KR101787196B1 - An acoustic vector sensor based on the biomimetic artificial hair cell and the method for manufacturing - Google Patents

An acoustic vector sensor based on the biomimetic artificial hair cell and the method for manufacturing Download PDF

Info

Publication number
KR101787196B1
KR101787196B1 KR1020150129801A KR20150129801A KR101787196B1 KR 101787196 B1 KR101787196 B1 KR 101787196B1 KR 1020150129801 A KR1020150129801 A KR 1020150129801A KR 20150129801 A KR20150129801 A KR 20150129801A KR 101787196 B1 KR101787196 B1 KR 101787196B1
Authority
KR
South Korea
Prior art keywords
sensor
receptors
piezoelectric
biomimetic
vector
Prior art date
Application number
KR1020150129801A
Other languages
Korean (ko)
Other versions
KR20170032044A (en
Inventor
박성진
김경섭
서희선
한준세
Original Assignee
국방과학연구소
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 국방과학연구소 filed Critical 국방과학연구소
Priority to KR1020150129801A priority Critical patent/KR101787196B1/en
Publication of KR20170032044A publication Critical patent/KR20170032044A/en
Application granted granted Critical
Publication of KR101787196B1 publication Critical patent/KR101787196B1/en

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transducers For Ultrasonic Waves (AREA)

Abstract

The biomimetic iso model underwater acoustic vector sensor of the present invention includes an induction element 21, 23 which is vertically erected at the center of the annular frame 25 to detect and amplify mechanically the sound pressure coming from the outside, A plurality of receivers 22a, 22b, and 22c connected to the amplifiers 22a, 22b, and 22c to convert amplified signals into electrical signals and generate a voltage in accordance with an electrical signal size, and output voltages of the receivers 22a, 22b, 22b, 22c to be fixed to a relative part (e.g., a PCB substrate), and is manufactured by a powder injection molding method with a molding configuration freedom, A three-dimensional single-island model piezoelectric structure imitates the fish cilia biometrically and implements the feature of measuring acoustic vector signals in the water.

Description

[0001] The present invention relates to an acoustic vector sensor for biomimetic island model, and a method for manufacturing an ultra-

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an underwater acoustic vector sensor, and more particularly to a submersible acoustic vector sensor in which fish cilia is mimicked and a manufacturing method thereof.

The recent trend of modern aquatic weapon systems is that there is a growing need for underwater acoustic vector sensors with very small / light weight, high accuracy and directionality to detect low noise acoustic targets present in the water in the low frequency range.

There are biomimetic sensors for underwater acoustic sensors that meet the demands of these modern underwater weapon systems. The biomimetic sensor is a new concept sensor for advanced future sensor systems and represents a new technology for future underwater acoustic sensors.

Among the above biomimetic sensors, there is an island model acoustic vector sensor as a sensor technology that meets the requirements of a modern underwater weapon system.

The island model acoustic vector sensor comprises a cilium which is a sensitive element having a high high-ratio of several nanometers to several microns in height, and a hair cell of a natural organism composed of a mechanoreceptor for converting a sensory physical quantity into a mechanoreceptor ). Therefore, the island model acoustic vector sensor is composed of the ciliary structure and the receiver, which are the sensitive elements, and the ciliary structure and the receiver are separately manufactured and then attached to each other, thereby completing the ciliary body and the receiver.

Accordingly, the island model acoustic vector sensor can be operated in the same manner as the principle of sensing the medium flow of a living organism that transmits the movement of the cilia due to the flow of the medium to the living nerve system through the receptor inside the hair cell.

Korean Patent Laid-Open Publication No. 10-2014-0006350 (Apr. 16, 2014)

However, the islands model acoustic vector sensor, which is produced separately from the ciliary structure and the receiver, is inferior in terms of reliability and performance.

Reliability vulnerabilities are caused by: The ciliated parts of the ciliated parts were fabricated separately through plastic injection molding. The ciliated receptors were fabricated through the MEMS-based etching technique and the cilia was precisely attached to the center of the receptacle so that uniform pressure could be delivered to each sensitive receptor give. However, the process of precisely positioning the cilia in the center of the receptacle causes non-uniformity in fabrication, and such non-uniformity in fabrication leads to a decrease in productivity and in particular to a decrease in the reliability of the manufactured sensor.

Performance vulnerabilities are caused by: An adhesive material is used for adhering the cilia and the receptacle and the sensitivity of the sensor is deteriorated due to the use of the adhesive material by reducing the displacement transmission amount of the cilia and the operating environment of the sensor may be restricted depending on the adhesive force of the adhesive portion, The durability and the service life of the product are limited.

