KR102008586B1 - Non-welding type adaptor for connecting pipes - Google Patents

Abstract

The present invention is a multi-function for semiconductor piping that can easily connect another pipe to the cut portion even if the cut to a predetermined length to match the length of the pipe in the process of piping a plurality of pipes used in the exhaust line of the semiconductor manufacturing equipment It relates to a non-welded connector.

Description

Non-welding type adapter for connecting pipes

The present invention relates to a multifunctional non-welded connector for semiconductor piping, and more particularly, a plurality of pipes used in the exhaust line of semiconductor manufacturing equipment are cut even if cut to a predetermined length to match the length of the pipe in the process of piping construction. It relates to a multifunctional non-welded connector for semiconductor piping that can easily connect another pipe to the site.

Generally, various kinds of reaction gases are used to form a thin film on a wafer in a semiconductor manufacturing process. This reaction gas contains an oxidizing component, a ignition component and a toxic component. Therefore, if used waste gas is released into the atmosphere as it is, it is not only harmful to the human body, but also causes environmental pollution.

Accordingly, the waste gas is discharged to the atmosphere through a purification process that lowers the hazardous component content below the allowable concentration. For this purpose, a gas scrubber is installed in the exhaust line of the semiconductor manufacturing equipment that exhausts the waste gas. do. The gas scrubber is used to clean the waste gas in various ways after the gas inlet pipe is connected to the exhaust line to receive the waste gas.

In this case, the exhaust line is configured in such a manner that a plurality of pipes (hereinafter, referred to as "pipes") having a predetermined length are installed in succession. As a method for connecting pipes, a joint method using a flange-shaped connector is usually used. The joint method using the connector has been previously filed in the Republic of Korea Patent Publication No. 10-2012-0133501 (published: 2012.12.11) and the like.

However, the main duct pipe and the exhaust line pipe installed in the semiconductor manufacturing equipment are mainly standardized to a predetermined length. For this reason, the length of the pipe often does not match when the exhaust line is constructed, and thus the pipe may need to be cut and connected again to a predetermined length.

Specifically, conventionally, after assembling the pipe in the field and checking the part to be cut to the installation length, the temporary assembled exhaust pipe is dismantled. Then send it to the factory to cut the cut indicator. Then, after welding the connecting flanges, the synthetic joints such as fluororesin are coated on the welded area, and the pipes are brought back to the installation place and assembled.

However, as described above, a series of processes for reworking pipes have problems such as increased workmanship and required costs, as well as time-consuming assembly.

On the other hand, various kinds of gases including fluorine gas having toxic components pass through the pipes constituting the exhaust line of the semiconductor manufacturing process. These pipes should be treated to have chemical resistance to ensure the durability of the connecting portion by using the pipe connector, and to prevent corrosion of the pipe by toxic gas.

Specifically, the conventional connector for the semiconductor piping provides a rigidity and durability by manufacturing using a stainless material. That is, the connector is provided with a fitting portion on one side to be fitted to the inner diameter of the pipe to be connected, the flange portion protruding with a diameter larger than the outer diameter of the pipe on the other outer peripheral surface is integrally formed.

In this case, the inner peripheral surface of the connector is coated with a resin such as Teflon (Teflon) to a certain thickness in order to improve the chemical resistance to the waste gas.

However, the conventional connector for a semiconductor pipe as described above, as the fitting portion and the flange portion is formed of one metal material, as well as material costs, it takes a lot of time to process it.

In addition, after the connector is processed, there must be a separate coating process on the inner peripheral surface of the connector in order to improve the chemical resistance, there is a problem that the manufacturing cost increases in the end.

The present invention has been made to solve the above-described problems, even if the cut to a predetermined length for adjusting the length of the pipe in the process of pipe construction of a plurality of pipes for use in the exhaust line of the semiconductor manufacturing equipment, the cut portion It is an object of the present invention to provide a multifunctional non-welded connector for semiconductor piping that can easily connect another pipe by installing a connector for semiconductor piping.

