KR101786274B1 - Mask-cleaning apparatus - Google Patents
Mask-cleaning apparatus Download PDFInfo
- Publication number
- KR101786274B1 KR101786274B1 KR1020150189779A KR20150189779A KR101786274B1 KR 101786274 B1 KR101786274 B1 KR 101786274B1 KR 1020150189779 A KR1020150189779 A KR 1020150189779A KR 20150189779 A KR20150189779 A KR 20150189779A KR 101786274 B1 KR101786274 B1 KR 101786274B1
- Authority
- KR
- South Korea
- Prior art keywords
- wiper
- mask
- supported
- wet
- vertical plate
- Prior art date
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02054—Cleaning before device manufacture, i.e. Begin-Of-Line process combining dry and wet cleaning steps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02046—Dry cleaning only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
Abstract
The mask cleaner includes a frame, a wet clean mechanism supported on the frame, and a dry clean mechanism supported on the frame and positioned after the wet clean mechanism in a direction to feed the clean room wipers. The wet rinsing mechanism wipes the mask before the dry rinsing mechanism wipes the mask. Each of the wet and dry cleaning mechanisms includes a wiping module including a vertical plate, a feeder reel, a retriever reel, direction changing rollers, and a pushing roller. The wiping module of the wet cleaning mechanism includes a sprayer mechanism adapted to spray a cleaning liquid to a portion of the clean room wipers on the pushing roller.
Description
The present invention relates to the cleaning of masks, and more particularly to a fast and effective apparatus for cleaning the surface of a mask to increase the yield of a semiconductor manufacturing process.
Typically, the operator cleans the surface of the mask by hand. The operator puts the mask in a holder and flushes the surface of the mask using a cleaning liquid such as acetone, ethanol and deionized water, and uses a brush to brush the surface of the mask, ≪ / RTI > The step of using a rinsing liquid to flush the surface of the mask and the step of using the brush to brush the surface of the mask may be repeated several times as necessary. Next, the operator flushes the surface of the mask with the rinsing liquid once before finally drying the surface of the mask. This cleaning process is for cleaning the surface of the mask with impurities and sediments. However, this cleaning process may cause an operator to be excessively exposed to a cleaning liquid based on an organic solvent which is dangerous to human health.
To solve the problem, various automatic mask cleaning apparatuses have been developed. Although the exposure of the rinsing liquid to humans has been reduced, a large amount of rinsing liquid based on organic solvents is still used in automatic mask cleaners. Thus, there is still the problem of contamination due to control of the cleaning fluid and use of the cleaning fluid. Also, such cleaning is not effective because the cleaning is based on flushing.
Accordingly, the present invention is directed to eliminating or at least alleviating the problems encountered in the prior art.
SUMMARY OF THE INVENTION
It is an object of the present invention to provide a method of cleaning a surface of a mask through wiping without using a large amount of cleaning liquid based on an organic solvent, which is quick, efficient, safe, environmentally friendly, Device.
It is another object of the present invention to provide an apparatus for washing and dry cleaning (dry cleaning) a mask for cleaning particles or contaminated masks without leaving a water stain.
To achieve this object, the mask cleaner comprises a frame, a wet cleaning mechanism supported on the frame, and a clean-room wiper supported on the frame and supplying a clean-room wiper Lt; RTI ID = 0.0 > a < / RTI > wet cleaning mechanism. The wet rinsing mechanism wipes the mask before the dry rinsing mechanism wipes the mask. Each of the wet and dry cleaning mechanisms includes a wiping module including a vertical plate, a feeder reel, a retriever reel, redirecting rollers, and a pushing roller. . The reels and rollers are supported on the frame. The feeder reel is adapted to bear the end of the clean room wiper. The retriever reel is adapted to bear the other end of the clean room wiper. The direction changing rollers are positioned between the feeder reel and the retriever reel and are adapted to guide the clean room wiper to the upper portion of the wiping module. The pushing roller is adapted to push a portion of the cleanroom wiper over an adjacent portion of the cleanroom wiper so that the cleanroom wiper is ready for wiping. The wiping module of the wet scrubbing mechanism further includes a sprayer mechanism adapted to spray the scrubbing liquid onto the portion of the clean room wiper on the pushing roller.
