KR101670051B1 - Apparatus and method for treating - Google Patents

Abstract

The present invention relates to a processing apparatus. A processing apparatus according to an embodiment of the present invention includes a loader unit, a dumping unit, a processing unit, a transport unit, an inverting unit, a high frequency ID reader, and a high frequency identification reader. The high frequency identification reader reads the high frequency identifier attached to the subject to judge whether the subject is in need of inversion. If the inversion is necessary, the subject before the subject process in the processing unit is inverted by the inversion unit. In addition, the objects to be processed are loaded on a process tray provided with a heat-resistant material and processed in the processing unit, so that more objects can be processed at a time.

Description

[0001] APPARATUS AND METHOD FOR TREATING [0002]

The present invention relates to a processing apparatus and a method for plasma-treating an object to be processed.

Semiconductor devices are very small and very sensitive to external impacts, so they are packaged in a storage container called a tray, in which a plurality of pockets are formed in which a semiconductor product is housed on a top surface in a mostly flat rectangular shape without being transported individually. The tray is moved to the place of the next process by the tray transfer facility.

Conventionally, the tray transporting system that has been practically used has transported the tray on which the semiconductor package chip is loaded to the simple goods transporting facility. This apparatus sequentially transports the lowermost tray from an onloader stacker in which a plurality of trays on which semiconductor packages are stacked is checked to see if the semiconductor packages are positioned in the correct direction and then transports them.

Generally, trays are made of plastic material and have poor heat resistance or durability. Particularly, when semiconductor chips are subjected to process processing in high-temperature and high-pressure processing units, there is a problem that it is difficult for trays to withstand such environmental conditions. Also, when the semiconductor chips loaded in the tray are carried in the up and down direction in the course of the transportation, there is a case that the direction is rotated for the process processing.

The present invention provides a processing apparatus and method capable of improving process efficiency of objects to be processed by providing a process tray having high heat resistance during processing of objects to be processed by dividing a tray on which objects to be processed are loaded into a transfer tray and a process tray The purpose.

Another object of the present invention is to provide a processing apparatus and method capable of reversing the objects to be processed so that the objects to be processed can be processed smoothly when the objects to be processed are carried in the reverse direction, .

The problems to be solved by the present invention are not limited thereto, and other matters not mentioned can be clearly understood by those skilled in the art from the following description.

The present invention provides a processing apparatus. According to one embodiment, the processing apparatus includes: a loader unit that loads a conveyance tray on which a plurality of the objects to be processed are loaded, into a take-in unit; A dumping unit for picking up the objects to be processed from the conveyance tray and performing dumping on the process tray; A processing unit in which the process tray loaded with the objects to be processed is brought in and processing is performed on the objects to be processed; And a transfer unit for transferring the transfer tray or the process tray between the carry-in unit, the dumping unit, and the processing unit.

The conveyance tray and the process tray are formed of materials different from each other.

The process tray is formed of a material having heat resistance higher than that of the conveyance tray.

The process tray is formed of a ceramic material, and the transport tray is formed of a plastic material.

The loader unit comprising: a main loader for picking up the transport tray and bringing the transport tray into the standby unit; a sub-loader for picking up the cover member on the transport tray and positioning the cover member on one side of the standby unit; And a push member for pushing the tray from the standby unit to the carry-in unit.

The dumping unit includes a first dumping support on which the transfer tray is placed, a second dumping support on which the process tray is placed, and a dumping member for transferring the objects between the transfer tray and the process tray.

The processing unit includes a processing chamber in which a space is formed, a support member that is located inside the processing chamber, supports the processing tray, and a plasma supplying unit that supplies plasma into the processing chamber.

The transfer unit includes a first transfer unit for transferring the transfer tray between the transfer unit and the dumping unit, and a transfer tray for transferring the processed transfer materials to the transfer unit, And a third transfer unit for transferring the process tray between the dumping unit and the processing unit.

And the second transport unit may transport the transporting tray from the dumping unit to the process tray outside the dumping unit.

And a waiting unit in which the transporting tray taken out from the dumping unit temporarily stays after the dumping to the process tray is completed in the dumping unit.

And an unloading unit for unloading the conveyance tray from which the processing of the processing units has been completed to the outside of the window,

And an inverting unit for inverting the objects to be processed.

The carrying unit, the reversing unit and the dumping unit are sequentially arranged along the first direction.

The processing unit and the dumping unit are disposed along a second direction perpendicular to the first direction when viewed from above.

The conveyance tray includes: a first conveyance tray on which the objects to be processed are loaded and conveyed; Wherein the reversing unit includes a reversing support on which the first transporting tray is placed, a buffer support on which the second transporting tray is placed, and a second transporting tray on which the objects are transported, And an inversion driving member for simultaneously rotating the first transport tray and the second transport tray placed on the first transport tray so as to be transported from the first transport tray to the second transport tray.

