KR101702332B1 - Liquid Dipping Type ITO Pattern Inspection Apparatus - Google Patents

Abstract

An ITO pattern is formed on one surface of the panel to provide a uniform inspection of the pattern by inspecting whether the transparent ITO pattern is defective in a state where the panel is dipped in a non-electrolytic solution and then pressed flat. The present invention relates to a pattern inspecting apparatus for inspecting defects of an ITO pattern from a panel having a protective film attached thereto, the pattern inspecting apparatus comprising: a water receiving unit including a transparent plate transparent to the bottom; A stage part for supporting the panel so as to contact the electroless solution of the receiving part; A pushing jig which is positioned in correspondence with an upper side of the stage and is vertically reciprocable toward a panel mounted on the stage to closely contact the panel; And an inspection camera positioned below the water receiving unit and photographing a panel positioned on the stage unit to inspect defects of the ITO pattern on the panel.

Description

TECHNICAL FIELD [0001] The present invention relates to a liquid dipping type ITO pattern inspection apparatus,

The present invention relates to a solution dipping type ITO pattern inspecting apparatus, and more particularly to a solution dipping type ITO pattern inspecting apparatus which dips a panel into a non-electrolytic solution, And to a solution dipping type ITO pattern inspection apparatus capable of conducting inspection.

In general, various display devices such as a liquid crystal display (LCD), a plasma display panel (PDP), and an organic light emitting diode (OLED) configured to display and output a screen are applied to portable electronic devices such as a mobile phone, a PDA, Such a display device uses a panel made of glass or resin to protect it from external impacts or harmful components.

In the case of a panel applied to such a portable electronic device, a finger or a touch pen is brought close to the touch panel, or the touch panel is brought into contact with the touch panel. Thereby forming a uniform pattern of transparent electrodes. Further, after the transparent ITO pattern is formed on the panel, the pattern inspection apparatus is used to inspect whether the ITO pattern is well formed according to the designed pattern.

However, since the conventional pattern inspection apparatus is configured to use a microscope or a vision inspection apparatus as an inspection apparatus, there is a problem that it takes a long time to inspect each individual pattern together with the required time due to the fine position control.

As a conventional technique disclosed for solving the above problems, Korean Patent Registration No. 198527 (Mar. 2, 1999) discloses a laser for projecting defects of a fine pattern having a regular arrangement on an object to be inspected; A beam expander for abusing the laser beam output from the laser with a parallel beam; A Fourier lens which forms a Fourier image at a focal point of the lens with respect to the beam as the parallel beam output from the beam expander is transmitted through the object to be inspected; A spatial frequency filter for extracting only a low frequency component from the Fourier image output from the Fourier lens; An image lens for imaging a low frequency component output from the spatial frequency filter at an appropriate magnification; And a CCD camera for obtaining an image for processing an image signal output from the image lens, there is known a regular fine pattern defect inspection apparatus capable of shortening inspection time while inspecting using a laser beam.

However, since the above-mentioned conventional inspection apparatuses are scanned with a laser and are inspected, it takes a long time to inspect the product relative to a large quantity of production, so that the inspection process for the panel is omitted or only a small number of samples are inspected. There is a problem that it increases.

In addition, in the conventional inspection apparatus, since inspection equipment is photographed and inspected toward the panel, when the panel has a flexible material that can be easily bent or bent, the inspection accuracy is remarkably reduced and it is difficult to identify the defect of the pattern. There was a problem that it was greatly lowered.

In the case of the conventional inspection apparatus, since the panel is transferred from the previous process or the panel is inspected after the pattern is transferred and the unloading operation is performed manually, the operation is considerably inconvenient and the tact time due to the delay is delayed There was a problem.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems and it is an object of the present invention to provide a method of inspecting a pattern of a panel by completely loading and unloading a panel and dipping the panel into a non- And to provide a solution dipping type ITO pattern inspection apparatus capable of performing a rapid pattern inspection operation while automating the inspection.

In addition, since the present invention constitutes means for dipping the panel into a non-electrolytic solution and then pressing the panel flat, the panel proceeds through the inspection in a completely horizontal state, thereby facilitating the identification of defects and maximizing inspection accuracy. Ping type ITO pattern inspection apparatus.

The present invention provides a pattern inspecting apparatus for inspecting defects of an ITO pattern from a panel on which an ITO pattern is formed on one side and a protective film is attached on both sides, And a transparent plate which is transparent to the bottom surface and accommodates the transparent plate; A stage part for supporting the panel so as to contact the electroless solution of the receiving part; A pushing jig which is positioned in correspondence with an upper side of the stage and is vertically reciprocable toward a panel mounted on the stage to closely contact the panel; And an inspection camera located below the receiving unit and photographing a panel positioned on the stage unit to inspect defects of the ITO pattern on the panel.

