KR101732048B1 - Facility for purifying exhaust gas which is generated in processing plasma reactor - Google Patents

Facility for purifying exhaust gas which is generated in processing plasma reactor Download PDF

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Publication number
KR101732048B1
KR101732048B1 KR1020150096306A KR20150096306A KR101732048B1 KR 101732048 B1 KR101732048 B1 KR 101732048B1 KR 1020150096306 A KR1020150096306 A KR 1020150096306A KR 20150096306 A KR20150096306 A KR 20150096306A KR 101732048 B1 KR101732048 B1 KR 101732048B1
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KR
South Korea
Prior art keywords
conduit
module
exhaust gas
electrode
electrode unit
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KR1020150096306A
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Korean (ko)
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KR20170006007A (en
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강경두
고경오
노명근
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(주)클린팩터스
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Priority to KR1020150096306A priority Critical patent/KR101732048B1/en
Priority to PCT/KR2015/007778 priority patent/WO2017007059A1/en
Publication of KR20170006007A publication Critical patent/KR20170006007A/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Abstract

The present invention relates to an exhaust gas treatment plasma reactor generated in a process facility, which is disposed between the process chamber and the vacuum pump, so that the exhaust gas introduced from the process chamber can be discharged to the vacuum pump A conduit in which an internal space is formed; An inner module disposed in the inner space and forming a space in which a plasma discharge occurs between the inner space and the inner space, the inner module extending in a direction intersecting a direction in which the exhaust gas flows in the inner space; And a first electrode unit installed in the internal module and generating a plasma discharge in a space where the plasma discharge occurs.

Description

TECHNICAL FIELD [0001] The present invention relates to a plasma reactor (hereinafter, referred to as " plasma reactor "

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plasma reactor, and more particularly, to a plasma reactor capable of providing a plasma discharge within electrode conduits and treating a large amount of exhaust gas.

Processes such as functional thin film formation, dry etching, and the like are applied to manufacturing processes of semiconductors, display devices, and solar cells. Such a process is generally performed in a vacuum chamber, and various kinds of metals and nonmetal precursors are used as a process gas for the formation of a functional thin film, and various kinds of etching gases are also used for dry etching.

A system for evacuating a process chamber includes components such as a process chamber, a vacuum pump, a scrubber, etc. connected to each other through an exhaust line. At this time, although the gas exhausted from the process chamber differs depending on the process, it may include an unreacted precursor in a gas molecule or an aerosol state, a solid seed crystal, and the like. . These exhaust gases flow into the vacuum pump along the exhaust line. In the vacuum pump, the exhaust gases are compressed at a high temperature of 100 ° C or more. Therefore, the phase of the exhaust gases is easily generated, It is easily formed and accumulated, and it is corroded by harmful substances of corrosive gas including F, Cl and the like, which causes failure of the vacuum pump.

In a conventional method for improving the failure of a vacuum pump due to exhaust gas, a purging gas is injected into a vacuum pump for pumping the exhaust gas to generate a partial pressure of a component capable of forming a solid harmful substance in the exhaust gas To minimize the formation of harmful substances. The most commonly used purging gas is dry air (dryair) or nitrogen.

A more active method for solving the problem of accumulating solid particles in the vacuum pump due to the exhaust gas is to install a hot trap or a cold trap in the exhaust line. However, this method has limitations with high energy consumption and low processing efficiency. In order to improve these problems in general, a new approach of reconfiguring the entire exhaust system in the form of a main unit-low-pressure plasma unit-vacuum pump-scrubber by adding a low-pressure plasma unit to the front end of the vacuum pump has been obtained. Korean Patent No. 1065013 discloses a plasma reactor technology for decomposing exhaust gas by applying an AC driving voltage to discharge a conduit barrier.

Korean Patent No. 10-1065013

SUMMARY OF THE INVENTION It is an object of the present invention to provide a plasma reactor capable of providing a plasma discharge within the conduit and capable of treating a large amount of exhaust gas.

The present invention relates to a plasma reactor for decomposing harmful substances in exhaust gas discharged from one or a plurality of process chambers by one or a plurality of vacuum pumps, the plasma reactor being arranged between the process chamber and the vacuum pump, A conduit in which an inner space is formed to allow the introduced exhaust gas to flow to be discharged to the vacuum pump; An inner module disposed in the inner space and forming a space in which a plasma discharge occurs between the inner space and the inner space, the inner module extending in a direction intersecting a direction in which the exhaust gas flows in the inner space; And a first electrode unit installed in the internal module and generating a plasma discharge in a space where the plasma discharge occurs.

The plasma reactor according to the present invention has the following effects.

First, a plasma reactor having a simple structure and a large capacity can be manufactured by providing a first electrode unit having an internal module and causing a plasma discharge to be inserted into an internal module. In addition, when the first electrode portion and the second electrode portion are provided so as to be extrapolated on the outer circumferential surface of the inner module, the insulating portion may be provided to prevent the first electrode portion and the second electrode portion from being damaged and to cause stable plasma discharge.

Second, since the internal module is disposed inside the conduit with a concentric axis, the plasma discharge takes place in the same manner as the counter discharge in the entire space between the internal module and the conduit, so that more harmful substances in the exhaust gas can be decomposed So that the decomposition efficiency can be improved.

Thirdly, partition walls that are sandwiched between the inner circumferential surface of the conduit and the outer circumferential surface of the inner module may be provided to divide the space between the conduit and the inner module so that the flow rate can be distributed to each of the plurality of vacuum pumps. .

Fourth, since the conduit is formed of a conductive material, a plasma discharge can be generated between the conduit and the conduit by using only one electrode portion, so that the structure of the plasma reactor is simplified and the manufacturing cost of the plasma reactor is reduced .

1 is a block diagram showing a connection relationship between a process chamber, a plasma reactor, and a vacuum pump.
2 is a longitudinal sectional view of a plasma reactor according to an embodiment of the present invention.
3 is a cross-sectional view taken along line AA 'in Fig.
4 is a longitudinal sectional view of a plasma reactor according to another embodiment of the present invention.
5 is a cross-sectional view in the direction BB 'of FIG.
6 is a longitudinal sectional view of a plasma reactor according to another embodiment of the present invention.
7 is a longitudinal sectional view of a plasma reactor according to another embodiment of the present invention.
8 is a longitudinal sectional view of a plasma reactor according to another embodiment of the present invention.
FIG. 9 illustrates a connection relationship between a process chamber, a plasma reactor, and vacuum pumps according to another embodiment of the present invention.
FIG. 10 is a layout diagram showing the arrangement of the plasma reactor and the vacuum pumps viewed in the direction of dd 'in FIG.
11 is a longitudinal sectional view of a plasma reactor according to another embodiment of the present invention.
12 is a partial perspective view of the plasma reactor viewed in the direction of cc 'in Fig.
13 is a longitudinal sectional view showing a modified example of the plasma reactor shown in FIG.
FIG. 14 is a schematic view showing a connection relationship between the plasma reactor shown in FIG. 11 and a plurality of vacuum pumps.
15 is a longitudinal sectional view of another plasma reactor according to another embodiment of the present invention.
16 is a longitudinal sectional view showing a modified example of the plasma reactor shown in Fig.
17 to 20 are conceptual diagrams showing the connection relationship between the plasma reactor, the process chambers, and the vacuum pumps according to another embodiment of the present invention.
FIG. 21 is a sectional view showing a plasma reactor applied to FIGS. 17 to 20. FIG.
22 is a cross-sectional view showing another embodiment of the plasma reactor according to FIG.
23 is a right side view showing the right side of the plasma reactor shown in Fig.
Fig. 24 is a cross-sectional view showing another embodiment of the plasma reactor applied to Figs. 17 to 20. Fig.
25 and 26 are cross-sectional views of a plasma reactor according to another embodiment of the present invention applied to Figs. 17 to 20. Fig.

