CN113331863A - High-sensitivity MEMS heart sound and electrocardio integrated detection sensor based on beat type bionic cilia - Google Patents
High-sensitivity MEMS heart sound and electrocardio integrated detection sensor based on beat type bionic cilia Download PDFInfo
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Abstract
The invention relates to a high-sensitivity MEMS heart sound and electrocardio integrated detection sensor based on beat type bionic cilia, which mainly comprises a probe shell, an MEMS sound sensor microstructure, a heart sound and electrocardio integrated circuit and a signal acquisition card, wherein the beat type bionic cilia is arranged on the MEMS sound sensor microstructure and used for detecting heart sound signals, an electrocardio electrode on the probe shell is used for detecting electrocardio signals, and the two detected signals are transmitted to the heart sound and electrocardio integrated circuit for processing and then transmitted to the signal acquisition card after being processed. The invention has the advantages of scientific design, reasonable structure, simple and convenient operation, convenient carrying, sensitive detection, low cost, batch processing, synchronous detection of heart sounds and electrocardiosignals and the like, and compared with the traditional sensor probe, the invention can detect the heart sounds and the electrocardiosignals more accurately, quickly and conveniently.
Description
Technical Field
The invention relates to a biomedical device, in particular to a high-sensitivity MEMS heart sound and electrocardio integrated detection sensor based on beat type bionic cilia.
Background
The heart sound signal is an important physiological signal of a human body, is a signal reflecting the motion conditions of the heart and the cardiovascular system, contains physiological information and pathological information of the interaction among various parts of the heart, such as atria, ventricles, cardiovascular system, large blood vessels and various valves, and can be used for evaluating the heart function.
The stethoscope, originally invented by the french doctor renak, has been continuously improved by many people to slowly form the conventional acoustic stethoscope now in common use, and the components of the conventional stethoscope are a resonance plate, a sound resonance cavity and a sound conducting tube, however, the stethoscope has the following problems: 1) the rubber tube of the stethoscope is easy to cause the distortion of the heart sound signals, so that the heart sound signals cannot be accurately acquired, and doctors cannot make accurate judgment; 2) the method is not suitable for obese people, and tests show that heart sounds and electrocardio signals of the obese people have more interference signals, and the transmitted signals have stronger attenuation, so that the heart sounds and the electrocardio signals of the people are difficult to acquire.
In addition, current stethoscopes are all in-ear designs, and long-term auscultation can cause ear fatigue to influence doctor's judgement. In order to solve the above problems, an electronic stethoscope has been developed. The electronic stethoscope utilizes a special acoustic sensor as a sensitive element for receiving acoustic signals, and makes the heard cardiopulmonary sound signals more accurate by using a hardware filter and an operational amplifier. The existing digital stethoscope gradually enters the market, can display and transmit heart sounds and electrocardiosignals, and can be stored in a computer end, so that doctors can auscultate more conveniently and can be conveniently kept for medical teaching.
Disclosure of Invention
The invention aims to provide a novel and convenient high-sensitivity MEMS heart sound and electrocardio integrated detection sensor based on beat type bionic cilia.
The invention is realized by the following technical scheme:
a high-sensitivity MEMS heart sound and electrocardio integrated detection sensor based on beat type bionic cilia comprises a probe shell, an electrocardio electrode, an MEMS sound sensor microstructure, a heart sound and electrocardio integrated circuit and a signal acquisition card;
the probe shell is a circular flat shell, the shell bottom of the probe shell is positioned at the middle lower part of the shell body, and the shell bottom divides the inner space of the shell into an upper shell cavity and a lower mounting groove; the shell bottom is provided with a connecting through hole for communicating the shell cavity with the mounting groove, and the surface of the shell bottom, which is positioned in the shell cavity, is provided with a slot; two symmetrically arranged circular buckles are respectively arranged on the side shell walls at the two sides of the probe shell in an outward extending manner, and the two circular buckles are arranged close to the shell cavity opening; a waterproof sound-transmitting membrane is packaged on a shell cavity opening of the probe shell, and an oil filling hole communicated with the shell cavity and a lead hole communicated with the mounting groove are further formed in a side shell wall of the probe shell;
the electrocardio-electrodes are provided with two groups and are respectively arranged on two circular buckles on the probe shell;
the MEMS acoustic sensor microstructure comprises a central mass block, a supporting frame and four cantilever beams which are vertical to each other and are obtained by etching a silicon substrate, wherein boron ions are respectively injected into two ends of the two symmetrical cantilever beams by using a plasma injection technology to form piezoresistors, the resistance values of the four piezoresistors are equal and are connected into a Wheatstone full-bridge differential circuit through metal leads, and beat-shaped bionic cilia are vertically fixed on the central mass block; the supporting frame is fixed on the circular mounting plate, and an inserting plate matched with the inserting groove in the probe shell is outwards arranged on the edge of one side plate of the circular mounting plate in an extending manner;
the MEMS sound sensor microstructure is inserted in a slot in the probe shell through an inserting plate, and the beat-type bionic cilia is arranged in parallel with the bottom surface in the shell; the integrated heart sound and electrocardio circuit is arranged in the mounting groove of the probe shell, the MEMS sound sensor micro-node is connected with the integrated heart sound and electrocardio circuit through a lead passing through the connecting through hole, the electrocardio electrode is connected with the integrated heart sound and electrocardio circuit through a lead, and the lead at the output end of the integrated heart sound and electrocardio circuit is connected with the signal acquisition card after passing through the lead hole; insulating silicon oil is filled in a shell cavity of the probe shell through an oil filling hole, and the oil filling hole, the connecting through hole and the lead hole are sealed.
