KR101670924B1 - Maintain the confidentiality of the double claw clamp structure - Google Patents

Maintain the confidentiality of the double claw clamp structure Download PDF

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Publication number
KR101670924B1
KR101670924B1 KR1020150079389A KR20150079389A KR101670924B1 KR 101670924 B1 KR101670924 B1 KR 101670924B1 KR 1020150079389 A KR1020150079389 A KR 1020150079389A KR 20150079389 A KR20150079389 A KR 20150079389A KR 101670924 B1 KR101670924 B1 KR 101670924B1
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KR
South Korea
Prior art keywords
flange
clamp
pipe
ring
airtightness
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Application number
KR1020150079389A
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Korean (ko)
Inventor
정진현
성두환
조재희
민규팔
Original Assignee
신기산업 주식회사
에스케이하이닉스 주식회사
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Priority to KR1020150079389A priority Critical patent/KR101670924B1/en
Application granted granted Critical
Publication of KR101670924B1 publication Critical patent/KR101670924B1/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L23/00—Flanged joints
    • F16L23/02—Flanged joints the flanges being connected by members tensioned axially
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L23/00—Flanged joints
    • F16L23/02—Flanged joints the flanges being connected by members tensioned axially
    • F16L23/032—Flanged joints the flanges being connected by members tensioned axially characterised by the shape or composition of the flanges
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L23/00—Flanged joints
    • F16L23/16—Flanged joints characterised by the sealing means

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Flanged Joints, Insulating Joints, And Other Joints (AREA)

Abstract

The present invention relates to a double claw clamp airtightness maintaining structure which prevents leakage of a gas or powder by a method of pressing an outer circumference of a flange, and suppresses sludge generation and prevents decrease of flow velocity by maintaining airtightness in the flange connecting a pipe and a pipe. The double claw clamp airtightness maintaining structure of the present invention includes: the flange including a first flange and a second flange so as to be installed between a first pipe and a second pipe to be combined with each other closely; a center ring maintaining airtightness while being installed between the first flange and the second flange; an O-ring installed among the center ring or in the center ring while being located between the first flange and the second flange; and a clamp which is fastened by a compression method by being combined with an outer side of the flange so that the first flange and the second flange adhere to each other to obtain airtightness. Since the first flange and the second flange come in contact with each other to adhere closely and thus a prior gap occurred by bonding among members is minimized, the structure can maximally suppress generation of fume blocking flow of a fluid and also can prevent decrease of the flow velocity since sludge is not stacked.

Description

[0001] The present invention relates to a double claw clamp structure,

The present invention relates to a double claw clamp airtightness maintaining structure, and more particularly, to a double claw clamp airtightness maintaining structure that prevents gas or powder from leaking in a manner of pressing the outer periphery of the flange and maintains airtightness in the flange connecting the pipe and the pipe, And a double claw clamp airtightness maintaining structure that prevents the flow velocity from being slowed down.

Generally, a semiconductor device is manufactured by sequentially performing a series of unit processes for film formation, pattern formation, metal wiring formation, and the like. These processes are required to precisely control the process atmosphere such as pressure and temperature in order to improve the quality and yield of semiconductor devices. Among them, the internal pressure of the process chamber is the most important factor affecting the process efficiency.

Various process gases are used in the process of processing the semiconductor substrate, and the inside of the semiconductor device must be formed in a vacuum state so that the process gases do not change or react with air. In addition to the purpose of controlling the pressure by discharging the gas inside the process chamber to the outside, the vacuum pump discharges the reaction by-products or unreacted gas generated by the process gases during the course of the processing steps to the outside, It is also used for discharging the process gas remaining in the process gas supply line.

More specifically, before the semiconductor substrate is introduced into the process chamber, the interior of the process chamber is formed in a vacuum state, and the semiconductor substrate is inserted into the process chamber formed in a vacuum state. A vacuum pump is used to vacuum the inside of the process chamber.

