KR101854690B1 - Auto probe inspection appratus and inspecting method of the same - Google Patents

Abstract

The present invention relates to an apparatus and method for inspecting an auto-probe in which an additional interlock is not required while reducing a tact time in a lighting test. The apparatus for inspecting an auto-probe according to the present invention comprises: A plurality of probe blocks for performing a lighting test in contact with the pads of the organic light emitting display panel and a plurality of probe blocks mounted on the probe blocks for contacting the pad portions of the organic light emitting display panel, And a work stage on which the work table and the plurality of block stages are mounted and which is moved upward or downward in the Z axis direction.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an automatic probe inspection apparatus,

The present invention relates to an automatic probe inspection apparatus and an inspection method thereof, and more particularly, to an automatic probe inspection apparatus and an inspection method therefor, in which an additional interlock is not required while reducing a tact time during a light inspection.

The image display device that realizes various information on the screen is a core technology of the information communication age and it is becoming thinner, lighter, more portable and higher performance. An organic light emitting display panel for displaying an image by controlling the amount of light emission of an organic light emitting device is being spotlighted by a flat panel display device which can reduce weight and volume, which is a disadvantage of a cathode ray tube (CRT). An organic electroluminescent device is a self-luminous device using a thin luminescent layer between two electrodes and has an advantage that it can be made thin like a paper.

In an organic light emitting display panel, pixels composed of three color (R, G, B) sub-pixels are arranged in a matrix form to display an image. Each sub-pixel includes an organic electroluminescent element and a cell driver for driving the organic electroluminescent element. The cell driver includes at least two thin film transistors and a storage capacitor connected between a gate line for supplying a scan signal, a data line for supplying a video data signal, and a common power supply line for supplying a common power supply signal, The anode is driven.

In order to inspect the disconnection of the signal line on the organic light emitting display panel, the electrical lighting test, and the presence or absence of each pixel defect, the lighting test is performed using an auto-probe inspection facility.

1, the automatic probe inspection apparatus includes a work table 320 for storing and aligning the organic light emitting display panel 300, a work stage for placing the work table 320 thereon, A probe block 360 for lighting the pads 306 of the organic light emitting display panel 300 and a block stage 360 for mounting the probe block 360 340).

The block stage 340 includes a mounting portion 344 for mounting the probe block 360 and a mounting portion 344 mounting the probe block 360 to move the probe block 360 in the left or right direction And a base plate 346. At this time, the probe block 360 and the pad portion 306 of the organic light emitting display panel 300 are brought into contact with each other to perform the lighting test. When the work stage 320 is raised in the Z-axis direction by raising the work stage 320 in the Z-axis direction in order to perform the lighting test, the block stage 340 is shifted to the left or right direction and the lighting test is performed. When the lighting test is completed, the block stage 340 is shifted leftward or rightward to separate the pad portion 306 and the probe block 360 from each other. Thereafter, the workpiece stage 330 is lowered in the Z-axis direction, and the organic light emitting display panel 300 mounted on the workpiece stage 330 is received and aligned in the cassette.

That is, when the workpiece stage 330 is lowered in the Z-axis direction, the block stage 340 on which the probe block 360 is mounted is shifted to the right or to the left, and then the workpiece stage 330 is moved in the Z- . As described above, since additional driving is required to shift the block stage 340 before the workpiece stage 330 is lowered in the Z-axis direction, there is a problem that the tact time is increased during the inspection process. When the work stage 330 is moved in the Z axis direction without shifting the block stage 340 to the right or left direction, there is a problem that the work stage 330 and the block stage 340 are hit by each other An additional interlock is required to prevent collision between the work stage 330 and the block stage 340. [

An object of the present invention is to provide an auto-probe inspection apparatus and an inspection method therefor which do not require additional interlock while reducing a tact time during a light inspection.

