KR102002366B1 - Gate valve - Google Patents

Abstract

The present invention can easily arrange and install the block cylinders by fastening a plurality of block cylinders, which push-pull the shielding plate in forward and backward directions, to a fixed plate having a grid structure, And a valve housing having an inner space and having openings formed in front and rear surfaces, respectively; A plurality of block cylinders disposed in the valve housing and arranged to perform a push-pull operation with respect to a shielding plate having a shape corresponding to the shape of the opening, the shielding blocks being connected to the shielding plates on the front and rear surfaces; And a first and a second valve body fixed to the piston head at the center of the valve housing and respectively coupled to the front and rear surfaces of the block cylinder arrangement to support the individual block cylinders in the valve housing and to fix the block cylinder in correspondence with the shape of the opening. A second fixing plate; And a control unit.

Description

Gate Valve {GATE VALVE}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gate valve, and more particularly, to a gate valve, which comprises a plurality of block cylinders for push-pulling a shielding plate in forward and backward directions, To a gate valve which is easy to arrange and install the block cylinders and which is simple in combination and disassembly, and which is advantageous for maintenance.

In general, the manufacturing process of semiconductors, LCDs, OLEDs, and SOLARs is performed by repeating processes such as development, etching, diffusion, chemical vapor deposition, and metal deposition.

Each of these processes is set as a specific condition necessary for manufacturing a semiconductor or a display glass or the like so as to be suitable for a design state, and a plurality of processes proceeds in a vacuum state.

In addition to the process chamber in which the process is carried out in this vacuum, there are also other chambers provided adjacent to this process chamber.

For example, a process chamber PM for performing a manufacturing process on a wafer and a glass in an atmosphere of vacuum with a minimum of contaminants such as particles by providing an enclosed space from the outside, And a transfer chamber TM having a robot arm for transferring the wafer and the glass to the plurality of process chambers PM.

A gate for passing the wafer and the glass is formed between each of the chambers, and a gate valve is provided at the gate to open and close the gate.

For example, the gate valve is located between the transfer chamber and the process chamber, and performs a complete isolation function to advance the process chamber after the setting operation of the transfer robot.

Such a gate valve mainly operates by pneumatic operation and includes a shield plate for opening / closing operation, a push-pull operation of the shield plate, and a cylinder for performing an up-down operation.

In addition, the gate valve is normally operated while the pressure between the chamber and the chamber is adjusted during the process.

In recent years, as shown in FIG. 1, a T-motion gate valve having two separate shielding plates and moving up and down by a cylinder or a lifting device and advancing shielding on both sides is spotlighted in the field. Shielding plates 2 and 3 are provided on both sides of the block cylinder 1 as shown in FIG. 1 (a), and the gates G1 and G2 are opened when the block cylinder 1 is in a downward state. 1B, when the block cylinder 1 rises and reaches the positions of the gates G1 and G2, the gates G1 and G2 are closed and the corresponding gate G1 , G2) are in an unlocked state. When the shielding plates 2 and 3 on both sides are pushed with the block cylinder 1 raised as shown in FIG. 1 (c), the corresponding gates G1 and G2 are locked in a closed state, ) State.

This gate valve is called a T-motion gate valve because the shielding action is T-shaped as a whole.

As shown in Fig. 2, a typical prior art of such a T-motion gate valve includes a first support 19 arranged in the upper and lower positions and a drive element 22 including the block cylinder in the second support 20, , And a technique for simultaneously arranging and supporting the block cylinders has been developed and utilized in the field.

However, in such a conventional technique, since the drive elements 22 including the block cylinders are all coupled to the first support 19 and the second support 20, it is possible to simplify installation at the time of initial installation, All the coupling between the block cylinder and the first support 19 and the second support 20 must be disassembled when maintenance or repair of the block cylinder is to be performed, The maintenance process is complicated and time-consuming.

Furthermore, since the hydraulic and air lines for driving the block cylinder are built in the first support 19 and the second support 20 of the related art, the process of separating and dismounting the block cylinder becomes more complicated and difficult, It is becoming a cause.

SUMMARY OF THE INVENTION The present invention has been made in order to solve the above problems, and it is an object of the present invention to solve the above problems by providing a plurality of block cylinders for push- The present invention provides a gate valve which is easy to arrange and install block cylinders, and which is simple to assemble and disassemble.

