KR101776549B1 - Exposure apparatus having a print quality inspection function - Google Patents

Abstract

The present invention relates to an exposure apparatus having a print quality inspection function. More specifically, the present invention relates to a maskless type exposure apparatus using laser direct imaging (LDI). The exposure apparatus is capable of confirming whether printing is defective or not by inspecting print quality of a soft target sheet (substrate) loaded to an exposure process. Particularly, the exposure apparatus of the present invention is capable of preventing lifting or deformation of the target sheet and performing an accurate exposure process by applying a roller type supporting structure such that a supporting location of the target sheet is also moved corresponding to an irradiation location of a light for an exposure operation with respect to the soft target sheet that has been judged to be normal. Accordingly, the exposure apparatus may have improved reliability and competitiveness in fields similar to or associated with those fields as well as a maskless type exposure technical field using LDI, and a printed circuit board (PCB) circuit process field, a photo solder resist (PSR) process field, and a flexible substrate manufacturing field using the maskless type exposure technical field.

Description

[0001] The present invention relates to an exposure apparatus having a print quality inspection function,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exposure apparatus having a print quality inspection function and, more particularly, to a maskless exposure apparatus using LDI (Laser Direct Imaging) So that the printing quality of the sheet (substrate) can be inspected to confirm whether or not the sheet is bad.

Particularly, in the present invention, by applying a supporting structure of a roller shape so that the supporting position of the target sheet can be moved corresponding to the position where the light for exposure operation is irradiated on the object sheet of ductility determined to be normal, To an exposure apparatus having a print quality inspection function for preventing lifting, deformation, and the like and for performing an accurate exposure process.

In recent years, as our living environment has entered the ubiquitous era, mobile devices such as smart phones and various electronic products have been made into a small quantity and a variety of products. In order to manufacture a high-density circuit due to high functionality, A technology capable of realizing the above-mentioned technology is required.

Accordingly, new exposure methods have been developed to realize ultra-fine line widths on printed circuit boards (PCBs), and maskless methods using LDI (Laser Direct Imaging) have been developed.

LDI is used in a PCB printing process and a photo solder resist (PSR) process by directly exposing a substrate to a pattern without using a photomask. Since LDI uses light, it forms a circuit of an ultra-fine line width It is possible to realize a variety of circuits by merely changing the exposure pattern, so that it is possible to make a variety of products possible.

As a result, it is possible to form a pattern requiring high resolution, and it is a technology capable of flexibly coping with a mass production system as well as a small quantity production of a variety of products.

Since the LDI is a technique for forming a circuit or a protective layer (solder resist layer) through an exposure process for irradiating light, the position of the substrate and the distance between the substrate and the substrate must be maintained constant from the origin This is possible.

The following prior art documents relate to this and Korean Patent Registration No. 10-1468664 'Substrate adsorption apparatus of an exposure apparatus for a printed circuit board' (hereinafter referred to as 'Prior Art 1') vacuum-adsorbs a flexible PCB to support And to allow a flexible PCB to be stably supported on a flat surface without being warped or deformed.

The following prior arts Korean Patent Laid-Open Publication No. 10-2016-0108792 '' LDI exposure apparatus stage correction apparatus and correction method using the same '(hereinafter referred to as' Prior Art 2' So that the position of the stage can be corrected by confirming the state where the substrate is placed, and exposure can be performed with an accurate pattern image.

As in the prior art 1 and the prior art 2, the most important thing in the exposure technique is to accurately maintain the positional relationship between the origin of the light and the substrate (PCB). Only when these conditions are maintained, an accurate pattern can be formed.

On the other hand, an exposure liquid such as PSR ink or LPR (Liquid Photo Resist) ink has a property of being cured by receiving light, and the depth of curing varies depending on the light amount of the irradiated light.

Therefore, when an error occurs in the thickness of the applied exposure liquid, the exposure liquid may not be sufficiently cured or the physical properties of the inner layer of the exposure liquid may be changed.

In particular, in the case of a process for forming a PCB circuit, a development process and an etching process are performed after an exposure process. When the exposure process is not cured to a sufficient depth, The line width is changed, and the characteristics of the circuit are changed.

Such a problem may cause more serious problems in the case of forming fine or ultrafine line widths.

