KR101724954B1 - Micro vacuum probe station - Google Patents

Abstract

A micro vacuum probe system comprises: a vacuum chamber which is provided with a vacuum port at least one position of sides of a frame having an opened upper portion and having an accommodation space formed therein, and is provided with an exhaust line for forming a vacuum in the accommodation space; a cover unit which is mounted on the opened upper portion of the vacuum chamber and seals the frame when a vacuum exhaust is performed in the vacuum port; a stage block which is provided in the accommodation space of the vacuum chamber and on which a specimen is placed; a plurality of probe pins which are provided to position an inspection end for inspection of the specimen on the stage block, and are provided with a spring portion at a fixed end that is the other end of the inspection end; a plurality of driving units which are provided around the stage block, are connected to the probe pins, and drive the probe pins; and a cooling block which is provided on one side of the vacuum chamber, provides cooling water into the vacuum chamber, and cools the stage block.

Description

[0001] MICRO VACUUM PROBE STATION [0002]

As a device for inspecting the electrical, genetic, optical, and chemical characteristics of a device formed on a wafer in a manufacturing process of a semiconductor device, a vacuum probe system is used which is inspected under a vacuum, or an environment in which a gas and temperature and humidity atmosphere is controlled.

There are two types of vacuum probe system: the probe positioner (detection device) is in the vacuum chamber and the probe positioner is located outside to adjust the position of the probe pin inside. Here, in the case where the probe positioner is located inside the vacuum chamber, since the internal space becomes large, the vacuum exhaust takes a long time. Here, since humidity and temperature control are difficult to control in proportion to the size of the internal space of the vacuum chamber, and external factors such as unnecessary outgas are involved, if the size of the vacuum chamber is large, Occurs. Further, when the size of the vacuum chamber is increased, the capacity of the vacuum pump is also increased and compatibility with other systems is deteriorated.

For example, Patent Document 1 (Japanese Patent Laid-Open No. 2000-260839) discloses a low-temperature testing apparatus in which a probe chamber is entirely formed of a vacuum container. In the low-temperature testing apparatus of Patent Document 1, when the position of the probe is changed for device measurement, after the vacuum formed on the entire probe chamber is removed, the position of the probe is changed and then the entire probe chamber is evacuated again to form a vacuum. However, in the case of Patent Document 1, since the volume of the probe chamber is large, the time required for evacuation and gas purging for vacuum formation becomes long. Further, in the case of the low-temperature testing apparatus described in Patent Document 1, the technique of adjusting the position of the specimen and the probe needle is not disclosed.

Patent Document 2 (Japanese Unexamined Patent Publication (Kokai) No. 2004-128202) discloses a probe apparatus for inspecting electrical characteristics of a test piece in a vacuum chamber by disposing a vacuum chamber in a probe chamber and placing a table in a vacuum chamber have. However, in Patent Document 2, since the table can not be moved in the X, Y, and Z directions in the vacuum chamber, the position of the table (the detection table, the manipulator, and the positioner) It is impossible to move.

When the probe positioner is provided outside the vacuum chamber, the structure of the mechanism for vacuum sealing in and out of the vacuum chamber is complicated, expensive, and the overall size becomes large. In addition, the volume of the vacuum exhaust of the vacuum chamber is also smaller than that of the above-described method, but the volume for the vacuum exhaust is still large. Here, in the characteristic analysis for the gas environment, if the volume inside the vacuum chamber is large, it is disadvantageously disadvantageous in analysis, and analysis may sometimes be difficult.

On the other hand, there are two types of probe pins used in the conventional vacuum probe system. One is a tungsten probe pin, consisting of pins shaped like a needle without a part acting as a spring. In the case of the tungsten probe pin, the elasticity of the pin is not changed even at a temperature of about 200 ° C. However, a probe pin such as a linolefin pin (usually made of an Inconel nickel alloy for high temperature) is used. In this case, when used at a high temperature or for a long time, the elasticity changes to affect the analysis, Therefore, if the temperature is high, the price is high.

According to the embodiments of the present invention, it is possible to provide a vacuum probe system which can precisely measure the temperature of a micro vacuum probe system due to a change in temperature and prevent the accuracy of measurement from being degraded, and is small in volume and easy to be compatible with a microscope stage .

