KR101677109B1 - Multilayered piezoelectric element and manufacturing method thereof - Google Patents
Multilayered piezoelectric element and manufacturing method thereof Download PDFInfo
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- KR101677109B1 KR101677109B1 KR1020150132757A KR20150132757A KR101677109B1 KR 101677109 B1 KR101677109 B1 KR 101677109B1 KR 1020150132757 A KR1020150132757 A KR 1020150132757A KR 20150132757 A KR20150132757 A KR 20150132757A KR 101677109 B1 KR101677109 B1 KR 101677109B1
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- piezoelectric
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- electrode terminal
- terminal portion
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- H01L41/083—
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Abstract
Description
The present invention relates to a laminated piezoelectric element, and more particularly, to a piezoelectric element having two electrode terminal portions arranged in one direction and exposed to an upper side or a lower side, thereby simplifying connection to external connection terminals and providing excellent connection stability.
Generally, it is a device which generates electrical energy by mechanical deformation. It is used for an ultrasonic cleaner, a tuning fork filter, an ultrasonic oscillator, a piezoelectric coupler, a piezoelectric ignition device, a piezoelectric transformer device, a delay device, And is mainly used for an actuator.
That is, the piezoelectric element is an element capable of generating electrical energy by mechanical deformation such as vibration or compression to supply electric power.
For example, it can be used to supply electric power to a sensor mounted on a large motor and generate electric power by vibrations caused by the operation of the large motor, and to be installed separately in the large motor.
The types of the piezoelectric elements are largely divided into a single-layer type and a multi-layer type, and a lamination type capable of realizing low-voltage driving and miniaturization is widely used rather than a single-plate type that drives a high voltage of 50 (V / Is used.
The laminated piezoelectric element has a structure in which piezoelectric sheets are laminated in a vertical direction and internal electrodes of different shapes are alternately formed on the piezoelectric sheet in one layer. FIG. 1 is a diagram showing the general structure of the laminated piezoelectric element.
1, the laminated
The
That is, the
The stacked piezoelectric device has a first
The laminated piezoelectric element may have a first connecting
SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and it is an object of the present invention to provide a piezoelectric sheet in which two electrode terminals are arranged in one direction in a piezoelectric sheet and exposed to the upper or lower side to facilitate electrical connection with other external circuits, Layered piezoelectric element and a method of manufacturing a multilayered piezoelectric element in which the durability is increased and the connection safety is improved.
According to an aspect of the present invention, there is provided a laminated piezoelectric element comprising: a plurality of first piezoelectric sheet members having a first electrode protruding from a first electrode terminal portion on one side thereof; Wherein the first piezoelectric sheet member and the second piezoelectric sheet member are alternately stacked and integrated to form a first electrode terminal portion and a second electrode sheet portion, And the second electrode terminal portions are arranged in a direction parallel to one direction.
In the present invention, the first piezoelectric sheet member located on the uppermost layer among the first piezoelectric sheet members may be provided with a terminal exposing portion for exposing the second electrode terminal portion.
The stacked piezoelectric device according to an embodiment of the present invention may further include a first connecting electrode electrically connecting the first electrode terminal portions stacked and a second connecting electrode electrically connecting the second electrode terminal portion have.
In the present invention, the first connection electrode is formed on the first electrode terminal portion stacked and the first via hole passing through the second piezoelectric sheet member, and the second connection electrode is formed on the stacked second electrode terminal portion and the first And may be formed in the second via hole passing through the piezoelectric sheet member.
In the present invention, the first connection electrode has a groove shape that is opened to the end side of the stacked first electrode terminal portion, and the second connection electrode has a groove shape having a shape opened to the end side of the stacked second electrode terminal portion Lt; / RTI >
In the present invention, the end of the first electrode terminal portion and the end of the first piezoelectric sheet member coincide with each other, and the end of the second electrode terminal portion and the end of the second piezoelectric sheet member may coincide with each other.
A laminated piezoelectric element according to an embodiment of the present invention includes a first piezoelectric sheet member which is laminated on the first piezoelectric sheet member located on the uppermost layer and covers the first electrode, The cover sheet member may further include a cover sheet member.
In the present invention, the double-sided piezoelectric sheet having the first electrode and the second electrode formed on both surfaces thereof is disposed at the second side from the lower side and the double-sided piezoelectric sheet having the first electrode and the second electrode formed on either the first piezoelectric sheet member and the second piezoelectric sheet member The second electrode terminal portion or the first electrode terminal portion may be exposed.