A RFID (Radio Frequency Identification) (RFID) type indicating the type of the object to be processed placed on the first transport tray and detachably provided to the first transport tray; And a high frequency identification reader for reading the high frequency identifier, wherein the process tray includes: a first process tray on which an object to be inverted in the inverting unit is loaded; And a second process tray on which an invertible unprocessed object in the inverting unit is loaded, wherein the high frequency identification reader is configured to provide the first process tray to the second dumping support in accordance with the read result of the high frequency identification reader Or whether to provide a second process tray and whether to bring the first transport tray into the inverting unit.

The present invention also provides a method of treatment. According to one embodiment, a processing method is a method of processing an object to be processed, the method comprising: a carrier tray loading step of loading a carrier tray loaded with a plurality of the objects to be processed; A workpiece dumping step of picking up the objects to be processed from the conveyance tray and loading them on a process tray; And an object processing step in which the process tray loaded with the objects to be processed is brought into the processing unit and processing is performed on the objects to be processed.

The conveyance tray and the process tray are formed of different materials.

The process tray is formed of a material having heat resistance higher than that of the conveyance tray.

The process tray is formed of a ceramic material, and the transport tray is formed of a plastic material.

And an object reversing step of reversing the object to be processed before the object dumping step.

Wherein the transport tray includes a first transport tray on which the objects to be processed are loaded and carried before the process step and a second transport tray on which the objects to be processed are not loaded and which are empty, A conveyance tray preparation step in which the conveyance tray is positioned on the inverting support and the second conveyance tray is positioned on the buffer support, a conveyance tray placement step in which the second conveyance tray is disposed on the first conveyance tray, And a conveyance tray rotating step of simultaneously rotating the tray and the second conveyance tray placed on the first conveyance tray by 180 degrees.

The process tray includes: a first process tray on which an object to be inverted in the inverting unit is loaded; And a second process tray on which an object to be inverted which is not required to be reversed in the reversal unit is loaded, wherein the object inversion step can be selectively performed as needed, and before the transfer tray carrying step, Further comprising the step of determining whether or not to execute the process, wherein in the process of determining an object to be processed, the process tray is provided to the first process tray in the object dumping step when the inversion is necessary, And if the inversion is unnecessary, the process tray is provided to the second process tray in the dredging process for the object to be processed, and the process for reversing the object is not performed.

The object to be processed is determined by reading a high frequency identification tag (RFID), which is detachably attached to the first transport tray, indicating the type of the object to be processed placed on the first transport tray, using a high frequency identification reader .

The processing apparatus and method according to the embodiment of the present invention can improve the process efficiency of the objects by providing a process tray having high heat resistance during processing of the objects by making the tray on which the objects to be processed are stacked to the transfer tray and the process tray have.

Further, the processing apparatus and method according to the embodiment of the present invention can reverse the objects to be processed so that the objects to be processed loaded on the transport tray can be smoothly processed when the objects are turned upside down as opposed to the direction in which the processing is to be performed .

1 is a plan view schematically illustrating a processing apparatus according to an embodiment of the present invention.
2 is a cross-sectional view showing a transporting tray transported by the loader unit of Fig.
Fig. 3 is a plan view schematically showing a transporting tray transported by the processing apparatus of Fig. 1; Fig.
Fig. 4 is a plan view schematically showing the dumping unit of Fig. 1;
Figure 5 is a cross-sectional view of the processing unit of Figure 1;
Fig. 6 is a perspective view schematically showing the inverting unit of Fig. 1;
7 is a plan view schematically showing the carry-out unit of Fig.
8 is a flowchart sequentially showing the processing method of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. The embodiments of the present invention can be modified in various forms, and the scope of the present invention should not be construed as being limited to the following embodiments. This embodiment is provided to more fully describe the present invention to those skilled in the art. Thus, the shape of the elements in the figures has been exaggerated to emphasize a clearer description.

Hereinafter, a processing apparatus 10 according to an embodiment of the present invention will be described.

1 is a plan view schematically showing a processing apparatus according to an embodiment of the present invention. 1, the processing apparatus 10 includes a loader unit 1000, a dumping unit 2000, a processing unit 3000, a transfer unit 4000, a reversing unit 5000, a waiting unit 6100, An output unit 6200, an output unit 6400, a high frequency identifier 8100, and a high frequency identification reader 8200. The dumping unit 200, the take-out unit 6400, the inversion unit 5000, and the take-in unit 6200 are sequentially arranged along one direction. The direction in which the dumping unit 200, the take-out unit 6400, the inverting unit 5000 and the take-in unit 6200 are arranged is referred to as a first direction 1, and a direction perpendicular to the first direction 1 One direction is referred to as a second direction (2). The dumping unit 2000 and the processing unit 3000 are disposed along the second direction 2.