Before describing the plasma reactor 200 according to the present invention in detail, the plasma reactor 200 may include a metal precursor discharged from the process chamber 110, by-products such as a non-metal precursor, Is disposed between the process chamber 110 and the vacuum pump 130, as shown in FIG. 1, to decompose the exhaust gas containing harmful substances contained in the gas and not discharged. When the exhaust gas in the process chamber 110 is exhausted by the vacuum pump 130, the exhaust gas is decomposed by the plasma reactor 200, purified and then flows to the vacuum pump 130.

1, the plasma reactor 200 is disposed between the process chamber 110 and the vacuum pump 130. However, the plasma reactor is not limited to the vacuum pump 130, (Not shown). The plurality of plasma reactors may be installed so that the process of decomposing and purifying the exhaust gas may be repeated several times. The process chamber 110, the plasma reactor 200, and the vacuum pump 130 are interconnected by an exhaust line.

The inside of the process chamber 110 is formed into a vacuum environment, and processes such as ashing, deposition, etching, photography, cleaning, and nitrification are performed. In this embodiment, thin film formation or dry etching is performed in the process chamber 110 as an example.

(Not shown) of the vacuum pump 150 when the unreacted metallic precursor molecules are decomposed to form a metallic byproduct or unreacted nonmetal precursor molecules are decomposed to form nonmetal byproducts, Resulting in many problems. The reactive gas induces the unreacted metallic precursor molecules or the unreacted nonmetal precursor molecules to form a metal oxide or nonmetal oxide of the fine particles without forming metallic byproducts or nonmetal byproducts after decomposition. In addition, when unreacted process gas containing F atoms or Cl atoms and unreacted cleaning gas molecules are decomposed and reacted with the metal surface formed on the inner surface of the vacuum pump 150 upon entering the vacuum pump 150, / Activated F- or Cl- causing etch can be converted to an amorphous alloy form including HF, HCl, metal atom-F-O, metal atom-Cl-O or metal atom-F-Cl-O have.

Also, the plasma reactor 200 according to an embodiment of the present invention may be used in the process chamber 110 to remove metal precursors, byproducts of non-metal precursors, and process gases, So that it is prevented from entering the vacuum pump 130 and the scrubber 150 or forming a metal film.

Referring to FIGS. 2 and 3, the plasma reactor 200 includes a conduit 210, an internal module 220, a first electrode unit 230, A second electrode unit 240, a buffer (not shown), and a fixing unit 250. First, the conduit 210 is formed as a flow path through which the exhaust gas flows, and has a cylindrical shape with its interior passing through the longitudinal direction. The conduit 210 is formed of a conductive material such as SUS.

Meanwhile, according to the above description, the plasma reactor 200 is connected to the exhaust line. However, the plasma reactor 200 according to the present embodiment may be formed directly on the exhaust line. That is, while the exhaust line is formed as the conduit 210, the configurations of the plasma reactor 200 are installed or formed in the exhaust line to become the plasma reactor 200. At this time, the exhaust line is formed of a metal such as SUS and a high dielectric material such as alumina, zirconia (ZrO 2 ), yttria (Y 2 O 3 ), sapphire, quartz tube, When the plasma reactor 200 is directly formed on the exhaust line, the process equipment including the process chamber 110, the plasma reactor 200, and the vacuum pump 130 can be manufactured in a more compact structure. In the present embodiment, the plasma reactor 200 is separately fabricated.

The inner module 220 is disposed within the conduit 210. More specifically, the conduit 210 is disposed so as to be coaxial with the conduit 210 so that a space is formed between the conduit 210 and the conduit 210. The inner module 220 is formed in the shape of a cylinder having a hollow therein and is formed to have a length corresponding to the length of the conduit 210 along the longitudinal direction of the conduit 210. The inner module 220 is formed of a high dielectric material such as alumina, zirconia (ZrO 2 ), yttria (Y 2 O 3 ), sapphire, quartz tube, or glass tube.

The first electrode unit 230 is installed in the hollow of the internal module 220. More specifically, in this embodiment, as shown in FIG. 2, the inner module 220 is installed so as to be inserted into the inner circumferential surface thereof. The first electrode unit 230 is formed in a tubular shape so as to be inserted into the internal module 220. However, the first electrode portion is not limited to the tube shape as shown in FIGS. 2 and 3, but may be formed in a cylindrical shape. The first electrode unit 230 generates a plasma discharge with the second electrode unit 240, which will be described later. For this, the first electrode unit 230 functions as a driving electrode. A buffer (not shown) having a tube structure is inserted between the inner module 220 and the first electrode unit 230. The buffer part is formed of a material having electrical conductivity and has elasticity so that the inner module 220 and the first electrode part 230 can be closely contacted with each other.

The structure of the first electrode unit 230 will be described in more detail. First, a column or a tube formed of a dielectric material (not shown) is prepared, and the first electrode unit 230 and the second electrode unit 240 are extrapolated. The inner module 220 is installed on an outer circumferential surface of the first electrode unit 230 and the second electrode unit 240 in an extrapolated manner. The structure shown in FIG. 2 is obtained through such an installation process. Although not shown in FIG. 2, the internal module 220 may be filled with a dielectric material for embedding the first electrode unit 230. In this case, the initial dielectric column or the dielectric tube may have a structure in which no hollow is formed.

As described above, the second electrode unit 240 is also installed in the internal module 220. More specifically, in this embodiment, like the first electrode unit 230, the first electrode unit 230 is installed so as to be inserted into the inner circumferential surface of the inner module 220, and is spaced apart from the first electrode unit 230 at this time. The second electrode unit 240 is formed in a tubular shape so as to be installed to be inserted into the inner module 220. Also, the second electrode unit is not limited to the tube shape as described above in the first electrode unit, but may be formed in a cylindrical shape. The second electrode unit 240 generates a plasma discharge with the first electrode unit 230 as described above. Accordingly, since the first electrode unit 230 functions as a driving electrode, the second electrode unit 240 functions as a ground electrode. However, the present invention is not limited thereto. A relatively positive voltage may be applied to the first electrode unit 220, and a negative voltage may be applied to the second electrode unit 230.

