into high purity oxygen, nitrogen and argon gas by adjusting the flow rate of all parts of the device while checking the concentration indication state of the analyzer in real time.

If the state of concentration change during the rectification process cannot be confirmed accurately and quickly, it may take a long time to produce high purity gas or it may be difficult to produce high purity gas.

One aspect of the present invention is to provide a fast and accurate analysis of the sample gas of the analyzer by minimizing the change in the flow rate of the sample gas supplied to the analyzer for analyzing the sample gas in the air separation apparatus.

According to an aspect of the present invention, an air separation device includes an analytical system for analyzing a sample gas supplied from a rectifying tower and the rectifying tower, and a supply pipe for supplying sample gas from the rectifying tower to the analytical system, and between the supply pipe and the analytical system. And a flow rate prevention device for preventing a change in the flow rate of the sample gas provided and supplied, wherein the flow rate change device includes a main body and an outlet through which the sample gas flows to the analyzer and an end connected to the outlet; A first tube disposed inside the main body and having another end having an opening, and a second tube including one end to which the sample gas is supplied and the other end disposed inside the first tube; At least a portion is inserted into the opening of the first tube and translated in the first tube to regulate the flow rate of the sample gas. It is provided.

In addition, the flow rate fluctuation prevention device includes a drive motor, a first gear provided on the shaft of the drive motor, and a second gear disposed on an outer circumferential surface of the second pipe and engaged with the first gear.

In addition, the second pipe is translated through rotation in one direction or the opposite direction of the drive motor.

In addition, at least a portion of the inner peripheral surface of the first tube and at least a portion of the outer peripheral surface of the second tube are spaced apart.

In addition, the first tube is provided such that the inner diameter at the second position adjacent to the one end than the first position is smaller than the inner diameter at any first position inside the first tube.

In addition, the inner circumferential surface of the first pipe extends from the first position to the second position and includes an inclined portion provided to be inclined in the one direction.

In addition, the second tube is moved forward so that the other end of the second tube is in contact with the inclined portion, and the other end of the second tube and the inclined portion is moved backward to be spaced apart.

In addition, the flow rate prevention device further includes a closing member disposed inside the first pipe and closing the other end of the second pipe in contact with the other end of the second pipe when the second pipe is moved forward.

At least a portion of the inner circumferential surface of the first tube and at least a portion of the outer circumferential surface of the second tube are spaced apart from each other, and the sample gas supplied from the first tube when the second tube is disposed in the first position includes the main body. It does not flow inside but flows to the outlet.

In addition, when the second tube is disposed in the second position at least a portion of the sample gas supplied from the first tube is separated into the main body through the separation between the inner surface of the first tube and the outer peripheral surface of the second tube Inflow.

In addition, the flow rate prevention device is disposed inside the first tube and closes the other end of the second tube to be disposed in a third position where the second tube is moved further in one direction of the first tube than the first position. It further comprises a closing member for preventing the sample gas supplied through the second pipe from flowing to the outlet.

In addition, the flow rate fluctuation prevention device further includes an internal pressure control valve provided to maintain the pressure of the sample gas introduced into the body at a predetermined value.

In addition, the flow rate fluctuation apparatus further includes a vent valve provided to discharge at least a portion of the sample gas introduced into the main body to the outside.

An apparatus for preventing fluctuations in flow rate of an air separation device according to an aspect of the present invention controls the change in the flow rate of the sample gas supplied to the analyzer, thereby minimizing the change in the flow rate of the sample gas supplied to the analyzer. Can be analyzed.

The present invention will be described in detail with reference to the following drawings, but the above-described drawings represent preferred embodiments of the present invention, and the technical concept of the present invention is not limited to the drawings and should not be interpreted.
1 is a schematic configuration diagram of an air separation apparatus according to an aspect of the present invention.
2 is a schematic diagram of a flow rate preventing apparatus of an air separation apparatus according to an aspect of the present invention.
3 to 6 is a schematic view of the driving of some components of the flow rate change prevention device of the air separation device according to an aspect of the present invention.

