CN105651375A - Extremely low frequency micro-vibration signal sensor - Google Patents
Extremely low frequency micro-vibration signal sensor Download PDFInfo
- Publication number
- CN105651375A CN105651375A CN201610194411.8A CN201610194411A CN105651375A CN 105651375 A CN105651375 A CN 105651375A CN 201610194411 A CN201610194411 A CN 201610194411A CN 105651375 A CN105651375 A CN 105651375A
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- Prior art keywords
- vibration
- receiving sheet
- support
- low frequency
- extremely low
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- 239000000463 material Substances 0.000 claims description 22
- 230000006698 induction Effects 0.000 claims description 20
- 239000012528 membrane Substances 0.000 claims description 18
- 239000004033 plastic Substances 0.000 claims description 10
- 229920003023 plastic Polymers 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 5
- 229910052799 carbon Inorganic materials 0.000 claims description 5
- 239000000835 fiber Substances 0.000 claims description 5
- 239000003365 glass fiber Substances 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 239000007769 metal material Substances 0.000 claims description 5
- 229910010293 ceramic material Inorganic materials 0.000 claims 1
- 238000001514 detection method Methods 0.000 abstract description 6
- 230000005489 elastic deformation Effects 0.000 abstract description 5
- 230000035945 sensitivity Effects 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 230000035939 shock Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
- G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
The invention provides an extremely low frequency micro-vibration signal sensor, comprising a vibration receiver, a piezoelectric film sensor and a support. The vibration receiver is fitly connected with the support, forming uniform supporting of the support around the vibrato receiver; the bottom of the vibration receiver and a through hole in the support form a cavity, the piezoelectric film sensor is flatly attached to the bottom of the vibration receiver, wherein the cavity is used for keeping a sufficient elastic deformation space in the vertical direction for the vibration receiver. The extremely low frequency micro-vibration signal sensor is simple in structure, low in cost, high in sensitivity and small in size and enables full coverage of extremely low frequency vibration signals; when the vibration receiver receives a vertical vibration signal, corresponding deformation is made with the vibration signal, and the piezoelectric film sensor attaching to the vibration receiver also deforms along and produces a corresponding electrical signal; as extremely low frequency micro-vibration signals can be sensitively sensed by using the above-mentioned design structure; the extremely low frequency micro-vibration signal sensor is widely applicable to the detection of industrial vibrations and cardioballistic signal vibrations.
Description
[technical field]
The present invention relates to vibration induction field, be specifically related to a kind of extremely low frequency micro-vibration signal induction apparatus.
[background technology]
In recent years, along with the development of science and technology, the raising of many key components precision and Computing ability, the sensing collection and analysis ability for vibration signal has had significant raising. The application making vibration signal has had the field more extensively expanded, such as the heart impacts, accurate digital control equipment, bridge vibration monitoring etc., but prior art device is for the detection shortage effectively means of low cost of extremely low frequency range (such as 0.1Hz��1000Hz) Vibration Signal in Frequency Domain.
[summary of the invention]
The purpose of the present invention solves the problems of the prior art exactly, and for achieving the above object, the present invention proposes can accurately sense and collect a kind of extremely low frequency micro-vibration signal induction apparatus of extremely low frequency range (0.1Hz��1000Hz) micro-vibration signal.
A kind of extremely low frequency micro-vibration signal induction apparatus, including vibration receiving sheet, piezoelectric membrane vane and for support vibration receiving sheet in the support of hollow form, described vibration receiving sheet is the flaky materials such as carbon fibre material, glass fiber material, metal material, plastic plate, these materials should have high-tensile, high elastic modulus, creep resistance is strong, and can effectively the vibration of 0.1Hz��1000Hz be responded.
Vibration receiving sheet is connected with support assorted, forms the support even support to vibration receiving sheet periphery; The bottom surface of vibration receiving sheet forms a cavity with the through hole in support, and described piezoelectric membrane vane is flattened on vibration receiving sheet bottom surface. Wherein: the effect of this cavity is to leave enough elastic deformation spaces in the vertical direction for vibration receiving sheet.