The fixing means 250 is inserted into the conduit 210 to fix the internal module 220. The fixing means 250 includes a washer portion 251, a fixing portion 253, and a connecting bar 252. The washer portion 251 is inserted between the conduit 210 and the exhaust gas inlet 201 or between the conduit 210 and the exhaust gas outlet 202 so that the conduit 210 and the exhaust gas inlet 201 ). That is, the washer portion 251 is bolted to one of the conduit 210 and the exhaust gas inlet 201 or between the conduit 201 and the exhaust gas outlet 201.

 The size of the inner circumferential surface of the hollow is formed to be equal to or smaller than the size of the outer circumferential surface of the inner module 220. In this embodiment, the hollow inner peripheral surface is smaller than the outer peripheral surface of the inner module 220, and one end of the inner module 220 is brought into contact with the fixing portion 253.

The connecting bars 252 connect the washer portion 251 and the fixing portion 253. The connecting bars 252 are spaced apart from each other along the circumferential direction of the washer portion 251 and the fixing portion 253 to connect the washer portion 251 to the fixing portion 253. In this embodiment, as shown in FIG. 3, four connection bars 252 are formed. However, since this is limited to the present embodiment, the connecting bar 252 may be formed more or less in another embodiment. However, if the connection bars 252 are formed too much, it may interfere with the flow of the exhaust gas, so that the connection bars 252 may be provided in an appropriate number so as not to interfere with the induction of the exhaust gas.

In this embodiment, as shown in FIG. 2, the two fixing units 250 fix the internal module 220. Specifically, one of the fixing means 250 is installed between the conduit 210 and the exhaust gas inlet 201 to fix the upper side of the internal module 220, and the other fixing means 250 Is installed between the conduit 210 and the exhaust gas outlet 202 to fix the lower side of the internal module 220. At this time, the fixing portions 253 of the fixing means 250 are in contact with the upper and lower ends of the inner module 220, respectively. The outer circumferential surface of the inner module 220 is larger than the hollow inner circumferential surface formed in the fixing portion 253 even if the inner module 220 is only in contact with the fixing portion 253 of the fixing means 250 And the fixing means (not shown) installed between the conduit 210 and the exhaust gas inlet 201 and between the conduit 210 and the exhaust gas outlet 202 can not be detached through the hollow of the fixing portion 253. [ 250 support the upper and lower sides of the inner module 220, the inner module 220 can be fixed to the inner portion of the conduit 210.

4 and 5 illustrate the plasma reactor 200 'according to another embodiment of the present invention. The plasma reactor 200 'shown in FIGS. 4 and 5 differs from the plasma reactor 200 according to the above-described embodiment only in some configurations. Therefore, the same reference numerals are used for the same components. The description of which will be omitted.

The plasma reactor 200 'according to the present embodiment differs from the plasma reactor 200 and the fixing unit 250' according to the embodiment described above. The fixing means 250 'includes a washer 251, a fixing portion 253' and a connecting bar 252 in the same manner as the fixing means 250 according to the embodiment. However, the inner circumferential surface size of the hollow portion of the fixing portion 253 'is formed to be equal to the outer circumferential surface size of the inner module 220. Accordingly, when the fixing unit 250 'is connected to the inner module 220, the outer circumferential surface of the inner module 220 is fitted to the inner circumferential surface of the fixing unit 253', and the fixing unit 250 ' And is connected to the internal module 220. The inner module 220 and the fixing unit 250 'are fitted and engaged with each other by interference fit, so that the inner module 220 can be prevented from being separated from the fixing unit 250'.

4, when the inner module 220 is inserted into the fixing part 253 'of the fixing device 250', the inner module 220 is coupled with the fixing device 250 ' The inner module 220 may be secured within the conduit 210. [ Accordingly, when the inner module 220 is fitted to the fixing unit 250 ', the fixing unit 250' can be inserted into only one of the outer ends of the inner module 220.

6 shows the plasma reactor 200a according to another embodiment of the present invention. Since the plasma reactor 200a shown in FIG. 6 differs from the plasma reactor 200 according to the above-described embodiment only in some configurations, the same reference numerals are used for the same components, and a description thereof will be omitted .

Referring to FIG. 6, the positions of the first electrode unit 230 and the second electrode unit 240 are different from those of the plasma reactor 200a. The first electrode unit 230 and the second electrode unit 240 are installed on the inner circumferential surface of the inner module 220 while the first electrode unit 230 and the second electrode unit 240 are inserted into the inner circumferential surface of the inner module 220. In this embodiment, And the second electrode unit 240 is installed to extrapolate the outer peripheral surface of the inner module 210. Therefore, the plasma reactor 200a according to the present embodiment further includes an insulating portion 260. [ The insulator 260 is installed to extrapolate the outer circumferential surface of the inner module 220 and seals the first electrode unit 230 and the second electrode unit 240. Particles decomposed by the exhaust gas by the plasma discharge generated between the first electrode unit 230 and the second electrode unit 240 are discharged to the first electrode unit 230, Or the first electrode unit 230 and the second electrode unit 240 may be damaged while colliding with the second electrode unit 240.

When the first electrode unit 230 and the second electrode unit 240 are sealed by the insulation unit 260 as in the present embodiment, the first electrode unit 230 and the second electrode unit 240 The particles collided with the insulating portion 260 due to the plasma discharge generated between the first electrode portion 230 and the second electrode portion 240 to prevent damage to the first electrode portion 230 and the second electrode portion 240 Lt; / RTI >

7 shows the plasma reactor 200b according to another embodiment of the present invention. Since the plasma reactor 200b shown in FIG. 7 differs from the plasma reactor 200 according to the above-described embodiment only in some configurations, the same reference numerals are used for the same components, and a description thereof will be omitted .

The plasma reactor 200b according to the present embodiment further includes barrier ribs 270. The partition 270 is installed in a space between the inner circumferential surface of the conduit 210 and the outer circumferential surface of the inner module 220. More specifically, the inner module 220 is coupled between the inner circumferential surface of the conduit 210 and the outer circumferential surface of the inner module 220, and is formed to extend along the longitudinal direction of the inner module 220. Generally, the length of the inner module 220 is the same as the length of the inner module 220, but may be shorter than the length of the inner module 220.

The partition 270 may extend from the connection bar 252 of the fixing unit 250 or 250 'along the longitudinal direction of the internal module 220. That is, the barrier ribs 270 may be formed integrally with the fixing means 250 and 250 '.

The partition walls 270 serve to distribute the flow rate of the exhaust gas flowing in the conduit 210. This is for distributing the flow rate of the exhaust gas so that the exhaust gas can be guided to each of the vacuum pumps 130 when a plurality of the vacuum pumps 130 are provided. Therefore, the number of the spaced spaces divided by the barrier ribs 270 is equal to the number of the vacuum pumps 130. When the flow rate of the exhaust gas is distributed by the partition walls 270, the vacuum pumps 130 are directly connected to the conduit 210 so that the exhaust gas flows from the conduit 210 to the vacuum pump 130, . However, a trap (not shown) may be provided between the conduit 210 and the vacuum pump 130.

