KR101731498B1 - Apparatus and method for inspecting display surface - Google Patents

Apparatus and method for inspecting display surface Download PDF

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Publication number
KR101731498B1
KR101731498B1 KR1020150127024A KR20150127024A KR101731498B1 KR 101731498 B1 KR101731498 B1 KR 101731498B1 KR 1020150127024 A KR1020150127024 A KR 1020150127024A KR 20150127024 A KR20150127024 A KR 20150127024A KR 101731498 B1 KR101731498 B1 KR 101731498B1
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South Korea
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microscope
unit
light
control unit
inspected
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KR1020150127024A
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Korean (ko)
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KR20170029884A (en
Inventor
전영민
박준
김재헌
서민아
김철기
이택진
우덕하
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한국과학기술연구원
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/04—Measuring microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G02B21/08—Condensers
    • G02B21/14—Condensers affording illumination for phase-contrast observation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/068—Optics, miscellaneous

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Microscoopes, Condenser (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The surface inspection apparatus according to the present invention comprises a microscope unit for performing a differential interference microscope examination or an optical microscope examination on an object to be inspected, a microscope unit for comparing and analyzing differential microscope examination results and optical microscopic examination results provided by the microscope unit, A microscope unit, and a prism. The control unit includes a control unit for identifying a kind of impurity, and a moving unit for moving the prism and the polarizer of the microscope unit. When the impurity is detected as a result of the differential interference microscopic examination of the microscope unit, To move away from the optical path so that the microscope unit performs an optical microscopy examination.

Description

[0001] APPARATUS AND METHOD FOR INSPECTING DISPLAY SURFACE [0002]

The present invention relates to an apparatus and a method for inspecting a display surface, and more particularly, to an apparatus and a method for inspecting transparent impurities in and on an OLED using a differential interference microscope image and a general optical microscope image.

Since the basic unit price of a display panel such as an OLED panel is high, if the quantity of the OLED panel discarded through the impurity removing process according to the kind is reduced, the production cost can be saved. Typical impurities generated in the OLED panel fabrication process are dust and moisture (including voids due to moisture). Different processes are required to remove these impurities. Therefore, what should be preceded in the OLED impurity removal process is to confirm whether the impurities are dust or water (including voids due to moisture).

Korean Patent Laid-Open Publication No. 2009-0107314 relates to a surface inspection apparatus and a surface inspection method, wherein a surface inspection apparatus is provided with an inspection base on which an inspected object is placed, A measurement unit provided with a stage unit capable of rotating, an alignment camera for aligning the position of the inspected object placed on the inspection base, and a camera for inspection for checking the presence or absence of foreign matter on the surface of the inspected object; And a control unit for controlling the movement of the stage unit based on the image taken by the alignment camera so that the inspected object is aligned with the inspection position and the presence or absence of foreign matter on the surface of the inspected object based on the image taken by the inspection camera The foreign object on the surface of the object to be inspected can be accurately inspected.

On the other hand, an optical microscope is most commonly used as an apparatus for inspecting the surface of an OLED panel, in addition to the general inspection apparatus. This makes it possible to distinguish objects of small size by enlarging the surface of the OLED panel and utilizing light reflected or absorbed from the surface.

However, when the impurity is a transparent substance such as water or a cell, it is difficult to observe with a general microscope since light is almost transmitted. Particularly, moisture generated in the process of manufacturing an OLED panel has a disadvantage that it is difficult to observe with a general optical microscope because the moisture passes through the light well or the void due to moisture generated in the process of manufacturing an OLED panel has no part to reflect light have.

Korea Patent Publication No. 2009-0107314

It is an object of the present invention to provide an apparatus and a method for inspecting transparent impurities on the surface and inside of an OLED by simultaneously using a differential interference microscope image and a general optical microscope image.

