KR101885352B1 - Quartz crucible coating device - Google Patents

Abstract

The present invention relates to a quartz crucible coating device. The present invention comprises: a body forming a coating space and a heating space having an open lower part, and including a partition for connecting or separating the heating space and the coating space; a trolley frame installed in the body to be able to be slid and elevated to go across the lower part of the coating space and the heating space, and including a through hole in the center and a quartz crucible placed at both ends; a heating module installed in the body to be able to be elevated to make a lamp in the upper part go across the through hole of the trolley frame, and heating the inside of the quartz crucible through the heat emission of the lamp; a rotary table installed in the lower part of the coating space to be rotatable, enabling the quartz crucible, which has been placed in the trolley frame, to be placed on the table through the through hole when the trolley frame is dropped, and including a nozzle penetration hole installed in the center; and a spray module installed in the body to be rotatable to make a nozzle in the upper part go across the nozzle penetration hole of the rotary table, and spraying coating chemicals into the quartz crucible rotated on the rotary table.

Description

{QUARTZ CRUCIBLE COATING DEVICE}

The present invention relates to a quartz crucible coating apparatus, and more particularly, to a quartz crucible coating apparatus which is separated into a heating space and a coating space, in which a crucible placed in a bogie frame is internally heated in a heating space, And the crucible is placed on a rotating table in a coating space, whereby the inside of the crucible can be uniformly coated by the rotation of the crucible.

Quartz crucibles made of quartz are generally used for melting poly-silicon. However, the molten silicon reacts with the quartz crucible in contact with the crucible, thereby lowering the purity of the ingot that is grown and, at the same time, failing to reuse the crucible.

In order to solve such a problem, conventionally, in order to improve the purity and recyclability of the grown ingot at the time of growing the ingot using the quartz crucible, the interior of the quartz crucible is coated with a special chemical such as silicon nitride. The crucible coating consists of a heating step and a coating step.

FIG. 1 shows a schematic view of a conventional crucible coating apparatus. 1, a conventional crucible coating apparatus includes a heating unit 10 having a heating means 12 and a conveyor belt 14, a coating (coating) coating a crucible 2 heated from the heating unit 10, (20). The crucible 2 is heated to a predetermined temperature through the heating means 12 while being conveyed along the conveyor belt 14. [ However, in the crucible 2 moving along the conveyor belt 14, both sides of the crucible 2 adjacent to the heating means 12 are heated to a relatively high temperature and the front and rear parts are heated to a relatively low temperature, There is a problem that the heat is heated to an uneven temperature and most of the heat generated from the heating means 12 is exposed to the outside.

In the process of moving the crucible 2 from the heating section 10 to the coating section 20 with the structure in which the heating section 10 and the coating section 20 are separated from each other, There are frequent problems. In the coating part 20, a plurality of radially spreading nozzles 22 are used to spray the chemicals and coat the inside of the crucible 2. However, this method is not suitable for spraying chemicals The inner coating of the crucible 20 is not uniformly formed as a whole because the coating layer of the overlapping sprayed portion is formed thick.

(Patent Document 1) KR Patent Publication No. 10-2010-0109237 (October 10, 2010)

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and it is an object of the present invention to provide a heating space and a coating space, in which a crucible placed in a bogie frame is internally heated in a heating space, And the crucible heated by using the crucible is placed on the rotary table of the coating space, whereby the inside of the crucible can be uniformly coated by the rotation of the crucible.

In the meantime, other objects not specifically mentioned in the present invention will be further considered within the scope of the following detailed description and easily deduced from the effects thereof.

According to an aspect of the present invention, there is provided a quartz crucible coating apparatus comprising: a main body having a heating space and a coating space, the bottom of which is open, and a partition wall for connecting or separating the inside of the coating space with the heating space; A bogie frame installed on the main body so as to be slidable and movable up and down so as to intersect a lower portion of the heating space and the coating space and having a through hole at a central portion thereof and a quartz crucible being in contact with both ends; A heating module installed in the main body so as to allow a lamp at an upper end of the heating space to pass through the through hole of the bogie frame and to heat the interior of the quartz crucible using heat generated by the lamp; A rotary table rotatably provided at a lower portion of the coating space, the rotary table having the quartz crucible placed in the bogie frame through the through hole when the bogie frame is lowered, and a nozzle through hole at the center; And a coating agent provided in the quartz crucible rotatably mounted on the rotary table through the nozzle so that the nozzle at the upper end of the coating space crosses the nozzle passage hole of the rotary table, And an injection module for injecting the fuel.

