KR102002665B1 - System for measuring fine particulate and gas particulate - Google Patents

System for measuring fine particulate and gas particulate Download PDF

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Publication number
KR102002665B1
KR102002665B1 KR1020150011419A KR20150011419A KR102002665B1 KR 102002665 B1 KR102002665 B1 KR 102002665B1 KR 1020150011419 A KR1020150011419 A KR 1020150011419A KR 20150011419 A KR20150011419 A KR 20150011419A KR 102002665 B1 KR102002665 B1 KR 102002665B1
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South Korea
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microparticle
sensor
microparticles
fine particles
unit
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KR1020150011419A
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Korean (ko)
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KR20160091142A (en
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이국녕
성우경
이민호
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전자부품연구원
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/0656—Investigating concentration of particle suspensions using electric, e.g. electrostatic methods or magnetic methods
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34—Constructional details or accessories or operation thereof
    • B03C3/38—Particle charging or ionising stations, e.g. using electric discharge, radioactive radiation or flames
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/0606—Investigating concentration of particle suspensions by collecting particles on a support
    • G01N15/0618—Investigating concentration of particle suspensions by collecting particles on a support of the filter type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
    • G01N5/02—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content

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  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Dispersion Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)

Abstract

Microparticle measurement system according to an embodiment of the present invention is a charging unit for electrifying the microparticles contained in the air (charger), through the electrical attraction, the microparticle capture unit for capturing the charged microparticles, and the captured microparticles It may include a measuring unit for measuring the concentration of the fine particles contained in the air based on.

Description

Fine particle and gas particle measuring system {SYSTEM FOR MEASURING FINE PARTICULATE AND GAS PARTICULATE}

The present invention relates to a microparticle and gas particle measurement system.

As a method of measuring the amount of particles contained in the air, conventionally, the fine particles contained in the air sucked through the suction pipe are separated by the size (or mass) of the fine particles using centrifugal force, and then the separated fine particles are separated into the fine filter. Collecting and analyzing methods are used.

That is, in the method of collecting the fine particles by using the suction tube and the filter, the amount of air is kept constant, and the fine particles are classified by the size using centrifugal force by using the suction tube having a constant size.

However, when the size of the microparticles is 1 μm or less, even if the centrifugal force and the microfilter are used, since most of them are not collected in the microfilter and are discharged out of the suction pipe together with air, it is difficult to accurately measure the amount of the microparticles.

Another method of measuring the amount of fine particles in the air is to measure the scattering characteristics using an optical system and count the number of fine particles by particle size such as PM10, PM2.5 PM1.0, etc. In order to construct an expensive and scattered optical system, it is difficult to reduce the size of the measuring device to the form of a sensor element.

Recently, a method of measuring air cleanliness by analyzing air permeability using a camera provided in a portable smart device has been proposed, but it is highly likely that the measurement result will be inaccurate, and the ultra small size contained in the air It is impossible to analyze the tenants precisely.

An object of the present invention is to provide a fine particle and gas particle measuring system for measuring the concentration of the fine particles and gas particles contained in the air, without using a fine filter and centrifugal force.

It is an object of the present invention to provide a microscopic microparticle measurement system for measuring the concentration of microparticles suspended in air without using a scattering optical system.

Another object of the present invention is to provide a microparticle and gas particle measurement system for qualitatively analyzing captured microparticles and gas particles.

In order to solve the technical problem as described above, the microparticle measurement system according to an embodiment of the present invention captures the charged microparticles through an electrification unit, an electrical attraction to electrified (finelect) the microparticles contained in the air The microparticle capture unit, and based on the captured microparticles may include a measuring unit for measuring the concentration of the microparticles contained in the air.

In an embodiment, the charging unit may include an anion generating module that generates negative ions or positive ions to charge the microparticles with a negative charge or a positive charge.