In view of the above, the present invention provides a three-dimensional single-island piezoelectric structure capable of measuring an acoustic vector signal in water by biochemically simulating fish cilia, and more particularly, by applying a powder injection molding method The present invention is directed to a biomimetic island model underwater acoustic vector sensor in which all the difficulties of the manufacturing process of the model sensor are solved, and a manufacturing method thereof.

In order to achieve the above object, the biomimetic island model underwater acoustic vector sensor according to the present invention comprises: an induction device vertically installed at the center of an annular frame to mechanically amplify a sound pressure from outside; A receiver connected to the induction device, converting the amplified signal of the induction device into an electrical signal, and generating a voltage according to an electrical signal size; A sensor fixing leg integrated with the receiver and acting as a foot for fixation; .

In a preferred embodiment, the sensing element comprises a ciliary column vertically erected at the center of the annular frame and connected to the receptor, and a spherical polymer provided at an upper end of the ciliary column to sense the negative pressure.

In a preferred embodiment, the receiver is constituted by first, second and third receivers forming an end gathered towards the center of the annular frame, and the sensor securing leg comprises a first , And 2 and 3 sensor fixing legs. The ends of the first, second, and third receptors are poled together with a poling jig, and the sensing element is fabricated at a time. Each of the first, second and third sensor fixing legs is vertically formed in the first, second and third receptors.

In a preferred embodiment, the ciliary column, the annular frame, the first, second and third receptors, and the first, second and third sensor fixing legs are manufactured by powder injection molding.

As a preferred embodiment, the respective end portions of the first, second, and third receptors are polled together with a poling jig, and the poling jig has a structure fixing portion An upper conductive pin coupled to the structural fixing part and applying a voltage to the upper surface of the first, second and third receptors in close contact with the seating surface, And a lower conductive pin for applying a voltage by closely contacting the upper surface with a seating surface.

In a preferred embodiment, the sensor fixing leg is coupled to a sensor assembly member, and the sensor assembly member is composed of a signal processing circuit board to which the supporting portion and the supporting portion are connected. The supporting portion includes a leg fixing hole into which the sensor fixing leg is inserted, And each voltage of the receiver is provided with a signal processing terminal and a ground terminal through which the signal processing circuit board is transmitted as a response signal. The signal processing circuit board is provided with a pre-amplifier, the pre-amplifier processes the signals of the receiver, and finally performs a signal process using the signal ratio of the receiver, And outputs the vector signal as a vector signal.

In a preferred embodiment, the sensor assembly member is coupled to a sensor packing member, and the sensor packing member is composed of an oil film of a conductive rubber material, and a sensor housing into which the sensor assembly member is received and castor oil is injected to preserve sensor sensitivity do.

According to another aspect of the present invention, there is provided a method of manufacturing an ultra miniature underwater acoustic vector sensor, comprising: (A) preparing a powder piezoelectric material; (B) the powder piezoelectric material is mixed to form a mixed piezoelectric material, the mixed piezoelectric material is injection molded to be made into a primary sensor piezoelectric structure, and the primary sensor piezoelectric structure is subjected to solvent degreasing the first degreasing sensor piezoelectric structure is subjected to thermal debinding to form a second degreasing sensor piezoelectric structure and the second degreasing sensor piezoelectric structure is sintered a sensor having a first, a second and a third receptors that are gathered inside the annular frame to generate a voltage in accordance with an electrical signal size, and first, second, and third sensor fixing legs integrated into the first, A step of fabricating the piezoelectric structure; (C) a spherical polymer is attached to the upper end of the ciliary column vertically installed in the first, second and third receptors after a voltage is applied to each end of the first, second and third receptors by a poling jig A biomimetic island type piezoelectric sensor for sensing the negative pressure; (D) fabricating the biomimetic island-type piezoelectric sensor as a vector sensor assembly structure by being assembled with a sensor assembly member; (E) packaging the vector sensor assembly structure with a sensor packing member; As shown in FIG.

As a preferred embodiment, the powdery piezoelectric material is manufactured as a sensor piezoelectric structure having an island shape structure having a high high-ratio of 1:10, which has a size of several hundred micro-scale through the above-described steps of the biomimetic- .

In a preferred embodiment, the poling jig includes a structural fixing part and a cylindrical supporting part facing each other to form a space in which the first, second and third receptors are located, An upper conductive pin for applying a voltage to the upper surface of the upper surface of the upper surface of the lower conductive member to apply a voltage to the lower surface of the lower surface of the upper surface of the lower conductive member, After the ends of the first, second, and third receptors are positioned, the upper and lower conductive pins simultaneously apply a voltage to the end portions to perform polling.

In a preferred embodiment, the sensor assembly member comprises a support having a signal processing end for transmitting each voltage of the first, second and third receivers to the signal processing circuit board as a response signal and a ground terminal, The first, second and third sensor fixing legs are fitted in the first, second and third leg fixing holes.