The vacuum pump is also used to discharge the reaction by-products and the unreacted gas generated when the film is deposited on the semiconductor substrate or the deposited film is etched. As described above, the frequently used vacuum pump is connected to the process chamber through a vacuum line. In general, since the vacuum pump and the process chamber are disposed at a considerable distance from each other, the vacuum line can not be constituted by a pipe. Accordingly, several to several tens of pipes are arranged in series in the vacuum line, and the pipes are connected to each other through a pipe connecting device such as a centering pipe.

As a prior art centering assembly for use with the above-described piping connection apparatus, the publication No. 2013-0014846 discloses a centering assembly including a centering ring 11, a guide ring 12, a flange 20, an O- .

The centering ring 11 is disposed on the innermost side in the radial direction with respect to the O-ring 13 and is installed between the inner walls of the body 21 of the two pipe flanges 20.

The guide ring 12 has a U-shape and is provided so as to surround one side surface and both side surfaces in the radial direction of the ring body portion 11-1. Both side regions of the guide ring 120 are disposed within predetermined intervals on both side surfaces 11a of the ring body portion 11-1 and on the inner wall of the flange 20 body 21 adjacent thereto.

The flange 20 is made of a metal material having excellent abrasion resistance and is joined around the shortest end of the two pipes and disposed on both sides of the O-ring 13 and the center ring 11, respectively. The flange 20 includes a depression 22 formed in the inner wall of the body 21 adjoining the ring body 11-1. The guide rings 12 are disposed within the predetermined distance between the both side walls of the depressed portion 22 and the opposite side surfaces 11a of the ring body portion 11-1.

The O-ring 13 seals the coupling region of the two pipes and is located at one side of the centering ring 11. [

The clamping device 30 is composed of a double claw clamp so that each of the flanges 20 is formed with a clamping groove 23 on the outer surface of the body 21 so that the double clamp clamp So that the two pipes are connected to each other.

The inner diameter of the center ring 11 formed between the flanges 20 is difficult to precisely match with the inner diameter of the flange 20 and the inner diameter of the center ring 11 is narrower or wider than the inner diameter of the flange 20.

As a result, the inner diameter of the flange 20 and the center ring 11 are different from each other, so that sludge is accumulated between the flange 20 and the center ring 11, that is, fumes are generated to generate sludge, The inner diameter of the portion where the flange 20 and the centering ring 11 are installed is narrowed.

As a result of the narrowing of the inner diameter as described above, the flow of the gas moving through the piping is not smooth and the gas is not properly supplied during the production of the semiconductor, thereby causing defects of the semiconductor. In order to solve this problem, Since the centering 20 needs to be frequently exchanged, there is a problem that the replacement cost is increased.

Korean Registered Patent No. 10-1428445 (issued on August 4, 2014)

According to an aspect of the present invention, there is provided a double-claw clamp for clamping a flange of a flange through a method of providing a flange between a first pipe and a second pipe, And to provide a confidentiality structure.

The present invention also provides a double claw clamp airtightness maintaining structure for preventing sludge from accumulating inside the flange by preventing a step between the first flange and the second flange that directly engage the first flange and the second flange, The purpose is to do.

In order to accomplish the above object, the double claw clamp airtightness maintaining structure of the present invention includes a first flange provided on one side of a first pipe so that a face and a face can be closely contacted with each other, and a second flange provided on one side of the second pipe A flange including; A centering ring provided between the first flange and the second flange to maintain airtightness; An O-ring disposed between the first flange and the second flange and disposed between the centering rings or inside the centering ring; And a clamp which is fastened to the outer side of the flange by a pressing method so that the first flange and the second flange come into tight contact with each other to maintain airtightness.

The flange of the present invention is constituted by a first flange provided on one side of the first pipe and a second flange provided on the side of the second pipe, and the first flange is formed symmetrically with the second flange, A flange body, a first locking protrusion formed on a side surface of the first flange body so as not to be separated from the clamp, a first step formed on one side of the first flange body so that the centering ring can be installed, A second flange body formed to be symmetrical with respect to the second flange and coupled to the clamp, and a second flange body formed on the side of the second flange body, A second locking protrusion formed on the upper side of the side of the second flange body so as not to be separated by being coupled with the clamp and a second locking protrusion formed on one side of the second flange body, And a second mounting groove formed on a side surface of the first flange body so that the second pipe is inserted into and coupled to the inside of the first flange body.