Preferably, the bogie frame extends downwardly from the heating space and the coating space, and is slidably movable along a moving rail moving up and down from the main body.

Preferably, the moving rail is installed to be movable up and down from the main body through an X-shaped link structure.

Preferably, a plurality of the lamps are radially provided at an upper end of the heating module to uniformly heat the inside of the quartz crucible.

More preferably, the two nozzles are provided, one nozzle inlet is installed upward, and the other nozzle inlet is installed laterally.

In the quartz crucible coating apparatus according to the present invention, since the heating space and the interior of the coating space are separated from each other when the partition wall is lowered, even if the heating process and the coating process are simultaneously performed in the respective heating spaces and coating spaces, It has the advantage of not being affected.

In the quartz crucible coating apparatus according to the present invention, since the heating space and the interior of the coating space are connected to each other when the partition wall is raised, the quartz crucible heated from the heating space is directly transferred to the coating space through the bogie frame moving in a traction manner And the bogie frame is vertically lowered to safely secure the quartz crucible on the rotary table, thereby being capable of preventing the quartz crucible from being damaged and contaminated as much as possible.

In the quartz crucible coating apparatus according to the present invention, a lamp is placed inside a quartz crucible to heat the inside of the quartz crucible. When the inside of the quartz crucible is heated, heat emitted from the lamp is discharged into the quartz crucible So that there is an effect that the heat efficiency can be improved because the heat loss is small. Further, a plurality of lamps inclined at a predetermined angle are arranged in a radial manner, and the lamp is elevated and lowered to radiate heat, so that the heat is uniformly distributed throughout the quartz crucible.

Further, the quartz crucible coating apparatus according to the present invention rotates the quartz crucible by using a rotary table, and since the nozzles are provided on the upper side and the lateral side, respectively, the overlapping portions of the injected chemicals do not occur, and thus coating is performed along the inner periphery of the quartz crucible There is an advantage that the thickness of the medicine is uniformly formed as a whole. Here, there is an advantage that the thickness of the chemical coated along the vertical direction inside the quartz crucible is uniformly formed by spraying the coating agent while lifting the nozzle.

1 is a view showing a schematic structure of a conventional quartz crucible coating apparatus.
FIG. 2 is a view showing an overall view of a quartz crucible coating apparatus according to an embodiment of the present invention.
FIG. 3 is a view showing the inside of a quartz crucible coating apparatus according to an embodiment of the present invention, with the first and second doors removed. FIG.
FIGS. 4 to 7 are views schematically showing the structure and operation of a bogie frame and a moving rail of a quartz crucible coating apparatus according to an embodiment of the present invention.
FIG. 8 is a schematic view illustrating a configuration and operation of a bogie frame and a heating module of a quartz crucible coating apparatus according to an embodiment of the present invention. Referring to FIG.
FIG. 9 is a plan view of a bogie frame and an injection module of a quartz crucible coating apparatus according to an embodiment of the present invention.
FIGS. 10 and 11 are views schematically showing the configuration and operation of a bogie frame, a moving rail, and a spray module of a quartz crucible coating apparatus according to an embodiment of the present invention.
12 is a view showing a plan view of a bogie frame, a rotary table and an injection module of a quartz crucible coating apparatus according to an embodiment of the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS The objects, particular advantages and novel features of the present invention will become more apparent from the following detailed description taken in conjunction with the accompanying drawings, in which: FIG. Also, terms used are terms defined in consideration of the functions of the present invention, which may vary depending on the intention or custom of the user operator. Therefore, definitions of these terms should be based on the entire contents of the present specification.

It should be noted that, in adding reference numerals to the constituent elements of the drawings, the same constituent elements are denoted by the same reference symbols as possible even if they are shown in different drawings. In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.