It is another object of the present invention to provide a gate valve which can reduce the weight by forming the fixed plate into a plate with a lattice structure, thereby improving the stability and extending the service life of the lifting structure.

According to the present invention, there is provided a valve device comprising: a valve housing having an inner space and having openings formed on front and rear surfaces thereof; A plurality of block cylinders disposed in the valve housing and arranged to perform a push-pull operation with respect to a shielding plate having a shape corresponding to the shape of the opening, the shielding blocks being connected to the shielding plates on the front and rear surfaces; And a first and a second valve body fixed to the piston head at the center of the valve housing and respectively coupled to the front and rear surfaces of the block cylinder arrangement to support the individual block cylinders in the valve housing and to fix the block cylinder in correspondence with the shape of the opening. A second fixing plate; And a gate valve.

Preferably, the first and second fixing plates include support plates coupled to a front surface or a rear surface of the block cylinder to support the block cylinder; And the coupling plate is provided at a central position of the support plates, and the upper and lower end portions of the support plates and the coupling plate are connected to the upper horizontal bar and the lower portion of the coupling plate, And is connected via a horizontal bar.

Preferably, a hole is formed in the support plate, and the shield block of the block cylinder advances and retreats through the hole.

Advantageously, the first and second anchoring plates are characterized in that the engagement sites of the piston head and the engagement plate associated with the piston head bear the entire structure.

Preferably, the first and second fixing plates are further provided with upright vertical ribs connecting upper and lower horizontal bars.

Preferably, the upper and lower horizontal bars of the first and second fixing plates further include a bending extension bar that is bent and extended, and the bending extension bar is mounted on the upper and lower surfaces of the piston head.

Preferably, the fluid line further comprises a fluid line through which a fluid can be delivered for push-pull operation of the block cylinder, wherein the fluid line branches from upper and lower sides of the piston head, And to extend to deliver.

Advantageously, a fluid connection block is provided at the top and bottom of the piston head and at the top and bottom of the block cylinder for connection to a fluid line, And the block is interposed in a state interposed therebetween.

Preferably, the valve rod associated with the piston head is raised and lowered to thereby up-down the first and second fixed plates in the valve housing and the block cylinder coupled thereto, and for push-pull operation on the piston head through the valve rod A lift part for supplying fluid; And further comprising:

Preferably, the lifting and lowering unit is provided with a lifting cylinder on both left and right sides with respect to the valve rod. The lifting cylinder receives the fluid and pushes or pulls the piston rod in the downward direction, and the piston rod of the lifting and lowering cylinder And the valve rod is connected to the upper surface at the center of the upper surface of the lifting support in an upright state.

Preferably, the elevating unit collects and compares the up-down operation completion signals in the solenoid valves for managing the lifting and lowering fluid movement of the lifting cylinder on both the left and right sides, calculates the time difference value, and, when the time difference value deviates from the set range, It is determined that unbalance has occurred in the operation, and the operation signal timing of the solenoid valve with respect to the lifting cylinder on both the left and right sides when the unbalance occurs is corrected.

Preferably, the elevating unit reads the push-pull operating fluid pressure from a solenoid valve that manages the push-pull operating fluid motion of the block cylinder, and displays the push-pull operating fluid pressure on the outside.

According to the present invention, a plurality of block cylinders for push-pulling the shielding plate in forward and backward directions are fixedly coupled to a fixed plate of a grid structure provided in each of the front and rear directions, so that the arrangement and installation of the block cylinders is easy, It is simple and has a beneficial effect on maintenance.

In addition, since the fixed plate is formed of a grid-shaped plate and the weight is reduced, the lifting structure is not inflicted on the lifting structure, thereby improving the stability and extending the service life of the equipment.

Also, the balance of the lift-up operation can be automatically calibrated by checking the driving pressure of the elevating portion, and the operation of the block cylinder can be checked to improve the accuracy of the closing operation.