The flange of the present invention is constituted by a first flange provided on one side of the first pipe and a second flange provided on the side of the second pipe, and the first flange is formed symmetrically with the second flange, A first engaging protrusion formed on a side surface of the first flange body so as not to be separated by being coupled with the clamp; a first engaging groove formed on one surface of the first flange body so that the centering ring can be installed; A second flange body formed to be symmetrical with respect to the first flange and coupled to the clamp, and a second flange body formed on the second flange body, A second locking protrusion formed on an upper side of the side surface of the second flange body so as to be separated from the clamp to be separated from the first flange body, First and second locking groove to form it, the first being composed of two mounting holes for the second pipe is formed in the second flange to the body side coupling is drawn inward.

The flange of the present invention is constituted by a first flange provided on one side of the first pipe and a second flange provided on the side of the second pipe, and the first flange is formed symmetrically with the second flange, A first engaging protrusion formed on a side surface of the first flange body so as not to be separated by being coupled with the clamp; a fitting groove formed on one surface of the first flange body so as to engage with the second flange body; And a first mounting groove formed on a side surface of the first flange body so as to be coupled to the first pipe. The second flange includes a second flange body formed symmetrically with the first flange and coupled to the clamp, A second locking protrusion formed on an upper side of the second flange body so as not to be separated from the clamp, and a second locking protrusion formed on a surface of the second flange body so as to be engaged with the fitting groove formed in the first flange body. And a fitting groove formed on one side of the second flange body and located on the upper side of the fitting protrusion so that the centering ring can be installed on the side face of the second flange body, 2 installation grooves.

The centering of the present invention is composed of an inner centering ring and an outer centering ring, the inner centering ring being installed between the first flange and the second flange so as to maintain the airtightness of the first flange and the second flange, And is installed between the first flange and the second flange.

The inner centering ring of the present invention is characterized in that the upper portion is recessed, the cross section is formed in a rectangular shape, or is formed in a shape of 'ㅗ' shape.

As the first flange and the second flange come into direct contact with each other and are closely contacted with each other, the gap generated by the coupling between the member and the member is minimized as in the prior art, thereby minimizing the generation of fumes that block the flow of the fluid. It is possible to prevent the phenomenon that the flow velocity is slowed because the sludge does not accumulate.

Further, since the first flange and the second flange are directly in contact with each other, the generation of fumes is suppressed, so that no vortex is generated and the flow velocity is not lowered.

In addition, the present invention has an effect that the flange coupling surface is precisely processed without any tolerance to seal, thereby extending the service life of the oil.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing the construction of a conventional piping connection apparatus. Fig.
2 is a cross-sectional view showing a configuration of a double claw clamp airtightness maintaining structure according to the present invention.
3 is a cross-sectional view showing another embodiment of the double claw clamp airtightness maintaining structure of FIG. 2;
4 is a cross-sectional view showing another embodiment of the double claw clamp airtightness maintaining structure of FIG. 2;

While the invention is susceptible to various modifications and alternative forms, specific embodiments thereof are shown by way of example in the drawings and will herein be described in detail.

It should be understood, however, that the invention is not intended to be limited to the particular embodiments, but includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention.

Like reference numerals are used for similar elements in describing each drawing. The terms first, second, etc. may be used to describe various components, but the components are not limited by the terms. The terms are used only for the purpose of distinguishing one component from another.

For example, the term "and / or" includes any combination of a plurality of related listed items or any of a plurality of related listed items.

Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs.

Terms such as those defined in commonly used dictionaries are to be interpreted as having a meaning consistent with the meaning in the context of the relevant art and are to be construed as ideal or overly formal in meaning unless explicitly defined in the present application Should not.

