KR101642132B1 - Photocurrent image and photoluminescence image simultaneous measurement apparatus - Google Patents

Photocurrent image and photoluminescence image simultaneous measurement apparatus Download PDF

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Publication number
KR101642132B1
KR101642132B1 KR1020150044358A KR20150044358A KR101642132B1 KR 101642132 B1 KR101642132 B1 KR 101642132B1 KR 1020150044358 A KR1020150044358 A KR 1020150044358A KR 20150044358 A KR20150044358 A KR 20150044358A KR 101642132 B1 KR101642132 B1 KR 101642132B1
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KR
South Korea
Prior art keywords
photocurrent
image
optical
measuring
photoluminance
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Application number
KR1020150044358A
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Korean (ko)
Inventor
장원석
박철민
정소희
우창수
김덕종
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한국기계연구원
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/30—Structural combination of electric measuring instruments with basic electronic circuits, e.g. with amplifier
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/054—Optical elements directly associated or integrated with the PV cell, e.g. light-reflecting means or light-concentrating means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Abstract

An apparatus for simultaneous measurement of a photocurrent image and a photoluminance image according to an embodiment of the present invention includes a light generator for generating a light source, a scan stage for supporting the semiconductor device on which a light source generated from the light generator enters, A photocurrent measuring device for measuring a photocurrent generated in the semiconductor device, a photoluminescence measuring device for measuring photoluminescence generated in the semiconductor device, and a control terminal for controlling the photocurrent measuring device and the photoluminescence measuring device .

Description

[0001] PHOTOCURRENT IMAGE AND PHOTOLUMINESCENCE IMAGE SIMULTANEOUS MEASUREMENT APPARATUS [0002]

The present invention relates to an apparatus for simultaneously measuring a photocurrent image and a photoluminance image.

Photocurrent is a current generated by a carrier generated when light of energy larger than a band gap of a semiconductor device is irradiated to a semiconductor. These photocurrents are generated by separating excited electron hole pairs in the region where the band gap is inclined.

Photoluminescence refers to the light that is generated when the excited electrons receive energy larger than the band gap of the semiconductor device, and the band gap should be flat and uneven.

SUMMARY OF THE INVENTION The present invention provides a device for simultaneous measurement of photocurrent images and optical luminescence images capable of effectively analyzing semiconductor devices by simultaneously measuring photocurrent images and optical luminescence images I want to.

An apparatus for simultaneous measurement of a photocurrent image and a photoluminance image according to an embodiment of the present invention includes a light generator for generating a light source, a scan stage for supporting the semiconductor device on which a light source generated from the light generator enters, A photocurrent measuring device for measuring a photocurrent generated in the semiconductor device, a photoluminescence measuring device for measuring photoluminescence generated in the semiconductor device, and a control terminal for controlling the photocurrent measuring device and the photoluminescence measuring device .

And a stage controller for moving the scan stage in a plane.

The photocurrent measuring device may include a low noise current amplifier for amplifying the photocurrent, and a lock-in amplifier for amplifying the photocurrent amplified by the low noise current amplifier again.

And an optical chopper located on the optical path between the light generator and the beam splitter and modulating the original frequency of the light source to a modulation frequency.

Wherein the chopper controller transmits the modulation frequency of the optical chopper to the lock-in amplifier, and the lock-in amplifier is capable of measuring photocurrent synchronized with the modulation frequency .

The optical luminescence measuring apparatus may include a monochromator for separating the optical luminescence according to a wavelength, and a detector for detecting a wavelength distribution of light separated according to a wavelength in the monochromator.

And an objective lens disposed in an optical path between the beam splitter and the semiconductor element.

The controller may include an image display unit for simultaneously displaying the photocurrent image and the optical luminescence image.

An apparatus for simultaneously measuring a photocurrent image and a photoluminance image according to an exemplary embodiment of the present invention includes a photodetector for detecting a photocurrent and a photoluminance in a region where a band gap is partially obliquely inclined and a band gap is flat in a semiconductor of a semiconductor device, By simultaneously measuring separated images, the characteristics of semiconductor devices can be analyzed effectively and comprehensively.

In addition, by providing the optical chopper and the lock-in amplifier, it is possible to measure a photocurrent having a small noise, and the characteristics of the semiconductor device can be more accurately analyzed.