In an embodiment, the microparticle capture unit includes a microparticle capture sensor to which the charged microparticles are adsorbed, and the microparticle capture sensor is applied with an electric field that generates an electrostatic force for effective adsorption of the charged microparticles. The electrode may include a sensor electrode to which the charged microparticles are adsorbed, and a counter electrode which is a reference of voltage in relation to the sensor electrode.

The measuring unit may include a thickness measuring unit measuring a thickness of the fine particles adsorbed to the sensor electrode, and a concentration calculating unit calculating a concentration of the fine particles in air based on the measured thickness. Can be.

In an embodiment, the sensor electrode may be formed of a metal thin film, and the thickness measuring unit may measure the thickness of the adsorbed microparticles by using an optical property that varies according to the thickness of the adsorbed microparticles.

The measuring unit may include a mass measuring unit measuring a mass of the fine particles adsorbed to the sensor electrode, and a concentration calculating unit calculating a concentration of the fine particles in air based on the measured mass. Can be.

In an exemplary embodiment, the measurement unit may create a standard relational expression through a correlation between a mass or thickness change value of a sensor adsorbed and output by the microparticle capture sensor per hour and fine dust amount of fine particles in air, and use the air to determine unknown air. It may include a calculation unit for calculating the concentration of the fine particles.

In an embodiment, the measurement unit gives a serial number to the microparticle capture sensor, the concentration measured according to the serial number, the weather information such as temperature and humidity during measurement, the measurement time of the measured concentration and the measured concentration of At least one of the measurement dates can be stored.

The apparatus may further include a communication unit configured to transmit the serial number and the stored data according to the serial number to an external device.

In an embodiment, the method may further include an analyzer configured to analyze the components of the fine particles adsorbed on the sensor electrode to determine the presence of harmful substances or harmful viruses.

In an embodiment, the apparatus may further include a suction tube that sucks the air and provides the charged portion to the charging unit, and an air controller that controls the amount of air sucked into the suction tube or the flow of air.

In one embodiment, the measurement unit may include at least one of a sensor using a crystal oscillator microbalance (QCM), surface resonance (SPR), thickness gauge (elipsometer), Raman scattering and the like.

In one embodiment, the measurement unit may include a micro-nano pattern on the surface of the sensor electrode in order to improve the adsorption efficiency and detection performance of the fine particles.

Referring to the effect of the microparticle and gas particle measurement system according to the present invention.

According to at least one of the embodiments of the present invention, the concentration of the fine particles and ultra-fine particles contained in the air can be measured without using the fine filter and centrifugal force.

According to at least one of the embodiments of the present invention, it is possible to implement a compact system capable of measuring the concentration of ultrafine particles suspended in the air, without using a scattering optical system.

According to at least one of the embodiments of the present invention, the concentration of the ultra-fine particles in the air can be measured remotely by connecting the mobile ultra-low concentration in the air measured by the ultra-compact system with the mobile device.

In addition, according to at least one of the embodiments of the present invention, it is possible to qualitatively analyze the captured microparticles.

1 is a view showing a microparticle measurement system according to an embodiment of the present invention.
Figure 2a is a view showing a microparticle measurement system according to another embodiment of the present invention.
Figure 2b is a view showing a microparticle measurement system according to another embodiment of the present invention.
3A and 3B are diagrams illustrating a sensor for capturing microparticles in a microparticle measurement system according to an exemplary embodiment.
4 is a view showing an example of a thickness measurement unit for optically measuring the thickness of the particles adsorbed in the microparticle measurement system according to an embodiment of the present invention.
5 is a view showing another example of a thickness measurement unit for optically measuring the thickness of the fine particles adsorbed in the microparticle measurement system according to an embodiment of the present invention.
6a to 6c are views illustrating an example of measuring the mass of the fine particles or gas particles adsorbed in the fine particle and gas particle measuring system according to an embodiment of the present invention.
7A and 7B are views illustrating an example of qualitatively analyzing the adsorbed microparticles in the microparticle measuring system according to an exemplary embodiment of the present invention.

