CN113331863B - High-sensitivity MEMS heart sound and electrocardio integrated detection sensor based on beat type bionic cilia - Google Patents
High-sensitivity MEMS heart sound and electrocardio integrated detection sensor based on beat type bionic cilia Download PDFInfo
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/24—Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
- A61B5/316—Modalities, i.e. specific diagnostic methods
- A61B5/318—Heart-related electrical modalities, e.g. electrocardiography [ECG]
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/0002—Remote monitoring of patients using telemetry, e.g. transmission of vital signals via a communication network
- A61B5/0004—Remote monitoring of patients using telemetry, e.g. transmission of vital signals via a communication network characterised by the type of physiological signal transmitted
- A61B5/0006—ECG or EEG signals
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/0002—Remote monitoring of patients using telemetry, e.g. transmission of vital signals via a communication network
- A61B5/0015—Remote monitoring of patients using telemetry, e.g. transmission of vital signals via a communication network characterised by features of the telemetry system
- A61B5/0022—Monitoring a patient using a global network, e.g. telephone networks, internet
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- A61B5/7225—Details of analog processing, e.g. isolation amplifier, gain or sensitivity adjustment, filtering, baseline or drift compensation
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- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B7/00—Instruments for auscultation
- A61B7/02—Stethoscopes
- A61B7/04—Electric stethoscopes
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Abstract
The application relates to a high-sensitivity MEMS (micro-electromechanical system) heart sound and electrocardio integrated detection sensor based on beat type bionic cilia, which mainly comprises a probe shell, an MEMS acoustic sensor microstructure, a heart sound and electrocardio integrated circuit and a signal acquisition card, wherein the beat type bionic cilia are arranged on the MEMS acoustic sensor microstructure and used for detecting heart sound signals, and an electrocardio electrode on the probe shell is used for detecting electrocardio signals, and the detected signals are transmitted to the heart sound and electrocardio integrated circuit for processing and then transmitted to the signal acquisition card after processing. The application has the advantages of scientific design, reasonable structure, simple and convenient operation, convenient carrying, sensitive detection, low cost, batch processing, synchronous detection of heart sounds and electrocardiosignals and the like, and compared with the traditional sensor probe, the application has more accurate, rapid and convenient detection of heart sounds and electrocardiosignals.
Description
Technical Field
The application relates to a biomedical device, in particular to a high-sensitivity MEMS heart sound and electrocardio integrated detection sensor based on beat-type bionic cilia.
Background
Heart sound signals are important physiological signals of the human body, and are signals reflecting the movement of the heart and the cardiovascular system, and include physiological information and pathological information of interactions between various parts of the heart, such as atria, ventricles, cardiovascular vessels, macrovessels and various valves, and heart functions can be estimated by using heart sounds.
The stethoscope was invented by the french doctor, and is continuously improved by many people to form a traditional acoustic stethoscope which is commonly used at present, and the traditional stethoscope comprises a resonance sheet, a sound resonance cavity and a catheter for conducting sound, however, the stethoscope has the following problems: 1) The rubber tube of the stethoscope is easy to cause the distortion of heart sound signals, so that the heart sound signals cannot be accurately acquired, and a doctor cannot make accurate judgment; 2) The heart sound and electrocardiosignal detection device is not suitable for obese people, and is tested, so that the heart sound and electrocardiosignal of the obese people have more interference signals and stronger transmitted and output signal weakness, and the heart sound and the electrocardiosignal of the obese people are difficult to collect.
In addition, the existing stethoscopes are all in-ear designs, and long-term auscultation can cause ear fatigue, so that judgment of doctors is affected. In order to solve the above problems, electronic stethoscopes have been developed. The electronic stethoscope uses a special acoustic sensor as a sensitive element for receiving acoustic signals, and the signals of the heart and lung sounds are more accurate by using a hardware filter and an operational amplifier. The digital stethoscope is also gradually introduced into the market at present, and can display and transmit heart sounds and electrocardiosignals, and can also be stored in a computer end, so that a doctor auscultates more conveniently, and medical teaching is also facilitated to be kept.
Disclosure of Invention
The application aims to provide a novel and convenient high-sensitivity MEMS heart sound and electrocardio integrated detection sensor based on beat-type bionic cilia.