Furthermore, the integrated circuit of heart sound and electrocardio comprises a power circuit module, a heart sound circuit module and an electrocardio circuit module; the power circuit module mainly comprises LP2985AIM5-3.0/NOPB, LP2985AIM5-1.5/NOPB and TPS60403, the heart sound circuit module mainly comprises AD8226 and AD823, and the electrocardio circuit module mainly comprises AD8232 and AD 823.
Furthermore, the sensor also comprises a USB interface module, and the USB interface module is connected with the signal acquisition card.
Further, this sensor still includes bluetooth wireless module, and bluetooth wireless module is connected with signal acquisition card.
Furthermore, the probe shell is made of aluminum alloy.
Furthermore, the waterproof sound-transmitting membrane is made of an E-PTFE polytetrafluoroethylene material, and the thickness of the waterproof sound-transmitting membrane is 0.1 mm.
The detection sensor has the advantages of scientific design, reasonable structure, simple and convenient operation, convenient carrying, sensitive detection, low cost, batch processing, synchronous detection of heart sounds and electrocardiosignals and the like, and compared with the traditional sensor probe, the detection sensor can detect the heart sounds and the electrocardiosignals more accurately, quickly and conveniently and has the following specific beneficial effects: 1) the detection sensor has small volume, sensitive response, low cost and light weight, and can be produced in large batch, wherein the beat-shaped bionic cilia can ensure that the sound receiving area is increased on the premise that the natural frequency covers the frequency range of heart sound, so the sensitivity is enhanced, and the beat-shaped bionic cilia is most sensitive to the heart sound signals in the direction vertical to the beat, can inhibit the noise interference in other directions, improves the signal-to-noise ratio, ensures that the accuracy of the sensor probe is higher, and improves the efficiency for the doctor to see and diagnose; 2) the detection sensor has the functions of filtering and reducing noise, so that the detected signal is more accurate, interference signals are reduced, and the judgment of a doctor is facilitated; 3) the probe shell of the detection sensor is provided with the two ear-like circular buckles which can be used for fixing the electrocardio-electrodes and measuring electrocardiosignals, so that the synchronous measurement of heart sounds and the electrocardiosignals is realized, a doctor can better analyze heart and lung sound vibration signals of a patient, the diagnosis of the doctor is facilitated, the time is saved, meanwhile, the circular buckles can effectively reduce friction noise and arm shaking noise, and the detection accuracy is greatly improved; 4) the detection sensor also comprises a USB interface module and a Bluetooth wireless module, wherein the USB interface module can enable the heart sound electrocardiosignals to be displayed at a computer end, and the Bluetooth wireless module can enable the heart sound electrocardiosignals to be transmitted to a mobile phone end to be displayed, so that doctors can see and diagnose more conveniently, can detect by themselves, and is convenient and understandable to operate.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the embodiments or the prior art descriptions will be briefly introduced, wherein the drawings are used for providing further explanation of the present invention and form a part of the present application, and the exemplary embodiments and the explanation of the present invention are used for explaining the present invention and do not form a limitation to the present invention.
FIG. 1 is a schematic diagram of the front three-dimensional structure of the probe shell of the sensor of the present invention.
FIG. 2 is a front view of the probe housing structure of the sensor of the present invention.