Other objects, advantages and features of the present invention will become apparent from the following detailed description with reference to the accompanying drawings.
BRIEF DESCRIPTION OF THE DRAWINGS The present invention will be described through the detailed description of the preferred embodiments with reference to the drawings.
1 is a perspective view of a mask cleaning apparatus according to a preferred embodiment of the present invention;
Figure 2 is a perspective view of the wet cleaning mechanism and the dry cleaning mechanism of the mask cleaning apparatus shown in Figure 1;
Figure 3 is a perspective view of the wiping module of each of the wet and dry cleaning mechanisms shown in Figure 2;
Figure 4 is a front view of the wiping module shown in Figure 3;
Figure 5 is a partial view of the wiping module shown in Figure 4; And
6 is a side view of the mask wiped by a clean room wiper operated by the wiping module shown in Fig.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
Referring to Figure 1, the surface of the
The mask cleaning apparatus includes a
The wet and
The
There is a squeezing roller set 57 between the
On the
5, the wiping
1 and 4, in order to clean the
The
6, when the
When the
A
As discussed above, in each of the wet and
The invention has been described through the detailed description of the preferred embodiments. Skilled artisans may derive variations from the preferred embodiments without departing from the scope of the invention. Accordingly, the preferred embodiments do not limit the scope of the invention as defined in the claims.
Claims (14)
A vertical plate supported on the frame;
A feeder reel supported on the vertical plate and adapted to support an end of the clean room wiper;
A retriever reel supported on the vertical plate and adapted to bear the other end of the clean room wiper;
Orientation rollers supported on a vertical plate between the feeder reel and the retriever reel and adapted to guide the cleanroom wipers to the upper portion of the wiping module; And
And a pushing roller supported on said vertical plate and pushing a portion of the cleanroom wiper over an adjacent portion of the cleanroom wiper so that the cleanroom wiper is ready for wiping,
Wherein the wiping module comprises a first stretching roller supported on a vertical plate near the output side of the feeder reel and a second stretching roller supported on a vertical plate near the input side of the retriever reel, Cooperate with each other to smooth the supply and recovery of cleanroom wipers,
The wiping module of the wet rinsing mechanism may further comprise a sprayer mechanism configured to spray the rinsing liquid onto a portion of the clean room wiper on the pushing roller, wherein the wet rinsing mechanism is configured such that before the dry rinsing mechanism wipes the mask, Cleaning device.
A first driver supported on the vertical plate and adapted to drive a feeder reel; And
And a second driver supported on said vertical plate and adapted to drive a retriever reel.
An active roller supported on a vertical plate;
A third driver adapted to drive the roller; And
And a squeegee roller provided to change the force applied to the cleaner wiper with respect to the activating roller so as to uniformly distribute the cleaning liquid to the cleaner wiper and to squeeze the excessive portion of the cleaning liquid out of the clean room wiper.
A cylinder supported on a vertical plate; And
And a roller holder operatively connected to the cylinder and adapted to support the pushing roller.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020150189779A KR101786274B1 (en) | 2015-12-30 | 2015-12-30 | Mask-cleaning apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020150189779A KR101786274B1 (en) | 2015-12-30 | 2015-12-30 | Mask-cleaning apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20170079334A KR20170079334A (en) | 2017-07-10 |
KR101786274B1 true KR101786274B1 (en) | 2017-10-18 |
Family
ID=59356176
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020150189779A KR101786274B1 (en) | 2015-12-30 | 2015-12-30 | Mask-cleaning apparatus |
Country Status (1)
Country | Link |
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KR (1) | KR101786274B1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102135500B1 (en) * | 2018-04-26 | 2020-07-20 | 스텍 코 엘티디 | Apparatus and method for cleaning substrates |
-
2015
- 2015-12-30 KR KR1020150189779A patent/KR101786274B1/en active IP Right Grant
Also Published As
Publication number | Publication date |
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KR20170079334A (en) | 2017-07-10 |
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