KR101783880B1 - Variable nozzle device having a vortex Holes - Google Patents

Abstract

The present invention relates to a variable nozzle device having a vortex spray structure and, specifically, to a nozzle device supplying an electrolyte transferred through a connection tube to a substrate by being installed in a plating bath. The variable nozzle device comprises: a supply tube unit connected to the connection tube and having one end which is closed, wherein a supply space is formed in the supply tube unit and multiple connection holes are formed on the outer side of the supply tube unit in the longitudinal direction; and a spray bar having a spray unit receiving and spraying the electrolyte transferred from the connection hole. The supply tube unit also has a gap control block to control a gap between the substrate and the spray bar. The gap control block has an extension hole to be connected to the connection hole. The gap control block is installed between the supply tube unit and the spray unit to control the gap between the nozzle device and the substrate. The variable nozzle device can supply many electrolytes by spraying the electrolyte while forming a vortex in a periphery. The variable nozzle device also can evenly distribute ions in the electrolyte in order for the ion not to be concentrated to one side and, therefore, can form a plating layer of a fixed thickness. Also, the variable nozzle device can selectively open or close a through hole of the spray bar. Therefore, the variable nozzle device can control the amount and an area of the sprayed electrolyte.

Description

[0001] The present invention relates to a variable nozzle device having a vortex spray structure,

[0001] The present invention relates to a variable nozzle device having a vortex jetting structure, and more particularly, to a gap adjusting block between a supply pipe portion and a jetting portion to adjust a distance between a nozzle device and a substrate, It is possible to supply a large amount of electrolytic solution by spraying the electrolytic solution, and it is possible to form a plating layer having a uniform thickness on the substrate by uniformly dispersing the ions in the electrolytic solution due to the migration of the electrolytic solution and selectively opening the through- And capable of adjusting the amount and area of the electrolyte to be sprayed. The present invention relates to a variable nozzle device having a vortex jetting structure.

In general, a printed circuit board (PCB) can be regarded as a kind of electronic component element printed with wiring and arrangement space necessary for mounting a predetermined electronic component. Recently, a multilayer board having two or more layers has been used. In order to form a circuit in the process of manufacturing such a printed circuit board, a series of procedures are repeated in which the nickel and chromium plating layers are formed so as to be repeatedly immersed in the water tank.

A conventional substrate plating apparatus is disclosed in Korean Patent Application No. 10-2009-0107687, in which a substrate to be plated such as a dissolvable electrode member and a semiconductor wafer is disposed in a plating tank containing an electrolytic solution, The ions generated while the soluble electrode member is oxidized by supplying power are transferred to the substrate to be plated to form a plating layer.

However, in the conventional substrate plating apparatus, the ions distributed in the electrolytic solution are supplied to the substrate to be plated while the electrolytic solution is supplied. However, since the ions can not be uniformly distributed in the electrolytic solution, And there is a problem that the ion supply is concentrated on a specific region of the substrate to form a non-uniform plating layer.

The above-mentioned invention means the background art of the technical field to which the present invention belongs, and does not mean the prior art.

It is an object of the present invention to provide a gap adjusting block between a supply pipe portion and a jetting portion to adjust the gap between the nozzle device and the substrate, The electrolytic solution can be supplied while being vortexed to enable the supply of a large amount of electrolytic solution. The electrolytic solution can be uniformly distributed in the electrolytic solution without being biased by the electrolytic solution, thereby forming a plating layer having a uniform thickness on the substrate. Which is capable of controlling the amount and the area of the electrolyte to be sprayed. The present invention is directed to a variable nozzle device having a vortex spray structure.

The present invention relates to a nozzle device for supplying an electrolytic solution, which is installed in a plating vessel, through a coupling tube to a substrate, and which is fastened to the coupling tube and has one end closed, a supply space formed therein, Wherein the supply tube portion is provided with a supply tube portion having a plurality of connection holes along the direction of the supply tube portion and an injection portion for injecting and discharging the electrolyte solution transferred from the connection hole, And the sprayer is formed on one surface of the gap adjusting block, and the jetting portion is formed in the gap adjusting block so as to communicate with the extension hole of the gap adjusting block, An inner spray hole formed in a back surface of the inner spray hole, and a structure penetrating the inner spray hole to communicate with the inner spray hole Through-made balls balls, the outer jet is formed in the front portion to be communicated with the through-ball, and the electrolytic solution flowing through the electrolytic solution and the through-holes that pass from the inner injection holes is characterized in that so that injection through the outer injection port.