In a preferred embodiment, the sensor packing member comprises an oil film of a conductive rubber material and a sensor housing, and when the vector sensor assembly structure is received in the sensor housing, the oil film is combined with the sensor housing, Castor oil is injected into the housing to preserve sensor sensitivity.

The present invention realizes the following advantages and effects by making it possible to manufacture a micro-underwater acoustic vector sensor using powder injection molding technology.

First, regarding the microstructure fabrication of the biomimetic island model vector sensor, it is possible to improve the precision and reliability of the sensor by reducing the noise effect from the structural complexity of the existing sensors through the detailed design of the fabrication method. Second, a piezoelectric-powder injection molding process capable of forming a three-dimensional micromechanical structure can be developed and applied to a bioimpedimental island model vector sensor, which can be utilized as a new acoustic sensor fabrication technique. Third, it is possible to overcome the limitations of conventional acoustic sensors through the fusion of the design technology and the manufacturing technology of the biometric mimetic island model vector sensor. Especially, it can be applied to various types of acoustic sensors, Can be applied. Fourth, since the fabrication technology of the biomimetic island model vector sensor is a powder-based molding technology having advantages of forming a three-dimensional structure, a mass production of the sensor can be performed at a relatively low cost through a series of processes. Fifth, the biomimetic island model vector sensor can be mass-produced at a relatively low cost, maximizing the productivity advantages and greatly enhancing the applicability to the underwater sonar system.

FIG. 1 is a configuration diagram of a bioimpedimental island model acoustic vector sensor according to the present invention, FIG. 2 is an operational state of a bioimpedimental island model acoustic vector sensor according to the present invention, and FIG. FIG. 4 is a view showing a sensor piezoelectric structure constituting a biometric mimetic island model acoustical vector sensor according to the present invention manufactured by a powder injection molding process, and FIG. 5 6 is an example of a sensor assembly member in which a biomimetic isotope-type piezoelectric sensor according to the present invention is assembled, and Fig. 7 is a view showing an example of a biomimetic isomorphism sensor according to the present invention. FIG. 8 is a view showing an example in which a piezoelectric sensor assembly and a sensor assembly member are assembled into a vector sensor assembly structure, Is an example of a sensor packing member assembly, Figure 9 is an example producing a vector sensor assembly and the sensor structure packing member according to the present invention a tiny underwater acoustic vector sensors.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings, which illustrate exemplary embodiments of the present invention. The present invention is not limited to these embodiments.

FIG. 1 shows a configuration of a biometric mimetic island model acoustic vector sensor according to the present embodiment.

As shown in the figure, the biometric mimetic island model acoustic vector sensor 1 includes an impedance element 21, 23 for sensing and mechanically amplifying a sound pressure coming from the outside, an amplification signal transmitted from the impedance elements 21, A plurality of receivers 22a, 22b and 22c which convert the signals into electrical signals and generate a voltage in accordance with the size of the electric signal and the output voltages of the receivers 22a, 22b and 22c are fixed Sensor fixing legs 24a, 24b and 24c integrated with the receivers 22a, 22b and 22c and an annular frame 25 supporting the receivers 22a, 22b and 22c.

The sensing elements 21 and 23 are made up of a cilium column 21 and a spherical polymer 23 and the cilumole column 21 is vertically installed at the center of the annular frame 25 to receive the receptors 22a, 22b, and 22c. And the spherical polymer 23 is provided at the upper end of the vertically erected ciliary column 21 to sense the negative pressure coming from the outside.

The receptors 22a, 22b and 22c are constituted by first, second and third receptors 22a, 22b and 22c, and each of the first, second and third receptors 22a, 22b and 22c is connected to an annular frame 25 As shown in Fig. The first receptacle 22a is centered at the inner surface of the annular frame 25 and the second receptacle 22b is spaced apart from the first receptacle 22a, And the third receptacle 22c is centered on the inner surface of the annular frame 25 at a distance from the second receptacle 222. [ In this case, the first receiver 22a, the second receiver 22b, and the third receiver 22c form angles of 120 degrees, respectively. Therefore, the end portions of the first, second, and third receptors 22a, 22b, and 22c are concentrated at the center of the annular frame 25, thereby providing a place where the ciliary pillars 21 are connected. To this end, each end of the first, second, and third receptors 22a, 22b, and 22c is poled to generate a piezoelectric effect.

