KR101746818B1 - Light emitting device - Google Patents
Light emitting device Download PDFInfo
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- KR101746818B1 KR101746818B1 KR1020150188369A KR20150188369A KR101746818B1 KR 101746818 B1 KR101746818 B1 KR 101746818B1 KR 1020150188369 A KR1020150188369 A KR 1020150188369A KR 20150188369 A KR20150188369 A KR 20150188369A KR 101746818 B1 KR101746818 B1 KR 101746818B1
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- light emitting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/10—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a light reflecting structure, e.g. semiconductor Bragg reflector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/38—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/40—Materials therefor
- H01L33/405—Reflective materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12041—LED
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- Engineering & Computer Science (AREA)
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- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Led Devices (AREA)
Abstract
A light emitting device is disclosed. The light emitting device includes a light emitting structure including a first conductivity type semiconductor layer, a second conductivity type semiconductor layer, and an active layer, and including at least one groove; A contact electrode comprising a light-transmitting conductive oxide; A light-reflective first insulating layer including a plurality of first and second openings exposing the contact electrode and a fourth opening exposing the first conductive type semiconductor layer exposed in the groove; A first electrode that makes an ohmic contact with the first conductivity type semiconductor layer through the fourth opening; A second electrode electrically connected to the contact electrode through the first and second openings; A second insulating layer; A first pad electrode; And a second pad electrode, wherein the plurality of first openings are located below the first pad electrode, the plurality of second openings are located below the second pad electrode, and the average distance of the first openings is smaller than the average distance of the second openings Is greater than the average separation distance.
Description
The present invention relates to a light emitting device, and more particularly to a light emitting device having improved current dispersion efficiency and light reflection efficiency.
Recently, there is an increasing demand for small size high power light emitting devices, and demand for large area flip chip type light emitting diodes with high heat dissipation efficiency applicable to high power light emitting devices is increasing. Since the electrode of the flip chip type light emitting device is directly bonded to the secondary substrate and the wire for supplying external power to the flip chip type light emitting device is not used, the heat emission efficiency is much higher than that of the horizontal type light emitting device. Therefore, even when a high-density current is applied, the heat can be effectively conducted to the secondary substrate side, so that the flip chip type light emitting device is suitable as the light emitting source of the high output light emitting device.
In the light emitting device, the current concentration may cause deterioration of the device in which the current is concentrated, unevenness of the emission pattern, and deterioration of the electron hole recombination efficiency due to current concentration. Such current concentration, that is, deterioration of the current dispersion efficiency, may deteriorate the reliability and lifetime of the light emitting device, resulting in a decrease in luminous efficiency. Further, the forward voltage and the luminous efficiency may be decreased or increased due to the contact characteristics between the semiconductor layer of the light emitting device and the electrode, that is, the contact resistance.
Such contact characteristics and current dispersion efficiency have a greater influence on a high-output, large-area light emitting device. Therefore, in order to realize a light emitting device driven with high efficiency at a high current, a light emitting device having an optimal structure is required in consideration of electrical characteristics and optical characteristics.
A problem to be solved by the present invention is to provide a light emitting device having an excellent electrical contact property between a second conductivity type semiconductor layer and a contact electrode, an improved current dispersion efficiency, and an improved optical characteristic.
A light emitting device according to an aspect of the present invention includes a first conductive semiconductor layer, a second conductive semiconductor layer disposed on the first conductive semiconductor layer, and a second conductive semiconductor layer disposed between the first and second conductive semiconductor layers A light emitting structure including at least one groove for partially exposing the first conductivity type semiconductor layer; A contact electrode at least partially located on the second conductivity type semiconductor layer, the contact electrode comprising a light-transmitting conductive oxide that is in ohmic contact with the second conductivity type semiconductor layer; And a fourth opening exposing the first conductive type semiconductor layer exposed in the groove, the first and second openings covering the light emitting structure and the contact electrode, the first and second openings exposing the contact electrode, 1 insulating layer; A first electrode located on the at least one groove and making an ohmic contact with the first conductive semiconductor layer through the fourth opening; A second electrode located on the first insulating layer and electrically connected to the contact electrode through the first and second openings; A second insulating layer covering the first and second electrodes and including a fifth opening partially exposing the first electrode and a sixth opening partially exposing the second electrode; A first pad electrode located on the second insulating layer and electrically in contact with the first electrode through the fifth opening; And a second pad electrode located on the second insulating layer and in electrical contact with the second electrode through the sixth opening, the plurality of first openings being located under the first pad electrode The plurality of second openings are located below the second pad electrode, and the average distance of the first openings is larger than the average distance of the second openings.