Another object of the present invention is to form a hollow inner core member, one side of which is fitted inside the pipe for pipes made of synthetic resin, and to improve the chemical resistance by forming a flange member made of metal material on the other outer peripheral surface of the inner core member To be able to, but to provide a multi-functional non-welded connector for semiconductor piping that allows the inner core member and the flange member to be assembled simply and robustly.

Multifunctional non-welded connector for semiconductor piping according to the present invention for realizing the object as described above is formed in a hollow shape of a synthetic resin material, one side of the inner core member is fitted to the inner peripheral surface of the pipe for piping; A flange member of a metallic material which is integrally coupled to the other outer peripheral surface of the inner core member and one side is fitted to the outer peripheral surface of the pipe; And a fixing member which is screwed to one outer circumferential surface of the flange member and presses a snap ring interposed with the pipe to an outer circumferential surface of the pipe, thereby fixing the position of the fitted flange member.

The present invention according to the above configuration, even in the process of assembling a plurality of pipe pipes used in the exhaust line of the semiconductor manufacturing equipment for cutting the length of the pipe for adjusting the length of the semiconductor pipe for the cut portion By installing the connector, it is easy to connect another pipe in succession.

That is, the multifunctional non-welded connector for semiconductor piping according to the present invention can be easily constructed in a desired structure while directly cutting the pipe in the field without a separate piping design.

In addition, it is possible to improve the chemical resistance of the connector by forming a hollow inner core member to be coupled to the inside of the pipe for pipes made of synthetic resin, and by forming a flange member made of metal material on the other outer peripheral surface of the inner core member. .

In addition, by using a fixing member provided with a snap ring can be fixed simply and firmly to the inner core member and the flange member coupled to the pipe.

1 is a perspective view of a multifunctional non-welded connector for semiconductor piping according to the present invention;
Figure 2 is an exploded perspective view of a multifunctional non-welded connector for semiconductor piping according to the present invention,
Figure 3 is a side cross-sectional view showing a state in which the pipe is coupled to the multifunctional non-welded connector for semiconductor piping according to the present invention,
4 is another embodiment of a gasket according to the present invention,
5 is a detailed view 'A' part of FIG.
6 is another embodiment of a gasket according to the present invention,
7 is a gasket applied to FIG. 6 and a partial detailed view thereof;
8 is another embodiment of a gasket according to the present invention,
9 is a view showing a pipe piping state using a connector according to the present invention.

Hereinafter, the configuration and operation of the preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

Here, it should be noted that in adding reference numerals to the elements of each drawing, the same elements are denoted by the same reference numerals as much as possible even if they are shown on different drawings.

1 is a perspective view of a multifunctional non-welded connector for semiconductor piping according to the present invention, FIG. 2 is an exploded perspective view of a multifunctional non-welded connector for semiconductor piping, and FIG. 3 illustrates a state in which a pipe is coupled to a multifunctional non-welded connector for semiconductor piping. It is a side sectional view showing.

1 and 2, the multifunctional non-welded connector 1 for semiconductor piping according to an exemplary embodiment of the present invention includes an inner core member 100, a flange member 200, and a fixing member 300. do.

Referring to the configuration of the present invention in detail as follows.

First, the inner core member 100 is one side is fitted to the inner peripheral surface of the pipe pipe (P), it is formed in a hollow cylindrical shape of a synthetic resin material. For reference, the pipe (P) applied to the present invention in the form of a double pipe, the outer peripheral surface of the pipe (P) is formed of a metal material and the inner resin of the pipe (P) to improve the chemical resistance (not shown) ) Is unitarily combined.

In this case, the inner core member 100 is formed of a material having chemical resistance to prevent corrosion by toxic gases such as hydrofluoric acid gas discharged through the inside of the pipe (P).

