KR102037198B1 - Probe card inspection device - Google Patents

Abstract

The present invention relates to a probe card inspection device, which is implemented to perform an inspection such as an open short leakage by applying an electrical signal to a seated probe card. The probe card inspection device comprises: a card fastening unit fastening a probe card to be tested; a card inspection unit checking whether a probe card is normally operated by applying an electrical signal to the probe card fastened to the card fastening unit; and a microscope installed at one side of the card fastening unit in order to observe the probe card exposed to the outside through an opening formed at an upper side of the card fastening unit.

Description

Probe Card Inspection Device {PROBE CARD INSPECTION DEVICE}

The present invention relates to a probe card inspection apparatus, and more particularly, to a probe card inspection apparatus implemented to perform an inspection such as an open short package by applying an electrical signal to a seated probe card.

Generally, a semiconductor device is manufactured through a fabrication process of forming a pattern on a wafer and an assembly process of assembling the wafer on which the pattern is formed into each chip.

Between the fabrication process and the assembly process, there is a process called EDS (Electrial Die Sorting), which examines the electrical characteristics of each chip constituting the wafer, that is, the semiconductor device (DUT), which is the semiconductor constituting the wafer. This is performed to determine a defective semiconductor device among the devices.

The electrical inspection of the semiconductor elements constituting the wafer mainly uses an inspection apparatus called a probe card having a plurality of probes which come into contact with each of these semiconductor elements to apply an electrical signal.

In general, a probe card includes a main circuit board, a space transformer (STF), a probe attached to a space transducer, and includes a wire connecting the main circuit board and the space transducer.

Conventionally, in order to check the probe tip alignment, only a small area is inspected with one lens, and alignment and planarity inspection are not performed at the same time. In order to proceed with the test, the contact test was conducted through a chuck.

Therefore, there are disadvantages that many cycles are required when the inspection target is multifaceted, and there is a problem that damages the probe tip during the contact inspection.

On the other hand, the background art described above is technical information possessed by the inventors for the derivation of the present invention or acquired in the derivation process of the present invention, and is not necessarily a publicly known technique disclosed to the general public before the application of the present invention. .

Korea Patent Registration No. 10-0964744 Korean Patent Publication No. 10-2018-0059867

One aspect of the present invention provides a probe card inspection apparatus implemented to perform an inspection such as an open short package by applying an electrical signal to a seated probe card.

It is also to provide an adhesive composition that can be applied with a sufficient thickness and evenness when attaching the cover to the device, and can reduce the odor and bacteria generation.

The technical problem of the present invention is not limited to the technical problem mentioned above, and other technical problems not mentioned will be clearly understood by those skilled in the art from the following description.

Probe card inspection apparatus according to an embodiment of the present invention, the card fastening portion for fastening the probe card to be tested; A card inspecting unit which checks whether a probe card is normally operated by applying an electrical signal to the probe card fastened to the card fastening unit; And installed on one side of the card fastening portion, and includes a microscope for observing the probe card exposed to the outside through the opening formed on the upper side of the card fastening portion.

In one embodiment, the card fastening portion, the mounting portion for forming a mounting groove of a shape corresponding to the shape of the probe card to seat the probe card; A cover part connected to the seating part so as to be rotatable and covering an upper side of the seating part when the probe card is seated in the seating groove; And a support part installed below the seating part to support the seating part.

In one embodiment, the seating groove may be electrically connected to the probe card so that a connection pin for transmitting an electrical signal may be formed along the bottom surface of the groove.

In one embodiment, the cover portion, to form an opening corresponding to the shape of the probe card in a position opposite to the probe card to observe the upper portion of the probe card seated in the seating groove from the upper side, and the probe card and Connection pins electrically connected to each other to transmit an electrical signal may be formed along a lower surface of the periphery of the opening.

In one embodiment, the seating portion, the mounting plate is formed in the form of a flat plate; A guide bar formed in a shape of “a” and installed at a front end of the seating plate and configured to seat the front end edge of the cover part; A fastening lever installed at a front end of the seating plate and fastening the cover part so as not to be opened during inspection when the cover part covers the probe card; And an elastic support part installed at both front ends of the seating plate opposite to each corner of the front end of the cover part and supporting the cover part covering the probe card by using an elastic force.

In one embodiment, the seating plate, each of the insertion groove for inserting the elastic support portion may be formed on both sides of the front end.

In one embodiment, the elastic support portion, the body portion formed in a cylindrical shape; The cover is spaced apart from the other first stand at a predetermined interval so as to be connected to the plurality of rotatable along the upper portion of the body portion, the cover is installed to be inclined in a direction closer to the other first stand from the upper side to the lower side and seated on the upper side A first stand supporting the part; And spaced apart from the other second stand at a predetermined interval is connected to be installed so that a plurality of rotatable along the lower portion of the body portion, is installed to be inclined in a direction closer to the other second stand from the lower side to the upper side to support the body portion It may include a second stand.

In one embodiment, the body portion, the body is formed in a cylindrical shape; An upper installation is formed along the upper portion of the body corresponding to the number of the first stand so that the lower portion of the first stand can be installed to be rotatable, and inclined in the outward direction of the body toward the upper side from the lower side home; Lower installation grooves are formed along the lower part of the body corresponding to the number of the second stand so that the upper part of the second stand can be installed to be rotatable, and inclined in the outward direction of the body from the upper side to the lower side. ; The first side facing the upper side and the upper side of the first stand, and the upper side of the first stand installed in the upper mounting groove or the second stand installed in the lower mounting groove; An elastic support installed between one side of the second stand and the lower mounting groove to support the first stand and the second stand using an elastic force; And it may include a shock absorbing pad is installed along the inlet of the upper installation groove and the inlet of the lower installation groove to absorb the impact of the impact with the first stand or the second stand.

