KR101839999B1 - Deposition material detecting device having improved service life - Google Patents

Abstract

The present invention relates to a deposition material detection device with increased use life, which measures the amount of deposition materials evaporated in a crucible disposed in a chamber. The deposition material detection device comprises: a housing; a rotation plate; and a sensor unit. The housing is provided with a through-groove which is separated from a substrate on which deposition materials are deposited and through which deposition materials flow in. The rotation plate is disposed to face one surface of the housing provided with the through-groove in the housing and is installed to rotate about the housing. The sensor unit includes a plurality of detection sensors which are arranged at predetermined intervals along a virtual first circle having a first radius on the basis of the rotation axis of the rotation plate, and a plurality of second detection sensors which are arranged at predetermined intervals along a virtual second circle having a second radius smaller than the first radius and being concentric with the virtual first circle. The first detection sensors and second detection sensors are alternately exposed by the through-groove in accordance with the rotation of the rotation plate. The first detection sensors and second detection sensors are not disposed together on a virtual extension line extending from the rotation axis of the rotation plate in the radial direction.

Description

[0001] The present invention relates to a deposition material detecting device having improved service life,

The present invention relates to a deposition material sensing device having an improved service life, and more particularly, to a deposition material sensing device having an improved life span for measuring the amount of evaporation material evaporated in a crucible disposed in a chamber.

In general, a deposition apparatus for depositing a thin film is used to manufacture a substrate such as a semiconductor, an OLED, and a CIGS (solar panel). The deposition equipment is mainly a thermal evaporation system. The vacuum thermal deposition apparatus is provided with a deposition space at an upper portion of a chamber, a crucible for providing an evaporation material at a lower portion thereof, and a heating device for evaporating the evaporation material by heating the crucible. Particularly, in order to calculate the thickness of the thin film deposited on the substrate, a deposition material sensing device for measuring the evaporation amount of the evaporation material vaporized in the crucible is provided in the chamber.

A conventional evaporation material sensing apparatus generally comprises a rotatable disk-shaped rotary plate rotatably installed in a housing having a front surface opened, a plurality of sensors capable of measuring the amount of evaporation material are circularly arranged on a rotary plate, And a cover having a through-hole formed in the front thereof.

In a conventional evaporation material sensing device, one of a plurality of sensors is disposed in a through groove and exposed to the outside to measure the amount of evaporation material reaching the sensor. When the life of the sensor is reached, the rotation plate is rotated at a predetermined angle, So that the amount of the evaporation material is continuously measured.

If the number of sensors is 12 and the lifetime of one sensor is 10 hours, the amount of deposited material can be measured continuously for a total of 120 hours. Therefore, as the number of sensors increases, the amount of time for continuously measuring the amount of the deposition material increases.

However, as the number of sensors increases, the area of the turntable must be increased in proportion to the number of sensors, and the overall size of the evaporation material sensing device in which the turntable is installed must be increased. Measurement time) is limited.

Korean Patent Publication No. 10-2014-0105670 (titled "Organic Thin Film Thickness Measuring Unit and Organic Thin Film Deposition Apparatus Including the Same"),

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a deposition material sensing apparatus with improved service life, which can mount more sensors within a limited area while maintaining measurement accuracy as it is .

According to an aspect of the present invention, there is provided an apparatus for detecting a deposited material having an improved service life, the apparatus comprising: a housing having a through groove through which a deposition material is introduced, the substrate being spaced apart from a substrate on which a deposition material is deposited; A rotating plate disposed to face the one surface of the housing formed with the through-hole in the housing and rotatably installed on the housing; A plurality of first sensing sensors arranged at regular intervals along a virtual first circle having a first radius with respect to a rotation axis of the rotary plate; and a second radius sensor having a second radius smaller than the first radius, And a plurality of second sensing sensors arranged at predetermined intervals along a second imaginary circle forming a concentric circle, wherein as the rotation plate is rotated, the first sensing sensor and the second sensing sensor are alternately And the first sensing sensor and the second sensing sensor are not disposed together on an imaginary extension line extending in the radial direction of the rotary shaft of the rotary plate.

In the deposition material sensing apparatus with improved service life according to the present invention, the penetration groove may include a first penetrating groove disposed on a circumference of the imaginary first circle to expose the first sensing sensor to the outside, And a second through groove that is disposed on the circumference of the second circle of the second sensing sensor and exposes the second sensing sensor to the outside.

In the deposition material sensing apparatus with improved service life according to the present invention, the first penetration groove and the second penetration groove may be disposed together on the virtual extension line.

In the deposition material sensing apparatus with improved service life according to the present invention, the first through-hole and the second through-hole are formed on the basis of a virtual orientation line connecting the lower center and the upper center of the crucible to which the evaporation material is supplied And can be disposed symmetrically with respect to each other.