The diameters of the through holes and the outer injection holes are different from each other.

The airtightness device further includes a gas tight bolt, a gas tight pipe fitted in the fastening shaft of the airtight bolt to close the inner injection hole, and a through hole penetrating through the through hole And an airtight nut which is detachably fastened to an end portion of the fastening shaft protruded by the fastening shaft.

In addition, an insertion groove is formed at an end of the inner injection hole, and a guide groove is formed in the through hole so as to communicate with the insertion groove. The airtight tube is made of a synthetic resin material having elasticity, An elastic insertion protrusion is further formed to be inserted into the insertion groove after being guided by the guide groove and to close the inner injection hole.

In addition, a feed rotary device is further provided in the feed pipe, and the feed rotary device includes connecting bellows pipes connecting the connection hole and the extension hole, a feed cylinder installed in the feed pipe, And the rotation axis is connected to the gap adjusting block. By driving the transfer cylinder, the gap adjusting block and the jetting part move to adjust the gap with the substrate, and the operation of the driving motor Wherein the gap adjusting block and the jetting portion rotate to spray the electrolyte solution.

In the variable nozzle device having the vortex jetting structure according to the present invention, the interval between the nozzle device and the substrate can be adjusted by providing a gap adjusting block between the supply pipe portion and the jetting portion, and the electrolytic solution is sprayed while swirling around, It is possible to form a plating layer having a uniform thickness on the substrate by uniformly dispersing the ions in the electrolyte without being biased by the electrolytic liquid to be moved and selectively to open or close the through holes of the spray bar, It is possible to control the amount and the area of the ink.

1 is a side view showing a variable nozzle device having a vortex jetting structure according to a first embodiment of the present invention.
2 is a side view showing a variable nozzle device having a vortex jetting structure according to a first embodiment of the present invention.
FIG. 3 is a front view enlarged view of a variable nozzle device having a vortex jetting structure according to a first embodiment of the present invention.
4 is a view illustrating a process of injecting and vapourizing an electrolyte in a variable nozzle apparatus having a vortex jetting structure according to the first embodiment of the present invention.
FIG. 5 is a view showing a use state of the variable nozzle apparatus having the vortex jetting structure according to the first embodiment of the present invention.
6 is a view showing a variable nozzle apparatus having a vortex jetting structure according to a second embodiment of the present invention.
7 is a partial cross-sectional view illustrating a variable nozzle device having a vortex jetting structure according to a second embodiment of the present invention.
8 is a partial cross-sectional view of a variable nozzle device having a vortex jetting structure according to a third embodiment of the present invention.
9 is a view showing a variable nozzle device having a vortex jetting structure according to a fourth embodiment of the present invention.
10 is a view showing a variable nozzle apparatus having a vortex jetting structure according to a fifth embodiment of the present invention.

Hereinafter, preferred embodiments of a variable nozzle apparatus having a vortex jetting structure according to the present invention will be described with reference to the accompanying drawings. In this process, the thicknesses of the lines and the sizes of the components shown in the drawings may be exaggerated for clarity and convenience of explanation. In addition, the terms described below are defined in consideration of the functions of the present invention, which may vary depending on the intention or custom of the user, the operator. Therefore, definitions of these terms should be made based on the contents throughout this specification.

In addition, the following embodiments are not intended to limit the scope of the present invention, but merely as an example, and various embodiments may be implemented through the present invention.

FIG. 1 is a side view showing a variable nozzle device having a vortex jetting structure according to a first embodiment of the present invention, FIG. 2 is a side view showing a variable nozzle device having a vortex jetting structure according to the first embodiment of the present invention, FIG. 3 is a front view enlarged view of a variable nozzle device having a vortex jetting structure according to a first embodiment of the present invention, and FIG. 4 is a cross-sectional view of a variable nozzle device having a vortex jetting structure according to the first embodiment of the present invention FIG. 5 is a view showing a use state of the variable nozzle device having the vortex jetting structure according to the first embodiment of the present invention, and FIG. 6 is a view showing a state in which the second embodiment FIG. 7 is a partial cross-sectional view of a variable nozzle device having a vortex jetting structure according to a second embodiment of the present invention; FIG. 7 is a partial cross-sectional view showing a variable nozzle device having a vortex jetting structure according to an example; 8 is a partial cross-sectional view illustrating a variable nozzle apparatus having a vortex jetting structure according to a third embodiment of the present invention, and FIG. 9 is a view illustrating a variable nozzle apparatus having a vortex jetting structure according to a fourth embodiment of the present invention 10 is a view showing a variable nozzle device having a vortex jetting structure according to a fifth embodiment of the present invention.

