KR101658123B1

KR101658123B1 - panel test device having pre-alignment unit for panel test

Info

Publication number: KR101658123B1
Application number: KR1020160086561A
Authority: KR
Inventors: 박호식; 박찬선; 김태윤; 박희철; 송기훈
Original assignee: 주식회사 엠오티
Priority date: 2016-07-08
Filing date: 2016-07-08
Publication date: 2016-10-04

Abstract

The present invention relates to technology to accurately arrange an optical device array panel on a worktable for a test on the optical device array panel, capable of accurately and easily arranging the optical device array panel on the worktable right before the test in order to accurately test a defect of the optical device array panel. More specifically, the present invention relates to technology capable of easily performing arrangement work in response to an optical device array panel, having various standards, by including a slide arrangement part in the bottom of the worktable. According to the present invention, as a probe pressurizing block is installed in a probe block, a film type probe accurately touches a pattern part of the optical device array panel without an error in spite of a fine refraction of the surface of the optical device array panel.

Description

[0001] The present invention relates to a panel test apparatus having a pre-alignment unit,

The present invention relates to a technique for precisely aligning an optical element array panel on a work table in advance for inspection of an optical element array panel.

More particularly, the present invention is a technique for precisely aligning the panel on a work table immediately before inspection so that the inspection of the optical element array panel can be accurately performed.

In particular, the present invention relates to a technique for easily aligning an optical element array panel having a slide arrangement portion at a lower portion of a work table.

A thin film transistor (thin film transistor) such as an X-ray detector or a photo diode array panel made of a thin film is adopted as a solar cell.

Here, in the optical element array panel, a certain pattern portion is formed as a signal line for transmitting an electrical signal between pixels.

Therefore, the apparatus in which the optical element array panel is employed can operate normally in order that the pattern unit should normally operate. Therefore, before mounting the optical element array panel in any apparatus, whether or not the optical element array panel is defective (for example, dead pixels, Deadline) is tested.

Since the optical element array panel is patterned to generate an electrical signal when it receives light, it tests whether the panel is defective or not by examining an electrical signal generated when light is irradiated.

However, even in the case of detecting an electrical signal by irradiating light, basically, whether or not an electric signal generated in the optical element array panel is smoothly conducted is made through contact of the probe with respect to the pattern portion, A method of generating a signal through a probe is also effective.

Here, in order to test the input / output of an electric signal to / from the optical element array panel through the probe, reliability must be ensured that the probe accurately contacts the optical element array panel.

In view of the above, it is required to implement a technique that can precisely contact the pattern part formed on the optical device array panel without error and precisely align the optical device array panel with respect to the probe.

Korean Patent Application No. 10-2008-0102316 "Optical Device Array Panel Inspection Device" Korean Patent Application No. 10-2012-0128760 "Optical element loading apparatus and optical element inspection system including the same" Korean Patent Application No. 10-2008-0043589 "TFT Array Inspection Device" Korean Patent Application No. 10-2008-0086514 "Apparatus and Method for Inspecting a Tiffty Array Substrate for Plate Sheath Play" Korean Patent Application No. 10-2001-0025583 entitled "Method and Apparatus for Inspecting Electrode Pattern of Tiffti-Liquid Electrode"

SUMMARY OF THE INVENTION It is an object of the present invention to provide a panel inspection apparatus having an inspection preprocessing aligning unit capable of precisely performing contact with a pattern portion formed on an optical element array panel without error .

It is also an object of the present invention to provide a panel inspection apparatus having an inspection preprocessing aligning unit for accurately performing alignment before inspection in accordance with various standards of an optical element array panel.

It is also an object of the present invention to provide a panel inspection apparatus having an inspection preprocessing aligning unit for precisely performing contact with the broove film despite the fine refraction of the surface of the optical element array panel.