8 and 9, when the plurality of vacuum pumps 130 are provided, the flow rate of the exhaust gas is distributed in the plasma reactor 200b like the plasma reactor 200b of the embodiment shown in FIG. A plurality of discharge holes (not shown) connected to the vacuum pump 130 are formed in the conduit 210 as many as the number of the vacuum pumps 130 and discharged to the respective vacuum pumps 130, The flow rate of the gas may be distributed. In this case, the flow rate is not distributed while the exhaust gas flows inside the conduit 210.

Fig. 10 shows the plasma reactor 200c according to another embodiment of the present invention. Since the plasma reactor 200c shown in FIG. 8 differs from the plasma reactor 200 according to the above-described embodiment only in some configurations, the same reference numerals are used for the same components, and a description thereof will be omitted .

In the plasma reactor 200c according to the present embodiment, the third electrode unit 230c and the fourth electrode unit 240c are installed on the outer circumferential surface of the conduit 210 in an extrapolated manner. Therefore, a plasma discharge is generated between the first electrode unit 230 and the second electrode unit 240 inserted in the inner circumferential surface of the inner fistula 220, and the plasma discharge is generated between the third electrode unit 230 and the second electrode unit 240, A plasma discharge is also generated between the electrode portion 230c and the fourth electrode portion 240c. 10, the plasma discharge is generated in the flow path between the conduit 210 and the internal module 220, so that the exhaust gas decomposition efficiency can be further improved.

11 shows a plasma reactor 300 according to another embodiment of the present invention. The plasma reactor 300 includes a conduit 310, an internal module 320, and a first electrode unit 330. The conduit 310 has a different structure from the conduit of the above-described embodiments, as shown in FIG. The conduit of the above-described embodiments is formed into a cylindrical shape having a long length along the direction in which the exhaust gas flows, while the conduit 310 in this embodiment is formed in a direction crossing the direction in which the exhaust gas flows (In the vertical direction in the embodiment).

More specifically, the conduit 310 includes a body portion 312 and flange portions 311 and 313. The body portion 312 is formed in a cylindrical shape having a long length in a direction intersecting with the direction in which the exhaust gas flows, and both sides of the body portion 312 are provided with respective side surfaces 312a and 312c . The flange portions 311 and 313 are disposed in a direction parallel to the flow direction of the exhaust gas from the circumferential surface of the body portion 312 and the internal module 320 is disposed with the body portion 312 Thereby limiting the internal space. The conduit 310 is connected to the piping connecting the process chamber 110 and the vacuum pump 130 by the flange portions 311 and 313. Therefore, the exhaust gas flows through one of the flange portions 311, is decomposed in the inside of the conduit 310, and then is discharged through the other flange portion 313.

The body portion 312 and the flange portions 311 and 313 are integrally formed. The conduit 310 causes a plasma discharge with the first electrode unit 330, which will be described later. Accordingly, the conduit 310 is formed at least partially including a conductive material. In the present embodiment, the entire conduit 310 is formed of a conductive material. A dielectric layer 340 may be formed on the inner circumferential surface of the conduit 310 to prevent the conduit 310 from being damaged. This will be described in more detail later.

The first electrode portion 330 is disposed inside the conduit 310 by the inner module 320. The inner module 320 is formed in a cylindrical shape having a length corresponding to the length of the body portion 312 of the conduit 310. The inner portion of the conduit 310 is spaced apart from the inner circumferential surface of the body portion 312, Respectively. More specifically, to be coaxial with the body 312 in a virtual manner. A protrusion 312b is formed inside one side 312a of the body 312 to form a groove in which one side of the internal module 320 can be inserted. That is, one side of the inner module 320 disposed inside the body 312 is fitted in a groove (not illustrated) formed by the protrusion 312b on one side 312a of the body 312 And the other side of the inner module 320 is fixed by the other side 312c that shields the other side of the body 312. [

The other side 312c of the body 312 may be formed with a notch so that the other side of the internal module 320 can be fitted with the groove as in the one side 312a . When the protrusion (not shown) is formed on the other side surface 312c, the inner module 320 is coaxial with the central axis of the body 312. However, the protrusion is not limited to the other side surface 312c, and the protrusion may not be formed.

The inner module 320 is formed into a hollow cylindrical shape, and the first electrode unit 330 is inserted into the hollow of the inner module 320. The structure in which the first electrode unit 330 is inserted into the internal module 320 is the same as the structure in which the first electrode unit 230 in the embodiment of FIG. 2 is inserted into the internal module 220 A detailed description thereof will be omitted.

A plasma discharge is generated between the first electrode unit 330 and the conduit 310. Therefore, any one of the first electrode unit 330 and the conduit 310 functions as a driving electrode and the other functions as a ground electrode. The first electrode unit 330 and the conduit 310 are alternately applied with a positive voltage and a negative voltage to the first electrode unit 330. When the conduit 310 is grounded, A plasma discharge occurs.

When the exhaust gas leaks into the space between the conduit 310 and the inner module 320 and the exhaust gas flows into the inner module 320, the internal temperature and pressure of the internal module 320 Can rise. A temperature sensor 324 and a pressure sensor 325 are installed in the inner module 320 to monitor the degree of increase in temperature and pressure and monitor whether the inner module 320 is damaged. The temperature sensor 324 or the pressure sensor 325 is installed on the inner circumferential surface of the inner module 320. If the temperature and / or pressure of the internal module 320 rises due to the leakage, the temperature sensor 324 or the pressure sensor 325 senses such a situation, and the operation of the plasma reactor 300 . However, the present invention is not limited to this, and only one of the temperature sensor 324 and the pressure sensor 325 may be installed, or both may not be installed.

12 and 13 illustrate another embodiment of the plasma reactor shown in FIG. 11, wherein the plasma reactor 300a further includes a dielectric layer 340, and other configurations are the same as those of the plasma reactor 300, the description thereof will be omitted.

A dielectric layer 340 is further formed on the inner circumferential surface of the conduit 310. The decomposition particles of the exhaust gas decomposed by the plasma discharge generated between the first electrode unit 330 and the conduit 310 can collide with the conduit 310 and damage the conduit 310. Therefore, the dielectric layer 340 coated with the inner circumferential surface of the conduit 310 can prevent the conduit 310 from being damaged from the decomposed particles of the exhaust gas. The dielectric layer 340 is formed of a dielectric such as alumina, zirconia (ZrO 2 ), yttria (Y 2 O 3 ), sapphire, quartz tube, or glass tube.