As preferably: the through hole in described support is stepped hole, vibration receiving sheet is set in this stepped hole, and this stepped hole can play vibration receiving sheet transverse direction fixation.
As preferably: the top of the through hole in described support is shape hole of falling from power, the edge gradient of vibration receiving sheet is equal with the shape hole gradient of falling from power in support, vibration receiving sheet is set this and is fallen in stepped hole, and the edge of vibration receiving sheet can be bonded to each other with the inwall of falling stepped hole of support.
As preferably: the cross section of described vibration receiving sheet is more than the cross section of support inner via hole so that the bottom surface of vibration receiving sheet is when being fitted in the upper surface of support, it is possible to support inner via hole is completely covered under vibration receiving sheet.
As preferably: the end face of described vibration receiving sheet is mutually concordant with the upper surface of support, can effectively reduce installation dimension.
As preferably: described piezoelectric membrane vane produces corresponding electric signal with vibration receiving sheet deformation.
As preferably: described support adopts the materials such as plastics, metal, pottery to make, and the shape of support and vibration receiving sheet is mutually matched.
As preferably: the cross section of described support is annular, hollow, rectangular or hollow polygon.
As preferably: the circular in cross-section of described vibration receiving sheet, rectangle, polygon or other shapes.
As preferably: described piezoelectric membrane vane is flattened on vibration receiving sheet bottom center position.
Compared with prior art, beneficial effects of the present invention: product structure of the present invention is simple, and with low cost, highly sensitive, volume is little. Realize all standing to extremely low frequency vibration signal.
The design fundamentals of the present invention are, when vibrating receiving sheet and receiving longitudinal vibration signal, make corresponding deformation with vibration signal, and the piezoelectric membrane vane being close to vibration receiving sheet also produces corresponding electric signal therewith deforming.
Owing to adopting above-mentioned design structure can sense the micro-vibration signal of extremely low frequency range (0.1Hz��1000Hz) delicately. And can be widely applied to industrial vibration, the detection of heart impact signal vibration.
[accompanying drawing explanation]
Fig. 1 is the bonding state structural representation of a kind of extremely low frequency micro-vibration signal induction apparatus in the embodiment of the present invention one.
Fig. 2 is exploded perspective schematic diagram in Fig. 1.
Fig. 3 is the bonding state structural representation of a kind of extremely low frequency micro-vibration signal induction apparatus in the embodiment of the present invention two.
Fig. 4 is exploded perspective schematic diagram in Fig. 3.
Fig. 5 is the bonding state structural representation of a kind of extremely low frequency micro-vibration signal induction apparatus in the embodiment of the present invention three.
Fig. 6 is exploded perspective schematic diagram in Fig. 5.
Accompanying drawing marks: vibration receiving sheet 1, support 2, through hole 3.
[detailed description of the invention]
Embodiment one:
As shown in Fig. 1��2, the present invention provides the specific embodiment of a kind of extremely low frequency micro-vibration signal induction apparatus, including vibration receiving sheet 1, piezoelectric membrane vane and for support vibration receiving sheet 1 in the support 2 of hollow form, described vibration receiving sheet 1 is to adopt the flaky materials such as carbon fibre material, glass fiber material, metal material, plastic plate, these materials should have high-tensile, high elastic modulus, creep resistance is strong, and can effectively the vibration of 0.1Hz��1000Hz be responded.
Vibration receiving sheet 1 is connected with support 2, forms the support 2 even support to vibration receiving sheet 1 periphery. The bottom surface of vibration receiving sheet 1 forms a cavity with the through hole 3 in support 2, and described piezoelectric membrane vane is flattened on vibration receiving sheet 1 bottom center position. Wherein: the effect of this cavity is to leave enough elastic deformation spaces in the vertical direction for vibration receiving sheet 1.
As shown in Fig. 1��2, the through hole 3 in described support 2 is stepped hole, and vibration receiving sheet 1 is set in this stepped hole, and the edge of vibration receiving sheet 1 can be bonded to each other with the stepped hole inwall of support 2. This stepped hole can play the horizontal fixation of vibration receiving sheet 1.