The application is realized by the following technical scheme:
a high-sensitivity MEMS heart sound and electrocardio integrated detection sensor based on beat bionic cilia comprises a probe shell, an electrocardio electrode, an MEMS acoustic sensor microstructure, a heart sound and electrocardio integrated circuit and a signal acquisition card;
the probe shell is a round flat shell, the shell bottom of the probe shell is positioned at the middle lower part of the shell, and the shell bottom divides the inner space of the shell into an upper shell cavity and a lower mounting groove; the shell bottom is provided with a connecting through hole which is communicated with the shell cavity and the mounting groove, and the surface of the shell bottom positioned in the shell cavity is provided with a slot; two symmetrical circular buckles are respectively and outwardly arranged on the side shell walls on two sides of the probe shell, and the two circular buckles are closely adjacent to the shell cavity opening; a waterproof sound-transmitting film is encapsulated on a shell cavity opening of the probe shell, and an oil filling hole communicated with the shell cavity and a lead hole communicated with the mounting groove are also formed on a side shell wall of the probe shell;
the electrocardio-electrode is provided with two groups and is respectively arranged on two circular buckles on the probe shell;
the MEMS acoustic sensor microstructure comprises a central mass block, a supporting frame and four cantilever beams which are mutually perpendicular and are used for connecting the central mass block and the supporting frame, wherein boron ions are respectively injected into two ends of two symmetrical cantilever beams by utilizing a plasma injection technology to form piezoresistors, the resistance values of the four piezoresistors are equal and are connected into a Wheatstone full-bridge differential circuit through metal leads, and beat-type bionic cilia are vertically fixed on the central mass block; the support frame is fixed on the circular mounting plate, and a plugboard matched with the slot in the probe shell is arranged on one side plate edge of the circular mounting plate in an outward extending manner;
the MEMS acoustic sensor microstructure is inserted on a slot in the probe shell through an inserting plate, and the beat-type bionic cilia are arranged in parallel with the bottom surface in the shell; the heart sound and electrocardio integrated circuit is arranged in the mounting groove of the probe shell, the micro-junction of the MEMS acoustic sensor is connected with the heart sound and electrocardio integrated circuit through a wire passing through the connecting through hole, the electrocardio electrode is connected with the heart sound and electrocardio integrated circuit through the wire, and the wire at the output end of the heart sound and electrocardio integrated circuit passes through the wire hole and then is connected with the signal acquisition card; insulating silicone oil is filled in the shell cavity of the probe shell through the oil filling hole, and the oil filling hole, the connecting through hole and the lead hole are subjected to sealing treatment.
Further, the heart sound and electrocardio integrated circuit comprises a power circuit module, a heart sound circuit module and an electrocardio circuit module; the power supply circuit module mainly comprises LP2985AIM5-3.0/NOPB, LP2985AIM5-1.5/NOPB and TPS60403, the heart sound circuit module mainly comprises AD8226 and AD823, and the electrocardio circuit module mainly comprises AD8232 and AD 823.
Further, the sensor also comprises a USB interface module, and the USB interface module is connected with the signal acquisition card.
Further, the sensor further comprises a Bluetooth wireless module, and the Bluetooth wireless module is connected with the signal acquisition card.
Furthermore, the probe shell is made of aluminum alloy.
Further, the waterproof sound-transmitting membrane is made of an E-PTFE polytetrafluoroethylene material, and the thickness of the waterproof sound-transmitting membrane is 0.1mm.