The loader unit 1000 loads the transfer tray 7200 on which a plurality of objects to be processed 20 are loaded into the transfer unit 6200. [ The loader unit 7200 moves along the rail provided on the upper side of the processing apparatus 10 in parallel with the first direction in the longitudinal direction and conveys the conveyance tray 7200 or moves the cover member on the conveyance tray 7200 . The loader unit 1000 includes a main loader 1100, a sub-loader 1200, and a push member 1300.

2 is a cross-sectional view showing a transporting tray 7200 carried by the loader unit 1000 of Fig. Referring to FIG. 2, a plurality of conveyance trays 7200 are vertically stacked and conveyed by the loader unit 100.

The upper part of the conveyance tray 7200 is covered by the cover member 7230. [ The cover member 7230 protects the objects to be processed 20 placed on the uppermost conveyance tray 7200 from external impact or the like.

A radio frequency identification device (RFID) 8100 may be provided between the transport tray 7200 and the cover member 7230.

Referring again to FIG. 1, the main loader 1100 picks up the transport tray 7200 from the entrance 6600 and brings it into the standby unit 6100. The main loader 1100 also transports the transport tray 7200 taken out from the take-out unit 6400 to the entrance port 6600.

The sub loader 1200 picks up the cover member 7230 on the conveyance tray 7200 to be loaded and places it on one side 6500 of the standby unit 6100. The sub loader 1200 picks up the cover member 7230 placed on one side 6500 of the standby unit 6100 and covers the upper part of the conveyance tray 7200 taken out of the carry-out unit 6400 with the cover member 7230 .

The push member 1300 pushes the conveyance tray 7200 from which the cover member 7230 has been removed from the standby unit 6100 to the take-in unit 6200. When a plurality of conveyance trays 7200 are provided in the standby unit 6100 so as to be stacked on each other, the push member 1300 sequentially pushes the conveyance tray 7200 from the lower conveyance tray 7200 to the conveyance unit 6200.

The dumping unit 2000 performs dumping to pick up the objects 20 from the conveyance tray 7200 and load the process tray 7100. [ The dumping unit 2000 also performs dumping to pick up the objects to be processed 20 that have been processed by the processing unit 3000 from the process tray 7100 and load them on the transport tray 7200. [ The dumping unit 200 includes a first dumping support 2100, a second dumping support 2200, and a dumping member 2300.

3 is a plan view schematically showing a conveyance tray 7200 on which a subject 20 to be processed in the processing apparatus 10 of Fig. 1 is placed. Referring to Fig. 3, the conveyance tray 7200 is provided in a substantially rectangular plate shape. A plurality of objects to be processed 20 can be placed on the upper part of the conveyance tray 7200. The objects to be processed 20 are arranged in a plurality of rows and columns on a carrier tray 7200. The transfer tray 7200 supports a plurality of objects to be processed 20 during transfer of the objects to be processed 20 between the units of the processing apparatus 10 except for the processing unit 300.

The process tray 7200 has a structure similar to that of the transport tray 7200. The process tray 7200 is brought into and out of the processing unit 3000 with the plurality of objects to be processed 20 placed thereon.

The conveyance tray 7200 and the process tray 7100 are provided with materials different from each other. The process tray 7100 is provided with a material having heat resistance higher than that of the conveyance tray 7200. For example, the process tray 7100 may be provided with a ceramic material, and the transfer tray 7200 may be provided with a plastic material. Unlike the conventional processing apparatus in which only the object to be processed is processed in the processing unit, the processing apparatus 10 of the present invention is loaded in a plurality of process trays 7100 provided with a material having high heat resistance and processed in the processing unit 300 , A larger amount of the workpiece 20 can be processed at the same time as compared with the conventional processing apparatus.

4 is a perspective view showing the dumping unit 2000 of FIG. Referring to FIG. 4, the first dumping support 2100 is provided with a transport tray 7200. A process tray (7100) is placed on the second dumping support (2200). The dumping member 7300 transfers the objects to be processed 20 between the transfer tray 7200 and the process tray 7200. For example, the dumping member 7300 reciprocates in parallel with the first direction 1 and transports the objects to be processed 20. The transfer tray 7200 placed on the first dumping support 2100 is moved from the first position 2110 to the second position 2120 and the process tray 7100 placed on the second dumping support 2200 is moved to the third position 2210 ) To the fourth position (2220) along the second direction (2) while the dumped member (7300) is placed on the object to be treated (20) 20) to be transported.