In one embodiment, the first stand is connected to the upper installation groove so that the lower portion is rotatable, the lower inclined surface is supported by the elastic support; A pedestal which is formed in a triangular shape in which an upper surface is flat and the gap becomes narrower toward the lower side, and a lower portion is connected to the upper portion of the support bar to be rotatable; And a washing plate-shaped unevenness formed of a material having elasticity so as to improve adhesion to the cover part seated on the upper side along the upper surface, and the cover part seated on the upper side as the upper or lower portion of the pedestal is raised or lowered. It may include a sliding pad which is slid to move.

In one embodiment, the pedestal, the sliding groove may be formed in the longitudinal direction along the upper surface.

In one embodiment, the sliding pad is connected to the sliding groove may be provided with a sliding synchronization on the lower side to allow the sliding movement.

In one embodiment, the card fastening portion may further include an elastic support installed between the seating portion and the support to support the support by using an elastic force.

In one embodiment, the elastic support, the upper plate is formed in the form of a plate supporting the seating portion; A case spaced apart from the upper plate and formed to form an inner space; And an upper plate support part installed in an inner space of the case and having an upper portion exposed to an upper side of the case to support the upper plate using an elastic force.

In one embodiment, the upper plate support portion, the first support portion for supporting the center of the upper plate, and supplying the filling liquid to the inner space as the upper plate is lowered; And installed at each lower side of each corner of the upper plate, and move upwards and downwards to support the edges of the upper plate by using an elastic force, and the upper plate is lowered in the vertical direction by the filling liquid supplied from the first support part as the upper plate descends. It may include a second support to which movement is braked.

In one embodiment, the first support portion, the first rotational fastening portion is provided in the center of the lower side of the upper plate, forming a spherical inner space; A first connection ball formed in a spherical shape corresponding to the shape of the inner space of the first pivot fastening part and installed to be rotatable in the inner space of the first pivot fastening part; A first support bar extending downward from the bottom of the first connection ball to support the first connection ball; It is formed in a cylindrical shape is installed in the inner space of the case, the filling liquid is received in the sealed inner space, the lower portion of the first support bar is inserted into the inner space, the first support bar when the upper plate is lowered A filling liquid tank in which a filling liquid is compressed and supplied to the second support part as a lower portion of the lower portion falls from an upper side of the inner space; And a connecting pipe extending from the lower portion of the filling liquid tank to the second support part to form a passage through which the filling liquid flows.

In one embodiment, the second support portion, the second pivotal fastening portion is installed at the corner of the lower side of the upper plate, forming a spherical inner space; A second connection ball formed in a spherical shape corresponding to the shape of the inner space of the second pivotal fastening part and rotatably installed in the inner space of the second pivotal fastening part; A second support bar extending downward from the bottom of the second connection ball to support the second connection ball; An elastic support installed at a lower side of the second support bar to support the second support bar using an elastic force; And a second support bar is inserted into the through hole to form a through hole in a vertical direction. When the upper plate descends, the filling liquid is supplied to the internal space through the connecting pipe and expands. Accordingly, the size of the through-hole may be reduced to include a lifting control unit for fastening so that the second support bar does not move.

In one embodiment, the elevating control unit, the outer wall is formed of a hard material so that the filling liquid can be expanded in the inward direction in which the through hole is located as it is supplied to the inner space, facing the second support bar The inner side may be formed of a material that can expand or contract.

According to one aspect of the present invention, by applying an electrical signal to the seated probe card to perform an inspection such as an open short package it can provide an effect that can improve the quality of the probe card.

In addition, when the cover is attached to the device can provide an effect that can provide a hygienic and excellent adhesive composition.

The effects of the present invention are not limited to the above-mentioned effects, and various effects may be included within the scope apparent to those skilled in the art from the following description.

1 is a view showing a schematic configuration of a probe card inspection apparatus according to an embodiment of the present invention.
2 is a view showing a card fastening portion of FIG.
3 and 4 are views showing the seating portion of FIG.
5 is a view showing the elastic support of FIG.
6 and 7 are views showing the body portion of FIG.
8 through 10 are views illustrating the first stand of FIG. 5.
11 is a view showing another embodiment of the card fastening unit of FIG. 1.
12 is a view showing the elastic support of FIG.
13 to 17 are views showing the connection of the respective components of the elastic support of FIG.

DETAILED DESCRIPTION The following detailed description of the invention refers to the accompanying drawings that show, by way of illustration, specific embodiments in which the invention may be practiced. These embodiments are described in sufficient detail to enable those skilled in the art to practice the invention. It should be understood that the various embodiments of the present invention are different but need not be mutually exclusive. For example, certain shapes, structures, and characteristics described herein may be embodied in other embodiments without departing from the spirit and scope of the invention in connection with one embodiment. In addition, it is to be understood that the location or arrangement of individual components within each disclosed embodiment may be changed without departing from the spirit and scope of the invention. The following detailed description, therefore, is not to be taken in a limiting sense, and the scope of the present invention, if properly described, is defined only by the appended claims, along with the full range of equivalents to which such claims are entitled. Like reference numerals in the drawings refer to the same or similar functions throughout the several aspects.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the drawings.

1 is a view showing a schematic configuration of a probe card inspection apparatus according to an embodiment of the present invention.