FIG. 14 shows a structure in which a plurality of vacuum pumps 130 are connected to the plasma reactor 300a shown in FIG. As shown in FIG. 14, the plasma reactor 300a includes a first electrode unit 330 inserted into the internal module 320, so that a plasma discharge is generated in the entire interior of the conduit 310, It is possible to distribute the flow rate of the exhaust gas by connecting the vacuum pumps 130 to the plasma reactor 300a. A discharge hole (not shown) connected to the vacuum pump 130 is connected to the conduit 310 to connect the vacuum pump 130 to the plasma reactor 300a by a plurality of Respectively. Since the internal module 320 is disposed in the plasma reactor 300a in a direction crossing the direction in which the exhaust gas flows, the flow rate of the exhaust gas can be distributed by the internal module 320, The partition 270 may not be formed as in the reactor 200b.

FIG. 15 shows a plasma reactor 300 'according to a modification of the above-described embodiment with reference to FIG. Referring to FIG. 15, the plasma reactor 300 'further includes a second electrode unit 350' unlike the plasma reactor 300 shown in FIG. The second electrode unit 350 is inserted into the hollow of the internal module 320 in the same manner as the first electrode unit 330` and the first electrode unit 330` and the second electrode unit 350 ' `Are separated from each other.

A plasma discharge is generated in the conduit 310 by the first electrode unit 330 'and the second electrode unit 340'. That is, one of the first electrode unit 330 'and the second electrode unit 350' functions as a driving electrode and the other functions as a ground electrode, and the first electrode unit 330 ' A positive voltage is applied to one of the electrode units 350 'and a negative voltage is applied to the other electrode unit 350' to cause a plasma discharge.

When the conduit 310 is formed of a conductive material, if the conduit 310 is provided with the function of a ground electrode, the conduction path between the first electrode unit 330 'and the conduit 310 and between the second electrode unit 310' 350 ") and the conduit 310 may also occur. The first electrode unit 330 ', the conduit 310, the second electrode unit 350', and the second electrode unit 350 'as well as between the first electrode unit 330' and the second electrode unit 350 ' When a plasma discharge occurs between the conduits 310, plasma discharge occurs in the entire inner space of the conduit 310, so that the decomposition ability for decomposing the exhaust gas is improved.

FIG. 16 shows a modification of the plasma reactor 300 'shown in FIG. The plasma reactor 300 'a shown in FIG. 16 is a structure in which a dielectric layer is omitted in the plasma reactor 300' shown in FIG. As described above, among the molecular particles of the exhaust gas decomposed in the plasma reactor, the dielectric layer may be damaged. Therefore, a plasma reactor having a dielectric layer formed thereon and a plasma reactor having no dielectric layer can be manufactured and a plasma reactor can be selectively provided according to the type of exhaust gas to be decomposed. In addition, if the dielectric layer is not formed in the plasma reactor, the plasma reactor can be manufactured more easily and the cost can be further reduced.

17 to 20 are conceptual diagrams showing the connection relationship between the plasma reactor, the process chambers, and the vacuum pumps according to still another embodiment of the present invention to be described later. The plasma reactor according to the embodiments described below is capable of decomposing harmful substances in a large amount of exhaust gas. As shown in FIGS. 17 to 20, a plurality of process chambers are connected to the plasma reactor, A process chamber is connected. Further, a plurality of vacuum pumps may be connected to the plasma reactor, or a vacuum pump of a large capacity may be connected.

17-20 illustrate that three process chambers are provided, but three vacuum pumps are provided. 17 and 18, three process chambers are provided. As shown in FIG. 17, each of the process chambers 110 may be connected to the plasma reactor 400, 400a, 400b, 400c, and three And may be connected to the plasma reactor 400, 400a, 400b, 400c by one exhaust line (not shown) connecting the process chamber 110. [ At this time, although one vacuum pump 130 is provided, a large-capacity vacuum pump 130 is provided to maintain the degree of vacuum of the three process chambers 110.

19 shows an embodiment in which three process chambers 110 and three vacuum pumps 130 are connected to the plasma reactor 400, 400a, 400b, 400c. In FIG. 20, one process chamber 110 And three vacuum pumps 130 are connected to the plasma reactors 400, 400a, 400b and 400c. In this case, the process chamber 110 is connected to a large-capacity process chamber.

The vacuum pumps 130 are installed in the plasma reactors 400, 400a, 400b and 400c so as to allow the exhaust gas to exist for a longer time in the plasma reactors 400, 400a, 400b and 400c. May be located below the central axis of the conduit 410 and may be connected.

Figs. 21 to 26 show a plasma reactor according to another embodiment of the present invention, which is applied to Figs. 17 to 20. Referring to FIGS. 21 to 23, the plasma reactor 400 includes a conduit 410 and an internal module 420. Referring to FIG. The conduit 410 includes a first flange portion 411, a second flange portion 413, a body portion 412, a first shielding cover 415 and a second shielding cover 417. First, the first flange 411 is connected to a pipe (not shown) connected to the process chamber 110 so that the exhaust gas flows from the process chamber 110. The second flange portion 413 is spaced apart from the first flange portion 411 and is connected to the vacuum pump 130 so that the exhaust gas from which the harmful substances are decomposed is discharged to the vacuum pump 130 (Not shown). The body portion 412 is disposed between the first flange portion 411 and the second flange portion 413 and is connected to the first flange portion 411 and the second flange portion 413 so as to communicate with each other . That is, the first flange portion 411, the second flange portion 413, and the body portion 412 are integrally formed to form the conduit 410.

The body portion 412 is formed into a cylindrical shape having a long length in a direction intersecting with the direction of flow of the exhaust gas and having an internal space. Particularly, the size of the cross-sectional area of the body portion 412 is larger than the cross-sectional area of the first flange portion 411. Therefore, when the exhaust gas flows into the body portion 412 from the first flange portion 411, the exhaust gas flows while being distributed over a wider area.

The body portion 412 generates a plasma discharge with the first electrode portion 430 to be described later. Accordingly, at least a part of the body portion 412 may be formed of a conductive material, or may be entirely formed of a conductive material and grounded. In the present embodiment, the entire body portion 412 is formed of a conductive material. The body portion 412 is illustratively formed of a metal material such as SUS.

The first electrode unit 430 may be disposed inside the body part 412 and may include at least one of alumina, zirconia (ZrO 2 ), yttria (Y 2 O 3 ) Sapphire, a quartz tube, a glass tube, and the like. Particularly, when the alumina and yttria mixed powder are sintered or the alumina material is coated with yttria or the like excellent in sputtering resistance, the corrosion resistance is improved.

The internal module 420 is disposed inside the body portion 412 and spaced apart from the body portion 412 so as to form a space for the plasma discharge. In particular, the length of the internal module 420 extends in a direction intersecting with the direction in which the exhaust gas flows. The internal module 420 has a tubular structure and is formed in a cylindrical shape having a longer length corresponding to or longer than the length of the body portion 412. The internal module 420 has a central axis, Are coaxial with each other. The inner module 420 disposed inside the body part 412 is fixed to the inside of the body part 412 by the first shielding cover 415 and the second shielding cover 417, The first shielding cover 415 and the second shielding cover 417 will be described later in more detail.

