KR101826191B1 - Curvature of both sides surface and refractive index profile simultaneous measurement equipment and method of the lens - Google Patents

Curvature of both sides surface and refractive index profile simultaneous measurement equipment and method of the lens Download PDF

Info

Publication number
KR101826191B1
KR101826191B1 KR1020150188241A KR20150188241A KR101826191B1 KR 101826191 B1 KR101826191 B1 KR 101826191B1 KR 1020150188241 A KR1020150188241 A KR 1020150188241A KR 20150188241 A KR20150188241 A KR 20150188241A KR 101826191 B1 KR101826191 B1 KR 101826191B1
Authority
KR
South Korea
Prior art keywords
lens
refractive index
wavelength
curvature
light
Prior art date
Application number
KR1020150188241A
Other languages
Korean (ko)
Other versions
KR20170078084A (en
Inventor
김정호
유영훈
신상훈
음명진
이호동
김민욱
Original Assignee
주식회사 케이피에스
신상훈
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 케이피에스, 신상훈 filed Critical 주식회사 케이피에스
Priority to KR1020150188241A priority Critical patent/KR101826191B1/en
Publication of KR20170078084A publication Critical patent/KR20170078084A/en
Application granted granted Critical
Publication of KR101826191B1 publication Critical patent/KR101826191B1/en

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/255—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring radius of curvature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0228—Testing optical properties by measuring refractive power
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/025—Testing optical properties by measuring geometrical properties or aberrations by determining the shape of the object to be tested
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/4133—Refractometers, e.g. differential
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F17/00—Digital computing or data processing equipment or methods, specially adapted for specific functions
    • G06F17/10—Complex mathematical operations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0636—Reflectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0638—Refractive parts

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mathematical Physics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Geometry (AREA)
  • Theoretical Computer Science (AREA)
  • Data Mining & Analysis (AREA)
  • Algebra (AREA)
  • Mathematical Optimization (AREA)
  • Mathematical Analysis (AREA)
  • Pure & Applied Mathematics (AREA)
  • Databases & Information Systems (AREA)
  • Software Systems (AREA)
  • General Engineering & Computer Science (AREA)
  • Computational Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

According to the present invention, when a lens having a first curvature surface and a second curvature surface with opposite sides facing each other is an object to be inspected, both side surfaces of the lens are arranged to be in contact with liquids having different refractive indices, The second light of the second wavelength, and the third light of the third wavelength, respectively, based on the first light path difference, the second light path difference, and the third light path difference, A curvature function of a curvature surface and a refractive index along a third wavelength of the lens and an average refractive index along a third wavelength are used to measure the refractive index distribution of the lens, .
A method of simultaneously measuring the curvature shape of both surfaces and the refractive index profile of a lens according to the present invention is a method of simultaneously measuring a curvature shape of a lens and a refractive index distribution of a lens having a first wavelength, a second wavelength, Irradiating the third light through the first liquid with the lens to obtain a first light path difference, a second light path difference, and a third light path difference of different positions relative to the optical axis path of the lens, Acquiring step; Calculating a curvature function of the first curvature surface and a curvature function of the second curvature surface using the first optical path difference, the second optical path difference, and the third optical path difference; And calculating a refractive index distribution of the lens using the third optical path difference, the curvature function of the first curvature surface, and the curvature function of the second curvature surface, wherein the curvature function calculation In the step, the curvature function of the first curvature surface and the curvature function of the second curvature surface,

Figure 112015128095274-pat00038

(Where, △ Φ 12 is obtained by subtracting the difference from the car to the first optical path to a second optical path value, △ Φ 23 is obtained by subtracting the difference from the difference in the second optical path to a third optical path value, L 1 is the curvature of the first curvature surfaces L 2 is a curvature function of the second curvature surface, n 11 is the refractive index of the first liquid at the first wavelength, n 12 is the refractive index of the first liquid at the second wavelength, n 13 is the refractive index of the third liquid at the third wavelength N 21 is the refractive index of the second liquid at the first wavelength, n 22 is the refractive index of the second liquid at the second wavelength, n 23 is the refractive index of the second liquid at the third wavelength, n L1 is the refractive index of the lens of the first wavelength, n L2 is the refractive index of the lens of the second wavelength, and n L3 is the refractive index of the lens of the third wavelength).

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a simultaneous measurement apparatus and method for simultaneous measurement of both curvature shape and refractive index distribution of a lens,

According to the present invention, when a lens having a first curvature surface and a second curvature surface with opposite sides facing each other is an object to be inspected, both side surfaces of the lens are arranged to be in contact with liquids having different refractive indices, The second light of the second wavelength, and the third light of the third wavelength, respectively, based on the first light path difference, the second light path difference, and the third light path difference, A curvature function of a curvature surface and a refractive index along a third wavelength of the lens and an average refractive index along a third wavelength are used to measure the refractive index distribution of the lens, .

As a result of the development of modern mold technology, small-sized optical instruments are used in a large quantity, and thus the optical instruments are very cheap and the size of the apparatus is reduced by aspherical injection. During this injection process, heat must be applied in order to make the three-dimensional shape of the optical device. In the process of applying heat and cooling, the refractive index of the material changes.

The refractive index and the shape of the material must match the designed values in order for the injection optics to have an exact optical function, and therefore it is essential to have the correct refractive index value and three-dimensional shape of the injection optics.

 The refractive index measurement method is well known. The most accurate method is the ellipsometry method and the interference method. The general ellipsometry method and the interference method measure the refractive index at one position of the sample. In order to measure the two-dimensional refractive index of a sample, a two-dimensional scanning method can be used to measure a precise two-dimensional refractive index. However, the refractive index measurement method using the two-dimensional scanning method has a disadvantage in that the measurement time is very long. 2. Description of the Related Art In recent years, an interferometer method which can recognize two-dimensional phase information at a time without using a two-dimensional scanning method among the interference methods has been extensively studied.

