KR101806335B1 - Substrate inspection apparatus and method - Google Patents

Abstract

The substrate inspecting apparatus includes a loading section for erecting a stacked substrate to be inspected, a moving section for moving the erected substrate to be inspected provided from the loading section in a direction perpendicular to a direction in which both sides of the erected substrate to be inspected are oriented, A line scan unit arranged in the middle of the substrate to line-scan both sides of the upright-mounted substrate to be inspected, and a storage unit for sorting the substrate to be inspected through the line scan. Therefore, the substrate inspecting apparatus can automatically perform providing, moving, scanning, and sorting of the moving parts of each of the upright-mounted substrates to be inspected.

Description

[0001] SUBSTRATE INSPECTION APPARATUS AND METHOD [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate inspection technique, and more particularly, to a substrate inspection apparatus and method for reading whether a substrate to be inspected is defective and automatically sorting good and defective products.

Electronic circuits are often fabricated in the form of printed circuit boards and inserted into objects. The printed circuit board is advantageous for mass production because a lead wire connecting the electronic components is formed in a state that the lead wires are preliminarily provided on the surface or inside of the insulator and each electronic component is only mounted at a designated position of the printed circuit board. In addition, the use of a printed circuit board can increase the degree of integration of parts, thereby reducing the overall size of objects. As such, although printed circuit boards are widely used due to the above-mentioned various advantages, the amount of waste containing a printed circuit board is also increased as the printed circuit board is widely used. In particular, printed circuit boards contain various heavy metals and require special attention in the waste treatment process.

A printed circuit board may form a signal line on a predetermined substrate body so that electronic components such as an integrated circuit, a resistor, and a switch or signal lines can be coupled to each other to electrically connect or transmit signals. Such a substrate may be subjected to a reaction process such as an etching process or a deposition process, and the presence of an electrical defect in the substrate inspection apparatus may be inspected.

Korean Patent No. 10-0661652 relates to a substrate inspecting apparatus and a control method thereof, comprising an inspection unit for inspecting a substrate, an inspection stage for supporting the substrate, an inspection unit having a stage driving unit for moving the inspection stage, A supply unit provided at an entrance area of the inspection unit and having a plurality of supply stages for supporting at least one of the substrates so as to sequentially supply the substrates to the inspection unit; And a discharge unit provided at an exit area of the inspection unit and having a plurality of discharge stages for supporting at least one of the substrates sequentially discharged from the inspection unit, whereby a substrate inspection for inspecting the substrate relatively quickly, simply and stably Device.

Korean Patent No. 10-1365097 relates to a substrate inspection apparatus comprising a transfer zone for transferring a substrate to be inspected from a carry-in side to a carry-out side, and a test zone in which a test jig for performing a predetermined test is arranged on the substrate to be inspected A first transfer device arranged in the transfer area for transferring the substrate to be inspected from the carry-in side to the carry-out side; a second transfer device for transferring the substrate to be inspected in the direction perpendicular to the transfer direction of the first transfer device And a second transfer device for transferring the substrate to be inspected between a predetermined position of the first transfer device and a position where the inspection jig in the inspection zone is disposed as the second transfer device, A substrate inspection apparatus having a holding device for holding a substrate.

Korean Registered Patent No. 10-0661652 (registered on December 26, 2006) Korean Registered Patent No. 10-1365097 (Registered on February 23, 2014)

An embodiment of the present invention is to provide a substrate inspection apparatus that automatically performs providing, moving, scanning, and sorting of a moving part of each of a plurality of upright-oriented substrates to be inspected.

An embodiment of the present invention is to provide a substrate inspection apparatus for vertically stacking a plurality of substrates to be inspected and providing a plurality of erected substrates to be inspected one by one to the moving unit.

An embodiment of the present invention is to provide a substrate inspection apparatus that line-scans both sides of a substrate to be inspected moved by a moving unit and classifies the inspection target substrate based on whether the substrate is defective or not.