The sensor fixing legs 24a, 24b and 24c are composed of first, second and third sensor fixing legs 24a, 24b and 24c, and the first, second and third sensor fixing legs 24a, 24b and 24c And each is formed vertically in each of the first, second and third receptors 22a, 22b, and 22c. For example, the first sensor fixing leg 24a is formed vertically downward in the opposite direction of the ciliary pillars 21 in the middle section of the first receiver 22a, and the second sensor fixing leg 24b is formed vertically downward The third sensor fixing leg 24c is formed vertically downward in the opposite direction of the ciliary pillars 21 in the intermediate section of the receptor 22b and the third sensor fixing leg 24c is formed in the middle section of the cigarette column 21 in the middle section of the third receptor 22c. And is formed vertically downward in the opposite direction. Therefore, the first, second and third sensor fixing legs 24a, 24b, and 24c function as feet fixed to other components (e.g., a PCB substrate), thereby providing an attachment property of the biometric mimetic island model acoustic vector sensor 1 .

The annular frame 25 has a circular shape and includes a ciliary column 21, a spherical polymer 23, first, second and third receptors 22a, 22b and 22c, The legs 24a, 24b, 24c are provided in an assembly in which they can be assembled.

In this embodiment, the ciliary pillars 21, the first, second and third receptors 22a, 22b, 22c, the first, second and third sensor fixing legs 24a, 24b (excluding the spherical polymer 23) , 24c, and the annular frame 25 are all manufactured in a single process without post-processing through powder injection molding using a piezoelectric material.

On the other hand, FIG. 2 shows the operation principle of the biometric mimetic island model acoustic vector sensor 1. FIG.

As shown in the figure, the biomimetic island model acoustic vector sensor 1 mechanically amplifies the negative pressure coming from the outside by the ciliary column 21 and the spherical polymer 23, which are produced through piezoelectric powder injection molding, And 3 c to the first, second, and third receptors 22a, 22b, and 22c located at the ends of the first, second, and third sensor fixing legs 24a, 24b, and 24c (branched structures).

For example, due to the bar structure of the ciliary pillars 21 having a low modulus of elasticity, the spherical polymer 23 located at the end of the bar moves according to the fluid particle velocity. The forces acting on the spherical polymer 23 and the forces acting on the first, second and third receptors 22a, 22b and 22c located in three directions act on different magnitudes of forces to satisfy the force-momentum equilibrium By the force acting on the first, second and third receivers 22a, 22b and 22c, the thickness direction displacement occurs in the piezoelectric body as the biometric mimetic island model acoustic vector sensor 1, 3 capacitors 22a, 22b, and 22c to generate a voltage of a different magnitude, so that the direction can be measured. At this time, the sensitivity of the biomimetic island model acoustic vector sensor 1 is proportional to the surface area of the spherical polymer 23, the lengths of the first, second and third receptors 22a, 22b and 22c, and the rod length of the ciliary pillars 21 And the distance from the center and the center of the first, second and third receptors 22a, 22b, 22c to the first, second and third receptors 22a, 22b, 22c.

Therefore, the bioimpedimental island model acoustic vector sensor 1 is designed using an LNA (Low Noise Amplifier) and a BPF (Band Pass Filter) in consideration of the frequency band of the underwater acoustic sensor, and the first, 24a, 24b, and 24c, as shown in FIG. Then, the voltages generated in the first, second and third receptors 22a, 22b and 22c are electrically amplified through the signal processing circuit and finally the signals at the respective ends of the first, second and third receptors 22a, 22b and 22c And the signal is processed as a vector signal which indicates the direction of the sound signal. In this case, the pre-amplifier of the signal processing circuit receives three signals (measured through the first, second and third receivers 22a, 22b, and 22c) of the piezoelectric structure as the biometric mimetic island model acoustic vector sensor 1 Lt; / RTI >

The principle of the biomimetic island model acoustic vector sensor 1 as described above is the same as that of the fish hair cell. For example, hair cells in the lateral line of a fish can measure the velocity of the medium and can sense its motion in the medium. In addition, the hair cell can detect the change of the flow rate by the sound in the medium, and can grasp the type and position of the sound source, and is used to search for food or to avoid natural enemies.

Meanwhile, FIG. 3 shows a method in which a micro-underwater acoustic vector sensor 100 using a bio-mimetic island model acoustic vector sensor 1 is manufactured by a series of processes. Figs. 4 to 9 show a sensor piezoelectric structure 1-1, a biomimetic island-type piezoelectric sensor 1, a vector sensor assembly structure 5-1, a micro-underwater acoustic sensor 1, An example of the vector sensor 100 is shown.

The series of processes described below is performed using a powder injection molding apparatus or equipment. For example, the powder injection molding apparatus or equipment includes a mold, a gate, and the like on which mixing, injection molding, solvent debinding, thermal debinding, and sintering are performed, The operation is controlled by the controller. The polling consists of a poling jig 4, and the assembly and packaging are made of dedicated jigs. Therefore, even if there is no specific example of a performing entity, the main body of each process is a powder injection molding apparatus or equipment, a poling jig 4, or a dedicated jig.