Wherein the stage portion and the pressing jig portion are respectively positioned on the upper side of the water receiving portion and are capable of reciprocating upward and downward so that the stage portion and the pressing jig portion are locked toward the water tub portion after the panel is seated and supported on the stage portion do.

The stage unit includes a receiving groove formed on the upper surface so as to be recessed inwardly to receive the panel and a transparent supporting plate formed of a transparent material so as to close the lower surface of the receiving groove and to photograph the panel from the inspection camera.

In the solution-dipping type ITO pattern inspection apparatus proposed by the present invention, the stage portion and the pressing jig portion are located inside the water receiving portion so as to be immersed in the electroless solution, respectively, and the pressing jig portion is driven up and down in the electroless solution And the stage portion is fixedly mounted on the inner bottom surface of the water receiving portion.

And a panel jig part configured to be capable of unloading the panel after loading the panel toward the stage part or inspecting the ITO pattern, so that the panel can be transferred.

The panel jig includes a conveying jig for conveying the panel jig for sucking and fixing the panel from the outside of the receiving unit and then loading or unloading the panel, a panel jig for vertically moving up and down And a clamp jig configured to be movable.

The conveying jig includes an adsorption head member having an adsorption nozzle for generating a vacuum to adsorb and fix the panel, the adsorption head member being rotatable by 180 ° so as to switch an inspection area over the entire area of the panel.

The clamp jig includes clamping means formed to be capable of grasping the panel and capable of reciprocating back and forth toward the stage portion and clamping means for clamping the panel so as to guide the forward and backward movement of the clamping means and to be movable up and down And a rail member for guiding vertical movement of the conveying means.

The solution dipping type ITO pattern inspecting apparatus according to the present invention can uniformly automate the ITO pattern inspecting process of the panel, thereby improving the working environment and facilitating the process, thereby shortening the working time and further reducing the operation time of the panel in the non-electrolytic solution It is possible to shorten the tact time of the inspection work and to efficiently check the entire production amount of the panel.

In addition, since the solution dipping type ITO pattern inspection apparatus according to the present invention is configured to perform inspection in a pressed state by pressing the panel, not only the defect identification to the ITO pattern of the panel is very easy, but also the reliability of the pattern inspection is improved, There is an effect that the production rate of the good product can be improved.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a configuration diagram schematically showing an embodiment according to the present invention. Fig.
2 is a cross-sectional view schematically showing an embodiment according to the present invention.
3 is an exemplary view showing a use state in an embodiment according to the present invention.
4 is a schematic diagram showing another embodiment according to the present invention.
5 is a cross-sectional view schematically showing another embodiment according to the present invention.
6 is a plan view schematically showing another embodiment according to the present invention.
7 is an exemplary view showing a use state in another embodiment according to the present invention.

The present invention relates to a pattern inspecting apparatus for inspecting a defect of an ITO pattern from a panel on which an ITO pattern is formed on one side and a protective film is attached on both sides of the panel. The pattern inspecting apparatus includes a transparent plate ; A stage part for supporting the panel so as to contact the electroless solution of the receiving part; A pushing jig which is positioned in correspondence with an upper side of the stage and is vertically reciprocable toward a panel mounted on the stage to closely contact the panel; And an inspection camera positioned below the water receiving unit and photographing a panel positioned on the stage unit to inspect defects of the ITO pattern on the panel.

The stage portion and the pressing jig portion are respectively positioned on the upper side of the water receiving portion, and after the panel is seated and supported on the stage portion, the stage portion and the pressing jig portion can be reciprocated up and down so as to be locked toward the water tub portion And the solution dipping type ITO pattern inspection apparatus constituted by the present invention is characterized by the technical structure.

The stage part is provided with a receiving groove formed on an upper surface thereof so as to be recessed inwardly to receive the panel and a transparent supporting plate formed of a transparent material so as to close the lower surface of the receiving groove and to photograph the panel from the inspection camera. The ping-type ITO pattern inspection device is characterized by its technical structure.

The stage portion and the pressing jig portion of the present invention are each positioned inside the water receiving portion so as to be immersed in the electroless solution, and the pressing jig portion is driven to move up and down in the electroless solution, The ITO pattern inspecting apparatus according to the present invention is characterized by the structure of the solution dipping type ITO pattern inspecting apparatus.