An embodiment of the present invention is to provide a substrate inspection apparatus for comparing a line-scanned image with a reference image to determine whether a substrate to be inspected is defective or not.

In one embodiment, the substrate inspection apparatus includes a loading unit for erecting a stacked substrate to be inspected, and a controller for moving the erected inspected substrate provided from the loading unit in a direction perpendicular to a direction in which both surfaces of the erected substrate to be inspected are oriented A moving unit, a line scan unit arranged in the middle of the moving unit for line scanning both sides of the upright-mounted substrate to be inspected, and a storage unit for sorting the inspection target substrate through the line scan.

The moving unit may include a longitudinal groove that accommodates a lower portion of the inspection target substrate and corresponds to a movement path of the inspection target substrate. In one embodiment, the moving unit may move the inspection target substrate by pushing one side of the inspection target substrate accommodated in the longitudinal groove.

The line scan unit may include a plurality of cameras that line scan both sides of the moving substrate to be inspected. In one embodiment, the plurality of cameras may be disposed up and down toward each of the front and rear surfaces of the inspection target substrate.

The line scan unit may compare the line scanned image with the reference image through the plurality of cameras to determine whether the substrate to be inspected is defective. In one embodiment, the line scan unit may determine whether the inspection target substrate is defective by comparing a specific area of the line scanned image with the specific area of the reference image through the plurality of cameras. In one embodiment, the line scan unit may set the image of the first to be inspected substrate as the reference image, or may set the directly input image as the reference image.

The loading unit may provide the moving units with the plurality of erected substrates to be inspected one by one. In one embodiment, the line scan unit may line-scan the substrate to be inspected to determine whether the substrate to be inspected is defective or not.

Among the embodiments, the substrate inspection method includes the steps of (a) erecting a stacked substrate to be inspected, (b) moving the erected substrate to be inspected in a direction perpendicular to the direction in which both sides of the substrate to be inspected are oriented, (c) line-scanning both sides of the upright-mounted substrate placed in the middle of the moving unit, and (d) classifying the substrate to be inspected through the line scan.

The step (b) may include moving the substrate to be inspected along a longitudinal groove that receives a lower portion of the substrate to be inspected. In one embodiment, the step (c) may include line-scanning both sides of the inspection target substrate through a plurality of cameras arranged up and down on the front and rear sides of the inspection target substrate.

The step (c) may include a step of comparing the image scanned through the plurality of cameras with a reference image to determine whether the inspection target substrate is defective. In one embodiment, the step (c) may set the image of the firstly scanned substrate to be inspected as the reference image, or may set the directly input image as the reference image.

The disclosed technique may have the following effects. It is to be understood, however, that the scope of the disclosed technology is not to be construed as limited thereby, as it is not meant to imply that a particular embodiment should include all of the following effects or only the following effects.

The apparatus for inspecting a substrate according to an embodiment of the present invention can automatically perform providing, moving, scanning, and sorting of a moving part of each of a plurality of upright-oriented substrates to be inspected.

The substrate inspecting apparatus according to an embodiment of the present invention can erect a plurality of stacked inspection target substrates and provide a plurality of erected inspection target substrates to the moving unit one by one.

The substrate inspection apparatus according to an embodiment of the present invention can line-scan both sides of a substrate to be inspected moved by the moving unit, and classify the substrate on the basis of whether the substrate is defective or not.

The substrate inspection apparatus according to an embodiment of the present invention can determine whether a substrate to be inspected is defective or defective by comparing the line scanned image with a reference image.

1 is a perspective view showing a substrate inspection apparatus according to an embodiment of the present invention.
2 is a plan view showing the substrate inspection apparatus shown in Fig.
3 is a front view showing the substrate inspection apparatus shown in Fig.
4 is a flowchart illustrating a substrate inspection process performed in the substrate inspection apparatus of FIG.