The specific terminology used in the following description is provided to aid understanding of the present invention, and the use of such specific terminology may be changed into other forms without departing from the technical idea of the present invention.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the structure of a double closure clamping structure according to the present invention will be described in detail with reference to the accompanying drawings.

3 is a cross-sectional view showing another embodiment of the double claw clamp airtightness maintaining structure of FIG. 2, and FIG. 4 is a cross-sectional view of the double claw clamp airtightness maintaining structure of FIG. Sectional view showing still another embodiment of the airtightness maintaining structure.

2, the present invention provides a flange 120 including a first flange 110 and a second flange 120 installed in the first pipe 1 and the second pipe 2, A centering ring 200 is provided between the first flange 110 and the second flange 120 to maintain airtightness and a centering ring 200 located between the first flange 110 and the second flange 120, Or the center ring 200 and an O-ring 300 is installed in the lower part of the centering ring 200. The clamp 400 is coupled to the outside of the flange 100 to press the first flange 110 and the second flange 120 in tight contact with each other, .

The flange 100 is composed of a first flange 110 installed at one side of the first pipe 1 and a second flange 120 installed at a side of the second pipe 120.

The first flange 110 is formed in a first flange body 111 symmetrical with the second flange 120 and coupled to the clamp 400. A clamp 400 A first step 113 is formed on one side of the first flange body 111 so that the centering ring 200 can be installed on the first flange body 111, And a first installation groove 116 formed on a side surface of the first flange body 111 so that the pipe 1 is inserted and joined to the inside.

The second flange 120 is formed symmetrically with the first flange 110 to constitute a second flange body 121 to be coupled to the clamp 400. A clamp is formed on the upper side of the second flange body 121, The second flange 122 is formed on the second flange body 121 so that the O-ring 300 can be installed on the second flange body 121. The second flange 122 is coupled to the first flange body 121, A second step 123 formed at a side of the second flange body 121 so as to be coupled to the inside of the second pipe 2, 127).

The flanges 110 and 120 are not limited to FIG. 2 but may be configured differently as shown in FIG.

The flange 100 of FIG. 3 includes a first flange 110 provided at one side of the first pipe 1 and a second flange 120 provided at a side of the second pipe 2.

The first flange 110 is formed in a first flange body 111 formed to be symmetrical with the second flange 120 and coupled with the clamp 400. The first flange 110 has a first flange 110, A locking protrusion 112 is formed on a side surface of the first flange body 111 and a first coupling groove 114 is formed on one surface of the first flange body 111 so that the centering ring 200 can be installed, The first installation groove 113 is formed at the lower side of the side surface of the first flange body 111 so that the first pipe 1 can be drawn in and coupled to the inside.

The second flange 120 is formed to be symmetrical with the first flange 110 to form a second flange body 121 to be coupled to the clamp 400. A clamp 400 And a second coupling protrusion 122 is formed on the first flange body 121 so as not to be separated from the second flange body 121. The second flange body 121 is formed with a second coupling protrusion 122, And a second installation groove 127 is formed at the lower side of the side surface of the second flange body 121 so that the second pipe 2 is inserted and joined to the inside.

The flange configured as described above is not limited to Fig. 3, and can be configured as shown in Fig.

4, the flange 100 of the present invention includes a first flange 110 installed at one side of the first pipe 1 and a second flange 120 installed at a side of the second pipe 2 .

The first flange 110 is formed in a first flange body 111 formed to be symmetrical with the second flange 120 and coupled with the clamp 400. A clamp is formed on the upper side of the first flange body 111, The first flange body 121 and the second flange body 121 are formed with a fitting groove on one surface of the first flange body 111 so as to be engaged with the second flange body 121, And a first installation groove 116 formed at the lower side of the side surface of the first flange body 111 so as to be inserted into the pipe 1 and to be coupled therewith.