The detection sensor has the advantages of scientific design, reasonable structure, simple and convenient operation, convenient carrying, sensitive detection, low cost, batch processing, synchronous detection of heart sounds and electrocardiosignals and the like, and compared with the traditional sensor probe, the detection sensor has the advantages of more accurate, rapid and convenient detection of heart sounds and electrocardiosignals, and has the following specific beneficial effects: 1) The detection sensor has small volume, sensitive response, low cost and light weight, and can be produced in a large scale, wherein the use of the beat type bionic cilia can ensure that the receiving area of sound is increased on the premise that the natural frequency covers the frequency range of heart sounds, so that the sensitivity is enhanced, the beat type is most sensitive to heart sound signals in the direction perpendicular to the beat, noise interference in other directions can be restrained, the signal-to-noise ratio is improved, the accuracy of the sensor probe is higher, and the efficiency is improved for doctor to see the doctor; 2) The detection sensor has the functions of filtering and noise reduction, so that the detected signal is more accurate, the interference signal is reduced, and the judgment of doctors is facilitated; 3) The probe shell of the detection sensor is provided with the two ear-like circular buckles, so that the probe shell can be used for fixing the electrocardio electrode and measuring the electrocardio signal, synchronous measurement of heart sound and the electrocardio signal is realized, a doctor can better analyze heart sound vibration signals of the patient, diagnosis of the doctor is facilitated, time is saved, friction noise and arm shake noise can be effectively reduced by the circular buckles, and detection accuracy is greatly improved; 4) The detection sensor also comprises a USB interface module and a Bluetooth wireless module, wherein the USB interface module can enable the heart sound electrocardiosignal to be displayed at a computer end, and the Bluetooth wireless module can enable the heart sound electrocardiosignal to be transmitted to a mobile phone end for display, so that a doctor can more conveniently see a diagnosis, can perform self detection, and is convenient and easy to operate.
Drawings
In order to more clearly illustrate the technical solutions of embodiments of the present application, the following description will briefly explain the embodiments or the drawings required to be used in the description of the prior art, where the drawings are intended to provide a further description of the present application and form a part thereof, and the exemplary embodiments of the present application and the description thereof are intended to explain the present application and not to limit the present application unduly.
FIG. 1 is a schematic view of the three-dimensional structure of the front face of the probe housing of the sensor of the present application.
FIG. 2 is a front view of the probe housing structure of the sensor of the present application.
FIG. 3 is a schematic view of the three-dimensional structure of the back of the probe housing of the sensor of the present application.
Fig. 4 is a rear view of the probe housing structure of the sensor of the present application.
Fig. 5 is a bottom view of fig. 2.
Fig. 6 is a top view of fig. 2.
Fig. 7 is a circuit diagram of a heart sound and electrocardio integrated circuit of the sensor of the application.
Fig. 8 is a circuit diagram of a power supply circuit module in the heart sound and electrocardio integrated circuit.
Fig. 9 is a circuit diagram of a heart sound circuit module in the heart sound and electrocardio integrated circuit.
Fig. 10 is a circuit diagram of an electrocardiographic circuit module in the heart sound electrocardiographic integrated circuit.
FIG. 11 is a schematic representation of the three-dimensional structure of the MEMS acoustic sensor microstructure of the sensor of the present application.
FIG. 12 is a top view of the MEMS acoustic sensor microstructure of the sensor of the present application.
In the figure: 1-probe shell, 2-shell cavity, 3-mounting groove, 4-connection through hole, 5-slot, 6-circular buckle, 7-oil filler hole, 8-lead hole, 9-center mass block, 10-support frame, 11-cantilever beam, 12-piezoresistor, 13-beat bionic cilia, 14-circular mounting plate, 15-plugboard, 16-power supply circuit module, 17-heart sound circuit module and 18-electrocardio circuit module.
Detailed Description
For a better understanding of the present application, reference will be made to the following description of the application taken in conjunction with the accompanying drawings and examples. It should be noted that, without conflict, the embodiments of the present application and features of the embodiments may be combined with each other.
As shown in fig. 1 to 12, a high-sensitivity MEMS heart sound and electrocardio integrated detection sensor based on beat-type bionic cilia comprises a probe housing 1, an electrocardio electrode, a MEMS acoustic sensor microstructure, a heart sound and electrocardio integrated circuit, a signal acquisition card, a USB interface module and a bluetooth wireless module.