In general, to confirm the shape of a lens, an optical method of irradiating light is used, and an interferometer and a reflectometer are widely used. Among them, an interferometer measures interference between transmitted light and reference light, and each light includes information such as the refractive index and thickness of the transmitted lens.

Korean Patent No. 10-1245607 relates to a refractive index distribution measuring method and a refractive index distribution measuring method which comprises immersing a subject such as a lens (object to be inspected) in a first medium having a first refractive index, The first transmitted wavefront is measured by immersing the inspected object in a second medium having a second refractive index to measure the refractive index of the inspected object by the measurement result of the first transmitted wavefront and the measurement result of the second transmitted wavefront, It is difficult to measure accurately by measuring the distribution, because it is difficult to measure the condition and the first medium and the second medium must have a refractive index lower by 0.01 or more than the refractive index of the material to be examined.

Recently, a method of measuring the shape of a lens by using an interferometer has been known in which a liquid having the same refractive index as that of the lens is placed on one surface of the lens and a liquid having a refractive index different from that of the lens is disposed on the other surface, To investigate the curvature shape of the lens.

However, since this method can recognize only the shape of one side of the lens, in order to obtain the shape of the other side, it is troublesome to measure the same lens by reversing the same lens, and it is difficult to obtain the same measurement condition.

Therefore, the present invention proposes a simultaneous measurement method of a curvature shape and a refractive index of a lens capable of simultaneously measuring a curvature shape and a refractive index distribution on both sides of a lens.

For this purpose, the present applicant has applied for a patent for a method of simultaneously measuring the curvature of both surfaces and the refractive index distribution of the lens of Japanese Patent Application No. 10-2014-0184355. Korean Patent Application No. 10-2014-0184355 discloses a method for obtaining a curvature function of a first curvature surface and a second curvature surface of a lens based on a first optical path difference and a second optical path difference, The refractive index distribution of the lens is measured by three optical path difference lenses. However, according to the embodiment, it has been desired to have higher accuracy than this case.

Therefore, in the present invention, the curvature functions of the first curvature surface and the second curvature surface of the lens are obtained based on the first optical path difference, the second optical path difference, and the third optical path difference, And the average refractive index according to the third wavelength is used to measure the refractive index distribution of the lens using the refractive index distribution of the lens.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a method for simultaneously measuring a curvature shape and a refractive index of a lens capable of simultaneously measuring a curvature shape and a refractive index distribution on both surfaces of a lens.

Another problem to be solved by the present invention is to arrange both sides of the lens so as to be in contact with liquids having different refractive indexes when the lens having the first curvature surface and the second curvature surface opposed to each other is an object to be inspected, The first light of one wavelength, the second light of the second wavelength, and the third light of the third wavelength, respectively, and based on the first light path difference, the second light path difference, and the third light path difference, The curvature function of the first curvature surface of the lens and the curvature function of the second curvature surface are respectively obtained and the refractive index of the lens is measured using the refractive index along the third wavelength and the mean refractive index along the third wavelength, And to provide a method for simultaneously measuring the refractive index distribution.

In order to solve the above problem, the present invention is characterized in that the first curvature surface of the lens to be inspected is brought into contact with the first liquid, and the second curvature surface of the lens is brought into contact with the second liquid, Side curvature shape and a refractive index distribution, which are different in refractive index from the refractive index of the lens and are different from each other, and which measure the shape of the double-sided curvature and the refractive index distribution of the lens by irradiating light of different wavelengths to the lens In the measuring method, first light having a first wavelength, second light having a second wavelength, and third light having a third wavelength parallel to the optical axis of the lens are irradiated to the lens through the first liquid Obtaining a first optical path difference, a second optical path difference, and a third optical path difference of different positions with respect to the optical axis optical path of the lens; Calculating a curvature function of the first curvature surface and a curvature function of the second curvature surface using the first optical path difference, the second optical path difference, and the third optical path difference; And calculating a refractive index distribution of the lens using the third optical path difference, the curvature function of the first curvature surface, and the curvature function of the second curvature surface, wherein the curvature function calculation In the step, the curvature function of the first curvature surface and the curvature function of the second curvature surface,

Figure 112015128095274-pat00001

(Where, △ Φ 12 is obtained by subtracting the difference from the car to the first optical path to a second optical path value, △ Φ 23 is obtained by subtracting the difference from the difference in the second optical path to a third optical path value, L 1 is the curvature of the first curvature surfaces L 2 is a curvature function of the second curvature surface, n 11 is the refractive index of the first liquid at the first wavelength, n 12 is the refractive index of the first liquid at the second wavelength, n 13 is the refractive index of the third liquid at the third wavelength N 21 is the refractive index of the second liquid at the first wavelength, n 22 is the refractive index of the second liquid at the second wavelength, n 23 is the refractive index of the second liquid at the third wavelength, n L1 is the refractive index of the lens of the first wavelength, n L2 is the refractive index of the lens of the second wavelength, and n L3 is the refractive index of the lens of the third wavelength)

Of the curvature of the lens and the refractive index distribution of the lens.

The step of acquiring the light path carries the first light having a first wavelength parallel to the optical axis of the lens to the lens through the first liquid to produce a first light path difference of the other positions with respect to the optical axis path of the lens. A first light path difference obtaining step of obtaining a first light path difference value; Irradiating a second light having a second wavelength parallel to the optical axis of the lens to the lens through a first liquid to obtain second light path differences of different positions relative to the optical axis path of the lens, Step acquisition step; Irradiating a third light having a third wavelength parallel to the optical axis of the lens to the lens through a first liquid to obtain third light path differences of different positions relative to the optical axis path of the lens, And a step of acquiring a road train.

The first curvature surface and the second curvature surface of the lens face each other.

The simultaneous measuring method of the both-side curvature shape and the refractive index distribution of the lens further includes a lens refractive index detecting step of detecting an average refractive index of the lens before the first optical path difference obtaining step.

In the lens refractive index detection step, the average refractive index of the lens is detected by a spectrometer or an ellipsometer.