Hereinafter, embodiments of the present disclosure will be described in detail with reference to the accompanying drawings, and the same or similar components are denoted by the same reference numerals regardless of the reference numerals, and redundant description thereof will be omitted. The suffixes "module" and "unit" for components used in the following description are given or used in consideration of ease of specification, and do not have distinct meanings or roles from each other. In addition, in describing the embodiments disclosed herein, when it is determined that the detailed description of the related known technology may obscure the gist of the embodiments disclosed herein, the detailed description thereof will be omitted. In addition, the accompanying drawings are intended to facilitate understanding of the embodiments disclosed herein, but are not limited to the technical spirit disclosed herein by the accompanying drawings, all changes included in the spirit and scope of the present invention. It should be understood to include equivalents and substitutes.

Terms including ordinal numbers such as first and second may be used to describe various components, but the components are not limited by the terms. The terms are used only for the purpose of distinguishing one component from another.

When a component is referred to as being "connected" or "connected" to another component, it may be directly connected to or connected to that other component, but it may be understood that other components may be present in between. Should be. On the other hand, when a component is said to be "directly connected" or "directly connected" to another component, it should be understood that there is no other component in between.

Singular expressions include plural expressions unless the context clearly indicates otherwise.

In this application, the terms "comprises" or "having" are intended to indicate that there is a feature, number, step, operation, component, part, or combination thereof described in the specification, and one or more other features. It is to be understood that the present invention does not exclude the possibility of the presence or the addition of numbers, steps, operations, components, components, or a combination thereof.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. It is apparent to those skilled in the art that the present invention can be embodied in other specific forms without departing from the spirit and essential features of the present invention.

1 is a view showing a microparticle measurement system according to an embodiment of the present invention. Referring to FIG. 1, the microparticle measurement system may include a charging unit 110, a microparticle trap 130, and a measurement unit 150.

The charging unit 110 may electrify the microparticles included in the air such that the microparticles included in the air become charged microparticles. In detail, the charging unit 110 may make the positive charge amount and the negative charge amount of the fine particles in the air in an electrically neutral state imbalance so that the fine particles in the air may be positive or negative. To this end, the charging unit 110 included in the microparticle measurement system according to the present invention may include an anion generating module for charging the microparticles with negative ions by generating anions such that the microparticles have a negative charge including negative charges. have.

The microparticle capture unit 130 may capture the microparticles charged in the charging unit 110 through electrical attraction. Specifically, the microparticle trap 130 may include a microparticle capture sensor that is charged with a charge opposite to the charge of the microparticles charged in the charging unit 110, and the charge and microparticle capture of the charged microparticles Due to the electrical attraction acting between the charges of the sensors, the microparticles charged in the charging unit 110 may be adsorbed to the microparticle trap 130. Details of the microparticle capture sensor will be described with reference to FIGS. 3A and 3B.

The measuring unit 150 may measure the concentration of the microparticles included in the air based on the microparticles captured by the microparticle trap 130. In detail, the measurement unit 150 may measure concentrations having a correlation in proportion to the thickness or mass of the microparticles captured in the microparticle capture unit.

To this end, the measuring unit 150 may include a thickness measuring unit for measuring the thickness of the fine particles adsorbed to the microparticle capture sensor or a mass measuring unit for measuring the mass, and based on the measured thickness or mass, the corresponding fine It may include a concentration calculation unit for calculating a concentration indicating how much particles are contained in the air. In detail, the measuring unit 150 may include at least one of a sensor using a crystal oscillator mass sensor (QCM), a surface resonance (SPR), a thickness meter, an elpsometer, or Raman scattering. Details of the measuring unit 150 will be described in detail with reference to FIGS. 4 to 6B.