According to embodiments, the contact characteristics between the contact electrode and the second conductivity type semiconductor layer can be improved to improve the electrical characteristics of the light emitting device, and the first insulating layer having the light reflectivity can cover the contact electrode almost entirely, And the contact electrode formed of the conductive oxide is superior to the metallic electrode in bonding properties with the nitride semiconductor so that the increase of the forward voltage of the light emitting device and deterioration of the current dispersion efficiency due to the peeling of the contact electrode can be prevented, The reliability of the light emitting device can be improved, and the decrease in the light emission efficiency can be prevented.
Further, by controlling the spacing distance and arrangement position between the openings through which the first insulating layer exposes the contact electrodes, it is possible to improve the current dispersion efficiency and improve the luminous efficiency and lifetime of the light emitting device.
1 to 5 are plan views illustrating a light emitting device according to embodiments of the present invention.
6 to 8 are cross-sectional views illustrating a light emitting device according to embodiments of the present invention.
9 is a cross-sectional view illustrating a light emitting device according to various embodiments of the present invention.
10 is a plan view illustrating a light emitting device according to various embodiments of the present invention.
11 is a plan view illustrating a light emitting device according to various embodiments of the present invention.
12 is a plan view illustrating a light emitting device according to various embodiments of the present invention.
13A and 13B are a partial plan view and a partial cross-sectional view for illustrating a light emitting device according to various other embodiments of the present invention.
14A and 14B are a partial plan view and a partial cross-sectional view for explaining a light emitting device according to various other embodiments of the present invention.
15A and 15B are a partial plan view and a partial cross-sectional view for explaining a light emitting device according to various other embodiments of the present invention.
16 is a partial cross-sectional view illustrating a light emitting device according to another embodiment of the present invention.
17 is a partial cross-sectional view illustrating a light emitting device according to still another embodiment of the present invention.
18 is an exploded perspective view illustrating an example in which a light emitting device according to an embodiment of the present invention is applied to a lighting apparatus.
19 is a cross-sectional view illustrating an example in which a light emitting device according to an embodiment of the present invention is applied to a display device.
20 is a cross-sectional view illustrating an example in which a light emitting device according to an embodiment of the present invention is applied to a display device.
21 is a cross-sectional view illustrating an example in which a light emitting device according to an embodiment of the present invention is applied to a headlamp.
The light emitting device and the light emitting device manufacturing method according to embodiments of the present invention can be implemented in various aspects.
The light emitting device according to various embodiments of the present invention includes a first conductive semiconductor layer, a second conductive semiconductor layer disposed on the first conductive semiconductor layer, and a second conductive semiconductor layer disposed on the first conductive semiconductor layer, A light emitting structure including an active layer disposed between the first conductive semiconductor layer and the first conductive semiconductor layer and partially exposing the first conductive semiconductor layer; A contact electrode at least partially located on the second conductivity type semiconductor layer, the contact electrode comprising a light-transmitting conductive oxide that is in ohmic contact with the second conductivity type semiconductor layer; And a fourth opening exposing the first conductive type semiconductor layer exposed in the groove, the first and second openings covering the light emitting structure and the contact electrode, the first and second openings exposing the contact electrode, 1 insulating layer; A first electrode located on the at least one groove and making an ohmic contact with the first conductive semiconductor layer through the fourth opening; A second electrode located on the first insulating layer and electrically connected to the contact electrode through the first and second openings; A second insulating layer covering the first and second electrodes and including a fifth opening partially exposing the first electrode and a sixth opening partially exposing the second electrode; A first pad electrode located on the second insulating layer and electrically in contact with the first electrode through the fifth opening; And a second pad electrode located on the second insulating layer and in electrical contact with the second electrode through the sixth opening, the plurality of first openings being located under the first pad electrode The plurality of second openings are located below the second pad electrode, and the average distance of the first openings is larger than the average distance of the second openings.
The first electrode may include a first ohmic contact electrode located under the first pad electrode, and at least a portion of the first ohmic contact electrode may be located between the first openings.
The first electrode may include a second ohmic contact electrode extending in a direction from the first ohmic contact electrode toward the second pad electrode and at least a part of the second ohmic contact electrode being located under the space between the first and second pad electrodes .
The first ohmic contact electrode may include a main electrode, and at least a portion of the main electrode may be exposed to the fifth opening to contact the first pad electrode.