First, a powdery piezoelectric material is prepared as in S10. The powder piezoelectric material is prepared by a biomimetic isotope piezoelectric sensor 1, which has a size of several hundred micro-scale through each process, and is manufactured by a sensor piezoelectric structure having an island shape structure having a high high ratio of 1:10 level do.

Next, the powdery piezoelectric material is manufactured as a sensor piezoelectric structure 1-1 through S20 to S60

S30 is a process of forming a primary sensor piezoelectric structure by injection molding a mixed piezoelectric material, and S40 is a process of forming a primary sensor piezoelectric structure by mixing the powder piezoelectric material, S50 is a process of making the primary degreasing sensor piezoelectric structure by thermal debinding to form a secondary degreasing sensor piezoelectric structure, and S60 is a process of forming secondary degreasing sensor piezoelectric structure by solvent debinding And sintering the sensor piezoelectric structure to manufacture the sensor piezoelectric structure 1-1. In this embodiment, the process is performed by sequential progress of mixing -> injection -> solvent degreasing -> hot degreasing -> sintering. However, since the sensor piezoelectric structure (1-1) has a size of hundreds of micro-scale and is made of an island-shaped sensor piezoelectric structure having a high high-ratio ratio of 1:10, the shrinkage factor and the gate arrangement Note the compliance.

 The sensor piezoelectric structure 1-1 has a size of several hundred micro-levels as illustrated in FIG. 4, and has a high-to-high ratio of 1:10. The sensor piezoelectric structure 1-1 includes the ciliary column 21, the first and second receivers 22a, 22b and 22c, the first and second sensor fixing legs 24a, 24b and 24c, The annular frame 25 is integrated, while the spherical polymer 23 is later integrated with the ciliary pillars 21 through attachment.

Referring again to Fig. 3, the sensor piezoelectric structure 1-1 is fabricated as a biomimetic island-type piezoelectric sensor 1 through S70. S70 is a step before poling the three end portions of the first, second and third receivers 22a, 22b and 22c so that the sensor piezoelectric structure 1-1 is fabricated as the biomimetic island-type piezoelectric sensor 1 It is a process of making.

Fig. 5 shows an example of a poling jig 4 for completing the biometric-mimetic-island-type piezoelectric sensor 1. Fig. As shown in the figure, the poling jig 4 has a structure fixing portion 41 formed with a void space in the middle, a space in which the sensor piezoelectric structure 1-1 is placed, and a lower portion of the structure fixing portion 41 An upper conductive pin 43 coupled to the structural support portion 42 and directed toward the cylindrical support portion 42, a lower conductive pin 43 coupled to the cylindrical support portion 42, (44). Particularly, the cylindrical supporting portion 42 is formed with three fixing holes 42a, 42b and 42c, so that the first, second and third sensor fixing legs 24a, 24b and 24c are inserted. Each of the upper and lower conductive pins 43 and 44 is divided into three to form a seating surface for seating the ends of the first, second and third receptors 22a, 22b and 22c, And serves as a poling portion for polling the receptors 22a, 22b, and 22c.

The first, second, and third sensor fixing legs 24a, 24b, 24c are inserted into the three fixing holes 42a (42a, 42b) while placing the annular frame 25 on the cylindrical supporting portion 42 of the poling jig 4, The upper and lower conductive pins 43 and 44 are brought into close contact with the first, second and third receptors 22a, 22b and 22c, respectively, and then the upper and lower conductive pins The polling process is completed by applying a voltage to the electrodes 43 and 44. As a result, the first, second and third receptors 22a, 22b, and 22c are in a state of generating a piezoelectric effect by the applied voltage effect. Thereafter, the spherical polymer 23 is attached to the ciliary pillars 21 of the first, second and third receptors 22a, 22b and 22c polled to complete the biomimetic-island-shaped piezoelectric sensor 1 as shown in Fig.

Referring again to FIG. 3, the biometric mimic island model piezoelectric sensor 1 is then fabricated into a vector sensor assembly structure 5-1 through S80.

S80 is a step of assembling the biometric-mimetic-island-type piezoelectric sensor 1 into a vector sensor assembly structure 5-1. 6 shows an example of a sensor assembly member for manufacturing the vector sensor assembly structure 5-1. As shown in the figure, the sensor assembly member 5 includes a supporting portion 51 for attaching the biometric-mimetic-island-shaped piezoelectric sensor 1, a signal processing circuit board (not shown) for processing the bi- 54).