1 is a block diagram of an apparatus for simultaneously measuring a photocurrent image and a photoluminance image according to an embodiment of the present invention.
2 is a computer screen of an apparatus for simultaneously measuring a photocurrent image and a photoluminance image according to an embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. The present invention may be embodied in many different forms and is not limited to the embodiments described herein.

In order to clearly illustrate the present invention, parts not related to the description are omitted, and the same or similar components are denoted by the same reference numerals throughout the specification.

1 and 2, an apparatus for simultaneously measuring a photocurrent image and a photoluminance image according to an embodiment of the present invention will be described in detail.

FIG. 1 is a configuration diagram of an apparatus for simultaneously measuring a photocurrent image and a photoluminescence image according to an embodiment of the present invention. FIG. 2 is a cross-sectional view of a photocurrent image and a photoluminance image simultaneously measured according to an embodiment of the present invention. It is the screen of the computer of the device.

1, an apparatus for simultaneously measuring a photocurrent image and a photoluminance image according to an embodiment of the present invention includes a light generator 10 for generating a light source L, A scan stage 30 on which the semiconductor device 1 is mounted, a photocurrent measuring device 40 for measuring the photocurrent generated in the semiconductor device 1, a semiconductor device 1 The photoluminescence measuring device 40 and the control terminal 60 connected to the optical luminescence measuring device 50. The photoluminescence measuring device 50 is a device for measuring the luminous flux generated in the photoluminescence measuring device 1,

The light source L for generating photocurrent and optical luminescence in the semiconductor element 1 may be a laser, and the light generator 10 may be a laser generator.

The beam splitter 20 is located in the optical path between the light generator 10 and the semiconductor element 1. The beam splitter 20 is a device for separating the light source L by reflecting part of the light source L and transmitting the remaining part of the light source L. Therefore, the light source L reflected by the beam splitter 20 is incident on the semiconductor element 1.

The objective lens 70 can be located in the optical path between the beam splitter 20 and the semiconductor element 1. [ The light source L passes through the objective lens 70, is condensed, and is incident on the semiconductor element 1.

A stage controller 31 is connected to the scan stage 30, and the stage controller 31 moves the scan stage 30 in a plane. Therefore, the semiconductor element 1 mounted on the scan stage 30 is also moved on the plane by the movement of the scan stage 30, so that the light source L can be irradiated to all areas of the semiconductor element 1. The stage controller 31 is connected to the control terminal 60 and is controlled by the control terminal 60.

The photocurrent measuring device 40 includes a low noise current preamplifier 41 for amplifying the photocurrent generated in the semiconductor device 1, a lock-in amplifier for amplifying the photocurrent amplified by the low noise current amplifier again. and an in-amplifier 42.

The low noise current preamplifier 41 is less influenced by noise and amplifies and measures the photocurrent. The photocurrent generated by the light source L having an energy larger than the band gap of the semiconductor in the semiconductor element 1 may be a weak signal. Further, the photocurrent measurement is not performed only at a specific point but is scanned by the scan stage 30 and measured for a long time. By providing a low noise current preamplifier 41, the photocurrent of a small signal can be measured by minimizing the influence of ambient noise while measuring the photocurrent.

The magnitude of the ambient noise is large at low frequency, and becomes smaller at high frequency. Therefore, it is preferable to modulate the photocurrent to a high frequency. An optical chopper 80 is located on the optical path between the light generator 10 and the beam splitter 20 and a chopper controller 90 is disposed on both the optical chopper 80 and the lock- It is connected.

The optical chopper 80 modulates the original frequency of the light source L to a high frequency modulation frequency, and the chopper controller 90 regulates the modulation frequency. The chopper controller 90 transmits the modulation frequency of the optical chopper 80 to the lock-in amplifier 42, and the lock-in amplifier 42 measures the photocurrent synchronized with the modulation frequency. That is, the lock-in amplifier 42 can measure the photocurrent with low noise by measuring the synchronous photocurrent with reference to the modulation frequency of the light source L. As described above, by providing the optical chopper and the lock-in amplifier, it is possible to measure a photocurrent having a small noise, and the characteristics of the semiconductor device can be more accurately analyzed.