Fig. 3 is a schematic diagram of the three-dimensional structure of the back of the probe shell of the sensor of the invention.
FIG. 4 is a rear view of the probe housing structure of the sensor of the present invention.
Fig. 5 is a bottom view of fig. 2.
Fig. 6 is a top view of fig. 2.
FIG. 7 is a circuit diagram of the integrated heart, sound and electrocardiogram circuit of the sensor of the present invention.
Fig. 8 is a circuit diagram of a power circuit module in the integrated circuit of heart sound and electrocardio.
Fig. 9 is a circuit diagram of a heart sound circuit module in the integrated circuit of heart sound and electrocardio.
FIG. 10 is a circuit diagram of an ECG circuit module in the integrated circuit of heart sound and ECG.
FIG. 11 is a schematic diagram of a three-dimensional structure of a MEMS acoustic sensor microstructure of the sensor of the present invention.
FIG. 12 is a top view of a MEMS acoustic sensor microstructure of a sensor of the present invention.
In the figure: 1-probe shell, 2-shell cavity, 3-mounting groove, 4-connecting through hole, 5-slot, 6-round buckle, 7-oil injection hole, 8-lead hole, 9-central mass block, 10-supporting frame, 11-cantilever beam, 12-piezoresistor, 13-beat type bionic cilia, 14-round mounting plate, 15-plug board, 16-power circuit module, 17-heart sound circuit module and 18-electrocardio circuit module.
Detailed Description
In order that those skilled in the art will better understand the present invention, a more complete and complete description of the present invention is provided below in conjunction with the accompanying drawings and embodiments. It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict.
As shown in fig. 1 to 12, a high-sensitivity MEMS heart sound and electrocardiogram integrated detection sensor based on beat-type bionic cilia comprises a probe housing 1, an electrocardiogram electrode, an MEMS sound sensor microstructure, a heart sound and electrocardiogram integrated circuit, a signal acquisition card, a USB interface module and a bluetooth wireless module.
The probe shell 1 is a circular flat shell, as shown in fig. 1 to 6, and is made of aluminum alloy, the shell bottom of the probe shell is positioned at the middle lower part of the shell body, and the shell bottom divides the inner space of the shell into an upper shell cavity 2 and a lower mounting groove 3; a connecting through hole 4 communicating the shell cavity 2 and the mounting groove 3 is formed in the shell bottom, and a slot 5 is formed in the surface of the shell bottom, which is positioned in the shell cavity; two symmetrically arranged circular buckles 6 are respectively arranged on the side shell walls on the two sides of the probe shell 1 in an outward extending mode, the two circular buckles 6 are arranged close to the shell cavity opening, two groups of electrocardio electrodes are arranged and are respectively arranged on the two circular buckles 6 on the probe shell 1, and the two circular buckles 6 are designed to effectively reduce friction noise and arm shaking noise; the shell cavity opening of the probe shell 1 is provided with a circle of annular clamping grooves, a waterproof sound-transmitting membrane is packaged on the shell cavity opening through the annular clamping grooves, the waterproof sound-transmitting membrane is fixed in the annular clamping grooves through 8008 glue, the waterproof sound-transmitting membrane is made of E-PTFE polytetrafluoroethylene materials, the thickness of the waterproof sound-transmitting membrane is 0.1mm, and the waterproof sound-transmitting membrane can enable the sound attenuation degree to be low, the distortion degree to be low, and has good sound-transmitting performance, non-adhesion performance, waterproof and dustproof performance, thinness, lightness and the like; an oil filling hole 7 communicated with the shell cavity 2 and a lead hole 8 communicated with the mounting groove 3 are further formed in the side shell wall of the probe shell 1.
The processing material of the MEMS acoustic sensor microstructure is an SOI silicon wafer, and is processed by adopting an MEMS semiconductor micromachining technology, as shown in fig. 11 and 12, specifically, a central mass block 9, a supporting frame 10 and four mutually perpendicular cantilever beams 11 for connecting the central mass block 9 and the supporting frame 10 are etched on a silicon substrate by utilizing an ICP plasma etching technology, boron ions are respectively injected into two ends of two symmetrical cantilever beams 11 by utilizing a plasma injection technology to form piezoresistors 12, the resistance values of the four piezoresistors 12 are equal, and the four piezoresistors are connected into a Wheatstone full-bridge differential circuit through metal leads; the central mass block 9 is vertically fixed with a bat-type bionic cilium 13, the bat-type bionic cilium 13 consists of a bat rod part and a circular bat head part, the bat-type bionic cilium 13 is bonded at the center of the central mass block 9 in a secondary integration mode, sound penetrates through the waterproof sound-transmitting membrane and is transmitted through silicon oil to drive the bat-type bionic cilium 13 to vibrate, so that the resistance value of the piezoresistor 12 is influenced to change, the Wheatstone full-bridge differential circuit is driven to output signal change, and finally, a cardiopulmonary sound signal is detected; the supporting frame 10 is fixed on a circular mounting plate 14, and an inserting plate 15 matched with the slot 5 in the probe shell 1 is outwards arranged on one side plate edge of the circular mounting plate 14, as shown in fig. 12.