As shown in the drawing, the variable nozzle apparatus 10 (hereinafter, referred to as a variable nozzle apparatus) having a vortex jetting structure of the present invention is installed in a plating vessel filled with an electrolytic solution and is transmitted through a coupling tube 100 A nozzle device 10 for supplying an electrolytic solution to a substrate, wherein the nozzle device 10 comprises a supply pipe portion 20 and a spray bar 30.

The coupling pipe 100 can be fastened to the plating vessel, and a frame can be installed and fixed to the plating vessel. It is also possible to fasten the frame to a frame frame disposed above the plating vessel so as to transfer the substrate.

1, the upper portion of the supply pipe 20 is welded or screwed so that the upper portion thereof is hermetically sealed to the coupling pipe 100, the lower end of the supply pipe portion 20 is closed, And a connection hole 22 is formed on the outer surface so as to communicate with the supply space 21.

The supply tube 20 receives the electrolyte solution through the coupling tube 100 and the coupling tube 100 is connected to the pump to supply the electrolyte solution to the supply tube 20.

At this time, the electrolytic solution is filled in the plating vessel, and the electrolytic solution is transferred from the supply pipe portion 20 to the spray bar 30, and the electrolytic solution is sprayed from the spray bar 30, .

The sprayer 30 is provided with a sprayer 31 for receiving and spraying the electrolytic solution delivered from the connection hole 22. The sprayer 31 is disposed in a position where the electrolytic solution filled in the plating vessel is swirled and vortexed, A through hole 312 which is formed in a structure that communicates with the inner injection hole 311 so as to connect the both side portions and an inner injection hole 311 formed in the back portion to communicate with the hole 22, And an outer spray hole 313 formed in the front portion to communicate with the inner spray hole 311. The electrolyte sprayed from the inner spray hole 311 and the electrolyte solution flowing through the through hole 312 are sprayed.

The sprayer bar 30 is made of a metal material or a synthetic resin material and welded or fused to the outer surface of the supply pipe 20 in a state where the connection hole 22 and the inner injection hole 311 are communicated with each other, .

In this case, the supply pipe 20 is further provided with a gap adjusting block 40 so that the gap between the substrate and the spray bar 30 is adjusted. In the gap adjusting block 40, An extension hole 41 is formed so as to be communicated with the extension hole 41.

The gap adjusting block 40 is formed in a bar shape and is screwed or fused to the supply tube portion 20 and the spraying bar 30 is screwed into the gap adjusting block 40, Or fused and fixed.

The extension hole 41 of the gap adjusting block 40 receives the electrolytic solution from the connection hole 22 of the supply pipe 20 and transmits the electrolytic solution to the inner spray hole 311 of the spray bar 30.

The gap adjusting block 40 is formed of a metal material or a synthetic resin material and the insertion tube is fused to the both ends of the extension hole 41 so that the insertion hole 22 and the inner injection hole 311 on both sides of the insertion tube, So that the electrolytic solution can be received.

Such an interval adjusting block 40 is detachably connected to the supply tube portion 20 and the spray bar 30, thereby reducing the maintenance cost.

It is also preferable that an elastic airtight pad having a plurality of water holes is further interposed between the gap adjusting block 40 and the supply tube 20 and the spray bar 30 so that the electrolytic solution is moved.

10, a swinging device 70 may be further disposed under the gap adjusting block 40 so as to oscillate the electrolytic solution so that the ions are uniformly distributed in the electrolytic solution. A lifting cylinder 71 provided in the gap adjusting block 40 and a plate-shaped swinging panel 72 screwed to the lifting shaft of the lifting cylinder. The swinging panel is lifted up and down to swing the electrolyte. At this time, the swinging panel is further provided with a swing vibrator 721.