The supporting portion 51 is a circular PCB substrate connected to the signal processing circuit board 54 and includes three leg fixing holes 51a and 51b concentric with the ground end 53 so as to surround the ground end 53 formed at the center 51b and 51c and three signal processing stages 52a, 52b and 52c concentric with the three leg fixing holes 51a, 51b and 51c so as to surround the three leg fixing holes 51a, 51b and 51c, . The signal processing circuit board 54 is a rectangular PCB substrate and includes various circuit elements including a bus together with a plurality of elements for processing the signals through the signal processing terminals 52a, 52b and 52c and the ground terminal 53 . Particularly, the signal processing circuit board 54 includes a pre-amplifier.

When the assembly process is performed, the biometric-mimetic-island type piezoelectric sensor 1 is configured such that each of the first, second and third sensor fixing legs 24a, 24b, and 24c is fitted into the three leg fixing holes 51a, 51b, and 51c, (51), and as a result, the vector sensor assembly structure (5-1) is completed as shown in FIG. Therefore, the vector sensor assembly structure 5-1 is configured such that each voltage of the first, second and third receivers 22a, 22b and 22c is transmitted through the three signal processing stages 52a, 52b and 52c and the ground stage 53 And is transmitted to the signal processing circuit board 54 as a response signal. Then, the signal processing circuit board 54 processes the three signals of the first, second and third receivers 22a, 22b, and 22c through a pre-amplifier, And outputs a vector signal indicating the directionality of the sound signal through a signal processing process using signal ratios at the ends of the receivers 22a, 22b, and 22c.

Referring again to FIG. 3, the vector sensor assembly structure 5-1 is finally fabricated into a miniature underwater acoustic vector sensor 100 via S90.

S90 is a process for converting the vector sensor assembly structure 5-1 into a micro-underwater acoustic vector sensor 100 by packaging. 8 shows an example of a sensor packing member in which a vector sensor assembly structure according to the present invention is assembled. The sensor packing member 6 includes an oil film 61 made of a thin conductive rubber material, a sensor housing 62 into which the castor oil is injected and in which the vector sensor assembly structure 5-1 is accommodated, a screw 63 -1) to fix the oil film 61 to the sensor housing 62. In particular, the sensor packing member 6 has a role of fixing the substrate on which the sensor is mounted and a design that can withstand a high hydrostatic pressure when operating in deep water.

When the packaging process is completed, the vector sensor assembly structure 5-1 is inserted into the sensor housing 62, the connection flange 63 is positioned at the entrance of the sensor housing 62, and the screws 63-1 The sensor housing 62 is fixed to the oil film 61 and castor oil is injected using the signal line outlet of the sensor housing 62. [ The castor oil is able to preserve the sensitivity of the entire sensor through the flow of a suitable fluid. In this case, the signal processing circuit board 54 of the vector sensor assembly structure 5-1 is fixed inside the sensor housing 62 using a hook structure, a clip structure or a groove structure. As a result, the manufacture of the miniature underwater acoustic vector sensor 100 is completed, which is illustrated in FIG. The miniature underwater acoustic vector sensor 100 is configured such that the signal line 100-1 is drawn out of the sensor housing 62 and the signal line 100-1 is processed in the signal processing circuit board 54 And transmits a vector signal that indicates the directionality of the acoustic signal.

As described above, the biomimetic islands model underwater acoustic vector sensor and the manufacturing method thereof according to the present embodiment can implement the following features.

First, the sensor presented in this embodiment overcomes the problems that are generally encountered in the manufacturing process of the conventional island model sensor by using a production technique called powder injection molding, and through this, a three-dimensional single island model piezoelectric structure is proposed A piezoelectric sensor capable of measuring an acoustic vector signal is proposed. Second, in the case of utilizing the powder injection molding technology, the sensor disclosed in this embodiment can solve the problems related to the uniformity and accuracy of the conventional method by manufacturing the sensitive receptor portion and the ciliary portion to be molded in one body, The stability of the signal can be ensured and the possibility of utilization as a vector sensor can be increased. Third, the sensor presented in the present embodiment adopts the three-way piezoelectric method utilizing the excellent energy conversion efficiency of the PMN-PZT piezoelectric material, out of the four-step piezoresistance method of the structurally developed vector sensor, It is possible to improve the reliability. Fourth, the sensor presented in this embodiment can improve the sensitivity of the sensor by attaching plastic spheres on the cilia in order to amplify the acoustic transmission effect of cilia.