To this end, an automatic probe inspection apparatus according to the present invention comprises a work table for storing and aligning an organic light emitting display panel, a plurality of probe blocks for performing a light inspection by being in contact with a pad portion of the organic light emitting display panel, A plurality of block stages for mounting the block and raising or lowering the probe block in the Z-axis direction so as to contact the pad portion of the organic light emitting display panel; and a plurality of block stages mounted on the Z- And a work stage which is moved up or down in the direction of the arrow.

Here, the plurality of block stages include first through fourth block stages, and the first through fourth block stages are coupled to each of four sides of the work stage.

The work table is mounted on a central portion of the workpiece stage.

The plurality of block stages may include a first support for mounting and arranging the plurality of probe blocks, a second support for fixing and supporting the first support, and a third support vertically coupled to the second support, And a movable holder which is positioned between the third support and the base plate and moves up or down the first to third support bars in the Z axis direction under the control of the motor unit, And a control unit.

The organic light emitting display panel includes a thin film transistor on a lower substrate, a cathode connected to the thin film transistor, a cathode facing the anode, and an organic electroluminescent device formed between the anode and the cathode, The organic electroluminescent device is characterized in that it emits backlight.

A plurality of probe blocks contacting the pads of the organic light emitting display panel to perform a lighting test and a plurality of probe blocks mounted on the probe blocks, A plurality of block stages mounted on the work table and the plurality of block stages and configured to move up and down in the Z axis direction so as to be brought into contact with the pads of the organic light emitting display panel; The method comprising the steps of: placing the organic light emitting display panel on a cassette on a work table positioned on the work stage; and attaching the pad portion of the organic light emitting display panel and the probe block A step of performing a lighting test by electrically connecting the lamp, Pro to the organic light emitting display panel, it characterized in that it comprises the step of depositing and arranged in the cassette.

The step of electrically connecting the pads of the organic light emitting display panel and the probe block and performing the lighting test includes a step of raising the work stage in the Z axis direction by the Z axis stage, The method comprising the steps of: checking the ON / OFF state of the pad portion of the organic light emitting display panel by contacting the pad portion of the organic light emitting display panel with the probe block by lighting up in the Z axis direction by the block stage of the probe block; Axis direction, and the pad portion of the probe block and the organic light emitting display panel are spaced apart from each other, and the work stage is lowered in the Z-axis direction by the Z-axis stage.

The organic light emitting display panel may include a thin film transistor on a lower substrate, a cathode connected to the thin film transistor, a cathode facing the anode, and an organic field formed between the anode and the cathode. And a light emitting element, wherein the organic electroluminescent element emits back light.

The step of placing the organic light emitting display panel on a work table positioned on the work stage may include positioning the organic light emitting display panel on the work table such that the back surface of the lower substrate of the organic light emitting display panel faces upward, And is seated.

The auto-probe inspection apparatus according to the present invention can reduce the tact time in the inspection process by preventing the interference and collision of the block stage when the work stage is moved up or down in the Z axis direction by fastening the block stage to the work stage.

As described above, there is no problem that the work stage collides with the block stage when the work stage rises or falls in the Z-axis direction, so that an additional interlock is not required.

1 is a cross-sectional view of a conventional auto-probe inspection apparatus.
2 is an exploded perspective view illustrating an automatic probe inspection apparatus used in an inspection process according to an embodiment of the present invention.
3 is a perspective view of the automatic probe inspection apparatus shown in FIG.
4 is a cross-sectional view illustrating an organic light emitting display panel according to an embodiment of the present invention.
FIG. 5 is an enlarged view showing a block stage and a probe block of the auto-probe inspection apparatus shown in FIG. 2. FIG.
6 is a cross-sectional view showing the block stage shown in Fig.
7 is a flowchart for explaining an inspection method (steps S1 to S3) of the auto-probe inspection apparatus according to the present invention.
8A is a cross-sectional view of the autoclave inspection apparatus for explaining the step S20 shown in FIG.
FIG. 8B is a cross-sectional view of the auto-probe inspection apparatus for explaining the step S22 shown in FIG.
8C is a cross-sectional view of the auto-probe inspection apparatus for explaining step S24 shown in FIG.
FIG. 8D is a cross-sectional view of the auto-probe inspection apparatus for explaining step S26 shown in FIG.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. The configuration of the present invention and the operation and effect thereof will be clearly understood through the following detailed description. Before describing the present invention in detail, the same components are denoted by the same reference symbols as possible even if they are displayed on different drawings. In the case where it is judged that the gist of the present invention may be blurred to a known configuration, do.