According to an aspect of the present invention, there is provided a surface inspection apparatus comprising: a microscope unit for performing a differential interference microscope inspection or an optical microscope inspection on an object to be inspected; A control unit for comparing the results of the differential microscope examination and the microscopic examination results provided by the microscope unit to identify the type of impurities to be inspected; Wherein the control unit moves the polarizer and the prism of the microscope unit away from the optical path when the impurity is detected as a result of the differential interference microscopic examination of the microscope unit, Allow the unit to perform an optical microscopy test.

Preferably, the microscope unit comprises a light source, a polarizer for polarizing the unpolarized light from the light source in a specific direction, a light source for reflecting light exiting the polarizer toward the subject, or for directing light from the subject to the analyzer A beam splitter, a prism that divides the light from the beam splitter into components of vertical polarization and horizontal polarization, or recombines light from the object to be inspected, a lens that condenses the light that has passed through the prism and irradiates the light onto the object to be inspected, An analyzer for passing only the light required for analysis among light emitted from the splitter, and a detector for detecting light from the analyzer and transmitting the result of the inspection to the control unit.

Preferably, the control unit includes a display unit for displaying a result of inspection of the microscope unit to a user, an operation unit for receiving operation of a user, a control unit for comparing and analyzing results of differential microscope examination and optical microscopic examination results provided by the microscope unit, And an analyzing unit for analyzing the polarizer and the prism by controlling the moving unit when impurities are detected as a result of the inspection, And controls the microscope unit to acquire an optical microscopic inspection result for the same point to be inspected.

Preferably, the moving unit moves the polarizer and the prism to move away from the optical path, or return to the original position, under the control of the control unit.

According to another aspect of the present invention, there is provided a surface inspection method performed by a surface inspection apparatus including a microscope unit, a control unit, and a mobile unit, wherein the control unit controls the microscope unit Obtaining a differential interference microscopic examination result for an object to be inspected; Moving the polarizer and the prism of the microscope unit off the optical path using the mobile unit when impurities are identified in the inspection target; The control unit acquiring an optical microscopic examination result for the same spot to be inspected using the microscope unit; And the control unit compares and analyzes the differential microscope-based inspection result with the optical microscope-based inspection result to confirm the kind of the impurity.

Preferably, the microscope unit includes a light source, a polarizer, a beam splitter, a prism, a lens, an analyzer, and a detector, wherein acquiring the result of differential interference microscopy on the object to be inspected using the microscope unit comprises: Entering the prism through the polarizer and the beam splitter; Wherein the light incident on the prism is vertically and horizontally polarized and is incident on the object to be inspected through the lens; The light scattered in the inspection object is recombined with the vertically and horizontally polarized light in the prism through the lens; Passing only the light required for analysis in the analyzer through the beam splitter; And detecting the light from the analyzer by the detector and transmitting the inspection result to the control unit.

Preferably, the control unit uses the light source, the beam splitter, the lens, the analyzer, and the detector to obtain the results of the optical microscopic examination for the same spot to be inspected using the microscope unit.

Preferably, the analysis unit of the control unit compares the result of the differential interference microscopy-based inspection with the result of the optical microscope-based inspection to determine whether the kind of the impurity is due to moisture or dust.

According to the present invention, by examining the transparent impurities on the inside and the surface of the OLED by using the differential interference microscope image and the general optical microscope image simultaneously, the moisture (including voids due to moisture), which is mainly generated in the OLED, The same transparent impurities can be effectively distinguished through differential interference microscopy-based impurity detection methods.

In addition, it is an opportunity to develop a treatment method according to the kind of impurities by separating impurities which are not transmitted through light and transparent impurities.

In addition, the impurity inspection method based on the differential interference microscope is advantageous in that it can be inspected without damaging the sample in the intermediate stage of the deposition of the OLED using a nondestructive method using light interference. Therefore, When the impurity removal efficiency is maximized by using the inspection apparatus, the panel to be discarded by the impurities is minimized, and the production cost can be reduced.

1 is a schematic view for explaining a surface inspection apparatus according to a preferred embodiment of the present invention,
2 is a flow chart for explaining a surface inspection method according to a preferred embodiment of the present invention,
3 and 4 are illustrative photographs for explaining test results according to the surface inspection apparatus and method according to the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, it should be understood that the following embodiments are provided so that those skilled in the art will be able to fully understand the present invention, and that various modifications may be made without departing from the scope of the present invention. It is not.