1 is a view for explaining the operation of a T-motion gate valve to which the present invention is applied.
Figure 2 shows a prior art T-motion gate valve.
3 is a view showing a gate valve according to an embodiment of the present invention.
4 is a view for explaining a block cylinder and a fixing plate in a gate valve according to an embodiment of the present invention.
5 is a perspective view showing a fixing plate in a gate valve according to an embodiment of the present invention.
6 is a view for explaining the up-down operation of the gate valve according to the embodiment of the present invention.
7 is a view for explaining a structure of a lifting portion in a gate valve according to an embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. First, it should be noted that the same components or parts among the drawings denote the same reference numerals whenever possible. In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted so as not to obscure the subject matter of the present invention.

3 is a view showing a gate valve according to an embodiment of the present invention.

3 (a) is a front view showing a state in which a lower elevating portion 60 is opened in a gate valve according to an embodiment of the present invention, (b) is a front elevational view showing a valve housing 10 And Fig.

Referring to FIG. 3, the gate valve according to the embodiment of the present invention includes a valve housing 10 having an inner space and having openings 11 at front and rear surfaces, respectively, and a valve housing 10 disposed in the valve housing 10, A plurality of block cylinders 20 arranged to perform a push-pull operation with respect to the shielding plate 22 corresponding to the shape of the shielding plate 11 and having a shielding block 21 connected to the shielding plate 22 on the front and rear sides, Is fixed to a piston head (30) at the center of the valve housing (10) and is respectively engaged with the front and rear faces of the arrangement of the block cylinders (20) to support the individual block cylinders (20) in the valve housing First and second fixing plates 50a and 50b for fixing the first and second fixed plates 20 and 20 to the block 11 in correspondence with the shape of the opening 11, A fluid line (40) communicating with said piston Up and down the valve rod 61 coupled with the valve seat 30 to up and down the first and second fixing plates 50a and 50b and the block cylinder 20 coupled thereto in the valve housing 10, And a lift portion 60 for supplying a fluid for push-pull operation to the piston head 30 through the oil passage 61.

The valve housing 10 has an inner space, and openings 11 are formed on the front and rear surfaces, respectively. For example, the valve housing 10 has a rectangular parallelepiped shape elongated so as to have an inner space, and one side and the other side corresponding to each other on the front and rear sides are opened by the opening 11. The opening 11 may also have a rectangular shape elongated from the front and rear surfaces of the valve housing 10.

The block cylinder 20 is disposed in the valve housing 10 and moves the shielding block 21 provided on the front and rear sides in accordance with the transfer of the fluid in the forward and backward directions. The block cylinder 20 is connected to the shielding block 21, And performs a push-pull operation of the shielding plate 22 formed so as to correspond to the opening 11 of the surface. At this time, the block cylinder 20 is operated to perform an L-motion operation to open or close only the opening 11 on the front or rear surface of the valve housing 10, or to open or close the opening 11 on the front and rear surfaces of the valve housing 10 It is possible to perform a T-motion operation so as to open and close both. In the present embodiment, the block cylinder 20 is arranged in a row in the valve housing 10, with a shielding block 21 connected to the shielding plate 22 on the front and rear sides, respectively, so as to perform T-motion operation . That is, the blocking block 21 provided on the front surface of the block cylinder 20 can perform the push-pull operation with respect to the connected shielding plate 22 to open / close the opening 11 formed in the front surface of the valve housing 10, The blocking block 21 provided on the rear surface of the block cylinder 20 performs a push-pull operation with respect to the connected shielding plate 22 to open or close the opening 11 formed on the rear surface of the valve housing 10 . Wherein the fluid is a concept that includes both a gas such as air and a liquid such as oil.

The valve housing 10 is connected to the lift portion 60 through the valve rod 61. The valve rod 61 is lifted up and down by the lifting unit 60 so as to up-down the first and second fixing plates 50a and 50b in the valve housing 10. More precisely, the valve rod 61 is connected to the piston head 30 coupled to the center in the valve housing 10 to move the piston head 30 upward and downward, and consequently the first and second fastening plates 50a, 50b.

The first and second fixing plates 50a and 50b are coupled to the front and rear surfaces of the block cylinder 20 in the valve housing 10 so that a plurality of block cylinders 20 are inserted into the valve housing 10 As shown in FIG.

The first and second fixing plates 50a and 50b will be described in detail with reference to FIGS. 4 and 5. FIG.