The problems to be solved by the present invention are not limited to the above-mentioned problems, and other matters not mentioned can be clearly understood by those skilled in the art from the following description.

According to the embodiments of the present invention, a vacuum port is formed in at least one side of a side of a frame in which an upper portion is opened and a receiving space is formed therein, A cover part which is mounted on an open upper part of the vacuum chamber and is sealed in the frame when the vacuum exhaust is performed in the vacuum port, A plurality of probe pins provided on the stage block for inspecting the test specimen and having a spring portion at a fixed end portion at the other end of the test end portion, And are connected to the plurality of probe pins, respectively, And a cooling block provided at one side of the vacuum chamber for cooling the stage block by supplying cooling water into the vacuum chamber.

According to one aspect, the cover portion may include a transparent quartz cover formed of a quartz material. For example, the quartz cover may be formed of any one of quartz, sapphire, plain glass, tempered glass, and acrylic. The quartz cover may have a thickness of 1 mm to 5 mm. And the cover portion includes a metal cover formed of a steel material including stainless steel, and the metal cover has a feed port for installing a view port, an injection port for injecting a liquid sample, and an optical fiber- through ports may be formed. The viewport may be made of any one material selected from quartz, sapphire, ordinary glass, and gorilla glass. The view port may be formed to a thickness of 3 mm or less. In addition, the view port may be provided with a heat ray.

According to one aspect of the present invention, the area of the spring portion of the probe pin may be larger than the area of the inspection end. For example, the inspection end may have any one of a spherical shape, a rounded disc shape, a rounded edge shape, an inverted triangular shape, and a general probe shape. The spring constant of the spring portion can be determined by adjusting the width of the spring portion and the thickness of the probe pin.

According to one aspect of the present invention, the fixed end is formed with a spring portion having an area larger than that of the inspection end and formed with a cutting pattern, and a contact portion connected to the signal wire may be formed at the end of the fixed end. The contact portion may be formed with a predetermined hole so that the signal wire can be welded or clamped.

According to one aspect of the present invention, the probe pin may be formed with a bend or a groove formed between the probe end and the fixed end so that a user can adjust the angle and position of the probe pin.

According to one aspect, the probe pin may be formed of a material having a low thermal conductivity, and a material having high electrical conductivity may be formed on a surface thereof. For example, the probe pin may be formed of any one of stainless steel, inconel, and tungsten. The probe pin may have a coating layer of gold or platinum on its surface.

According to one aspect of the present invention, the driving unit may be configured to linearly move or rotate the probe pin in two directions. In addition, an insulating plate made of quartz or Teflon may be provided under the driving part.

According to one aspect of the present invention, at least one air passage is formed on the upper surface of the frame, and the air passage is formed to be connected to each other. Around the air passage, an auxiliary O-ring for sealing may be provided. Wherein a main o-ring is provided around the accommodating space in the vacuum chamber for exhausting the accommodating space or for sealing the accommodating space when gas is injected into the accommodating space, the height of the main o- As shown in FIG. Wherein the main O-ring groove and the auxiliary O-ring groove are formed in the frame, the height of the main O-ring and the auxiliary O-ring is adjusted to the depth of the O-ring groove, The depth may be 0 to 30% deeper than the depth of the main O-ring groove. The air passage forms a vacuum with respect to the cover portion, and the exhaust line forms a vacuum in the accommodation space, and can be formed to form a vacuum through independent paths.

According to one aspect, the stage block is made of a thermoelectric element, and a cooling block for cooling may be provided in a lower portion of the stage block. For example, the stage block may be formed of an aluminum nitride (AlN) material. The stage block may be formed of any one of AlN, SiC, Inconel, Inconel coated with SiC, Cu, C, and Mo. The stage block may be formed of any material other than thermoelectric elements for heating. .

Various embodiments of the invention may have one or more of the following effects.

As described above, according to the embodiments of the present invention, since the probe pin can be miniaturized by linearly moving and rotating the probe pin and using the probe pin with the spring incorporated therein, it is possible to miniaturize the positioner, And the gas saturation at the time of gas purging is very fast.