In addition, the microparticle measurement system according to the present invention may further include a suction pipe for sucking the air to be measured the concentration containing the fine particles to the charging unit 110, the amount of air sucked into the suction pipe Or it may further include an air controller for controlling the flow of air. Here, the air controller may be implemented as a fan device.

Based on the configuration as described above, the microparticle measuring system according to the present invention is capable of capturing and concentration measurement of the microparticles without using a centrifugal force and a microfilter. In addition, the microparticles may be charged to have electrical properties regardless of the size of the microparticles, and because the electrical attraction also works regardless of the size of the microparticles, the microparticle measuring system according to the present invention affects the size of the microparticles. Do not receive. As a result, the microparticle measuring system according to the present invention can accurately capture ultrafine particles not collected by the microfilter, and can accurately measure the concentration of the fine particles contained in the air.

Figure 2a is a view showing a microparticle measurement system according to another embodiment of the present invention. Referring to FIG. 2A, the microparticle measurement system may include a charging unit 210, a microparticle capture unit 230, a measurement unit 250, and a communication unit 270.

Since the charging unit 210, the fine particle trapping unit 230, and the measuring unit 250 included in the microparticle measuring system of FIG. 2A are the same as those described with reference to FIG. 1, detailed descriptions are omitted and are compared with those of FIG. 1. This configuration is described.

The microparticle measurement system may further include a communication unit 270. The communication unit 270 may be connected to the measurement unit 250 and may transmit / receive data with an external device. In detail, the communication unit 270 may transmit data measured by the measurement unit 250 to an external device (eg, a server). In addition, the communication channel used by the communication unit 270 may be wired / wireless communication, and is not limited to a specific communication method.

Since the concentration of the fine particles contained in the air may change over time, and the data on the change may be used as data for studying the air pollution degree, the microparticle measuring system according to the present invention is provided through the communication unit 270. Data about the time at which the concentration was measured, the date on which the concentration was measured, or the measured concentration may be transmitted to an external server in real time.

Specifically, the measurement unit 250 may assign a serial number so that the microparticle capture sensor that captures the microparticles in a specific situation is distinguished from other microparticle capture sensors. In addition, the measurement unit 250 stores at least one or more of the concentration of the microparticles measured by the microparticle capture sensor corresponding to the serial number, the measured time of the measured concentration, and the measurement date of the measured concentration together with the serial number. Can be.

And, the communication unit 270 is at least one or more data of the concentration of the measured microparticles stored in accordance with the serial number given by the measuring unit 250 and the corresponding serial number, the measurement time of the measured concentration and the measurement date of the measured concentration. Can be delivered to an external device.

Based on the above configuration, the microparticle measuring system according to the present invention can deliver the measured concentration of the microparticles and the data related thereto in real time to an external device.

Figure 2b is a view showing a microparticle measurement system according to another embodiment of the present invention. Referring to FIG. 2B, the microparticle measurement system may include a charging unit 210, a microparticle capture unit 230, a measurement unit 250, and an analyzer 290.

Since the charging unit 210, the microparticle trapping unit 230, and the measuring unit 250 included in the microparticle measurement system of FIG. 2B are the same as those described with reference to FIG. 1, detailed descriptions are omitted, and differences from FIG. This configuration is described.

The microparticle measurement system may further include an analysis unit 290. The analyzer 290 may be connected to the microparticle trap 230 and may qualitatively analyze the captured microparticles. In detail, the analysis unit 290 may determine the components of the microparticles adsorbed on the microparticle capture sensor when precise analysis of the captured microparticles is necessary, and the corresponding components may be harmful or harmful to the human body. You can determine whether it is a virus. For example, the analyzer 290 may include a scanning election microscopy (SEM) or an optical microscope capable of qualitatively analyzing the microparticles adsorbed on the microparticle capture sensor, and may include EDX (Energy Dispersive X-). The components of the adsorbed microparticles can be analyzed by ray spectroscopy or photo spectrometry.