FIG. 4 is a view for explaining a block cylinder and a fixing plate in the gate valve according to the embodiment of the present invention, and FIG. 5 is a perspective view showing the fixing plate in the gate valve according to the embodiment of the present invention. 4 (a) is a view showing a state in which the first and second fixing plates 50a and 50b are respectively coupled to the front and rear surfaces of the block cylinder array 20, (b) FIG. 8 is a perspective view showing a state in which the fixing plate 50a is removed. FIG.

5, the fixing plate 50 includes support plates 53 coupled to the front or rear surface of the block cylinder 20 to support the block cylinder 20, The coupling plate 54 is provided at a central position of the support plates 53 and is supported by the support plates 53 and the upper surface of the coupling plate 54 And the lower end portion are connected through the upper horizontal bar 51a and the lower horizontal bar 51b. Although the support plate 53, the coupling plate 54 and the upper and lower horizontal bars 51a and 51b may be separately manufactured and joined together, it is preferable that the fixing plate 50 is a single plate.

5 shows an example in which one coupling plate 54 is positioned at the center and two support plates 53 are disposed apart from the left and right sides, respectively.

Therefore, an empty space is naturally formed between the coupling plate 54 and the support plate 53. This hollow space serves to reduce the weight of the fixing plate 50 supporting the block cylinder 20, It will be able to improve stability and extend equipment life by not giving a lot of power.

A hole 53a is formed in the support plate 54 and the shield block 21 of the block cylinder 20 moves forward and backward through the hole 53a.

The coupling plate 54 is engaged with the front surface or the rear surface of the piston head 30 through a screw connection or the like. The support plate 53 is engaged with the front or rear surface of the block cylinder 20 by screwing or the like.

Therefore, the fixing plate 50 has a structure in which the engagement portion with the engagement plate 54 coupled with the piston head 30 supports both the engagement portions with the left and right elongated support plates 53. Such a structure will act as a larger weight load as the number of the block cylinders 20 engaging with the fixed plate 50 increases.

In order to support the weight of the block cylinder 20 weighted at the right and left sides of the fixed plate 50, first, the vertical ribs 51a and 51b, which connect the upper and lower horizontal bars 51a and 51b of the fixed plate 50, (52).

The upper and lower horizontal bars 51a and 51b between the support plate 53 and the support plate 53 improve the structural rigidity of the fixing plate 50 and the upper and lower horizontal bars 51a, Thereby preventing the horizontal bars 51a and 51b from being deformed. In addition, since the vertical ribs 52 are formed in the form of a thin plate, they will not interfere with the internal arrangement of the stationary plate 50 or place a heavy burden on the entire weight.

In the present invention, the upper and lower horizontal bars 51a and 51b are bent to support the weight of the block cylinder 20 weighted at the right and left sides of the fixed plate 50, And a bending extension bar 51c is formed.

The bending extension bar 51c is mounted on the upper and lower surfaces of the piston head 30. That is, the fixing plate 50 is coupled to the front surface or the rear surface of the piston head 30 through the engagement plate 54 and is also attached to the upper and lower surfaces of the piston head 30 via the bending extension bar 51c .

Therefore, the fixing plate 50 supports both the joint portions of the fixing plate 50 and the coupling plate 54 coupled to the piston head 30 with the left and right elongated support plates 53, Side coupling with the bending extension bar 51c and the upper and lower mounting portions with the bending extension bar 51c, so that the binding portion for enduring the weight load is dispersed to the side binding portion and the upper and lower mounting portions. In addition, since the bending extension bar 51c is formed in the form of a thin plate, it will not interfere with the internal arrangement of the fixing plate 50 or place a large weight on the entire weight.

Reference numeral 55 denotes a spacing bar 55 connecting the first and second fixing plates 50a and 50b coupled to the front and rear surfaces of the block cylinder 20 and includes first and second fixing plates 50a and 50b And supports the fluid line 40. The fluid line 40 is a fluidized bed.

Referring again to FIG. 4, a fluid line 40 is connected to the block cylinder 20 so that fluid can be transferred for push-pull operation of the block cylinder 20. The fluid line 40 extends from the upper and lower sides of the piston head 30 and extends so as to be able to deliver fluid to both the left and right block cylinders 20.