In addition, since the micro vacuum probe system according to the present embodiments can be miniaturized so as to be coupled to a microscope stage or the like, compatibility with the spectroscopic analyzer and the like is easy. Further, by forming the stage block with a Peltier element, it is possible to control the temperature quickly and accurately from subzero to 200 deg. C repeatedly within a few seconds. By cooling the cooling water in the stage block, cooling can be performed more effectively. Also, the probe pin can be deformed by the heat due to the shape of the probe pin, thereby preventing the measurement result from being inaccurate. The accuracy of the measurement can be increased by linearly moving the probe pins individually and rotating them in the φ direction.

1 is a plan view of a micro vacuum probe system according to an embodiment of the present invention.
2 is a side view of a micro vacuum probe system according to an embodiment of the present invention.
3 is a perspective view of a quartz cover according to one embodiment of the present invention.
4 is a perspective view of a metal cover according to an embodiment of the present invention.
5 is a plan view of a probe pin according to an embodiment of the present invention.

Hereinafter, some embodiments of the present invention will be described in detail with reference to exemplary drawings. It should be noted that, in adding reference numerals to the constituent elements of the drawings, the same constituent elements are denoted by the same reference symbols as possible even if they are shown in different drawings. In the following description of the embodiments of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the difference that the embodiments of the present invention are not conclusive.

In describing the components of the embodiment of the present invention, terms such as first, second, A, B, (a), and (b) may be used. These terms are intended to distinguish the constituent elements from other constituent elements, and the terms do not limit the nature, order or order of the constituent elements. When a component is described as being "connected", "coupled", or "connected" to another component, the component may be directly connected or connected to the other component, Quot; may be "connected," "coupled," or "connected. &Quot;

Hereinafter, a micro vacuum probe system 10 according to embodiments of the present invention will be described in detail with reference to FIGS. 1 to 5. FIG. 1 is a plan view of a micro vacuum probe system 10 according to an embodiment of the present invention, and FIG. 2 is a side view of a micro vacuum probe system 10 according to an embodiment of the present invention. FIG. 4 is a perspective view of a metal cover 17 according to an embodiment of the present invention, and FIG. 5 is a perspective view of a quartz cover 16 according to an embodiment of the present invention FIG. 5 is a plan view of the probe pin 14 according to FIG.

1 and 2, a micro vacuum probe system 10 includes a micro vacuum probe system 10 and a micro vacuum probe system 10 according to a first embodiment of the present invention. As shown in FIGS. 1 and 2, A stage block 12 composed of a thermoelectric element serving as a specimen stage (an element capable of heating or cooling the upper part in accordance with the direction of the DC voltage / current) is provided in the stage block 12, Is provided with a cooling block (cooling while flowing cooling water of about 0 캜 to 30 캜) for cooling the heat generated on the lower side of the thermoelectric element when cooling the stage block 12. Here, the role of the cooling block is to keep the temperature of the stage block 12 constant regardless of the temperature of the stage, the sample size (load), the ambient environment (vacuum degree, temperature) (Not shown). Around the stage block 12, a plurality of probe pins 14 and a driving unit 15 for moving the probe pins 14 are disposed. Referring to FIGS. 2A and 2B, the micro vacuum probe system 10 includes a plurality of tabs 141 formed on a side surface of the vacuum chamber 11. The plurality of tabs 141 are provided for fixing a different apparatus when used in combination with a microscope or other apparatus, and are provided for enhancing compatibility and stability.

1, the vacuum chamber 11 is formed to be open at an upper portion thereof and has a predetermined accommodation space 112, 112 formed therein so that the stage block 12 and the probe pin 14 can be received therein. And includes a box-shaped frame 111. The open top of the frame 111 is provided with covers 16 and 17 for sealing the inside thereof. According to these embodiments, since the internal volume of the accommodating space 112 of the vacuum chamber 11 is very small within 100 cc, not only the vacuum evacuation is fast, but also the gas saturation at the time of gas purging is very fast. Therefore, it is easy to observe not only the specimen 1 which slowly reacts to the surrounding environment but also the characteristics of the specimen 1 which rapidly changes to the surrounding environment, so that the characteristics of the specimen 1 having various reaction rates can be accurately measured and analyzed .