According to another aspect of the present invention, there is provided a method of manufacturing a laminated piezoelectric element, including: a first piezoelectric green sheet member having a first electrode protruded from a first electrode terminal portion on one side thereof; Preparing a plurality of second piezoelectric greensheet members having a second electrode protruding from the first electrode terminal portion and having a second electrode terminal portion projecting toward the first electrode terminal portion, A piezoelectric sheet lamination step of laminating the first piezoelectric green sheet member and the second piezoelectric green sheet member, a first via hole penetrating the first electrode terminal part stacked, and a second via hole penetrating the second electrode terminal part, A via hole forming step of forming a via hole; And a first connection electrode electrically connecting the first electrode terminal portion stacked in the first via hole and a second connection electrode electrically connecting the second electrode terminal portion stacked in the second via hole are formed And a connecting electrode forming step.
In the present invention, the step of preparing the piezoelectric sheet includes preparing a terminal exposed portion for exposing the second electrode terminal portion to a first piezoelectric green sheet member disposed on the uppermost layer among the plurality of first piezoelectric green sheet members, The lamination step may be performed such that the first piezoelectric green sheet member on which the terminal exposed portion is formed is stacked on the uppermost layer.
The method of manufacturing a laminated piezoelectric element according to an embodiment of the present invention is characterized in that the first piezoelectric green sheet member and the second piezoelectric green sheet member which are alternately stacked are fired to form a first piezoelectric sheet member and a second piezoelectric sheet member And firing step of integrating them with each other.
The method of manufacturing a stacked piezoelectric device according to an embodiment of the present invention may further include a sheet cutting step of cutting the first via hole and the second via hole after the connecting electrode forming step.
In the present invention, the firing may be performed between the piezoelectric sheet laminating step and the via hole forming step, after the connecting electrode forming step, or after the sheet cutting step.
The method of manufacturing a laminated piezoelectric element according to an embodiment of the present invention is characterized by covering the first electrode on the first piezoelectric sheet member located on the uppermost layer after the sheet cutting step and covering the first electrode terminal portion and the second electrode terminal portion, And a cover sheet member on which a terminal hole portion for exposing the cover sheet member is laminated.
In the present invention, the first electrode and the second electrode may be formed by printing a conductive paste on the first piezoelectric green sheet member and the second piezoelectric green sheet member, respectively.
The via hole may be formed through the first via hole so as to remove a portion of the first electrode terminal portion and a portion of the first piezoelectric sheet member at the end of the first electrode terminal portion, The first via hole may be formed through the first via hole so as to remove a portion of the second electrode terminal portion and a portion of the second piezoelectric sheet member at the end of the electrode terminal portion.
In the present invention, the connecting electrode forming step may include forming a ring-shaped first connecting electrode surrounding the inner peripheral surface of the first via hole and a ring-shaped second connecting electrode surrounding the inner peripheral surface of the second via hole.
In the present invention, the sheet cutting step may include cutting a portion of the first connection electrode in the first via hole so that the end of the first electrode terminal portion and the end of the first piezoelectric sheet member are aligned with each other, A portion of the second connection electrode may be cut so that the end of the second electrode terminal portion and the end of the second piezoelectric sheet member are aligned with each other.
The present invention is effective in that two electrode terminals are arranged in parallel in one direction in the piezoelectric sheet and are exposed to the upper or lower side to facilitate electrical connection with other external circuits and improve the connection stability.
The present invention has the effect of simplifying the manufacturing process by integrating the electrode terminal for connection with the external circuit with the electrode, improving the durability and improving the operational reliability.
FIG. 1 is an exploded perspective view showing a conventional stacked-
Fig. 2 is an exploded perspective view showing one embodiment of the laminated piezoelectric element according to the present invention. Fig.
Fig. 3 is a perspective view showing a laminated piezoelectric element according to an embodiment of the present invention.
4 is an exploded perspective view showing another embodiment of the laminated piezoelectric element according to the present invention.
5 is a perspective view showing another embodiment of the laminated piezoelectric element according to the present invention.
