KR101938928B1 - 질량 유량 제어기 또는 질량 유량 측정기의 실시간 측정과 제로 옵셋 및 제로 드리프트의 보정을 위한 감쇠율 측정을 사용하는 시스템과 방법 - Google Patents

질량 유량 제어기 또는 질량 유량 측정기의 실시간 측정과 제로 옵셋 및 제로 드리프트의 보정을 위한 감쇠율 측정을 사용하는 시스템과 방법 Download PDF

Info

Publication number
KR101938928B1
KR101938928B1 KR1020147027880A KR20147027880A KR101938928B1 KR 101938928 B1 KR101938928 B1 KR 101938928B1 KR 1020147027880 A KR1020147027880 A KR 1020147027880A KR 20147027880 A KR20147027880 A KR 20147027880A KR 101938928 B1 KR101938928 B1 KR 101938928B1
Authority
KR
South Korea
Prior art keywords
mass flow
valve
flow controller
sensor
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020147027880A
Other languages
English (en)
Korean (ko)
Other versions
KR20140136022A (ko
Inventor
버윈 바나레스
빌 발렌타인
존 룰
앤서니 케호
크리스 엘르크
Original Assignee
일리노이즈 툴 워크스 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 일리노이즈 툴 워크스 인코포레이티드 filed Critical 일리노이즈 툴 워크스 인코포레이티드
Publication of KR20140136022A publication Critical patent/KR20140136022A/ko
Application granted granted Critical
Publication of KR101938928B1 publication Critical patent/KR101938928B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/15—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters specially adapted for gas meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/86—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure
    • G01F1/88—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure with differential-pressure measurement to determine the volume flow

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Measuring Volume Flow (AREA)
KR1020147027880A 2012-03-07 2013-03-04 질량 유량 제어기 또는 질량 유량 측정기의 실시간 측정과 제로 옵셋 및 제로 드리프트의 보정을 위한 감쇠율 측정을 사용하는 시스템과 방법 Active KR101938928B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261607968P 2012-03-07 2012-03-07
US61/607,968 2012-03-07
PCT/US2013/028911 WO2013134148A1 (en) 2012-03-07 2013-03-04 System and method for using a rate of decay measurement for real time measurement and correction of zero offset and zero drift of a mass flow controller or mass flow meter

Publications (2)

Publication Number Publication Date
KR20140136022A KR20140136022A (ko) 2014-11-27
KR101938928B1 true KR101938928B1 (ko) 2019-01-15

Family

ID=49117226

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020147027880A Active KR101938928B1 (ko) 2012-03-07 2013-03-04 질량 유량 제어기 또는 질량 유량 측정기의 실시간 측정과 제로 옵셋 및 제로 드리프트의 보정을 위한 감쇠율 측정을 사용하는 시스템과 방법

Country Status (4)

Country Link
US (1) US9739655B2 (enExample)
JP (1) JP6224630B2 (enExample)
KR (1) KR101938928B1 (enExample)
WO (1) WO2013134148A1 (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9188989B1 (en) 2011-08-20 2015-11-17 Daniel T. Mudd Flow node to deliver process gas using a remote pressure measurement device
US9958302B2 (en) 2011-08-20 2018-05-01 Reno Technologies, Inc. Flow control system, method, and apparatus
US9910448B2 (en) * 2013-03-14 2018-03-06 Christopher Max Horwitz Pressure-based gas flow controller with dynamic self-calibration
CN106323425A (zh) * 2015-06-19 2017-01-11 沈阳兴大通仪器仪表有限公司 一种边测边调检定装置
US10126761B2 (en) 2015-12-29 2018-11-13 Hitachi Metals, Ltd. Gas insensitive mass flow control systems and methods
US10679880B2 (en) 2016-09-27 2020-06-09 Ichor Systems, Inc. Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same
US10838437B2 (en) 2018-02-22 2020-11-17 Ichor Systems, Inc. Apparatus for splitting flow of process gas and method of operating same
US11144075B2 (en) 2016-06-30 2021-10-12 Ichor Systems, Inc. Flow control system, method, and apparatus
US10303189B2 (en) 2016-06-30 2019-05-28 Reno Technologies, Inc. Flow control system, method, and apparatus
US10866131B2 (en) * 2016-09-19 2020-12-15 Flow Devices And Systems Inc. Systems and methods for reference volume for flow calibration
US10663337B2 (en) 2016-12-30 2020-05-26 Ichor Systems, Inc. Apparatus for controlling flow and method of calibrating same
KR102628015B1 (ko) * 2017-12-01 2024-01-23 삼성전자주식회사 질량 유량 제어기, 반도체 소자의 제조장치 및 그의 관리방법
US10866135B2 (en) * 2018-03-26 2020-12-15 Applied Materials, Inc. Methods, systems, and apparatus for mass flow verification based on rate of pressure decay
NL2021082B1 (en) * 2018-06-08 2019-12-11 Berkin Bv Pressure-insensitive thermal type flow meter
US11675374B2 (en) * 2018-10-26 2023-06-13 Illinois Tool Works Inc. Mass flow controller with advanced zero trending diagnostics
US12379238B2 (en) 2018-10-26 2025-08-05 Illinois Tool Works Inc. Mass flow controller with advanced back streaming diagnostics
US12259739B2 (en) 2019-04-30 2025-03-25 Illinois Tool Works Inc. Advanced pressure based mass flow controllers and diagnostics
KR102646603B1 (ko) * 2019-12-06 2024-03-12 가부시키가이샤 후지킨 유량 제어 장치의 이상 검지 방법 및 유량 감시 방법
CN112764436B (zh) * 2020-12-17 2023-09-05 北京七星华创流量计有限公司 质量流量控制器检测系统
WO2022186971A1 (en) 2021-03-03 2022-09-09 Ichor Systems, Inc. Fluid flow control system comprising a manifold assembly
US12393209B2 (en) * 2024-01-19 2025-08-19 Mks, Inc. Methods and apparatus for reporting inlet pressure in mass flow controllers