Further comprising a panel jig part configured to be capable of unloading a panel that has loaded the panel toward the stage part or has completed the ITO pattern inspection and can transfer the panel to the stage part. .

The panel jig may further include a transfer jig for transferring the panels to the loading and unloading unit after sucking and fixing the panels from the outside of the receiving unit, A solution dipping type ITO pattern inspection apparatus including a clamp jig configured to be movable up and down.

The transfer jig may include a suction head member having an adsorption nozzle for generating a vacuum for adsorbing and fixing the panel, the adsorption head member being rotatable by 180 ° so as to switch an inspection region of the entire area of the panel. The ITO pattern inspection device is characterized by its technical structure.

The clamp jig includes a clamping unit configured to grip the panel and reciprocatingly movable forward and backward toward the stage unit, and a control unit for supporting the clamping unit so as to guide the reciprocating movement of the clamping unit forward and backward, And a rail member for guiding upward and downward movement of the conveying means. The present invention also features a solution dipping type ITO pattern inspection apparatus.

Next, a preferred embodiment of a solution dipping type ITO pattern inspection apparatus according to the present invention will be described in detail with reference to the drawings.

As shown in FIG. 1, an ITO pattern inspecting apparatus according to an embodiment of the present invention includes a panel P on which an ITO pattern is formed on one surface and a protective film is attached on both surfaces, The pattern inspection apparatus includes a water receiving unit 10, a stage unit 20, a pressing jig unit 30, and an inspection camera 40. [

As shown in Figs. 1 and 2, the water receiving portion 10 is formed in a box shape and has a storage space of a sufficient area for accommodating and storing the electroless solution therein.

The water receiving portion 10 is formed to have an open top surface so that the panel P can be smoothly supplied to the upper side.

The water receiving part 10 is formed with an inner bottom surface which is formed with a recess for receiving the stage part 20 so that the stage part 20 moved to the inside of the water receiving part 10 is located .

The bottom surface (bottom surface) of the water receiving portion 10 is provided with a transparent plate 15 having a transparent material (for example, glass or the like). That is, the transparent plate 15 is formed of a transparent material so that the panel P positioned inside the water receiving unit 10 can be photographed from the inspection camera 40.

The receiving portion 10 is made of a transparent material so that the entire surface of the receiving portion 10 as well as the bottom surface of the receiving portion 10 formed with the transparent plate 15 is transparent It is also possible.

As the electroless solution, it is possible to use water or a FC solution or the like as an achromatic transparent liquid, but it is preferable to apply the solution as an FC solution.

The stage unit 20 supports the panel P so as to contact the electroless solution of the water receiving unit 10.

2, the stage unit 20 supports the panel P so that the ITO pattern can be inspected from the inspection camera 40 and includes a receiving groove 21 for receiving the panel P And a transparent support plate 23 for closing the lower surface of the receiving groove 21 is formed.

The receiving groove 21 is recessed inwardly to receive the panel P on the upper surface of the stage portion 20.

It is preferable that the receiving groove 21 is formed to have the same area as the area of the panel P to be inspected so as to prevent the flow of the panel P supported on the receiving groove 21. [

The transparent support plate 23 closes the lower surface of the receiving groove 21 so as to support the panel P but is made of a transparent material such as glass to capture the panel P from the inspection camera 40 .

It is preferable that the transparent support plate 23 has an area larger than that of the receiving groove 21.

The pushing jig (30) is mounted so as to correspond to the upper side of the stage (20).

The pushing jig 30 has a flat bottom surface and is capable of contacting the panel P so that the pushing jig 30 can reciprocate up and down toward the panel P mounted on the stage 20, Are tightly fixed.

The pushing jig 30 is formed to have a dark color, that is, a black color, unlike the stage 20 having a transparent material. That is, the ITO pattern formed on the panel is clearly visible from the inspection camera, so that the panel can be smoothly inspected.

In one embodiment of the present invention, the stage portion 20 and the pressing jig portion 30 are located above the water receiving portion 10, respectively.

The stage portion 20 and the pressing jig 30 are configured to vertically move from the outside of the water receiving portion 10 toward the inside of the water receiving portion 10. That is, after the panel P is seated and supported on the stage part 20 at the outside of the water receiving part 10, the stage part 20 and the pressing jig part 30 so as to be locked.