The second flange 120 forms a second flange body 121 which is symmetrical with the first flange 110 and engages with the clamp 400. The second flange body 121 is provided with a clamp The second engaging protrusion 122 is formed so as not to be separated from the second flange body 111 by being coupled with the first flange body 111. The second engaging protrusion 122 is formed on one surface of the second flange body 111 so as to engage with the fitting recess 115 formed in the first flange body 111 And a mounting groove 126 is formed at one side of the second flange body 121 at a position above the coupling protrusion 125 so that the centering ring 200 can be installed, And a second installation groove 127 formed at a lower side of the side surface of the second flange body 121 so as to be inserted into and coupled to the inside of the second flange body 121.

The centering ring 200 is composed of an inner centering ring 210 and an outer centering ring 220. The inner centering ring 210 has a cross section so as to maintain the airtightness between the first flange 110 and the second flange 120 Square or " ridge " shape.

The outer centering ring 220 is coupled to the upper portion of the O-ring 300 and is installed between the first flange 110 and the second flange 120 to maintain airtightness.

The clamp 400 is formed in a ring shape and has a plurality of fastening grooves 112 for coupling with the first fastening protrusion 112 of the first flange 110 and the second fastening protrusion 122 of the second flange 120 A clamp body 410 having a plurality of pressing protrusions 411 formed on one side of the coupling groove 412 to press the side surfaces of the first flange 110 and the second flange 120, And a clamping body 420 having a screw is formed on an outer circumference of the clamp body 410. The clamp body 410 presses the outer surface of the first flange 110 and the outer surface of the second flange 120, And a bolt 430 installed in the fastening hole 420 so that the fastening hole 420 can be formed.

In the process of installing the double closure clamping structure of the present invention between the first pipe 1 and the second pipe 2, the first pipe 1 is connected to the first clamp 1 The first pipe 1 and the first flange 110 are coupled to each other through welding in a state where the first pipe 1 is installed in the first installation groove 116 of the first pipe 1.

The second flange 120 is joined to the second pipe 2 by welding in a state where the second pipe 2 is installed in the second installation groove 127 like the coupling of the first flange 110.

In the state where the first flange 110 and the second flange 120 are installed in the first pipe 1 and the second pipe 2, the first flange 110 and the second flange 120 The centering ring 210 of the centering ring 200 is positioned at the upper portion of the first step 113 and the second step 123 and the centering ring 200 of the centering ring 200 is positioned at the outer centering 220 are positioned between the first flange 110 and the second flange 120.

The oil is installed between the inner center ring 210 and the outer center ring 220 in a state where the center ring 200 is installed.

A clamp 400 is provided outside the first flange 110 and the second flange 120 in a state where the centering ring 200 and the O-ring 300 are installed between the first flange 110 and the second flange 120 The first and second locking projections 112 and 122 of the first flange 110 and the second flange 120 are fastened in the fastening groove 412 of the clamp 400. At this time, The outer surface of the first flange 110 and the outer surface of the second flange 120 are pressed by the pressing protrusion 411 through the bolts 430 provided in the hole 420 so that the clamp 400 is tightened.

The first flange 110 and the second flange 120 are pressed against the first flange 110 and the second flange 120 while the centering ring 200 and the O- The first step 113 and the second step 123 are tightly adhered to each other to maintain airtightness.

Since airtightness is maintained by the center ring 200 and the O-ring 300 which are formed on the outer sides of the first step 113 and the second step 123 and are conveyed to the first pipe 1 and the second pipe 2 Prevent gas from leaking.

Since the first flange 110 and the second flange 120 are directly brought into contact with each other, there is no fume and no gas or gas moving inside the flange 100 Thereby preventing accumulation of sludge contained in the powder. Further, there is an advantage that the flow velocity is prevented from being slowed down because the vortex phenomenon caused by the step difference does not occur.

In addition, the flange 100 coupling surface is precisely machined to provide sealing, thereby increasing the service life of the O-ring 300.

Although the installation procedure of the double claw clamp airtightness maintaining structure of the present invention has been described with reference to FIG. 2, the configurations shown in FIGS. 3 and 4 are also installed as described above, and the advantages described above can be obtained.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, It will be understood that various modifications and changes may be made thereto without departing from the scope of the present invention.

