KR101714405B1 - Plasma Processing Apparatus - Google Patents
Plasma Processing Apparatus Download PDFInfo
- Publication number
- KR101714405B1 KR101714405B1 KR1020150107273A KR20150107273A KR101714405B1 KR 101714405 B1 KR101714405 B1 KR 101714405B1 KR 1020150107273 A KR1020150107273 A KR 1020150107273A KR 20150107273 A KR20150107273 A KR 20150107273A KR 101714405 B1 KR101714405 B1 KR 101714405B1
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- South Korea
- Prior art keywords
- antenna
- power
- disposed
- radius
- power distribution
- Prior art date
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
- H01J37/3211—Antennas, e.g. particular shapes of coils
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
- H01J37/32211—Means for coupling power to the plasma
- H01J37/3222—Antennas
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
- H01J37/32266—Means for controlling power transmitted to the plasma
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24564—Measurements of electric or magnetic variables, e.g. voltage, current, frequency
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/248—Components associated with the control of the tube
- H01J2237/2485—Electric or electronic means
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Plasma Technology (AREA)
Abstract
The present invention provides an inductively coupled plasma processing apparatus. The apparatus includes an inner antenna disposed on a dielectric top plate of a vacuum container and having a constant radius; A plurality of outer antennas electrically connected in parallel and disposed on the dielectric top plate of the vacuum container and disposed on an outer periphery of the inner antenna; A power distributor for distributing power to the inner antenna and the outer antenna, respectively; And an RF power source for providing power to the inner antenna and the outer antenna through the power divider. The outer antennas are disposed at regular intervals on a circumference having a constant radius on the central axis of the inner antenna. The outer antenna includes an inner curved portion having a first radius of curvature and an outer curved portion having a second radius of curvature larger than the first radius of curvature. The outer antennas do not overlap each other and form a closed loop.
Description
The present invention relates to an inductively coupled plasma processing apparatus, and more particularly, to a large area plasma source having an inner antenna and an outer antenna.
Korean Patent Laid-Open No. 10-2013-0043795 discloses a plasma processing apparatus having an inner antenna and an outer antenna. The outer antenna of this patent is a multi-layer structure, and it is difficult to control the plasma density at a local location.
Korean Patent Laid-Open Publication No. 10-2012-0040335 discloses a plasma processing apparatus having an inner antenna and an outer antenna. The outer antenna of this patent is composed of half-turn antennas superimposed on each other, and it is difficult to control the plasma density at a local position.
In order to increase the uniformity of the rotating direction (direction of the azimuth angle of the cylindrical coordinate system), the large area inductively coupled plasma uses a plurality of turns in a multi-layered structure. Nonetheless, such an inductively coupled plasma produces a locally non-uniform plasma due to the gas supply direction or the gas pumping direction of the exhaust. Therefore, an antenna structure for improving local plasma nonuniformity is required.
SUMMARY OF THE INVENTION It is an object of the present invention to provide an antenna structure for controlling local plasma nonuniformity in a large area plasma processing apparatus.
An inductively coupled plasma processing apparatus according to an embodiment of the present invention includes an inner antenna disposed on a dielectric top plate of a vacuum container and having a constant radius; A plurality of outer antennas electrically connected in parallel and disposed on the dielectric top plate of the vacuum container and disposed on an outer periphery of the inner antenna; A power distributor for distributing power to the inner antenna and the outer antenna, respectively; And an RF power source for providing power to the inner antenna and the outer antenna through the power divider. The outer antennas are disposed at regular intervals on a circumference having a constant radius on the central axis of the inner antenna. The outer antenna includes an inner curved portion having a first radius of curvature and an outer curved portion having a second radius of curvature larger than the first radius of curvature. The outer antennas do not overlap each other and form a closed loop.
In one embodiment of the present invention, the antenna further includes an external antenna variable capacitor connected between the at least one external antenna and the ground. The outer antenna variable capacitors can uniformly control non-uniform plasma locally.
In one embodiment of the present invention, the apparatus may further include a current measuring unit for sensing a current flowing through the outer antenna to which the outer antenna variable capacitor is connected.
In one embodiment of the present invention, the power input terminal and the output terminal of the outer antenna may be disposed in the outer curved portion.
In one embodiment of the present invention, one end includes a vertical support which vertically extends in a plane in which the outer antenna is disposed and the outer antenna is fixed; And a conductive fixing plate fixed and grounded at the other end of the vertical supporting portion. The conductive fixing plate includes a through hole at the center, and the power distributing portion is disposed to extend through the through hole, and can be radially branched.
In one embodiment of the present invention, the antenna may further include a permanent magnet disposed vertically spaced apart from the outer antenna. The permanent magnets may be respectively disposed corresponding to the outer antenna, and the permanent magnets may be disposed on the conductive fixing plate.