According to an aspect of the present invention, there is provided a panel inspection apparatus having an inspection preprocessing aligning unit, comprising: a base block having a rectangular shape; An auxiliary base block vertically connected to the edges corresponding to the two sides from the top edge of the base block at right angles; A probe block disposed at an upper end of the auxiliary base block at right angles to the central portion of the base block and inspecting the optical element array panel for defects by applying an electric signal to the optical element array panel when the end of the rectangular array is contacted; A linear motion in the horizontal direction, a linear motion in the vertical direction, a linear motion in the vertical direction, and a horizontal motion in the upper part of the base block so that the end of the optical device array panel, which is disposed adjacent to the auxiliary base block, A work table for rotating motion; The end portions corresponding to the two adjacent sides of the optical element array panel which are arranged at a predetermined distance from the bottom of the probe block and are seated on the upper surface of the work table are mechanically constrained so that the pattern portions formed on the optical element array panel are aligned A panel guide bar for allowing the panel guide bar; The end of the optical element array panel opposed to the panel guide bar is closely contacted while moving a predetermined distance toward the center of the work table from the end of the work table facing the panel guide bar so that the optical element array panel is aligned with the probe block And a slide arrangement part for fixing the state.

The probe block is attached to the probe block connected to the auxiliary base block so that the probe block is pressed downward so that even if a fine horizontal step is generated between the pattern portions formed at the end of the optical device array panel contacting the probe block, A probe press block for guiding contact between the array panels; A Z-axis aligner mounted on a lower portion of the support plate for adjusting the height of the work table relative to the probe block by linearly moving the support plate in the vertical direction; The Z-axis aligner and the work table are integrally moved linearly in the forward and backward direction and linearly moved in the left-right direction, so that the work table An XY-axis aligner for adjusting the front-to-rear and left-right alignment of the lens; The Z-axis aligner is disposed between the Z-axis aligner and the XY-axis aligner, and rotates the Z-axis aligner and the work table integrally with the X-axis aligner while rotating the X- A first rotating part; A microscope arranged at a position spaced apart from the probe block by a predetermined distance, for confirming alignment between the probes of the probe block and the pattern unit formed on the optical device array panel mounted on the work table; And a camera for aligning the identification mark formed in advance on the optical device array panel, which is placed on the top surface of the work table and one or more identifiers of the identification mark and the identifier of the optical device, arranged at adjacent positions of the work table and the probe block.

The work table includes at least two slide slit portions vertically penetrating from a position opposite to the panel guide bar at a predetermined distance from the central portion, Wherein the slide aligning portion includes: a support plate disposed in parallel with the work table so as to be spaced apart from the work table by a predetermined distance; A plurality of support posts mounted between the support plate and the work table for integrally connecting the support plate and the work table; An LM guide mounted on an upper surface of a support plate corresponding to a lower portion of the slide slit portion; A slide post which restrains the optical element array panel to the panel guide bar by closely contacting the end of the optical element array panel which is seated on the upper surface of the work table while the lower end of the LM guide is connected to the LM guide and the upper end slides the slide slit; And a pressure cylinder mounted on the support plate adjacent to the slide post to maintain a state in which the slide post is constrained to the panel guide bar while the slide is struck at a predetermined pressure along the longitudinal direction of the slide slit.

A Y-axis handling unit connected to a lower portion of the XY-axis aligner in a state of being seated on an upper surface of the base block and linearly moving in an anteroposterior direction on an upper surface of the base block while coordinating the XY- And an X-axis handling unit connected to a lower portion of the XY-axis aligner in a state of being seated on the upper surface of the base block and linearly moving in the left-right direction on the upper surface of the base block while coordinating the lateral alignment of the XY- .

Preferably, the Y-axis handling portion includes a Y-axis linear guide portion for moving the XY-axis aligner in the forward and backward directions while moving in the front-rear direction; A Y-axis coarse pulley connected to an end of the Y-axis linear guide portion and rotating in the Y-axis linear guide portion to adjust the Y-axis linear guide portion in the longitudinal direction; And a Y-axis fine pulley connected to the Y-axis coarse pulley by a belt while being fixed on the upper surface of the base block and adjusting the front-rear direction fine adjustment of the Y-axis linear guide portion while rotating in the same direction, Axis linear guide unit for moving the XY-axis aligner in the anteroposterior direction while moving the X-axis linear aligner; An X-axis coarse pulley connected to an end portion of the X-axis linear guide portion and adapted to adjust the forward and backward movement of the X-axis linear guide portion while rotating in the same direction; And an X-axis fine pulley which is fixed to the upper surface of the base block and connected to the X-axis coarse pulley by a belt and adjusts the forward and backward fine adjustment of the X-axis linear guide while rotating in place.