Therefore, it is important to check the coating thickness of the exposure liquid prior to performing the exposure operation. However, since it depends on the manual operation of the operator so far, it is difficult to accurately measure the exposure, There is a problem that deformation of the liquid occurs and the thickness error becomes rather large.

In addition, there is a limit in an area that can be exposed using light emitted from the head of the exposure apparatus. Therefore, in order to expose a substrate having a relatively large area, the head of the exposure apparatus moves on the substrate in a predetermined pattern, The exposure process must be performed while moving the substrate by the reference.

In other words, the exposure process is performed in a predetermined pattern on the substrate while repeating movement and stop of the head or the substrate of the exposure apparatus.

As described above, when the head and the substrate are repeatedly moved and stopped, vibration occurs in the exposure apparatus. Such vibration changes the relative position and distance between the head and the substrate, which is the origin point at which light is emitted. .

Until now, exposure apparatuses have been used for clamping and supporting a specific portion of a substrate by using a clamp or the like so as to prevent a relative position due to mechanical vibration from being changed.

However, since the surfaces of the substrates subjected to the PCB printing process and the PSR process are not uniformly formed by the formed circuit or the like, when one side is pressed and supported using the clamp, bending or deformation may occur in other portions of the substrate, This is a factor that increases the defective rate of the product, and therefore, it is not enough to say that it is a sufficient solution to solve the problems described above.

Korean Registered Patent No. 10-1468664 'Substrate adsorption apparatus of exposure apparatus for printed circuit board' Korean Patent Laid-Open Publication No. 10-2016-0108792 'Stage correcting device of LDI exposure apparatus and correction method using the same'

In order to solve the above problems, the present invention relates to a maskless exposure apparatus using LDI (Laser Direct Imaging), and more particularly, to a flexible PCB substrate (hereinafter referred to as " (Hereinafter, referred to as a " target sheet ") to check whether a defect is present or not.

It is another object of the present invention to provide an exposure apparatus having a printing quality inspection function capable of significantly improving the yield and productivity of a product by efficiently supporting a sheet to be subjected to ductility during the exposure process.

More specifically, according to the present invention, by applying a support structure of a roller shape so that the support position of the target sheet can be moved corresponding to the position where the light for exposure is irradiated, It is an object of the present invention to provide an exposure apparatus having a print quality inspection function for preventing lifting or deformation of a sheet and for performing an accurate exposure process.

In order to achieve the above object, an exposure apparatus having a print quality inspection function according to the present invention comprises: a stage on which a target sheet is placed; A moving module loading or unloading the stage into an inspection area or a work area; An inspection module for measuring the thickness of the semi-dried exposure liquid layer applied to the target sheet when the stage is loaded into the inspection area; An exposure module for irradiating the target sheet with light in a predetermined pattern to perform an exposure process when the stage is loaded into the work area; And when the stage on which the target sheet is placed is loaded into the inspection area, the thickness of the exposure liquid layer of the target sheet is measured to determine whether the target sheet is normal. If the target sheet is determined to be normal, the stage placed in the inspection area is loaded into the working area And a control module for controlling the unloading of the stage placed in the inspection area if the target sheet is judged to be defective.

When the thickness of the exposure liquid layer is within the tolerance range, the control module loads the target sheet into the work area and adjusts the light amount of the light emitted from the exposure module corresponding to the measured thickness of the exposure liquid layer .

The exposure module may further include a support module configured to move up and down at least one side of the exposure module and supporting the target sheet.

In addition, the support module may include a support roller configured to naturally rotate while supporting the upper surface of the target sheet when the target sheet is moved.

In addition, the control module may lower the support roller when the stage is loaded into the work area, and may raise the support roller when the exposure process by the exposure module is finished.

The stage may further include: an adsorption region in which the target sheet is placed; And a non-adsorbing region in which the support roller is positioned downward.

In addition, the stage may have a plurality of guide pins so that protrusion and insertion are possible along the boundary between the adsorption region and the non-adsorption region.

In addition, the control module controls the moving module to load the stage into the work area when the target sheet is placed on the stage in a state where the guide pin is protruded, The pins can be inserted into the stage.

The moving module may further include: a first operation mode for loading and unloading the target sheet; And a second operation mode in which the exposure module moves in response to the operation of the exposure module in the exposure process; The control module operates the moving module in the first operation mode to load the target sheet into the work area when the target sheet is placed in the suction area of the stage in a state in which the guide pin is protruded After the guide pin is inserted, the support roller may be lowered and the moving module may be operated in the second operation mode in conjunction with the operation of the exposure module to perform the exposure process.