3A and 3B are diagrams illustrating a sensor for capturing microparticles in a microparticle measurement system according to an exemplary embodiment. Figure 3a is a view of the microparticle capture sensor from above, Figure 3b is a view showing a cross section of the microparticle capture sensor.

The microparticle capture unit of the microparticle measurement system according to the present invention may include a microparticle capture sensor. Here, the microparticle capture sensor may be a sensor in which the microparticles charged in the charging unit are adsorbed through electrical attraction.

The microparticle capture sensor may include a sensor electrode 310 and a counter electrode 320, and may further include a passivation layer 321 and a substrate 330.

The sensor electrode 310 may be a metal thin film electrode formed of a metal thin film, and may be formed of a transparent material. In addition, the sensor electrode 310 may be charged with a charge that is electrically opposite to that of the microparticles charged in the charging unit. Therefore, the charged microparticles are adsorbed on the sensor electrode 310, and according to repeated adsorption of the charged microparticles, the accumulated charged microparticles may be formed as a layer on the sensor electrode 310.

The counter electrode 320 is an electrode that is a voltage reference in relation to the sensor electrode 320 so that the sensor electrode 310 can be charged with a charge that is electrically opposite to the charge of the microparticles charged in the charging unit. Can be. Specifically, the fine particle capture sensor may control the voltage based on the counter electrode 320 to control the type and the amount of charges charged by the sensor electrode 320. The counter electrode 320 may also be formed of a transparent material.

The sensor electrode 310 and the counter electrode 320 as described above may be formed on the substrate 330, and the substrate 330 may be a transparent substrate formed of a transparent material. When the substrate 330 is a transparent substrate, the measurement unit may optically measure the thickness of the fine particles adsorbed on the sensor electrode 310 to form a layer under the substrate 330.

The passivation layer 321 is formed on the counter electrode 320, and the sensor electrode 310 and the counter electrode 320 may be prevented from being shorted due to the stacked fine particles. The passivation layer 321 may also be formed of a transparent material.

The counter electrode 320 may not be formed on the same substrate as the microparticle capture sensor. That is, it does not need to be formed on the same substrate as the sensor electrode 310, and if necessary to manufacture the microparticle measuring system according to the present invention, it may be formed as a separate electrode outside the substrate (for example, a suction pipe). have. In addition, the counter electrode 320 is formed on a separate substrate from the sensor electrode 310, and is formed as a parallel plate electrode or a separate electrode structure to form an electric field for the electrostatic force action between the sensor electrode 310 and the counter electrode 320. It is also possible to form

That is, the microparticle capture sensor illustrated in FIGS. 3A and 3B has been described as an example, and the shape of the microparticle capture sensor included in the present invention is not limited thereto.

On the other hand, the microparticle capture unit included in the microparticle measurement system according to the present invention may include a plurality of microparticle capture sensors in order to measure the concentration of the microparticles over time. The microparticle capture sensor whose concentration has been measured can be automatically unloaded for the next measurement, and the new microparticle capture sensor can be automatically loaded. In detail, the microparticle capture sensor may be exchanged automatically according to a change in time.

4 is a view showing an example of a thickness measurement unit for optically measuring the thickness of the particles adsorbed in the microparticle measurement system according to an embodiment of the present invention.

The measurement unit of the microparticle measurement system according to the present invention may include a thickness measurement unit for measuring the thickness of the fine particles adsorbed on the sensor electrode 340 as described above, Figure 4 is a substrate 330 of the microparticle capture sensor In the upper part, it is a figure which shows the thickness measuring part which measures the thickness of the adsorbed microparticles.

The thickness measurer may include a light source 410, an analyzer 450, and a photo detector 460, and may further include polarizers 420 and compensators 430 and 440.