In the deposition material sensing apparatus with improved service life according to the present invention, the through-hole is formed in a shape of an elongated hole extending toward the rotation axis of the rotary plate, and intersecting the imaginary first circle and the imaginary second circle .

A deposition material sensing apparatus with improved service life according to the present invention is characterized in that it is disposed between the rotating plate and the back surface of the housing so as to face the through groove and is capable of contacting with the first sensing sensor on the circumference of the imaginary first circle And a contact portion having a first contact provided to the second sensor and a second contact provided to be able to contact the second sensor on the circumference of the virtual second circle, 1 detection sensor and the second detection sensor may be alternately brought into contact with the contact portion.

According to the deposition material sensing device of the present invention having an improved service life, it is possible to improve the service life of the sensor part by mounting more sensors on a limited area, minimize the interruption of the deposition process due to replacement of the sensor part, Therefore, the equipment utilization rate can be improved.

In addition, according to the deposition material sensing apparatus of the present invention having an improved service life, it is possible to minimize the influence of the deposition material on the sensor disposed around the through-hole.

In addition, according to the deposition material sensing apparatus of the present invention, the reliability of the sensing sensor can be maintained regardless of which of the first and second sensing sensors is exposed to the deposition material.

In addition, according to the deposition material sensing apparatus of the present invention having improved service life, it is possible to simplify the structure of the contact portion for power supply to the sensor unit and signal transmission.

FIG. 1 is a front view schematically showing a deposition material sensing apparatus having an improved service life according to an embodiment of the present invention,
FIG. 2 is a view showing a rotating process of the rotating plate constructed in the deposition material sensing apparatus with improved service life in FIG. 1,
FIG. 3 is a view showing a modification of the through-hole formed in the deposition material sensing apparatus of FIG. 1 having improved service life,
FIG. 4 is a view for explaining a position where a deposition material sensing apparatus with improved service life shown in FIG. 1 is disposed,
FIG. 5 is a view for explaining a coupling relation between a sensor part and a contact part constructed in the evaporation material sensing device with improved service life in FIG. 1,
FIG. 6 is a view showing that the first sensing sensor and the second sensing sensor constructed in the deposition material sensing device with improved service life of FIG. 1 alternately contact with the contact portion.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment of a deposition material sensing apparatus with improved service life according to the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a front view schematically showing a deposition material sensing apparatus with an improved service life according to an embodiment of the present invention, and FIG. 2 is a view illustrating a rotating process of a spinning plate constructed in the deposition material sensing apparatus with improved service life shown in FIG. FIG. 3 is a view showing a modification of the through groove formed in the vapor deposition material sensing apparatus of FIG. 1 having improved service life, and FIG. 4 is a view showing a position where the vapor deposition material sensing apparatus with improved service life shown in FIG. And FIG. 5 is a view for explaining the coupling relationship between the sensor unit and the contact unit constructed in the deposition material sensing apparatus with improved service life of FIG. 1, and FIG. 6 is a view And the first sensing sensor and the second sensing sensor are alternately in contact with the contact portion.

Referring to FIGS. 1 to 6, the apparatus for detecting a deposited material having an improved service life according to the present embodiment is an apparatus for measuring the amount of evaporation material M evaporated in a crucible D (see FIG. 4) disposed in a chamber A housing 100, a rotary plate 200, and a sensor unit 300.

1 or 4, the housing 100 includes a through-hole 110 through which a deposition material M flows in a space (not shown) on which a deposition material M is deposited. The housing 100 is made of a metallic material having low reactivity of the evaporation material M and resistant to heat.

The through groove 110 is formed in a shape corresponding to the first sensing sensor 310 or the second sensing sensor 320 described later. The size of the penetration groove 110 is larger than the size of the detection sensor so that a sufficient amount of the evaporation material M can reach the sensor. It is preferable that the size of the deposition material M is smaller than the size of the detection sensor so that the influence of the evaporation material M introduced into the deposition chamber 110 is not noticeable.

The rotary plate 200 is disposed to face the one surface 100a of the housing 100 in which the through hole 110 is formed in the housing 100 and is rotatably installed with respect to the housing 100. [ The center of the rotating plate 200 is coupled to the rotational driving unit 30 via the rotational axis X and the rotating plate 200 is rotated by the rotational driving force of the rotational driving unit 30 Cycle.

The sensor unit 300 includes a plurality of first sensing sensors (not shown) arranged at regular intervals along a virtual first circle (not shown) having a first radius R1 with respect to the rotation axis X of the rotary plate 200 (Not shown) having a second radius (R2) smaller than the first radius (R1) and arranged on a virtual second circle (not shown) concentric with the imaginary first circle The first sensor 310 and the second sensor 320 are alternately exposed through the through hole 110 as the rotary plate 200 is rotated.