The present invention has the advantage that the alignment before the inspection can be easily performed by corresponding to the various specifications of the optical element array panel by providing the slide alignment part below the work table.

Further, the present invention provides an advantage that the probe block is provided in the probe block so that the contact between the film type probe and the pattern portion of the optical element array panel can be accurately performed without any error despite the fine refraction of the surface of the optical element array panel .

In addition, the present invention overcomes the reliability degradation of the test according to the defects of the conventional panel inspection equipment.

In addition, the present invention has an advantage that an optical element array panel sensitive to light can be accurately inspected by performing an inspection work inside a dark housing for blocking light from the outside.

1 is a perspective view illustrating a panel inspection apparatus having an inspection preprocessing aligning unit according to the present invention,
FIG. 2 is a view showing a state in which the dark housing is removed in FIG. 1;
FIG. 3 is a view showing a state in which the support frame is removed in FIG. 2;
4 is a view showing a state in which the base block, the auxiliary base block, and the probe connecting block are removed in FIG. 3;
5 is an enlarged view of a left side view of Fig. 4 and a part thereof, Fig.
6 is an exemplary view showing a state in which an optical element array panel is aligned in an enlarged view of Fig. 5; Fig.
[Fig. 7] is a view showing a state in which the work table, the probe block, and the probe pressing block are removed in [Fig. 4]
[Fig. 8] is an example showing a work table, a panel guide bar, and a slide post extracted from [Fig. 4]
9 is an illustration showing a state in which the optical element array panel is seated on the upper surface of the work table in FIG. 8;
10 is an exemplary view showing a state in which the optical element array panel is aligned by the slide post in Fig. 9; Fig.

Hereinafter, the present invention will be described in detail with reference to the drawings.

FIG. 1 is a perspective view showing a panel inspection apparatus having an inspection preprocessing aligning unit according to the present invention, and FIG. 2 is a view showing a state in which a dark housing is removed in FIG.

The process of testing whether the optical element array panel is defective through the panel inspection apparatus having the inspection preprocessing alignment unit according to the present invention is preferably performed in a dark housing H so as to block light interference from the outside .

In the inside of the black housing H, a separate illumination lamp (not shown) is mounted inside the black housing H so as to ensure visibility when a worker carries out manual operation. can do.

However, during the inspection of the optical element array panel in the dark housing H, the opening and closing door of the dark housing H is closed, and the illuminating lamp provided inside is also turned off to react sensitively to the light. It intercepts the interference of light as a source.

In the panel inspection apparatus having the inspection preprocessing aligning unit according to the present invention, the base block 110 is provided with a support frame F connected to the edge of the base block 110, An illuminating lamp, a monitor M, and a microscope 210 can be mounted.

Here, the monitor M can check the operation status while watching the screen of the monitor M when the operator manually places the optical element array panel on the upper surface of the work table 110. Of course, it is preferable that a plurality of monitors M are disposed so as to be able to be monitored from the outside of the dark housing H as well.

On the other hand, the screen of the monitor M preferably displays information obtained by the microscope 210 and the camera 220 for alignment of the optical element array panel.

On the other hand, a horizontal holding block B is disposed in contact with the bottom surface of the base block 110 with a plurality of horizontal holding posts T as a supporting base.

That is, even when the horizontal holding block B is disposed on the uneven floor surface, the plurality of horizontal holding posts T independently move up and down to maintain the base block 110 in a horizontal state.

FIG. 3 is a view showing a state in which the support frame is removed in FIG. 2; FIG. 4 is a view showing a state in which the base block, the auxiliary base block, and the probe connection block are removed in FIG. Fig. 5 is an enlarged view of a left side view of Fig. 4 and a part thereof; Fig. 6 is an example of a state in which an optical element array panel is aligned in an enlarged view of Fig. 5;

Referring to FIGS. 3 to 6, a panel inspection apparatus having an inspection preprocessing aligning unit according to the present invention includes a base block 110, an auxiliary base block 120, a probe block 130, a work table The X-axis aligner 190, the in-place rotation unit 200, the microscope 210, the X-axis aligner 140, the panel guide bar 150, the slide aligning unit 160, the probe pressing block 170, , And a camera (220).