Hereinafter, one aspect of the present invention will be described in detail with reference to the accompanying drawings. The embodiments introduced below are provided as an example to sufficiently convey the spirit of the present invention to those skilled in the art to which the present invention pertains. The present invention is not limited to the embodiments described below and may be embodied in other forms. Parts not related to the description are omitted in the drawings in order to clearly describe the present invention, in the drawings, the width, length, thickness, etc. of the components may be exaggerated for convenience. Like numbers refer to like elements throughout.

1 is a schematic configuration diagram of an air separation apparatus according to an aspect of the present invention.

Referring to FIG. 1, the air separation device 1 according to an aspect of the present invention may compress air in the air compressor 10 and then supply air to the rectification tower 20 through an adsorber (not shown). . While the air is supplied to the rectifying tower 20, the air may be compressed at high pressure through a heat exchanger, an air booster, or the like, and may be cooled to be formed of a gas or a liquid to supply air to the rectifying tower 20 in various ways.

The gas or liquid air cooled in various ways as described above is supplied to the upper tower 20a and the lower tower 20b of the rectifying tower 20 to be separated into a gas or liquid such as oxygen, nitrogen, argon, etc. in the rectifying tower 20. Can be.

The high purity gas or liquid separated in this way may be supplied to the place of use 40 through the supply pipe 30.

Air separation device 1 is an analytical system for analyzing a certain amount of sample gas (Sample Gas) in order to analyze the concentration of the process of the air branch in the rectification tower 20 or the concentration of each separated oxygen, nitrogen, argon, etc. 50 may be included.

The sample gas may be supplied to the analyzer 50 through the first sample gas supply pipe 60 connected to the rectification tower 20. Accordingly, the separation state in the air separation apparatus 1 can be grasped by the analysis value analyzed through the sample gas supplied to the analyzer 50.

The first sample gas supply pipe 60 is a first pressure reducing valve 61 for reducing a pressure of 4 to 25 Kg / Cm2, which is a typical sample gas supply process, supplied to the analyzer 50 to about 2 Kg / Cm2. ) May be included.

At this time, the flow rate and the pressure of the sample gas may be changed while the sample gas is supplied to the analyzer 50, and thus the analysis value analyzed by the analyzer 50 may be changed.

In order to adjust the process of rectification (separation of oxygen, nitrogen, argon) in the rectification tower 20 through the real-time purity analysis, etc., it is necessary to perform accurate and fast purity analysis. 20) When a change in the internal pressure causes a change in the flow rate of the sample gas supplied to the analyzer 50, a change occurs in the analytical value of the analytical system 50, thereby lowering the reliability of the analytical value and based on the analytical value. It may not be possible to perform commutation for a normal and fast time to adjust each element.

In order to prevent this, the air separation device 1 according to an aspect of the present invention is disposed between the analyzer 50 and the first sample gas supply pipe 60, and is provided to maintain a constant flow rate in the analyzer 50. It may include a fluctuation prevention device (100).

In addition, the splitter 50 may analyze in real time not only the sample gas supplied from the rectification tower 20 but also the high purity gas supplied to the user 40. Sample gas may be extracted from the supply pipe 30 supplied to the use place 40, and the sample gas may be passed through the second sample gas supply pipe 70 connecting the supply pipe 30 and the analyzer 50. Can be supplied.

The second sample gas supply pipe 70 is a second pressure reducing valve 71 for reducing a pressure of 4 to 25 Kg / Cm2, which is a sample gas withdrawal pressure, which is a typical sample gas supply process supplied to the user 40 to about 2 Kg / Cm2. ) May be included.

The first sample gas supply pipe 60 and the second sample gas supply pipe 70 may be connected through the flow rate preventing device 100 and the three-way valve 90.

At this time, as the pressure of the supply pipe 30 for supplying the gas to the use place 40 changes from time to time, the flow rate of the sample gas supplied from the supply pipe 30 to the analyzer 50 may occur. ) May stabilize the flow rate of the sample gas supplied from the rectification tower 20, and may also stabilize the flow rate of the sample gas supplied from the supply pipe 30.

The sample gas adjusted through the flow rate preventing device 100 may be reduced in pressure withdrawal pressure to approximately 0.2Kg / Cm 2 through a third pressure reducing valve provided between the flow rate preventing device 100 and the analyzer 50.