Specifically, the inner core member 100 is a high density polyethylene (HDPE), polypropylene (PP), polyethylene (PE), polytetrafluoroethylene (PTFE), MC nylon, Teflon coating, polyvinyl chloride ( PVC), polycarbonate (PC), ABS resin (acrylonitrile-butadiene-styrene resin) may be formed of any one of materials including.

In addition, the first flange portion 110 is formed on the other outer peripheral surface of the inner core member 100 so as to be locked after one side is inserted through the other side of the flange member 200 to be described later.

The inner core member 100 can be easily applied to semiconductor pipes of various diameters (100 ~ 300mm). In addition, the inner core member 100 may be modified and applied to various shapes or materials according to the shape of the pipe installed in the semiconductor manufacturing facility in addition to the above-described shape.

The flange member 200 is integrally coupled to the other outer circumferential surface of the inner core member 100, and a pipe P fitting space is provided between the inner core member 100 and the flange member 200.

That is, the inner core member 100 is coupled to the inner peripheral surface of the pipe (P) and the flange member 200 is fitted to the outer peripheral surface of the pipe (P). The flange member 200 is formed of a metal material such as stainless steel to prevent corrosion.

Referring to FIG. 3, in this case, the second flange portion 210 protrudes from the other outer circumferential surface of the flange member 200 to cover and conceal the outer circumferential surface of the first flange portion 110 of the inner core member 100. In other words, the first flange portion 110 is embedded in the groove portion 210a provided by the second flange portion 210.

In addition, one surface of the second flange portion 210, the clamp engaging groove so that the second flange 210 and the clamp 10 (see Fig. 9) of another pipe (P) that is subsequently assembled can be connected and fixed through the medium 211 is formed. In this case, the clamp 10 is commonly applied and used to connect the pipe P, and a detailed configuration of the clamp 10 will be omitted.

In addition, the other outer peripheral surface of the inner core member 100 is formed with a screw portion 120 to be screwed to the other inner peripheral surface 220 of the flange member 200. Therefore, the inner core member 100 and the flange member 200 can be easily and firmly assembled together.

On the other hand, one side of the outer peripheral surface of the inner core member 100 which is integrally coupled with the flange member 200 through the structure as described above, so that the gasket 140 is interposed between the inner peripheral surface of the pipe (P) to be installed in close contact. Gasket coupling groove 130 is provided.

For example, the gasket 140 may use a general ring shape having a circular cross section (see FIG. 3).

In another embodiment, as shown in FIG. 4, the gasket 140 may prevent the fitting pipe P from flowing or escaping by being closely adhered using a band-shaped cross section.

Referring to FIG. 5, a plurality of protrusions 141 spaced apart along the direction in which the pipe P is fitted may be provided on an opposite surface of the gasket 140 that contacts the inner circumferential surface of the pipe P. Referring to FIG.

That is, as the plurality of protrusions 141 are provided on the gasket 140, the adhesion of the inner core member 100 to the inner circumferential surface of the pipe P may be improved. Preferably, the protrusion 141 may be formed in a semicircle or other polygonal cross section.

As another embodiment, as shown in FIGS. 6 and 7, a plurality of irregularities 143 having a triangular cross section are spaced apart from the opposite surface of the gasket 140, which is in contact with the inner circumferential surface of the pipe P. 6. Is formed.

Accordingly, when the inner core member 100 is fitted to the inner circumferential surface of the pipe P, the plurality of unevennesses 143 provided on the gasket 140 closely adhere to the inner circumferential surface of the pipe P, thereby tightly sealing the gap therebetween. I can let you.

As another embodiment, as shown in FIG. 8, a plurality of uneven grooves P1 may be formed on the inner circumferential surface of the pipe P so that the unevenness 143 may be locked.

In this case, the unevenness 143 is provided with an inclined surface 143a at one side that comes into contact with the uneven groove P1 when the pipe P is inserted and coupled, and is provided with a locking jaw 143b (see FIG. 7) at the other side. It is desirable to form a ratchet shape that maintains a firmly coupled state.