A plurality of ports (13) are provided around the vacuum chamber (11). In detail, the vacuum chamber 11 is provided with an exhaust line for evacuating air to form a vacuum, and a vacuum port 131 having a vacuum flow path. The vacuum chamber 11 includes cooling water ports 138 and 139 for injecting and discharging cooling water into and discharging cooling water from the cooling block, a gas injection port 133 for injecting gas into the vacuum chamber 11, A plurality of signal ports 132, 134, 135, and 137 to which a plurality of signal lines for transmitting and receiving an electric signal are connected are connected to a gas discharge port (shared with the exhaust line) 136 and a probe pin 14 The signal ports 132, 134, 135, and 137 for the coaxial cable are used for the coaxial cable). Also, thermocouple signals and power lines may be provided that include signal lines 140 (two lines per thermocouple) and two power lines per thermocouple for thermocouple operation to measure the temperature of the stage have.

The plurality of ports 13 may be disposed at appropriate positions along the periphery of the vacuum chamber 11. [ However, the present invention is not limited to this, and the number and positions of the ports 13 connected to the vacuum chamber 11 may be substantially varied.

The cover portions 16 and 17 are collectively referred to as a quartz cover 16 and a metal cover 17 and are formed of a transparent quartz material so that the inside of the vacuum chamber 11 can be observed. A quartz cover 16 which is made of stainless steel and a metal cover 17 which is made of stainless steel.

Referring to FIG. 3, since the quartz cover 16 is formed of a transparent quartz material, it can be easily used for optical characteristic analysis. Here, the quartz cover 16 may be formed of any one of quartz, sapphire, plain glass, tempered glass, and acrylic. Further, the quartz cover 16 is formed to have a thickness of 1 mm to 5 mm, and is preferably formed to have a thickness of 5 mm or less.

By providing the cover portions 16 and 17, the vacuum chamber 11 can maintain the cleanliness of the inside and can maintain the vacuum state. The cover portions 16 and 17 are fixed only by forming a vacuum at the four corners of the cover portions 16 and 17 without a separate fastening means such as a screw or a clamp to be engaged with the vacuum chamber 11 . Since a separate fastening means is not used for fastening the cover portions 16 and 17, a quartz plate which is relatively expensive and difficult to use can be used as it is, and the upper surface of the quartz cover 16 is flat, And also has an advantage that compatibility with other system 10 is improved. Further, since the fastening means does not cover the quartz cover 16, the entire vacuum chamber 11 can be observed through the quartz cover 16. (The process for sealing the inside of the vacuum chamber 11 can be performed simply by mounting the quartz cover 16 to the vacuum chamber 11, the opening and closing of the vacuum chamber 11 can be performed quickly and conveniently have.)

4, by providing the metal cover 17, the inside of the vacuum chamber 11 can be made into a dark room, and a plurality of view ports 171 can be installed in the metal cover 17 It is possible to design a port for injecting a liquid sample and to design an optical / physico-chemical fusion experiment by installing a feed-through port for installing instruments such as optical fibers. For reference, a wide vacuum port can be provided in the cover portions 16 and 17 in a situation where a wide vacuum port is required for high vacuum. The view port 171 is formed of a transparent material so that the inside of the view port 171 can be observed. For example, any one of quartz, sapphire, ordinary glass, and gorilla glass may be used. The view port 171 is preferably formed to have a thickness of 3 mm or less. It is also possible that the view port 171 is provided with a hot wire in order to prevent icing (frosting phenomenon) of the view port 171 due to cooling of the stage block 12 inside.

The vacuum chamber 11 is formed at four corners with an air passage 113 outside the inner wall of the vacuum chamber 11 and the air passages 113 at all four corners are connected to each other, The cover portions 16 and 17 of the chamber 11 can be used to seal the inside of the vacuum chamber 11 from the external environment. The port shown on the upper surface of the frame 111 of the vacuum chamber 11 of Fig.