The probe shell 1 is a circular flat shell, as shown in fig. 1 to 6, and is made of aluminum alloy, and the shell bottom is positioned at the middle lower part of the shell, and divides the inner space of the shell into an upper shell cavity 2 and a lower mounting groove 3; the shell bottom is provided with a connecting through hole 4 for communicating the shell cavity 2 and the mounting groove 3, and the surface of the shell bottom positioned in the shell cavity is provided with a slot 5; two symmetrical circular buckles 6 are respectively and outwardly arranged on the side shell walls on two sides of the probe shell 1, the two circular buckles 6 are arranged close to the shell cavity opening, two groups of electrocardio electrodes are arranged and are respectively arranged on the two circular buckles 6 on the probe shell 1, and the design of the two circular buckles 6 can effectively reduce friction noise and arm shake noise; the probe comprises a probe shell 1, wherein a ring of annular clamping groove is formed in a shell cavity opening of the probe shell, a waterproof sound-transmitting membrane is encapsulated in the shell cavity opening through the annular clamping groove, the waterproof sound-transmitting membrane is fixedly adhered in the annular clamping groove through 8008 adhesive, the waterproof sound-transmitting membrane is made of an E-PTFE polytetrafluoroethylene material, the thickness of the waterproof sound-transmitting membrane is 0.1mm, the waterproof sound-transmitting membrane can enable the sound attenuation degree to be low, the distortion degree to be low, the sound-transmitting performance is good, the non-adhesive performance, the waterproof dust-proof performance is thin and light; the side wall of the probe shell 1 is also provided with an oil filling hole 7 communicated with the shell cavity 2 and a lead hole 8 communicated with the mounting groove 3.
The MEMS acoustic sensor microstructure is made of SOI silicon wafers and is processed by adopting an MEMS semiconductor micromachining technology, as shown in FIG. 11 and FIG. 12, specifically, a central mass block 9, a supporting frame 10 and four cantilever beams 11 which are mutually perpendicular and are used for connecting the central mass block 9 and the supporting frame 10 are etched on a silicon substrate by utilizing an ICP plasma etching technology, boron ions are respectively injected into two ends of two symmetrical cantilever beams 11 by utilizing a plasma injection technology to form piezoresistors 12, and the resistance values of the four piezoresistors 12 are equal and are connected into a Wheatstone full-bridge differential circuit through metal leads; the center mass block 9 is vertically fixed with a beat type bionic cilia 13, the beat type bionic cilia 13 consists of a racket rod part and a round racket head part, the beat type bionic cilia 13 is adhered to the center of the center mass block 9 in a secondary integration mode, sound is transmitted through a waterproof sound-transmitting membrane through silicone oil to drive the beat type bionic cilia 13 to vibrate, so that the resistance of the piezoresistor 12 is influenced to change, the output signal of a Wheatstone full-bridge differential circuit is driven to change, and a heart and lung sound signal is finally detected; the supporting frame 10 is fixed on a circular mounting plate 14, and a plugboard 15 matched with the slot 5 in the probe shell 1 is arranged on one side plate edge of the circular mounting plate 14 outwards, as shown in fig. 12.
The circuit diagram of the heart sound and electrocardio integrated circuit is shown in fig. 7, and comprises a power supply circuit module 16, a heart sound circuit module 17 and an electrocardio circuit module 18; as shown in fig. 8, the power circuit module 16 mainly comprises LP2985AIM5-3.0/NOPB, LP2985AIM5-1.5/NOPB and TPS60403, and uses LP2985AIM5-3.0/NOPB to convert 3.7V into 3.0V, LP2985AIM5-1.5/NOPB to convert 3.7V into 1.5V, TPS60403 to convert 3.0V into-3.0V, providing for subsequent chip operation. As shown in fig. 9, the heart sound circuit module 17 mainly comprises an AD8226 and an AD823, differential signals of heart sounds are input into the AD8226 for amplification, the signal gain is 495, and R1, R7, C1 and C10 form a passive high-pass filter, according to heart sound characteristics, heart sounds which can be acquired mainly comprise a first heart sound and a second heart sound, and the main frequencies of the heart sounds are distributed at 20hz to 600hz, so that the high-pass cutoff frequency is set to 15.9hz,1.5v voltage is used as a reference voltage and is connected to a REF pin, the output signals are connected to the AD823 through a band-pass filter formed by cascading a passive low-pass filter circuit comprising R4, R5, C2 and C8 and a passive high-pass filter comprising R2, R3, C3 and C7, the bandwidth is 20hz to 1khz, and the gain in the band-pass is 0; as shown in FIG. 10, the electrocardio circuit module 18 mainly comprises an AD8232 and an AD823, the AD8232 is a single-lead integrated signal conditioning module specially used for bioelectric measurement such as electrocardio, and the electrocardio signal frequency band is limited to be within 0.5 Hz-40 Hz when being used for a monitoring system, so that a passive low-pass filter is formed by R8, R17, C28 and C25, a passive high-pass filter is formed by R9, R12, R13, C14 and C17, wherein the quality factor Q is controlled by R9 to limit the frequency to be within 0.5 Hz-40 Hz, and the electrocardio signal output is connected to the AD823 through a band-stop filter formed by R23, R24, R25, R27, R28, C29, C30 and C33 to filter the power frequency interference of 50 Hz.
