KR101861372B1 - 실리케이트 연마 패드의 제조 방법 - Google Patents

실리케이트 연마 패드의 제조 방법 Download PDF

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Publication number
KR101861372B1
KR101861372B1 KR1020110117501A KR20110117501A KR101861372B1 KR 101861372 B1 KR101861372 B1 KR 101861372B1 KR 1020110117501 A KR1020110117501 A KR 1020110117501A KR 20110117501 A KR20110117501 A KR 20110117501A KR 101861372 B1 KR101861372 B1 KR 101861372B1
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South Korea
Prior art keywords
microelements
polymeric
polymeric microelements
silicate
gas
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KR1020110117501A
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English (en)
Korean (ko)
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KR20120057518A (ko
Inventor
돈나 엠 올덴
앤드류 알 웽크
로버트 가지온
마크 이 가제
조셉 케이 소
데이빗 드랍
션 릴리
마이 튜 반
Original Assignee
롬 앤드 하스 일렉트로닉 머티리얼스 씨엠피 홀딩스, 인코포레이티드
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Application filed by 롬 앤드 하스 일렉트로닉 머티리얼스 씨엠피 홀딩스, 인코포레이티드 filed Critical 롬 앤드 하스 일렉트로닉 머티리얼스 씨엠피 홀딩스, 인코포레이티드
Publication of KR20120057518A publication Critical patent/KR20120057518A/ko
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0054—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for by impressing abrasive powder in a matrix
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/14—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
KR1020110117501A 2010-11-12 2011-11-11 실리케이트 연마 패드의 제조 방법 Active KR101861372B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/945,504 US8202334B2 (en) 2010-11-12 2010-11-12 Method of forming silicate polishing pad
US12/945,504 2010-11-12

Publications (2)

Publication Number Publication Date
KR20120057518A KR20120057518A (ko) 2012-06-05
KR101861372B1 true KR101861372B1 (ko) 2018-05-28

Family

ID=45999143

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020110117501A Active KR101861372B1 (ko) 2010-11-12 2011-11-11 실리케이트 연마 패드의 제조 방법

Country Status (7)

Country Link
US (1) US8202334B2 (https=)
JP (1) JP5845832B2 (https=)
KR (1) KR101861372B1 (https=)
CN (1) CN102463531B (https=)
DE (1) DE102011117944B4 (https=)
FR (1) FR2967368B1 (https=)
TW (1) TWI593509B (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8888877B2 (en) 2012-05-11 2014-11-18 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Forming alkaline-earth metal oxide polishing pad
US8894732B2 (en) * 2012-05-11 2014-11-25 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Hollow polymeric-alkaline earth metal oxide composite
US9073172B2 (en) 2012-05-11 2015-07-07 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Alkaline-earth metal oxide-polymeric polishing pad
US20150306731A1 (en) * 2014-04-25 2015-10-29 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Chemical mechanical polishing pad
US11524390B2 (en) * 2017-05-01 2022-12-13 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Methods of making chemical mechanical polishing layers having improved uniformity
KR102293801B1 (ko) * 2019-11-28 2021-08-25 에스케이씨솔믹스 주식회사 연마패드, 이의 제조방법 및 이를 이용한 반도체 소자의 제조방법

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009208165A (ja) 2008-02-29 2009-09-17 Fujibo Holdings Inc 研磨パッドおよび研磨パッドの製造方法
JP2009254938A (ja) 2008-04-14 2009-11-05 Nippon Shokubai Co Ltd 粒子の分級方法およびその方法を用いて得られる粒子

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MY114512A (en) * 1992-08-19 2002-11-30 Rodel Inc Polymeric substrate with polymeric microelements
US5447275A (en) * 1993-01-29 1995-09-05 Canon Kabushiki Kaisha Toner production process
JP3984833B2 (ja) * 2001-01-16 2007-10-03 キヤノン株式会社 現像剤担持体の再生方法
JP2003062748A (ja) * 2001-08-24 2003-03-05 Inoac Corp 研磨用パッド
US6986705B2 (en) * 2004-04-05 2006-01-17 Rimpad Tech Ltd. Polishing pad and method of making same
CN101490138B (zh) * 2006-08-21 2012-07-18 株式会社日本触媒 微粒、微粒的制备方法、含有该微粒的树脂组合物及光学薄膜
JP5543717B2 (ja) * 2009-02-13 2014-07-09 積水化学工業株式会社 熱膨張性マイクロカプセル及び熱膨張性マイクロカプセルの製造方法
US7947098B2 (en) 2009-04-27 2011-05-24 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Method for manufacturing chemical mechanical polishing pad polishing layers having reduced gas inclusion defects

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009208165A (ja) 2008-02-29 2009-09-17 Fujibo Holdings Inc 研磨パッドおよび研磨パッドの製造方法
JP2009254938A (ja) 2008-04-14 2009-11-05 Nippon Shokubai Co Ltd 粒子の分級方法およびその方法を用いて得られる粒子

Also Published As

Publication number Publication date
JP2012101353A (ja) 2012-05-31
DE102011117944A1 (de) 2012-05-16
JP5845832B2 (ja) 2016-01-20
CN102463531B (zh) 2014-10-01
TW201221293A (en) 2012-06-01
US20120117889A1 (en) 2012-05-17
DE102011117944B4 (de) 2023-06-29
FR2967368A1 (fr) 2012-05-18
TWI593509B (zh) 2017-08-01
CN102463531A (zh) 2012-05-23
FR2967368B1 (fr) 2015-08-21
US8202334B2 (en) 2012-06-19
KR20120057518A (ko) 2012-06-05

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JP6093236B2 (ja) アルカリ土類金属酸化物ポリマー研磨パッド
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