Referring to FIG. 1, a probe card inspection apparatus 10 according to an embodiment of the present invention includes a card fastening unit 100, a card inspection unit 200, and a microscope 300.

The card fastening part 100 fastens the probe card 1 which is a to-be-tested object.

The card inspection unit 200 applies an electrical signal to the probe card 1 fastened to the card fastening unit 100 to check whether the probe card is normally operated.

The microscope 300 is installed at one side of the card fastening part 100 to observe the probe card 1 exposed to the outside through the opening 121 formed above the card fastening part 100.

The probe card inspection apparatus 10 having the above-described configuration applies an electric signal to the probe card 1 seated on the card fastening unit 100 to perform an inspection such as an open short package, thereby performing a probe card 1. ) Can improve the quality.

In one embodiment, the card fastening portion 100, to prevent wear caused by the use of the device, to reduce the diffuse reflection of light to improve the accuracy of the inspection of the probe card (1) using the microscope (300) A cover (not shown in the drawing for convenience of description) may be attached to the outside and used.

At this time, it is preferable that the cover uses the adhesive composition for cover attachment mentioned later.

Adhesive composition according to an embodiment of the present invention, the adhesive composition for attaching the cover for attaching the cover to the card fastening portion 100, 40 to 80 parts by weight of thermoplastic resin, 5 to 40 parts by weight of adhesive resin, rosin 1 ~ 5 parts by weight, 1 to 10 parts by weight of plasticizer, 1 to 10 parts by weight of filler, and 0.1 to 1 part by weight of antioxidant.

The thermoplastic resin serves as a main component of the composition to control adhesion and cohesion. If the type includes a vinyl group or a hydroxyl group, the type is not particularly limited, and examples thereof include ethylene vinyl acetate copolymer, polyvinylacetate, polyvinyl alcohol, ethylene-acrylic acid copolymer and ethylene-methacrylic acid copolymer, and polyurethane. It may be composed of any one or more selected from the group consisting of.

The content of the thermoplastic resin is preferably 40 to 80 parts by weight based on the total composition. If the content is less than 40 parts by weight, the melt viscosity is high and the melt flow index is low, the workability is very poor, if the content is more than 80 parts by weight it is difficult to exert sufficient adhesive force to be applied directly to the fabric.

The tackifier resin is a low molecular weight resin, lowers the melt viscosity to improve workability, improves the initial wettability of adhesion and adhesion of the adhesive on the surface of the adherend, and enables control of the solidification time.

The tackifying resin is not particularly limited in kind, but is preferably a petroleum resin. More specifically, the tackifier resin may be composed of one or more selected from the group consisting of aliphatic hydrocarbon resins, alicyclic hydrocarbon resins, aromatic hydrocarbon resins, aromatic hydrocarbon-modified aliphatic hydrocarbon resins, and hydrogenated hydrocarbon resins.

The aliphatic hydrocarbon resins are commercial products such as Hikorez A-1100, Hikorez A-1100S, Hikorez C-1100, Hikorez R-1100, Hikorez R-1100S, and the like. In addition, alicyclic hydrocarbon resins include hydrocarbon resins containing dicyclopentadiene (DCPD) as monomers, and aromatic hydrocarbon resins are commercially available from Kolon Oil Co., Ltd. of Hikotack P-110S, Hikotack P-120, Hikotack P-120HS, Hikotack P-120S, Hikotack P-140, Hikotack P-140M, Hikotack P-150, Hikotack P-160, Hikotack P-90, Hikotack P-90S, Hirenol PL-1000, Hirenol PL-400. In addition, aromatic hydrocarbon-modified aliphatic hydrocarbon resins include Hikorez T-1080, Hikorez T-1100, etc. of Kolon Oils. Hydrogenated hydrocarbon resins can also be subdivided into hydrogenated aliphatic hydrocarbon resins, hydrogenated aromatic hydrocarbon resins, and the like, and commercially available from Kolon Oil Co., Ltd. Sukorez SU-120, Sukorez SU-130 and Sukorez SU-90.

The tackifier resin is preferably a hydrocarbon resin having 4 to 10 carbon atoms in the monomer, and specifically, a C5 aliphatic resin, a C9 aromatic resin, a C5 / C9 aliphatic / aromatic copolymer resin, or the like may be used.

In addition, the tackifying resin of the present invention is more preferably characterized in that the hydrocarbon hydrocarbon resin containing dicyclopentadiene as a monomer, commercially available from Sukorez D-300, Sukorez D-390, Kolon Emulsifier (Korea), Sukorez SU-100, Sukorez SU-110, Sukorez SU-120, SukorezSU-130 and Sukorez SU-90.

On the other hand, the adhesive composition of the present invention is preferably used by mixing the biodegradable hypoallergenic resin with various petroleum resins described above in order to minimize the irritation when the operator rubs on the skin of the operator when applied to the card fastening portion 100. Do.

The biodegradable hypoallergenic resin may be prepared by melt-mixing a monomer of a polymer into a biodegradable polymer, and polylactic acid is preferably used as the biodegradable polymer.

The polylactic acid is a polyester synthesized by polycondensation of lactate or ring-opening polymerization of lactide, and has a medium physical property between polyamide and polyethylene terephthalate, and is mainly made of natural vegetable sugar components obtained from potatoes and corn. Biodegradability is high, but generally has high hardness, low elasticity, and poor durability.

The biodegradable polymer is melt-mixed with the same polymer monomer, wherein the biodegradable polymer is partially bonded with the monomer to cause chain breakage, thereby lowering the overall number average molecular weight. As the number average molecular weight falls, the physical properties that can be used as an adhesive are exhibited, and the workability is increased.