1: Biomimetic island model acoustic vector sensor
1-1: Sensor Piezoelectric Structure
21: ciliary columns 22a, 22b, 22c: first, second and third receptors
23: spherical polymer 24a, 24b, 24c: first, second and third sensor fixing legs
25: annular frame
4: Polling jig 41: Structure fixing part
42: cylindrical support portion 43, 44: upper, lower conductive pin
5: Sensor assembly member 5-1: Vector sensor assembly structure
51: Support portions 51a, 51b, 51c: Leg fixing holes
52a, 52b, 52c: signal processing stage 53: ground stage
54: signal processing circuit board
6: Sensor packing member
61: Oil film 62: Sensor housing
63: Connection flange 63-1: Screw
100: Ultra-small submersible acoustic vector sensor
100-1: Signal line

Claims (16)

An induction device vertically erected at the center of the annular frame to mechanically amplify the sound pressure to form an island model;
A receiver connected to the induction device, converting the amplified signal of the induction device into an electrical signal, and generating a voltage according to an electrical signal size;
And a sensor fixing leg integrated with the receptacle and acting as a foot for fixation,
The receptacle is composed of first, second and third receptors formed with an end gathering toward the center of the annular frame, and the sensor fixing leg comprises first, second and third sensors And a fixed leg. The biomimetic island model underwater acoustic vector sensor comprises:
The biomimetic detector according to claim 1, wherein the sensing element comprises a ciliary column vertically erected at a center of the annular frame and connected to the receptor, and a spherical polymer provided at an upper end of the ciliary column to sense the negative pressure. Model Underwater Acoustic Vector Sensor.
The underwater acoustic vector sensor of claim 2, wherein the ciliary column and the annular frame are fabricated by powder injection molding.

delete [Claim 2] The biomimetic island model underwater acoustic vector sensor according to claim 1, wherein each of the first, second, and third receptors is polled together with a poling jig.
The biomimetic isotope underwater acoustic vector sensor of claim 1, wherein each of the first, second and third sensor fixing legs is formed vertically in the first, second and third receptors.
[4] The biomimetic island model underwater acoustic vector sensor according to claim 3, wherein the first, second and third receptors and the first, second and third sensor fixing legs are manufactured by powder injection molding. [3] The apparatus according to claim 1, wherein each of the first, second, and third receptors is polled together with a poling jig, and the poling jig has a structure fixing portion facing each other to form a space in which the first, second, An upper conductive pin coupled to the structural fixing part and applying a voltage to the upper surface of the first, second and third receptors in close contact with the seating surface, And a lower conductive pin for applying a voltage by bringing the lower conductive pin into close contact with a seating surface.
The sensor assembly of claim 1, wherein the sensor securing leg is coupled to a sensor assembly member;
Wherein the sensor assembly member comprises a signal processing circuit board having a supporting portion and a supporting portion connected to each other, wherein the supporting portion includes a leg fixing hole into which the sensor fixing leg is inserted, And a signal processing stage and a ground stage.
The signal processing circuit board according to claim 9, wherein the signal processing circuit board is provided with a pre-amplifier, the pre-amplifier processes signals of the receiver, and finally performs signal processing using the signal ratio of the receiver And outputting the vector signal as a vector signal that indicates the directionality of the acoustic signal through the process.
10. The sensor assembly of claim 9, wherein the sensor assembly member is coupled to a sensor packing member,
Wherein the sensor packing member comprises an oil film of a conductive rubber material, and a sensor housing in which the sensor assembly member is received and castor oil is injected to preserve the sensor sensitivity.
(A) preparing a powdered piezoelectric material;
(B) the powder piezoelectric material is mixed to form a mixed piezoelectric material, the mixed piezoelectric material is injection molded to be made into a primary sensor piezoelectric structure, and the primary sensor piezoelectric structure is subjected to solvent degreasing the first degreasing sensor piezoelectric structure is subjected to thermal debinding to form a second degreasing sensor piezoelectric structure and the second degreasing sensor piezoelectric structure is sintered a sensor having a first, a second and a third receptors that are gathered inside the annular frame to generate a voltage in accordance with an electrical signal size, and first, second, and third sensor fixing legs integrated into the first, A step of fabricating the piezoelectric structure;
(C) a spherical polymer is attached to the upper end of the ciliary column vertically installed in the first, second and third receptors after a voltage is applied to each end of the first, second and third receptors by a poling jig A step of fabricating a biomimetic island-type piezoelectric sensor having a spherical polymer for sensing a sound pressure;
(D) fabricating the biomimetic island-type piezoelectric sensor as a vector sensor assembly structure by being assembled with a sensor assembly member;
(E) packaging the vector sensor assembly structure with a sensor packing member;
The method comprising the steps of:
delete [12] The apparatus of claim 12, wherein the poling jig includes a structure fixing part and a cylindrical supporting part facing each other to form a space in which the first, second, and third receivers are positioned, An upper conductive pin for applying a voltage to the upper surface of the upper surface of the upper surface of the lower conductive member to apply a voltage to the lower surface of the lower surface of the upper surface of the lower conductive member, Wherein the upper and lower conductive pins of the first, second, and third receptors are positioned and then poled by simultaneously applying a voltage to the end of the first and second and third receptors.
[14] The apparatus of claim 12, wherein the sensor assembly member comprises a support having a signal processing end for transmitting each voltage of the first, second and third receivers to the signal processing circuit board as a response signal and a ground end, And the first, second, and third sensor fixing legs are inserted into the first, second, and third leg fixing holes, respectively.
The sensor packing member according to claim 12, wherein the sensor packing member comprises an oil film of a conductive rubber material and a sensor housing,
Wherein when the vector sensor assembly structure is received in the sensor housing, castor oil is injected into the sensor housing after the oil film is combined with the sensor housing to preserve sensor sensitivity. Gt;
KR1020150129801A 2015-09-14 2015-09-14 An acoustic vector sensor based on the biomimetic artificial hair cell and the method for manufacturing KR101787196B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020150129801A KR101787196B1 (en) 2015-09-14 2015-09-14 An acoustic vector sensor based on the biomimetic artificial hair cell and the method for manufacturing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020150129801A KR101787196B1 (en) 2015-09-14 2015-09-14 An acoustic vector sensor based on the biomimetic artificial hair cell and the method for manufacturing