The base block 110 is configured to maintain the horizontal state due to the cooperation of the horizontal holding block B and the horizontal holding post T as described above, and is preferably rectangular.

3, the auxiliary base block 120 is installed on the upper surface of the base block 110 so as to be perpendicular to the edges corresponding to the two sides from the top edge of the base block 110, Respectively.

The probe blocks 130 are arranged in a line along the upper end side of the auxiliary base block 110 as shown in FIG. 3 so as to correspond to the pattern portions formed on the optical element array panel, and the probe blocks 130 are arranged side by side The plurality of probe blocks 130 are disposed at right angles to the center of the base block 110.

When the probe block 130 is brought into contact with the end portion of the rectangular optical device array panel, an electrical signal is applied to the optical device array panel to check whether the optical device array panel is defective.

In detail, the probe block 130 is in contact with the pattern portion of the optical element array panel and serves as an interface for inputting / outputting an electrical signal to / from the optical element array panel. The electrical signal input / (Not shown).

In addition, a film type probe 131 is provided at the lower end of the probe block 130, and the probe 131 is configured to directly contact the pattern portion formed on the optical element array panel.

The work table 140 is disposed on the upper side of the base block 110 and adjacent to the auxiliary base block 110 and has an end portion of the optical device array panel which is seated on the upper surface thereof contacted with the probe block 130, Left and right direction linear motion, vertical direction linear motion, and planar rotational motion.

Here, the work table 140 is formed with a plurality of through holes through which the air on the upper surface of the work table 140 is sucked to suck the optical element array panel, or air is blown from the outside through the through holes, And is configured to maintain an excited state on the upper surface of the work table 140. [

Specifically, when air is injected upward from the through hole of the work table 140, the optical element array panel is slid or inspected to place the optical element array panel on the upper surface of the work table 140, 140, for example.

When the air on the upper surface of the work table 140 is sucked through the through hole of the work table 140, a state in which inspection is proceeded while the optical element array panel is seated on the upper surface of the work table 140 .

Preferably, the work table 140 is formed with at least two slide slit portions 141, which are vertically extended through a predetermined distance from the position facing the panel guide bar 150 toward the central portion.

The slide posts 164 of the slide arranging unit 160 move along the longitudinal direction of the slit part 141 so that the optical device array panel mounted on the upper surface of the work table 140 can be aligned.

At this time, as the slide post 164 closely contacts one end of the optical element array panel, the other end of the optical element array panel is restrained by the panel guide bar 150, The array panel can stably maintain the current fixed state.

The panel guide bar 150 is disposed so as to be spaced apart from the probe block 130 by a predetermined distance and is mechanically restrained at an end corresponding to two adjacent sides of the optical device array panel that is seated on the upper surface of the work table 140 So that the pattern portion formed on the optical element array panel is aligned with the probe block 130.

When positioning the optical element array panel on the upper surface of the work table 140, the work table 140 is moved downward by a predetermined distance by the downward stroke driving of the Z axis aligner 180, So that the panel guide bar 150 protrudes slightly upward from the height of the table 140.

When alignment of the optical element array panel on the upper surface of the work table 140 is completed, a suction force is generated in the through hole of the work table 140 to attract the optical element array panel to the upper surface of the work table 140 .

When the Z axis aligner 180 is struck upward as shown in FIG. 6, the work table 140 is moved in the upward direction to move the pattern portion of the optical element array panel, which is placed on the upper surface of the work table 140, And precisely contacts the probe 131 of the probe block 130.

The slide arranging unit 160 moves from the end of the work table 140 facing the panel guide bar 150 toward the center of the work table 140 by a predetermined distance, So that the optical element array panel is aligned with the probe block 130 in cooperation with the panel guide bar 150.

The slide alignment unit 160 preferably includes a support plate 161, a support post 162, an LM guide 163, a slide post 164, and a pressurizing cylinder 165.

The support plate 161 is disposed in parallel with the work table 140 at a predetermined distance from the lower portion of the work table 140 and is seated on the upper surface of the Z axis aligner 180 to support the Z axis aligner 180 in the vertical direction And moves in the vertical direction.