Therefore, a preferred embodiment of the present invention will be described in detail with reference to Figs. 2 to 7D.

FIG. 2 is an exploded perspective view illustrating an automatic probe inspection apparatus used in an inspection process according to an embodiment of the present invention, and FIG. 3 is a perspective view of the automatic probe inspection apparatus shown in FIG. 4 is a cross-sectional view illustrating an organic light emitting display panel according to an embodiment of the present invention. FIG. 5 is an enlarged view showing a block stage and a probe block of the autoclave inspection apparatus shown in FIG. 2, and FIG. 6 is a sectional view of the block stage shown in FIG.

The auto probe inspection apparatus 200 shown in FIGS. 2 and 3 applies an electric signal to a plurality of pads 106 formed on the organic light emitting display panel 100 to form the organic light emitting display panel 100 ) Is lighted. Specifically, after the robot receives and aligns the organic light emitting display panel 100 housed in the cassette on a work stage 120, a signal is applied by a probe of a probe block 160 And it is an apparatus for determining the good or defective product by performing the lighting test of the organic light emitting display panel 100.

To this end, the autoclave inspection apparatus 200 includes a work table 132, a workpiece stage 120, a plurality of block stages 134a to 134d, and a probe block 160.

The work table 132 is placed on the workpiece stage 120 and seats the organic light emitting display panel 100 for lighting inspection. At this time, the lower surface of the lower substrate 102 on which the thin film transistor (TFT) is mounted is disposed on the work table 132 so as to be located on the upper side.

The organic light emitting display panel 100 includes a lower substrate 102 on which a thin film transistor TFT and an organic electroluminescence device connected to the thin film transistor TFT are formed on a lower substrate 102, And an upper substrate 104 joined in an encapsulated form.

The thin film transistor (TFT) includes a buffer film formed on the lower substrate 102, an active layer formed thereon, a gate electrode formed so as to overlap the channel region of the active layer with the gate insulating film interposed therebetween, And source and drain electrodes formed in the source region and the drain region of the active layer through which the p + impurity is implanted through the source contact hole and the drain contact hole penetrating the gate insulating film and the interlayer insulating film and the protective film, respectively, Drain regions.

As such, the active layer of the thin film transistor (TFT) can be used as polysilicon (poly-Si) or amorphous silicon (amorphous silicon).

The organic electroluminescent device includes an anode 112 connected to a drain electrode of a thin film transistor (TFT), an organic layer 114 formed on the anode 112 and including a light emitting layer, a cathode formed on the organic layer 114 116 are provided.

Here, when an electric voltage is applied between the anode 112 and the cathode 116, holes are injected from the cathode 116 and recombined in the light emitting layer, An exciton is generated. As the exciton falls to the ground state, light is emitted to the bottom.

A light emitting layer in which red (R), blue (G), and green (B) are emitted to the light emitting layer 114 of the organic electroluminescent device as shown in FIG. 4, , Blue and green can be emitted.

In this way, the organic light emitting display panel 100 is disposed on the work table 132 so that the light emitting direction of the organic light emitting display panel 100 faces upward.

The work stage 120 includes a work table 132 on which the organic light emitting display panel 100 is mounted and a block stage on which a probe block 160 is coupled 134a to 134d are mounted, and they are raised or lowered in the Z-axis direction.