Thereafter, the sample gas may be supplied to the analyzer 50 at a stabilized flow rate, and thus the efficiency of the air separator 1 may be improved through accurate analysis.

Hereinafter, the flow rate variation prevention apparatus 100 will be described in detail.

Figure 2 is a schematic view of the flow rate change preventing device of the air separation device according to an aspect of the present invention, Figures 3 to 6 is the driving of some components of the flow rate change prevention device of the air separation device according to an aspect of the present invention It is a schematic diagram for.

As shown in FIG. 2, the apparatus for preventing the flow rate fluctuation 100 includes a sample at the outlet 121 and the main body 110 provided to flow the sample gas supplied to the main body 110 and the main body 110 to the analyzer 50. It may include an inlet 131 is provided to enter the gas.

The sample gas supplied through the inlet 131 may be supplied to the analyzer 50 through the outlet 121, and the flow rate of the sample gas may be limited by the flow rate preventing device 100 to be supplied to the analyzer 50 at a constant flow rate. .

The flow rate prevention apparatus 100 includes a first pipe 120 and an end 131 including one end forming the outlet 121 and the other end disposed inside the main body 110 and having the opening 122. And a second tube 130 including the other end 132 disposed inside the first tube 120.

However, the present invention is not limited thereto, and the inlet 131 and the outlet 121 may not be formed at one end of the second tube 130 and one end of the first tube 120, respectively, but may be formed by different configurations. One end of the tube 120 may be provided to be connected to the outlet 121 and one end of the second tube 130 may be provided to be connected to the inlet 131.

According to one aspect of the invention, the sample gas may be introduced into the main body 110 through the hollow of the second tube 130, not limited to this, a supply pipe for supplying the sample gas to the main body 110 is provided The second pipe 130 may be provided to be able to translate the inside of the supply pipe.

 The second tube 130 may include a driving unit 140 for driving the second tube 130 to translate the inside of the first tube 120.

The driving unit 140 is disposed on the outer circumferential surfaces of the first gear part 141 and the second pipe 130 that are disposed on the drive motor 141 and the shaft of the driving motor 141 that generate the rotational force, and the first gear part 141. ) May include a second gear part 142 coupled to the tooth.

Through the rotation of the driving motor 141 in one direction or the opposite direction, the second pipe 130 may be moved forward or backward in the opposite direction of the outlet 121.

The flow rate of the sample gas may be controlled while at least a portion of the sample gas supplied through the second tube 130 is introduced into the main body 110. That is, pressure and the like may be adjusted while adjusting the amount of sample gas introduced into the main body 110, and finally, the flow rate of the sample gas supplied to the analyzer 50 may be controlled. Accordingly, even when the sample gas is supplied to the analyzer 50 at an uneven flow rate due to an irregular change in pressure inside the rectifying tower 20, the sample gas is analyzed at a uniform flow rate by the flow rate prevention device 100. 50 can be supplied.

Flow fluctuation prevention device 100 is disposed inside the first pipe 120 and the second member 130 is a closing member 150 is provided so that the other end 132 of the second pipe 130 is closed when translational movement. It may include.

The closing member 150 may be disposed in the hollow of the first pipe 120 and provided adjacent to the outlet 121. The second pipe 130 may be provided to contact the closing member 150 when the second pipe 130 continues to move forward in the direction of the outlet 121.

When the closing member 150 and the other end 132 of the second tube 130 are in contact with each other, at least a part of the closing member 150 may be inserted into the other end 132 of the second tube 130 and the closing member 150 Other portions of the second tube 130 may completely seal the other end 132.

Accordingly, the sample gas supplied through the second tube 130 may not be supplied to the analyzer 50, but may be blocked from flowing to the analyzer 50 by the flow rate prevention device 100. Therefore, when the analyzer 50 does not analyze the sample gas, the analyzer 50 may be prevented from being contaminated by the sample gas.

The flow rate prevention device 100 includes an internal pressure control valve 160 and at least a portion of the sample gas introduced into the body 110 to maintain the pressure of the sample gas introduced into the body 110 at a predetermined value. It may include a vent valve 170 to be discharged to the outside.