In describing the components of the present invention, the terms first, second, A, B, (a), (b), and the like can be used. These terms are intended to distinguish the constituent elements from other constituent elements, and the terms do not limit the nature, order or order of the constituent elements. When a component is described as being "connected", "coupled", or "connected" to another component, the component may be directly connected or connected to another component, Connected, "" coupled, " or" connected, "

Hereinafter, the configuration and operation of an embodiment of the present invention will be described in detail with reference to the drawings.

FIG. 2 is a perspective view illustrating a quartz crucible coating apparatus according to an embodiment of the present invention. FIG. 3 is a perspective view illustrating a quartz crucible coating apparatus according to an embodiment of the present invention in a state in which a front first door and a second door are removed. A quartz crucible coating apparatus according to the present invention.

2 and 3, the quartz crucible coating apparatus 100 according to an embodiment of the present invention includes a heating space 111 in which the inside is connected or separated according to movement of the partition 114, 112 which are installed in the main body 110 so as to be able to slide and move up and down on the main body 110 so as to cross the heating space 111 and the coating space 112 and to receive the quartz crucible 2 A heating module 140 installed to be able to move up and down from the heating space 111 and heating the inside of the quartz crucible 2 by using the heat of the upper end lamp 142, A rotary table 150 on which the quartz crucible 2 placed on the bogie frame 120 is placed and which is passed through the bogie frame 120 when the bogie frame 120 is lowered, And is rotatably supported by the rotary table 150 through the upper end nozzle 162, And a jetting module 160 for jetting coating chemicals into the rotating quartz crucible 2.

The body 110 serves as a whole skeleton and a housing of the quartz crucible coating apparatus 100. A heating space 111 for heating the quartz crucible 2 and a coating space 112 for spraying the coating agent into the heated quartz crucible 2. The heating space 111 is formed in the quartz crucible 2, And the coating space 112 are connected to each other or separated from each other through a central partition wall 114. The main body 110 includes a main frame 1101 forming a rectangular parallelepiped skeleton, a fixed frame 1102 coupled to a point on the lower end of the main frame 1101, a stopper 1102 coupled to the side and back of the upper end of the main frame 1101, A first door 1104 and a second door 1105 which are coupled to the front surface of the heating space 111 and the coating space 112, respectively.

The heating space 111 is a space in which the quartz crucible 2 is heated. The heating space 111 is closed at all sides through the barrier plate 1103 and the partition wall 114, and the upper and lower portions are opened. The quartz crucible 2 is poured into the heating space 111 through the front surface of the opened heating space 111 by rotating the first door 1104 coupled to the front surface of the heating space 111. [ The heating space 111 is separated from the coating space 112 by the partition 114. When the partition 114 is moved upward, the heating space 111 and the inside of the coating space 112 are connected.

The coating space 112 is a space for performing a process of coating the inside of the heated quartz crucible 2 with the special chemicals from the heating space 111. [ The coating space 112 is closed on the side and top surfaces through the barrier plate 1103 and the second door 1105, and the lower portion is provided in an open state. The quartz crucible 2 heated in the heating space 111 moves the partition wall 114 between the heating space 111 and the coating space 112 upward and then moves the coating space 120 112).

The barrier ribs 114 are provided between the heating space 111 and the coating space 112. Specifically, the partition 114 moves upward and downward from the main body 110 through the partition moving hole 113 formed on the upper side of the main body 110. The barrier ribs 114 are configured to move up and down through the barrier wall support frame 1401, the poly 1402, the wires 1403, and the barrier drive device (not shown). The partition wall support frame 1401 has a shape of a letter 'A', and the other end portion of the partition wall support frame 1401 is bent upwardly while the other end thereof is fixed to the main body 110. At the other end of the barrier-wall supporting frame 1401, a poly 1402 is rotatably provided. The wire 1403 is connected to the diaphragm driving device via poly 1402 with one end connected to the upper side of the barrier 114. The barrier driving apparatus is a device for winding or releasing the wire 1402, and either a cylinder or a motor can be used. The barrier ribs 114 move up and down from the central portion of the main body 110 through the wires 1403 wound or unwound by the driving of the barrier rib driving apparatus and separate or connect the inside of the heating space 111 and the coating space 112 Lt; / RTI >

That is, since the heating space 111 and the interior of the coating space 112 are separated from each other, the heating process and the coating process are simultaneously performed in the heating space 111 and the coating space 112 It is advantageous that they are not mutually affected by each other's processes. The heating space 111 and the inside of the coating space 112 are connected to each other so that the heated quartz crucible 2 is directly transferred from the heating space 111 to the coating space 112 So that breakage and contamination of the quartz crucible 2 due to the movement can be prevented as much as possible.