The exposure module is operated to perform the exposure process for each of the plurality of divided unit work areas of the target sheet, and the moving module is configured to sequentially move the unit target areas in accordance with the unit work areas divided in the second operation mode Wherein the supporting module is provided with a supporting module for supporting both sides of the unit work area in which the exposure process is performed by the exposure module and for supporting both sides of the exposure module in front of and behind the exposure module in correspondence with the moving direction of the moving module in the second operation mode A support roller can be constituted.

According to the above-mentioned solution, the present invention has an advantage that it can check the print quality of the object sheet (substrate) to be subjected to the loading by the exposure process, and check whether the defect is defective by an in-line system.

In addition, when the thickness of the measured exposure liquid layer is within an error range, the light amount is adjusted to perform the exposure work, thereby minimizing the defect rate and improving the yield and productivity of the product.

In addition, the present invention is advantageous in that the exposed portion can be stably supported even when the target sheet is moved by supporting the target sheet, which is a flexible PCB substrate, by the supporting roller during the exposure process.

As described above, in the maskless exposure apparatus using the LDI, the present invention efficiently supports the target sheet in the course of the exposure process, thereby further improving the yield and productivity of the product.

Particularly, the present invention applies a roller-like support structure so that the support position of the target sheet can be moved corresponding to the position where the light is irradiated, as described above, There is an advantage that the target sheet can be prevented from lifting, bending, deforming, etc., and an accurate exposure process can be performed.

In addition, the present invention has an advantage that the exposure process can be performed more quickly and accurately by allowing the target sheet to be positioned at a certain position by using the guide pin configured to protrude and insert into the stage.

Accordingly, it is possible to improve the reliability and competitiveness in the maskless exposure technique using the LDI, the PCB circuit process using the same, the PSR process field, the flexible substrate manufacturing field, and similar or related fields.

1 is a configuration diagram showing an embodiment of an exposure apparatus having a print quality inspection function according to the present invention.
Fig. 2 is a flowchart showing an embodiment of an exposure process using Fig. 1. Fig.
3 is a configuration diagram showing a specific embodiment of FIG.
4 is a flowchart showing an embodiment of an exposure process using FIG.
FIGS. 5 to 9 are views for explaining each process of FIG. 4 using FIG. 3. FIG.

Exemplary embodiments of an exposure apparatus having a print quality inspection function according to the present invention can be variously applied, and the most preferred embodiments will be described below with reference to the accompanying drawings.

1 is a configuration diagram showing an embodiment of an exposure apparatus having a print quality inspection function according to the present invention.

1, an exposure apparatus A having a print quality inspection function includes a stage 100, a moving module 200, an inspection module 300, an exposure module 400, a supporting module 500, and a control module 600).

The stage 100 is provided with a target sheet s including a flexible PCB substrate so that the position of the target sheet s can be maintained by a vacuum adsorption method.

The transfer module 200 loads or unloads the stage 100 into an inspection area for measuring the thickness of the semi-dried exposure liquid or a work area where an exposure process is performed, or unloading the work area, And the stage 100 may be reciprocally moved or the stage 100 may be carried by using a robot arm.

The inspection module 300 measures the thickness of the semi-dried exposure liquid layer applied to the target sheet (s) when the stage 100 is loaded in the inspection area, and may include a distance measurement sensor or the like. In this case, since the distance measuring sensor can be changed to various sensors according to the demand of the person skilled in the art, the measuring method is not limited to a specific one, and the measuring method can be applied variously for the same or similar reasons.

For example, the inspection module 300 irradiates light to the exposure liquid layer, measures the distance of the light reflected from the surface of the exposure liquid layer and the reflected light passing through the exposure liquid, Can be measured.

The exposure module 400 irradiates light on the target sheet s in a pattern set in the work area and performs exposure. The exposure module 400 includes a head (not shown) (Not shown) that can be moved to a desired position.

The support module 500 supports the target sheet s, and when the stage 100 is loaded into the work area in a state of being positioned at the uppermost position, the support module 500 descends to support the upper portion of the target sheet s.

The control module 600 measures the thickness of the exposure liquid layer of the target sheet (s) after loading the stage on which the target sheet (s) is placed into the inspection area, determines whether or not it is normal, (s) is loaded into the work area or unloaded from the inspection area.