A plurality of support posts 162 are interposed between the support plate 161 and the work table 140 to integrally connect the support plate 161 and the work table 140. As a result, the support post 162 causes the work table 140 to move in unison with the movement of the support plate 161.

The LM guide 163 is mounted on the upper surface of the support plate 161 corresponding to the lower portion of the slide slit portion 141.

The lower end of the slide post 164 is connected to the LM guide 163 to move along the LM guide 163 and the upper end of the slide post 164 slides on the slide slit part 141, The optical element array panel is constrained to the panel guide bar 150 by closely contacting the ends of the array panel.

The operator manually places the optical element array panel on the upper surface of the work table 140 and manually moves the slide posts 164 so that the slide posts 164 closely contact the ends of the optical element array panel, So that the side end portions of the panel guide bar 150 and the panel guide bar 150 are kept substantially aligned by the slide posts 164 and the panel guide bar 150. [

The pressure cylinder 165 is mounted on the support plate 161 adjacent to the slide post 164 and is moved along the longitudinal direction of the slide slit portion 141 with a preset pressure, And the optical element array panel is restrained and aligned at a desired position by the bar 150.

The preset posture is maintained as it is, thereby maintaining the present state in which the slide posts 164 restrain the optical element array panel to the panel guide bar 150.

The probe pressing block 170 is attached to the probe block 130 connected to the auxiliary base block 110 and presses the probe block 130 downward so that the probe block 130 is pressed against the end of the optical element array panel contacting the probe block 130 Guiding the contact between the probe block 130 and the optical element array panel even when fine horizontal steps are generated between the formed pattern parts.

The Z axis aligner 180 is mounted on the lower portion of the support plate 161 and adjusts the height of the work table 140 with respect to the probe block 130 by linearly moving the support plate 161 in the vertical direction .

The XY-axis aligner 190 is disposed between the lower portion of the Z-axis aligner 180 and the base block 110 to linearly move in the forward and backward direction, Rearward, leftward and rightward alignment of the work table 140 with respect to the probe block 130 by integrally performing linear motion in the forward and backward directions and linear motion in the leftward and rightward directions.

Here, the Z axis represents the upward direction of the work table 140, the X axis represents the side direction of the work table 140, and the Y axis represents the side direction of the work table 140 perpendicular to the X axis.

The in-situ rotation unit 200 is disposed between the Z axis aligner 180 and the XY axis aligner 190 and is disposed at a predetermined angle (for example, in the range of -5 to +5 degrees The rotational angle of the work table 140 with respect to the probe block 130 is adjusted by integrally rotating the Z axis aligner 180 and the work table 140 in association with the rotation of the Z axis aligner 180. [

For this purpose, the in-place rotating part 200 is integrally connected to the rotating body mounted on the upper surface of the XY-axis aligner 190, and the in-place rotating part 200 is supported by the rotating body with respect to the XY- Lt; / RTI >

4, the protrusions and protrusions protruding from the side walls of the in-place rotation unit 200 and the XY-axis aligner 190 are disposed so as to intersect with each other, and the operation knob 201 screwed to the protrusion and the bracket is mounted do.

When the user turns the bolt portion of the operation knob 201 back and forth in a spiral manner, the in-place rotation unit 200 rotates by a predetermined angle (in the + 5 ° range) or the reverse rotation - within 5 °).

The microscope 210 is disposed at a position spaced a predetermined distance upward from the probe block 130 and confirms alignment between the probes of the probe block 130 and the pattern portion formed on the optical device array panel mounted on the work table 140 .

The camera 220 is provided with one or more identification marks which are formed in advance on the optical element array panel which is placed on the top surface of the work table 140 by arranging at least one of the work table 140 and the probe block 130 at adjacent positions, .

On the other hand, if the optical element array panel mounted on the upper surface of the work table 140 is always of a constant size, the initial alignment of the inspection apparatus can be performed only once.

However, since the specifications may vary depending on the equipment to which the optical element array panel is mounted, the initial setting of alignment occurs continuously according to the specification of the optical element array panel.

Microscopes and cameras are needed for the initial setup of these frequently occurring alignments.