The air passage 113 is formed at four corners on the upper surface of the frame 111 forming the vacuum chamber 11 but the present invention is not limited to the drawings, May be substantially varied. When the cover is coupled to the upper surface of the vacuum chamber 11 and a vacuum is formed through the air passage 113, the cover portions 16 and 17 are brought into close contact with the upper surface of the vacuum chamber 11, It is sealed. However, since the air passage 113 and the vacuum inside the vacuum chamber 11 are independent of each other, a vacuum is not formed inside the vacuum chamber 11.

In addition, when the gas is injected into the vacuum chamber 11, it is possible to separately perform exhaust through the air passage 113 through a path independent of the inside of the vacuum chamber 11, so that the cover portions 16 and 17 It can be fixed very firmly and uniformly without a separate fastening means. In addition, when the cover portions 16 and 17 are sealed in the vacuum chamber 11, the cover portions 16 and 17 are prevented from being heard when the gas is injected into the vacuum chamber 11 at a pressure higher than 1 atm, It is possible to make a pressure of 1 atm or more and to prevent leakage of external air into the vacuum chamber 11.

For this purpose, in the present embodiment, an O-ring (hereinafter referred to as a 'main O-ring 114') for forming a vacuum in the internal accommodation space 112 of the vacuum chamber 11 and an O- (Hereinafter, referred to as 'auxiliary O-ring 115'). The height of the main O-ring 114 should protrude above the height of the auxiliary O-ring 115 by a predetermined height. In detail, when the main O-ring 114 is protruded higher than the auxiliary O-ring 115, even when the vacuum exhaust is performed through the air passage 113, the cover portions 16 and 17 and the main O- State, the sealed state inside the accommodation space 112 is effectively maintained. If the main O-ring 114 is formed to be lower than the auxiliary O-ring 115, the seal between the cover portions 16 and 17 and the main O-ring 114 can not be maintained during vacuum exhaustion, The vacuum breaks. The height adjustment of the main O-ring 114 (the inner portion of the vacuum chamber 11) and the auxiliary O-ring 115 (the portion of the air passage 113) can be performed at different depths from the surface of the O- The groove depth difference is about 0 to 30%, and the O-ring groove of the auxiliary O-ring 115 is deeply formed. More preferably, the depth difference of the O-ring groove is about 10% or more. According to the present embodiment, by using the difference in height of the two O-rings, the vacuum can be conveniently maintained compared with the conventional sealing method, and a uniformity is obtained in comparison with a method in which the cover portions 16 and 17 are fixed using separate fastening means It is possible to seal and fix the cover portions 16 and 17 by force, which is effective for sealing.

The stage block 12 is disposed inside the vacuum chamber 11, and the specimen 1 for inspection is seated. The stage block 12 is provided with a heating means for adjusting the temperature of the test piece 1 to a predetermined temperature for inspection. For example, the stage block 12 may comprise a thermoelectric element including a peltier element. By applying a thermoelectric element to the stage block 12 (thermoelectric element top plate), it is possible to quickly and accurately control the temperature within a few seconds within a temperature range of minus 200 ° C or more. When the thermoelectric element is applied to the stage block 12, the cooling block is cooled by flowing and flowing out cooling water through the cooling water ports 138 and 139 to the cooling block below the thermoelectric element for cooling the stage block 12. By cooling the stage block 12 with cooling water using a water-cooling method, it is possible to cool quickly, and the heat generated by the current flowing in the device can be well discharged, so that the upper specimen 1 can be cooled to a desired temperature It is possible to adjust and maintain it accurately. Here, the upper surface of the stage block 12 (upper surface of the thermoelectric element) is formed of a material having a high thermal conductivity to increase temperature uniformity, and may be formed of aluminum nitride (AlN) material, for example. The use of aluminum nitride improves the temperature uniformity of the stage block 12 because the thermal conductivity is about 20 times higher than that of the Al2O3 alumina ceramic used as the stage of the probe station for controlling the temperature with the conventional thermoelectric element .

On the other hand, when a thermoelectric element is not used for the stage block 12, cooling is not required. In this case, a general ceramic heater may be used. In this case, as the material of the stage block 12, alumina, SiC, Inconel, Inconel coated with SiC, Cu (a coating such as Au is required in an oxidizing atmosphere), C .