In one embodiment of the present invention, the power divider may include an inner power divider for distributing power to the inner antenna and an outer power divider for distributing power to the outer antenna. The inner power distribution portion may include a cylindrical inner power distribution body portion and an inner power distribution branch portion that radially branches from the inner power distribution body portion. The outer power distribution portion may include a cylindrical outer power distribution body portion and an outer power distribution branch portion that radially branches from the outer power distribution body portion. The outer power distribution body may be coaxial to enclose the inner power distribution body.
In one embodiment of the present invention, the power divider includes a power distribution variable capacitor connected in series with the inner antenna to control a current flowing to the inner antenna and the outer antenna; And a fixed inductor connected in series to the outer antenna connected in parallel.
In one embodiment of the present invention, the outer antennas may be disposed in quadrants, respectively.
In one embodiment of the invention, the inner antenna comprises an inner curved portion having a third radius of curvature and an outer curved portion having a fourth radius of curvature larger than the third radius of curvature to provide an outline of the annular section, Section. The inner antenna can form a closed loop without overlapping.
According to an embodiment of the present invention, a local plasma density distribution can be controlled by disposing the outer antennas so that they are not overlapped spatially and connecting a variable capacitor to at least one outer antenna. Thus, a spatially uniform plasma density distribution can be provided.
1 is a conceptual diagram illustrating an inductively coupled plasma apparatus according to an embodiment of the present invention.
2 is a circuit diagram showing an electrical connection of the inductively coupled plasma apparatus of FIG.
3 is a perspective view illustrating the inductively coupled plasma apparatus of FIG.
4 is a perspective view illustrating the inductively coupled plasma apparatus of FIG.
5 is a cross-sectional view taken along line AA 'of FIG.
6 is a cross-sectional view taken along the line B-B 'in FIG.
7 is a circuit diagram illustrating a plasma processing apparatus according to another embodiment of the present invention.
8 is a conceptual diagram illustrating a plasma processing apparatus according to another embodiment of the present invention.
9 is a conceptual diagram illustrating a plasma processing apparatus according to another embodiment of the present invention.
10 is a circuit diagram illustrating the plasma processing apparatus of FIG.
Conventional inductively coupled plasma is designed in a multi-layer structure in which a plurality of antennas connected in parallel are provided in order to provide plasma uniformity in azimuthal direction in a cylindrical coordinate system. However, the antenna of such a structure can not locally control the RF power, so that it is difficult to control the local plasma density.
The plasma apparatus according to an embodiment of the present invention may spatially separate a plurality of outer antennas from each other so as not to overlap with each other, and the RF power provided to one or a plurality of outer antennas of the outer antennas may be controlled. Thus, the plasma density distribution can be locally controlled. Thus, local plasma non-uniformity or process non-uniformity due to the pumping direction or gas flow direction of the exhaust portion and the like can be improved.
Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments described herein but may be embodied in other forms. Rather, the embodiments disclosed herein are being provided so that this disclosure will be thorough and complete, and will fully convey the concept of the invention to those skilled in the art. In the drawings, the components have been exaggerated for clarity. Like numbers refer to like elements throughout the specification.
1 is a conceptual diagram illustrating an inductively coupled plasma apparatus according to an embodiment of the present invention.
2 is a circuit diagram showing an electrical connection of the inductively coupled plasma apparatus of FIG.
3 is a perspective view illustrating the inductively coupled plasma apparatus of FIG.
4 is a perspective view illustrating the inductively coupled plasma apparatus of FIG.
5 is a cross-sectional view taken along line A-A 'in FIG.
6 is a cross-sectional view taken along the line B-B 'in FIG.
1 to 6, an inductively coupled
The
The
The pumping
The
The
The
Specifically, the input terminal of the
The
When the
The
The
The inner
The
The
The outer
In order to control the external
One end of the
The
The
The
The permanent
According to a modified embodiment of the present invention, the number of the outer antennas may be changed to three, five, six, or the like.
7 is a circuit diagram illustrating a plasma processing apparatus according to another embodiment of the present invention.
Referring to FIG. 7, the inductively coupled
The outer
8 is a conceptual diagram illustrating a plasma processing apparatus according to another embodiment of the present invention.
Referring to FIG. 8, an inductively coupled
The directions of the magnetic moments by the outer antenna may be opposite to each other with respect to the adjacent outer antenna. Specifically, the current direction of the first
9 is a conceptual diagram illustrating a plasma processing apparatus according to another embodiment of the present invention.
10 is a circuit diagram illustrating the plasma processing apparatus of FIG.
9 and 10, an inductively coupled
The
The
The
The
Specifically, the input terminal of the
The
The
While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, And all of the various forms of embodiments that can be practiced without departing from the technical spirit.