The circuit diagram of the heart sound and electrocardio integrated circuit is shown in fig. 7, and comprises a power circuit module 16, a heart sound circuit module 17 and an electrocardio circuit module 18; as shown in FIG. 8, the power circuit module 16 mainly comprises LP2985AIM5-3.0/NOPB, LP2985AIM5-1.5/NOPB and TPS60403, wherein LP2985AIM5-3.0/NOPB is used for converting the voltage of 3.7V into the voltage of 3.0V, LP2985AIM5-1.5/NOPB is used for converting the voltage of 3.7V into the voltage of 1.5V, and TPS60403 is used for converting the voltage of 3.0V into the voltage of-3.0V, so that preparation is provided for subsequent chip operation; as shown in fig. 9, the heart sound circuit module 17 mainly includes AD8226 and AD823, differential signals of heart sounds are input into AD8226 for amplification, the signal gain is 495, and R1, R7, C1, and C10 constitute a passive high-pass filter, according to heart sound characteristics, the heart sounds which can be collected are mainly a first heart sound and a second heart sound, the main frequencies of the first heart sound and the second heart sound are distributed in the range of 20Hz to 600Hz, so the high-pass cutoff frequency is set to 15.9Hz, 1.5V voltage is connected to the REF pin as reference voltage, the output signal is connected to AD823 through a passive low-pass filter circuit composed of R4, R5, C2, and C8 and a band-pass filter formed by cascade connection of a passive filter circuit composed of R2, R3, C3, and C7, the bandwidth is 20Hz to 1kHz, and the gain in a pass band is 0; as shown in fig. 10, the electrocardiograph circuit module 18 mainly includes an AD8232 and an AD823, the AD8232 is a single-lead integrated signal conditioning module specially used for bioelectricity measurement such as electrocardiography, and when the electrocardiograph signals are used in a monitoring system, the signal frequency band should be limited within 0.5Hz to 40Hz, so that R8, R17, C28 and C25 are adopted to form a passive low-pass filter, R9, R12, R13, C14 and C17 are used to form a passive high-pass filter, wherein R9 is used to control the quality factor Q to limit the frequency within 0.5Hz to 40Hz, and the electrocardiograph signals are output to pass through the passive high-pass filter formed by R22, R29, C31 and C32 and the passive high-pass filter formed by R23, R24, R25, R27, R28, C29, C30 and C33 and the band-stop filter is connected to the AD823 to filter out power frequency interference of 50 Hz.
The MEMS sound sensor microstructure is inserted in a slot 5 in the probe shell 1 through a plug board 15 on a circular mounting plate 14 and is bonded and fixed by 8008 glue, and the beat-type bionic cilia 13 is arranged in parallel with the bottom surface in the shell; the integrated circuit of heart sound and electrocardio is installed in the mounting groove 3 of the shell 1 of the probe, the MEMS acoustic sensor micro-node is connected with the integrated circuit of heart sound and electrocardio through the wire passing through the connecting through hole 4, the electrocardio electrode is connected with the integrated circuit of heart sound and electrocardio through the wire, the wire of the output end of the integrated circuit of heart sound and electrocardio is connected with the signal acquisition card after passing through the lead hole, the signal acquisition card is connected with the USB interface module and is connected with the computer end through the USB interface module, the heart sound and electrocardio signals are transmitted to the computer end, and the waveforms of the heart sound and the electrocardio signals are displayed in the software of the computer end; meanwhile, the signal acquisition card is also connected with the Bluetooth wireless module, and the heart sound electrocardiosignals can be wirelessly transmitted through the Bluetooth wireless module, such as transmitted to a mobile phone for display and the like; insulating silicon oil playing a role of resonance is filled in a shell cavity of the probe shell 1 through an oil filling hole, and the oil filling hole 7, the connecting through hole 4 and the lead hole 8 are sealed.