With respect to 100 parts by weight of the polylactic acid, the lactic acid monomer may be mixed 20 to 30 parts by weight. When the monomer is mixed in less than 20 parts by weight, the number average molecular weight is high and hard to be used as a pressure-sensitive adhesive, when the monomer exceeds 40 parts by weight migration may occur on the surface and may also be difficult to use as an adhesive.

It is preferable that the mixing ratio of the petroleum resin and the biodegradable hypoallergenic resin is 1 to 2: 1 (w / w). When the mixing ratio of the petroleum resin is too high, the biodegradable hypoallergenic effect is less likely to occur. If the mixing ratio is too high, economic efficiency may be lowered and the overall adhesive effect may be lowered.

In addition, the content of the tackifying resin is preferably 5 to 40 parts by weight relative to the total composition. If the content is less than 5 parts by weight, the effect of lowering the melt viscosity due to the addition of the tackifying resin is insufficient, and there is a fear that the increase in the melt flow index is not so large that the workability may not be satisfactorily reached, and the content is more than 30 parts by weight. If the melt flow index increase rate due to the excess of the tackifier resin is not large, the economical efficiency is lowered and the content of the thermoplastic polymer is relatively reduced, thereby reducing the overall physical properties of the composition.

The rosin acts to improve the overall adhesion of the adhesive composition and is harmless to the human body and acts as a natural preservative. The content of the rosin is preferably 1 to 5 parts by weight based on the total composition. If the content is less than 1 part by weight, it is difficult to obtain an effect of improving the adhesive strength, and if the content exceeds 5 parts by weight, there is a problem in that the adhesion is increased during processing, making it difficult to process the product.

The plasticizer is used to impart flexibility and adhesion to the polymer, and the type of plasticizer according to the present invention is not particularly limited, and for example, sorbitol, ethylene glycol, glycerin, glycerin diacetate, and pentaerythritol It may consist of one or more selected from the group consisting of.

The amount of the plasticizer is preferably 1 to 10 parts by weight based on the total composition. If the content is less than 1 part by weight, the effect of the addition of the plasticizer is insignificant. If the content is more than 10 parts by weight, the economical efficiency may be reduced by excessive use of the plasticizer, and there is a concern that the overall physical properties of the adhesive may be lowered.

The filler is used to control the reinforcement and flow of the composition. The type of filler is not particularly limited, and for example, calcium carbonate, clay, bentonite, calcium stearate or the like can be used.

On the other hand, the adhesive composition of the present invention is applied to the card fastening portion 100 or the attachment surface of the cover, the odor and bacteria are likely to occur in the application environment. Therefore, in order to reduce the odor and bacteria generation while controlling the reinforcement and flow of the adhesive composition, it is preferable to use a mixture of stone powder and pulp powder as a filler. Stone powder can achieve high strength without using additives due to the compactness of the particles, and the cracking of the adhesive hardly occurs even when the temperature change is large due to low volumetric strain according to the surrounding environment.

The stone powder may be used in the form of powder of various rocks such as loess, marble, ganban stone, granite, jadeite, preferably characterized in that the loess has various functions such as antibacterial, anti-fungal, UV emission.

The pulp powder serves to agglomerate the stone powders while sucking the liquid components, to improve the miscibility and improve the cohesion between the components. At this time, the stone powder and the pulp powder is preferably mixed in a ratio of about 7: 3 to 8: 2 (w / w).

The content of the filler is preferably 1 to 10 parts by weight based on the total composition. If the content is less than 1 part by weight, the effect of adding the filler is insignificant, and if the content is more than 10 parts by weight, there is a concern that the overall physical properties of the adhesive may be lowered.

The antioxidant is intended to improve the change in viscosity, yellowing, deterioration of adhesion and degradation of durability due to oxidation and decomposition, and the type thereof is not particularly limited, and specifically, phenols, aromatic amines, citric acid, or ascorbic acid may be used. Can be.

The content of the antioxidant is preferably 0.1 to 1 parts by weight relative to the total composition. If the content is less than 0.1 part by weight, the effect of the addition of the antioxidant is insignificant, and if the content exceeds 1 part by weight, not only the economical efficiency of the adhesive is lowered but also the overall physical properties may be lowered.

On the other hand, the adhesive composition of the present invention may further include nano-silica which can be improved evenly to the adhesion surface of the card fastening portion 100 or the attachment surface of the cover. At this time, the content of the nano silica is preferably 0.1 to 5 parts by weight, and the size of the nano silica (primary particles) is preferably 100 nm or less.

If the content of the nano-silica is less than 0.1 parts by weight, the effect of the addition of nano-silica is insignificant, and if the content exceeds 5 parts by weight, not only the adhesive force is lowered but also a bad phenomenon that blooming (blooming) occurs on the surface of the adhesive over time May occur.

Hereinafter, the configuration of the present invention and its effects through specific examples and comparative examples will be described in more detail. However, this embodiment is intended to illustrate the present invention in more detail, and the scope of the present invention is not limited to these examples.

Example 1

60 parts by weight of ethylene-vinylacetate copolymer, 25 parts by weight of Sukorez D-300, 3 parts by weight of rosin, 5 parts by weight of ethylene glycol, 4 parts by weight of ocherite, 2 parts by weight of pulp powder and 1 part by weight of ascorbic acid. Melt kneading at ° C to prepare an adhesive composition and then molded into pellets. At this time, the biodegradable hypoallergenic resin was prepared by melt-mixing 2.5 parts by weight of lactic acid monomer to 100 parts by weight of polylactic acid at 160 ° C. for 5 minutes.