1 is a schematic view for explaining a surface inspection apparatus according to a preferred embodiment of the present invention.

1, the surface inspection apparatus 100 includes a microscope unit 110, a control unit 120, and a mobile unit 130. Specifically, the microscope unit 110 includes a light source 111, a polarizer 112, a beam splitter 113, a prism 114, a lens 115, an analyzer 116 and a detector 117, 115 are arranged below the display panel 140 to be inspected. The display panel 140 may be placed in an inspection stage (not shown), and the inspection stage may have a structure capable of horizontally moving in the X-axis and Y-axis directions by separate driving means for inspection of the display panel.

The microscope unit 110 may be implemented with a differential interferometry microscope, wherein DIC (Differential Interference Contrast Microscope) is obtained by passing the vertically and horizontally polarized light separated using a prism (Wollaston prism) And distinguishes an image by using a phase difference due to the refractive index of the sample. Specifically, light emitted from the light source 111 enters the prism 114 through the polarizer 112 and the beam splitter 113, and the incident light is vertically and horizontally polarized in the prism 114 to be incident on the lens 115 And is incident on the sample 140 to be inspected. The scattered light from the sample 140 is then recombined through the lens 115 and the prism 114 and only the light necessary for the analysis is passed from the beam splitter 113 to the analyzer 116 to obtain a phase difference image. In the present invention, the microscope unit 110 may be used as a general optical microscope by moving the polarizer 112 and the prism 114.

Referring to Fig. 1, the operation of the microscope unit 110 with a differential interference microscope will be described in detail.

The light source 111 is used as a light source of the surface inspection apparatus according to the present invention by passing only a specific wavelength using white light or a filter. If the microscope unit is based on a reflective differential interference microscope, it is generally preferable to use white light.

Polarizer 112 polarizes the light in a specific direction with respect to non-polarized light emerging from light source 111. As the polarizer, for example, a polarizing filter can be used.

The beam splitter 113 reflects the light emitted through the polarizer 112 to be incident on the object to be inspected, and the light emitted from the object to be inspected is directed to the analyzer 116.

The prism 114 functions to divide the light emitted from the beam splitter 113 into two components, i.e., vertically polarized light and horizontally polarized light.

The lens 115 is an objective lens directed toward the object to be inspected, and condenses light passing through the prism 114 and irradiates the sample. Thereafter, the prism 114 collects the light having the optical information coming and going from the sample, and sends the collected light to the prism 114.

Again, the prism 114 recombines the vertically polarized light and the horizontally polarized light, which is sent to the analyzer 116 via the beam splitter 113. The analyzer 116 passes only the light necessary for the analysis, and the detector 117 can detect this light to obtain a phase difference image.

The microscope unit 110 shown in FIG. 1 can operate with a general optical microscope by moving the polarizer 112 and the prism 114 through an optical path. Since the operation principle of the optical microscope is well known, a detailed description thereof will be omitted.

1, the control unit 120 may include a display unit 121, an operation unit 122, an analysis unit 123, and a control unit 124.

The display unit 121 displays a result of inspection by the microscope unit 110 to a user, and corresponds to a monitor or the like of a computer. The operation unit 122 receives an operation of a user who wants to control the microscope unit 110.

The analyzer 123 analyzes the microscope image image transmitted from the detector 117. Specifically, the analyzer 123 compares the optical microscope-based inspection result with the differential interference microscopy-based inspection result of the microscope unit, and confirms the kind of the impurity.

The control unit 124 serves to control the entire surface inspection apparatus 100. Particularly, the control unit 124 allows the microscope unit 110 to acquire differential interference microscope-based inspection results for the inspection object, and when the impurities are detected as a result of the inspection, the control unit 124 controls the microscope unit 110, Of the polarizer 112 and the prism 114 on the optical path. In addition, the control unit 124 uses the microscope unit 110 to acquire an optical microscopic examination result for the same point to be inspected.