Referring again to FIG. 1, the processing apparatus 10 may further include a standby portion 6300. When the objects to be processed 20 of the plurality of conveyance trays 7200 are dumped sequentially to the process tray 7100 for each conveyance tray 7200, the conveyance tray 7200 first dumped is conveyed to the conveyance tray 7200 dumped later, The dumping unit 6300 can wait until the dumping of the dumping unit 6300 is completed. For example, when the two transfer trays 7200 are sequentially dumped, the transfer tray 7200 dumped at a later time during processing by the processing unit 3000 in the processing unit 3000 is transferred to the first dumping support 2100, And the first dumped conveyance tray 7200 waits at the standby portion 6300 until the dumping of the dumped conveyance tray 7200 is completed. After the processing in the processing unit 3000 is completed, the objects to be processed 20 are dumped from the process tray 7200 to the two conveyance trays 7200 in the reverse order to the case of dumping to the process tray 7100. [ The conveyance of the conveyance tray 7200 between the first dumping support 2100 and the standby portion 6300 can be performed by the second conveyance unit 4200. [ Thus, the two treating trays 7200 and the treating objects 20 can be dumped together and the processing in the treating unit 3000 can be performed.

5 is a cross-sectional view showing one embodiment of the processing unit 3000 of FIG. Referring to FIG. 5, in the processing unit 3000, a process tray 7100 on which the objects to be processed 20 are loaded is loaded and processing for the objects to be processed 20 is performed. The processing unit 3000 may be a remote type plasma processing unit.

The processing unit 3000 includes a process chamber 3100, a support unit 3200, a showerhead 3300, and a plasma supply unit 3400.

The process chamber 3100 provides a space in which process processing is performed. The process chamber 3100 has a body 3110 and a seal cover 3120. The upper surface of the body 3110 is opened and a space is formed therein. The side wall of the body 3110 is provided with an opening (not shown) through which a process tray 7100 in which a plurality of objects to be processed 20 are placed is placed at an upper portion thereof, and the opening is opened and closed as a slit door And can be opened and closed by a member. The opening and closing member closes the opening while the processing of the objects 20 in the processing chamber 3100 is performed and the opening of the processing tray 3100 when the processing tray 3100 is brought into the processing chamber 3100 and outside the processing chamber 3100 Open the opening when it is unloaded.

An exhaust hole 3111 is formed in the lower wall of the body 3110. The exhaust hole 3111 is connected to the exhaust line 3112. The internal pressure of the process chamber 3100 is controlled through the exhaust line 3112 and the reaction byproducts generated in the process are discharged to the outside of the process chamber 3100.

The sealing cover 3120 engages with the upper wall of the body 3110 and covers the open upper surface of the body 3110 to seal the inside of the body 3110. The upper end of the sealing cover 3120 is connected to the plasma supply part 3400. A diffusion space 3121 is formed in the sealing cover 3120. The diffusion space 3121 is gradually wider as it gets closer to the shower head 3300. For example, the diffusion space 3121 may have an inverted funnel shape.

The support unit 3200 is located within the process chamber 3100. On the upper surface of the supporting unit 3200, a process tray 7100 on which the objects to be processed 20 are placed is placed. A cooling passage (not shown) through which the cooling fluid circulates may be formed inside the support unit 3200. The cooling fluid circulates along the cooling flow path and cools support unit 3200 and process tray 7100. The support unit 3200 may be powered by a bias power source 3210 to adjust the degree of processing of the workpiece 20 by the plasma. The power applied by the bias power source 3210 may be a radio frequency (RF) power source. The support unit 3200 forms sheath by the electric power supplied from the bias power source 3210, and high-density plasma is formed in the region to improve the process capability.

The shower head 3300 is coupled to the upper wall of the body 3110. The shower head 3300 may be in the form of a disk and arranged in parallel with the upper surface of the support unit 3200. The shower head 3300 may be provided with an aluminum material whose surface is oxidized. Discharge holes 3310 are formed in the shower head 3300. The distribution holes 3310 may be formed at regular intervals on the circumference of the concentric circle for uniform radical supply. The plasma diffused in the diffusion space 3121 flows into the distribution holes 3310. At this time, charged particles such as electrons or ions are confined in the showerhead 3300, and neutral particles, such as oxygen radicals, which are not charged, are supplied through the distribution holes 3310 to the objects to be treated 20. Further, the showerhead 3300 may be grounded to form a passage through which electrons or ions move.

A plasma supply 3400 generates a plasma and supplies it into the process chamber 3100. A plasma supply 3400 may be provided on top of the process chamber 3100. The plasma supply 3400 includes an oscillator 3410, a waveguide 3420, a dielectric tube 3430 and a process gas supply 3440.

The oscillator 3410 generates an electromagnetic wave. The waveguide 3420 connects the oscillator 3410 and the dielectric tube 3430 and provides a path through which the electromagnetic waves generated in the oscillator 3410 are transferred into the dielectric tube 3430. The process gas supply unit 3440 supplies the process gas into the dielectric pipe 3430. The process gas may include oxygen and nitrogen. The process gas may also include a fluorine-based gas. The process gas supplied into the dielectric tube 3430 is excited into a plasma state by electromagnetic waves. The plasma flows into the diffusion space 3121 through the dielectric tube 3430.

1, the transfer unit 4000 carries the transfer tray 7200 or the process tray 7100 between the transfer unit 6200, the dumping unit 2000 and the processing unit 3000. [ The transfer unit 4000 includes a first transfer unit 4100, a second transfer unit 4200, and a third transfer unit 4300.