Example 2

60 parts by weight of ethylene-vinylacetate copolymer, 15 parts by weight of Sukorez D-300, 10 parts by weight of biodegradable hypoallergenic resin, 3 parts by weight of rosin, 5 parts by weight of ethylene glycol, 4 parts by weight of loess, 2 parts by weight of pulp powder and ascorb 1 part by weight of acid was mixed and melt kneaded at 170 to 180 ° C. to prepare an adhesive composition, and then molded into pellets. At this time, the biodegradable hypoallergenic resin was prepared by melt-mixing 2.5 parts by weight of lactic acid monomer to 100 parts by weight of polylactic acid at 160 ° C. for 5 minutes.

Example 3

Except for adding 1 part by weight of nanosilica, it was prepared in the same manner as in Example 1, and was made as Example 3.

[Comparative Example]

It was used after removing the backing paper from the conventional TPU hot melt film.

Experimental Example

(1) Mesh adhesive strength

In order to evaluate the mesh adhesive strength of the hot melt adhesive, the adhesive pellet quantified between the card fastening portion 100 and the cover was melt-coated at 170 ° C., and then pressed at a pressure of 60 kgf / cm 2 for 30 seconds at 130 ° C. Proceed to measure the mesh adhesive strength (kgf / ㎠).

(2) Melt Flow Index

The heating cylinder of the melt flow rate meter was filled with a pellet type adhesive and melted at 160 ° C. for about 5 minutes. The weight (g) of the adhesive passed through the cylinder for 10 minutes was measured by putting a weight of 3 kg.

As can be seen from the table, it was confirmed that the adhesive composition of the present invention has improved adhesion and flow index than the existing product, even when using a biodegradable hypoallergenic resin it was confirmed that the adhesion and flow index does not fall significantly. Also, when the nano-silica is mixed, the flow index can be seen to increase significantly.

2 is a view showing a card fastening portion of FIG.

2, the card fastening part 100 includes a seating part 110, a cover part 120, and a support part 130.

The mounting portion 110 forms a mounting groove 111 (see FIG. 3) having a shape corresponding to the shape of the probe card 1 so as to mount the probe card 1.

In one embodiment, the seating groove 111 may be formed along the bottom surface of the groove is connected to the probe card (not shown in the drawing for convenience of description) for electrically connecting the probe card.

The cover part 120 is connected to the seating part 110 so as to be rotatable, and covers the upper side of the seating part 110 when the probe card 1 is seated in the seating recess 111.

In one embodiment, the cover portion 120 of the probe card 1 in a position facing the probe card 1 so that the upper portion of the probe card 1 seated in the seating groove 111 can be observed from above. A connecting pin (not shown in the drawing for convenience of description) for forming an opening 121 having a shape corresponding to the shape and electrically connected to the probe card 1 to transmit an electrical signal is provided at the bottom of the opening 121. It can be formed along the side.

The support part 130 is installed below the seating part 110 and supports the seating part 110.

3 is a view showing the seating portion of FIG.

Referring to FIG. 3, the seating unit 110 includes a seating plate 112, a guide bar 113, and a fastening lever 114.

The mounting plate 112 is formed in a flat plate shape, and a mounting groove 111 for mounting the probe card 1 is formed at an upper portion thereof.

Guide bar 113 is formed in a "b" shape is installed on both sides of the front end of the seating plate 112, as shown in Figure 2 guides the front edge of the cover portion 120 is seated.

The fastening lever 114 is installed at the front end of the seating plate 112, and when the cover part 120 covers the probe card 1, the fastening lever 114 is fastened as shown in FIG. 2 so that the cover part 120 does not open during inspection. .

The seating unit 110 having the configuration as described above may further include an elastic support 500 as shown in FIG. 4.

The elastic support part 500 is installed at both front ends of the seating plate 112 opposite to each corner of the front end of the cover part 120, and uses the elastic force to cover the cover part 120 covering the probe card 1. I support it.

In one embodiment, the seating plate 112 may be formed with insertion grooves 1121 for inserting the elastic support 500 on both sides of the front end.

At this time, the elastic support 500 is not inserted completely into the insertion groove 1121, as shown in Figure 4, the upper portion is preferably exposed to the outside to support the cover portion 120.

5 is a view showing the elastic support of FIG.

Referring to FIG. 5, the elastic support part 500 includes a body part 510, a first stand 520, and a second stand 530.

Body portion 510 is formed in a cylindrical shape, a plurality of stands (520a, 520b, 520c, 530a, 530b, 530c) is connected to be installed.

The first stand 520 is spaced apart from the other first stand 520 at a predetermined interval so that a plurality of the first stand 520 is rotatably connected along the upper portion of the body 510, and the first stand 520 is different from the upper side to the lower side. It is installed to be inclined in a direction approaching 520 and supports the cover portion 120 seated on the upper side.

The second stand 530 is spaced apart from the other second stand 530 at predetermined intervals so that a plurality of the second stand 530 is rotatably connected along the lower portion of the body 510, and the second stand 530 is different from the lower side to the upper side. 530 is installed to be inclined in a direction close to and supports the body 510.

Although the second stand 530 of FIG. 5 is illustrated in a rod shape, the second stand 530 of FIG. 5 is not limited to the shape thereof and may be formed in the same shape as the first stand 520 as shown in FIG. 7.

6 and 7 are views showing the body portion of FIG.

Referring to FIG. 6, the body portion 510 includes a body 511, an upper installation groove 512, a lower installation groove 513, an elastic support 514, and an impact absorbing pad 515.

