KR101646020B1 - 금속 나노입자가 패턴화된 유기복합박막, 이의 제조방법 및 이를 포함하는 전기적 활성 소자 - Google Patents
금속 나노입자가 패턴화된 유기복합박막, 이의 제조방법 및 이를 포함하는 전기적 활성 소자 Download PDFInfo
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02587—Structure
- H01L21/0259—Microstructure
- H01L21/02601—Nanoparticles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/06—Polymers
- H01L2924/0635—Acrylic polymer
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Abstract
Description
도2 는 pH 4 완충용액에서 제조된 은 나노입자가 결합한 (PEI/PAAx)N 유기박막 복합체의 UV-vis spectrometer 변화를 나타낸 것이다.
도 3 은 다양한 완충용액에서 제조된 은 나노입자가 결합한 (PEI/PAAx)N 유기박막 복합체의 UV-vis spectrometer 변화를 나타낸 것이다.
도 4 는 pH 4 완충용액에서 제조된 은 나노입자가 결합한 (PDDA/PSS)5 와 (PDDA/PAA25)5 유기박막 복합체의 UV-vis spectrometer 변화를 나타낸 것이다.
도5 는 pH 10 수용액에서 제조된 은 나노입자가 결합한 (PEI/PAAx)N 유기박막 복합체의 UV-vis spectrometer 변화를 나타낸 것이다.
도6 은 강산과 강염기로 조절한 다양한pH 조건에서 제조된 은 나노입자가 결합한 (PEI/PAAx)N 유기박막 복합체의 UV-vis spectrometer 변화를 나타낸 것이다.
도 7에서는 금속 나노입자가 패턴화된 유기박막의 광학현미경 사진을 보여준다.
도8은 금속 나노입자가 결합된 (PEI/PAAx)5 유기복합박막 표면의 2차원과 3차원 AFM 사진을 보여준다.
도9는 금속 나노입자가 결합된 (PEI/PAA25)10 유기복합박막의 감쇠전반사 적외선 분광 스펙트럼을 변화를 나타낸 것이다.
도10은 광전자 분광기를 이용하여 금속 나노입자가 결합된 (PEI/PAA25)5 유기복합박막의 조성을 나타낸 것이다.
도 11은 투과전자 현미경을 이용하여 pH 4완충용액에서 제조한 (PEI/PAA25)5 유기박막에서 합성한 금속 나노입자의 사진과 분포도를 보여준다.
도 12는 pH 4완충용액에서 제조한 유기박막에 은 나노입자가 결합된 (PEI/PAA25)3, (PEI/PAA450)3 유기 복합박막을 작업전극으로, -0.2 에서 0.5V 범위에서 스캔 속도를 변화시키며 전기화학적 특성 변화를 측정한 결과를 나타내었다.
도 13는 pH 7수용액에서 제조한 유기박막에 은 나노입자가 결합된 (PEI/PAA25)3, (PEI/PAA450)3 유기 복합박막을 작업전극으로, -0.2 에서 0.5V 범위에서 스캔 속도를 변화시키며 전기화학적 특성 변화를 측정한 결과를 나타내었다.
도 14에는 은 나노입자가 결합된 (PEI/PAA25)3, (PEI/PAA25)5, (PEI/PAA450)3 (PEI/PAA450)5 유기 복합박막을 작업전극으로, 스캔 속도가 0.05V/s일때, -0.2 에서 0.5V 범위에서의 각각의 유기복합박막의 전기화학적 특성 변화를 나타내었다.
Claims (12)
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- 고체 지지체를 pH 2 내지 10의 용매를 포함하는 고분자 전해질 용액에 침지함으로써 상기 고체 지지체의 표면에 고분자 전해질막을 형성하는 제1 단계,
pH 4 내지 10의 용매를 포함하는 폴리아크릴산 용액에 침지함으로써 상기 고분자 전해질막 위에 폴리아크릴산막을 형성하는 제2 단계,
상기 제1 단계 및 제2 단계를 1회 이상 반복하여 상기 고체 지지체 위에 하나 이상의 유기 적층 박막을 형성하는 제3 단계,
금속 이온이 용해된 증류수에 침지시킨 후 건조시켜 상기 폴리아크릴산막에 금속 이온이 결합된 유기 적층 박막을 형성하는 제4 단계, 및
상기 금속 이온을 광 환원시켜 금속 나노입자가 패턴화된 유기 적층 박막을 형성하는 제5 단계를 포함하는, 유기복합박막의 제조방법. - 삭제
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