The piston head 30 is engaged with the valve rod 61 to move up and down according to the upward and downward movements of the corresponding valve rod 61 to support the fixed plates 50a and 50b. And also to transmit the fluid delivered from the valve rod 61 to the respective block cylinders 20 through the fluid lines 40 connected to the upper and lower portions.

This fluid line 40 is connected to the piston head 30 via a fluid connection block 41 which is coupled to the top and bottom of the piston head 30 and is also connected to the top and bottom of each block cylinder 20, And is connected to the block cylinder 20 through the connection block 41 to connect the fluid line between the piston head 30 and the block cylinder 20. Here, the fluid connection block 41 is a configuration for connection and airtightness of the fluid line 40.

At this time, the bending extension bar 51c is connected to the upper and lower surfaces of the piston head 30 and the fluid connection block 41, which is not directly coupled to the piston head 30 but is coupled to the upper and lower surfaces of the piston head 30, . ≪ / RTI > That is, the bending extension bar 51c is mounted on the upper and lower surfaces of the piston head 30 with the fluid connection block 41 interposed therebetween. The mounting structure of the bending extension bar 51c is the same in the block cylinder 20 as well as in the piston head 30. [

6 is a view for explaining the up-down operation of the gate valve according to the embodiment of the present invention.

6 (a) shows a state in which the block cylinder 20 is lifted in accordance with the driving of the elevating portion 60, so that the shielding plate 22 connected to the block cylinder 20 rises and the opening of the valve housing 10 11 are closed. 6B shows a state in which the block cylinder 20 is lowered in accordance with the driving of the elevating part 60 so that the shielding plate 22 connected to the block cylinder 20 is lowered, (11) is fully opened.

The detailed structure of the elevating portion 60 is shown in Fig.

7 is a view for explaining a structure of a lifting portion in a gate valve according to an embodiment of the present invention.

7, the elevating unit 60 has a structure in which the elevating cylinder 62 is installed on the right and left sides of the valve rod 61. The piston rod 62a of the two side lifting cylinder 62 is coupled to the upper surface of the lifting support 64. The piston rod 62a of the side lifting cylinder 62 have.

The valve rod 61 is connected to the center of the upper surface of the lifting support 64 in an upright state.

The valve rod 61 coupled to the lifting support 64 is moved downward and the block cylinder 20 and the shielding plate 22 connected to the lifting support 64 move downward Is lowered. The valve rod 61 coupled to the lifting support 64 is moved upward and the block cylinder 20 and the shielding plate 22 connected to the lifting support 64 move upward, ).

In order to guide the upward and downward movement of the valve rod 61, a cross rod 66 is coupled to the valve rod 61. A guide rod 67 is inserted into a hole (not shown) formed in the cross rod 66, So that the linear movement of the valve rod 61 is guided. Here, reference numeral 65 denotes a vertical bar for supporting the cross bar 66.

In the structure of the elevating portion 60 described above, two elevating cylinders 62 are provided on both the left and right sides. However, unbalance phenomenon often occurs in the operation of the left and right elevating cylinders 62 due to changes in the operating environment and the air pressure . In the present invention, the up-down operation completion signal is collected in the solenoid valve for managing the fluid movement of the lifting cylinder of each lifting cylinder 62, and the signal is compared with the lifting cylinder for both sides to calculate the time difference value. When the time difference is out of the setting range, it is judged that unbalance occurs in the operation of the left and right lifting cylinder (62) and the operation signal timing of the solenoid valve of the lifting cylinder which outputs the slow up- 62 can be automatically adjusted. This unbalanced calibration can extend the life of the equipment and reduce maintenance costs.

In the structure of the elevating part 60, the fluid is transmitted to each block cylinder 20 through the internal fluid channel of the valve rod 61, and the lock-unlock operation of the gate is performed by the operation of the block cylinder 20 Conventionally, a microphotosensor or a photoelectric sensor has been used to confirm whether the lock-unlock operation is performed correctly. However, such a separate structure requires a separate structure for internal installation, which necessitates improvement such as complicating the configuration of the valve housing and causing a problem in sealing. In the present invention, the solenoid valve for managing the push-pull operation fluid motion of each block cylinder 20 reads the push-pull operating fluid pressure and displays it on the outside, thereby allowing the operator to perform the lock- . This visual confirmation of the lock-and-unlock operation can greatly improve the stable operation of the equipment and the safety and convenience of the operator. In addition to confirming the correct pressure value, the time to reach the push-pull operating fluid pressure value is compared with the set time value, and if the operation is not completed at the set time, So that the accident can be prevented.