On the other hand, if the thickness of the measured exposure liquid layer is smaller than the reference thickness and the difference is insufficient, even if such a product is judged to be defective, the overall product yield and productivity may be deteriorated.

The control module 600 compares the measured thickness of the exposure liquid layer with the reference thickness, and when the difference is within the tolerance range, the control module 600 loads the target sheet (s) into the working area and adjusts the thickness of the measured exposure liquid layer The light quantity of the light irradiated from the exposure module 400 can be controlled correspondingly, thereby improving the overall product yield and productivity. Here, the tolerance range can be set based on the control range of the amount of light that can be controlled by the exposure module 400. [

In addition, the control module 600 controls the operation of the movement module 200, the exposure module 400, and the support module 500, and can perform the exposure process.

Hereinafter, a process in which the control module 600 controls each configuration to perform the exposure process for the target sheet s will be described.

Fig. 2 is a flowchart showing an embodiment of an exposure process using Fig. 1. Fig.

Referring to FIG. 2, the control module 500 determines whether the target sheet s is normal and exposed through the loading step S100, the inspection step S200, the exposure step S300, and the unloading step S400. Process can be performed.

When the target sheet s is placed on the stage 100 by an operator or by an automated apparatus such as a robot arm in a loading step S100 at S110, the control module 600 controls the moving module 200, So that the stage 100 on which the target sheet s is placed can be moved to the inspection area (S120). At this time, the moving module 200 can be operated in the first moving mode in which the target sheet s can be moved to the inspection area by a single operation.

In the inspection step S200, the control module 600 can measure the thickness of the exposure liquid layer applied to the target sheet s using the inspection module 300 (S210). At this time, the control module 600 displays the circuit pattern of the target sheet (s), receives the position information of the point to be measured by the operator, moves the inspection module 300 according to the inputted position information The thickness of the set point can be measured.

For this purpose, the inspection module 300 may include a vision sensor for photographing the surface of the target sheet s, a laser sensor capable of measuring the thickness of the target point, and the like.

As a result of the inspection, the target sheet s determined to be defective can be unloaded and reprocessed or discarded, and the target sheet s determined as normal can be moved to the work area (S220).

In the exposure step S300, the control module 600 operates to lower the support module 500 to support the target sheet s loaded into the work area (S310), and then operates the exposure module 400 An exposure operation for the sheet s may be performed (S320). At this time, the moving module 200 can be operated in the second moving mode in which the stage 100 can be moved at regular intervals in accordance with the operation of the exposure module 400. [

In the unloading step S400, the control module 600 moves the support module 500 supporting the target sheet s to the original position (S410), and then the target sheet s (S420). At this time, the moving module 200 can be operated in the first moving mode so as to unload the target sheet s in a single operation.

Hereinafter, a process of controlling each configuration of the control module 600 will be described in more detail with reference to a specific embodiment of the exposure apparatus A having the print quality inspection function shown in FIG.

3 is a configuration diagram showing a specific embodiment of FIG.

3, a plurality of suction holes 101 may be formed in the upper part of the stage 100, and negative pressure may be formed in the suction holes 101 by the vacuum pump 102. [ Thus, when the target sheet s is placed on the stage 100, the target sheet s can be stably supported on the top of the stage 100 by the negative pressure formed by the suction holes 101 .

On the other hand, the upper portion of the stage 100 can be divided into an adsorption region R1 and a non-adsorption region R2 as shown in FIG.

The suction region R1 is an area on which the target sheet s is placed, and a plurality of suction holes 101 may be formed as described above.

The non-adsorbing region R2 is an area where one of the support rollers 510 (the support roller on the left side in FIG. 3) is located downward. The exposure module 400 exposes the non- (Left side in Fig. 3, upper side in Fig. 7) relative to the adsorption region R1 on the basis of the moving direction of the sheet s (left side in Fig. 3, upper side in Fig. 7).

In other words, when the target sheet s is moved while the supporting roller 510 is lowered in the non-adsorbing region R2 and the exposure module 400 performs the exposure operation, one side of the target sheet s Front portion) can be supported by the lowered support roller 510. [

A plurality of guide pins 110 may be formed on the stage 100 so as to protrude and insert along the boundary between the adsorption region R1 and the non-adsorption region R2. The subject sheet s can be placed at a certain position.