In another embodiment, the upper plate of the stage block 12 is formed of a material resistant to high temperature, such as SiC, Inconel, etc., and the stage block 12 is heated to 1000 ° C or higher . ≪ / RTI > Also in this case, a cooling block for flowing air or cooling water for cooling the stage block 12 may be provided.

The heat source using the wave guide RTP (rapid thermal processing) focuses infrared rays generated from an infrared lamp, specifically, a tungsten halogen lamp, a xenon lamp, etc., using an elliptical mirror, . The waveguide RTP is composed of an infrared heat source, an elliptical mirror, and a wave guide as basic components. The advantage of using the waveguide RTP is that only the portion of the specimen 1 can be selectively uniformly heated to a high temperature of 1000 ° C or more. It is necessary to further cool the vacuum chamber 11 because the vacuum chamber 11 itself is heated when the heating section is widened.

5, the probe pin 14 has a free end 141 on the stage block 12 and a fixed end 144 on the other end thereof is connected to the driving unit 15. For example, the micro vacuum probe system 10 may be equipped with four probe pins 14. And the probe pins 14 may be disposed at the four corner positions of the stage block 12. However, the present invention is not limited to the drawings, and the number and position of the probe pins 14 can be substantially varied.

The probe pin 14 is configured such that the test end 141 is thin and shaped like a pin 14 and the fixed end 144 connected to the drive 15 is positioned at a distance from the test end 141 And a contact portion 145 connected to the signal wire at the end thereof. The spring portion 143 is formed by forming a predetermined cut-out pattern.

For example, the test end 141 includes a rounded, rounded edge shape in the form of a rounded disk, an inverted triangular shape, and a common probe shape. This is because the plate-shaped metal sheet is processed by laser cutting or etching at the time of processing the probe pin 14, and this shape facilitates the processing.

The contact portion 145 may be formed with a predetermined hole so that the signal wire can be welded or clamped. However, the shape of the contact portion 145 is not limited to the drawings, and may be substantially varied. In addition, the lower portion of the contact portion 145 has a horizontal straight portion 146, which is a horizontal reference portion and a support portion for a torque due to spring elasticity.

The spring portion 143 allows the probe pin 14 to have elasticity and maintains the contact point stably even when thermal expansion of the test piece 1 occurs. The spring portion 143 has a structure in which a bent portion is formed in a round shape to reduce stress due to elastic deformation.

When the temperature of the specimen 1 changes from a high temperature to a low temperature, the tip portion of the probe pin 14 and the specimen 1 are separated from each other when the probe pin 14 is formed as a rigid body without the spring portion 143. [ The contact portion to be contacted moves finely, and the degree to which such a contact portion is slid or contacted may be slightly changed. In the case of the low current measurement or the cryogenic temperature measurement, the influence due to the minute change of the contact point is greatly affected. However, according to the present embodiments, since the spring portion 143 is formed on the probe pin 14, it is possible to prevent a minute change of the contact due to the temperature change, and to minimize the influence of the contact change. In addition, in the case of the conventional probe pin 14 made of hard and non-bending tungsten, the effect of such fine contact change is large, whereas in the present embodiment, such influence is minimized effectively compared with the probe pin 14 made of tungsten can do. Since the probe pin 14 is provided with the spring portion 143 farther from the test piece 1, the temperature change due to the temperature control of the test piece 1 is minimally transferred to the spring portion 143, It is possible to minimize the variation of the spring constant.

Here, the probe pin 14 can easily obtain a spring constant of a desired intensity by adjusting the width of the spring portion 143 and the thickness of the probe pin 14. [ This can prevent the data from being distorted in the characteristic analysis by the pressing force of the test piece 1 and minimize the damage that may occur in the test piece 1.

The probe pin 14 is formed of a material having a low thermal conductivity, and may be formed of, for example, stainless steel, inconel or tungsten. The surface of the probe pin 14 may be coated with a material having a high electrical conductivity, for example, gold or platinum.