The first ohmic contact electrode may include a plurality of main electrodes and a sub electrode connecting the plurality of main electrodes and having a line width narrower than the main electrode, and the sub electrode may be covered with the second insulating layer .
The first electrode may have a shape extending from the first pad electrode toward the second pad electrode, and at least a part of the first openings may be a line extending along the direction in which the first electrode extends, As shown in FIG.
Wherein a shortest distance from a region where the contact electrode and the second electrode are in contact through the first opening to an outer side face of the active layer is a distance from a region where the contact electrode and the second electrode are in contact through the first opening, May be shorter than the shortest distance to the region where the first electrode and the first conductivity type semiconductor layer are in ohmic contact.
The first insulating layer may further include a third opening positioned below a space between the first pad electrode and the second pad electrode.
The at least one groove may have a shape that is recessed from a side surface of the light emitting structure and extends in a direction from the first pad electrode toward the second pad electrode.
The at least one groove may include a plurality of first grooves and a second groove connecting the plurality of first grooves and having a width smaller than the first groove, And may be positioned below the first pad electrode.
The at least one groove may further include a third groove extending from the first groove and having a width smaller than that of the first groove and at least a part of the third groove may be formed on the first and second pad electrodes And can be located at the bottom of the space between them.
The light emitting structure may include a plurality of grooves and at least two of the plurality of grooves may be arranged symmetrically with respect to any line located therebetween.
The at least one groove may include at least one hole penetrating the second conductive type semiconductor layer and the active layer.
The at least one hole may include a first hole located below the first pad electrode and a second hole extending from the first hole toward the second pad electrode.
The contact electrode may cover 90% or more of the upper surface of the second conductive type semiconductor layer.
The second electrode may be located on an outer edge region of the contact electrode.
The light emitting device may further include a current blocking layer interposed between the contact electrode and the second conductive type semiconductor layer, the current blocking layer being located under the contact area between the contact electrode and the second electrode.
The contact electrode may include a seventh opening located in at least one of the first and second openings and exposing the second conductive type semiconductor layer.
The light emitting device may further include a supporting electrode located under at least one of the first and second openings and interposed between the second electrode and the contact electrode.
The first insulating layer may comprise a distributed Bragg reflector, and the second insulating layer may comprise SiN x .
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. The following embodiments are provided by way of example so that those skilled in the art can sufficiently convey the spirit of the present invention. Therefore, the present invention is not limited to the embodiments described below, but may be embodied in other forms. In the drawings, the width, length, thickness, etc. of components may be exaggerated for convenience. It is also to be understood that when an element is referred to as being "above" or "above" another element, But also includes the case where another component is interposed between the two. Like reference numerals designate like elements throughout the specification.
FIGS. 1 to 5 are plan views illustrating a light emitting device according to embodiments of the present invention, and FIGS. 6 to 8 are cross-sectional views illustrating a light emitting device according to embodiments of the present invention.
2 is a plan view showing the first and
6 is a cross-sectional view showing a section corresponding to the line A-A 'in the plan views of FIGS. 1 to 4, and FIG. 7 is a cross-sectional view of the portion corresponding to the line B-B' Fig. 8 is a cross-sectional view showing a section of a portion corresponding to line C-C 'in plan views of FIGS. 1 to 4. FIG.
1 to 8, the light emitting device includes a
The
The
The
Of the
3 to 7, a plurality of
In addition, at least one groove (120g) may include a third recess (120g 3) extending from the first groove (120g 1). The distance from the
The shapes of the first to
In some embodiments, the
The
In particular, the
Although the thickness of the
The
The first insulating
The first to
By controlling the spacing distance of the first to
The
The first insulating
When the first insulating
The distributed Bragg reflector may have a reflectivity for relatively high visible light. The distributed Bragg reflector may be designed to have a reflectance of 90% or more with respect to light having an incident angle of 0 to 60 ° and a wavelength of 400 to 700 nm. The above-described distributed Bragg reflector having reflectance can be provided by controlling the type, thickness, stacking period, etc. of a plurality of dielectric layers forming the distributed Bragg reflector. Thus, it is possible to form a distributed Bragg reflector having a high reflectance for light of a relatively long wavelength (for example, 550 nm to 700 nm) and light of a relatively short wavelength (for example, 400 nm to 550 nm).