At this time, the guide pin 110 may protrude upward from the stage 100 by the cylinder 111 or may be inserted into the stage 100. Here, the cylinder 111 may include a pneumatic cylinder and a hydraulic cylinder, but it is preferable to use a pneumatic cylinder with a high response speed.

The moving module 200 includes a vertical rail 210 configured along the direction in which the stage 100 is loaded and unloaded and a vertical axis 220 coupled with the stage 100 and moving along the vertical rail 210 .

The inspection module 300 may include a vision sensor 310 for measuring the distance of the upper surface of the object sheet s while moving within the inspection area and measuring the thickness of the semi-dried exposure liquid layer .

The exposure module 400 may include a transverse movement portion 410 configured in a direction perpendicular to the direction in which the stage 100 is moved and perform an exposure operation while reciprocally moving from an upper portion of the target sheet s to a transverse axis .

The supporting module 500 may include at least one side of the exposure module 400, and a supporting roller 510 configured to be movable up and down adjacent to both sides in FIG.

When the target sheet s is moved in the process of performing the exposure operation by supporting the target sheet s using the pivotable support roller 510, (Naturally rotating) while naturally supporting the upper surface of the object sheet s.

Particularly, when the supporting roller 510 is used, since the supporting roller 510 is constantly supported at a certain distance from the exposure module 400, accurate pattern exposure can be performed. In addition, It is possible to prevent occurrence of bending, deformation, and the like and to stably support it.

In Fig. 3, reference numeral 112 is a pneumatic pump.

FIG. 4 is a flowchart showing an embodiment of an exposure process using FIG. 3, and FIGS. 5 to 9 are views for explaining each process of FIG. 4 using FIG.

Hereinafter, Fig. 4 will be described with reference to Figs. 5 to 9. Fig.

5, the guide pin 110 is protruded to the upper part of the stage 100 in step S101, and the target sheet s is placed on the guide pin 110 to support the edge thereof in step S110. .

The position of the target sheet s placed on the upper surface of the stage 100 can be stably maintained by the negative pressure formed in the suction hole 101 by the vacuum pump 102. [

The control module 600 controls the movement module 200 to operate in the first operation mode so that the stage 100 on which the target sheet s is placed is moved to the position where the inspection module 300 is placed It is possible to move to the inspection area (S120).

The control module 600 can operate the inspection module 300 to measure the thickness of the semi-dried exposure liquid layer when the stage 100 on which the target sheet s is placed is loaded into the inspection area S210).

Then, the control module 600 can determine whether the stage 100 is normal based on the measurement result (S211). If it is determined as normal, the stage 100 on which the target sheet s is placed is exposed To the work area where the module 400 is disposed (S220).

The control module 600 inserts the protruded guide pin 110 into the interior of the stage 100 as shown in the upper part of Fig. 6 (Fig. 6) when the stage 100 on which the target sheet s is placed is loaded into the work area S301). As shown in the lower part of FIG. 6, the support module 500 may be controlled to lower the support roller 510 (S310).

At this time, any one of the supporting rollers 510 of the supporting module 500 (left side in Fig. 6) descends to a portion corresponding to the upper portion of the adsorption region R1 in the non-adsorbing region R2 shown in Fig. 7 .

Thereafter, the control module 600 controls the exposure module 400 and the movement module 200 to perform the exposure operation (S320).

On the other hand, as described above, the exposure area R3, which can perform the exposure work using the light emitted from the head of the exposure module 400, is relatively narrow compared with the entire area of the target sheet s.

Thus, the exposure module 400 can perform exposure work for each unit work area? W divided into a plurality of target sheets (s). More specifically, the exposure module 400 can perform the exposure operation while moving in the width direction (the left-right direction in FIG. 7) as shown in the upper part of FIG. 7 by the transverse moving portion 310 shown in FIG.

When the exposure operation for any one unit work area? W is completed, as shown in the center of FIG. 7, the movement module 200 moves by the width of the unit work area? W by the second operation mode , The exposure module 400 moves to the original position (left side in FIG. 7).

Thereafter, as shown in the lower part of Fig. 7, the exposure operation for the next unit work area [Delta] w can be performed.