As described above, an optimal embodiment has been disclosed in the drawings and specification. Although specific terms have been employed herein, they are used for purposes of illustration only and are not intended to limit the scope of the invention as defined in the claims or the claims. Therefore, those skilled in the art will appreciate that various modifications and equivalent embodiments are possible without departing from the scope of the present invention. Accordingly, the true scope of the present invention should be determined by the technical idea of the appended claims.

10: valve housing 11: opening
20: block cylinder 21: shielding block
22: shield plate 30: piston head
40: fluid line 41: fluid connection block
50: Fixing plate 51: Horizontal bar
52: vertical ribs 53:
54: coupling plate 55: spacing bar
60: lift portion 61: valve rod
62: lift cylinder 64: lift support

Claims (12)

A valve housing having an inner space and having openings formed in front and rear surfaces, respectively;
A plurality of block cylinders disposed in the valve housing and arranged to perform a push-pull operation with respect to a shielding plate having a shape corresponding to the shape of the opening, the shielding blocks being connected to the shielding plates on the front and rear surfaces; And
A center portion fixed to a piston head at the center of the valve housing and being respectively engaged with front and rear surfaces of the block cylinder arrangement to support the individual block cylinders in the valve housing and to fix the block cylinders in a row corresponding to the shape of the opening; 2 fixing plate; / RTI >
The first and second fixing plates may be formed of a plate-
Support plates coupled to a front or rear surface of the block cylinder to support the block cylinder;
And an engaging plate capable of engaging with a front surface or a rear surface of the piston head,
Wherein the coupling plate is provided at a central position of the support plates, and the upper and lower end portions of the support plates and the coupling plate are connected through the upper horizontal bar and the lower horizontal bar.
delete The method according to claim 1,
Wherein a hole is formed in the support plate, and the shield block of the block cylinder advances and retreats through the hole.
The method according to claim 1,
Wherein the first and second fastening plates have an engagement structure with the engaging plate engaged with the piston head to bear the entire structure.
5. The method of claim 4,
Wherein the first and second fixing plates are further provided with vertical ribs in a standing shape connecting upper and lower horizontal bars.
The method according to claim 4 or 5,
The upper and lower horizontal bars of the first and second fixing plates may further include a bending extension bar bent and extended,
Wherein the bending extension bar is mounted on the upper and lower surfaces of the piston head.
The method according to claim 6,
Further comprising a fluid line through which fluid can be delivered for push-pull operation of the block cylinder,
Wherein the fluid line extends to deliver fluid to the block cylinders branched from the upper and lower sides of the piston head and arranged laterally.
8. The method of claim 7,
A fluid connection block for coupling with a fluid line is coupled to upper and lower portions of the piston head and to upper and lower portions of the block cylinder,
Wherein the bending extension bar is mounted on the upper surface and the lower surface of the piston head with the fluid connection block interposed therebetween.
The method according to claim 1,
Up and down the valve rod coupled with the piston head to up-down the first and second fixed plates in the valve housing and the block cylinder coupled thereto, and to supply the fluid for the push-pull operation to the piston head through the valve rod A lift portion; Further comprising a gate valve.
10. The method of claim 9,
The lifting and lowering unit includes a lifting cylinder on both sides of the valve rod,
The piston rod of the lifting and lowering cylinder is coupled to the upper surface of the lifting support, and the valve rod is connected to the center of the upper surface of the lifting support in an upright state Wherein the gate valve comprises:
11. The method of claim 10,
The elevating unit collects and compares the up-down operation completion signals in the solenoid valves for managing the lifting and lowering fluid movement of the lifting cylinder on both the left and right sides and calculates a time difference value. When the time difference value deviates from the set range, And corrects the operation signal timing of the solenoid valve with respect to the lifting cylinder on both the left and right sides when unbalance occurs.
11. The method of claim 10,
Wherein the elevating portion reads the push-pull operating fluid pressure from a solenoid valve that manages the push-pull operating fluid motion of the block cylinder, and displays the push-pull operating fluid pressure on the outside.

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