The inner module 420 is cylindrical as described above, and a hollow is formed therein. The first electrode unit 430 is installed in the internal module 420 and is installed inside the first internal module 420 so as not to be exposed to the space where the plasma discharge occurs, The first electrode unit 430 is inserted into the hollow.

The first electrode unit 430 is installed on the inner module 420. More specifically, a column or a tube formed of a dielectric material is prepared. The first electrode unit 430 is disposed on the outer surface of the dielectric column or the dielectric tube. Extrinsic portion 430 is extrapolated. The internal module 420 is extrapolated on the first electrode unit 430. If the internal module 420 is extrapolated on the first electrode unit 430, the dielectric column or the dielectric tube may be left without removing or removing. Although the dielectric column or the dielectric tube is not shown in the drawing, the first electrode unit 430 may be embedded in the dielectric without removing the dielectric column or the dielectric tube.

The plasma discharge occurs between the first electrode unit 430 and the body unit 412 as described above. Accordingly, one of the first electrode unit 430 and the body unit 412 functions as a driving electrode and the other functions as a ground electrode. In general, the first electrode unit 430 functions as a driving electrode, and the body unit 412 functions as a ground electrode. For example, when a voltage of 2 kV is applied to the first electrode unit 430 and the body unit 412 becomes a ground electrode, the first electrode unit 430, And the body portion 412, as shown in FIG.

Since the plasma discharge is generated in all the regions inside the body portion 412, the exhaust gas flows from the first flange portion 411 to the body portion 412, The exhaust gas flowing while being distributed over a large area can be decomposed by the plasma discharge occurring in various regions inside the body portion 412.

Particularly, since the first electrode unit 430 generates the plasma discharge also with the first flange unit 411 formed integrally with the body part 412, the first flange unit 411, The exhaust gas can be decomposed by the plasma discharge from the moment the exhaust gas flows into the exhaust gas purifying apparatus. Since the plasma discharge is also generated in the second flange portion 413 as opposed to the first flange portion 411, the plasma is discharged to the vacuum pump through the second flange portion 413, The exhaust gas is decomposed by the plasma discharge, so that the exhaust gas treatment capability can be improved.

In the foregoing description, it is assumed that the inner module 420 is fixed by the first shielding cover 415 and the second shielding cover 417. The first shielding cover 415 and the second shielding cover 417, And are coupled to one side and the other side of the inner module 420, respectively, to be coupled to one side 412a and the other side of the body part 412, respectively. The body portion 412 is open at the other side of one side 412a so as to be shielded by the first shielding cover 415 and the second shielding cover 417. [ Particularly, the other side is formed with a flange 412b extending from the outer circumferential surface in the circumferential direction.

Referring to the first shielding cover 415, the first shielding cover 415 is formed in a circular plate shape so as to shield one side 412a of the cylindrical body portion 412. 21, the first shielding cover 415 is inserted and inserted into the inner circumferential surface of the body portion 412, so that the circumference of the first shielding cover 415 is smaller than that of the body portion 412, As shown in FIG.

On one side of the first shielding cover 415, a first insertion groove 415a corresponding to the transverse section of the internal module 420 is formed. Therefore, one side of the inner module 420 is fitted into the first insertion groove 415a. The inner module 420 may be provided with a sealing member 415b in the first insertion groove 415a before one side of the inner module 420 is inserted into the first insertion groove 415a. So that the sealing force of the inner module 420 is improved.

The first shielding cover 415 is inserted into and engaged with one side 412a of the body portion 412. However, the present invention is not limited to this, and the body portion 412 and the first shielding cover 415 may be integrally formed.

Like the first cover cover 415, the second shield cover 417 has a circular plate structure. As described above, the other open side of the body portion 412 is shielded.

The first shielding cover 415 is fitted to one side of the inner circumferential surface of the body portion 412 so as to be inserted into the inner circumferential surface of the body portion 412 while the second shielding cover 417 is fastened to the other side of the body portion 412 by the fastening member 1. [ And is tightly coupled with the flange 412b formed. The size of the cross section of the second shielding cover 417 is equal to the size of the cross section of the flange 412b formed on the other side of the body portion 412. The second shielding cover 417 is formed with a plurality of fastening holes so that the fastening member 1 can be inserted and fastened therethrough and the fastening holes are formed in the second shielding cover 417 And are spaced apart from each other along the circumferential direction. In addition, through-holes (not shown) corresponding to the fastening holes are formed in the flange 412b of the body portion 412.

A second insertion groove 417a corresponding to the transverse section of the inner module 420 is formed on one side of the second shielding cover 417 and the other side of the inner module 420 is inserted into the second insertion groove 417a, respectively. The second insertion groove 417a is also provided with a sealing member 417b so that the other side of the inner module 420 is inserted into the second insertion groove 417a with the sealing member 417b. So that the sealing force of the inner module 420 is improved.

In addition to the second insertion groove 417a, a fourth insertion groove 417c is formed on one surface of the second shielding cover 417. [ The diameter of the fourth insertion groove 417c is larger than the diameter of the second insertion groove 417a and the second shielding cover 417 is engaged with the flange 412b of the body portion 412 The fourth insertion groove 417c is formed to face the flange 412b. The sealing member 417b is also provided in the fourth insertion groove 417c so that when the second shielding cover 417 is engaged by the flange 412b and the fastening member 1, The sealing member 417b provided in the insertion groove 417c is in close contact with the flange 412b to improve the sealing force of the body portion 412. [

The fastening member 1 for fastening the second shielding cover 417 to the body portion 412 is formed of a bolt and a nut as an example. And the nut is fastened to the bolt fastened through the through hole (not shown) and the fastening hole (not marked).

On the other hand, Fig. 22 shows another embodiment of the plasma reactor shown in Fig. The body portion 412 'of the plasma reactor 400' shown in FIG. 22 is formed by opening one side, and a flange 412 'a is formed similarly to the other side. The first shielding cover 415 'is formed in the same shape as the second shielding cover 417. That is, in the plasma reactor 400 shown in FIG. 21, the second shielding cover 417 is coupled to the other side of the body part 412, and a side of the body part 412 ' The first shielding cover 415 'is also coupled in the same structure. That is, the first shielding cover 415 'also has a third insertion groove (not shown) corresponding to the fourth insertion groove 417c, and the sealing member is provided in the third insertion groove, 412 'and the first shielding cover 415'.

23, the power connection line 3 connected to the first electrode unit 430 to apply a voltage to the first electrode unit 430 to be inserted into the internal module 420, And is connected to the first electrode unit 430 inserted through the first shielding cover 415 and inserted into the internal module 420. The power supply connection line 3 is surrounded by an insulating portion 415c as shown in FIG. 23 and penetrates through the first shielding cover 415.