The end face of described vibration receiving sheet 1 is mutually concordant with the upper surface of support 2, can effectively reduce installation dimension.
Wherein: described support 2 adopts the materials such as plastics, metal, pottery to make. And support 2 is mutually matched with the shape vibrating receiving sheet 1.The cross section of described support 2 is annular or hollow, rectangular. The circular in cross-section of described vibration receiving sheet 1, rectangle, polygon or other shapes.
The product structure of the embodiment of the present invention is simple, and with low cost, highly sensitive, volume is little. Realize all standing to extremely low frequency signal. The design fundamentals of the present invention are, after vibration receiving sheet 1 receives longitudinal vibration signal, make corresponding deformation with vibration signal, and the piezoelectric membrane vane deformation being close to vibration receiving sheet 1 produces corresponding electric signal. Owing to adopting above-mentioned design structure can sense the micro-vibration signal of extremely low frequency range (0.1Hz��1000Hz) delicately. And it is widely used in industrial vibration, the detection of heart impact shock.
Embodiment two:
As shown in figs. 34, the present invention provides the specific embodiment of a kind of extremely low frequency micro-vibration signal induction apparatus, including vibration receiving sheet 1, piezoelectric membrane vane and for support vibration receiving sheet 1 in the support 2 of hollow form, described vibration receiving sheet 1 is to adopt the flaky materials such as carbon fibre material, glass fiber material, metal material, plastic plate, these materials should have high-tensile, high elastic modulus, creep resistance is strong, and can effectively the vibration of 0.1Hz��1000Hz be responded.
Vibration receiving sheet 1 is connected with support 2, forms the support 2 even support to vibration receiving sheet 1 periphery. The bottom surface of vibration receiving sheet 1 forms a cavity with the through hole 3 in support 2, and described piezoelectric membrane vane is flattened on vibration receiving sheet 1 bottom center position.
Wherein: the effect of this cavity is to leave enough elastic deformation spaces in the vertical direction for vibration receiving sheet 1.
As shown in figs. 34, the top of the through hole 3 in described support 2 is shape hole of falling from power, the edge gradient of vibration receiving sheet 1 is equal with the shape hole gradient of falling from power in support 2, vibration receiving sheet 1 is set this and is fallen in stepped hole, and the edge of vibration receiving sheet 1 can be bonded to each other with the inwall of falling stepped hole of support 2.
The end face of described vibration receiving sheet 1 is mutually concordant with the upper surface of support 2, can effectively reduce installation dimension.
Wherein: described support 2 adopts the materials such as plastics, metal, pottery to make. And support 2 is mutually matched with the shape vibrating receiving sheet 1. The cross section of described support 2 is annular, hollow, rectangular or hollow polygon. The circular in cross-section of described vibration receiving sheet 1, rectangle, polygon or other shapes.
The product structure of the embodiment of the present invention is simple, and with low cost, highly sensitive, volume is little. Realize all standing to extremely low frequency signal. The design fundamentals of the present invention are, after vibration receiving sheet 1 receives longitudinal vibration signal, make corresponding deformation with vibration signal, and the piezoelectric membrane vane deformation being close to vibration receiving sheet 1 produces corresponding electric signal. Owing to adopting above-mentioned design structure can sense the micro-vibration signal of extremely low frequency range (0.1Hz��1000Hz) delicately. And it is widely used in industrial vibration, the detection of heart impact shock.
Embodiment three:
As shown in Fig. 5��6, the present invention provides the specific embodiment of a kind of extremely low frequency micro-vibration signal induction apparatus, including vibration receiving sheet 1, piezoelectric membrane vane and for support vibration receiving sheet 1 in the support 2 of hollow form, described vibration receiving sheet 1 is to adopt the flaky materials such as carbon fibre material, glass fiber material, metal material, plastic plate, these materials should have high-tensile, high elastic modulus, creep resistance is strong, and can effectively the vibration of 0.1Hz��1000Hz be responded.
