KR101852365B1 - 브러쉬 세정 장치 및 그 제어방법 - Google Patents

브러쉬 세정 장치 및 그 제어방법 Download PDF

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Publication number
KR101852365B1
KR101852365B1 KR1020160072952A KR20160072952A KR101852365B1 KR 101852365 B1 KR101852365 B1 KR 101852365B1 KR 1020160072952 A KR1020160072952 A KR 1020160072952A KR 20160072952 A KR20160072952 A KR 20160072952A KR 101852365 B1 KR101852365 B1 KR 101852365B1
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KR
South Korea
Prior art keywords
brush
substrate
module
contact
cleaning
Prior art date
Application number
KR1020160072952A
Other languages
English (en)
Korean (ko)
Other versions
KR20170140540A (ko
Inventor
안준호
이승환
Original Assignee
주식회사 케이씨텍
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 케이씨텍 filed Critical 주식회사 케이씨텍
Priority to KR1020160072952A priority Critical patent/KR101852365B1/ko
Priority to CN201621252510.9U priority patent/CN206253383U/zh
Publication of KR20170140540A publication Critical patent/KR20170140540A/ko
Application granted granted Critical
Publication of KR101852365B1 publication Critical patent/KR101852365B1/ko

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    • A—HUMAN NECESSITIES
    • A46—BRUSHWARE
    • A46B—BRUSHES
    • A46B15/00—Other brushes; Brushes with additional arrangements
    • A46B15/0002—Arrangements for enhancing monitoring or controlling the brushing process
    • A46B15/0004—Arrangements for enhancing monitoring or controlling the brushing process with a controlling means
    • A46B15/0012—Arrangements for enhancing monitoring or controlling the brushing process with a controlling means with a pressure controlling device
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools, brushes, or analogous members
    • B08B1/04—Cleaning by methods involving the use of tools, brushes, or analogous members using rotary operative members
    • B08B1/32—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
KR1020160072952A 2016-06-13 2016-06-13 브러쉬 세정 장치 및 그 제어방법 KR101852365B1 (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020160072952A KR101852365B1 (ko) 2016-06-13 2016-06-13 브러쉬 세정 장치 및 그 제어방법
CN201621252510.9U CN206253383U (zh) 2016-06-13 2016-11-22 刷式清洗装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020160072952A KR101852365B1 (ko) 2016-06-13 2016-06-13 브러쉬 세정 장치 및 그 제어방법

Publications (2)

Publication Number Publication Date
KR20170140540A KR20170140540A (ko) 2017-12-21
KR101852365B1 true KR101852365B1 (ko) 2018-04-26

Family

ID=59025134

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020160072952A KR101852365B1 (ko) 2016-06-13 2016-06-13 브러쉬 세정 장치 및 그 제어방법

Country Status (2)

Country Link
KR (1) KR101852365B1 (zh)
CN (1) CN206253383U (zh)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107442538A (zh) * 2017-08-17 2017-12-08 京东方科技集团股份有限公司 清洗装置及清洗方法
CN107891617A (zh) * 2017-10-25 2018-04-10 佛山杰致信息科技有限公司 一种胶黏化纤布生产装置
CN109832637A (zh) * 2017-11-28 2019-06-04 中山市隆昶兴厨房设备有限公司 一种节能消毒洗菜机
KR102279523B1 (ko) * 2018-01-30 2021-07-20 주식회사 케이씨텍 브러쉬 세정 장치
CN110340040A (zh) * 2018-04-04 2019-10-18 深圳御烟实业有限公司 一种用于清洁电加热烟具的工具
CN108630588A (zh) * 2018-05-30 2018-10-09 睿力集成电路有限公司 化学机械研磨后晶圆清洗方法及系统
KR102182779B1 (ko) * 2018-12-18 2020-11-25 주식회사 포스코 강판의 산세장치
CN110239133B (zh) * 2019-07-02 2021-01-15 郑益隆 一种垃圾处理装置
CN110479659A (zh) * 2019-07-02 2019-11-22 深圳市友利特精密机械制造有限公司 清洁装置
CN110761229B (zh) * 2019-10-17 2021-11-23 山东易斯特工程工具有限公司 一种鹅卵石路扫路机

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101151651B1 (ko) 2011-02-14 2012-06-08 한국생산기술연구원 웨이퍼 세정장치의 브러쉬 교환시기 감시장치와 그것이 설치된 웨이퍼 세정장치
KR101388502B1 (ko) 2012-06-13 2014-04-29 주식회사 케이씨텍 접촉식 세정모듈의 압력감지장치

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101151651B1 (ko) 2011-02-14 2012-06-08 한국생산기술연구원 웨이퍼 세정장치의 브러쉬 교환시기 감시장치와 그것이 설치된 웨이퍼 세정장치
KR101388502B1 (ko) 2012-06-13 2014-04-29 주식회사 케이씨텍 접촉식 세정모듈의 압력감지장치

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Publication number Publication date
KR20170140540A (ko) 2017-12-21
CN206253383U (zh) 2017-06-16

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