The first transport unit 4100 transports the transport tray 7200 while moving along the rails provided in the upper portion of the processing apparatus 10 in the longitudinal direction thereof in parallel with the first direction. The first transfer unit 4100 transfers the wafer W between the transfer unit 5000 and the transfer unit 5000 and the transfer unit 5000 between the transfer unit 5000 and the dumping unit 2000, And the transport tray 7200 is transported between the reversing unit 5000 and the transporting unit 6400. The first transfer unit 4100 is provided between the transfer unit 6200 and the dumping unit 2000 and between the dumping unit 2000 and the transfer unit 6400 when the object to be processed 20 does not need to be reversed in the reversing unit 5000. [ The transport tray 7200 is transported.

The second conveyance unit 4200 conveys the conveyance tray 7200 while moving along the rail provided on the upper side of the processing apparatus 10 so that its longitudinal direction is parallel to the first direction. The second transfer unit 4200 is disposed sequentially with the first transfer unit 4100 along the second direction. The second transfer unit 4200 transfers the transfer tray 7200 between the dumping unit 2000 and the standby portion 6300 and between the dumping unit 2000 and the transfer unit 6400. The transfer tray 7200 on which the processing of the processing objects in the processing unit 3000 has been completed can be returned to the unloading unit 6400 located outside the dumping unit 2000. [ The second transfer unit 6400 can also transfer the transfer tray 7200 that has been dumped from the dumping unit 2000 to the process tray 7100 to the standby portion 6300 located outside the dumping unit 2000 .

The third conveying unit 4300 moves along the rails provided in the upper part of the processing apparatus 10 so that the longitudinal direction thereof is parallel to the second direction, and conveys the process tray 7100. The third transfer unit 4300 transfers the process tray 7100 between the dumping unit 2000 and the processing unit 3000.

6 is a perspective view schematically showing the reversing unit 5000 of FIG. Referring to Figs. 1 and 6, the inversion unit 5000 inverts the objects to be processed 20 up and down. The inverting unit 5000 includes an inverting support 5100, a buffer support 5200, and a driving member 5300.

The conveyance tray 7200 includes a first conveyance tray 7210 and a second conveyance tray 7220.

The conveyance tray 7200 is provided with a first conveyance tray 7210 in which the objects to be processed 20 before being processed in the processing unit 3000 are loaded and brought into the processing apparatus 10 and the first conveyance tray 7210 in which the objects to be processed are not loaded And a second conveyance tray 7220 that supports the second conveyance tray 7220.

The inverted support tray 5100 is provided with the first conveyance tray 7210 that is conveyed therein. The buffer support 7220 is provided with a second transport tray 7220 provided in an empty state. The second conveyance tray 7220 is picked up by the first conveyance unit 4100 and can be placed on the first conveyance tray 7210 such that the side on which the subject 20 is received faces the first conveyance tray 7210 have.

The inversion driving member 5300 is placed on the first transport tray 7210 and the first transport tray 7210 so that the objects to be processed 20 are transferred from the first transport tray 7210 to the second transport tray 7220, The second transport tray 7220 is rotated 180 degrees at the same time. According to one embodiment, the reverse drive member 5300 includes a driver 5310, a drive shaft 5320, and a fixed member 5330. The driver 5310 generates a driving force for inverting the first conveyance tray 7210 and the second conveyance tray 7220. The driving shaft 5320 transmits the driving force generated by the driver 5310 to the fixing member 5330. The fixing member 5330 fixes the first and second conveyance trays 7210 and 7220 to each other and supports the first conveyance tray 7210 and the second conveyance tray 7210 using the driving force transmitted from the drive shaft 5320 7220) by 180 degrees. Alternatively, the inversion unit 5000 can vertically invert the workpiece 20 by various methods.

7 is a plan view schematically showing the carry-out unit 6400 of Fig. Referring to Figs. 1 and 7, the unloading unit 6400 unloads the conveyance tray 7200 on which the processing of the objects to be processed 20 in the processing unit 3000 has been completed, to the outside of the window. The carrying-out unit 6400 is provided such that its longitudinal direction is parallel to the second direction. The carry-out unit 6400 moves the carry tray 7200 along the second direction. Therefore, the carry-out unit 6400 can be moved to a position where the first transfer unit 4100 can pick up the transfer tray 7200, a position where the second transfer unit 4200 can pick up the transfer tray 7200, The conveyance tray 7200 can be transported to a position where the conveyance tray 1000 can pick up the conveyance tray 7200. For example, the transport tray 7200 transported from the dumping unit 2000 to the transport unit 6400 by the first transport unit 4100 or the second transport unit 4200 is transported by the transport unit 6400 to the loader unit Is moved in parallel to the second direction to a position at which the conveyance tray 1000 can pick up the conveyance tray 7200. Thereafter, the carrier tray 7200 is carried out of the apparatus by the loader unit 1000. [

The process tray 7100 includes a first process tray 7110 and a second process tray 7120. The first process tray 7110 is a process tray 7100 on which an object to be processed 20 to be inverted in the inversion unit 5000 is loaded. The second process tray 7120 is a process tray 7100 on which the object to be processed 20 to be reversed in the reversing unit 5000 is loaded.