The description of the present invention is merely an example for structural or functional explanation, and the scope of the present invention should not be construed as being limited by the embodiments described in the text. That is, the embodiments are to be construed as being variously embodied and having various forms, so that the scope of the present invention should be understood to include equivalents capable of realizing technical ideas. Also, the purpose or effect of the present invention should not be construed as limiting the scope of the present invention, since it does not mean that a specific embodiment should include all or only such effect.

Meanwhile, the meaning of the terms described in the present application should be understood as follows.

The terms "first "," second ", and the like are intended to distinguish one element from another, and the scope of the right should not be limited by these terms. For example, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.

It is to be understood that the singular " include " or "have" are to be construed as including the stated feature, number, step, operation, It is to be understood that the combination is intended to specify that it does not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

In each step, the identification code (e.g., a, b, c, etc.) is used for convenience of explanation, the identification code does not describe the order of each step, Unless otherwise stated, it may occur differently from the stated order. That is, each step may occur in the same order as described, may be performed substantially concurrently, or may be performed in reverse order.

All terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs, unless otherwise defined. Commonly used predefined terms should be interpreted to be consistent with the meanings in the context of the related art and can not be interpreted as having ideal or overly formal meaning unless explicitly defined in the present application.

1 is a perspective view showing a substrate inspection apparatus according to an embodiment of the present invention. FIG. 2 is a plan view showing the substrate inspection apparatus in FIG. 1, and FIG. 3 is a front view showing the substrate inspection apparatus in FIG.

1 to 3, the substrate inspection apparatus 100 includes a loading unit 110, a moving unit 120, a line scanning unit 130, a storage unit 140, a display unit 150, and a controller 160 ).

The loading unit 110 can erect the stacked inspection target substrate 10. More specifically, a plurality of substrates 10 to be inspected which need to be inspected for defects can be stacked on the loading unit 110. In one embodiment, the loading portion 110 may include an upstanding member 111 that stands up the substrate 10 to be inspected. The loading unit 110 may erect the plurality of stacked substrates 10 to be inspected through the upright member 111. For example, the upright member 111 may be disposed at the lower end of the stacked inspection target substrate 10, and when the stacking of the inspection target substrate 10 is completed, It is possible to erect the optical fibers 10. The loading unit 110 may provide a plurality of the substrates 10 to be inspected, which are disposed at one end of the moving unit 120, to the moving unit 120.

In one embodiment, the loading unit 110 may provide the moving unit 120 with the plurality of erected substrates to be inspected 10 one by one. For example, the upright member 111 may provide a plurality of substrates to be inspected 10 to the moving unit 120 one by one by pushing the front surface of a plurality of upright-oriented substrates 10 to be inspected. The upright member 111 can provide a plurality of substrates 10 to be inspected to the moving unit 120 one by one based on the speed at which the substrate 10 to be inspected moves by the moving unit 120.

The moving unit 120 may move the upright-mounted substrate 10 provided from the loading unit 110 in a direction perpendicular to the direction in which both surfaces of the upright-oriented substrate 10 are oriented. The moving unit 120 may be disposed in the lateral direction of the substrate inspection apparatus 100 so that one side thereof faces the loading unit 110, the line scanning unit 130, and the receiving unit 140. That is, the loading unit 110, the line scan unit 130, and the storage unit 140 may be sequentially disposed on one side of the moving unit 120.

The moving part 120 may include a longitudinal groove 121 corresponding to the movement path of the substrate 10 to be inspected, receiving the lower portion of the substrate 10 to be inspected. The longitudinal grooves 121 may be arranged in the lateral direction of the substrate inspection apparatus 100 to provide a path for movement of the substrate 10 to be inspected. Here, the lower portion of the substrate 10 to be inspected, which is accommodated in the longitudinal grooves 121, may be excluded from the line scan region by the line scan unit 130. In addition, the longitudinal grooves 121 can stably support the upright-mounted substrate 10 to prevent the substrate 10 from being shaken.