6 is a process diagram showing a method of manufacturing a stacked piezoelectric device according to the present invention
7 is a view showing a step of preparing a piezoelectric sheet in the method of manufacturing a stacked piezoelectric element according to the present invention
8 is a view showing a step of laminating a piezoelectric sheet in the method of manufacturing a laminated piezoelectric element according to the present invention
9 is a view showing a via hole forming step in the method for manufacturing a laminated piezoelectric element according to the present invention
10 is a view showing a connecting electrode forming step in the method of manufacturing a laminated piezoelectric element according to the present invention
11 is a view showing a sheet cutting step in the method of manufacturing a laminated piezoelectric element according to the present invention
12 is a view showing a step of laminating a protective sheet in the method of manufacturing a laminated piezoelectric element according to the present invention
The present invention will now be described in detail with reference to the accompanying drawings. Hereinafter, a repeated description, a known function that may obscure the gist of the present invention, and a detailed description of the configuration will be omitted. Embodiments of the present invention are provided to more fully describe the present invention to those skilled in the art. Accordingly, the shapes and sizes of the elements in the drawings and the like can be exaggerated for clarity.
FIG. 2 is an exploded perspective view showing one embodiment of a stacked piezoelectric element according to the present invention, and FIG. 3 is a perspective view showing an embodiment of a stacked piezoelectric element according to the present invention.
2 and 3, the laminated piezoelectric element according to the embodiment of the present invention has a structure in which the first
The first
The second
A first electrode terminal part (12) for electrically connecting with another external circuit is integrally protruded on one side of the first electrode (11).
The first
A second
The second
The first
The first
The stacked piezoelectric device according to the present invention includes a
The
The
The first via
The second via
The
The
More specifically, the
On the other hand, in the first piezoelectric sheet member (10) positioned at the uppermost layer or the lowermost layer among a plurality of the first piezoelectric sheet members (10) stacked, the second piezoelectric sheet member The first
The terminal exposed
The
The
The stacked piezoelectric element according to the present invention is stacked on the first
A
When the
FIG. 3 is an exploded perspective view showing another embodiment of the stacked piezoelectric device according to the present invention, and FIGS. 3 and 4 are cross- And the
That is, when the
On the other hand, when the
The first
FIG. 6 is a process diagram showing a method for manufacturing a stacked piezoelectric device according to the present invention, and FIG. 7 is a view showing a piezoelectric sheet preparation step (S100) in the method for manufacturing a stacked piezoelectric device according to the present invention.
Referring to FIG. 6, a method for manufacturing a stacked piezoelectric device according to the present invention includes a first piezoelectric
The method of manufacturing a laminated piezoelectric element according to the present invention further comprises firing the first piezoelectric
In the present invention, the firing step (S210) is performed between the piezoelectric sheet laminating step (S200) and the via hole forming step (S300).
The method of manufacturing a stacked piezoelectric device according to the present invention may further include a sheet cutting step S500 for cutting the first via
The method for manufacturing a stacked piezoelectric device according to the present invention is characterized in that the
Referring to FIG. 7, the piezoelectric sheet preparation step (S100) comprises a plurality of first piezoelectric
The piezoelectric sheet preparing step S100 includes preparing the first piezoelectric
In the process of preparing the first piezoelectric
The process of preparing the second piezoelectric
The second
The
It is noted that the conductive paste may be any one of a silver paste, a copper paste, a gold paste, and an aluminum paste, or may be a paste in which two or more conductive metal powders are mixed.
The
The first
The first piezoelectric
8, the piezoelectric sheet laminating step (S200) is a step of laminating the first piezoelectric
In the present invention, the first piezoelectric
The piezoelectric sheet laminating step S200 may be carried out at the upper side or the lower side for the embodiment in which the first
FIG. 9 is a view illustrating a via hole forming step (S300) in the method of manufacturing a multilayer piezoelectric element according to the present invention. In the step S300 of forming a via hole, the first
The via hole forming step S300 may be performed through drilling or laser processing.
10 is a view illustrating a connecting electrode forming step (S400) in the method of manufacturing a multilayer piezoelectric element according to the present invention. In the connecting electrode forming step (S400), the inner peripheral surface of the first via hole (40) A ring-shaped
The connecting electrode forming step S400 may include forming the first connecting
It is noted that the connection electrode formation step (S400) may be modified by any known method of forming a connection conductive layer in a via hole.