The electrolyte solution is injected through the inner injection hole 311 through the connection hole 22 and the extension hole 41 by the pressure of the supply pump and is injected through the outer injection hole 313 The electrolyte is injected into the outer injection hole 313 while being injected from the inner injection hole 311. The electrolyte is injected into the outer injection hole 313 through the through hole 313, The electrolytic solution filled in the plating vessel flows through the hole 312 and moves to the outer spray hole 313 together with the plating solution sprayed from the inner spray hole 311. The charged electrolyte is injected into the through hole 312 The electrolytic solution in the vicinity of the sprayer 30 is swirled while being introduced, ions generated during oxidation of the soluble electrode member can be uniformly distributed in the electrolytic solution to form a plating layer having a constant thickness on the substrate, The bubbles disposed on the substrate can be removed by the electrolytic solution which is moved so far and the electrolytic solution injected through the outer injection hole 313.

It is preferable that the supply tube portion 20 is supplied with an electrolyte filled in the plating vessel through a pump to circulate the electrolyte solution.

The connection pipe 22 and the extension hole 41 are formed in the supply pipe 20 and the gap adjusting block 40 at predetermined intervals along the longitudinal direction and the extension The inner spray holes 311, the through holes 312 and the outer spray holes 313 are formed so as to be spaced apart from each other along the longitudinal direction so as to receive the electrolyte solution from the holes 41, It is possible to supply the electrolytic solution to the entire substrate as shown in FIG.

The diameter of the inner injection hole 311 is formed to be smaller than the diameter of the through hole 312 and the outer injection hole 313 and the diameter of the through hole 312 and the outer injection hole 313 are formed to be the same The electrolytic solution flowing through the through hole 312 together with the electrolytic solution sprayed from the inner spray hole 311 can be sprayed through the outer spray hole 312. Preferably, the diameter of the through hole 312 is (311) and smaller than the outer injection hole (313).

The diameters of the through holes 312 and the outer spray holes 313 are different from each other so that the amount of the injected electrolyte is differently discharged to cause the inside of the plating vessel to oscillate so that the ions are uniformly distributed in the electrolyte .

6 and 7, an airtight device 50 is detachably coupled to the through hole 312. The airtight device 50 includes a gas tight bolt 51, An airtight tube 52 which is inserted into the fastening shaft and closes the inner injection hole 311 and a tightening nut 53 which is detachably fastened to the end of the fastening shaft protruding through the through hole 312 .

The airtightness device 50 has a structure in which an operator is fastened to the through hole 312 to be closed among the through holes 312 and the electrolyte is injected from the inner injection hole 311 connected to the through hole 312 As a result, the size (length) of the electrolyte sprayed in accordance with the length or size of the substrate can be controlled as shown in FIG.

At this time, it is preferable that the airtight tube 52 is made of a synthetic resin material having elasticity so that the airtight tube 52 is prevented from penetrating the through hole 312.

8, an insertion groove 311a is formed at an end of the inner injection hole 311, a guide groove 312a is formed in the through hole 312 to communicate with the insertion groove 311a, The airtight tube 52 is made of a synthetic resin material having elasticity and is guided to the outer surface of the airtight tube 52 by the guide groove 312a and then inserted into the insertion groove 311a, 311) is further closed.

The elastic insertion protrusions 521 are made of a synthetic resin material having elasticity and are integrally formed with the airtight tube 52. The elastic insertion protrusions 521 are inserted in the guide groove 312a in a state of being pressed into the insertion groove 311a The airtightness of the airtight tube 52 is prevented from being moved or rotated by the water pressure of the electrolytic solution to be sprayed through the inner spray hole 311. [

9, the feed pipe 20 is further provided with a feed rotary device 60. The feed rotary device 60 is connected to the connection bellows 22 and the extension hole 41, A transfer cylinder 62 welded or welded to the central portion of the supply tube 20 and a transfer shaft 621 welded to the transfer shaft 621 of the transfer cylinder 62, And the drive motor 63 connected to the gap adjusting block 40. The gap adjusting block 40 and the jetting part 31 move by the driving of the transfer cylinder 62, The interval adjusting block 40 and the jetting section 31 are rotated in the forward or reverse direction at a predetermined angle by the operation of the driving motor 63 and the electrolyte is sprayed to uniformly distribute the ions . ≪ / RTI >

At this time, it is preferable that the connection bellows tube 61 is formed of elastic synthetic resin material. Both ends of the connection bellows tube 61 are inserted into the connection hole 22 and the extension hole 41, .

The rotation axis 631 of the driving motor 63 is axially coupled to the center of the gap adjusting block 40 and is driven by the driving motor 63 to move the gap adjusting block 40, (30) repeatedly in a forward or reverse direction at a certain angle. The gap adjusting block 40 and the spray bar 30 are preferably rotated at an angle of 10 to 30 degrees.