The supporting roller 510 of the supporting module 500 supports the front and rear portions (upper and lower portions in FIG. 7) of the unit work area? W where the exposure operation is performed , It is possible to accurately perform the exposure work on the unit work area [Delta] w.

8, the control module 600 raises the support roller 510 of the support module 500 (S410) and moves the support roller 510 to the lower part of FIG. 8 As shown, the mobile module 200 may be operated in the first operation mode and unloaded from the work area (S420).

9, when the metabolic sheet s is recovered from the stage 100 at step S430, the control module 600 re-inserts the guide pin 110 inserted into the stage 100 again (S440) so as to guide the next target sheet (s) to be laid.

The method of confirming that the control module 600 places the object sheet s on the upper side of the stage 100 and collects the object sheet s on the upper side of the stage 100 can be variously applied according to the needs of those skilled in the art, I did not. For example, a sensor for measuring the pressure load generated on the suction hole 101 side of the stage 100 can be configured, and it is possible to confirm whether or not the target sheet s is seated through the pressure change measured by the sensor have. As another example, when the subject sheet s is laid and recovered by the operator, it can be confirmed whether or not the target sheet s is seated through the input signal of the button operated by the operator.

The exposure apparatus having the print quality inspection function according to the present invention has been described above. It will be understood by those skilled in the art that the technical features of the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof.

It is to be understood, therefore, that the embodiments described above are in all respects illustrative and not restrictive.

A: Exposure device having a print quality inspection function
R1: absorption region R2: non-absorption region
100: stage
101: suction hole 110: guide pin
200: Moving module 300: Inspection module
400: Exposure module 500: Support module
600: control module

Claims (10)

A stage on which the target sheet is placed;
A moving module loading or unloading the stage into an inspection area or a work area;
An inspection module for measuring the thickness of the semi-dried exposure liquid layer applied to the target sheet when the stage is loaded into the inspection area;
An exposure module for irradiating the target sheet with light in a predetermined pattern to perform an exposure process when the stage is loaded into the work area; And
And a step of loading a stage placed in an inspection area into a work area when the target sheet is determined to be normal, And a control module for controlling the unloading of the stage placed in the inspection area when the target sheet is determined to be defective,
The control module includes:
When the thickness of the exposure liquid layer is within the tolerance range, the target sheet is loaded into the working area,
Adjusting an amount of light emitted from the exposure module corresponding to the measured thickness of the exposure liquid layer,
And a support module configured to move up and down at least one side of the exposure module, the support module supporting the target sheet,
The support module includes:
And a support roller configured to naturally rotate while supporting an upper surface of the target sheet when the target sheet is moved,
The stage includes:
An adsorption region in which the target sheet is placed; And
And a non-adsorbing region in which the support roller is located at a lowered position,
The stage includes:
A plurality of guide pins are formed so as to be protruded and inserted along the boundary between the adsorption region and the non-adsorption region,
The guide pin
The stage supporting the edge of the seesinger target sheet to be loaded into the inspection area or the work area to fix the position of the target sheet,
The control module includes:
When the target sheet is placed on the stage in a state where the guide pin is protruded, the stage is controlled to be loaded into the work area by the movement module, and then the guide pin is inserted into the stage before descending the support roller And a print quality inspection function.
delete delete delete The method according to claim 1,
The control module includes:
The support roller is lowered when the stage is loaded into the work area,
And the support roller is raised when the exposure process by the exposure module is completed.
delete delete delete The method according to claim 1,
The mobile module comprises:
A first operation mode for loading and unloading the target sheet; And
A second operation mode in which the exposure module moves in response to the operation of the exposure module in the exposure process; Lt; / RTI >
The control module includes:
When the target sheet is placed in the suction region of the stage in a state where the guide pin is protruded, the target module is operated in the first operation mode to load the target sheet into the work area, and after inserting the guide pin, Wherein the exposure module is operated in a second operation mode in conjunction with the operation of the exposure module to perform an exposure process.
10. The method of claim 9,
In the exposure module,
Wherein the target sheet is operated to perform an exposure process for each of a plurality of divided unit work areas,
The mobile module comprises:
And sequentially move in correspondence with the divided unit work areas in the second operation mode,
The support module includes:
And a supporting roller is provided on the front and rear of the exposure module in correspondence with the moving direction of the moving module in the second operation mode so as to support both sides of the unit work area in which the exposure module is performed by the exposure module An exposure apparatus having a print quality inspection function.

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