11 is a view showing a sheet cutting step in the method of manufacturing a laminated piezoelectric element according to the present invention. In the sheet cutting step, the boundary between the first
The step of cutting the sheet may be performed by cutting a part of the
FIG. 12 is a view showing a cover sheet stacking step (S600) in the method of manufacturing a stacked piezoelectric element according to the present invention, wherein the cover sheet stacking step (S600) is a step in which the uppermost or lowermost first piezoelectric sheet member (10) 2
The
The
When the first
The present invention is characterized in that the two electrode terminals are arranged in one direction in the piezoelectric sheet, respectively, and are exposed to the upper or lower side to facilitate electrical connection with other external circuits and improve connection stability.
The present invention simplifies the manufacturing process by integrating electrode terminals for connection with an external circuit, improves durability, and improves operational reliability.
While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is evident that many alternatives, modifications, and variations will be apparent to those skilled in the art in light of the above teachings. will be.
10: first piezoelectric sheet member 11: first electrode
12: first electrode terminal part 20: second piezoelectric sheet member
21: second electrode 22: second electrode terminal part
30: terminal exposed portion 40: first via hole
41: first connection electrode 50: second via hole
51: second connecting electrode 60: cover sheet member
61: terminal hole portion 70: double-sided piezoelectric sheet member
Claims (18)
A plurality of first piezoelectric sheet members having a first electrode having a first electrode terminal portion protruded on one side thereof; And
And a plurality of second piezoelectric sheet members having a second electrode protruded on one side and having a second electrode terminal portion on one side,
Wherein the first piezoelectric sheet member and the second piezoelectric sheet member are alternately stacked and integrated, and the first electrode terminal portion and the second electrode terminal portion are arranged in parallel to one direction,
Wherein the first piezoelectric sheet member located on the uppermost layer among the first piezoelectric sheet members is provided with a terminal exposing portion for exposing the second electrode terminal portion,
Wherein the first electrode terminal portion of the first piezoelectric sheet member located on the uppermost layer and the second electrode terminal portion exposed by the terminal exposed portion are exposed to the upper side of the stacked piezoelectric element.
A first connection electrode electrically connecting the stacked first electrode terminal portions; And
And a second connection electrode electrically connecting the first electrode terminal portion to the second electrode terminal portion.
Wherein the first connection electrode is formed in the first via hole penetrating the first electrode terminal portion and the second piezoelectric sheet member,
Wherein the second connection electrode is formed on the second electrode terminal portion stacked and the second via hole passing through the first piezoelectric sheet member.
Wherein the first connection electrode has a groove shape opened to an end side of the stacked first electrode terminal portion,
Wherein the second connection electrode has a groove shape that is opened to an end side of the stacked second electrode terminal portion.
The end of the first electrode terminal portion and the end of the first piezoelectric sheet member coincide with each other,
And the end of the second electrode terminal portion and the end of the second piezoelectric sheet member coincide with each other.
And a cover sheet member laminated on the first piezoelectric sheet member positioned on the uppermost layer and covering the first electrode and having a terminal hole portion for exposing the first electrode terminal portion and the second electrode terminal portion. Stacked piezoelectric element.
Wherein the piezoelectric sheet member having the first electrode and the second electrode on both sides thereof is disposed on the second side from the lower side and the other side of the first piezoelectric sheet member and the second piezoelectric sheet member positioned on the lowermost side And a terminal exposed portion for exposing the first electrode terminal portion or the second electrode terminal portion is formed.
A plurality of first piezoelectric greensheets having a first electrode protruding from a first electrode terminal portion on one side thereof and a plurality of second piezoelectric greensheets having a second electrode protruding from the second electrode terminal portion on one side thereof, A piezoelectric sheet preparing step of preparing a member;
A piezoelectric sheet laminating step of laminating the first piezoelectric green sheet member and the second piezoelectric green sheet member such that the first electrode terminal portion and the second electrode terminal portion are arranged in parallel in one direction;
A via hole forming step of forming a first via hole passing through the stacked first electrode terminal part and a second via hole passing through the stacked second electrode terminal part; And
A first connection electrode electrically connecting the first electrode terminal portion stacked in the first via hole is formed and a second connection electrode electrically connecting the second electrode terminal portion stacked in the second via hole is formed, And an electrode forming step,
The piezoelectric sheet preparation step may include preparing a terminal exposed portion for exposing the second electrode terminal portion to the first piezoelectric green sheet member disposed on the uppermost layer among the plurality of first piezoelectric greensheet members,
The piezoelectric sheet laminating step may include laminating the first piezoelectric green sheet member on which the terminal exposed portion is formed such that the first piezoelectric green sheet member is located on the uppermost layer, and the first electrode terminal portion and the terminal exposed portion of the first piezoelectric green sheet member located on the uppermost layer, And the second electrode terminal portion is exposed to the upper side of the stacked piezoelectric element.