The mobile unit 130 is controlled by the control unit 124 to move the polarizer 112 and the prism 114 of the microscope unit 110 off the optical path or to return to the original position.

Hereinafter, a surface inspection method according to a preferred embodiment of the present invention will be described with reference to FIGS. 2 to 4. FIG. 2 is a flow chart for explaining a surface inspection method according to a preferred embodiment of the present invention.

When the display panel is inspected using the differential interference microscope-based microscope unit 110, it is possible to measure moisture and vacancy that can not be distinguished by a general optical microscope. However, since such differential interference microscope-based microscope units can not accurately identify the impurity information, accurate information on the types of impurities can be obtained only by comparing and analyzing the optical microscope image and the differential interference microscope image. Accordingly, in the surface inspection method according to the present invention, a differential interference microscope image and an optical microscope image are compared and analyzed using a single surface inspection apparatus 100.

2, a surface inspection method according to a preferred embodiment of the present invention will be described. First, the control unit 120 acquires differential interference microscopy-based inspection results for an object to be inspected using the microscope unit 110 (S200). The microscope unit 110 is inspected using the light source 111, the polarizer 112, the beam splitter 113, the prism 114, the lens 115, the analyzer 116 and the detector 117, Perform a differential interference microscopy-based test on the subject.

If an impurity is detected as a result of the interference microscopy-based inspection, the control unit 120 moves the polarizer 112 and the prism 114 of the microscope unit 110 off the optical path (S201). That is, the control unit 124 of the control unit 120 uses the mobile unit 130 to move the polarizer 112 and the prism 114 of the microscope unit 110 from the optical path. The microscope unit then becomes a general optical microscope configuration.

Subsequently, the control unit 120 obtains an optical microscopic inspection result for the same point of the display panel to be inspected using the microscope unit 110 (S220). Since the microscope unit 110 is composed of the light source 111, the beam splitter 113, the lens 115, the analyzer 116 and the detector 117, the optical microscope image is acquired by the detector, Lt; / RTI >

Then, the control unit 120 compares and analyzes the differential microscope-based inspection result and the optical microscopic-based inspection result for the same spot of the display panel that have been obtained (S230). That is, the analysis unit 123 of the control unit 120 can compare the results of two different types of microscopic examination to determine whether the kind of impurities is due to moisture or dust.

3 and 4 are illustrative photographs for explaining test results according to the surface inspection apparatus and method according to the present invention.

Referring to FIG. 3, the surface of the OLED substrate was melted using a chemical method to produce transparent voids, and the surface inspection was performed using the surface inspection apparatus according to the present invention. The left side of FIG. 3 is an optical microscope image, and the right side of FIG. 3 is a differential interference microscope image. As can be seen in the red portion of FIG. 3, pores or curvatures that could not be seen in the optical microscope image on the left can be seen in differential interference microscopy.

Referring to FIG. 4, a transparent substrate is placed on an OLED panel using a chemical method on the OLED substrate, and then the impurities are compared using the surface inspection apparatus according to the present invention. The left side of FIG. 4 is an optical microscope image, and the right side of FIG. 4 is a differential interference microscope image. As can be seen in the red portion of FIG. 4, impurities that were not seen in the optical microscope image can be seen in the differential interference microscope image.

100: Surface inspection apparatus
110: Microscope unit
111: Light source
112: Polarizer
113: beam splitter
114: prism
115: lens
116: Analyzer
117: Detector
120: control unit
121:
122:
123: Analysis Department
124:
130: mobile unit
140: Samples

Claims (8)