The first light path difference

Figure 112015128095274-pat00002
(Where, Φ 1 are coach, n 11 in the first optical path at the time when irradiation of the first light of the first wavelength is the refractive index of the first wavelength of the first liquid, n 21 is the first wavelength of the second liquid And n L1 is a refractive index according to the first wavelength of the lens).

The second light path car

Figure 112015128095274-pat00003
(Where, Φ 2 is a coach to the second optical path at the time when irradiated with a second light of a second wavelength, n 12 is the refractive index of the second wavelength of the first liquid, n 22 is the second wavelength of the second liquid And n L2 is a refractive index according to the second wavelength of the lens).

The third light path car

Figure 112015128095274-pat00004
(Where, Φ 3 is the third wavelength of the and the coach, n 13 into three light path is the refractive index of the third wavelength of the first liquid was irradiated with the third light of a third wavelength, n 23 is the second liquid And n L3 is a refractive index according to the third wavelength of the lens).

In the refractive index distribution calculation step, the refractive index distribution of the lens (

Figure 112015128095274-pat00005
)

Figure 112015128095274-pat00006

(only,

Figure 112015128095274-pat00007
Is a refractive index according to the third wavelength of the lens,
Figure 112015128095274-pat00008
Is an average refractive index along the third wavelength).

The present invention also features a measuring device for measuring the curvature of both sides of a lens and the refractive index distribution by applying the method of simultaneously measuring the curvature shape of both sides and the refractive index distribution of the lens of the present invention.

The present invention also includes a first beam splitter dividing light incident from a light source into two beams; One beam of the beams divided by the two beams in the first beam splitter is made incident through the first collimating lens and transmits the light and has a diaphragm portion inside the diaphragm portion, Wherein the first liquid is inserted into one side of the diaphragm portion and the second liquid is inserted into the other side of the diaphragm portion; A first mirror in which, in the first beam splitter, the other one of the beams divided into two beams reflects light incident through the second collimating lens; A second mirror for reflecting the light incident from the inspection object insertion case; An imaging lens on which light reflected from the second mirror is incident; A second beam splitter for reflecting light from the second mirror through the imaging lens, for reflecting light from the first mirror, and emitting light to the charge coupled device; An arithmetic processing unit for receiving the image detected by the charge coupled device in accordance with the first light, the second light and the third light having different wavelengths and obtaining a curvature function of the first curvature surface and the second curvature surface of the lens, Wherein the calculation processing unit is configured to calculate a curvature function of the first curvature surface and the second curvature surface of the lens,

Figure 112015128095274-pat00009

(Where, △ Φ 12 is obtained by subtracting the difference from the car to the first optical path to a second optical path value, △ Φ 23 is obtained by subtracting the difference from the difference in the second optical path to a third optical path value, L 1 is the curvature of the first curvature surfaces L 2 is a curvature function of the second curvature surface, n 11 is the refractive index of the first liquid at the first wavelength, n 12 is the refractive index of the first liquid at the second wavelength, n 13 is the refractive index of the third liquid at the third wavelength N 21 is the refractive index of the second liquid at the first wavelength, n 22 is the refractive index of the second liquid at the second wavelength, n 23 is the refractive index of the second liquid at the third wavelength, n Where L1 is the refractive index of the lens of the first wavelength, n L2 is the refractive index of the lens of the second wavelength, and n L3 is the refractive index of the lens of the third wavelength), and the refractive index distribution Characterized by a measuring device.

The inspection object insertion case is characterized in that the first curvature surface of the lens is brought into contact with the first liquid and the second curvature surface of the lens is brought into contact with the second liquid such that the first liquid and the second liquid have different refractive indices The first liquid and the second liquid have refractive indexes different from each other while having a refractive index.

The light source is configured to emit light of a first wavelength, a second wavelength, and a third wavelength, which are different wavelengths.

The first collimating lens and the second collimating lens make the incident light into parallel light and the diameter of the light emitted from the first collimating lens is equal to the diameter of the lens.

The calculation processing section obtains the refractive index distribution of the lens that is the subject.

The arithmetic processing unit generates a light source control signal so as to emit light having a predetermined wavelength in the order of the first wavelength, the second wavelength and the third wavelength and transmits the light source control signal to the light source driving unit. The light source driving unit is driven according to the light source control signal, The first light of the first wavelength, the second light of the second wavelength, and the third light of the third wavelength are emitted.

The calculation processing section calculates the refractive index distribution of the lens of the objective lens

Figure 112015128095274-pat00010
)

Figure 112015128095274-pat00011

(only,

Figure 112015128095274-pat00012
Is a refractive index according to the third wavelength of the lens,
Figure 112015128095274-pat00013
Is an average refractive index along the third wavelength)

.

The present invention has the effect of simultaneously measuring the curvature of both surfaces of a lens and the refractive index using a simultaneous measurement method of a curvature shape on both sides and a refractive index distribution of a lens.

The method of simultaneously measuring the curvature shape and the refractive index profile of the double-sided curvature of the lens of the present invention is characterized in that when the lens having the first curvature surface and the second curvature surface opposed to each other is an object to be inspected, The first light of the first wavelength, the second light of the second wavelength, and the third light of the third wavelength, respectively, and the first light path difference, the second light path difference, and the third light path difference The refractive index distribution of the lens is measured using the refractive index according to the third wavelength and the average refractive index according to the third wavelength of the lens, and the curvature function of the first curvature surface and the second curvature surface of the lens are obtained, It is possible to simultaneously measure both the curvature shape of the lens and the refractive index distribution.

The present invention is simple, easy to use for beginners, and relatively high in accuracy compared to the prior art

1 is a flow chart of a method for simultaneously measuring a curvature shape on both sides and a refractive index distribution of a lens according to an embodiment of the present invention.
Fig. 2 is a view showing a cross section of a lens when the measuring method of Fig. 1 is applied. Fig.
3 is an example of a measuring apparatus to which the method of simultaneously measuring the curvature shape of both sides and the refractive index distribution of the lens of the present invention is applied.