110: inner antenna
120: outer antenna
140: Power distributor
184: Power supply
Claims (10)
A plurality of outer antennas electrically connected in parallel and disposed on the dielectric top plate of the vacuum container and disposed on an outer periphery of the inner antenna;
A power distributor for distributing power to the inner antenna and the outer antenna, respectively;
And an RF power source for providing power to the inner antenna and the outer antenna through the power distributor,
Wherein each of the outer antennas is disposed at a constant interval on a circumference having a predetermined radius on the central axis of the inner antenna,
Each of the outer antennas includes an inner curved portion having a first radius of curvature and an outer curved portion having a second radius of curvature larger than the first radius of curvature,
Each of the outer antennas forms a closed loop without being overlapped with each other,
Further comprising an outer antenna variable capacitor connected between at least one of the outer antenna and ground,
The outer antenna variable capacitor uniformly controls a locally non-uniform plasma,
Further comprising a current measuring unit for sensing a current flowing through the outer antenna connected to the outer antenna variable capacitor,
A vertical support having one end fixed to the outer antenna and extending vertically in a plane in which the outer antenna is disposed; And
And a conductive fixing plate fixed to the other end of the vertical supporting portion and grounded,
Wherein the conductive fixing plate includes a through hole at the center thereof,
Wherein the power distributing portion is disposed to extend through the through hole, is radially branched,
Wherein the power divider includes an inner power divider for distributing power to the inner antenna and an outer power divider for distributing power to the outer antenna,
Wherein the inner power distribution portion includes a cylindrical inner power distribution body portion and an inner power distribution branch portion that radially branches from the inner power distribution body portion,
Wherein the outer power distribution portion includes a cylindrical outer power distribution body portion and an outer power distribution branch portion that radially branches from the outer power distribution body portion,
The outer power distribution body is coaxial to wrap the inner power distribution body,
A power input end and an output end of the outer antenna are disposed in the outer curved portion,
And the outer antennas are disposed in quadrants, respectively.
Further comprising a permanent magnet disposed vertically spaced apart from the outer antenna,
The permanent magnets are respectively disposed corresponding to the outer antenna,
And the permanent magnet is disposed on the conductive fixing plate.
Wherein the power distributor comprises:
A power distribution variable capacitor connected in series with the inner antenna to control a current flowing through the inner antenna and the outer antenna; And
Further comprising a fixed inductor connected in series to the outer antenna connected in parallel.
The inner antenna comprising an inner curved portion having a third radius of curvature and an outer curved portion having a fourth radius of curvature larger than the third radius of curvature to provide an outline of an annular section,
Wherein said inner antenna forms a closed loop without overlapping. ≪ RTI ID = 0.0 > 31. < / RTI >
Priority Applications (1)
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KR1020150107273A KR101714405B1 (en) | 2015-07-29 | 2015-07-29 | Plasma Processing Apparatus |
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KR1020150107273A KR101714405B1 (en) | 2015-07-29 | 2015-07-29 | Plasma Processing Apparatus |
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KR1020160147539A Division KR102175253B1 (en) | 2016-11-07 | 2016-11-07 | Plasma Processing Apparatus |
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KR20170015608A KR20170015608A (en) | 2017-02-09 |
KR101714405B1 true KR101714405B1 (en) | 2017-03-10 |
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KR1020150107273A KR101714405B1 (en) | 2015-07-29 | 2015-07-29 | Plasma Processing Apparatus |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20200003561A (en) | 2018-07-02 | 2020-01-10 | 주식회사 기가레인 | A substrate processing apparatus for mechanically controlling plasma density |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20190088449A1 (en) * | 2017-09-21 | 2019-03-21 | Semes Co., Ltd. | Substrate treating apparatus and substrate treating method |
WO2024101738A1 (en) * | 2022-11-09 | 2024-05-16 | 인투코어테크놀로지 주식회사 | Antenna structure |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
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EP1377999A1 (en) * | 2001-04-13 | 2004-01-07 | Applied Materials, Inc. | Inductively coupled plasma source with controllable power distribution |
WO2013039274A1 (en) * | 2011-09-16 | 2013-03-21 | 주식회사 아이비포 | Antenna structure and plasma generating device |
KR101265237B1 (en) * | 2011-10-21 | 2013-05-16 | 주성엔지니어링(주) | Plasma processing apparatus |
KR20140087215A (en) * | 2012-12-28 | 2014-07-09 | 주식회사 윈텔 | Plasma generation apparatus and substrate processing apparatus |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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KR20200003561A (en) | 2018-07-02 | 2020-01-10 | 주식회사 기가레인 | A substrate processing apparatus for mechanically controlling plasma density |
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