The body 511 is formed in a cylindrical shape, as shown in FIG. 7, and includes a first stand 520 and a second stand 530 in the upper and lower installation grooves 512 and the lower installation grooves 513. ) Is installed to be rotatable.

The upper installation groove 512 is formed along the upper portion of the body 511 corresponding to the number of the first stands 520 so that the lower portion of the first stand 520 is rotatable, and upwards from the lower side. It is formed to be inclined toward the outer direction of the body 511 toward.

The lower installation groove 513 is formed along the lower portion of the body 511 corresponding to the number of the second stands 530 so that the upper portion of the second stand can be rotatable, and the body (from the upper side to the lower side) 511 is inclined in the outward direction.

The elastic support 514 is a first stand 520 facing the lower side so that the first stand 520 installed in the upper installation groove 512 or the second stand 530 installed in the lower installation groove 513 can stand upright. Between the one side surface and the upper installation groove 512 and between the one side surface and the lower installation groove 513 of the second stand 530 facing the upper side, respectively, the first stand 520 and the first using an elastic force 2 supports the stand (530).

The shock absorbing pad 515 is provided along the inlet of the upper installation groove 512 and the inlet of the lower installation groove 513 so as to absorb the impact caused by the collision with the first stand 520 or the second stand 530. Is installed.

Here, since the internal forming structure of the lower installation groove 513 is the same as the formation structure of the upper installation groove 512 as described above, description thereof will be omitted to avoid duplication of description.

FIG. 8 is a view illustrating the first stand of FIG. 5.

Referring to FIG. 8, the first stand 520 includes a support bar 521, a pedestal 522, and a sliding pad 523.

The support bar 521 is connected to the upper installation groove 512 so that the lower portion is rotatable, the lower inclined surface is supported by the elastic support 514, and the lower portion of the pedestal 522 is rotatably installed on the upper portion. To form a connection groove (5211) to be.

Pedestal 522 is formed in a triangular shape, the upper surface is flat and the gap becomes narrower toward the lower side, the lower portion of the bolt (B) and nut (N) in the connection groove (5211) formed in the upper portion of the support bar (521) It is connected so as to be rotatable using a fastening means.

Sliding pad 523 is a washing plate-shaped unevenness formed of a material having an elastic so as to improve the adhesion with the cover portion 120 seated on the upper side is formed along the upper surface, the cover portion 120 seated on the upper side As the elevating or descending, the sliding movement on the upper portion of the pedestal 522.

In one embodiment, the pedestal 522 may be formed with a sliding groove 5221 in the longitudinal direction along the upper surface as shown in FIG.

In addition, the sliding pad 523 is connected to the sliding groove 5121 and may be provided with a sliding synchronous (5231) on the lower side to allow the sliding movement.

As illustrated in FIG. 9, the first stand 520 having the above-described configuration includes a sliding pad 523 supporting the lid 120 as the lid 120 positioned on the upper side descends. While maintaining the position, the lower portion connected to the support bar 521 is driven while the pedestal 522 is slidably moved outward for relative movement.

Since the first stand 520 having the above-described configuration is applicable to the second stand 530 in the same manner, the description of the configuration of the second stand 530 will be omitted in order to avoid overlapping descriptions.

11 is a view showing another embodiment of the card fastening unit of FIG. 1.

Referring to FIG. 11, the card fastening part 100a according to another embodiment includes a seating part 110, a cover part 120, a support part 130, and an elastic support 400. Here, the seating portion 110, the lid portion 120 and the support portion 130 are the same as the components of Fig. 2, the description thereof will be omitted.

The elastic support 400 is provided between the seating portion 110 and the support portion 130 to support the seating portion 110 by using an elastic force.

12 is a view showing the elastic support of FIG.

Referring to FIG. 12, the elastic support 400 includes a top plate 410, a case 420, and a top plate support 430.

The upper plate 410 is formed in a flat plate shape to support the seating part 110 and is supported by the upper plate support part 430.

The case 420 is installed on the upper side of the support 130, spaced apart from the lower side of the upper plate 410, and forms an inner space for installing the upper plate support 430.

The upper plate supporter 430 is installed in the inner space of the case 420, and an upper portion thereof is exposed to the upper side of the case 420 to support the upper plate 410 using elastic force.

The elastic support 400 having the above-described configuration is installed between the seating part 110 and the support part 130, and supports the seating part 112 by using an elastic force, thereby to the probe card 1 during the inspection. The accuracy of inspection can be improved by attenuating transmitted vibrations or impacts.

13 to 17 are views showing the connection of the respective components of the elastic support of FIG.

Referring to FIG. 13, the upper plate support part 430 includes a first support part 431 and a plurality of second support parts 432a, 432b, 432c, and 432d.

The first support part 431 supports the center of the upper plate 410, and supplies the filling liquid to the plurality of second support parts 432a, 432b, 432c, and 432d as the upper plate 410 descends. .

The second supporting parts 432a, 432b, 432c, and 432d are respectively installed at the lower sides of the corners of the upper plate 410, and move upward and downward to support the corners of the upper plate 410 using elastic force, and the upper plate 410 As the) is lowered, movement in the vertical direction is braked by the filling liquid supplied from the first support part 431.

The upper plate support portion 430 having the above-described configuration efficiently supports the upper plate 410 using elastic force by using the first support portion 431 and the plurality of second support portions 432a, 432b, 432c, and 432d. can do.

The first support part 431 includes a first pivotal fastening part 4311, a first connecting ball 4312, a first support bar 4313, a filling liquid tank 4314, and a connection pipe 4315. .