Hereinafter, an apparatus and method for simultaneous measurement of the curvature shape of both sides and the refractive index distribution of a lens according to the present invention will be described in detail with reference to the drawings.

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a lens, in particular, an injection-molded optical element, an injection-molded lens and a plastic lens, and a method for simultaneously measuring a curvature shape and a refractive index distribution on both sides.

FIG. 1 is a flow chart of a method of simultaneously measuring a curvature shape of both sides and a refractive index profile of a lens according to an embodiment of the present invention, and FIG. 2 is a view showing a cross section of a lens when the measuring method of FIG. 1 is applied.

The lens 10 to be inspected is prepared (S1), and the average refractive index of the prepared lens 10 is measured using an ellipsometer. In some cases, the average refractive index of the lens 10 can be measured using a spectrometer instead of the ellipsometer. In this way, the refractive index n L (λ 1 ) according to the first wavelength of the lens, the refractive index n L (λ 2 ) according to the second wavelength of the lens, and the third wavelength N L (? 3 ), which is a refractive index according to the wavelength?

In the present invention, the lens 10 to be inspected has a first curvature surface 11 and a second curvature surface 12 which are mutually opposed along the optical axis direction as shown in FIG. 2, Side curvature shapes of the lens 10 having the first curvature surface 11 and the second curvature surface 12 can be confirmed.

The ellipsometer is a device for measuring the refractive index of a lens 10 by analyzing a change in the state of polarized light reflected after being incident on the lens 10 with light having a specific polarization state and measuring the average refractive index of the lens 10 .

A first liquid 20 and a second liquid 30 having refractive indices different from each other are prepared (S2). Here, the first liquid 20 and the second liquid 30 have refractive indices that are different from the refractive index of the lens 10. When the refractive indices of the first liquid 20, the second liquid 30, and the lens 10 are the same, calculation using the following equation is not correctly performed.

The first liquid 20 and the second liquid 30 are disposed so as to be in contact with the surface of the lens 10, respectively (S3). That is, a first liquid 20 is disposed on the first curvature surface 11 of the lens 10 and a second liquid 30 is disposed on the second curvature surface 12 of the lens 10, 10). When the first liquid 20 and the second liquid 30 are spaced apart from each other without contacting the surfaces of the respective lenses 10, light irradiated toward the first liquid 20 passes through the first liquid 20 and the lens 20, The path is changed at a spaced position of the tester 10, so that accurate experimental results are not obtained. This is also the case when the lens 10 and the second liquid 30 are separated from each other.

The first light having a first wavelength is irradiated from the side of the first liquid 20 so as to be parallel to the optical axis of the lens 10 to obtain first light path differences of other positions with respect to the optical axis of the optical path (S4). A Mach-Zehnder interferometer is used to divide the laser light source of each wavelength into two, one as a reference beam and the other as an object light to form a first liquid 20 and a second A lens 10 in which the liquid 30 is disposed in contact is provided. Then, the first light having the first wavelength is irradiated from the first liquid 20 side so as to be parallel to the optical axis of the lens 10. The diameter of the first light is adapted to the diameter of the measurement lens 10 and the first light is made parallel to the lens 10. Here, the first light refers to an aggregate of lights having a large number of (x, y) coordinates parallel to the optical axis of the lens 10. The first light passing through the lens is used as an image-forming lens to form a phase-changed image according to the shape of the lens on the lens surface in a charge coupled device.

The first light path difference differences for each (x, y) coordinate are obtained through the image obtained from the first light irradiated to the lens 10. The first light path differences are the difference between the optical path length values OPD for the (x, y) coordinates and the optical path length value OPD1 at the central optical axis of the lens 10. That is, the first optical path difference is the optical path difference obtained by using the first wavelength, and the optical path length value OPD1 at the center optical axis of the lens 10 is, in other words, the first wavelength Is the length of the optical path LL. The difference between the optical path length OPD of the first wavelength passing through the remaining portion of the lens 1 and the optical path length of the optical path LL of the first wavelength passing through the central axis of the lens 10 is the first optical path difference.

In other words, the light path is expressed by the refractive index of thickness, which is the length of the actual light. Since the phase value can be known from the phase image, the phase value is the light path difference. In general, a phase image has a phase value repeatedly at a constant height like a contour line, and a phase unwrapping process is performed to make a contour line into an actual mountain, thereby obtaining a light path difference. That is, the shape of the phase of the lens obtained numerically from the phase image picked up by the charge coupled device (CCD) 200 is, for example, a wave form of a circle, and the center of the wave form is the center of the lens And the phase value can be known from this phase, and the optical path difference is obtained by phase unwrapping the phase value.

(S5) the second light paths parallel to the optical axis from the first liquid (20) side to the lens (10) to obtain the second optical path differences of the other positions with respect to the optical axis optical path. That is, similarly to the step S4, the second light path parallel to the optical axis is irradiated from the first liquid 20 side to acquire the second light path differences. And the second wavelength of the second light is different from the first wavelength of the first light.

(S6) the third light path differences of the other positions with respect to the optical axis optical path are obtained by causing the lens 10 to irradiate the third light parallel to the optical axis from the first liquid 20 side. That is, like the step S4, the third light path parallel to the optical axis is irradiated from the first liquid 20 side to acquire the third light path differences. The third wavelength of the third light is different from the first wavelength of the first light and the second wavelength of the second light.

A curvature function of the first curvature surface 11 and the second curvature surface 12 of the lens 10 is obtained (S7). The curvature of the first curvature surface 11 and the second curvature surface 12 of the lens 10 based on the first optical path difference, the second optical path difference and the third optical path difference obtained through steps S4 and S5 And the curvature shape of the lens 10 can be confirmed through the curvature function. The curvature planes 11 and 12 can be obtained by the following equation (1).