The first shielding cover 415 is formed of a conductive material in the same manner as the body portion 412 and may generate a plasma discharge with the first electrode unit 430 so that a short circuit occurs in the power connection line 3 The power supply connection line 3 is surrounded by the insulator 415c and penetrates the first shielding cover 415. [ Although the first cover 415 is illustrated as an example in FIG. 23, the second cover cover 417 is not limited to the first cover cover 415, A power supply connection line 3 for applying a voltage can be penetrated.

In the above description, the one side 412a and the other side of the body portion 412 are penetrated, but the present invention is not limited thereto, and only one side of the one side 412a and the other side may be opened . Accordingly, the inner module 420 may be fixed to the inside of the body 412 by being coupled to only one of the first and second cover covers 415 and 417.

One end of the inner module 420 is inserted into the first insertion groove 415 of the first shielding cover 415, 415a of the body part 412 and is inserted from the one side 412a of the body part 412 toward the other side of the body part 412. [ At this time, the other side of the inner module 412 protrudes through the other opened side of the body part 412. The second shielding cover 417 shields the other side of the body part 412. The other side of the internal module 420 is inserted into the second insertion groove 417a formed in the second shielding cover 417 And the fastening member 1 passes through the through hole of the body portion 412 and the fastening hole formed in the flange 412b of the second shielding cover 417 at the same time, And the second shielding cover 417 is engaged with the body portion 412.

The first shield cover 415 may be first coupled to one side 412a of the body portion 412 or the body portion 412 and the first cover cover 415 may be integrally formed The inner module 420 is inserted into the body portion 412 through the other side of the body portion 412 and the first cover cover 415 is attached to one side of the inner module 420, And is inserted into the first insertion groove 415a. The other side of the inner module 420 is fitted into the second insertion groove 417a of the second shielding cover 417 and the coupling member 1 is inserted into the second shielding cover 417 through the flange 412b at the same time.

When the internal module 420 is assembled to the body 412, the exhaust gas is prevented from flowing into the internal module 420 by the sealing members 415b and 417b. However, The exhaust gas may be leaked to the inside of the internal module 420 due to the use of the reactor 400 for a long time. When the exhaust gas flows into the interior of the internal module 420, the internal temperature and the internal pressure of the internal module 420 are increased to cause the internal module 420 to be damaged. In order to prevent this, a temperature sensor 424 and a pressure sensor 425 are installed in the internal module 420.

If the temperature and pressure inside the internal module 420 rise due to the leakage, the temperature sensor 424 and the pressure sensor 425 sense the alarm and sound an alarm, Stop operation. However, since the temperature sensor 424 and the pressure sensor 425 are not all installed, only one of the temperature sensor 424 and the pressure sensor 425 may be installed or not installed .

FIG. 24 shows a plasma reactor according to another embodiment of the present invention, and the same reference numerals as those in FIG. 21 are used for the same components, and a detailed description thereof will be omitted. In this embodiment, the first electrode unit 430 and the second electrode unit 440 are included in the body part 412 to generate the plasma discharge. The first electrode unit 430 is the same as the embodiment shown in FIG. 21, but is shorter than the embodiment shown in FIG.

Like the first electrode unit 430, the second electrode unit 440 is inserted into the internal module 420 and is spaced apart from the first electrode unit 430. In this embodiment, the plasma discharge is generated in the body 412 by the first electrode unit 430 and the second electrode unit 440. The first electrode unit 430 and the second electrode unit 440 are both driving electrodes. For example, a positive voltage (+2 kV) is applied to the first electrode unit 430, And a negative voltage (-2 kv) is applied to the second electrode unit 440. Accordingly, the plasma discharge occurs between the first electrode unit 430 and the second electrode unit 440 due to a voltage difference between the first electrode unit 430 and the second electrode unit 440. (See the dotted line in FIG. 24). Meanwhile, the voltages applied to the first electrode unit 430 and the second electrode unit 440 may be reversed.

Since the body portion 412 is in the same state as the ground electrode, the plasma discharge also occurs between the first electrode portion 430 and the body portion 412, and the second electrode portion 440, The plasma discharge is generated between the electrodes 412. The intensity of the plasma discharge between the body 412 and the first electrode 430 and the intensity of the plasma discharge between the body 412 and the second electrode 440 Is weaker than the intensity of the plasma discharge occurring between the first electrode unit 430 and the second electrode unit 440. That is, the density of the plasma discharge occurring in the central region of the body portion 412 is high, and the energy is greatest.

As described above, when the exhaust gas flows into the body portion 412 through the first connection portion 411, the exhaust gas spreads while being distributed over a wide area, but is discharged into the central region of the body portion 412 The flow rate of the exhaust gas flowing is larger than the flow rate of the exhaust gas flowing into the edge region of the body portion 412. Accordingly, when the plasma discharge having the greatest intensity occurs between the first electrode unit 430 and the second electrode unit 440, a large amount of plasma that flows into the central region of the body unit 412 It is possible to further decompose the exhaust gas at a flow rate, so that the decomposition efficiency of the plasma reactor 400a can be improved.

25 and 26 show an embodiment in which the plasma reactor shown in Fig. 24 is operated in a manner different from that of Fig. The plasma reactors 400b and 400c shown in FIGS. 25 and 26 have the same configuration as the plasma reactor 400a shown in FIG. 25 is a driving electrode to which a positive voltage (+4 kV) is applied to the first electrode unit 430 of the plasma reactor 400b shown in FIG. 25, and the second electrode unit 440 is a ground electrode Electrode (0 kV). The plasma reactor 400c shown in Fig. 26 is configured as opposed to the plasma reactor 400c shown in Fig.

The plasma reactor 400b shown in FIG. 25 is formed between the first electrode unit 430, which is a driving electrode, and the second electrode unit 440, which is a ground electrode, in the form of a dotted line shown in FIG. This happens. Since the body portion 412 is in the same state as the ground electrode 0kV like the second electrode portion 440, the plasma discharge is generated between the first electrode portion 430 and the body portion 412, It happens. However, since the second electrode unit 440 and the body unit 412 are both ground electrodes, the plasma discharge does not occur between the second electrode unit 440 and the body unit 412. Accordingly, in the plasma reactor 400b as in the embodiment shown in FIG. 25, the plasma discharge occurs in the central region and the left edge region of the body portion 412, and the plasma discharge occurs in the central region and the left edge region of the body portion 412, A large amount of harmful substances in the exhaust gas are decomposed.

25, the first electrode unit 430 is a ground electrode, and the second electrode unit 440 is a ground electrode. Therefore, the plasma reactor 400c shown in FIG. 26 is configured in reverse to the plasma reactor 400b shown in FIG. Is operated as a driving electrode. Accordingly, not only the plasma discharge occurs between the first electrode unit 430 and the second electrode unit 440 but also the plasma discharge occurs between the second electrode unit 440 and the body unit 412 A large amount of harmful substances in the exhaust gas are decomposed in the central region and the right edge region of the body portion 412.