Specifically, for lighting inspection of the organic light emitting display panel 100 mounted on the workpiece stage 120, it is ascended in the Z-axis direction under the control of the Z-axis stage 134 to perform the lighting test. After the lighting test, the workpiece stage 120 is lowered in the Z-axis direction under the control of the Z-axis stage 134, and the organic light emitting display panel 100 is stored and aligned in the cassette through the robot. At this time, the work table 132 and the block stages 134a to 134d are mounted on the workpiece stage 120 to move along the workpiece stage 120 when the workpiece stage 120 is raised or lowered in the Z-axis direction.

A work table 132 on which the organic light emitting display panel 100 is mounted is positioned at the central portion 122 of the workpiece stage 120 and the first to fourth side surfaces 124a to 124d of the workpiece stage 120 The first to fourth block stages 134a to 134d are located.

A first block stage 134a is coupled to the first side 124a of the workpiece stage 120 and a second block stage 134b is coupled to the second side 124b of the workpiece stage 120, A third block stage 134c is coupled to the third side face 124c of the workpiece stage 120 and a fourth block stage 134d is coupled to the fourth side face 124d of the workpiece stage 120. [

The plurality of block stages includes the first to fourth block stages 134a to 134d and the probe block 160 is mounted so that the probe block 160 is connected to the pad portion 106 of the organic light emitting display panel 100 It moves up or down in the Z-axis direction so that it can be contacted.

Each of the first through fourth block stages 134a through 134d includes a first support 140 for mounting and arranging a plurality of probe blocks 160 and a second support 140 for fixing and supporting the first support 140. [ A third support 144 coupled to be perpendicular to the second support 142, a base plate 148 coupled and secured in parallel with the third support 144, and a second support 144 And a movement holder 146 which is positioned between the base plate 148 and the base plate 148 and moves up or down the first to third support rods 140, 142 and 144 in the Z-axis direction under the control of the motor unit 149.

The first support part 140 includes a first seating part 140a and a second seating part 140b positioned on different planes and the first seating part 140a includes a plurality of probe blocks 160 arranged And the second seat portion 140b is engaged with the second support frame 142. [

The second support member 142 is coupled to the first support member 140 and the second support member 142 at a plane portion thereof and is hinged perpendicularly to the third support member 144 at both ends of the edge of the second support member 142 And are fastened together by screws.

The third support 144 is positioned to face the plane portion of the base plate 148 with the movement holder 146 therebetween, and is engaged with the movement holder 146.

The flat portion of the base plate 148 is formed facing the flat portion of the third support 144 and the lower side of the base plate 148 is connected to the first to fourth sides 124a to 124d of the workpiece 120 And are fixedly coupled with screws. A plurality of motor units 149 for controlling the movement holder 146 are mounted on the rear surface of the base plate 148 to move the first to third support rods 140, 142 and 144 in the Z-axis direction.

The model of the probe block 160 may be changed according to the size or type of the organic light emitting display panel 100. The probe block 160 may be easily attached and detached on the block stages 134a to 134d by changing only the model of the probe block 160 .

A plurality of probe blocks 160 are arranged in each of the first to fourth block stages 134a to 134d and connected to the pad portion 106 of the organic light emitting display panel 100 to perform a lighting test. The probe block 160 includes a plurality of probe needles 162 and a probe support portion 166 for supporting the probe head 164 and the probe head 166 from which the probe needle 162 is drawn.

7 is a flowchart for explaining an inspection method (steps S1 to S3) of the automatic probe inspection apparatus according to the present invention. 8A is a cross-sectional view of the autoclave inspection apparatus for explaining step S20 shown in FIG. 7, FIG. 8B is a sectional view of the autoclave inspection apparatus for explaining step S22 shown in FIG. 7, and FIG. FIG. 8D is a cross-sectional view of the auto-probe inspection apparatus for explaining step S26 shown in FIG. 7. FIG.