On the other hand, in order to align the optical element array panel, a corner portion of the panel is formed with a distinguishing mark (for example, '+') from the time of manufacture. At this time, the camera 220 is installed at the end of the panel guide bar 150 where the corner portion of the optical device array panel is located, and photographs the edge portion of the optical device array panel that is seated on the upper surface of the work table 140 in real time.

The information that is photographed in real time is displayed on the screen of the monitor M so that the operator can confirm the information. At this time, the operator repeats the operation of the Z-axis aligner 180, the XY-axis aligner 190, and the in-place rotation unit 180 while monitoring the identifier of the camera 220 and the identification mark of the corresponding panel.

In addition, the microscope 210 displays the information confirmed by the microscope 210 on the monitor M, and confirms whether the pattern portion of the actual optical element array panel and the pattern of the probe 131 are exactly coincident with each other.

When the alignment of the optical element array panel of a specific standard is completed through the microscope 210 and the camera 220, the initial setting values are input to the inspection processing unit, The inspection preprocessing alignment of FIG.

[Fig. 7] is a diagram showing a state in which the work table, the probe block, and the probe pressing block are removed in Fig. 4;

7, since the panel guide bar 150 is connected to a plurality of vertical bars which are fixed to the upper surface of the in-situ rotary part 200 and extend upward, the panel guide bar 150 is related to the vertical stroke of the Z axis aligner 180 So that it can maintain its independent position.

Therefore, when the work table 140 moves up and down according to the vertical stroke of the Z axis aligner 180, the panel guide bar 150 can maintain its current state.

[Fig. 8] is an illustration showing an example of extracting a work table, a panel guide bar, and a slide post in Fig. 4; [Fig. 9] Fig. 10 is an exemplary diagram showing a state in which the optical element array panel is aligned by the slide post in Fig. 9; Fig.

First, as shown in FIG. 8, the Z axis aligner 180 is struck downward, and the work table 140 is moved in the downward direction to move the panel guide bar 150 As shown in Fig.

9, the operator places the optical element array panel on the upper surface of the work table 140 so that the end of the optical element array panel is hung on the panel guide bar 150 to be closely contacted.

The operator moves the slide post 164 along the slide slit portion 141 as shown in Fig. 10 so that the panel guide bar 150 and the slide post 164 cooperate with the end portions of the optical element array panel .

Subsequently, as the pressure cylinder 165 is stroked at a predetermined pressure along the longitudinal direction of the slide slit portion 141, the optical element array panel is restrained at a desired position by the slide post 164 and the panel guide bar 150 .

7, the present invention preferably further includes a Y-axis handling unit 310 and an X-axis handling unit 320. The X-

The Y-axis handling portion 310 is connected to the lower portion of the XY-axis aligner 190 in a state of being mounted on the upper surface of the base block 110 and linearly moves in the front-rear direction on the upper surface of the base block 110 Alignment of the XY-axis aligner 190 is adjusted.

For this purpose, the Y-axis handling unit 310 may further include a Y-axis linear guide unit 311, a Y-axis coarse pulley 312, and a Y-axis fine pulley 313.

The Y-axis linear guide portion 311 moves in the front-rear direction (Y-axis direction) on the upper surface of the base block 110 while moving the XY-axis aligner 190 in the longitudinal direction. Concretely, when the Y-axis linear guide portion 311 moves in the Y-axis direction of FIG. 7, the XY-axis aligner 190 connected to the Y-axis linear guide portion 311 with its lower portion moved, Alignment is performed.

The Y-axis coarse pulley 312 is connected to the end of the Y-axis linear guide portion 311 and rotates clockwise or counterclockwise according to the user's operation. The Y-axis linear guide portion 311 Is moved in the Y-axis direction.

The Y-axis fine pulley 313 is fixed to the upper surface of the base block 110 and is connected to the Y-axis coarse pulley 312 by a belt. The Y-axis fine pulley 313 rotates in a clockwise or counterclockwise direction. The axial linear guide portion 311 moves finely along the Y-axis direction.

That is, the Y-axis coarse pulley 312 adjusts the movement of the Y-axis linear guide portion 311 in the Y-axis direction to a large extent, and the Y-axis fine pulley 313 adjusts the Y- The movement in the Y-axis direction is adjusted to a small width.