As shown in FIG. 14, the first pivot fastening part 4311 is installed at the center portion of the lower surface of the upper plate 410, and forms a spherical inner space to connect the first connection balls 4312.

The first connecting ball 4312 is formed in a spherical shape corresponding to the shape of the internal space of the first pivot fastening portion 4311, is installed to be rotatable in the internal space of the first pivot fastening portion 4311, and the first Supported by a support bar 4313.

The first support bar 4313 extends from the lower portion of the first connecting ball 4312 to the inner space of the filling tank 4314 in a downward direction to support the first connecting ball 4312, and the upper plate 410. As it descends, it descends together and compresses the filling liquid contained in the filling liquid tank 4314 in the downward direction.

Filling tank 4314 is formed in a cylindrical shape is installed in the inner space of the case 420, the filling liquid is received in the sealed inner space, the lower portion of the first support bar 4313 is inserted into the inner space When the upper plate 410 is lowered, as the lower portion of the first support bar 4313 descends from the upper side of the inner space, the filling liquid is compressed to be supplied to the second support part 432 through the connecting pipe 4315.

At this time, the first support bar 4313 is a rubber corresponding to the shape of the inner space of the filling liquid tank 4314 so that the filling liquid contained in the inner space of the filling liquid tank 4314 can be compressed in the same manner as the driving method of the syringe. Packing material P may be formed on the lower side.

The connecting pipe 4315 extends from the lower portion of the filling liquid tank 4314 to the respective second supporting portions 432a, 432b, 432c, and 432d to form a passage through which the filling liquid flows.

Hereinafter, the second support part 432 will be described.

The second support part 432 includes a second pivotal fastening part 4321, a second connecting ball 4322, a second support bar 4323, an elastic support part 4324, and a lift adjusting part 4325.

As shown in FIG. 14, the second pivot fastening part 4321 is installed at a corner of the lower side of the upper plate 410, and forms a spherical inner space to connect the second connection balls 4322.

The second connecting ball 4322 is formed in a spherical shape corresponding to the shape of the internal space of the second pivotal fastening part 4321, and is installed to be rotatable in the internal space of the second pivotal fastening part 4321. Supported by support bars 4323.

The second support bar 4323 extends from the lower portion of the second connection ball 4322 to the inner space of the case 420 in a downward direction to support the second connection ball 4322, and to the elastic support part 4324. Is supported.

The elastic support part 4324 is provided below the second support bar 4323 to support the second support bar 4323 in the inner space of the case 420 by using an elastic force.

The elevating adjustment part 4325 is formed in the shape of a circular tube that forms the through hole 4325h in the vertical direction, and the second support bar 4323 is inserted into the through hole 4325h, and the upper plate 410 is lowered. In this case, as the filling liquid is supplied to the internal space through the connecting pipe 4315 and expanded, the size of the through hole 4325h is reduced so that the second support bar 4323 is not moved.

In one embodiment, the elevating control unit 4325 has an outer wall 4325o to expand in the inward direction in which the through hole 4325h is located as the filling liquid is supplied to the inner space as shown in FIG. 17. It may be formed of a hard material, and the inner side 4325i facing the second support bar 4323 may be formed of a material that can expand or contract.

The upper plate support part 430 having the above-described configuration supports the upper plate 410 by using the first support part 431 and the plurality of second support parts 432a, 432b, 432c, and 432d, and forms an elastic force. By using a plurality of second supports 432a, 432b, 432c, and 432d, each corner of the top plate 410 is basically supported, and the top plate 410 is an elastic force of each of the second supports 432a, 432b, 432c, and 432d. When the first support 431 is lowered by lowering the pressure, the filling solution contained in the first support 431 is compressed and supplied to each of the second support parts 432a, 432b, 432c, and 432d, which are being lowered together. Due to expansion due to the supply of the filling liquid, the lowering of each of the second supporting parts 432a, 432b, 432c, and 432d is prevented, and the lowering of the upper plate 410 is gradually increased.

That is, the upper plate 410 is initially supported using only the elastic force of each of the second support parts 432a, 432b, 432c, and 432d, but is supplied from the first support part 431 as the first support part 431 descends together. The downward driving of the upper plate 410 is reduced by adding up to a resistance value generated by the adhesion force due to the filling liquid.

The above-described embodiments are for illustrative purposes, and those of ordinary skill in the art to which the above-described embodiments belong may easily change to other specific forms without changing the technical spirit or essential features of the above-described embodiments. I can understand. Therefore, it is to be understood that the above-described embodiments are illustrative in all respects and not restrictive. For example, each component described as a single type may be implemented in a distributed manner, and similarly, components described as distributed may be implemented in a combined form.

The scope to be protected by the present specification is represented by the following claims rather than the above description, and should be construed to include all changes or modifications derived from the meaning and scope of the claims and their equivalents. .