Figure 112015128095274-pat00014

Here, △ Φ 12 is obtained by subtracting the difference from the car to the first optical path to a second optical path value, △ Φ 23 is a value obtained by subtracting the difference from the difference in the second optical path to a third optical path, L 1 is the curvature function of the first curvature surfaces N 2 is the refractive index of the first liquid at the first wavelength, n 12 is the refractive index of the first liquid at the second wavelength, n 13 is the refractive index of the third liquid at the third wavelength, L 2 is the curvature function of the second curvature surface, n 11 is the refractive index of the first liquid at the first wavelength, 1 liquid, n 21 is the refractive index of the second liquid at the first wavelength, n 22 is the refractive index of the second liquid at the second wavelength, n 23 is the refractive index of the second liquid at the third wavelength, n L1 N L2 is the refractive index of the lens of the second wavelength, and n L3 is the refractive index of the lens of the third wavelength.

Namely, since the first liquid and the second liquid that already know the refractive indexes for the respective wavelengths are used, n 11 , which is the refractive index according to the first wavelength of the first liquid, and n 21 , which is the refractive index according to the first wavelength of the second liquid, Is a known value. N L1 , which is a refractive index according to the first wavelength of the lens, and n L2, which is a refractive index according to the second wavelength of the lens, are set so that when the light of the first wavelength and the second wavelength is emitted from the light source, (I. E., An ellipsometer or spectrometer).

In equation (1), a first optical path obtained by the measurement in the step S4 and S5 phase difference Φ 1, the second optical path difference Φ 2, the third optical path difference Φ 3, n 11 is the first liquid at the first wavelength N 12 is the refractive index of the first liquid at the second wavelength, n 13 is the refractive index of the first liquid at the third wavelength, n 21 is the refractive index of the second liquid at the first wavelength, n 22 is the refractive index of the second liquid at the second wavelength, the refractive index of the second liquid of the wavelength, n 23 is the refractive index of the second liquid in the third wavelength, n L1 is the refractive index and, n L2 is the refractive index of the second wavelength lens, n L3 of the first wavelength lens of L 1 (x, y) and L 2 (x, y), which are the curvature functions, can be obtained by substituting these values with the refractive indices of the lenses of three wavelengths.

L 1 (x, y) and L 2 (x, y) by substituting since the curvature function of the first curvature surface 11 and the second curvature surface 12 of the z-axis (x, y) coordinate values The curvature shapes of the first curvature surface 11 and the second curvature surface 12 of the lens can be obtained at the same time. If the first liquid 20 and the second liquid 30 disposed on both sides of the lens 10 have the same refractive index, the function of each of L 1 (x, y) and L 2 (x, y) not L 1 (x, y) + L 2 (x, y) can not be obtained at the same time, each value becomes the function of the sphere.

The induction formula for obtaining the curvature function of the first curvature surface and the second curvature surface is as follows. That is, the process of obtaining Equation 1 is as follows.

First, when the first light of the first wavelength is irradiated, the first light path difference is obtained by using the curvature function of the first curvature surface and the second curvature surface and the refractive indexes of the first liquid, the second liquid and the lens, 2. Equation (2) is a formula made by the difference between the case where there is no lens in the container made up of the first liquid and the second liquid and the case where the lens is put.

Figure 112015128095274-pat00015

Here, Φ 1 has a first light path at the time when irradiation of the first light of the first wavelength coach, n 11 is the refractive index of the first wavelength of the first liquid, n 21 is according to the first wavelength of the second liquid Refractive index, and n L1 is a refractive index according to the first wavelength of the lens.

When the second light of the second wavelength is irradiated, the second optical path difference is obtained by using the curvature function of the first curvature surface and the second curvature surface and the refractive indexes of the first liquid, the second liquid, and the lens, same. Equation (3) is a formula made by the difference between the case where there is no lens in the container made of the first liquid and the case of the second liquid and the case where the lens is put.

Figure 112015128095274-pat00016

Here, Φ 2 is the second optical path at the time when irradiated with a second light of the second wavelength coach, n 12 is the refractive index of the second wavelength of the first liquid, n 22 is according to a second wavelength of the second liquid Refractive index, and n L2 is a refractive index according to the second wavelength of the lens.

When the third light of the third wavelength is irradiated, the third light path difference is obtained by using the curvature functions of the first curvature surface and the second curvature surface and the refractive indexes of the first liquid, the second liquid, and the lens, same. Equation (4) is a formula made by the difference between the case where the lens is not provided in the container made up of the first liquid and the second liquid and the case where the lens is put.

Figure 112015128095274-pat00017

Here, Φ 3 are in the third optical path at the time when irradiated with the third light of a third wavelength coach, n 13 is the refractive index of the third wavelength of the first liquid, n 23 is in accordance with a third wavelength of the second liquid Refractive index, and n L3 is the refractive index according to the third wavelength of the lens.

A value DELTA phi 12 obtained by subtracting the second light path difference from the first light path difference , the second light path difference from the second light path difference, and the third light path difference, using the first light path difference , the second light path difference, subtracting the value △ Φ 23 can be expressed by equation (5).

Figure 112015128095274-pat00018

Where L 1 is a curvature function of the first curvature surface, L 2 is a curvature function of the second curvature surface, n 11 is the refractive index of the first liquid at the first wavelength, and n 12 is the refractive index of the first liquid at the second wavelength Wherein n 13 is the refractive index of the first liquid at the third wavelength, n 21 is the refractive index of the second liquid at the first wavelength, n 22 is the refractive index of the second liquid at the second wavelength, n 23 is the refractive index of the second liquid at the second wavelength, the refractive index of the second liquid in the third wavelength, n L1 is the refractive index of the first wavelength lens (n L1 (x, y) ) and, n L2 has a refractive index (n L2 (x, y) ) of the second wavelength lens And n L3 is the refractive index (n L3 (x, y)) of the lens of the third wavelength.

Equation (1) can be obtained by solving the simultaneous equations of Equation (5).

After the experiment using a plurality of lights having different refractive indices and a plurality of lights having different wavelengths as described above and calculating the values by substituting the values into Equation 1, the curvature shapes of both surfaces of the lens 10 are obtained at the same time .