The MEMS acoustic sensor microstructure is inserted on the slot 5 in the probe shell 1 through the plugboard 15 on the circular mounting plate 14 and is adhered and fixed by 8008 glue, and the beat-type bionic cilia 13 are arranged in parallel with the bottom surface in the shell; the heart sound and electrocardio integrated circuit is arranged in the mounting groove 3 of the probe shell 1, the micro-junction of the MEMS acoustic sensor and the heart sound and electrocardio integrated circuit are connected through a wire passing through the connecting through hole 4, the electrocardio electrode is connected with the heart sound and electrocardio integrated circuit through the wire, an output end wire of the heart sound and electrocardio integrated circuit passes through the wire leading hole and then is connected with the signal acquisition card, the signal acquisition card is connected with the USB interface module and is connected with the computer end through the USB interface module, the heart sound and electrocardio signals are transmitted to the computer end, and waveforms of the heart sound and the electrocardio signals are displayed in software of the computer end; meanwhile, the signal acquisition card is also connected with the Bluetooth wireless module, and heart sound electrocardiosignals can be wirelessly transmitted through the Bluetooth wireless module, for example, the heart sound electrocardiosignals are transmitted to a mobile phone for display and the like; insulating silicone oil with the same vibration function is filled in the shell cavity of the probe shell 1 through the oil filling hole, and the oil filling hole 7, the connecting through hole 4 and the lead hole 8 are subjected to sealing treatment.
The detection sensor uses the MEMS acoustic sensor microstructure and combines the beat-type bionic cilia 13 as a sensitive element to be applied to a stethoscope head, the beat-type bionic cilia 13 is adhered to the center of the center mass block 9 in a secondary integration mode, the contact area of the beat-type bionic cilia 13 is large, the sensitivity is high, and the detection is accurate; the beat-type bionic cilia 13 are driven to vibrate by transmitting acoustic signals in insulating silicone oil, so that the resistance of the piezoresistor 12 is influenced to change, the output signals of the Wheatstone full-bridge differential circuit are further driven to change, and the measured heart sound signals are transmitted to a heart sound and electrocardio integrated circuit on the back of the probe shell 1 for filtering and other treatments, namely, heart and lung sound signals are detected. Meanwhile, two circular buckles 6 are arranged at two ends of the probe shell 1 of the detection sensor and used for fixing the electrocardio electrode, and friction noise and arm shake noise can be effectively reduced due to the design of the circular buckles 6, so that the detection accuracy is greatly improved; the electrocardiosignal is detected through the electrocardio electrode, and the detected electrocardiosignal is transmitted to a heart sound and electrocardio integrated circuit at the back of the probe shell 1 for processing such as filtering, namely, the electrocardio sound signal is obtained through detection. The heart sound electrocardiosignals processed by the heart sound electrocardiosignal integrated circuit are transmitted into a signal acquisition card, and the signal acquisition card is packaged in a box and connected with a detection sensor through a rectangular connector; the signal acquisition card acquires the heart sound electrocardiosignals, then performs AD conversion, performs signal processing in the main control chip, stores the processed data in the flash, connects the stored data to a computer end, for example, connects the computer end through a USB interface module, and finally performs waveform display of the heart sound and the electrocardiosignals in the upper computer.
The foregoing has been a clear and complete description of the technical solutions of embodiments of the present application, and the described embodiments are only some embodiments of the present application, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.