First, the organic electroluminescence display panel 100 housed in the cassette is placed on a work table on the workpiece stage 120. Step S1: Since the organic electroluminescence display panel 100 emits backlight, The panel 100 is turned upside down so that the back surface of the panel 102 faces upward and is placed on the work table 120. Accordingly, the lower substrate 102 on which the thin film transistor TFT is formed faces upward, and the upper substrate 104 is positioned adjacent to the work table 132.

Then, the pad portion 106 of the organic light emitting display panel 100 is electrically connected to the probe block 160 to perform a lighting test (Step S2). This will be described with reference to FIGS. 7A to 7D do.

For this purpose, the lighting inspection method using the auto-probe inspection apparatus 200 includes a step (S20) of rising the workpiece stage 120 in the Z-axis direction by the Z-axis stage 134 and a step (S22) that the pad portion 106 of the organic light emitting display panel 100 and the probe block 160 are brought into contact with each other by being illuminated in the Z axis direction by the block stages 134a to 134d After the inspection, the probe block 160 is lowered in the Z-axis direction by the plurality of block stages 134a to 134d so that the probe block 160 and the pad portions 106 of the organic light emitting display panel 100 are separated from each other And a step in which the workpiece stage 120 is lowered in the Z-axis direction by the Z-axis stage 134 (step S26).

At this time, the probe block 160 is raised in the Z-axis direction by the plurality of block stages 134a to 134d, so that the pad portion 106 of the organic light emitting display panel 100 is in contact with the probe block 160, A plurality of motors 149 raise the moving holder 146 in the Z axis direction so that the first to third supporting rods 140, 142 and 144 coupled with the moving holder 146 move in the Z axis direction . And the probe block 160 raised in the Z-axis direction is connected to the pad portion 106 of the organic light emitting display panel 100.

The probe block 160 is lowered in the Z axis direction by the plurality of block stages 134a to 134d so that the probe block 160 and the pad portions 106 of the organic light emitting display panel 100 are separated from each other A plurality of motors 149 lower the moving holder 146 in the Z axis direction so that the first to third supporting rods 140, 142 and 144 coupled with the moving holder 146 descend in the Z axis direction . The probe block 160 lowered in the Z axis direction is separated from the pad portion 106 of the organic light emitting display panel 100.

When the workpiece stage 120 is lowered in the Z-axis direction, the workpiece stage 120 on which the organic light emitting display panel 100 is placed is lowered in the Z- The work table 132 coupled to the stage 120 and the plurality of block stages 134a to 134d simultaneously descend in the Z-axis direction.

In this manner, the work table 132 and the plurality of block stages 134a to 134d move simultaneously according to the moving direction of the workpiece 120, thereby reducing the tact time. More specifically, the auto-probe inspection apparatus 200 according to the present invention inspects the block stages 134a to 134d on the workpiece stage 120, thereby detecting the movement of the workpiece stage 120 in the Z- To 134d do not occur and the Tact Time can be reduced.

1, when the conventional work stage 330 moves downward in the Z-axis direction, the block stage 340 on which the probe block 360 is mounted is shifted to the right or left direction, and then the work stage 330 ) In the Z-axis direction. That is, a problem arises that the tact time is increased because additional driving is required to move the block stage 340. If the work stage 330 is moved in the Z axis direction without shifting the block stage 340 to the right or left direction, there is a problem that the work stage 330 and the block stage 340 are hit with each other An additional interlock was required to prevent collision between the work stage 330 and the block stage 340.

However, since the block stages 134a to 134d according to the present invention are fastened on the workpiece stage 120, when the workpiece stage 120 is moved up or down in the Z-axis direction, the block stages 134a to 134d are moved in the same direction The block stages 134a to 134d need not be shifted rightward or leftward, so that the Tact Time is reduced, and there is no problem of collision with the block stage, so that no additional interlock is required.

Finally, the robot captures and aligns the organic light emitting display panel 100 seated on the workpiece stage 120 (step S3)

The foregoing description is merely illustrative of the present invention, and various modifications may be made by those skilled in the art without departing from the spirit of the present invention. Accordingly, the embodiments disclosed in the specification of the present invention are not intended to limit the present invention. The scope of the present invention should be construed according to the following claims, and all the techniques within the scope of equivalents should be construed as being included in the scope of the present invention.