Referring again to FIGS. 1 and 2, the high frequency identifier 8100 indicates whether or not the objects to be processed 20 placed on the first transport tray 7210 need to be inverted in the reversing unit 5000. The high frequency identifier 8100 is detachably provided to the first conveyance tray 7210. For example, the high frequency identifier 8100 is attached to the lower surface of the cover member 7230 and picked up together with the cover member 7230 by the sub-loader 1200 before bringing it into the take-in unit 6200, As shown in Fig.

The high frequency identification reader 8200 is provided at the entrance 6600 to read the high frequency identifier 8100 attached to the first transport tray 7210 before being brought into the standby unit. The high frequency identification reader 8200 determines whether to provide the first process tray 7110 or the second process tray 7120 to the second dumping support 2200 and whether to provide the second process tray 7120 to the inversion unit 5000 1 conveyance tray 7210 is to be carried. When the type of the process tray 7100 is determined, the first process tray 7110 or the second process tray 7120 is placed on the second dumping support by a process tray transfer unit (not shown) from the outside depending on the result.

For ease of explanation of the processing method of the present invention, a processing method according to an embodiment of the present invention will be described using the processing apparatus 10 of FIG.

8 is a flowchart sequentially showing the processing method of the present invention. Referring to FIGS. 1 and 8, the processing method includes an object-to-be-processed determination step S1 for determining whether the object to be processed 20 is required to be inverted, a transfer destination tray 7200 loaded with a plurality of objects to be processed 20 (Step S3) of picking up the objects to be processed 20 from the transport tray 7200 and loading the process tray 7100 onto the process tray 7100, (S4), an object treatment step S5 in which a treatment for the objects to be treated 20 is performed in the treatment unit 3000, and an object take-out step S6.

In the object-to-be-processed determination step S1, a high-frequency identifier (RFID) 8100, which indicates the type of the object 20 to be placed on the first carrier tray 7210 and is removably provided on the first carrier tray 7210, By using the reader 8200, it is determined whether or not the inversion of the subject 20 is necessary. In the object-to-be-processed determination step S1, if inversion is required, the process tray 7100 is provided to the first process tray 7110 in the object dumping step S4, the object reversing step S3 is performed, The process tray 7100 is supplied to the second process tray 7120 in the object dumping step S4 and the object inversing step S3 is controlled not to be performed.

In the conveying tray carrying-in step S2, the main loader 1100 conveys the first carrying tray 7210 provided at the entrance 6600 to the waiting unit 6100. The sub loader 1200 picks up the cover member 7230 covering the upper portion of the first transport tray 7210 placed in the standby unit 6100 and places it on one side 6500 of the standby unit. In this case, the high frequency identifier 8100 is picked up together with the cover member 7230 and placed on one side 6500 of the standby unit. Thereafter, the push member 1300 pushes the first conveyance tray 7210 from the waiting unit 6100 to the take-in unit 6200. The push member 1300 sequentially moves the first conveyance tray 7210 from the lower conveyance tray 7210 to the conveyance unit 7200 from the waiting unit 6100 to the conveyance unit 7200. In the case where the plurality of first conveyance trays 7210 are stacked, 6200).

The processing object inversion step (S3) can be selectively executed as needed. The processing object inversion step S3 is a step of preparing a transfer tray in which the first transfer tray 7210 is positioned on the inverting support table 5100 and the second transfer tray 7220 is placed on the buffer support table 5200, And a second conveyance tray 7220 placed on the first conveyance tray 7210 and the second conveyance tray 7220 disposed on the first conveyance tray 7210 are simultaneously rotated 180 degrees And rotating the conveying tray.

In the transport tray preparation step, when the workpiece 20 needs to be inverted, the first transport unit 4100 transports the first transport tray 7210 placed on the carry-in unit 6200 to the reverse support table 5100. The buffer support 5200 is provided with a second transport tray 7220 provided in an empty state.

In the conveyance tray placement step, the first conveyance unit 4100 picks up the second conveyance tray 7220 placed on the buffer support table 5200 and places it on the first conveyance tray 7210 placed on the reversal support table 5100. In this case, the second transport tray 7220 is placed on the first transport tray 7210 such that the side on which the workpiece 20 is received faces the first transport tray 7210.

In the transport tray rotation step, the fixing member 5330 fixes the first transport tray 7210 and the second transport tray 7220 to each other. The first transport tray 7210 and the second transport tray 7220 are simultaneously rotated 180 degrees by the drive member 5300 so that the upper and lower surfaces are reversed. Thus, the objects to be processed 20 are transferred from the first transport tray 7210 to the second transport tray 7220 and stacked.