The internal pressure regulating valve 160 may adjust the pressure of the sample gas so that the pressure of the sample gas introduced into the main body 110 can be maintained inside the main body 110 by a predetermined set value.

The vent valve 170 may inhibit real-time gas purity analysis when the sample gas continues to remain inside the flow rate preventing device 100, and thus the sample valve is opened in a fine amount by closing the vent valve 170. 110 may be provided to be discharged from.

In addition, the flow rate prevention apparatus 100 may include a body pressure gauge 180 provided to allow the user to check the pressure inside the body 110.

Hereinafter, a method of controlling the flow rate by the flow rate prevention device 100 will be described.

The first pipe 120 may include a hollow and may be translated by inserting the second pipe 130 into the hollow. The inner circumferential surface 125 of the first tube 120 and the outer circumferential surface 135 of the second tube 130 may be disposed such that a predetermined distance d is formed. Accordingly, the second tube 130 may be translated in the first tube 120 and the sample gas supplied from the second tube 130 may be introduced into the main body 110 through the spaced d. .

The inner circumferential surface 125 of the first tube 120 has an outlet 121 from any one position A on the first tube 120 to any two position B adjacent to the outlet 121 than any one position A. An inclined portion 124 is formed to be inclined toward the center side of the.

The inner diameter of the first tube 120 at any one position (A) by the inclined portion 124 may be larger than the inner diameter of the first tube 120 at any two positions (B). When the second pipe 130 is moved forward by the inclined portion 124 toward the outlet 121 by a predetermined length, the inclined portion 124 may be in contact with the inclined portion 124, thereby limiting the forward movement.

When the inclined portion 124 and the other end 132 of the second tube 130 is in contact, the sealing from the point where the inner peripheral surface 125 of the first tube 120 and the outer peripheral surface 135 of the second tube 130 abuts Can be. Accordingly, the sample gas supplied through the second tube 130 may not be flowed to the main body 110 through the spaced d, but may flow directly to the outlet 121 and be supplied directly to the analyzer 50.

That is, the flow rate of the sample gas may be adjusted according to the translational movement of the second tube 130. In detail, as shown in FIG. 3, when the second pipe 130 is moved forward toward the outlet 121, the inner circumferential surface side of the other end 132 of the second pipe 130 is in contact with the closing member 150. And the sample gas flowing through the hollow of the second pipe 130 may be disposed at the first position P1 that is blocked from being supplied to the analyzer 50.

When the second pipe 130 is disposed at the first position P1, the sample gas is blocked from being supplied to the analyzer 50 so that the analyzer 50 is contaminated by the sample gas when the sample gas does not need to be analyzed. Can be prevented.

As shown in FIG. 4, while the second tube 130 is moved backward in the direction opposite to the outlet 121 with respect to the first position P1, the other end of the second tube 130 ( The second pipe 130 may be disposed at the second position P2 where the outer circumferential surface side of the 132 is in contact with the inclined portion 124.

When the second pipe 130 is disposed in the second position P2, the second end 132 of the second pipe 130 and the inclined portion 124 are in perfect contact with each other. From the other end 132 of the tube 130, the inner circumferential surface 125 of the first tube 120 and the outer circumferential surface 125 of the second tube 130 may be provided to be sealed.

Accordingly, the entirety of the sample gas flowing through the second tube 130 flows to the outlet 121 without the sample gas flowing through the second tube 130 flowing into the main body 110 through the spaced d. 50 may be supplied.

At this time, as described above, the sample gas supplied from the sample gas supply pipes 60 and 70 flows to the total amount analyzer 50, so that the sample gas is not buffered against the sample gas in the flow rate prevention device 100. It may be supplied to the analyzer 50.

As shown in FIG. 5, while the second pipe 130 is moved backward in the direction opposite to the outlet 121 with respect to the second position P2, the other end of the second pipe 130 ( The second tube 130 may be disposed at a third position P3 disposed in the hollow of the first tube 120 where the inclined portion 124 is provided.