It will be apparent to those skilled in the art that various modifications and equivalent arrangements may be made therein without departing from the scope of the present invention as defined by the appended claims and their equivalents. . Therefore, it is to be understood that the present invention is not limited to the above-described embodiments. Accordingly, the true scope of the present invention should be determined by the technical idea of the appended claims. It is also to be understood that the invention includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention as defined by the appended claims.

10: nozzle device 20: supply tube
30: minutes Sabah 40: Spacing block
50: airtight device 60: feed rotary device
70: Swinging device
21: supply space 22: connection hole
31: jetting part 311: inner jetting hole
311a: insertion groove
312: Through hole 312a: Guide groove
313: Outside spray hole
41: Extension ball
51: airtight bolt 52: airtight tube
521: Elastic insertion projection
53: Confidential nut
61: connection bellows tube 62: transfer cylinder
621: Feed shaft
63: drive motor 631:
71: lift cylinder 72: oscillating panel
721: Swing vibrator
100: Coupling tube

Claims (5)

1. A nozzle apparatus for supplying an electrolytic solution, which is installed in a plating vessel and is delivered through a coupling tube, to a substrate,
A supply tube portion which is fastened to the coupling tube and has one end closed, a supply space formed therein, and a plurality of connection holes formed along an outer surface thereof so as to communicate with the supply space; And
And an injecting portion provided with an injecting portion for injecting and discharging the electrolytic solution transferred from the connecting hole,
Wherein the supply tube portion is further provided with a gap adjusting block such that the gap between the substrate and the atomizing bar is adjusted, and the gap adjusting block is formed with an extending hole communicating with the connecting hole,
Wherein the spray bar is formed on one surface of the gap adjusting block,
Wherein the spray portion includes an inner spray hole formed in a rear surface portion of the spray bar to communicate with an extension hole of the gap adjusting block, a through hole formed in a structure penetrating the inner spray hole to communicate with the inner spray hole, And a vortex jetting structure configured to jet the electrolyte through the outer jet holes, wherein the electrolyte injected through the through holes is sprayed through the outer jet holes,
The diameters of the through holes and the outer injection holes are different from each other,
The airtight device is detachably coupled to the through hole,
The airtight device includes a gas tight bolt,
An airtight tube fitted in the tightening shaft of the airtight bolt to close the inner injection hole,
And a tightening nut which is detachably fastened to an end portion of the fastening shaft protruding through the through hole,
An insertion groove is formed at an end of the inner injection hole, a guide groove is formed in the through hole so as to communicate with the insertion groove,
Wherein the airtight tube is made of a synthetic resin material having elasticity and is formed on the outer surface of the airtight tube so as to be inserted into the insertion groove after being guided by the guide groove and further to form an elastic insertion protrusion to close the inner injection hole,
Wherein the feed pipe is further provided with a feed rotary device,
Wherein the feed rotary device includes connecting bellows pipes connecting the connection hole and the extension hole,
A transfer cylinder installed in the supply pipe,
And a driving motor which is installed on a transfer shaft of the transfer cylinder and whose rotation axis is connected to the gap adjusting block,
Wherein the gap adjusting block and the jetting part move by the driving of the transfer cylinder to adjust the gap with the substrate and the space adjusting block and the jetting part rotate by the operation of the driving motor to jet the electrolyte,
And an elastic airtight pad having a plurality of water holes for moving the electrolytic solution is further interposed between the gap adjusting block, the supply pipe, and the sprayer,
And a swinging unit is further provided at a lower portion of the gap adjusting block to oscillate the electrolytic solution so that ions are uniformly distributed in the electrolytic solution. The swinging unit includes an ascending / descending cylinder installed in the gap adjusting block, Shaped swinging panel to be screwed, and the swinging panel is lifted up and down to swing the electrolytic solution. At this time, a rocking vibrator is further installed on the rocking panel,
The diameter of the inner spray hole is formed to be smaller than the diameter of the through hole and the outer spray hole and the diameter of the through hole and the outer spray hole are formed to be equal to each other so that the electrolytic solution injected from the inner spray hole is passed through the through hole The diameter of the through hole is larger than that of the inner injection hole and smaller than that of the outer injection hole,
Wherein the diameter of the through holes and the diameter of the outer spray holes are different from each other so that the amount of the injected electrolyte is differently discharged so as to oscillate the inside of the plating vessel to uniformly distribute the ions in the electrolytic solution. .
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