A predetermined bend or groove is formed in the middle of the probe pin 14 so that the user can insert the probe pin 14 in a free-stop or manual manner, Is used to adjust the angle and position. Specifically, the probe pin 14 is lifted between the test end 141 and the spring portion 143 with a tweezer (a set of pins 14 or a jig) to facilitate the movement of the test end 141 to a desired position The adjusting portion 142 is formed. It is difficult to move the probe pin 14 due to the elasticity of the probe pin 14. By forming the adjustment portion 142, the user can easily move the probe pin 14 when the tweeter is attached to the adjustment portion 142. [

Since the probe pin 14 has the spring portion 143 and the spring portion 143 is disposed at a relatively far position in the test piece 1 as described above, It is possible to prevent the measurement result from being inaccurate due to the change. Since the shape of the probe pin 14 is small because the area of the inspection end 141 close to the stage block 12 is small and the area of the side of the driving unit 15 is large, 14 to the inspection end 141 of the apparatus. The present invention is not limited to the drawings, and the shape of the probe pin 14 may be substantially varied.

The driving unit 15 of the probe pin 14 is provided in each of the probe pins 14 and linearly moves the probe pins 14 in the uniaxial direction and rotates in the direction of φ. Here, the driving unit 15 of the probe pin 14 can detect most areas of the device by performing two linear movement or linear movement and rotation by removing the z-axis positioner, Detectable. This makes it possible to miniaturize the positioner, thereby minimizing the internal space, shortening the vacuum evacuation time, and achieving very fast gas saturation during gas purging.

Here, the driving unit 15 does not move the probe pin 14 through the micrometer, but uses a free stop method in which the user directly adjusts the probe pin 14 by hand. In such a free stop method, the position of the probe pin 14 can be adjusted very quickly and easily to a desired position.

A quartz insulating plate 151 is provided under the driving unit 15 to prevent a short circuit and prevent the driving unit 15 from being contaminated. The contamination inside the vacuum chamber 11 adversely affects the degree of vacuum. By providing the insulating plate 151 with a quartz material resistant to contamination, contamination can be prevented. In addition, since the reaction of the quartz material with the active gas is stable, a stable state can be maintained when the gas is pumped into the vacuum chamber 11 during inspection of the sample. The insulating plate 151 may be made of various materials such as Teflon, anodized aluminum-insulated metal, ceramics, and polymeric materials other than the quartz material described above.

According to the present embodiments, since the probe pin 14 is linearly moved and rotated and rotated by using the probe pin 14 with the spring incorporated therein, the drive unit 15 can be miniaturized, Time is shortened and gas saturation is very fast during gas purging.

In addition, since the micro vacuum probe system 10 according to the present embodiments can be miniaturized so as to be coupled to a microscope stage or the like, it is easy to be compatible with a spectrometer or the like. Further, the stage block 12 is formed of a Peltier element, so that the temperature can be controlled quickly and accurately from zero to 200 deg. C repeatedly within a few seconds. By cooling the stage block 12 with cooling water, cooling can be performed more effectively. It is also possible to prevent the measurement result from being inaccurate due to the deformation of the probe pin 14 due to the heat through the shape of the probe pin 14. The accuracy of the measurement can be increased by linearly moving the probe pins 14 individually and by rotating the probe pins 14 in the phi direction.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. For example, it is to be understood that the techniques described may be performed in a different order than the described methods, and / or that components of the described systems, structures, devices, circuits, Lt; / RTI > or equivalents, even if it is replaced or replaced.

Therefore, other implementations, other embodiments and equivalents to the claims are within the scope of the following claims.

1: The Psalms
10: Micro vacuum probe system
11: Vacuum chamber
111: frame
112: accommodation space
113: air passage
114: Main O-ring
115: auxiliary o-ring
12: stage block
13: Ports
131: Vacuum port
132, 134, 135, 137: signal port
133: gas injection port
136: gas exhaust port
138, 139: cooling water ports (138, 139)
140: Signal line
14:
141: inspection end
142:
143: spring portion
144: fixed end
145:
146:
15:
151: Insulation plate
16: Quartz cover
17: Metal cover
171: Viewport

Claims (26)