Through the structure of the concave-convex 143 and the concave-convex groove (P1) can be prevented from falling in the opposite direction pipe (P) once fitted to the connector (1), thereby ensuring the firmness of the inner core member 100 It can remain in a bonded state.

For reference, the uneven groove P1 provided on the inner circumferential surface of the pipe P may be directly formed at a construction site through a separate jig.

Referring to FIG. 4 again, the fixing member 300 is screwed to one outer circumferential surface 201 of the flange member 200, and a snap ring 310 interposed between the fixing member 300 and the pipe P when the fixing member 300 is coupled. ) By pressing the pipe to the outer circumferential surface side, it is firmly fixed to the flange member 200 fitted to the pipe (P).

Specifically, the snap ring 310 is provided with an inclined pressing surface 311 to be pressed to the pipe (P) side when the fixing member 300 is fastened.

In addition, the inner diameter of the ring-shaped snap ring 310 is formed smaller than the outer diameter of the pipe (P), the opening 313 (see Fig. 2) is formed on at least one side of the snap ring (310). That is, the snap ring 310 may be opened or closed by the structure of the opening 313, and thus, the snap ring 310 formed to have a smaller diameter than the outer diameter of the pipe P may be fitted to the outer surface of the pipe P. have.

The snap ring 310 of such a structure is to be stronger than the outer circumferential surface of the pipe (P) by the structure of the inclined pressure surface 311 as the fastening member 300 is fastened, thereby firmly fixing the connector (1) This becomes possible.

Then, the assembly process of the multifunctional non-welded connector 1 for semiconductor piping of the present invention as described above will be described.

First, the pipe P is cut into a predetermined length to fit the exhaust line of the semiconductor equipment.

And the fixing member 300 and the snap ring 310 is inserted in the end of the pipe (P) in order.

Then, the inner core member 100 and the flange member 200 are integrally combined, and then one side of the inner core member 100 is fitted to the inner circumferential surface of the pipe P using a separate jig. At the same time, one side of the flange member 200 is fitted to surround the outer peripheral surface of the pipe (P).

Then, the fixing member 300 is screwed to one outer circumferential surface of the flange member 200 to fix the inner core member 100 and the flange member 200 fitted to the end of the pipe (P).

In this case, the inner peripheral surface of the fixing member 300 is in contact with the inclined pressing surface 311 of the snap ring 310 in the process of coupling the fixing member 300 and pressurized toward the outer peripheral surface of the pipe, resulting in a firm fixing of the flange member 200. This becomes possible.

When the assembly of the connector (1) at the end of the pipe (P) is completed in the same manner as described above, as shown in Figure 9 to be connected to the connector (1) installed in another pipe (P) connected to the pipe (P) After the butt, the plurality of clamps 10 are connected and fixed, and thus the pipe construction of the pipe P using the connector 1 is completed.

In this case, a gasket (not shown) may be interposed between the joining surfaces of the butt-coupled connector 1 to maintain airtightness.

The multifunctional non-welded connector 1 for semiconductor piping according to the present invention having the above configuration has a length of the pipe P in a process of connecting and assembling a plurality of piping pipes P used in the exhaust line of the semiconductor manufacturing equipment. Even if cut to a predetermined length for adjustment, by installing the connector (1) in the cut portion, it is possible to easily connect another pipe (P) in succession.

In particular, the multifunctional non-welded connector 1 for semiconductor piping of the present invention can be easily constructed in a desired structure while cutting the pipe directly in the field without a separate piping design.

In other words, if it is necessary to cut the pipe for semiconductor piping on the spot for the purpose of piping design change, etc., the welding without the welding according to the present invention including the inner core member 100 and the flange member 200 according to the purpose It can be applied immediately using the connector (1).

In addition, since the non-welded connector 1 according to the present invention is made in a prefabricated manner, it is possible to take immediate action in the field when maintenance is required such as replacement of a pipe or replacement of a packing.