Since the plasma reactor 400b or 400c shown in FIGS. 25 and 26 employs either the first electrode unit 430 or the second electrode unit 440 as a driving electrode, The first electrode unit 430 and the second electrode unit 440 are alternately applied with a voltage according to the degree of damage inside the plasma reactor 412 to extend the life of the plasma reactors 400b and 400c have.

While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims. Accordingly, the true scope of the present invention should be determined by the technical idea of the appended claims.

110: process chamber 120: exhaust line
130: Vacuum pump
200, 200`, 200a, 200b: plasma reactor
201: Exhaust gas inlet
202; Exhaust gas outlet
210: conduit 220: internal module
230: first electrode part 240: second electrode part
250, 250`: fixing means 260: insulating part
270:
300, 300 ': plasma reactor 310: conduit
320: internal module 330, 330 ': first electrode part
340: dielectric layer 350 ': second electrode part
400, 400a, 400b, 400c: plasma reactor
410: conduit 411: first flange portion
412: Body part 413: Second flange part
415: first shielding cover 415a; The first insertion groove
415b: sealing member
417: second shielding cover 417a: second insertion groove
417b: sealing member 417c: third insertion groove
420: internal module 430: first electrode portion
440: second electrode portion

Claims (27)

1. A plasma reactor for decomposing harmful substances in an exhaust gas discharged from one or a plurality of process chambers by one or a plurality of vacuum pumps,
A conduit disposed between the process chamber and the vacuum pump, the conduit having an internal space formed therein to allow the exhaust gas flowing from the process chamber to flow through the vacuum pump;
An inner module disposed in the inner space and forming a space in which a plasma discharge occurs between the inner space and the inner space, the inner module extending in a direction intersecting a direction in which the exhaust gas flows in the inner space; And
And a first electrode unit installed in the internal module and generating a plasma discharge in a space where the plasma discharge occurs,
The conduit,
A body portion having a long side extending in a direction intersecting with a direction in which the exhaust gas flows and having one side opened;
And a first shielding cover coupled to the body portion to shield an opened side of the body portion, the first shielding cover supporting the internal module in the internal space. 1. A plasma reactor for decomposing harmful substances in an exhaust gas discharged from one or a plurality of process chambers by one or a plurality of vacuum pumps,
A conduit disposed between the process chamber and the vacuum pump, the conduit having an internal space formed therein to allow the exhaust gas flowing from the process chamber to flow through the vacuum pump;
An inner module disposed in the inner space and forming a space in which a plasma discharge occurs between the inner space and the inner space, the inner module extending in a direction intersecting a direction in which the exhaust gas flows in the inner space; And
And a first electrode unit installed in the internal module and generating a plasma discharge in a space where the plasma discharge occurs,
The conduit,
A body portion which forms the internal space and which is elongated in a direction intersecting with a direction in which the exhaust gas flows, and the other end of which opens to allow the internal module to be inserted into the internal space; And
And a second shield cover coupled with a flange extending along the circumferential direction from the other side of the body portion to shield the other open side. The method according to claim 1 or 2,
Wherein the first electrode unit is installed inside the inner module so as not to be exposed to the space where the plasma discharge occurs. The method of claim 3,
The inner module has a hollow tube structure,
Wherein the first electrode portion is installed to be inserted into the inner module. The method according to claim 1 or 2,
Wherein the conduit and the inner module are formed in a cylindrical shape,
Wherein the inner module is disposed to have a concentric axis with the conduit. The method of claim 5,
Wherein the first electrode portion is formed in a tubular shape or a circular column shape having a circular cross section. The method according to claim 1 or 2,
Wherein the inner module is formed of a dielectric material to protect the first electrode portion. The method of claim 7,
Wherein the inner portion of the inner module covers the first electrode portion with a dielectric to protect the first electrode portion. The method according to claim 1 or 2,
Wherein the plasma reactor comprises:
And a second electrode part spaced apart from the first electrode part and generating the plasma discharge with the first electrode part. The method of claim 9,
Wherein the first electrode unit and the second electrode unit are installed inside the inner module so as not to be exposed to the space where the plasma discharge occurs. The method of claim 10,
The inner module has a hollow tube structure,
Wherein the first electrode portion and the second electrode portion are installed to be inserted into the inner module. The method of claim 9,
Wherein the conduit and the inner module are formed in a cylindrical shape,
Wherein the inner module is disposed to have a concentric axis with the conduit. The method of claim 12,
Wherein the first electrode portion and the second electrode portion are formed in a tubular shape or a circular column shape having a circular cross section. The method of claim 9,
Wherein the inner module is formed of a dielectric material to protect the first electrode portion and the second electrode portion. 15. The method of claim 14,
Wherein the inner part of the inner module covers the first electrode part and the second electrode part with a dielectric to protect the first electrode part and the second electrode part. The method according to claim 1,
Wherein the first shielding cover and the body portion are integrally formed. The method according to claim 1,
Wherein the inner module is coupled to one side of the first shielding cover and is secured within the conduit. 18. The method of claim 17,
The first shielding cover has a plate structure so as to be coupled with a flange extending in a circumferential direction from a side of the body portion. And a first inserting groove is formed on one surface of the first shield cover so that one side of the inner module is inserted and coupled. 19. The method of claim 18,
The conduit,
Further comprising a sealing member disposed in the first insertion groove and sealing the flange and the first shield cover between the inner module and the first shield cover,
Wherein the first shielding cover further has a third insertion groove facing the flange and fitted with the sealing member. delete The method of claim 2,
Wherein the inner module is coupled to the second shielding cover on the other side and fixed inside the conduit. 23. The method of claim 21,
Wherein the second shielding cover has a plate structure and a second insertion groove is formed on one surface of the second shielding cover so that the other side of the inner module is inserted and coupled. 23. The method of claim 22,
The conduit,
Further comprising a sealing member disposed in the second insertion groove and sealing the flange and the second shielding cover between the inner module and the second shielding cover,
Wherein the second shielding cover further has a fourth insertion groove facing the flange and fitted with the sealing member. The method according to claim 1,
The conduit,
A first flange connecting the pipe connected to the process chamber and the body so that the exhaust gas flows into the internal space of the body from the process chamber; And
Further comprising a second flange portion that connects the pipe connected to the vacuum pump and the body portion so that the exhaust gas, in which the harmful substance is decomposed in the internal space, is discharged to the vacuum pump,
Sectional area of the body portion is larger than a size of the flow cross-sectional area of the first flange. 27. The method of claim 24,
Wherein the first flange portion, the body portion, and the second flange portion are integrally formed. The method according to claim 1 or 2,
Wherein the conduit is partly or entirely formed of a conductive material, and a portion formed of the conductive material is grounded. The method according to claim 1 or 2 ,
Wherein the plasma reactor comprises:
A temperature sensor installed in the internal module and detecting a change in internal temperature of the internal module when the exhaust gas flows into the internal module due to leakage; And
Further comprising a pressure sensor installed in the internal module and sensing a change in internal pressure of the internal module when the exhaust gas flows into the internal module due to leakage.
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