4 to 7 are views showing schematically the configuration and operation of a bogie frame and a moving rail of a quartz crucible coating apparatus according to an embodiment of the present invention.

4 to 7, the bogie frame 120 is slidably and vertically movable from the main body 110. A stone crucible (2) is placed above the cargo frame (120). The bogie frame 120 is provided at the lower part of the heating space 111 and the coating space 112 and the quartz crucible 2 is slid along the left and right direction of the main body 110, 112 to the coating space 112 in the heating space 111 due to the bogie frame 120 moving across the lower part of the heating space 111. A perforated hole 122 is formed at the center of the bogie frame 120. Although the through hole 122 is shown in the form of a rectangular parallelepiped, the through hole 122 is not limited to the size and shape in which the lamp 142 and the rotary table 150, which will be described later, Anything is possible. The quartz crucible 2 placed in the bogie frame 120 is brought into contact with only the both ends of the bogie frame 120 by the through hole 122. That is, the quartz crucible 2 is provided at both ends thereof in the frame 120 and the central portion is disposed inside the through hole 122. The bogie frame 120 operates to be able to slide and lift from the main body 110 by the movable rail 130.

The bogie frame 120 is connected to the drive chain 125 which is rotated in an endless track manner by the chain drive motor 126 while the rail wheels 124 are in contact with the movement rails 130, And is slid in the left and right direction by driving of the driving chain 125. [ The drive chain 126 is provided to surround a pair of rotary gears 127 rotatably mounted on the bottom surface of the movable rail 130. The power of the chain drive motor 126 is transmitted to one rotary gear 127 And rotates the rotary gear 127 to rotate the drive chain 125 in an endless track manner. The chain drive motor 126 may be a forward and reverse rotation type motor rotating in the forward and reverse directions. The railcar wheel 124 of the bottom surface of the bogie frame 120 slidingly connected to the driving chain 125 contacts the moving rail 130 and slides along the moving rail 130 in a rail moving manner.

The movable rail 130 is extended along the left and right direction of the main body 110. More specifically, the moving rail 130 is located in the heating space 111 and the lower portion of the coating space 112 and extends along the longitudinal direction of the heating space 111 and the coating space 112. As described above, the bogie frame 120 is coupled to the movable rail 130 in a slidable manner so that the rail wheel 124 of the bogie frame 120 contacts the upper end of the movable rail 130, And the guide portion 131 is formed to protrude from the side upper end portion of the movable rail 130. [

FIGS. 10 and 11 are views schematically showing the configuration and operation of a bogie frame, a moving rail, and a spray module of a quartz crucible coating apparatus according to an embodiment of the present invention.

Referring to FIGS. 4, 10 and 11, the movable rail 130 is provided to move up and down from the main body 110 by a lift link 132 having an X-shaped link structure. The lift link 132 is installed between the movable rail 130 and the fixed frame 1102 of the main body 110. As the link drive cylinder 133 is driven, the lifting link 132 is lifted or widened in the left-right direction around the centers of the two intersecting points, so that the overall height of the lifting link 132 varies. The movable rail 130 coupled to the upper end of the lifting link 132 operates to move up and down from the main body 110 by changing the height together with the lifting link 132.

FIG. 8 is a schematic view showing a configuration and operation of a bogie frame and a heating module of a quartz crucible coating apparatus according to an embodiment of the present invention. FIG. 9 is a cross- And a top view showing a state in which the bogie frame and the injection module are viewed from a plane.