A microscope unit for conducting a differential interference microscope examination or an optical microscope examination on an object to be inspected;
A control unit for comparing the results of the differential microscope examination and the microscopic examination results provided by the microscope unit to identify the type of impurities to be inspected;
And a moving unit for moving the polarizer and the prism of the microscope unit,
Wherein the control unit moves the polarizer and the prism of the microscope unit away from the optical path when an impurity is detected as a result of a differential interference microscopic examination of the microscope unit, thereby allowing the microscope unit to perform an optical microscope inspection,
Wherein the control unit comprises:
A display unit for displaying the inspection result of the microscope unit to the user, an operation unit for receiving the operation of the user, and an analysis unit for comparing the results of differential microscope examination and optical microscopic examination results provided by the microscope unit, And a controller for controlling the moving unit to move the polarizer and the prism on the optical path when the impurity is detected as a result of the examination, And a control unit for controlling the microscope unit to obtain an optical microscopic inspection result for the same point to be inspected. By using the differential interference microscope image and the general optical microscope image, transparent impurities on the inside and the surface of the OLED are inspected Surface Four devices. The microscope according to claim 1,
A polarizer for polarizing the unpolarized light from the light source in a specific direction, a beam splitter for reflecting the light emitted through the polarizer toward the object to be inspected, or for directing the light from the object to be analyzed toward the analyzer, A prism for dividing the light into components of vertical polarization and horizontally polarized light or recombining the light from the object to be inspected, a lens for condensing the light passing through the prism and irradiating the light to the object to be inspected, An analyzer for passing only light, and a detector for detecting light from the analyzer and transmitting the inspection result to the control unit. delete 2. The surface inspection apparatus according to claim 1, wherein the moving unit moves the polarizer and the prism to move away from the optical path or to return to the original position under the control of the control unit. A surface inspection method performed in a surface inspection apparatus including a microscope unit, a control unit, and a mobile unit,
The control unit acquiring a differential interference microscopic examination result on an object to be inspected using the microscope unit;
Moving the polarizer and the prism of the microscope unit off the optical path using the mobile unit when impurities are identified in the inspection target;
The control unit acquiring an optical microscopic examination result for the same spot to be inspected using the microscope unit;
The control unit compares and analyzes the differential microscope-based inspection result with the optical microscope-based inspection result to check the kind of the impurity. The control unit compares and analyzes the differential interference microscope image and the general optical microscope image to check the transparent impurities in the OLED ≪ / RTI > 6. The method of claim 5,
The microscope unit includes a light source, a polarizer, a beam splitter, a prism, a lens, an analyzer, and a detector, and acquiring the result of differential interference microscopy on the object to be inspected using the microscope unit,
The light emitted from the light source entering the prism through the polarizer and the beam splitter;
Wherein the light incident on the prism is vertically and horizontally polarized and is incident on the object to be inspected through the lens;
The light scattered in the inspection object is recombined with the vertically and horizontally polarized light in the prism through the lens;
Passing only the light required for analysis in the analyzer through the beam splitter;
And detecting the light from the analyzer by the detector and transmitting the inspection result to the control unit. 6. The method of claim 5,
Wherein the control unit uses the microscope unit to acquire an optical microscopic examination result for the same point to be inspected, using a light source, a beam splitter, a lens, an analyzer and a detector. 6. The method of claim 5,
Wherein the analysis unit of the control unit compares the result of the differential interference microscopy-based inspection with the result of the optical microscope-based inspection to determine whether the kind of the impurity is due to moisture or dust.
KR1020150127024A 2015-09-08 2015-09-08 Apparatus and method for inspecting display surface KR101731498B1 (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007121499A (en) 2005-10-26 2007-05-17 Nikon Corp Differential interference observation method and microscope
JP2009163069A (en) 2008-01-08 2009-07-23 Olympus Corp Microscope
US20130070075A1 (en) * 2011-09-21 2013-03-21 Olympus Corporation Magnifying observation apparatus, and image display method and microscopy switching method thereof

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101015807B1 (en) 2008-04-08 2011-02-22 한국영상기술(주) Apparatus for inspecting surface and method for inspecting surface

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007121499A (en) 2005-10-26 2007-05-17 Nikon Corp Differential interference observation method and microscope
JP2009163069A (en) 2008-01-08 2009-07-23 Olympus Corp Microscope
US20130070075A1 (en) * 2011-09-21 2013-03-21 Olympus Corporation Magnifying observation apparatus, and image display method and microscopy switching method thereof

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