As such, the distributed Bragg reflector may include multiple laminate structures such that the distributed Bragg reflector has a high reflectance for light of a broad wavelength band. That is, the distributed Bragg reflector may include a first lamination structure in which dielectric layers having a first thickness are laminated, and a second lamination structure in which dielectric layers having a second thickness are laminated. For example, the distributed Bragg reflector has a first laminated structure in which dielectric layers having a thickness smaller than 1/4 of the optical thickness with respect to light having a center wavelength of visible light (about 550 nm) are laminated, and a first laminated structure having a center wavelength (about 550 nm) Lt; RTI ID = 0.0 > 1/4 < / RTI > optical thickness with respect to the light of the second layer stack. Furthermore, the above-mentioned distributed Bragg reflector has a dielectric layer having a thickness greater than 1/4 of the optical thickness with respect to light having a center wavelength (about 550 nm) of visible light and a dielectric layer having a thickness smaller than 1/4 of the optical thickness And may further include a third stacked structure repeatedly stacked.
The light passing through the
The
The
The width of the
Electrons injected through the main electrode 153a in contact with the
The
Referring again to FIGS. 1 to 8, the
The
A current is injected into the
The current injection through the region where the
The spacing between the first, second, and
The
In addition, a part of the
The second
The second
The
The
The
According to the above-described embodiments, a light emitting device including a
The current injection into the
That is, through the structure according to the embodiments, a light emitting device having improved contact characteristics, optical characteristics, and current dispersion efficiency can be provided, and the light emitting device can be usefully used as a high output light emitting device.
10 to 12 are plan views illustrating a light emitting device according to various embodiments of the present invention. The light emitting devices of FIGS. 10 to 12 are substantially similar to the light emitting device described with reference to FIGS. 1 to 8, but differ in the shape and arrangement of the grooves.
Referring to FIG. 10, the light emitting device of this embodiment includes a first groove 120h 1 and a second groove 120h 2 that are spaced apart from each other. The first grooves 120h 1 and the second grooves 120h 2 are different from the shapes recessed from the side surfaces of the
Referring to FIGS. 11 and 12, the light emitting device of the present embodiment has an aspect ratio different from that of the light emitting device of FIGS. 1 to 8. Accordingly, the light emitting device of FIG. 11 includes
13A to 15B are partial plan views and partial sectional views for explaining a light emitting device according to various other embodiments. The light emitting device according to the present embodiments is substantially similar to the light emitting device of FIGS. 1 to 8, but differs in the lower structure of the first to
13A and 13B, the light emitting device of this embodiment further includes a
14A and 14B, the
15A and 15B, the light emitting device of the present embodiment further includes a
A current cut-off in the above-described
16 is a partial cross-sectional view illustrating a light emitting device according to another embodiment of the present invention. 17 is a partial cross-sectional view illustrating a light emitting device according to still another embodiment of the present invention.
Referring to Fig. 16, the light emitting device of this embodiment further includes a supporting
Also, in various embodiments, the light emitting device may further include a
18 is an exploded perspective view illustrating an example in which a light emitting device according to an embodiment of the present invention is applied to a lighting apparatus.
Referring to FIG. 18, the illumination device according to the present embodiment includes a
The
The
The light emitting
The
The
19 is a cross-sectional view illustrating an example in which a light emitting device according to an embodiment of the present invention is applied to a display device.
The display device of this embodiment includes a
The
The backlight unit includes a light source module including at least one substrate and a plurality of light emitting elements (2160). Furthermore, the backlight unit may further include a
The
The
The diffusion plate 2131 and the
As described above, the light emitting device according to the embodiments of the present invention can be applied to the direct-type display device as in the present embodiment.
20 is a cross-sectional view illustrating an example in which a light emitting device according to an embodiment is applied to a display device.
The display device including the backlight unit according to the present embodiment includes a
The
The backlight unit for providing light to the
The light source module includes a
As described above, the light emitting device according to the embodiments of the present invention can be applied to the edge display device as in the present embodiment.
21 is a cross-sectional view illustrating an example in which a light emitting device according to an embodiment of the present invention is applied to a headlamp.
Referring to FIG. 21, the headlamp includes a
The
As described above, the light emitting device according to the embodiments of the present invention can be applied to a head lamp, particularly, a headlamp for a vehicle as in the present embodiment.
As described above, the various features described above are not limited to the respective embodiments, and the respective features may be combined, changed, and replaced with each other in various embodiments. The present invention is not limited to the above-described embodiments, and various modifications and changes may be made without departing from the technical idea of the present invention.