Vibration receiving sheet 1 is connected with support 2, forms the support 2 even support to vibration receiving sheet 1 periphery. The bottom surface of vibration receiving sheet 1 forms a cavity with the through hole 3 in support 2, and described piezoelectric membrane vane is flattened on vibration receiving sheet 1 bottom center position. Wherein: the effect of this cavity is to leave enough elastic deformation spaces in the vertical direction for vibration receiving sheet 1.
As shown in Fig. 5��6, the cross section of described vibration receiving sheet 1 is more than the cross section of support 2 inner via hole 3 so that the bottom surface of vibration receiving sheet 1 is when being fitted in the upper surface of support 2, it is possible to support 2 inner via hole 3 is completely covered on vibration receiving sheet 1 time.
Wherein: described support 2 adopts the materials such as plastics, metal, pottery to make. And support 2 is mutually matched with the shape vibrating receiving sheet 1. The cross section of described support 2 is annular, hollow, rectangular or hollow polygon. The circular in cross-section of described vibration receiving sheet 1, rectangle, polygon or other shapes.
The product structure of the embodiment of the present invention is simple, and with low cost, highly sensitive, volume is little. Realize all standing to extremely low frequency signal. The design fundamentals of the present invention are, after vibration receiving sheet 1 receives longitudinal vibration signal, make corresponding deformation with vibration signal, and the piezoelectric membrane vane deformation being close to vibration receiving sheet 1 produces corresponding electric signal. Owing to adopting above-mentioned design structure can sense the micro-vibration signal of extremely low frequency range (0.1Hz��1000Hz) delicately. And it is widely used in industrial vibration, the detection of heart impact shock.
Above-described embodiment is the description of the invention, is not limitation of the invention, any scheme after simple transformation of the present invention is belonged to protection scope of the present invention.
Claims (9)
1. an extremely low frequency micro-vibration signal induction apparatus, it is characterised in that including vibration receiving sheet, piezoelectric membrane vane and the support in hollow form, described vibration receiving sheet is carbon fibre material sheet, glass fiber material sheet, metal material sheet or plastic plate; Vibration receiving sheet is connected with support assorted, forms the support even support to vibration receiving sheet periphery; The bottom surface of vibration receiving sheet forms a cavity with the through hole in support, and described piezoelectric membrane vane is flattened on vibration receiving sheet bottom surface.
2. a kind of extremely low frequency micro-vibration signal induction apparatus according to claim 1, it is characterised in that the through hole in described support is stepped hole, vibration receiving sheet is set in this stepped hole, and this stepped hole can play vibration receiving sheet transverse direction fixation.
3. a kind of extremely low frequency micro-vibration signal induction apparatus according to claim 1, it is characterized in that, the top of the through hole in described support is shape hole of falling from power, the edge gradient of vibration receiving sheet is equal with the shape hole gradient of falling from power in support, vibration receiving sheet is set this and is fallen in stepped hole, and the edge of vibration receiving sheet can be bonded to each other with the inwall of falling stepped hole of support.
4. a kind of extremely low frequency micro-vibration signal induction apparatus according to claim 1, it is characterized in that, the cross section of described vibration receiving sheet is more than the cross section of support inner via hole, make the bottom surface of vibration receiving sheet when being fitted in the upper surface of support, it is possible to be completely covered on by support inner via hole under vibration receiving sheet.
5. a kind of extremely low frequency micro-vibration signal induction apparatus according to Claims 2 or 3, it is characterised in that described piezoelectric membrane vane produces corresponding electric signal with vibration receiving sheet deformation.
6. a kind of extremely low frequency micro-vibration signal induction apparatus according to claim 1, it is characterised in that described support adopts plastics, metal or ceramic material to make.
7. a kind of extremely low frequency micro-vibration signal induction apparatus according to claim 1, it is characterised in that the cross section of described support is annular, hollow, rectangular or hollow polygon.
8. a kind of extremely low frequency micro-vibration signal induction apparatus according to claim 1 or 7, it is characterised in that the circular in cross-section of described vibration receiving sheet, rectangle or polygon.