Referring to FIGS. 8 and 9, the heating module 140 includes a lamp 142 at an upper end thereof, and a lamp driving cylinder 144 at a lower end thereof. As the lamp 142, a device for emitting heat is used, and a near-infrared lamp can be preferably used. The lamp 142 is connected to the lamp driving cylinder 144 at the lower end and moves up and down according to the expansion and contraction action of the lamp driving cylinder 144. The lamp 142 is located inside the quartz crucible 2 which is located in the bogie frame 120 when the lamp 142 moves up and down through the through hole 122 of the bogie frame 120 during the lifting and lowering movement. The lamp 142 is installed so as to be inclined in an oblique direction so that heat can be evenly generated in the vertical direction inside the quartz crucible 2. [ A plurality of lamps 142 are provided radially so as to uniformly distribute heat along the circumferential direction inside the quartz crucible 2. [

The heating module 140 drives the lamp driving cylinder 144 to raise the lamp 142 when the bogie frame 120 in which the quartz crucible 2 is placed is placed in the heating space 111. The raised lamp 142 is inserted into the quartz crucible 2 through the through hole 122 of the bogie frame 120 and supplies power to the lamp 142 to dissipate the heat, As shown in FIG. When the interior of the quartz crucible 2 is heated, the heat radiated from the lamp 142 is transmitted to the quartz crucible 2 without any external leakage, so that there is an effect that the heat efficiency is improved because there is little heat loss. In addition, a plurality of lamps 142 inclined at a predetermined angle are arranged in a radial manner, and the lamps 142 are elevated and lowered to radiate heat to uniformly distribute the heat uniformly in the upper and lower circumferences of the quartz crucible 2 .

4, a temperature sensor 115 is provided at the upper end of the main body 110, that is, above the heating space 111. The temperature sensor 115 is disposed in the heating space 111 and is heated The temperature of the quartz crucible 2 is measured. The temperature sensor 115 is a device that assists the quartz crucible 2 to be heated to a predetermined temperature (250 ° C). When the temperature of the quartz crucible 2 is measured at 250 ° C by the temperature sensor 115, The sensor 115 transmits a signal to a control unit (not shown), and the control unit stops the operation of the heating module 140 to stop the heating process of the quartz crucible 2. [

10 to 12, the quartz crucible 2 heated by the heating module 140 in the heating space 111 slides along the bogie frame 120 and is introduced into the coating space 112. In order to move the bogie frame 120 from the heating space 111 to the coating space 112 as described above, the partition wall 114 is raised so that the inside of the heating space 111 and the coating space 112 And moves the bogie frame 120 in a connected state. The bogie frame 120 is put into the coating space 112 along the moving rail 130 and the quartz crucible 2 placed in the bogie frame 120 is also placed in the coating space 112. The lamp 142 and the nozzle 162 are lowered to the lower side of the truck frame 120 so as not to interfere with the movement of the truck frame 120 when the truck frame 120 is moved.

When the bogie frame 120 in which the heated quartz crucible 2 is placed is completely placed in the coating space 112, the descent of the movable rail 130 begins. The lowering of the movable rail 130 is performed by the linking motion of the lifting link 132 as described above. When the moving rail 130 descends and the bogie frame 120 descends and the bogie frame 120 is continuously lowered, the rotating table 150, which is rotatably provided at the lower portion of the coating space 112, Passes through the through hole 122 of the bogie frame 120.

The rotary table 150 is placed in contact with the quartz crucible 2 that has been placed on the bogie frame 120 through the through hole 122 of the bogie frame 120 when the bogie frame 120 is lowered. The rotary table 150 is formed with a nozzle passage hole 152 at the center thereof, and a tube-like extension 154 protrudes from the bottom surface thereof. The nozzle passage hole 152 extends in the vertical direction along the extension portion 154. The rotary table 150 is mounted to the main body 110 and rotatably received by the table driving motor 156 connected to the extended portion 150.

That is, the rotary table 150 is disposed below the bogie frame 120 to prevent interference when the bogie frame 120 moves to the coating space 112, and the bogie frame 120 moves the movable rail 130 And is moved upwardly beyond the bogie frame 120 through the through hole 122 of the bogie frame 120 so as to receive and receive the quartz crucible 2 placed in the bogie frame 120 do. The nozzle 162 of the injection module 160 moves up and down through the nozzle passage hole 152 of the rotary table 150.