In addition, the hollow inner core member 100, one side of which is fitted inside the pipe for pipe P, is formed of a synthetic resin material, and the flange member 200 coupled to the other outer peripheral surface of the inner core member 100 is made of metal. The chemical resistance of the connection tool 1 can be improved by forming into.

In addition, by using the fixing member 300 having the snap ring 310, the inner core member 100 and the flange member integrally coupled to the pipe P can be fixed simply and firmly.

The present invention has been illustrated and described with reference to certain preferred embodiments, but the present invention is not limited to the above embodiments and various changes and modifications are possible without departing from the technical spirit of the present invention.

1: Multifunctional non-welded connector for semiconductor piping 10: Clamp
100: inner core member 110: first flange portion
120: screw 130: gasket coupling groove
140: gasket 141: protrusion
143: unevenness 143a: slope
143b: locking jaw 200: flange member
210: second flange portion 211: clamping groove
300: fixing member 310: snap ring
311: pressure surface 313: opening
P: Pipe P1: Uneven Groove

Claims (12)

An inner core member 100 formed in a hollow shape made of a synthetic resin material and having one side fitted to an inner circumferential surface of a pipe P;
A flange member (200) of metal material coupled to the outer peripheral surface of the other side of the inner core member (100) and having one side fitted to the outer peripheral surface of the pipe (P); And
In addition to being screwed to one side outer circumferential surface of the flange member 200, by pressing the snap ring 310 interposed between the pipe (P) toward the outer circumferential surface side, to fix the position of the fitted flange member 200 It comprises a; fixing member 300,
The inner core member 100 has a first plan so that one side is inserted through the other side of the flange member 200 and the other side of the inner core member 100 is fixed to the other side of the flange member 200. Protruding from the branch 110, the upper surface of the first flange 110 is configured to form a flat surface,
On the other outer circumferential surface of the flange member 200, the second flange portion 210 protrudes to cover and cover the entire upper surface and the edge of the first flange portion 110 so that the first flange portion 110 is formed. It is configured to be embedded in the groove portion (210a) of the second flange portion 210,
On the other outer circumferential surface of the inner core member 100 is formed a screw portion 120 which is screwed with the other inner circumferential surface of the flange member 200 together with the stepped end of the pipe (P),
One side outer circumferential surface of the inner core member 100 is interposed between the inner circumferential surface of the pipe (P) and the front end is in close contact with the inner circumferential surface of the pipe (P), the cross section of the band-shaped gasket 140 can be accommodated Rectangular recessed gasket coupling groove 130 is provided,
The front end of the gasket 140 which is in contact with the inner circumferential surface of the pipe (P) is formed of a plurality of irregularities 143 having a triangular cross section is formed spaced apart from each other,
The uneven groove P1 is formed to correspond to the inner circumferential surface of the pipe P so that the gap between the outer circumferential surface of the inner core member 100 and the inner circumferential surface of the pipe P can be sealed.
The snap ring 310 is provided with an inclined pressing surface 311 to be pressed to the outer peripheral surface side of the pipe (P) when the fixing member 300, an opening 313 is formed on at least one side of the pipe (P). Multifunctional non-welded connector for semiconductor piping that is fitted to the outer circumferential surface of the pipe (P) while adjusting the inner diameter according to the diameter.
delete delete The method of claim 1,
On one surface of the second flange portion 210,
Multifunctional non-welded connector for semiconductor piping further comprising a; clamp engaging groove 211 to be fixed via the second flange portion 210 and the clamp 10 of another pipe to be subsequently assembled.
delete delete delete delete delete delete The method of claim 1,
The unevenness 143,
An inclined surface 143a is provided at one side that comes into contact with the uneven groove P1 when the pipe P is inserted and coupled, and a latching jaw 143b is provided at the other side to have a ratchet shape to maintain a firm coupling state. Multifunctional non-welded connector for semiconductor piping to be formed. delete

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