The X-axis handling part 320 is connected to the lower part of the XY-axis aligner 190 in a state of being mounted on the upper surface of the base block 110 and linearly moves in the left-right direction on the upper surface of the base block 110 Alignment of the XY-axis aligner 190 in the left-right direction is adjusted.

For this purpose, the X-axis handling unit 320 may further include an X-axis linear guide unit 321, an X-axis coarse pulley 322, and an X-axis fine motion pulley 323.

The X-axis linear guide portion 321 moves in the left-right direction (X-axis direction) from the upper surface of the base block 110, and takes the lateral movement of the XY-axis aligner 190. Concretely, when the X-axis linear guide portion 321 moves in the X-axis direction of FIG. 7, the XY-axis aligner 190 connected to the lower portion of the X-axis linear guide portion 321 moves, Alignment is performed.

The X-axis coarse pulley 322 is connected to the end of the X-axis linear guide portion 321 and rotates in the clockwise or counterclockwise direction according to a user's operation. The X-axis linear guide portion 321 ) Moves in the X-axis direction.

The X-axis fine pulley 323 is fixed to the upper surface of the base block 110 and is connected to the X-axis coarse pulley 322 by a belt. The X-axis fine pulley 323 rotates in a clockwise or counterclockwise direction. The axial linear guide portion 321 moves finely along the X-axis direction.

That is, the X-axis coarse pulley 322 greatly adjusts the movement in the X-axis direction with respect to the X-axis linear guide portion 321, and the X-axis fine pulley 323 adjusts the X- The movement in the X-axis direction is adjusted to a fine width.

When the user manually operates the Y-axis handling unit 310 and the X-axis handling unit 320 while viewing the screen of the monitor M, the Y-axis handling unit 310 and the X-axis handling unit 320, The alignment of the XY-axis aligner 190 can be precisely adjusted while moving in the Y-axis direction and the X-axis direction.

110: Base block
120: auxiliary base block
130: Probe block
131: Probe
135: probe connection block
140: work table
141: Slide portion
150: Panel guide bar
160:
161: Support plate
162: Support posts
163: LM Guide
164: slide post
165: Pressure cylinder
170: probe pressing block
180: Z axis aligner
190: XY-axis aligner
200:
201: Operation knob
210: Microscope
220: camera
310: Y-axis handling part
311: Y-axis linear guide portion
312: Y axis coarse pulley
313: Y-axis fine pulley
320: X-axis handling part
321: X-axis linear guide portion
322: X-axis coarse pulley
323: X-axis fine pulley
H: Dark housing
F: Support frame
M: Monitor
B: horizontal holding block
T: Leveling posts
P: optical element array panel

Claims

A base block 110 formed in a rectangular shape;
An auxiliary base block 120 vertically connected to the edges corresponding to the two sides from the top edge of the base block at right angles;
A probe block disposed at an upper end of the auxiliary base block at right angles to the central portion of the base block and inspecting the optical element array panel for defects by applying an electrical signal to the optical element array panel when the end of the rectangular optical device array panel contacts 130);
And an optical element array panel disposed adjacent to the auxiliary base block at an upper portion of the base block, the end of the optical element array panel being seated on an upper surface of the base block so as to be in contact with the probe block, A work table 140 for performing a directional linear movement and a planar rotational movement;
The optical element array panel being disposed at a predetermined distance below the probe block and mechanically restricting an end portion of the optical element array panel corresponding to two adjacent sides of the optical element array panel, A panel guide bar 150 to be aligned with the probe block;
And the end of the optical element array panel opposed to the panel guide bar is brought into close contact with the panel guide bar while moving a predetermined distance from the end of the work table facing the panel guide bar toward the center of the work table, A slide alignment part (160) for fixing a state in which the panel is aligned with the probe block;
And an inspection preprocessing aligning unit configured to include the inspection preprocessing aligning unit.

The method according to claim 1,
Even when fine horizontal steps are generated between the pattern units formed at the ends of the optical element array panel contacting the probe block by being mounted on the probe block connected to the auxiliary base block and pressing the probe block downward A probe push block 170 for guiding contact between the probe block and the optical element array panel;
Further comprising an inspection pre-processing alignment unit.