In the object dumping step S4, the second transfer tray 7220, on which the objects 20 reversed in the reversing unit 5000 are loaded, when the object 20 is to be reversed, is transferred to the first transfer unit 4100 To the first position 2110 of the first dumping support 2100. [ The first transfer tray 7210 brought into the carry-in unit 6200 in the carrying-in tray carrying-in step S2 is moved by the first carrying unit 4100 to the first dumping stand 2100 To a first position 2110 of the first frame 2110. [ The dumping member 7300 reciprocates in parallel with the first direction 1 and transports the objects to be processed 20. The first conveyance tray 7210 or the second conveyance tray 7220 placed on the first dumping support 2100 is moved from the first position 2110 to the second position 2120 by a process placed on the second dumping support 2200 The tray 7100 is moved along the second direction 2 from the third position 2210 to the fourth position 2220 at a predetermined distance so that the portion on which the subject 20 is placed and the portion on which the subject 20 is to be placed So that the dumping member 7300 is positioned at a position where the workpiece 20 can be transferred.

In the processing object processing step S5, the process tray 7100 in which the object to be processed is completed in the object dumping step S4 is conveyed to the support unit 3200 by the third conveyance unit 4300. The processing unit 3000 performs processing on the objects to be processed 20 placed in the process tray 7100 loaded therein.

The processing tray 7100 on which the processed body 20 has been processed by the processing unit 3000 is conveyed to the dumping unit 2000 by the third conveyance unit 4300 . Thereafter, the objects to be processed 20 are dumped into the conveyance tray 7200. After the dumping, the conveyance tray 7200 on which the objects 20 to be reversed are stacked is conveyed to the ejection unit 6400 after being reversed in the reversing unit 5000, The tray 7200 is immediately returned to the discharge unit 6400. The delivery tray 7200 placed in the discharge unit 6400 is moved in parallel with the second direction 2 by the discharge unit 6400 and is positioned at a position where it can be picked up by the loader unit 1000. [ The sub loader 1200 picks up the cover member 7230 to cover the upper surface of the transport tray 7200 and the main loader 1100 transports the transport tray 7200 covered with the cover member 7230 to the inlet 6600 do.

As described above, in the processing apparatus and processing method of the present invention, it is determined whether or not the object to be processed 20 needs to be inverted by using the high frequency discriminator 8100 and the high frequency identification reader 8200, It is possible to process both of the objects 20 that need to be reversed or are unnecessary. In addition, a plurality of objects to be processed 20 can be processed at a time by loading the object to be processed 20 on the process tray 7100 resistant to heat.

1: first direction 2: second direction
10: Processing Apparatus 20:
1000: Loader unit 2000: Dumping unit
3000: processing unit 4000: transfer unit
5000: inverting unit 6100: waiting unit
6200: carry-in unit 6400: carry-out unit
7100: Process tray 7200: Transfer tray
8100: High Frequency Identifier 8200: High Frequency Identification Reader

Claims (24)