Further, the third optical path difference is obtained by the following equation (4), which is a formula generated by using the equation (3). Here, n L3 is a refractive index along the third wavelength of the lens

Figure 112015128095274-pat00019
), The average refractive index along the third wavelength (
Figure 112015128095274-pat00020
) And refractive index distribution (
Figure 112015128095274-pat00021
), Which is expressed by Equation (6).

Figure 112016129171361-pat00022

In other words, among refractive index values (refractive index distribution values
Figure 112016129171361-pat00042
) Is a value of the refractive index of the lens according to the wavelength of the light, which is independent of the wavelength of light. For example, the refractive index according to the third wavelength of the lens
Figure 112016129171361-pat00043
) Can be expressed by Equation (6).

The curvature functions L 1 (x, y) and L 2 (x, y) obtained by the equation (1) are applied to the equation (6)

Figure 112015128095274-pat00023
(S8).

FIG. 3 illustrates an example of a measuring apparatus to which a method of simultaneously measuring a curvature shape and a refractive index distribution on both sides of a lens of the present invention is applied. The measuring apparatus includes a light source 100, a first beam splitter 120, a first collimating lens 125 A second mirror 150, a second beam splitter 160, an image-forming lens 155, a charge-coupled device (not shown), a second collimating lens 127, a first mirror 130, (200), and an operation processing unit (200).

The light source 100 may use a wavelength-converted light source, and in some cases, the wavelength of the light source may be changed under the control of the arithmetic processing unit 200. The light source 100 can emit light of at least three different wavelengths, i.e., first, second, and third wavelengths.

The first beam splitter 120 divides the light incident from the light source 100 into two beams and outputs one beam to the inspection object insertion case 140 through the first collimating lens 125, Is emitted to the first mirror (130) through the second collimating lens (127).

That is, one of the beams divided by the two beams in the first beam splitter 120 is incident on the specimen inserting case 140 through the first collimating lens 125 as a counter-ray (measuring light) The light emitted to the object inserting case 140 is transmitted to the second mirror 150 and the light reflected from the second mirror 150 passes through the image forming lens 155 to the second beam splitter 160 .

Further, the other beam of the beam divided by the two beams in the first beam splitter 120 is transmitted as the reference beam (reference beam) to the first mirror 130 through the second collimating lens 127 , And the light reflected from the first mirror 130 is transmitted to the second beam splitter 160.

The first collimating lens 125 receives the light split by the first beam splitter 120 and converts the light into parallel light, which is emitted toward the inspected object insertion case 140. At this time, the diameter of the emitted light is equal to the diameter of the measuring lens 10.

The second collimating lens 127 receives the other light split by the first beam splitter 120 and converts the light into parallel light, which is emitted toward the first mirror 130 side.

The test object inserting case 140 is made of a material that transmits light from the light source 100 and has a diaphragm 145 inside the diaphragm 145. The lens 10, The first liquid 20 is inserted into one side of the diaphragm 145 and the second liquid 30 is inserted into the other side of the diaphragm 145.

The imaging lens 155 is a means for causing light reflected by the second mirror 150 to be incident on the charge coupled device 200 to form an image.

The light that is reflected by the second mirror 150 and is incident through the imaging lens 155 and the light reflected by the first mirror 130 are combined by the second beam splitter 160, An image is formed by a lens of the element 200 and is captured by a Charged Coupled Device (or a photodetector or a CCD camera) 200. That is, the charge coupled device 200 images the changed phase image according to the shape of the lens surface of the lens 10 to the charge coupled device 200. The image detected by the charge coupled device 200 has interference fringes due to the optical path difference of the two lights that are again encountered in the second beam splitter 160. [

The image detected by the charge coupled device 200 is transferred to the operation processing unit 200.

The operation processing unit 200 analyzes the overall control of the measuring apparatus and the images detected by the charge coupled device 200.

The operation processing unit 200 generates a light source control signal so as to emit light having a predetermined wavelength in the order of a first wavelength, a second wavelength, and a third wavelength, and transmits the light source control signal to the light source driving unit 105 . Accordingly, the light source driving unit 105 is driven to emit the first light of the first wavelength, the second light of the second wavelength, and the third light of the third wavelength to the light source 100, and the first light, The third light, and the third light, the images detected by the charge coupled device 200 are transmitted to the arithmetic processing unit 200. The calculation processing unit 200 obtains a curvature function of the first curvature surface 11 and the second curvature surface 12 of the lens 10 as an object to be inspected according to Equation 1 from these images and obtains a first curvature surface (11) and the second curvature surface (12) are substituted into Equation (6) so that the refractive index distribution

Figure 112015128095274-pat00024
.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, Modification is possible. Accordingly, the spirit of the present invention should be understood only in accordance with the following claims, and all equivalents or equivalent variations thereof are included in the scope of the present invention.

10: lens 11: first curvature surface
12: second curvature surface 20: first liquid
30: second liquid 100: light source
110: first convex lens 120: first beam splitter
130: first mirror 140: inspection object insertion case
145: Diaphragm 150: Second mirror
160: second beam splitter 170: second convex lens
190: imaging lens unit 200: charge-coupled device

Claims (17)

The first curvature surface of the lens to be inspected is brought into contact with the first liquid and the second curvature surface of the lens is brought into contact with the second liquid, wherein the first liquid and the second liquid have refractive indices different from the refractive indices of the lenses A method for simultaneous measurement of a curvature shape on both sides of a lens and a refractive index distribution, which has different refractive indices from each other and irradiates light of different wavelengths to the lens to measure a curvature shape and a refractive index distribution on both sides of the lens,
A first light having a first wavelength, a second light having a second wavelength, and a third light having a third wavelength, which are parallel to the optical axis of the lens, are irradiated to the lens through the first liquid, Acquiring a first optical path difference, a second optical path difference, and a third optical path difference of different positions with respect to the optical path;
Calculating a curvature function of the first curvature surface and a curvature function of the second curvature surface using the first optical path difference, the second optical path difference, and the third optical path difference;
Calculating a refractive index distribution of the lens using the third optical path difference, the curvature function of the first curvature surface, and the curvature function of the second curvature surface;
And,
In the curvature function calculation step, the curvature function of the first curvature surface and the curvature function of the second curvilinear surface satisfy the following equation
Figure 112015128095274-pat00025