100: organic electroluminescent display panel 106: pad portion
120: workpiece stage 122: central portion of the workpiece stage
124a, 124b, 124c, and 124d: first to fourth sides of the workpiece stage
132: work table 134: Z-axis stage
134a, 132b, 134c and 134d: first to fourth block stages
140: first support frame 142: second support frame
144: third support plate 146: movement holder
148: base plate 149: motor
160: Probe block

Claims (9)

A work table for storing and aligning the organic light emitting display panel;
A plurality of probe blocks contacting the pads of the organic light emitting display panel to perform a lighting test;
A plurality of block stages for mounting the probe block and raising or lowering the probe block in the Z-axis direction so as to contact the pad portion of the organic light emitting display panel;
And a work stage on which the work table and the plurality of block stages are mounted and which is raised or lowered in the Z axis direction,
The plurality of block stages may include a first support for mounting and arranging the plurality of probe blocks; A second support for fixing and supporting the first support; A third support vertically coupled to the second support; A base plate coupled and fixed in parallel with the third support; And a movement holder which is positioned between the third support and the base plate and moves up or down the first to third support rods in the Z-axis direction under the control of the motor part. The method according to claim 1,
The plurality of block stages including first through fourth block stages,
And the first to fourth block stages are coupled to each of four sides of the workpiece stage. The method according to claim 1,
And the work table is mounted on the center of the workpiece stage. delete The method according to claim 1,
The organic light emitting display panel
A thin film transistor on the lower substrate;
An anode connected to the thin film transistor, a cathode facing the anode, and an organic electroluminescent device formed between the anode and the cathode,
Wherein the organic electroluminescent element emits backlight. A plurality of probe blocks which are brought into contact with the pads of the organic light emitting display panel to perform a lighting test; and the probe blocks are mounted so that the probe blocks are connected to the organic light emitting display A plurality of block stages for raising or lowering in the Z-axis direction so as to be in contact with the pad portions of the panel, and a plurality of block stages mounted on the work table and the plurality of block stages, A method for inspecting a probe inspection apparatus,
Placing the organic light emitting display panel in a cassette on a work table positioned on the work stage;
Electrically connecting the pad portion of the organic light emitting display panel and the probe block to perform a lighting test;
And storing and aligning the organic light emitting display panel that has undergone the lighting test with the cassette,
The plurality of block stages may include a first support for mounting and arranging the plurality of probe blocks, a second support for fixing and supporting the first support, a third support vertically coupled to the second support, A base plate coupled and fixed in parallel with the third support; and a movement holder positioned between the third support and the base plate such that the movement holder moves the first to third supports up or down in the Z-axis direction Wherein the control unit is controlled through a motor unit. The method according to claim 6,
The step of electrically connecting the pads of the organic light emitting display panel to the probe block and performing the lighting test
A step in which the workpiece stage is elevated in the Z-axis direction by the Z-axis stage;
The probe block is brought into contact with the pad portion of the organic light emitting display panel in a Z-axis direction by the plurality of block stages so that the probe block is illuminated;
The probe block is lowered in the Z-axis direction by the plurality of block stages so that the probe blocks and the pad portions of the organic light emitting display panel are separated from each other;
And the work stage is lowered in the Z-axis direction by the Z-axis stage. The method according to claim 6,
The organic light emitting display panel
The organic light emitting display panel
A thin film transistor on the lower substrate;
An anode connected to the thin film transistor, a cathode facing the anode, and an organic electroluminescent device formed between the anode and the cathode,
Wherein the organic electroluminescent device emits back light. The method according to claim 6,
Placing the organic light emitting display panel in a cassette on a work table positioned on the work stage
Wherein the organic light emitting display panel is seated on the work table such that a lower surface of the lower substrate of the organic light emitting display panel faces upward.

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