Claims (20)
A contact electrode at least partially located on the second conductivity type semiconductor layer, the contact electrode comprising a light-transmitting conductive oxide that is in ohmic contact with the second conductivity type semiconductor layer;
And a fourth opening exposing the first conductive type semiconductor layer exposed in the groove, the first and second openings covering the light emitting structure and the contact electrode, the first and second openings exposing the contact electrode, 1 insulating layer;
A first electrode located on the at least one groove and making an ohmic contact with the first conductive semiconductor layer through the fourth opening;
A second electrode located on the first insulating layer and electrically connected to the contact electrode through the first and second openings;
A second insulating layer covering the first and second electrodes and including a fifth opening partially exposing the first electrode and a sixth opening partially exposing the second electrode;
A first pad electrode located on the second insulating layer and electrically in contact with the first electrode through the fifth opening; And
And a second pad electrode located on the second insulating layer and electrically in contact with the second electrode through the sixth opening,
Wherein the plurality of first openings are located below the first pad electrode and the plurality of second openings are located below the second pad electrode,
Wherein an average spacing distance of the first openings is greater than an average spacing distance of the second openings.
Wherein the first electrode includes a first ohmic contact electrode located under the first pad electrode,
And at least a part of the first ohmic contact electrode is located between the first openings.
Wherein the first electrode comprises:
And a second ohmic contact electrode extending in a direction from the first ohmic contact electrode toward the second pad electrode and at least a part of the second ohmic contact electrode being located under the space between the first and second pad electrodes.
Wherein the first ohmic contact electrode comprises a main electrode,
And at least a part of the main electrode is exposed to the fifth opening to be in contact with the first pad electrode.
Wherein the first ohmic contact electrode includes a plurality of main electrodes and a sub electrode connecting the plurality of main electrodes and having a line width narrower than the main electrode,
And the sub electrode covers the second insulating layer.
Wherein the first electrode has a shape extending from the first pad electrode toward the second pad electrode,
Wherein at least a part of the first openings are symmetrically arranged with respect to a line along a direction in which the first electrode extends.
Wherein a shortest distance from a region where the contact electrode and the second electrode are in contact through the first opening to an outer side face of the active layer is a distance from a region where the contact electrode and the second electrode are in contact through the first opening, Emitting element is shorter than the shortest distance to the region where the first electrode and the first conductivity type semiconductor layer are in ohmic contact.
Wherein the first insulating layer further includes a third opening located below a space between the first pad electrode and the second pad electrode.
Wherein the at least one groove has a shape that is recessed from a side surface of the light emitting structure and extends in a direction from the first pad electrode toward the second pad electrode.
Wherein the at least one groove comprises a plurality of first grooves and a second groove connecting the plurality of first grooves and having a width smaller than the first groove,
Wherein the first groove and the second groove are located below the first pad electrode.
The at least one groove further comprises a third groove extending from the first groove and having a width smaller than that of the first groove,
And at least a part of the third groove is located below a space between the first and second pad electrodes.
Wherein the light emitting structure includes a plurality of grooves, and at least two of the plurality of grooves are symmetrically disposed with respect to any line located therebetween.
Wherein the at least one groove includes at least one hole penetrating the second conductivity type semiconductor layer and the active layer.
Wherein the at least one hole includes a first hole located below the first pad electrode and a second hole extending from the first hole toward the second pad electrode.
And the contact electrode covers at least 90% of the upper surface of the second conductive type semiconductor layer.
And the second electrode is located on an outer edge region of the contact electrode.
And a current blocking layer interposed between the contact electrode and the second conductive type semiconductor layer, the current blocking layer being located below an area where the contact electrode and the second electrode are in contact with each other.
And the contact electrode includes a seventh opening located in at least one of the first and second openings and exposing the second conductive type semiconductor layer.
And a supporting electrode located under at least one of the first and second openings and interposed between the second electrode and the contact electrode.
Wherein the first insulating layer comprises a distributed Bragg reflector, and the second insulating layer comprises SiN x .
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011066304A (en) | 2009-09-18 | 2011-03-31 | Toyoda Gosei Co Ltd | Light-emitting element |
JP2012049366A (en) | 2010-08-27 | 2012-03-08 | Toyoda Gosei Co Ltd | Light-emitting element |
JP2014011275A (en) | 2012-06-28 | 2014-01-20 | Toshiba Corp | Semiconductor light-emitting device |
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2011066304A (en) | 2009-09-18 | 2011-03-31 | Toyoda Gosei Co Ltd | Light-emitting element |
JP2012049366A (en) | 2010-08-27 | 2012-03-08 | Toyoda Gosei Co Ltd | Light-emitting element |
JP2014011275A (en) | 2012-06-28 | 2014-01-20 | Toshiba Corp | Semiconductor light-emitting device |
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