An apparatus for processing an object to be processed,
A loader unit for loading a conveyance tray loaded with a plurality of the objects to be processed into a carry-in unit;
A dumping unit for picking up the objects to be processed from the conveyance tray and performing dumping for loading the process tray;
A processing unit in which the process tray loaded with the objects to be processed is brought in and processing is performed on the objects to be processed;
A transfer unit for transferring the transfer tray or the process tray between the transfer unit, the dumping unit, and the processing unit;
And an inverting unit for inverting the objects to be processed,
The conveyance tray includes:
A first transport tray on which the objects to be processed are loaded and transported;
And a second conveyance tray in which the objects to be processed are not loaded and are empty,
Wherein the inversion unit comprises:
An inverting support on which the first transport tray is placed,
A buffer support on which the second transport tray is placed,
And an inversion driving member for simultaneously rotating the first conveyance tray and the second conveyance tray placed on the first conveyance tray so that the objects to be processed are transferred from the first conveyance tray to the second conveyance tray Processing device. The method according to claim 1,
Wherein the transport tray and the process tray are formed of materials different from each other. 3. The method of claim 2,
Wherein the process tray is formed of a material having higher heat resistance than the transfer tray. The method of claim 3,
Wherein the process tray is formed of a ceramic material, and the transport tray is formed of a plastic material. An apparatus for processing an object to be processed,
A loader unit for loading a conveyance tray loaded with a plurality of the objects to be processed into a carry-in unit;
A dumping unit for picking up the objects to be processed from the conveyance tray and performing dumping for loading the process tray;
A processing unit in which the process tray loaded with the objects to be processed is brought in and processing is performed on the objects to be processed;
And a transfer unit for transferring the transfer tray or the process tray between the carrying unit, the dumping unit and the processing unit,
The loader unit includes:
A main loader for picking up the transfer tray and loading it into the waiting unit,
A sub-loader for picking up a cover member on the upper side of the transport tray and positioning the cover member on one side of the standby unit,
And a push member for pushing the conveyance tray from which the cover member has been removed, from the standby unit to the carry-in unit. The method according to claim 1,
The dumping unit includes:
A first dumping support on which the transfer tray is placed,
A second dumping support on which the process tray is placed,
And a dumping member for transferring the objects to be processed between the transfer tray and the process tray. The method according to claim 1,
The processing unit includes:
A process chamber in which a space is formed,
A support member positioned within the process chamber and supporting the process tray,
And a plasma supply unit for supplying plasma into the process chamber. An apparatus for processing an object to be processed,
A loader unit for loading a conveyance tray loaded with a plurality of the objects to be processed into a carry-in unit;
A dumping unit for picking up the objects to be processed from the conveyance tray and performing dumping on the process tray;
A processing unit in which the process tray loaded with the objects to be processed is brought in and processing is performed on the objects to be processed;
And a transfer unit for transferring the transfer tray or the process tray between the carrying unit, the dumping unit and the processing unit,
The transfer unit
A first transfer unit for transferring the transfer tray between the carry-in unit and the dumping unit,
A second transfer unit for transferring the transfer tray on which the processed objects in the processing unit have been completed to the outside of the dumping unit,
And a third transport unit for transporting the process tray between the dumping unit and the processing unit. 9. The method of claim 8,
And the second transport unit
Wherein the transfer tray is capable of transferring the transfer tray from which the dumping to the process tray is completed to the outside of the dumping unit. The method according to claim 1,
Further comprising: a waiting unit for temporarily holding the transport tray taken out from the dumping unit after the dumping to the process tray is completed in the dumping unit. The method according to claim 1,
Further comprising a carry-out unit for taking out the transfer tray from which the processed objects in the processing unit have been loaded, to the outside of the window. delete The method according to claim 1,
Wherein the bringing unit, the reversing unit and the dumping unit are sequentially arranged along a first direction. 14. The method of claim 13,
Wherein the processing unit and the dumping unit are disposed along a second direction perpendicular to the first direction when viewed from above. delete The method according to claim 1,
A RFID (Radio Frequency Identification) (RFID) type indicating the type of the object to be processed placed on the first transport tray and detachably provided to the first transport tray; And
And a high frequency identification reader for reading the high frequency identifier,
The process tray includes:
A first process tray on which an object to be inverted in the reversing unit is loaded;
And a second process tray on which an object to be processed which does not need to be inverted in the inverting unit is loaded,
The high frequency identification reader comprises:
And determines whether to provide the first process tray or the second process tray to the dumping unit and whether to bring the first transport tray into the reversing unit according to the read result of the high frequency identification reader. A method for treating an object to be treated,
A carrying tray carrying step of carrying a carrying tray loaded with a plurality of the objects to be processed;
A workpiece dumping step of picking up the objects to be processed from the conveyance tray and loading them on a process tray;
An object processing step in which the process tray loaded with the objects to be processed is brought into a processing unit and processing is performed on the objects to be processed;
And an object inversion step of reversing the object to be processed before the object dumping step,
The conveyance tray includes:
A first transfer tray on which the objects to be processed are loaded and carried before the process step,
And a second conveyance tray in which the objects to be processed are not loaded and are empty,
Wherein, in the step of inverting the object,
A transport tray preparation step in which the first transport tray is positioned at the inverting support and the second transport tray is positioned at the buffer support;
A conveyance tray disposing step of disposing the second conveyance tray on the first conveyance tray;
And rotating the first conveyance tray and the second conveyance tray placed on the first conveyance tray simultaneously 180 degrees. 18. The method of claim 17,
Wherein the transport tray and the process tray are formed of different materials. 19. The method of claim 18,
Wherein the process tray is formed of a material having higher heat resistance than the transfer tray. 20. The method of claim 19,
Wherein the process tray is formed of a ceramic material, and the transport tray is formed of a plastic material. delete delete 18. The method of claim 17,
The process tray includes:
A first process tray on which an object to be processed which needs to be inverted in the object inversion step is loaded;
And a second process tray on which an object to be processed which does not need to be inverted in the process of inverting the object is loaded,
The object reversal step may be selectively performed as needed,
Further comprising an object-to-be-processed determining step of determining whether or not to perform the object inversion step before the carrying-in of the transfer tray,
In the object-to-be-processed determination step,
If the reversal is required, the process tray is provided to the first process tray in the dredging process, so that the process reversal step is performed,
Providing the process tray to the second process tray in the dredging of the object to be processed when the inversion is unnecessary, and controlling the object inversion step not to be performed. 24. The method of claim 23,
Wherein the object-
(RFID), which is detachably attached to the first transport tray, indicating the type of the object to be processed placed on the first transport tray, using a high frequency identification reader.

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