The injection module 160 includes a nozzle 162 and a nozzle drive cylinder 164. The nozzle 162 is provided at the upper end of the injection module 160 and the nozzle driving cylinder 164 is provided at the lower end of the injection nozzle 160. The nozzle 162 moves up and down according to the operation of the nozzle driving cylinder 164 and moves up and down. The nozzle 162 receives and dispenses the special medicine through a hose (not shown). The nozzle 162 is preferably provided at the upper end of the injection module 160 such that one nozzle 162 faces the upward direction and the other nozzle 162 faces the lateral direction .

When the heated quartz crucible 2 charged in the coating space 112 is placed on the rotary table 150, the nozzle 162 is raised by the nozzle drive cylinder 164 and operated to be located inside the quartz crucible 2 . Next, when the rotation of the rotary table 150 is started, the quartz crucible 2 is placed on the rotary table 150 and rotated together with the rotary table 150. When the quartz crucible 2 is rotated, the coating agent is injected into the quartz crucible 2 through the nozzle 162 to coat the interior of the quartz crucible 2. At this time, since the quartz crucible 2 is rotated and the nozzles 162 are provided one on the upper side and the other on the lateral side, the injection overlapped portion of the sprayed medicine does not occur, so that the thickness of the drug coated along the inner circumference of the quartz crucible 2 There is an advantage in that the whole is uniformly formed. The nozzle 162 is moved up and down through the nozzle driving cylinder 164 and sprayed with the coating agent, which is advantageous in that the thickness of the medicine coated along the vertical direction inside the quartz crucible 2 is uniformly formed as a whole.

In addition, a washing water support 166 may be provided below the nozzle passage hole 152 of the rotary table 150 to store medicament sprayed from the nozzle 62.

It is to be understood that the terms "comprises", "comprising", or "having" as used in the foregoing description mean that a constituent element can be implanted unless specifically stated otherwise, But should be interpreted to include additional components. All terms, including technical and scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs, unless otherwise defined. Commonly used terms, such as predefined terms, should be interpreted to be consistent with the contextual meanings of the related art, and are not to be construed as ideal or overly formal, unless expressly defined to the contrary.

The foregoing description is merely illustrative of the technical idea of the present invention, and various changes and modifications may be made by those skilled in the art without departing from the essential characteristics of the present invention. Therefore, the embodiments disclosed in the present invention are intended to illustrate rather than limit the scope of the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments. The scope of protection of the present invention should be construed according to the following claims, and all technical ideas within the scope of equivalents should be construed as falling within the scope of the present invention.

100: quartz crucible coating device 111: heating space
112: coating space 114: partition wall
110: main body 120: truck frame
122: through hole 130: moving rail
140: Heating module 142: Lamp
150: rotation table 155: nozzle through hole
160: injection module 162: nozzle

Claims (5)

A body 110 having a heating space 111 having a bottom opened and a coating space 112 and a partition wall 114 connecting or separating the inside of the coating space with the heating space;
The heating space and the coating space are slidably moved across the heating space and the lower end of the coating space along the moving rails 130 that extend from the main body and move up and down from the main body, A bogie frame 120 on both sides of which a quartz crucible is turned upside down so that its opening faces downward;
A heating module installed at a lower portion of the heating space and capable of raising and lowering a lamp 142 at an upper end of the main body so as to cross the through hole of the bogie frame and heating the interior of the quartz crucible using heat generated by the lamp, (140);
Wherein the quartz crucible is rotatably disposed at a lower portion of the coating space and is located below the bogie frame and passes through the through hole when the bogie frame is lowered, A rotary table 150 provided with a hole 152; And
A nozzle installed at a lower portion of the coating space and vertically installed in the main body so that a nozzle 162 at an upper end thereof passes through a nozzle passage hole of the rotary table, And a spray module (160) for spraying a coating agent into the interior of the quartz crucible coating device.
delete The method according to claim 1,
Wherein the movable rail is installed to be movable up and down from the main body through a lifting link (132) having an X-shaped link structure.
The method according to claim 1,
Wherein a plurality of lamps are radially provided on an upper end of the heating module to uniformly heat the inside of the quartz crucible.
The method according to claim 1,
Wherein the two nozzles are provided, one nozzle inlet is installed upward, and another nozzle inlet is installed laterally.

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