KR101911196B1 - 화학적 증기 증착 코팅, 물품, 및 방법 - Google Patents

화학적 증기 증착 코팅, 물품, 및 방법 Download PDF

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Publication number
KR101911196B1
KR101911196B1 KR1020177023140A KR20177023140A KR101911196B1 KR 101911196 B1 KR101911196 B1 KR 101911196B1 KR 1020177023140 A KR1020177023140 A KR 1020177023140A KR 20177023140 A KR20177023140 A KR 20177023140A KR 101911196 B1 KR101911196 B1 KR 101911196B1
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vapor deposition
layer
article
substrate
dimethylsilane
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KR20170100041A (ko
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데이비드 에이. 스미스
제임스 비. 마트젤라
폴 에이치. 실비스
게리 에이. 바로네
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실코텍 코포레이션
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C23C16/325—Silicon carbide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/60—Deposition of organic layers from vapour phase
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/56—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/10—Oxidising
    • H01L21/205—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/24—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using chemical vapour deposition [CVD]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2202/00—Metallic substrate
    • B05D2202/10—Metallic substrate based on Fe
    • B05D2202/15—Stainless steel
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
KR1020177023140A 2009-10-27 2010-10-26 화학적 증기 증착 코팅, 물품, 및 방법 Active KR101911196B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US25523709P 2009-10-27 2009-10-27
US61/255,237 2009-10-27
US26722809P 2009-12-07 2009-12-07
US61/267,228 2009-12-07
PCT/US2010/054058 WO2011056550A1 (en) 2009-10-27 2010-10-26 Chemical vapor deposition coating, article, and method

Related Parent Applications (1)

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KR1020127010812A Division KR101773213B1 (ko) 2009-10-27 2010-10-26 화학적 증기 증착 코팅, 물품, 및 방법

Related Child Applications (1)

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KR1020187029570A Division KR101932899B1 (ko) 2009-10-27 2010-10-26 화학적 증기 증착 코팅, 물품, 및 방법

Publications (2)

Publication Number Publication Date
KR20170100041A KR20170100041A (ko) 2017-09-01
KR101911196B1 true KR101911196B1 (ko) 2018-10-24

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KR1020177023140A Active KR101911196B1 (ko) 2009-10-27 2010-10-26 화학적 증기 증착 코팅, 물품, 및 방법
KR1020127010812A Active KR101773213B1 (ko) 2009-10-27 2010-10-26 화학적 증기 증착 코팅, 물품, 및 방법
KR1020187029570A Active KR101932899B1 (ko) 2009-10-27 2010-10-26 화학적 증기 증착 코팅, 물품, 및 방법

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KR1020187029570A Active KR101932899B1 (ko) 2009-10-27 2010-10-26 화학적 증기 증착 코팅, 물품, 및 방법

Country Status (7)

Country Link
US (2) US9777368B2 (https=)
EP (1) EP2494087B1 (https=)
JP (1) JP5735522B2 (https=)
KR (3) KR101911196B1 (https=)
CN (2) CN106319477A (https=)
ES (1) ES2859458T3 (https=)
WO (1) WO2011056550A1 (https=)

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Also Published As

Publication number Publication date
EP2494087B1 (en) 2020-12-30
ES2859458T3 (es) 2021-10-04
CN102741452A (zh) 2012-10-17
WO2011056550A1 (en) 2011-05-12
US9777368B2 (en) 2017-10-03
KR20170100041A (ko) 2017-09-01
US10731247B2 (en) 2020-08-04
US20190032201A1 (en) 2019-01-31
JP5735522B2 (ja) 2015-06-17
US20120251797A1 (en) 2012-10-04
KR20120120120A (ko) 2012-11-01
KR101773213B1 (ko) 2017-08-30
EP2494087A1 (en) 2012-09-05
KR20180115356A (ko) 2018-10-22
KR101932899B1 (ko) 2018-12-26
CN106319477A (zh) 2017-01-11
JP2013508563A (ja) 2013-03-07

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