The light output from the light source 410 is aligned through the polarizer 420 and compensated through the compensator 430 to reach the microparticle layer 340 adsorbed on the sensor electrode 310 of the microparticle capture sensor. do. The reached light is reflected or refracted by the adsorbed microparticle layer 340, the sensor electrode 310 or the substrate 330. The reflected light passes through the compensator 440 to reach the analyzer 450 and the photo detector 460.

That is, the thickness measuring unit may measure the thickness of the fine particle layer 340 adsorbed on the sensor electrode 310 using the optical characteristics of the light reaching the analyzer 450 and the photo detector 460. In addition, the concentration calculator included in the measurement unit may calculate the concentration of the fine particles in consideration of the measured thickness, the flow of sucked air, or the time when the fine dust is adsorbed.

5 is a view showing another example of a thickness measurement unit for optically measuring the thickness of the fine particles adsorbed in the microparticle measurement system according to an embodiment of the present invention. FIG. 5 is a view illustrating a thickness measuring unit measuring a thickness of the adsorbed microparticles under the substrate 330 of the microparticle capture sensor.

The thickness measurer may include a matching part 510 and a prism 540.

The matching unit 510 may be formed under the substrate 330 to optically connect the prism 540 and the fine particle capture sensor. Here, the matching unit 510 may be formed of a matching oil.

Like the thickness measurer described with reference to FIG. 4, the light 520 output from the light source passes through the prism 540 and reaches the lower portion of the substrate 330. Reached light is reflected or refracted by the substrate 330, the sensor electrode 310, or the adsorbed microparticle layer 340. The reflected light 530 passes through the prism 540 and is output to the outside to reach the analyzer and the photo detector.

That is, the thickness measuring unit may measure the thickness of the fine particle layer 340 adsorbed on the sensor electrode 310 using the optical characteristics of the light reaching the analyzer and the photo detector. In addition, the concentration calculator included in the measurement unit may calculate the concentration of the fine particles in consideration of the measured thickness, the flow of sucked air, or the time when the fine dust is adsorbed.

Based on the above configuration, the microparticle measuring system according to the present invention can measure the thickness of the adsorbed microparticles, and can measure the concentration of the microparticles in the air based on the measured thickness.

6A and 6B are views illustrating an example of measuring the mass of adsorbed microparticles in the microparticle measuring system according to an exemplary embodiment of the present invention. Figure 6a is a view of the microparticle capture sensor that can measure the mass from the top, Figure 6b is a view showing a cross-section of the microparticle capture sensor that can measure the mass.

First, referring to FIGS. 6A and 6B, when the mass measurement unit included in the measurement unit drives the sensor with an electric resonance circuit similar to the mechanical resonance frequency of the microparticle capture sensor capable of measuring the mass, the mass sensor may be unique. Self-resonance at the mechanical resonant frequency. At this time, if the total mass of the fine particle capture sensor is changed due to the adsorption of external material, the resonance frequency of the mass sensor is changed (lower), and the self-resonant frequency of the driving circuit is also changed accordingly. Specifically, when the fine particles are adsorbed on the sensor electrode 621 on the substrate 611 to change the mass of the mass detection sensor, the resonance frequency of the fine particle capture sensor is changed according to the adsorbed mass of the fine particles. The mass measuring unit may measure the mass of the adsorbed microparticles based on the changed resonance frequency. The microparticle capture sensor may include sensor electrodes 621 and 622 on both the top and bottom surfaces of the substrate 611. In addition, the sensor electrodes 621 and 622 may include a micro-nano pattern on the surface in order to improve the adsorption efficiency and detection performance of the fine particles and to select the fine particles to be adsorbed. In addition, depending on the size of the microparticles or the principle of chemical covalent bonding, the surface of the sensor electrodes 621 and 622 may further include physical and chemical functional groups. More specifically, the surface of the sensor electrodes 621 and 622 may be modified with a specific material to respond to specific gas particles, and the surface of the sensor may be modified to a nano structure, thereby selectively detecting the mass of trace gas particles in the air. It is also possible.