In one embodiment, the moving part 120 may move the inspection target substrate 10 by pushing one side of the inspection target substrate 10 received in the longitudinal groove 121. The moving unit 120 moves the substrate 10 to be inspected until the substrate 10 is received from the loading unit 110 and reaches the storage unit 140 through the line scan area of the line scan unit 130 Can be pushed and moved. That is, the substrate 10 to be inspected is accommodated in the longitudinal grooves 121 by the loading unit 110 and then moved toward the storage unit 140 without stopping. The substrate inspection apparatus 100 includes a plurality of inspection target substrates It is possible to automatically check whether or not there is a defect in the semiconductor device 10.

The line scan unit 130 may scan the both sides (or the front and back sides) of the erected substrate to be inspected 10 by the line scan. In one embodiment, the line scan unit 130 may include a plurality of cameras (not shown) that line scan both sides of the moving substrate 10 to be inspected. The plurality of cameras may be arranged vertically toward both sides (or front and rear surfaces) of the substrate 10 to be inspected. More specifically, the line scan unit 130 may include first and second camera modules 131 and 132 disposed on both sides (or front and rear sides) of the substrate 10 to be inspected. Here, the first camera module 131 may be disposed toward the front surface of the substrate 10 to be inspected, and the second camera module 132 may be disposed toward the rear surface of the substrate 10 to be inspected. The first camera module 131 includes a plurality of cameras arranged vertically toward the front surface of the substrate 10 to be inspected and the second camera module 132 includes a plurality of cameras vertically disposed toward the rear surface of the substrate 10 to be inspected A plurality of cameras may be included. That is, the line scan unit 130 can line-scan the front and back surfaces of the inspection target substrate 10 moving through the moving unit 120 to determine whether the substrate is defective or not.

In one embodiment, the plurality of cameras included in the first and second camera modules 131 and 132 may be implemented as a stereoscopic camera (or a stereo camera). More specifically, each of the plurality of cameras may be disposed vertically away from the front and back surfaces of the substrate 10 to be inspected, and may generate a three-dimensional image by imaging the substrate 10 to be inspected. That is, the line scan unit 130 can accurately determine whether the substrate 10 to be inspected is defective based on the three-dimensional image of the substrate 10 to be inspected.

The line scan unit 130 can determine whether the substrate 10 to be inspected is defective by comparing the line scanned image with a reference image through a plurality of cameras. More specifically, if the line scanned image matches the reference image, the line scanning unit 130 determines that the inspection target substrate 10 is a good product. If the line scanned image does not match the reference image, It can be judged as a defective product. The substrate 10 to be inspected may be accommodated in the storage unit 140 according to the result of the determination by the line scan unit 130.

In one embodiment, the line scan unit 130 can determine whether the inspection target substrate 10 is defective by comparing a specific area of the line scanned image with a specific area of the reference image through a plurality of cameras. Here, the specific area of the line scanned image may correspond to a critical inspection area for determining whether the substrate 10 to be inspected is defective or not. The specific area of the line scanned image may be determined based on the characteristics of the substrate 10 to be inspected or may be determined according to the type of failure mainly occurring. In addition, the specific area of the line scanned image may be preset by the user, and may be set to a plurality of mutually spaced areas. The line scan unit 130 may improve the inspection accuracy and the inspection speed by comparing the line scanned image with the specific area of the reference image, rather than comparing the line scanned image with the entire image of the reference image.

In one embodiment, the line scan unit 130 may set the image of the first to be inspected substrate 10 as the reference image, or may set the directly input image as the reference image. More specifically, the line scan unit 130 can set a reference image corresponding to a good image of the inspection target substrate 10 before performing inspection of the inspection target substrate 10. For example, the line scan unit 130 may set an image of the first to be inspected substrate 10 as a reference image, and compare the image of the substrate 10 to be inspected, which will be scanned later, with a preset reference image . That is, the user can first set a reference image by line-scanning the normal substrate already determined to be good.