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050010680A1 (en) 2003-06-18 2005-01-13 Zick Donald A. Enhanced shared secret provisioning protocol
US20110011183A1 (en) 2008-01-18 2011-01-20 Pivotal Systems Corporation Method and apparatus for in situ testing of gas flow controllers
US7881886B1 (en) 2006-11-17 2011-02-01 Lam Research Corporation Methods for performing transient flow prediction and verification using discharge coefficients

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2176313A (en) 1985-06-07 1986-12-17 Fraser Sweatman Ind Inc Apparatus and method for controlling and monitoring mixing of two or more gases
US5062446A (en) * 1991-01-07 1991-11-05 Sematech, Inc. Intelligent mass flow controller
US5911238A (en) * 1996-10-04 1999-06-15 Emerson Electric Co. Thermal mass flowmeter and mass flow controller, flowmetering system and method
JP3932389B2 (ja) * 1998-01-19 2007-06-20 Ｓｍｃ株式会社 マスフローコントローラの自己診断方法
JP4332986B2 (ja) * 2000-04-24 2009-09-16 日立金属株式会社 質量流量制御装置
US6443174B2 (en) * 2000-07-08 2002-09-03 Daniel T. Mudd Fluid mass flow control valve and method of operation
US7364708B2 (en) * 2003-11-19 2008-04-29 Intercat Equipment, Inc. Multi-catalyst injection system
US20050120805A1 (en) * 2003-12-04 2005-06-09 John Lane Method and apparatus for substrate temperature control
JP4788920B2 (ja) * 2006-03-20 2011-10-05 日立金属株式会社 質量流量制御装置、その検定方法及び半導体製造装置
US8793082B2 (en) 2009-07-24 2014-07-29 Mks Instruments, Inc. Upstream volume mass flow verification systems and methods

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050010680A1 (en) 2003-06-18 2005-01-13 Zick Donald A. Enhanced shared secret provisioning protocol
US7881886B1 (en) 2006-11-17 2011-02-01 Lam Research Corporation Methods for performing transient flow prediction and verification using discharge coefficients
US20110011183A1 (en) 2008-01-18 2011-01-20 Pivotal Systems Corporation Method and apparatus for in situ testing of gas flow controllers

Also Published As

Publication number Publication date
WO2013134148A1 (en) 2013-09-12
JP2015514972A (ja) 2015-05-21
US9739655B2 (en) 2017-08-22
US20150121988A1 (en) 2015-05-07
JP6224630B2 (ja) 2017-11-01
KR20140136022A (ko) 2014-11-27

Similar Documents

Publication Publication Date Title
KR101938928B1 (ko) 질량 유량 제어기 또는 질량 유량 측정기의 실시간 측정과 제로 옵셋 및 제로 드리프트의 보정을 위한 감쇠율 측정을 사용하는 시스템과 방법
JP6426474B2 (ja) 自己確認型質量流量制御器および自己確認型質量流量計を提供するためのシステムおよび方法
JP4788920B2 (ja) 質量流量制御装置、その検定方法及び半導体製造装置
EP2805136B1 (en) System for monitoring flow through mass flow controllers in real time
EP2247819B1 (en) Method and apparatus for in situ testing of gas flow controllers
TWI470187B (zh) Flow measurement device for flow control device for gas supply device and flow measurement method
KR101323503B1 (ko) 유동 모니터링 및 제어 시스템과 그 방법
JP6093019B2 (ja) 質量流量制御システム
US7424895B2 (en) Method and system for flow measurement and validation of a mass flow controller
US20120132291A1 (en) Transient measurements of mass flow controllers
JP2008522319A (ja) 可変オリフィスを備えたプロセス流体流量装置
TW202522148A (zh) 用於質量流量控制器之自動自校準之方法及設備
US9410834B2 (en) System and method for providing a self validating mass flow controller or a mass flow meter utilizing a software protocol
JPH11337436A (ja) 配管系に組み込まれた圧力計のドリフト検知方法
KR20070031445A (ko) 유동 측정 그리고 질량 유동 제어기의 검증을 위한 방법 및시스템

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 7

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 8