Further comprising a firing step of firing the first piezoelectric green sheet member and the second piezoelectric green sheet member which are alternately stacked to form a first piezoelectric sheet member and a second piezoelectric sheet member and integrating them with each other, A method of manufacturing a piezoelectric element.
Further comprising a sheet cutting step of cutting the first via hole and the second via hole after the connecting electrode forming step.
Wherein the firing step is performed between the piezoelectric sheet laminating step and the via hole forming step, after the connecting electrode forming step, or after the sheet cutting step.
A cover sheet member which covers the first electrode and has a terminal hole portion for exposing the first electrode terminal portion and the second electrode terminal portion is laminated on the first piezoelectric green sheet member positioned on the uppermost layer after the piezoelectric sheet laminating step Further comprising a step of laminating the cover sheet.
Wherein the first electrode and the second electrode are formed by printing a conductive paste on the first piezoelectric green sheet member and the second piezoelectric green sheet member, respectively.
Wherein the via hole forming step is formed through the first via hole so as to remove a part of the first electrode terminal part and a part of the first piezoelectric green sheet member at the end side of the first electrode terminal part, Is formed so as to penetrate through the second via hole so as to remove a part of the second electrode terminal portion and a part of the second piezoelectric green sheet member at the end side of the second piezoelectric green sheet member.
Wherein the connecting electrode forming step forms a ring-shaped first connecting electrode surrounding the inner peripheral surface of the first via hole and a ring-shaped second connecting electrode surrounding the inner peripheral surface of the second via hole.
Wherein the step of cutting the sheet cuts a part of the first connecting electrode in the first via hole so that the end of the first electrode terminal portion and the end of the first piezoelectric green sheet member are aligned with each other, Wherein a portion of the connecting electrode is cut so that an end of the second electrode terminal portion and an end of the second piezoelectric green sheet member are aligned with each other.
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| KR1020150132757A KR101677109B1 (en) | 2015-09-21 | 2015-09-21 | Multilayered piezoelectric element and manufacturing method thereof |
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| KR1020150132757A KR101677109B1 (en) | 2015-09-21 | 2015-09-21 | Multilayered piezoelectric element and manufacturing method thereof |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20200045923A (en) * | 2018-10-23 | 2020-05-06 | (주)와이솔 | Multi-layered piezoelectric element |
| CN117412660A (en) * | 2023-12-14 | 2024-01-16 | 乌镇实验室 | Co-fired multilayer piezoelectric actuator |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004214796A (en) * | 2002-12-27 | 2004-07-29 | Murata Mfg Co Ltd | Piezoelectric diaphragm and piezoelectric electroacoustic transducer using the same |
| KR20110075193A (en) * | 2009-12-28 | 2011-07-06 | 전자부품연구원 | Piezoelectric laminated ceramic device and method of manufacturing the same |
| KR20130052875A (en) * | 2011-11-14 | 2013-05-23 | 삼성전기주식회사 | Multi-layered ceramic electronic component and manufacturing method of the same |
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2015
- 2015-09-21 KR KR1020150132757A patent/KR101677109B1/en active IP Right Grant
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004214796A (en) * | 2002-12-27 | 2004-07-29 | Murata Mfg Co Ltd | Piezoelectric diaphragm and piezoelectric electroacoustic transducer using the same |
| KR20110075193A (en) * | 2009-12-28 | 2011-07-06 | 전자부품연구원 | Piezoelectric laminated ceramic device and method of manufacturing the same |
| KR20130052875A (en) * | 2011-11-14 | 2013-05-23 | 삼성전기주식회사 | Multi-layered ceramic electronic component and manufacturing method of the same |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20200045923A (en) * | 2018-10-23 | 2020-05-06 | (주)와이솔 | Multi-layered piezoelectric element |
| CN117412660A (en) * | 2023-12-14 | 2024-01-16 | 乌镇实验室 | Co-fired multilayer piezoelectric actuator |
| CN117412660B (en) * | 2023-12-14 | 2024-04-16 | 乌镇实验室 | Co-fired multilayer piezoelectric actuator |
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