3, the pushing jig 30 has a structure in which the panel P is loaded from the outside with the stage unit 20 and dipped toward the receiving unit 10, The stage portion 20 and the pressing jig 30 are vertically moved together into the tumbler 10 and then the pressing jig 30 is vertically moved again toward the stage portion 20 to move the panel P So that it is tightly fixed.

The inspection camera 40 takes a picture of the panel P and inspects defects of the ITO pattern with respect to the panel P.

The inspection camera 40 is installed to photograph the panel P positioned on the stage unit 20 at the lower side of the water receiving unit 10. That is, the inspection camera 40 photographs the panel P located on the stage unit 20 because the inspection camera 40 is mounted to the stage unit 20 from below the water receiving unit 10.

Since the inspection camera 40 can be implemented by applying a structural configuration of a general CCD camera, a detailed description will be omitted.

The operation of the embodiment of the present invention as described above will be briefly described with reference to FIG. 3. First, the receiving groove 21 is formed on the transparent support plate 23 of the stage unit 20, The pushing jig 30 is vertically lowered together with the stage unit 20 and is received into the electroless solution in the receiving unit 10. [ At this time, the stage unit 20 is lowered to be in contact with the transparent plate 15 of the water receiving unit 10. The pushing jig 30 vertically moves toward the stage 20 to fix the panel P in close contact with the panel P and the inspection camera 40 photographs the panel P The defects of the ITO pattern of the panel P are inspected.

That is, according to the apparatus for inspecting a solution dipping type ITO pattern according to the present invention, the ITO pattern inspection process of the panel is uniformly automated, so that the working environment is improved, Furthermore, since the panel is dipped into the non-electrolytic solution to easily inspect the entire area, it is possible to shorten the tact time of the inspection work and efficiently inspect the entire production of the panel.

In addition, since the present invention is configured to perform inspection in a state in which the panel is squeezed and pressed, it is possible not only to easily identify the defect on the ITO pattern of the panel, but also to improve the reliability of the pattern inspection and improve the quality of the product and the yield of good products.

4, the stage unit 20 and the pressing jig 30 are respectively connected to the water receiving unit (not shown) so as to be immersed in the electroless solution, 10, the pushing jig 30 is moved up and down in the electroless solution, and the stage portion 20 is fixedly mounted on the inner bottom surface of the water receiving portion 10, And further includes a panel jig (50) for transferring the panel (P) from the outside of the water receiving portion (10) for loading or unloading.

In the above, the stage portion 20 can be configured to have a transparent material (for example, glass or the like) as a whole.

The panel jig 50 is configured to load the panel P toward the stage unit 20 located in the water receiving unit 10 or to unload the panel P after the ITO pattern inspection from the stage unit 20 And the panel P is conveyed so as to be possible.

5 and 6, the panel jig 50 includes a conveying jig 51 for conveying the panel P to be loaded or unloaded from the outside of the receiving portion 10, And a clamp jig 55 for supplying the clamp jig 55 toward the stage unit 20 located within the stage 20.

The transfer jig 51 is configured to supply the panel P to the clamp jig 55 and to suction and fix the panel P, and to transfer and supply the panel P. That is, the conveying jig 51 has a suction nozzle 54 for generating a vacuum so that the panel P can be attracted and fixed.

At least one suction nozzle 54 is mounted on the conveying jig 51 to constitute an adsorption head member 53 for adsorbing the panel P.

The suction head member 53 is configured to be rotatable by 180 degrees so as to switch the inspection region with respect to the entire area of the panel. That is, the transfer jig 51 inspects the remaining area of the entire area of the panel P excluding the area gripped by the clamp jig 55 as a primary inspection area, and then moves the clamp jig 55 As the suction head member 53 of the conveying jig 51 rotates by 180 °, the direction of the panel P is switched to the inspection area of the panel P, and again through the clamp jig 55 The remaining area of the panel P supplied to the stage unit 20 is inspected as a secondary inspection area.

The clamp jig 55 is configured to vertically move up and down toward the stage unit 20 located in the water receiving unit 10 after fixing and fixing the panel P supplied from the conveying jig 51, Means 56, a conveying means 57 and a rail member 58.

Since the clamping means 56 abuts the upper and lower surfaces of the panel P, the clamping means 56 can grip the panel P.

The clamping means 56 is configured to grip and fix an area of 1/2 of the entire area of the panel P.

The clamping means 56 is configured to be capable of reciprocating back and forth from the upper portion of the conveying means 57 toward the stage portion 20 to supply the panel P to the upper portion of the stage portion 20. [

The conveying means 57 supports the forward and backward movement of the clamping means 56 and is formed so as to be movable up and down inside and outside the water receiving portion 10.