When the second tube 130 is disposed in the third position P3, a gap d1 is formed between the other end 132 of the second tube 130 and the inclined portion 124 to generate the second tube 130. A portion of the sample gas flowing through) may be introduced into the body 110 through the separation d1.

Also, as shown in FIG. 6, the second end of the second tube 130 is moved backward while the second tube 130 is moved backward in the direction opposite to the outlet 121 with respect to the third position P3. The second tube 130 may be disposed at a fourth position P4 in which 132 is disposed in the hollow formed by the inner circumferential surface 125 of the first tube 120.

When the second tube 130 is disposed in the fourth position P4, a gap d is formed between the other end 132 of the second tube 130 and the inner circumferential surface 125 of the first tube 120. Thus, a portion of the sample gas flowing through the second pipe 130 may be introduced into the main body 110 through a spaced d.

5 and 6, when the second tube 130 is disposed at the third position P3, the space d1 is formed between the other end 132 of the second tube 130 and the inclined portion 124. (D) is formed between the other end 132 of the second tube 130 and the inner peripheral surface 125 of the first tube 120 when the second tube 130 is disposed in the fourth position (P4) It can be formed narrower.

Accordingly, when the second tube 130 is disposed at the third position P3, a smaller amount of sample gas flows into the main body 110 than when the second tube 130 is disposed at the fourth position P4. Can be.

That is, the flow rate fluctuation preventing device 100 has a smaller buffering effect when the second pipe 130 is disposed at the fourth position P4 when the second pipe 130 is disposed at the third position P3. To adjust the flow rate.

When the second pipe 130 is disposed at the third position P3, the second pipe 130 is moved to the fourth position P4 when it is assumed that the flow rate preventing device 100 performs the buffering action at a level of 50%. When disposed in the flow rate prevention device 100 may perform a buffering action 100%.

As such, the flow rate prevention device 100 may perform different buffering amounts of the sample gas according to the position of the second pipe 130, and thus, easily maintain the flow rate of the sample gas introduced into the analyzer 50. I can regulate it.

In the above, specific embodiments have been illustrated and described. However, the present invention is not limited only to the above-described embodiments, and those skilled in the art may make various changes without departing from the spirit of the technical idea of the invention as set forth in the claims below.

1: air separator
10: compressor
20: rectification tower
30: supply piping
40: Where to use
50: analyzer
60: first sample gas supply piping
70: second sample gas supply piping
100: flow fluctuation prevention device
110: main body
120: Hall 1
130: subsection 2
140: drive unit

Claims (13)