6C is a diagram illustrating a circuit for measuring a frequency change of the microparticle capture sensor. Referring to FIG. 6C, the circuit may include first and second sensors 641 and 642, a frequency comparator 650, a frequency voltage converter 660, and an ADC / MCU / communication unit 670.

The first sensor 641 and the second sensor 642 may be the fine particle capture sensor described above, and either one of the two sensors (eg, the first sensor 641) becomes the reference sensor. The other sensor (eg, the second sensor 642) may be a sensor that actually adsorbs the fine particles. Here, the reference sensor 641 may not be exposed to the external environment so that adsorption of the fine particles does not occur. Specifically, the first sensor 641 and the second sensor 642 may be a quartz crystal mass sensor (QCM) having a resonance frequency of MHz or more for high sensitivity mass measurement.

The frequency comparator 650 is connected to the first sensor 641 and the second sensor 642 to generate a difference between the resonant frequencies of the first sensor 641 and the second sensor 642, and to determine the generated resonant frequency. The difference value may be passed to the frequency voltage converter 660. Here, the difference value of the resonance frequency may be a value in the range of several Hz to several tens of kHz.

In addition, the third sensor, the fourth sensor,. And the n-th sensor, etc. may be selectively processed with various various chemical functionalities, and implemented as a plurality of sensor arrays to enable selective microparticle capture. In this case, the frequency separation with the first sensor as a reference is detected for each of the plurality of sensors, and the difference in the degree is recognized as a pattern recognition form, thereby enabling quantitative and qualitative analysis of the fine particles in the air.

The frequency voltage converter 660 may convert the difference value of the resonance frequency received from the frequency comparator 650 into a voltage and transmit the converted voltage to the ADC, MCU, and the communication unit 670.

The ADC / MCU / communication unit 670 may convert the voltage V received from the frequency voltage converter 660 into a digital signal. In addition, the ADC / MCU / communication unit 670 may transfer the converted digital signal to another device (for example, a mobile device or a server) using a wired / wireless communication channel. Through this, the concentration change of the microparticles that change with time at the site where the microparticles are generated may be measured remotely at a place spaced from the site.

Meanwhile, the concentration calculator included in the measurement unit may calculate the concentration of the fine particles in consideration of the measured mass, the flow of sucked air, or the time at which the fine dust is adsorbed. In addition, the concentration calculator may be connected to an external server database through the ADC, memory and communication unit 670 or the communication unit of FIG. 6C in the MCU. In this case, the concentration calculator compares the measurement result of the mass measurement unit with data stored in the MCU or the server. It can be calculated to calculate the concentration of the fine particles.

The specific experimental example of the measurement unit is as follows. The change value (degree of separation from the initial value) of the output voltage of the frequency voltage converter 660 according to the adsorption of fine dust may be 200 mV, and the corresponding value may correspond to the adsorption amount of 160 ng of the fine dust. That is, for example, it may correspond to 5.5 mV voltage change = 1 Hz resonance frequency change = 2ng mass change. The method for calculating the concentration of the microparticles is obtained by calculating an expression representing the amount of adsorption of the microparticles adsorbed on the microparticle capture sensor per hour, the resulting change in voltage output, and the correlation between the microparticles in the air, The change in the output voltage of 660 may be calculated by converting it into an unknown fine dust concentration.

7A and 7B are views illustrating an example of qualitatively analyzing the adsorbed microparticles in the microparticle measuring system according to an exemplary embodiment of the present invention. FIG. 7A is a diagram illustrating microparticles adsorbed to the microparticle capture sensor through an electron microscope, and FIG. 6B is a diagram illustrating microparticles adsorbed to the microparticle capture sensor through an optical microscope.

As described above, the analyzer 290 may include an electron microscope or an optical microscope capable of qualitatively analyzing the microparticles adsorbed on the microparticle capture sensor. Through this, it is possible to analyze the components of the fine particles contained in the air.