The rail member 58 extends vertically up and down on one side of the water receiving unit 10 and guides the vertical movement of the conveying unit 57.

7, the transfer jig 51 of the panel jig 50 transfers the panel P so as to be loaded, and the clamp jig (not shown) The clamping means 56 of the clamp jig 55 grasps a half of the area of the panel P and then moves vertically toward the water receiving portion 10 to be received in the electroless solution. The clamping means 56 of the clamp jig 55 moves toward the stage portion 20 to supply the panel P onto the stage portion 20 and then the pushing jig portion 30 is moved to the stage portion 20, The panel P is vertically moved toward the main body 20 to closely fix the panel P and the inspection camera 40 photographs the panel P to inspect the panel P for defects with respect to the ITO pattern. At this time, the inspection of the panel P is performed by firstly inspecting only one area with respect to an area of one half of the panel P, and then the clamping means 56 of the clamp jig 55 grips the panel P again And the suction head member 53 of the conveying jig 51 rotates the panel P by 180 degrees and then supplies the rotation to the clamp jig 55. [ The clamping means 56 of the clamp jig 55 grasps an area of 1/2 of the panel P which has been inspected first and then supplies again to the stage portion 20, The panel P is photographed from the inspection camera 40 after the pressing jig 30 is tightly fixed to the panel P located on the panel 20 and the second inspection of the remaining area of the panel P .

In the other embodiments described above, the same configuration as that of the above-described embodiment can be employed, so that detailed description is omitted.

Although the preferred embodiments of the solution dipping type ITO pattern inspection apparatus according to the present invention have been described above, the present invention is not limited thereto, and various modifications can be made within the scope of the claims, specifications and accompanying drawings And this also falls within the scope of the present invention.

10: Water receiving part 15: Transparent plate
20: stage part 21: receiving groove
23: transparent support plate 30: pressing jig
40: Inspection camera 50: Panel jig
51: transfer jig 53: suction head member
54: suction nozzle 55: clamp jig
56: clamping means 57: conveying means
58: rail member P: panel

Claims (8)

1. A pattern inspection apparatus for inspecting a defect of an ITO pattern from a panel in which an ITO pattern is formed on one surface and a protective film is attached on both surfaces,
A water receiving part for receiving the electroless solution therein and having a transparent plate transparent to the bottom;
A stage part for supporting the panel so as to contact the electroless solution of the receiving part;
A pushing jig which is positioned in correspondence with an upper side of the stage and is vertically reciprocable toward a panel mounted on the stage to closely contact the panel;
And an inspection camera located below the water receiving unit and photographing a panel positioned on the stage unit to inspect defects of the ITO pattern on the panel.
The method according to claim 1,
Wherein the stage portion and the pressing jig portion are respectively positioned on the upper side of the water receiving portion and are capable of reciprocating upward and downward so that the stage portion and the pressing jig portion are locked toward the water tub portion after the panel is seated and supported on the stage portion Type ITO pattern inspection apparatus.
The method of claim 2,
And a transparent support plate which is formed of a transparent material so as to capture the panel from the inspection camera while closing the lower surface of the receiving recess. Ping - type ITO pattern inspection system.
The method according to claim 1,
Wherein the stage portion and the pressing jig portion are located inside the receiving portion so as to be immersed in the electroless solution, the pressing jig portion is driven in the electroless solution in the up and down direction, and the stage portion is fixedly mounted on the inner bottom surface of the receiving portion Type ITO pattern inspection apparatus.
The method of claim 4,
Further comprising a panel jig which is configured to be capable of unloading a panel after loading the panel toward the stage or after the ITO pattern inspection is performed on the stage to transfer the panel.
The method of claim 5,
The panel jig includes a conveying jig for conveying the panel to suction and fix the panel outside the receiving portion and then loading or unloading the panels, and a panel jig for fixing the panel supplied from the conveying jig to the stage portion within the receiving portion. And a clamp jig configured to be movable up and down.
The method of claim 6,
Wherein the transfer jig includes a suction head member having an adsorption nozzle for generating vacuum to adsorb and fix the panel, the adsorption head member being rotatable by 180 ° so as to switch an inspection region with respect to an entire area of the panel, ITO pattern inspection device.
The method of claim 6,
The clamp jig includes clamping means formed to be capable of grasping the panel and capable of reciprocating back and forth toward the stage portion and clamping means for supporting the clamping means so as to guide the reciprocating movement of the clamping means forward and backward, And a rail member for guiding upward and downward movement of the conveying means.

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