10: probe card inspection device
100: card fastening part
200: card inspection unit
300: microscope
400: elastic support
500: elastic support

Claims (2)

A card fastening part for fastening a probe card to be tested;
A card inspecting unit which checks whether a probe card is normally operated by applying an electrical signal to the probe card fastened to the card fastening unit; And
Is installed on one side of the card fastening portion, and includes a microscope for observing the probe card exposed to the outside through an opening formed on the upper side of the card fastening portion,
The card fastening unit may include: a seating unit forming a mounting groove having a shape corresponding to the shape of the probe card to seat the probe card; A cover part connected to the seating part so as to be rotatable and covering an upper side of the seating part when the probe card is seated in the seating groove; And a support part installed below the seating part to support the seating part.
The seating groove is electrically connected to the probe card and a connection pin for transmitting an electrical signal is formed along the bottom surface of the groove,
The cover part may form an opening having a shape corresponding to the shape of the probe card at a position facing the probe card so that the upper portion of the probe card seated in the seating groove may be observed from above, and electrically connected to the probe card to be electrically connected to the probe card. A connecting pin for transmitting a signal is formed along the lower side of the periphery of the opening,
The seating portion, the mounting plate is formed in a flat plate shape; A guide bar formed in a shape of “a” and installed at a front end of the seating plate and configured to seat the front end edge of the cover part; A fastening lever installed at a front end of the seating plate and fastening the cover part so as not to be opened during inspection when the cover part covers the probe card; And an elastic support part installed at both front ends of the seating plate opposite to each corner of the front end of the cover part and supporting the cover part covering the probe card using an elastic force.
The seating plate is formed in each of the insertion groove for inserting the elastic support portion on both sides of the front end,
The elastic support portion, the body portion is formed in a cylindrical shape; The cover is spaced apart from the other first stand at a predetermined interval so as to be connected to the plurality of rotatable along the upper portion of the body portion, the cover is installed to be inclined in a direction closer to the other first stand from the upper side to the lower side and seated on the upper side A first stand supporting the part; And spaced apart from the other second stand at a predetermined interval is installed so that a plurality of rotatably connected along the lower portion of the body portion, is installed to be inclined in a direction closer to the other second stand from the lower side to the upper side to support the body portion A second stand,
The body portion, the body is formed in a cylindrical shape; An upper installation is formed along the upper portion of the body corresponding to the number of the first stand so that the lower portion of the first stand is rotatable, and is inclined toward the outer side of the body toward the upper side from the lower side home; Lower installation grooves are formed along the lower part of the body corresponding to the number of the second stand so that the upper part of the second stand is rotatable, and inclined in the outward direction of the body from the upper side to the lower side. ; The first side facing the upper side and the upper side of the first stand and the upper side of the first stand installed in the upper mounting groove or the second stand installed in the lower mounting groove An elastic support installed between one side of the second stand and the lower mounting groove to support the first stand and the second stand using an elastic force; And an impact absorbing pad installed along the inlet of the upper installation groove and the inlet of the lower installation groove to absorb the impact caused by the collision with the first stand or the second stand.
The first stand is connected to the upper installation groove so that the lower portion is rotatable, the lower inclined surface is supported by the elastic support bar; A pedestal which is formed in a triangular shape in which an upper surface is flat and the gap becomes narrower toward the lower side, and a lower portion is connected to the upper portion of the support bar to be rotatable; And a washing plate-shaped unevenness formed of an elastic material to improve adhesion to the cover part seated on the upper side along the upper surface, and as the cover part seated on the upper side moves up or down, the upper portion of the pedestal. A sliding pad which is slid and moved in the
The pedestal, the sliding groove is formed in the longitudinal direction along the upper surface,
The sliding pad is connected to the sliding groove is provided with a sliding synchronization on the lower side to allow the sliding movement,
The card fastening part further includes an elastic support installed between the seating part and the support part to support the support part by using an elastic force,
The elastic support is formed in the form of a flat plate for supporting the seating portion; A case spaced apart from the upper plate and formed to form an inner space; And an upper plate support part installed in an inner space of the case and having an upper portion exposed to an upper side of the case to support the upper plate using an elastic force.
The upper plate support unit may support a center of the upper plate, the first support unit for supplying a filling liquid into the inner space as the upper plate is lowered; And installed at each lower side of each corner of the upper plate, and move upwards and downwards to support the edges of the upper plate by using an elastic force, and the upper plate is lowered in the vertical direction by the filling liquid supplied from the first support part as the upper plate descends. A second support to which movement is braked,
The first support portion, the first rotational fastening portion is provided in the center of the lower side of the upper plate, forming a spherical inner space; A first connection ball formed in a spherical shape corresponding to the shape of the inner space of the first pivot fastening part and installed to be rotatable in the inner space of the first pivot fastening part; A first support bar extending downward from the bottom of the first connection ball to support the first connection ball; It is formed in a cylindrical shape is installed in the inner space of the case, the filling liquid is received in the sealed inner space, the lower portion of the first support bar is inserted into the inner space, the first support bar when the upper plate is lowered A filling liquid tank in which a filling liquid is compressed and supplied to the second support part as a lower portion of the lower portion falls from an upper side of the inner space; And a connecting pipe extending from a lower portion of the filling liquid tank to the second supporting portion to form a passage through which the filling liquid flows.
The second support part may include: a second pivot fastening part installed at a corner of the lower side of the upper plate and forming a spherical inner space; A second connection ball formed in a spherical shape corresponding to the shape of the inner space of the second pivotal fastening part and rotatably installed in the inner space of the second pivotal fastening part; A second support bar extending downward from the bottom of the second connection ball to support the second connection ball; An elastic support installed at a lower side of the second support bar to support the second support bar using an elastic force; And a second support bar is inserted into the through hole to form a through hole in a vertical direction. When the upper plate descends, the filling liquid is supplied to the internal space through the connecting pipe and expands. According to the size of the through hole is reduced to include a lifting control unit for fastening so that the second support bar does not move,
The elevating control unit, the outer wall is formed of a hard material so that the filling liquid is expanded to the inner direction in which the through hole is located as the filling liquid is supplied, the inner side facing the second support bar is expanded or contracted It is formed of a possible material, probe card inspection apparatus.
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