The detection sensor uses an MEMS sound sensor microstructure and combines a beat type bionic cilia 13 as a sensitive element to be applied to a stethoscope head, the beat type bionic cilia 13 is bonded in the center of a central mass block 9 in a secondary integration mode, the contact area of the beat type bionic cilia 13 is large, the sensitivity is high, and the detection is accurate; the beat-type bionic cilia 13 is driven to vibrate by transmitting acoustic signals in the insulating silicone oil, so that the resistance value of the piezoresistor 12 is influenced to change, the Wheatstone full-bridge differential circuit is driven to output signal change, the measured heart sound signals are transmitted to the heart sound and electrocardio integrated circuit on the back of the probe shell 1 to be filtered and the like, and the heart and lung sound signals are detected. Meanwhile, two circular buckles 6 are arranged at two ends of the probe shell 1 of the detection sensor and used for fixing the electrocardio-electrodes, and the design of the circular buckles 6 can effectively reduce friction noise and arm shaking noise, so that the detection accuracy is greatly improved; the electrocardio signals are detected through the electrocardio electrodes, and the detected electrocardio signals are transmitted to a heart sound and electrocardio integrated circuit on the back of the probe shell 1 for processing such as filtering, and the electrocardio signals are obtained through detection. The heart sound and electrocardio signals processed by the heart sound and electrocardio integrated circuit are transmitted into a signal acquisition card, and the signal acquisition card is packaged in a box and is connected with a detection sensor through a rectangular connector; the signal acquisition card acquires heart sound electrocardiosignals, then carries out AD conversion, then carries out signal processing in the main control chip, then stores the signals in the flash, connects the stored data to a computer end, for example, connects the data with the computer end through a USB interface module, and finally carries out waveform display on the heart sound and the electrocardiosignals in the upper computer.
The technical solutions in the embodiments of the present invention are clearly and completely described above, and the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Claims (7)
1. The utility model provides a high sensitivity MEMS heart sound electrocardio integration detection sensor based on bionical cilia of bat type which characterized in that: the device comprises a probe shell, an electrocardio-electrode, an MEMS (micro-electromechanical systems) acoustic sensor microstructure, a heart sound and electrocardio integrated circuit and a signal acquisition card;
the probe shell is a circular flat shell, the shell bottom of the probe shell is positioned at the middle lower part of the shell body, and the shell bottom divides the inner space of the shell into an upper shell cavity and a lower mounting groove; the shell bottom is provided with a connecting through hole for communicating the shell cavity with the mounting groove, and the surface of the shell bottom, which is positioned in the shell cavity, is provided with a slot; two symmetrically arranged circular buckles are respectively arranged on the side shell walls at the two sides of the probe shell in an outward extending manner, and the two circular buckles are arranged close to the shell cavity opening; a waterproof sound-transmitting membrane is packaged on a shell cavity opening of the probe shell, and an oil filling hole communicated with the shell cavity and a lead hole communicated with the mounting groove are further formed in a side shell wall of the probe shell;
the electrocardio-electrodes are provided with two groups and are respectively arranged on two circular buckles on the probe shell;
the MEMS acoustic sensor microstructure comprises a central mass block, a supporting frame and four cantilever beams which are vertical to each other and are obtained by etching a silicon substrate, wherein boron ions are respectively injected into two ends of the two symmetrical cantilever beams by using a plasma injection technology to form piezoresistors, the resistance values of the four piezoresistors are equal and are connected into a Wheatstone full-bridge differential circuit through metal leads, and beat-shaped bionic cilia are vertically fixed on the central mass block; the supporting frame is fixed on the circular mounting plate, and an inserting plate matched with the inserting groove in the probe shell is outwards arranged on the edge of one side plate of the circular mounting plate in an extending manner;
the MEMS sound sensor microstructure is inserted in a slot in the probe shell through an inserting plate, and the beat-type bionic cilia is arranged in parallel with the bottom surface in the shell; the integrated heart sound and electrocardio circuit is arranged in the mounting groove of the probe shell, the MEMS sound sensor micro-node is connected with the integrated heart sound and electrocardio circuit through a lead passing through the connecting through hole, the electrocardio electrode is connected with the integrated heart sound and electrocardio circuit through a lead, and the lead at the output end of the integrated heart sound and electrocardio circuit is connected with the signal acquisition card after passing through the lead hole; insulating silicon oil is filled in a shell cavity of the probe shell through an oil filling hole, and the oil filling hole, the connecting through hole and the lead hole are sealed.