For example, the line scan unit 130 may set a reference image based on image data directly input from the outside to the substrate inspection apparatus 100, and may scan the image of the substrate 10 to be inspected, ≪ / RTI > That is, the user can input the image data directly to the substrate inspection apparatus 100 to set the reference image.

In one embodiment, the line scan unit 130 may line-scan the substrate 10 to be inspected to determine whether the substrate 10 to be inspected is defective or not. More specifically, the line scan unit 130 may set a plurality of reference images. Here, the plurality of reference images may include a good image and a reject image corresponding to at least one defect type. That is, the line scanning unit 130 determines whether the line scanned image matches a good image or a defective image corresponding to at least one defective type, thereby determining whether the defective type of the inspection target substrate 10 is defective or not have.

In one embodiment, the line scan unit 130 may perform error correction of the line scanned image and compare it with the reference image. The line scan unit 130 may correct the error of the line scanned image generated according to the shape of the inspection target substrate 10 or the operation error of the substrate inspection apparatus 100, thereby improving the accuracy of the defect determination.

The storage unit 140 can sort the substrate 10 to be inspected through a line scan. The storage unit 140 can classify and receive the substrate 10 to be inspected based on the line scan result performed by the line scan unit 130. The storage unit 140 is disposed at the other end of the moving unit 120 to sort the line-scanned substrate 10. That is, the loading unit 110, the line scan unit 130, and the storage unit 140 may be sequentially disposed at one side of the moving unit 120, And may be disposed in the direction opposite to the loading unit 110. [

In one embodiment, the receiving portion 140 may include first and second receiving spaces 141 and 142. For example, the first storage space 141 can accommodate the normal substrate 20 determined as a good product, and the second storage space 142 can accommodate the defective substrate 30 determined as a defective product can do. The first and second storage spaces 141 and 142 can accommodate the inspected normal substrate 20 or the defective substrate 30 by stacking them.

In another embodiment, the receiving portion 140 may include a plurality of receiving spaces. For example, the receiving portion 140 may include a plurality of receiving spaces for receiving a plurality of bad substrates 30 classified according to a plurality of failure types and a receiving space for receiving the normal substrate 20 . That is, the storage unit 140 can receive the normal substrate 20 and the defective substrate 30 on the basis of the defectiveness and defect type determined by the line scan unit 130.

The display unit 150 may be disposed on one side of the substrate inspection apparatus 100 to display a work execution state of the substrate inspection apparatus 100. That is, the display unit 150 may provide the user with the operation status of the substrate inspection apparatus 100.

The control unit 160 may be disposed on the other side of the substrate inspection apparatus 100 to control the operation of the substrate inspection apparatus 100. The user can drive the substrate inspection apparatus 100 by operating the control unit 160 based on the work execution state provided through the display unit 150. [

4 is a flowchart illustrating a substrate inspection process performed in the substrate inspection apparatus of FIG.

Referring to FIG. 4, the loading unit 110 can receive a plurality of stacked substrates 10 to be inspected, and can vertically stack a plurality of stacked substrates 10 (step S410). The loading unit 110 may vertically mount a plurality of substrates 10 to be inspected through the upright member 111 and provide the substrates to the moving unit 120 one by one.

The moving unit 120 can move the upright-mounted substrate 10 in a direction perpendicular to the direction in which both sides of the upright-oriented substrate 10 are oriented (step S420). The moving unit 120 can move the substrate 10 to be inspected along the longitudinal grooves 121 that receive the lower portion of the substrate 10 to be inspected and stably support the substrate. The substrate 10 to be inspected can be moved to the receiving part 140 through the line scan area without being stopped after being accommodated in the longitudinal grooves 121 by the loading part 110 and the substrate inspection apparatus 100 can be provided with a plurality of It is possible to automatically check whether or not the substrates 10 to be inspected are defective.