(Where, △ Φ 12 is obtained by subtracting the difference from the car to the first optical path to a second optical path value, △ Φ 23 is obtained by subtracting the difference from the difference in the second optical path to a third optical path value, L 1 is the curvature of the first curvature surfaces L 2 is a curvature function of the second curvature surface, n 11 is the refractive index of the first liquid at the first wavelength, n 12 is the refractive index of the first liquid at the second wavelength, n 13 is the refractive index of the third liquid at the third wavelength N 21 is the refractive index of the second liquid at the first wavelength, n 22 is the refractive index of the second liquid at the second wavelength, n 23 is the refractive index of the second liquid at the third wavelength, n L1 is the refractive index of the lens of the first wavelength, n L2 is the refractive index of the lens of the second wavelength, and n L3 is the refractive index of the lens of the third wavelength)
Of the curvature of the lens and the refractive index distribution of the lens. 2. The method of claim 1,
Irradiating the lens with a first light having a first wavelength parallel to the optical axis of the lens through a first liquid to obtain first light path differences of different positions relative to the optical axis path of the lens, Step acquisition step;
Irradiating a second light having a second wavelength parallel to the optical axis of the lens to the lens through a first liquid to obtain second light path differences of different positions relative to the optical axis path of the lens, Step acquisition step;
Irradiating a third light having a third wavelength parallel to the optical axis of the lens to the lens through a first liquid to obtain third light path differences of different positions relative to the optical axis path of the lens, Step acquisition step;
Wherein a curvature shape of the lens and a refractive index distribution of the lens are simultaneously measured. 3. The method of claim 2,
Wherein the first curvature surface and the second curvature surface of the lens are opposed to each other. The method of claim 3,
Further comprising a lens refractive index detecting step of detecting an average refractive index of the lens before the first optical path difference obtaining step. 5. The method of claim 4,
Wherein the average refractive index of the lens in the lens refractive index detection step is detected by a spectrometer or an ellipsometer. 5. The method of claim 4, wherein the first light path difference
Figure 112015128095274-pat00026

(Where, Φ 1 are coach, n 11 in the first optical path at the time when irradiation of the first light of the first wavelength is the refractive index of the first wavelength of the first liquid, n 21 is the first wavelength of the second liquid And n L1 is a refractive index according to the first wavelength of the lens)
Of the curvature of the lens and the refractive index distribution of the lens. 5. The method of claim 4, wherein the second optical path difference
Figure 112015128095274-pat00027

(Where, Φ 2 is a coach to the second optical path at the time when irradiated with a second light of a second wavelength, n 12 is the refractive index of the second wavelength of the first liquid, n 22 is the second wavelength of the second liquid And n L2 is a refractive index according to the second wavelength of the lens)
Of the curvature of the lens and the refractive index distribution of the lens. 5. The method of claim 4, wherein the third light path difference
Figure 112015128095274-pat00028

(Where, Φ 3 is the third wavelength of the and the coach, n 13 into three light path is the refractive index of the third wavelength of the first liquid was irradiated with the third light of a third wavelength, n 23 is the second liquid And n L3 is a refractive index according to the third wavelength of the lens)
Of the curvature of the lens and the refractive index distribution of the lens. 9. The method of claim 8,
In the refractive index distribution calculation step, the refractive index distribution of the lens (
Figure 112015128095274-pat00029
)
Figure 112015128095274-pat00030

(only,
Figure 112015128095274-pat00031
Is a refractive index according to the third wavelength of the lens,
Figure 112015128095274-pat00032
Is an average refractive index along the third wavelength)
Wherein the curvature shape of the lens and the refractive index distribution of the lens are measured simultaneously. A lens having a curvature of both sides and a refractive index distribution of the lens according to any one of claims 1 to 9
A measuring device for measuring the curvature shape and the refractive index distribution on both sides of a lens using a simultaneous measurement method. A first beam splitter for dividing the light incident from the light source into two beams;
One beam of the beams divided by the two beams in the first beam splitter is made incident through the first collimating lens and transmits the light and has a diaphragm portion inside the diaphragm portion, Wherein the first liquid is inserted into one side of the diaphragm portion and the second liquid is inserted into the other side of the diaphragm portion;
A first mirror in which, in the first beam splitter, the other one of the beams divided into two beams reflects light incident through the second collimating lens;
A second mirror for reflecting the light incident from the inspection object insertion case;
An imaging lens on which light reflected from the second mirror is incident;
A second beam splitter for reflecting light from the second mirror through the imaging lens, for reflecting light from the first mirror, and emitting light to the charge coupled device;
An arithmetic processing unit for receiving the image detected by the charge coupled device in accordance with the first light, the second light and the third light having different wavelengths and obtaining a curvature function of the first curvature surface and the second curvature surface of the lens, ;
And,
The calculation processing unit calculates a curvature function of the first curvature surface and the second curvature surface of the lens,
Figure 112015128095274-pat00033