9. a kind of extremely low frequency micro-vibration signal induction apparatus according to claim 1, it is characterised in that described piezoelectric membrane vane is flattened on vibration receiving sheet bottom surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610194411.8A CN105651375A (en) | 2016-03-31 | 2016-03-31 | Extremely low frequency micro-vibration signal sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610194411.8A CN105651375A (en) | 2016-03-31 | 2016-03-31 | Extremely low frequency micro-vibration signal sensor |
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| Publication Number | Publication Date |
|---|---|
| CN105651375A true CN105651375A (en) | 2016-06-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610194411.8A Pending CN105651375A (en) | 2016-03-31 | 2016-03-31 | Extremely low frequency micro-vibration signal sensor |
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| Country | Link |
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| CN (1) | CN105651375A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108760027A (en) * | 2018-08-23 | 2018-11-06 | 德清县德意电脑有限公司 | A kind of modified very low frequencies micro-vibration signal inductor |
| CN112161695A (en) * | 2020-09-21 | 2021-01-01 | 清华大学深圳国际研究生院 | Flexible vibration sensor and manufacturing method thereof |
| WO2022027971A1 (en) * | 2020-08-03 | 2022-02-10 | 苏州大学 | Micro device integrating mechanical energy collection and vibration detection functions and manufacturing method therefor |
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|---|---|---|---|---|
| JPS567025A (en) * | 1979-06-29 | 1981-01-24 | Nissan Motor Co Ltd | Vibration sensor |
| CN1158415A (en) * | 1996-02-26 | 1997-09-03 | 三星电子株式会社 | Vibration detecting sensor |
| CN102901556A (en) * | 2012-10-09 | 2013-01-30 | 北京航空航天大学 | Magnetic suspension type ultra-low-frequency vibration sensor |
| CN203259247U (en) * | 2013-04-26 | 2013-10-30 | 南京新赛厨具设备有限公司 | Micro-vibration detector |
| CN203811271U (en) * | 2014-04-28 | 2014-09-03 | 上海融军科技有限公司 | Bridge vibration sensor probe |
| CN204988499U (en) * | 2015-06-25 | 2016-01-20 | 佛山市顺德区海明晖电子有限公司 | Vibration sensor |
| CN205562026U (en) * | 2016-03-31 | 2016-09-07 | 德清县德意电脑有限公司 | Extremely low frequency vibrates signal inductors a little |
-
2016
- 2016-03-31 CN CN201610194411.8A patent/CN105651375A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS567025A (en) * | 1979-06-29 | 1981-01-24 | Nissan Motor Co Ltd | Vibration sensor |
| CN1158415A (en) * | 1996-02-26 | 1997-09-03 | 三星电子株式会社 | Vibration detecting sensor |
| CN102901556A (en) * | 2012-10-09 | 2013-01-30 | 北京航空航天大学 | Magnetic suspension type ultra-low-frequency vibration sensor |
| CN203259247U (en) * | 2013-04-26 | 2013-10-30 | 南京新赛厨具设备有限公司 | Micro-vibration detector |
| CN203811271U (en) * | 2014-04-28 | 2014-09-03 | 上海融军科技有限公司 | Bridge vibration sensor probe |
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Non-Patent Citations (1)
| Title |
|---|
| 蓝鸿翔 等: "《电子信息系统基础》", 31 July 2002, 高等教育出版社 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108760027A (en) * | 2018-08-23 | 2018-11-06 | 德清县德意电脑有限公司 | A kind of modified very low frequencies micro-vibration signal inductor |
| WO2022027971A1 (en) * | 2020-08-03 | 2022-02-10 | 苏州大学 | Micro device integrating mechanical energy collection and vibration detection functions and manufacturing method therefor |
| CN112161695A (en) * | 2020-09-21 | 2021-01-01 | 清华大学深圳国际研究生院 | Flexible vibration sensor and manufacturing method thereof |
| CN112161695B (en) * | 2020-09-21 | 2022-04-29 | 清华大学深圳国际研究生院 | Flexible vibration sensor and manufacturing method thereof |
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Application publication date: 20160608 |
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