A vacuum port is formed in at least one position of a side of a frame in which an upper portion is opened and a receiving space is formed therein, an exhaust line for forming a vacuum is formed in the receiving space, A vacuum chamber in which at least one air passage is formed;
An auxiliary o-ring provided to close the air passage;
A main o-ring provided around the accommodating space to seal the accommodating space when exhausting gas from the accommodating space or injecting gas into the accommodating space, the main o-ring being provided to protrude from the auxiliary o-ring;
A cover part mounted on an opened top of the vacuum chamber and being sealed to the frame when the vacuum exhaust is performed in the vacuum port;
A stage block disposed inside the accommodating space of the vacuum chamber to seat the specimen;
A plurality of probe pins provided on the stage block for inspecting the test specimen and having a spring portion at a fixed end, which is the other end of the probe end;
A plurality of driving units provided around the stage block and connected to the plurality of probe pins to drive the probe pins; And
A cooling block provided at one side of the vacuum chamber to cool the stage block by supplying cooling water into the vacuum chamber;
And a micro vacuum probe system.
The method according to claim 1,
Wherein the cover portion comprises a transparent quartz cover formed of a quartz material.
3. The method of claim 2,
Wherein the quartz cover is formed of any one of quartz, sapphire, plain glass, tempered glass, and acrylic.
3. The method of claim 2,
Wherein the quartz cover is formed to a thickness of 1 mm to 5 mm.
The method according to claim 1,
Wherein the cover portion includes a metal cover formed of a steel material including stainless steel,
Wherein the metal cover is formed with at least one port of a view port, an injection port for injecting a liquid sample, and a feed-through port for installing a mechanism including an optical fiber.
6. The method of claim 5,
Wherein the view port is made of any one material selected from the group consisting of quartz, sapphire, ordinary glass, and gorilla glass.
6. The method of claim 5,
Wherein the view port is formed to a thickness of 3 mm or less.
6. The method of claim 5,
And the view port is provided with a heat line.
The method according to claim 1,
Wherein the probe pin has an area of the spring portion larger than an area of the inspection end.
10. The method of claim 9,
Wherein the inspection end has a shape selected from a spherical shape, a rounded shape of an edge portion in a disc shape, an inverted triangular shape, and a general probe shape.
10. The method of claim 9,
Wherein a spring constant of the spring portion is determined by adjusting a width of the spring portion and a thickness of the probe pin.
The method according to claim 1,
Wherein the fixed end is formed with a spring portion having an area larger than that of the inspection end and formed with an incision pattern,
And a contact portion connected to the signal wire is formed at an end of the fixed end.
13. The method of claim 12,
Wherein the contact portion has a predetermined hole formed therein for welding or clamping the signal wire.
The method according to claim 1,
Wherein the probe pin has an adjusting part formed between the inspection end and the fixed end so as to allow the user to adjust the angle and position of the probe pin.
delete The method according to claim 1,
Wherein the probe pin is formed of one of stainless steel, inconel, and tungsten.
The method according to claim 1,
Wherein the probe pin has a coating layer of gold or platinum on the surface thereof.
The method according to claim 1,
Wherein the driving unit linearly moves or linearly moves the probe pin in two directions.
The method according to claim 1,
And an insulating plate made of quartz or Teflon is provided under the driving unit.
delete delete The method according to claim 1,
Wherein the frame has a main O-ring groove on which the main O-ring is installed and an auxiliary O-ring groove on which the auxiliary O-ring is installed,
Wherein the height of the main O-ring and the auxiliary O-ring is adjusted to the depth of the O-ring groove and the depth of the auxiliary O-ring groove is 0 to 30% deeper than the depth of the main O-ring groove.
The method according to claim 1,
Wherein the air passage forms a vacuum with respect to the cover portion, the exhaust line forms a vacuum in the accommodation space, and forms a vacuum through independent paths.
The method according to claim 1,
Wherein the stage block comprises a thermoelectric element and a cooling block for cooling is provided below the stage block.
25. The method of claim 24,
Wherein the stage block is formed of an aluminum nitride (AlN) material.
The method according to claim 1,
The stage block is provided with a heating means except a thermoelectric element for heating,
Wherein the stage block is formed of any one material selected from the group consisting of alumina (AlN), SiC, inconel, Inconel coated with SiC, Cu, C, and Mo.

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