2, the first sensing sensor 310 and the second sensing sensor 320 are disposed on an imaginary extension line L1 extending in the radial direction from the rotation axis X of the rotary plate 200, It is not deployed.

The sensing sensor is a conventional quartz crystal microbalance (QCM) sensor. The built-in modifier vibrates at a certain frequency due to the piezoelectric effect. As the deposition material M is deposited thereon, And the deposition rate and the deposition thickness of the deposition material M are measured through such frequency variation.

Each sensing sensor generally rotates the turntable 200 to expose a new sensing sensor to the deposition material when the life of one sensing sensor has expired.

In the present invention, the sensing sensors are arranged in two rows along two imaginary circles having different radii, and the second sensing sensor 320 is disposed between a pair of neighboring first sensing sensors 310. In this embodiment, the through-hole 110 is formed at 6 o'clock around the rotation axis X of the rotary plate 200, and the first sensing sensor 310 and the second sensing sensor 320 form two virtual circles Each of them is provided with eight.

When the life of the first sensing sensor 310 arranged at 6 o'clock is completed and the rotary plate 200 is rotated clockwise by 22.5 degrees, the first sensing sensor 310 arranged at 6 o'clock moves to 7 o'clock And the second sensing sensor 320 positioned at the 5 o'clock position is moved in the 6 o'clock direction, whereby the amount of the evaporation material M can be continuously measured.

If a total of 16 detection sensors arranged in two rows are arranged in a line along a single circle, the area of the rotary plate 200 must be increased in proportion to the number of detection sensors, or the interval between the detection sensors must be reduced.

When the area of the rotary plate 200 is increased, the overall size of the evaporation material sensing device including the housing 100 accommodating the rotary plate 200 is increased, which increases the manufacturing burden.

When the distance between the sensing sensors is reduced, the evaporation material M flowing into the through-hole 110 does not reach only one sensing sensor disposed in the through-hole 110 but may affect the neighboring sensing sensor Therefore, the measurement reliability and life of the detection sensor may be deteriorated.

In contrast, in the deposition material sensing apparatus of the present invention having improved service life, the first sensor 310 and the second sensor 320 are arranged along two imaginary circles, so that more sensors can be mounted within a limited area By disposing the first sensing sensor 310 and the second sensing sensor 320 in a zigzag shape, the gap between the sensing sensors can be sufficiently maintained, thereby solving all the problems described above.

As described above, according to the present invention, since the size of the deposition material sensing device can be maintained as it is while the number of the sensing sensors mounted on the sensor can be doubled, the service life of the sensor part 300 can be extended correspondingly, Since the extension means the extension of the replacement period of the sensor unit 300, it is possible to minimize the interruption of the deposition process due to the replacement of the sensor unit 300 (stop the deposition process and open the chamber to replace the sensor unit) , Which can also improve the equipment utilization rate.

3, the through-hole 110 may be formed into a long hole extending toward the rotation axis X of the rotary plate 200, and may be formed so as to intersect the imaginary first circle and the imaginary second circle, As shown in FIG. 1, the through-hole 110 is formed on the circumference of a virtual first circle and has a first through-hole 111 for exposing the first sensing sensor 310 to the outside, And second through grooves 112 disposed on the circumference to expose the second sensing sensor 320 to the outside.

This is because it is advantageous in terms of the service life of the sensor to reduce the amount of the evaporation material flowing into the penetration groove 110 by minimizing the area of the penetration groove 110.

Here, the first through grooves 111 and the second through grooves 112 are disposed together on the imaginary extension line L1.

As shown in FIG. 4, the evaporation material M evaporated in the crucible D is reduced in concentration at a certain rate as the concentration of the evaporation material M arriving at the through-hole increases as the distance from the imaginary line L2 increases The first through grooves 111 and the second through grooves 112 are formed in a virtual imaginary line L2 connecting the lower center O1 of the crucible D to which the deposition material M is supplied and the upper center O2, It is preferable to arrange them so as to be symmetrical with respect to each other to suppress factors that may cause a difference in the measured values of the first sensing sensor 310 and the second sensing sensor 320.

This is to prevent the amount of the evaporation material measured by the sensing sensor from varying depending on the position where the sensing sensor is exposed while the first sensing sensor 310 and the second sensing sensor 320 are alternately exposed at different positions .