2. The high-sensitivity MEMS heart sound and electrocardio integrated detection sensor based on beat-type bionic cilia as claimed in claim 1, characterized in that: the heart sound and electrocardio integrated circuit comprises a power circuit module, a heart sound circuit module and an electrocardio circuit module; the power circuit module mainly comprises LP2985AIM5-3.0/NOPB, LP2985AIM5-1.5/NOPB and TPS60403, the heart sound circuit module mainly comprises AD8226 and AD823, and the electrocardio circuit module mainly comprises AD8232 and AD 823.
3. The high-sensitivity MEMS heart sound and electrocardio integrated detection sensor based on beat-type bionic cilia as claimed in claim 1 or 2, which is characterized in that: the signal acquisition card also comprises a USB interface module, and the USB interface module is connected with the signal acquisition card.
4. The high-sensitivity MEMS heart sound and electrocardio integrated detection sensor based on beat-type bionic cilia as claimed in claim 1 or 2, which is characterized in that: still include bluetooth wireless module, bluetooth wireless module is connected with signal acquisition card.
5. The high-sensitivity MEMS heart sound and electrocardio integrated detection sensor based on beat-type bionic cilia as claimed in claim 3, wherein: still include bluetooth wireless module, bluetooth wireless module is connected with signal acquisition card.
6. The high-sensitivity MEMS heart sound and electrocardio integrated detection sensor based on beat-type bionic cilia as claimed in claim 5, wherein: the probe shell is made of aluminum alloy.
7. The high-sensitivity MEMS heart sound and electrocardio integrated detection sensor based on beat-type bionic cilia as claimed in claim 6, wherein: the waterproof sound-transmitting membrane is made of an E-PTFE polytetrafluoroethylene material, and the thickness of the waterproof sound-transmitting membrane is 0.1 mm.
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| CN115153620A (en) * | 2022-07-04 | 2022-10-11 | 中北大学 | Heart sound and electrocardio detector based on MEMS technology and detection method thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105232080A (en) * | 2015-09-17 | 2016-01-13 | 中北大学 | Visual electronic stethoscope based on MEMS (micro-electro-mechanical system) acoustic sensor |
| KR20170032044A (en) * | 2015-09-14 | 2017-03-22 | 국방과학연구소 | An acoustic vector sensor based on the biomimetic artificial hair cell and the method for manufacturing |
| CN107246910A (en) * | 2017-06-15 | 2017-10-13 | 中北大学 | MEMS three-dimensional co-vibrating type vector hydrophones based on piezoresistive effect |
| CN111870275A (en) * | 2020-07-24 | 2020-11-03 | 中北大学 | Magnetic induction type electronic stethoscope probe based on MEMS technology |
| WO2021004345A1 (en) * | 2019-07-10 | 2021-01-14 | 东南大学 | Heart sound acquisition and analysis system and method employing cloud architecture |
-
2021
- 2021-06-24 CN CN202110701358.7A patent/CN113331863B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20170032044A (en) * | 2015-09-14 | 2017-03-22 | 국방과학연구소 | An acoustic vector sensor based on the biomimetic artificial hair cell and the method for manufacturing |
| CN105232080A (en) * | 2015-09-17 | 2016-01-13 | 中北大学 | Visual electronic stethoscope based on MEMS (micro-electro-mechanical system) acoustic sensor |
| CN107246910A (en) * | 2017-06-15 | 2017-10-13 | 中北大学 | MEMS three-dimensional co-vibrating type vector hydrophones based on piezoresistive effect |
| WO2021004345A1 (en) * | 2019-07-10 | 2021-01-14 | 东南大学 | Heart sound acquisition and analysis system and method employing cloud architecture |
| CN111870275A (en) * | 2020-07-24 | 2020-11-03 | 中北大学 | Magnetic induction type electronic stethoscope probe based on MEMS technology |
Non-Patent Citations (1)
| Title |
|---|
| 杨晟辉;丁俊文;张国军;裴毓;尚珍珍;: "高灵敏度扇面纤毛式MEMS矢量水听器", 压电与声光, no. 04 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115153620A (en) * | 2022-07-04 | 2022-10-11 | 中北大学 | Heart sound and electrocardio detector based on MEMS technology and detection method thereof |
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| CN113331863B (en) | 2023-08-25 |
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