(Where, △ Φ 12 is obtained by subtracting the difference from the car to the first optical path to a second optical path value, △ Φ 23 is obtained by subtracting the difference from the difference in the second optical path to a third optical path value, L 1 is the curvature of the first curvature surfaces L 2 is a curvature function of the second curvature surface, n 11 is the refractive index of the first liquid at the first wavelength, n 12 is the refractive index of the first liquid at the second wavelength, n 13 is the refractive index of the third liquid at the third wavelength N 21 is the refractive index of the second liquid at the first wavelength, n 22 is the refractive index of the second liquid at the second wavelength, n 23 is the refractive index of the second liquid at the third wavelength, n L1 is the refractive index of the lens of the first wavelength, n L2 is the refractive index of the lens of the second wavelength, and n L3 is the refractive index of the lens of the third wavelength)
And the refractive index distribution of the lens is measured. 12. The apparatus according to claim 11,
Wherein the first curvature surface of the lens is in contact with the first liquid and the second curvature surface of the lens is in contact with the second liquid, wherein the first liquid and the second liquid have a refractive index different from the refractive index of the lens, Wherein the liquid and the second liquid are made to have different refractive indices from each other. 13. The method of claim 12,
Wherein the light source is configured to emit light of a first wavelength, a second wavelength, and a third wavelength, which are different wavelengths, from the light source. 13. The method of claim 12,
Wherein the first collimating lens and the second collimating lens make the incident light into parallel light and the diameter of the light emitted from the first collimating lens is equal to the diameter of the lens. And a measuring device for measuring a refractive index distribution. 13. The method of claim 12,
Wherein the calculation processing section obtains the refractive index distribution of the lens as the object to be measured, and measures the two-sided curvature shape and the refractive index distribution of the lens. 16. The method of claim 15,
The arithmetic processing unit generates a light source control signal so as to emit light having a predetermined wavelength in the order of the first wavelength, the second wavelength and the third wavelength and transmits the light source control signal to the light source driving unit. The light source driving unit is driven according to the light source control signal, Wherein the first light of the first wavelength, the second light of the second wavelength, and the third light of the third wavelength are emitted. 17. The method of claim 16,
The calculation processing section calculates the refractive index distribution of the objective lens
Figure 112015128095274-pat00034
)
Figure 112015128095274-pat00035

(only,
Figure 112015128095274-pat00036
Is a refractive index according to the third wavelength of the lens,
Figure 112015128095274-pat00037
Is an average refractive index along the third wavelength)
Wherein the curvature shape of the lens and the refractive index distribution of the lens are measured.
KR1020150188241A 2015-12-29 2015-12-29 Curvature of both sides surface and refractive index profile simultaneous measurement equipment and method of the lens KR101826191B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020150188241A KR101826191B1 (en) 2015-12-29 2015-12-29 Curvature of both sides surface and refractive index profile simultaneous measurement equipment and method of the lens

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020150188241A KR101826191B1 (en) 2015-12-29 2015-12-29 Curvature of both sides surface and refractive index profile simultaneous measurement equipment and method of the lens

Publications (2)

Publication Number Publication Date
KR20170078084A KR20170078084A (en) 2017-07-07
KR101826191B1 true KR101826191B1 (en) 2018-02-07

Family

ID=59353197

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020150188241A KR101826191B1 (en) 2015-12-29 2015-12-29 Curvature of both sides surface and refractive index profile simultaneous measurement equipment and method of the lens

Country Status (1)

Country Link
KR (1) KR101826191B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102594832B1 (en) * 2021-09-15 2023-10-27 주식회사 싸이너스 simultaneous measurement apparatus of two opposite sides

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006200998A (en) 2005-01-19 2006-08-03 Canon Inc Image processing apparatus, image processing program and refractive index distribution measuring apparatus
JP2013186117A (en) 2012-03-12 2013-09-19 Canon Inc Refractive index measurement method and refractive index measurement apparatus
KR101485548B1 (en) 2014-01-16 2015-01-22 주식회사 케이피에스 Method of measuring shape which has cuvature on both sides of lens

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006200998A (en) 2005-01-19 2006-08-03 Canon Inc Image processing apparatus, image processing program and refractive index distribution measuring apparatus
JP2013186117A (en) 2012-03-12 2013-09-19 Canon Inc Refractive index measurement method and refractive index measurement apparatus
KR101485548B1 (en) 2014-01-16 2015-01-22 주식회사 케이피에스 Method of measuring shape which has cuvature on both sides of lens

Also Published As

Publication number Publication date
KR20170078084A (en) 2017-07-07

Similar Documents

Publication Publication Date Title
US9341541B2 (en) Apparatus and method for evaluation of optical elements
US8520218B2 (en) Measuring method of refractive index and measuring apparatus of refractive index
US10823636B2 (en) Method and apparatus for the determination of the index of refraction of lens material
CN104165758B (en) Lens focal length measuring device and method based on Fizeau interferomenter
CN103115583B (en) Based on the Mirau fluorescence interference micro-measurement apparatus of stimulated radiation
US10337953B2 (en) Method and apparatus for determining surface data and/or measurement data relating to a surface of an at least partially transparent object
Jan et al. Optical interference system for simultaneously measuring refractive index and thickness of slim transparent plate
CN111220088B (en) Measurement system and method
JP6207383B2 (en) Refractive index distribution measuring method, refractive index distribution measuring apparatus, and optical element manufacturing method
KR101826191B1 (en) Curvature of both sides surface and refractive index profile simultaneous measurement equipment and method of the lens
CN105143814B (en) optical phase measurement method and system
KR20170078200A (en) Apparatus of high speed white light scanning interferometer using dual coherence for high step height and thickness measurements
KR102057153B1 (en) Curvature of both sides surface and refractive index profile simultaneous measurement method of the lens
KR20160069476A (en) Refractive index distribution measuring method, refractive index distribution measuring apparatus, and optical element manufacturing method
KR101254297B1 (en) Method and system for measuring thickness and surface profile
KR102008253B1 (en) Multi channel optical profiler based on interferometer
KR101485548B1 (en) Method of measuring shape which has cuvature on both sides of lens
CN114543702A (en) High-precision and rapid measuring method and device for three-dimensional topography of target position based on stereoscopic vision guidance
KR101843932B1 (en) Refractive index profile measurement method of small size optical component manufacturing with the injection molding
JP2009294079A (en) Method and device for measuring thickness and refractive index of sample piece
TWI575221B (en) Surface roughness measurement system and method using the same
JP6407000B2 (en) Refractive index measuring method, refractive index measuring apparatus, and optical element manufacturing method
JP3599921B2 (en) Method and apparatus for measuring refractive index distribution
JP2013186117A (en) Refractive index measurement method and refractive index measurement apparatus
JP2015210241A (en) Wavefront measurement method, wavefront measurement device, and manufacturing method of optical element

Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
GRNT Written decision to grant