The line scan unit 130 may be arranged in the middle of the moving unit 120 to line scan both sides of the erected substrate 10 (step S430). The line scan unit 130 can determine whether the substrate 10 to be inspected is defective by comparing the line scanned image with a reference image through a plurality of cameras.

The storage unit 140 can sort the substrate 10 to be inspected through a line scan (step S440). For example, the first storage space 141 can accommodate the normal substrate 20 determined as a good product, and the second storage space 142 can accommodate the defective substrate 30 determined as a defective product can do.

As a result, the substrate inspecting apparatus 100 can automatically perform providing, moving, scanning, and sorting of the moving units 120 of the plurality of erected substrates 10 to be inspected. The substrate inspection apparatus 100 can provide a plurality of substrates 10 to be inspected upright to the moving unit 120 one by one by erecting a plurality of substrates to be inspected 10 stacked. The substrate inspection apparatus 100 performs line scanning of both sides of the inspection target substrate 10 moved by the moving unit 120 and compares the line scanned image with the reference image to determine whether the inspection target substrate 10 is defective or not, As shown in FIG.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it will be understood by those of ordinary skill in the art that various changes in form and detail may be made therein without departing from the spirit and scope of the invention as defined by the following claims And changes may be made without departing from the spirit and scope of the invention.

100: substrate inspection apparatus
110: loading part 111: upright member
120: moving part 121: longitudinal direction groove
130: Line scan unit 131, 132: First and second camera modules
140: storage part 141, 142: first and second storage spaces
150: display unit 160:

Claims (15)

A loading unit for erecting a stacked inspection object board through an upright member;
And a control unit that receives a lower portion of the substrate to be inspected and is received in the longitudinal groove provided from the loading unit along a longitudinal groove corresponding to a movement path of the substrate to be inspected, A moving unit that moves the substrate to be inspected in a direction perpendicular to a direction in which both surfaces of the substrate are inspected;
And performing error correction of a line-scanned stereoscopic image through a plurality of cameras that line-scan both sides of the upright-mounted substrate to be inspected to compare with the reference image, A line scan unit for determining the type; And
And a storage unit for sorting the inspection target board through the line scan.
delete delete delete The apparatus of claim 1, wherein the plurality of cameras
Wherein the inspection target substrate is disposed vertically toward the front and rear surfaces of the substrate to be inspected.
delete The apparatus of claim 1, wherein the line scan unit
And comparing the specific area of the line scanned image with the specific area of the reference image through the plurality of cameras to determine whether the inspection target substrate is defective or not.
The apparatus of claim 1, wherein the line scan unit
Wherein the image of the first inspection target substrate is set as the reference image or the image directly input is set as the reference image.
The apparatus of claim 1, wherein the loading unit
And the plurality of upright-mounted substrates to be inspected are provided to the moving unit one by one.
delete (a) erecting a stacked substrate to be inspected through an upright member;
(b) receiving a lower portion of the substrate to be inspected and accommodating the longitudinal grooves provided from the loading portion along a longitudinal groove corresponding to the movement path of the substrate to be inspected, pushing one side of the erected substrate to be inspected, Moving in a direction perpendicular to a direction in which both sides of an upright inspection target substrate are oriented;
(c) performing error correction of the line-scanned three-dimensional image through a plurality of cameras arranged in the middle of the moving unit and line-scanning both sides of the upright-mounted substrate to be inspected, Determining a failure type; And
(d) sorting the substrate to be inspected through the line scan.
delete 12. The method of claim 11, wherein step (c)
And line scanning both sides of the inspection target substrate through a plurality of cameras arranged up and down on the front and rear sides of the inspection target substrate.
delete 12. The method of claim 11, wherein step (c)
Setting an image of the firstly scanned substrate to be inspected as a reference image or setting a directly input image as the reference image.

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