As illustrated in FIGS. 7A and 7B, when the microparticles adsorbed through the electron microscope or the optical microscope are observed, the microparticles 710 to 760 may be visually identified. Through this, the microparticle measuring system according to the present invention can analyze not only the concentration of the microparticles contained in the air, but also what the microparticles are, and the microparticles are exposed to harmful substances (for example, heavy metals) or harmful viruses. You can accurately analyze whether this is the case.

As a result, the microparticle measuring system according to the present invention is capable of capturing and concentration measurement of microparticles without using centrifugal force and a microfilter. In addition, since the use of electrical attraction regardless of the size of the microparticles, it is possible to accurately capture the ultra-fine particles that are not collected by the fine filter, it is possible to accurately measure the concentration of the fine particles contained in the air.

Accordingly, the above detailed description should not be construed as limiting in all aspects and should be considered as illustrative. The scope of the invention should be determined by reasonable interpretation of the appended claims, and all changes within the equivalent scope of the invention are included in the scope of the invention.

Claims (19)

Microparticle capture unit for trapping the microparticles through the electrical attraction;
A charging unit configured to electrify the microparticles contained in air; And
It includes a measuring unit for measuring the concentration of the fine particles contained in the air based on the captured fine particles,
The measuring unit,
A mass measuring unit measuring a mass of the fine particles adsorbed on the sensor electrode; And
It includes a concentration calculation unit for calculating the concentration of the suspended microparticles contained in the air, based on the measured amount of mass change per hour and the standard relationship entered previously,
The mass measuring unit measures a mass change per hour of the adsorbed microparticles by using a resonance frequency change of a crystal oscillator mass sensor (QCM) that changes according to the amount of the adsorbed microparticles,
The microparticle trap,
And a fine particle capture sensor to which the charged fine particles are adsorbed,
The fine particle capture sensor includes: a sensor electrode forming an electric field for generating an electrostatic force for capturing the charged fine particles; And a counter electrode serving as a reference for voltage in relation to the sensor electrode, wherein the sensor electrode includes a micro-nano pattern on a surface thereof.
The fine particle capture sensor, the first sensor that is not exposed to the external environment; And a plurality of sensors for adsorbing the fine particles,
Each of the plurality of sensors includes a respective chemical functional group capable of capturing selective fine particles, and detects the frequency separation of the first sensor and the plurality of sensors for each of the plurality of sensors and recognizes the difference as a pattern recognition form. Microparticle measurement system, characterized in that for analyzing the microparticles.
delete The method of claim 1,
The charging unit,
A microparticle measuring system comprising an ion generating module generating anion or cation to charge the microparticles with a negative charge or a positive charge.
delete delete The method of claim 1,
The sensor electrode,
Microparticle measurement system formed of a metal thin film.
The method of claim 1,
The measuring unit,
A thickness measuring unit measuring a thickness of the fine particles adsorbed on the sensor electrode; And
And a concentration calculator configured to calculate a concentration of suspended fine particles contained in the air based on the measured change in thickness per hour.
The method of claim 1,
The measuring unit,
The microparticle capture sensor is assigned a serial number, and stores at least one of the concentration measured according to the serial number, the temperature at the time of measurement, the humidity at the time of measurement, the measurement time of the measured concentration, and the measurement date of the measured concentration. Microparticle measurement system.
The method of claim 8,
The microparticle measuring system further comprises a communication unit for transmitting the serial number and the data stored according to the serial number to an external device.
The method of claim 1,
Microparticle measurement system further comprises an analysis unit for determining the presence of harmful substances or harmful viruses by analyzing the components of the fine particles adsorbed on the sensor electrode.
The method of claim 1,
A suction pipe that sucks the air and provides it to the charging unit; And
And an air controller for controlling the flow of air or the amount of air sucked into the suction pipe. delete delete delete delete delete delete delete delete
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