Rectification tower;
An analyzer for analyzing a sample gas supplied from the rectification tower;
A supply pipe for supplying sample gas from the rectification tower to the analyzer;
And a flow rate change preventing device provided between the supply pipe and the analyzer to prevent a change in the flow rate of the sample gas supplied.
The flow rate fluctuation prevention device,
With the body
An outlet through which the sample gas flows from the main body to the analyzer;
A first pipe including one end connected to the outlet and the other end disposed inside the main body and having an opening;
A second tube including one end to which the sample gas is supplied and the other end disposed inside the first tube,
At least a portion of the second tube is inserted into the opening of the first tube and provided to be translated in the first tube to adjust the flow rate of the sample gas,
At least a portion of the inner peripheral surface of the first tube and at least a portion of the outer peripheral surface of the second tube is spaced apart disposed. The method of claim 1,
The apparatus for preventing flow rate fluctuation includes a first gear provided on a drive motor and a shaft of the drive motor, and a second gear disposed on an outer circumferential surface of the second pipe and engaged with the first gear. The method of claim 2,
The second pipe is an air separation apparatus that is translated through the rotation of one direction or the opposite direction of the drive motor. delete The method of claim 1,
And the first pipe is provided such that an inner diameter at a second position adjacent to the one end is smaller than an inner diameter at any first position inside the first tube. The method of claim 5,
The inner circumferential surface of the first pipe extends from the first position to the second position, and includes an inclined portion provided to be inclined in the one direction. The method of claim 6,
The second pipe is moved forward so that the other end of the second tube is in contact with the inclined portion, the other end of the second tube and the air separation apparatus is moved back so that the inclined portion is spaced apart. The method of claim 7, wherein
The flow rate preventing device further includes a closing member disposed inside the first pipe and closing the other end of the second pipe in contact with the other end of the second pipe when the second pipe is moved forward. Rectification tower;
An analyzer for analyzing a sample gas supplied from the rectification tower;
A supply pipe for supplying sample gas from the rectification tower to the analyzer;
And a flow rate preventing device provided between the supply pipe and the analyzer to prevent a change in the flow rate of the sample gas supplied.
The flow rate fluctuation device,
With the body
An outlet through which the sample gas flows from the main body to the analyzer;
A first pipe including one end connected to the outlet and the other end disposed in the body and having an opening;
A second tube including one end to which the sample gas is supplied and the other end disposed inside the first tube,
At least a portion of the second tube is inserted into the opening of the first tube and provided to be translated in the first tube to adjust the flow rate of the sample gas,
At least a portion of the inner peripheral surface of the first tube and at least a portion of the outer peripheral surface of the second tube are spaced apart,
And the sample gas supplied from the first tube when the second tube is disposed in the first position does not flow into the main body but flows to the outlet. Rectification tower;
An analyzer for analyzing a sample gas supplied from the rectification tower;
A supply pipe for supplying sample gas from the rectification tower to the analyzer;
And a flow rate change preventing device provided between the supply pipe and the analyzer to prevent a change in the flow rate of the sample gas supplied.
The flow rate fluctuation prevention device,
With the body
An outlet through which the sample gas flows from the main body to the analyzer;
A first pipe including one end connected to the outlet and the other end disposed inside the main body and having an opening;
A second tube including one end to which the sample gas is supplied and the other end disposed inside the first tube,
At least a portion of the second tube is inserted into the opening of the first tube and provided to be translated in the first tube to adjust the flow rate of the sample gas,
The flow rate variation prevention device includes a first motor provided on a drive motor and a shaft of the drive motor, and a second gear disposed on an outer circumferential surface of the second pipe and engaged with the first gear,
At least a portion of the sample gas supplied from the first tube when the second tube is disposed in the second position is introduced into the main body through the separation between the inner surface of the first tube and the outer peripheral surface of the second tube Air separator. The method of claim 10,
The flow rate variation preventing device is disposed inside the first tube and closes the other end of the second tube to be disposed at a third position where the second tube is moved further in one direction of the first tube than the first position. And a closing member for blocking the sample gas supplied through the second pipe from flowing out to the outlet. Rectification tower;
An analyzer for analyzing a sample gas supplied from the rectification tower;
A supply pipe for supplying sample gas from the rectification tower to the analyzer;
And a flow rate change preventing device provided between the supply pipe and the analyzer to prevent a change in the flow rate of the sample gas supplied.
The flow rate fluctuation prevention device,
With the body
An outlet through which the sample gas flows from the main body to the analyzer;
A first pipe including one end connected to the outlet and the other end disposed inside the main body and having an opening;
A second tube including one end to which the sample gas is supplied and the other end disposed inside the first tube,
At least a portion of the second tube is inserted into the opening of the first tube and provided to be translated in the first tube to adjust the flow rate of the sample gas,
The apparatus for preventing flow rate fluctuation further includes an internal pressure control valve provided to maintain the pressure of the sample gas introduced into the body at a predetermined value. Rectification tower;
An analyzer for analyzing a sample gas supplied from the rectification tower;
A supply pipe for supplying sample gas from the rectification tower to the analyzer;
And a flow rate change preventing device provided between the supply pipe and the analyzer to prevent a change in the flow rate of the sample gas supplied.
The flow rate fluctuation prevention device,
With the body
An outlet through which the sample gas flows from the main body to the analyzer;
A first pipe including one end connected to the outlet and the other end disposed inside the main body and having an opening;
A second tube including one end to which the sample gas is supplied and the other end disposed inside the first tube,
At least a portion of the second tube is inserted into the opening of the first tube and provided to be translated in the first tube to adjust the flow rate of the sample gas,
The flow rate fluctuation preventing device further comprises a vent valve provided to discharge at least a portion of the sample gas introduced into the main body to the outside.

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