The method of claim 2,
The work table (140)
At least two slide slit portions (141) penetrating through the panel guide bar in a vertical direction as a predetermined distance from the position facing the panel guide bar toward the central portion;
Further comprising:
The slide arranging unit 160 includes:
A support plate 161 disposed at a lower portion of the work table and spaced apart from the work table by a predetermined distance;
A support post (162) mounted between the support plate and the work table for integrally connecting the support plate and the work table;
An LM guide (163) mounted on an upper surface of the support plate corresponding to a lower portion of the slide slit;
The lower end of the LM guide is connected to the LM guide and the upper end of the LM guide contacts the end of the optical device array panel which is seated on the upper surface of the work table while sliding the slide slit, A slide post 164 that restrains the bar;
A pressing cylinder (165) which is attached to the support plate adjacent to the slide post and stays at a predetermined pressure along the longitudinal direction of the slide slit part while maintaining the state in which the slide post restrains the optical element array panel to the panel guide bar );
Further comprising: an inspection pre-processing alignment unit arranged on the inspection target substrate.

The method of claim 3,
A Z axis aligner (180) mounted on a lower portion of the support plate to adjust the height of the work table with respect to the probe block as the support plate linearly moves in a vertical direction;
Axis aligner and the base block so that the Z-axis aligner and the work table are linearly moved in the front-rear direction and the left-right direction integrally with each other while being linearly moved in the forward-backward direction and in the left- An XY-axis aligner 190 for adjusting the front-to-rear and left-right alignment of the work table with respect to the block;
Axis aligner and the XY-axis aligner so as to rotate integrally with the Z-axis aligner and the work table while interlocking with the X-axis aligner while rotating the X- An in-phase rotation part 200 for adjusting the rotation angle of the rotor;
Further comprising: an inspection pre-processing alignment unit arranged on the inspection target substrate.

The method of claim 4,
A microscope 210 disposed at a position spaced apart from the probe block by a predetermined distance, for confirming the alignment between the probes of the probe block and the pattern unit formed on the optical device array panel mounted on the work table;
Further comprising an inspection pre-processing alignment unit.

The method of claim 5,
A camera (220) for aligning the identification mark formed in advance on the optical device array panel and one's own identifier, which are placed on the top surface of the work table, and arranged at one or more positions adjacent to the work table and the probe block;
Further comprising: an inspection pre-processing alignment unit arranged on the inspection target substrate.

The method of claim 4,
A Y-axis handling unit connected to a lower portion of the XY-axis aligner in a state of being seated on the upper surface of the base block and linearly moving in the forward and backward directions on the upper surface of the base block while coordinating longitudinal alignment of the XY- (310);
An X-axis handling unit that is connected to a lower portion of the XY-axis aligner in a state of being seated on the upper surface of the base block and linearly moves in a left-right direction on an upper surface of the base block, (320);
Further comprising: an inspection pre-processing alignment unit arranged on the inspection target substrate.

The method of claim 7,
The Y-axis handling unit 310,
A Y-axis linear guide portion 311 for moving the XY-axis aligner in the forward and backward directions while moving in the front-rear direction;
A Y-axis coarse pulley (312) connected to an end of the Y-axis linear guide unit and adjusting a movement of the Y-axis linear guide unit in the forward and backward directions while being rotated in place;
A Y-axis fine pulley 313 connected to the Y-axis coarse pulley in a state of being fixed on the upper surface of the base block and adjusting the forward and backward fine movement of the Y-axis linear guide while rotating in place;
And,
The X-axis handling unit 320,
An X-axis linear guide portion 321 for moving the XY-axis aligner in the forward and backward directions while moving in the forward and backward directions;
An X-axis coarse pulley (322) connected to an end of the X-axis linear guide portion and adapted to adjust the forward and backward movement of the X-axis linear guide portion while being rotated in place;
An X-axis fine pulley (323) connected to the X-axis coarse pulley by a belt while being fixed on the upper surface of the base block and adjusting the front-rear direction of the X-axis linear guide unit while rotating in place;
Wherein the inspection unit includes an inspection pre-alignment unit.