If the first through grooves 111 are disposed closer to the imaginary line L2 than the second through grooves 112, the amount of the evaporation material M reaching the first through grooves 111 The amount of the evaporation material M reaching the second through groove 112 can not be reduced. When the life of the first sensing sensor 310 exposed in the first through groove 111 is reached and the second sensing sensor 320 is exposed to the second through groove 112, the measurement of the second sensing sensor 320 Value is relatively smaller than the measurement value of the first sensing sensor 310. [ That is, the measurement value varies depending on which of the first and second detection sensors 310 and 320 is exposed to the deposition material M. If the measurement reliability of the detection sensor is low, it becomes difficult to accurately control the evaporation amount of the evaporation material.

Meanwhile, the deposition material sensing apparatus with improved life span of the present invention may further include the contact unit 400.

4 to 6, the contact part 400 is disposed to face the through hole 110 between the rotary plate 200 and the back surface 100b of the housing 100, A first contact 410 provided to be in contact with the first sensing sensor 310 on the circumference of the second circle and a second contact 420 provided to be able to contact the second sensing sensor 320 on the circumference of the imaginary second circle, Respectively. The first sensing sensor 310 and the second sensing sensor 320 are alternately brought into contact with the contact portion 400 as the rotary plate 200 is rotated.

6, when the first sensing sensor 310 contacts the first contact 410 and the rotary plate 200 is rotated 22.5 degrees, the first sensing sensor 310 contacts the first contact 410 And the second sensing sensor 320 contacts the second contact 420 so that the first sensing sensor 310 and the second sensing sensor 320 are alternately connected to the contact portion 400, (40), and transmits the measurement value measured by the sensor to the controller (40).

The apparatus for detecting a deposited material having an improved service life according to the present invention configured as described above is characterized in that a first sensor and a second sensor are disposed along two imaginary circles to mount more sensors within a limited area, It is possible to minimize the interruption of the deposition process and thus to improve the equipment operation rate.

In addition, in the deposition material sensing apparatus of the present invention having the above-described configuration, the first sensor and the second sensor are disposed in a staggered arrangement to sufficiently maintain a gap between the sensors, It is possible to minimize the influence of the deposited material on the detection sensor.

The deposition material sensing device of the present invention having the above-described structure is configured such that the first through-hole and the second through-hole are arranged symmetrically with respect to a virtual orientation line connecting the lower center and the upper center of the crucible Thus, it is possible to maintain the measurement reliability of the sensing sensor as it is regardless of which of the first and second sensing sensors is exposed to the deposition material.

Further, in the deposition material sensing apparatus of the present invention having the improved life span as described above, the first sensing sensor and the second sensing sensor are alternately brought into contact with the contact portion as the rotary plate is rotated, It is possible to simplify the structure of the contact portion for the contact portion.

The scope of the present invention is not limited to the above-described embodiments and modifications, but can be implemented in various forms of embodiments within the scope of the appended claims. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present invention as defined by the appended claims.

100: Housing
200: Spindle
300:
400:
D: Crucible
M: deposition material

Claims (6)

A housing having a through groove through which the evaporation material flows, separated from the substrate on which the evaporation material is deposited;
A rotating plate disposed to face the one surface of the housing formed with the through-hole in the housing and rotatably installed on the housing;
A plurality of first sensing sensors arranged at regular intervals along a virtual first circle having a first radius with respect to a rotation axis of the rotary plate; and a second radius sensor having a second radius smaller than the first radius, And a plurality of second sensing sensors arranged at predetermined intervals along a second imaginary circle forming a concentric circle, wherein as the rotation plate is rotated, the first sensing sensor and the second sensing sensor are alternately And an exposed sensor unit,
The first sensing sensor and the second sensing sensor are not disposed together on an imaginary extension line extending in the radial direction from the rotation axis of the rotary plate,
The through-hole includes a first through-hole disposed on a circumference of the imaginary first circle to expose the first sensing sensor to the outside, and a second through-hole disposed on a circumference of the imaginary second circle, And a second through-hole for exposing the deposition material to the outside. delete The method according to claim 1,
Wherein the first penetrating groove and the second penetrating groove are disposed together on the imaginary extension line. The method according to claim 1,
Wherein the first through-hole and the second through-hole are symmetrically arranged with respect to a virtual line that connects a lower center and an upper center of a crucible to which the evaporation material is supplied. Sensing device. The method according to claim 1,
Wherein the through hole is formed in a shape of an elongated hole extending toward a rotation axis of the rotating plate and is formed to intersect the imaginary first circle and the imaginary second circle. The method according to claim 1,
A first contact disposed between the rotating plate and a bottom surface of the housing so as to face the through groove and capable of contacting the first sensor on the circumference of the imaginary first circle, Further comprising a contact portion having a second contact which is provided so as to be able to contact with the second sensing sensor on the first contact,
Wherein the first sensing sensor and the second sensing sensor are alternately in contact with the contact portion as the rotating plate is rotated.

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