Publications (2)

Publication Number Publication Date
KR20170032044A KR20170032044A (en) 2017-03-22
KR101787196B1 true KR101787196B1 (en) 2017-10-18

Family

ID=58497461

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020150129801A KR101787196B1 (en) 2015-09-14 2015-09-14 An acoustic vector sensor based on the biomimetic artificial hair cell and the method for manufacturing

Country Status (1)

Country Link
KR (1) KR101787196B1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112903088B (en) * 2021-01-18 2023-06-02 中国兵器工业集团第二一四研究所苏州研发中心 MEMS bionic vector acoustic wave sensor with cross-shaped sensitive structure and processing method thereof
CN113331863B (en) * 2021-06-24 2023-08-25 中北大学 High-sensitivity MEMS heart sound and electrocardio integrated detection sensor based on beat type bionic cilia
CN114838806B (en) * 2022-04-07 2024-06-21 中北大学 MEMS wake flow detection sensor
CN115158507B (en) * 2022-06-17 2023-05-30 山西大学 Bionic quadruped mobile robot based on folding spring tube soft mechanical arm
KR102690571B1 (en) 2022-08-01 2024-07-31 엘아이지넥스원 주식회사 Combined underwater vector sensor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101369913B1 (en) 2012-07-04 2014-03-06 한국생산기술연구원 Underwater moving body capable of measuring water stream, and apparatus and method for measuring water stream

Also Published As

Publication number Publication date
KR20170032044A (en) 2017-03-22

Similar Documents

Publication Publication Date Title
KR101787196B1 (en) An acoustic vector sensor based on the biomimetic artificial hair cell and the method for manufacturing
Babatain et al. Acceleration sensors: Sensing mechanisms, emerging fabrication strategies, materials, and applications
Song et al. Recent progress of miniature MEMS pressure sensors
CN102103013B (en) Three-dimensional vector hydrophone
CN106805954A (en) A kind of Wearable pliable pressure sensor and preparation method thereof
US20140283604A1 (en) Three-dimensional microelectromechanical systems structure
CN102105767B (en) Oscillating element sensor for detecting boundary layer transition
JP4864888B2 (en) Vibration sensor
CN109059748B (en) Flexible sensor and flexible signal detection device
CN103941041A (en) Single-mass-block three-axis MEMS accelerometer with three frame structures
Guo et al. Stand-alone stretchable absolute pressure sensing system for industrial applications
Wang et al. A wireless inductive sensing technology for soft pneumatic actuators using magnetorheological elastomers
CN113923581B (en) Method for manufacturing vibration unit and bone voiceprint sensor
KR101130335B1 (en) microphone
CN203933949U (en) Unidirectivity MEMS microphone
JP2003130722A (en) Light interference-type microhydrophone
CN111795771B (en) Pressure sensor with multiple pressure sensing elements
CN112903088A (en) MEMS bionic vector acoustic wave sensor with cross-shaped sensitive structure and processing method thereof
WO2014001010A1 (en) Microphone arrangement comprising a stack of mems -microphone and interface - chip
Ni et al. Monolithic composite “pressure+ acceleration+ temperature+ infrared” sensor using a versatile single-sided “SiN/Poly-Si/Al” process-module
Najafi Biomimetic hair sensors: Utilizing the third dimension
CN105651375A (en) Extremely low frequency micro-vibration signal sensor
Amiri et al. Design and simulation of a flat cap mushroom shape microelectromechanical systems piezoelectric transducer with the application as hydrophone
Priyanka et al. Advanced enhancement model of bionics fish cilia MEMS vector hydrophone-systematic analysis review
CN110260971B (en) Sound pressure signal amplification structure

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant