KR101873404B1 - Vacuum degreasing apparatus and control method for the same - Google Patents

Vacuum degreasing apparatus and control method for the same Download PDF

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Publication number
KR101873404B1
KR101873404B1 KR1020170011176A KR20170011176A KR101873404B1 KR 101873404 B1 KR101873404 B1 KR 101873404B1 KR 1020170011176 A KR1020170011176 A KR 1020170011176A KR 20170011176 A KR20170011176 A KR 20170011176A KR 101873404 B1 KR101873404 B1 KR 101873404B1
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South Korea
Prior art keywords
chamber
vapor
vacuum
cooling
unit
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KR1020170011176A
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Korean (ko)
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정수진
강지영
정원기
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동우에이치에스티 주식회사
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B01D1/0082—Regulation; Control
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/42—Auxiliary equipment or operation thereof
    • B01D46/4263—Means for active heating or cooling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D5/00—Condensation of vapours; Recovering volatile solvents by condensation
    • B01D5/0057—Condensation of vapours; Recovering volatile solvents by condensation in combination with other processes
    • B01D5/006—Condensation of vapours; Recovering volatile solvents by condensation in combination with other processes with evaporation or distillation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D5/00—Condensation of vapours; Recovering volatile solvents by condensation
    • B01D5/0078—Condensation of vapours; Recovering volatile solvents by condensation characterised by auxiliary systems or arrangements
    • B01D5/009—Collecting, removing and/or treatment of the condensate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D5/00—Condensation of vapours; Recovering volatile solvents by condensation
    • B01D5/0078—Condensation of vapours; Recovering volatile solvents by condensation characterised by auxiliary systems or arrangements
    • B01D5/0096—Cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D8/00—Cold traps; Cold baffles

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Furnace Details (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
  • Powder Metallurgy (AREA)

Abstract

The present invention relates to a vacuum degreasing device and a control method thereof, capable of degreasing a sintered product in a vacuum condition. The vacuum degreasing device includes: a chamber including a door for opening or closing an open upper part, and into which a product is inserted; a heating part installed in the chamber and heating the chamber; a vacuum pump absorbing gas from the inside of the chamber to make the inside of the chamber get into a vacuum condition; a trap unit placed between the chamber and the vacuum pump and removing oil from oil mist discharged from the chamber; and a control part sequentially operating the heating part and the vacuum pump to degrease the product inserted into the chamber. As such, the present invention is capable of completely removing foreign substances remaining in a sintered product through vacuum degreasing.

Description

Technical Field [0001] The present invention relates to a vacuum degreasing apparatus and a control method thereof,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum degreasing apparatus and a control method thereof, and more particularly, to a vacuum degreasing apparatus and method for degreasing a sintered product by vacuum.

Generally, sintered products are nitrided for surface hardening. As a method of nitriding the product for surface hardening, there are a gas nitriding process and a plasma nitriding process.

In the sintered product, since the internal density is low and the gas easily enters the interior, it is difficult to obtain a nitrogen compound having a high nitrogen concentration with a high hardness on the outermost surface through the gas nitriding process.

Thus, the sintered product forms a high-hardness nitrogen compound layer on the surface of the product through the plasma nitridation process. At this time, it is necessary to clean and degrease the product in order to optimize the process.

However, in the case of the sintered product, the oil component remains inside, which is not completely removed by the cleaning and the atmospheric pressure degreasing process.

Accordingly, plasma is unstable due to the oil vapor generated by the oil remaining in the sintered product in the plasma nitridation process, and the plasma nitriding process becomes longer.

In addition, there is a problem that it takes a lot of time and cost to contaminate the plasma nitrification facility and the vacuum facility due to the vapor, and to maintain and repair the same.

It is an object of the present invention to provide a vacuum degreasing apparatus and a control method thereof that are capable of removing oil remaining in a product by degreasing the sintered product in vacuum.

According to an aspect of the present invention, there is provided a vacuum degreasing apparatus comprising: a door that opens and closes an opened upper portion, the vacuum degreasing apparatus having a double space, A chamber provided with a heater heat exhaust line communicating with the outside and a heater heat exhaust line valve opening and closing the heater heat exhaust line; A heating unit provided in an outer space of the chamber and heating the chamber; A chamber cooling unit provided in an outer space of the chamber and cooling the chamber; A vacuum pump for sucking the gas inside the chamber to bring the inside of the chamber into a vacuum state; Trap means disposed between the chamber and the vacuum pump for collecting oil from the vapor discharged from the chamber; And operating the heating unit such that the inner space of the chamber is heated to a predetermined temperature so as to degrease the product loaded into the chamber, and when the temperature reaches a predetermined temperature, the heating unit is turned off, And a controller for operating the heater heat exhaust line valve to cool the chamber and operating the chamber cooling unit after opening the heater heat exhaust line.

Wherein the trap means comprises: a vapor storage tank in which vapor discharged from the chamber is stored; A dust collection unit connected to the vapor storage tank and filtering the oil from the vapor discharged from the vapor storage tank; And a vapor cooling unit connected to the vapor storage tank and for filtering the oil by cooling the vapor discharged from the vapor storage tank.

Here, the vapor cooling unit may include: a cooling tank for storing vapor discharged from the vapor storage tank; A cooling line provided in the cooling tank for cooling and condensing the vapor; And a cooling water supply unit for supplying cooling water to the cooling line.

The trap means includes a vapor discharge line valve for opening and closing a pipe connecting the vapor storage tank and the dust collection unit; And a pump line valve for opening / closing a pipe connecting the vapor storage tank and the vapor cooling unit.

Here, the control unit may control to open the vapor discharge line valve and close the pump line valve when operating the heating unit.

Further, the control unit may control to open the vapor line valve and open the pump line valve when operating the vacuum pump.

Further, the control unit may operate to operate the heating unit so that the inside of the chamber is heated to a predetermined temperature, and when the temperature reaches a certain temperature, the heating unit is turned off and the vacuum pump is operated so that the inside of the chamber is lowered to a predetermined pressure .

And a chamber cooling unit provided outside the chamber and cooling the chamber.

Here, the controller may control the chamber cooling unit to cool the chamber when the inside of the chamber reaches a predetermined temperature and the heating unit is turned off.

Furthermore, the trap means may further include a filter portion disposed between the vapor cooling portion and the vacuum pump, for filtering the foreign substances in the gas introduced into the vacuum pump.

And a gas inlet provided in a door of the chamber and connected to the gas supply unit to supply nitrogen gas into the chamber.

And a temperature sensor provided in the door of the chamber and measuring a temperature inside the chamber.

According to another aspect of the present invention, there is provided a method for controlling a degassing apparatus, the method comprising: charging a sintered product into an inner space of a chamber formed to have a double space and closing the door; A gas introducing step of introducing nitrogen gas into the chamber through a gas inlet provided in the door; A heating step of heating the chamber by operating a heating unit provided in an outer space of the chamber; And when the chamber reaches a predetermined temperature, the heating unit is turned off and the vacuum pump is operated to bring the chamber into a vacuum state, and at the same time, a heater heat exhaust line communicating the outside space of the chamber with the outside is opened, And a vacuum cooling step of operating the chamber cooling section to cool the chamber.

Here, the heating step may include: opening a vapor exhaust line valve that opens a vapor exhaust line valve provided in a pipe connecting the vapor storage tank and the dust collection unit, in which the vapor discharged from the chamber is stored; A pump line closing step of closing a pump line valve provided in a pipe connecting the vapor storage tank and a vapor cooling unit for cooling the vapor discharged from the vapor storage tank; And operating the heating unit to raise the temperature inside the chamber to 400 to 450 DEG C for 3 to 5 hours.

The vacuum cooling step may include closing the vapor exhaust line closing the vapor discharge line valve; A pump line opening step of opening the pump line valve; And operating the vacuum pump such that the pressure inside the chamber is lowered to 0.01 to 0.1 torr for 2 to 4 hours.

Further, the vacuum cooling step may further include a chamber cooling unit operation step of operating a chamber cooling unit provided outside the chamber so that the temperature inside the chamber is cooled to 150 to 250 ° C for 2 to 4 hours .

According to the vacuum degreasing apparatus and the control method thereof according to the present invention, it is possible to obtain an effect of completely removing foreign matter remaining in the sintered product through vacuum degreasing.

According to the present invention, the oil can be completely removed from the sintered product, and the effect of preventing the occurrence of vapor in the plasma nitridation process of the product can be obtained.

1 is a schematic view illustrating a vacuum degreasing apparatus according to an embodiment of the present invention;
FIG. 2 is a block diagram schematically showing a configuration of a vacuum degreasing apparatus according to an embodiment of the present invention. FIG.
3 is a flowchart schematically showing a control method of a degassing apparatus according to an embodiment of the present invention,
FIG. 4 is a graph and a table schematically illustrating a vacuum degreasing process by a control method of a vacuum degreasing apparatus according to an embodiment of the present invention.

In order to facilitate understanding of the features of the present invention, a vacuum degreasing apparatus and a control method thereof according to an embodiment of the present invention will be described in detail.

It should be noted that, in order to facilitate understanding of the embodiments described below, reference numerals are added to the components of the accompanying drawings, so that the same components are denoted by the same reference numerals even though they are shown in different drawings . In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.

Hereinafter, a specific embodiment of the present invention will be described with reference to the accompanying drawings.

FIG. 1 is a schematic view showing a vacuum degreasing apparatus according to an embodiment of the present invention, and FIG. 2 is a block diagram schematically showing a configuration of the vacuum degreasing apparatus.

1 and 2, a vacuum degreasing apparatus 100 according to an embodiment of the present invention includes a chamber 200 in which a door 210 for opening and closing an opened upper portion is provided and a product P is loaded therein, A heating unit 220 installed in the chamber 200 for heating the chamber 200 and a vacuum pump 400 for sucking gas in the chamber 200 to make the interior of the chamber 200 vacuum, Trapping means 300 disposed between the chamber 200 and the vacuum pump 400 for filtering the oil O from the vapor discharged from the chamber 200, And a control unit 500 for sequentially operating the heating unit 220 and the vacuum pump 400 to degas the product P.

The chamber 200 is formed to have a double space, the sintered product P is loaded in the inner space, and the heating unit 220 is disposed in the outer space to heat the inner space.

The chamber 200 may further include a chamber cooling unit 280 for cooling the inner space. The chamber cooling unit 280 may be provided in any form capable of cooling the heated chamber 200 by a blower or the like.

The chamber 200 may be provided with a heater heat exhaust line 250 that is provided as a pipe and communicates with the outside space and the outside and a heater heat exhaust line valve 260 that opens and closes the heater heat exhaust line 250 have.

This is because when the chamber cooling unit 280 is operated to cool the chamber 200, the heater heat exhaust line 250 is opened to discharge the warm air inside the chamber 200 to the outside, It is for this reason.

The door 210 for opening and closing the upper portion of the chamber 200 may include a gas inlet 230 connected to the gas supply unit 240 to supply nitrogen gas to the chamber 200 . This is to turn the inside of the chamber 200 into a nitrogen gas atmosphere during the vacuum degreasing process of the product.

The door 210 of the chamber 200 may be provided with a temperature sensor 270 for measuring the temperature inside the chamber 200. This is to measure the inside of the chamber 200 to control the heating unit 220 so that the inside of the chamber 200 satisfies an appropriate temperature range during the vacuum degreasing process of the product P. [

The trap means 300 is disposed between the chamber 200 and the vacuum pump 400 and is provided to filter the oil from the vapor discharged from the chamber 200. That is, when the chamber 200 is heated, the oil remaining in the product P is heated to generate vapor. The trap means 300 filters the oil so that the generated vapor does not flow into the vacuum pump 400.

More specifically, the trap means 300 includes a vapor storage tank 310 in which the vapor discharged from the chamber 200 is stored, and a discharge port 310 connected to the vapor storage tank 310 and discharged from the vapor storage tank 310 And a vapor cooling unit 350 connected to the vapor storage tank 310 and cooling the vapor discharged from the vapor storage tank 310 to filter oil from the vaporized vapor in the vapor storage tank 310 . The vacuum pump 400 further includes a filter unit 360 disposed between the vapor cooling unit 350 and the vacuum pump 400 to filter foreign substances from the gas introduced into the vacuum pump 400.

The vapor storage tank 310 is connected to the chamber 200 by piping, and the vapor generated in the chamber 200 is stored first. Since the temperature of the vapor stored in the vapor storage tank 310 is lowered, a part of the vapor is condensed and stored in the vapor storage tank 310 as the liquid.

The vapor storage tank 310 may include a discharge unit 311 and a valve 312 to discharge the liquid oil to the outside when the liquid oil is filled in the vapor storage tank 310 by a predetermined amount or more.

The dust collecting unit 330 is connected to the vapor discharge line 320 provided in the vapor storage tank 310 and is provided to filter the oil from the vapor discharged from the vapor storage tank 310. Of course, the dust collecting part 330 may be provided to filter oil as well as foreign matter from the oil vapor. In addition, the dust collecting unit 330 may be configured to discharge the steam filtered by the oil to the outside.

The dust collecting part 330 may be provided in any form as long as it is capable of filtering oil and foreign substances contained in the gas.

The vapor cooling unit 350 is connected to a pump line 340 provided in the vapor storage tank 310 and a pipe line. The vaporized vapor discharged from the vapor storage tank 310 is cooled and condensed into liquid oil, Lt; / RTI >

The vapor cooling unit 350 includes a cooling tank 351 connected to the vapor storage tank 310 and through which the vapor discharged from the vapor storage tank 310 flows, A cooling line 352 for cooling and condensing the vapor, and a cooling water supply 353 for circulating the cooling water to the cooling line 352. Here, the cooling line 352 is arranged in the cooling tank 351 in a zigzag form.

With this configuration, when the vapor is introduced into the cooling tank 351, the vapor is cooled and condensed while passing through the cooling line 352, and the condensed oil is collected in the lower portion of the cooling tank 351.

When the condensed liquid oil in the cooling tank 351 is filled to a certain level or more, the cooling tank 351 may include a discharge portion 354 and a valve 355 to discharge the liquid to the outside.

The filter unit 360 is disposed in front of the vacuum pump 400 to filter the vapor and foreign substances that may remain in the gas flowing into the vacuum pump 400.

The filter unit 360 may be provided in any form as long as it is capable of filtering oil and foreign substances contained in the gas.

The trap means 300 further includes a vapor discharge line valve 321 and a pump line valve 341.

The vapor discharge line valve 321 is installed in the vapor discharge line 320 which is a pipe connecting the vapor storage tank 310 and the dust collection unit 330 to open and close the vapor discharge line 320 .

The pump line valve 341 is installed in a pump line 340 that connects the vapor storage tank 310 and the vapor cooling unit 350 and opens and closes the pump line 340.

The control unit 500 controls the heating unit 220 and the vacuum pump 400 to sequentially operate so as to degrade the products loaded in the chamber 200. [

More specifically, the control unit 500 operates the heating unit 220 so that the inside of the chamber 200 is heated to a predetermined temperature for a predetermined time, and when the temperature reaches a predetermined temperature, the heating unit 220 is turned off, The vacuum pump 400 is operated so that the inside of the vacuum chamber 200 is lowered to a predetermined pressure for a predetermined time.

At this time, when the heating unit 220 is operated, the control unit 500 opens the vapor discharge line valve 321 and closes the pump line valve so that the vapor discharged from the chamber 200 flows into the vapor storage tank And then flows into the dust collecting unit 330 through the vapor exhaust line 320 to completely filter the oil from the vapor and then to the outside.

When the vacuum pump 400 is operated, the control unit 500 closes the vapor discharge line valve 321 and opens the pump line valve 341 so that the vacuum pump 400 can be operated in the chamber 200 ) Make the inside of the vacuum state. At this time, the remaining vapor in the chamber 200 is condensed while passing through the vapor cooling unit 350, and is filtered with liquid oil, and is further filtered while passing through the filter unit 360.

The discharge unit of the vacuum pump 400 may be connected to the dust collecting unit 330 through an exhaust line 410 so that the gas sucked through the vacuum pump 400 may be discharged to the dust collecting unit 330 .

FIG. 3 is a flowchart schematically showing a control method of a degassing apparatus according to an embodiment of the present invention, and FIG. 4 is a graph and a table schematically showing a vacuum degassing process through a control method of the degassing apparatus.

3 and 4, a method of controlling a degassing apparatus according to an embodiment of the present invention includes a product loading step S100 for charging a sintered product into a chamber and closing the door, A heating step (S300) for heating the chamber by operating a heating unit provided in the chamber; and a heating step (S300) for heating the chamber when the chamber reaches a predetermined temperature, And a vacuum cooling step (S400) for turning the chamber to a vacuum by operating a vacuum pump.

Here, the heating step S300 may include opening a vapor exhaust line (S310) for opening a vapor exhaust line valve provided in a pipe connecting the vapor storage tank and the dust collection unit to store the vapor discharged from the chamber, A pump line closing step S310 for closing a pump line valve provided in a pipe connecting a tank and a vapor cooling unit for cooling the vapor discharged from the vapor storage tank, And operating the heating unit to raise the temperature to 450 DEG C (S330).

The vacuum cooling step S400 may include closing a vapor exhaust line S410 for closing the vapor line valve, opening a pump line for opening the pump line valve S410, And operating the vacuum pump so that the pressure inside the chamber is lowered to 0.01 to 0.1 torr (S420, S430).

Further, in the vacuum cooling step S400, the chamber cooling unit provided outside the chamber is operated so that the temperature inside the chamber is cooled to 150 to 250 DEG C for 2 to 4 hours together with the vacuum pump operating step (S420) And a chamber cooling section operation step (S440, S450).

If the sintered product is degreased through the vacuum degreasing apparatus and its control method, the oil in the product can be removed more effectively with a degreasing process time of about 20 to 30% of the time required for the conventional cleaning and atmospheric pressure degreasing process . For example, if it takes 24 hours to degrease the same quantity of products, the vacuum degreasing process can provide an excellent oil removal effect even if the degreasing process is performed for 5 to 7 hours.

Through this, it is possible to completely remove the oil remaining in the sintered product to prevent occurrence of vapor in the plasma nitriding process, which is a surface hardening process of the product, thereby shortening the nitriding process time and improving the product quality, The failure of the nitriding process equipment can be prevented in advance.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. It is to be understood that various changes and modifications may be made without departing from the scope of the appended claims.

O: Oil P: Product
100: vacuum degreasing apparatus 200: chamber
210: Door 220: Heating part
230: gas inflow part 240: gas supply part
250: heater heat exhaust line 260: heater heat exhaust line valve
270: Temperature sensor 280: Chamber cooling section
300: trap means 310: vapor storage tank
320: Vapor exhaust line 321: Vapor exhaust line valve
330: dust collector 340: pump line
341: Pump line valve 350: Vapor cooling unit
351: Cooling tank 352: Cooling line
353: Cooling water supply part 360: Filter part
400: Vacuum pump 500: Control unit

Claims (16)

A heater heat exhaust line which is formed to have a double space and which is filled in the inner space and which communicates the outer space with the outside, and a heater heat exhaust line which opens and closes the heater heat exhaust line, A chamber having a line valve;
A heating unit provided in an outer space of the chamber and heating the chamber;
A chamber cooling unit provided in an outer space of the chamber and cooling the chamber;
A vacuum pump for sucking the gas inside the chamber to bring the inside of the chamber into a vacuum state;
Trap means disposed between the chamber and the vacuum pump for collecting oil from the vapor discharged from the chamber; And
The heating unit is operated so that the inner space of the chamber is heated to a predetermined temperature so as to degrease the product loaded in the chamber, and when the temperature reaches a predetermined temperature, the heating unit is turned off, and the vacuum pump is operated A control unit for operating the chamber cooling unit after opening the heater heat exhaust line by operating the heater heat exhaust line valve to cool the chamber at the same time;
.
The method according to claim 1,
Wherein the trap means comprises:
A vapor storage tank in which vapor discharged from the chamber is stored;
A dust collection unit connected to the vapor storage tank and filtering the oil from the vapor discharged from the vapor storage tank; And
A vapor cooling unit connected to the vapor storage tank to cool the vapor discharged from the vapor storage tank to filter the oil;
Wherein the vacuum degreasing apparatus comprises a vacuum degassing apparatus.
3. The method of claim 2,
Wherein the vapor cooling unit comprises:
A cooling tank in which the vapor stored in the vapor storage tank is stored;
A cooling line provided in the cooling tank for cooling and condensing the vapor; And
A cooling water supply unit for supplying cooling water to the cooling line;
Wherein the vacuum degreasing apparatus comprises a vacuum degassing apparatus.
3. The method of claim 2,
Wherein the trap means comprises:
A vapor discharge line valve for opening and closing a pipe connecting the vapor storage tank and the dust collection unit; And
A pump line valve for opening / closing a pipe connecting the vapor storage tank and the vapor cooling unit;
Wherein the vacuum degreasing apparatus further comprises a vacuum degassing apparatus.
5. The method of claim 4,
Wherein,
Wherein when the heating unit is operated, the vapor evacuation line valve is opened and the pump line valve is closed.
6. The method of claim 5,
Wherein,
Wherein when operating the vacuum pump, the vapor evacuation line valve is closed and the pump line valve is opened.
delete delete delete 3. The method of claim 2,
Wherein the trap means comprises:
A filter unit disposed between the vapor cooling unit and the vacuum pump, the filter unit filtering foreign substances from a gas introduced into the vacuum pump;
Wherein the vacuum degreasing apparatus further comprises a vacuum degassing apparatus.
The method according to claim 1,
A gas inlet provided in a door of the chamber and connected to the gas supply unit to supply nitrogen gas into the chamber;
Wherein the vacuum degreasing apparatus further comprises a vacuum degassing apparatus.
The method according to claim 1,
A temperature sensor provided in a door of the chamber, the temperature sensor measuring a temperature inside the chamber;
Wherein the vacuum degreasing apparatus further comprises a vacuum degassing apparatus.
A product charging step of charging the sintered product into the inner space of the chamber formed to have the double space and closing the door;
A gas introducing step of introducing nitrogen gas into the chamber through a gas inlet provided in the door;
A heating step of heating the chamber by operating a heating unit provided in an outer space of the chamber; And
And a controller for controlling the vacuum pump to operate the vacuum pump so that the chamber is in a vacuum state and at the same time a heater heat exhaust line for communicating the outside space of the chamber with the outside is opened, A vacuum cooling step of operating the chamber cooling part to cool the chamber;
And controlling the vacuum degassing apparatus.
14. The method of claim 13,
In the heating step,
Opening a vapor exhaust line valve provided in a pipe connecting the vapor storage tank and the dust collection unit, the vapor discharge line valve storing the vapor discharged from the chamber;
A pump line closing step of closing a pump line valve provided in a pipe connecting the vapor storage tank and a vapor cooling unit for cooling the vapor discharged from the vapor storage tank; And
Operating the heating unit to raise the temperature inside the chamber to 400 to 450 DEG C for 3 to 5 hours;
And controlling the vacuum degassing apparatus.
15. The method of claim 14,
The vacuum cooling step may include:
Closing the vapor exhaust line valve closing the vapor exhaust line valve;
A pump line opening step of opening the pump line valve; And
Operating the vacuum pump so that the pressure inside the chamber is lowered to 0.01 to 0.1 torr for 2 to 4 hours;
And controlling the vacuum degassing apparatus.
16. The method of claim 15,
The vacuum cooling step may include:
Operating a chamber cooling unit provided outside the chamber to cool the inside of the chamber to 150 to 250 ° C for 2 to 4 hours;
Further comprising the step of controlling the vacuum degassing apparatus.
KR1020170011176A 2017-01-24 2017-01-24 Vacuum degreasing apparatus and control method for the same KR101873404B1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102330443B1 (en) * 2020-07-30 2021-11-24 엔에이티엠 주식회사 Anti-oxidation integrated degreasing and sintering device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102330443B1 (en) * 2020-07-30 2021-11-24 엔에이티엠 주식회사 Anti-oxidation integrated degreasing and sintering device

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