Claims (7)
1. High sensitivity MEMS heart sound electrocardio integration detection sensor based on beat type bionical cilia, its characterized in that: the device comprises a probe shell, an electrocardio electrode, an MEMS acoustic sensor microstructure, a heart sound electrocardio integrated circuit and a signal acquisition card;
the probe shell is a round flat shell, the shell bottom of the probe shell is positioned at the middle lower part of the shell, and the shell bottom divides the inner space of the shell into an upper shell cavity and a lower mounting groove; the shell bottom is provided with a connecting through hole which is communicated with the shell cavity and the mounting groove, and the surface of the shell bottom positioned in the shell cavity is provided with a slot; two symmetrical circular buckles are respectively and outwardly arranged on the side shell walls on two sides of the probe shell, and the two circular buckles are closely adjacent to the shell cavity opening; a waterproof sound-transmitting film is encapsulated on a shell cavity opening of the probe shell, and an oil filling hole communicated with the shell cavity and a lead hole communicated with the mounting groove are also formed on a side shell wall of the probe shell;
the electrocardio-electrode is provided with two groups and is respectively arranged on two circular buckles on the probe shell;
the MEMS acoustic sensor microstructure comprises a central mass block, a supporting frame and four cantilever beams which are mutually perpendicular and are used for connecting the central mass block and the supporting frame, wherein boron ions are respectively injected into two ends of two symmetrical cantilever beams by utilizing a plasma injection technology to form piezoresistors, the resistance values of the four piezoresistors are equal and are connected into a Wheatstone full-bridge differential circuit through metal leads, and beat-type bionic cilia are vertically fixed on the central mass block; the support frame is fixed on the circular mounting plate, and a plugboard matched with the slot in the probe shell is arranged on one side plate edge of the circular mounting plate in an outward extending manner;
the MEMS acoustic sensor microstructure is inserted on a slot in the probe shell through an inserting plate, and the beat-type bionic cilia are arranged in parallel with the bottom surface in the shell; the heart sound and electrocardio integrated circuit is arranged in the mounting groove of the probe shell, the micro-junction of the MEMS acoustic sensor is connected with the heart sound and electrocardio integrated circuit through a wire passing through the connecting through hole, the electrocardio electrode is connected with the heart sound and electrocardio integrated circuit through the wire, and the wire at the output end of the heart sound and electrocardio integrated circuit passes through the wire hole and then is connected with the signal acquisition card; insulating silicone oil is filled in the shell cavity of the probe shell through the oil filling hole, and the oil filling hole, the connecting through hole and the lead hole are subjected to sealing treatment.
2. The beat-based bionic cilia-based high-sensitivity MEMS heart sound and electrocardio integrated detection sensor of claim 1, wherein: the heart sound and electrocardio integrated circuit comprises a power circuit module, a heart sound circuit module and an electrocardio circuit module; the power supply circuit module mainly comprises LP2985AIM5-3.0/NOPB, LP2985AIM5-1.5/NOPB and TPS60403, the heart sound circuit module mainly comprises AD8226 and AD823, and the electrocardio circuit module mainly comprises AD8232 and AD 823.
3. The beat-bionic cilia-based high-sensitivity MEMS heart sound and electrocardio integrated detection sensor of claim 1 or 2, wherein: the USB interface module is connected with the signal acquisition card.
4. The beat-bionic cilia-based high-sensitivity MEMS heart sound and electrocardio integrated detection sensor of claim 1 or 2, wherein: still include bluetooth wireless module, bluetooth wireless module is connected with signal acquisition card.
5. A beat-based biomimetic cilia high-sensitivity MEMS heart sound and electrocardio integrated detection sensor as claimed in claim 3, wherein: still include bluetooth wireless module, bluetooth wireless module is connected with signal acquisition card.
6. The beat-based bionic cilia-based high-sensitivity MEMS heart sound and electrocardio integrated detection sensor of claim 5, wherein: the probe shell is made of aluminum alloy.
7. The beat-based bionic cilia-based high-sensitivity MEMS heart sound and electrocardio integrated detection sensor of claim 6, wherein: the waterproof sound-transmitting membrane is made of an E-PTFE polytetrafluoroethylene material, and the thickness of the waterproof sound-transmitting membrane is 0.1mm.
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