1: first piping 2: second piping
100: flange 110: first flange
111: first flange body 112: first stopping projection
113: first step 114: first coupling groove
115: fitting groove 116: first installation groove
120: second flange 121: second flange body
122: second stopping mechanism 123: second step
124: second engaging groove 125: engaging projection
126: seat groove 127: second seat groove
200: Centering 210: Inner centering
220: Outside centering 300: O ring
400: Clamp 410: Clamp body
411: pressing projection 412: fastening groove
420: tightening ball 430: bolt

Claims (6)

In the double claw clamp airtightness structure,
A flange 110 including a first flange 110 provided on one side of the first pipe 1 and a second flange 120 provided on a side of the second pipe 2 so that the surface and the surface can be closely contacted to maintain airtightness. 100);
A centering ring 200 installed between the first flange 110 and the second flange 120 to maintain airtightness;
An O-ring 300 positioned between the first flange 110 and the second flange 120 and installed between the centering rings 200 or inside the centering ring 200;
And a clamp 400 fastened to the outer side of the flange 100 by a pressing method so that the first flange 110 and the second flange 120 closely contact with each other to maintain airtightness,
The first flange 110 has a first flange body 111 formed to be symmetrical with the second flange 120 and coupled to the clamp 400 and a clamp 400 A first coupling protrusion 112 formed on one surface of the first flange body 111 so that the centering ring 200 can be installed on the first flange body 111, And a first mounting groove 116 formed on a side surface of the first flange body 110 so as to be coupled to the inside of the first flange body 110,
The second flange 120 includes a second flange body 121 symmetrical to the first flange 110 and coupled to the clamp 400 and a second flange body 121 coupled to the clamp 400, And a second coupling protrusion 122 formed on an upper side of the second flange body 121 so as to be symmetrical with the first coupling groove 114 so that the centering ring 200 can be installed. And a second installation groove 127 formed in a side surface of the second flange body 121 so that the second pipe 2 is inserted and coupled to the inside,
A first step 113 and a second step 123 are formed in the first flange 110 and the second flange 120 to form a U shape,
The first and second coupling grooves 114 and 124 are connected to the side of the U shape so that the centering 200 is inserted into the first coupling groove 114 and the second coupling groove 124, So that the sludge is prevented from accumulating by preventing the step between the first flange (110) and the second flange (120) from occurring.
delete delete delete The method according to claim 1,
The centering 200 includes an inner centering ring 210 and an outer centering ring 220,
The inner centering ring 210 is disposed under the O-ring 300 so as to maintain the airtightness between the first flange 110 and the second flange 120 and is installed at the first and second stages 113 and 123 ,
Wherein the outer centering ring 220 is coupled to the upper portion of the O-ring 300 and installed between the first flange 110 and the second flange 120.
6. The method of claim 5,
The inner centering ring 210
Wherein the upper portion is formed in a recessed shape in a rectangular shape or in a shape of a " zigzag " shape.
KR1020150079389A 2015-06-04 2015-06-04 Maintain the confidentiality of the double claw clamp structure KR101670924B1 (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210000161U (en) 2019-07-11 2021-01-20 한효신 Flange for vacuum piping and connection structure for vacuum piping
KR20210007467A (en) 2019-07-11 2021-01-20 한효신 Double claw clamp for vacuum piping
CN115013738A (en) * 2022-06-09 2022-09-06 西安航天神舟建筑设计院有限公司 Natural gas line leakage detection device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009162252A (en) * 2007-12-28 2009-07-23 Mitsubishi Heavy Industries Food & Packaging Machinery Co Ltd Pipe joint

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009162252A (en) * 2007-12-28 2009-07-23 Mitsubishi Heavy Industries Food & Packaging Machinery Co Ltd Pipe joint

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210000161U (en) 2019-07-11 2021-01-20 한효신 Flange for vacuum piping and connection structure for vacuum piping
KR20210007467A (en) 2019-07-11 2021-01-20 한효신 Double claw clamp for vacuum piping
CN115013738A (en) * 2022-06-09 2022-09-06 西安航天神舟建筑设计院有限公司 Natural gas line leakage detection device

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