The optical luminescence measuring device 50 includes a monochromator 51 for separating the optical luminescence according to the wavelength, a wavelength distribution of the optical luminescence separated according to the wavelength in the monochromator 51, And a detector 52 for detecting a spectrum.

The optical luminescence M generated in the semiconductor element 1 by the light source L is incident on the beam splitter 20 through the objective lens 70 and is reflected by the beam splitter 20, Is incident on the monochromator (51). A grating is formed inside the monochromator 51 to spread the optical luminescence as wide as a prism.

The detector 52 detects the spectrum of the optical luminescence and transmits it to the control terminal 60.

2, the control terminal 60 simultaneously displays the photocurrent image 61a and the optical luminescence image 61b measured by the photocurrent measuring device 40 and the optical luminescence measuring device 50 A video display section 61 and a stage control display section 62 for controlling the stage controller 31. [ The control terminal 60 includes a voltage control display portion 63 for controlling the voltage applied to the semiconductor element 1 and a storage display portion 64 for storing the photocurrent image 61a and the optical luminescence image 61b . The control terminal 60 is connected to the photocurrent measuring device 40, the optical luminescence measuring device 50, and the stage controller 31.

As described above, the apparatus for simultaneously measuring the photocurrent image and the optical luminousness image according to the embodiment of the present invention includes both the photocurrent measuring device 40 and the optical luminescence measuring device 50, and the scan stage 30 The photocurrent image and the optical luminescence image can be measured by scanning all the regions of the semiconductor element 1 using the photodetector 1 and the photodetector 2, Can be provided. Therefore, the characteristics of the semiconductor element 1 can be analyzed effectively and synthetically.

It is also possible to spatially measure and analyze the photocurrent and optical luminescence with respect to all the semiconductor elements 1 whose energy of the light source L is larger than the band gap of the semiconductor element 1. [

While the invention has been shown and described with reference to certain preferred embodiments thereof, it will be understood by those skilled in the art that various changes and modifications may be made therein without departing from the spirit and scope of the following claims. Those who are engaged in the technology field will understand easily.

10: light generator 20: beam splitter
30: scan stage 40: photocurrent measuring device
50: Optical Luminance Measuring Device 60: Control Terminal

Claims (8)

A light generator for generating a light source,
A beam splitter for separating the light source,
A scan stage for supporting the semiconductor device on which the light source generated by the light generator is incident and moving the semiconductor device,
A photocurrent measuring device for measuring a photocurrent generated in the semiconductor device,
A photoluminescence measuring device for measuring the optical luminescence generated in the semiconductor device,
A control terminal for controlling the photocurrent measuring device and the optical luminescence measuring device,
An optical chopper located on the optical path between the light generator and the beam splitter and modulating the original frequency of the light source to a modulation frequency,
A photocurrent image and a photoluminance image simultaneously. The method of claim 1,
And a stage controller for moving the scan stage in a plane. The apparatus for simultaneous measurement of a photocurrent image and a photoluminance image. The method of claim 1,
The photocurrent meter
A low noise current amplifier for amplifying the photocurrent,
And a lock-in amplifier for re-amplifying the photocurrent amplified by the low noise current amplifier
A photocurrent image and a photoluminance image simultaneously. delete 4. The method of claim 3,
Further comprising a chopper controller for adjusting the modulation frequency,
Wherein the chopper controller transfers the modulation frequency of the optical chopper to the lock-in amplifier, and the lock-in amplifier simultaneously measures a photocurrent synchronized with the modulation frequency, wherein the photocurrent image and the optical luminescence image are simultaneously measured. 4. The method of claim 3,
The optical luminescence meter
A monochromator for separating the optical luminescence according to wavelength,
A detector for detecting a wavelength distribution of light separated in accordance with a wavelength in the monochromator;
A photocurrent image and a photoluminance image simultaneously. The method of claim 1,
Further comprising an objective lens arranged in an optical path between the beam splitter and the semiconductor element, and a photoluminescent image and a photoluminance image simultaneously. The method of claim 1,
Wherein the control terminal includes an image display unit for simultaneously displaying a photocurrent image and a photo-luminescence image, wherein the photocurrent image and the photo-luminescence image are simultaneously displayed.
KR1020150044358A 2015-03-30 2015-03-30 Photocurrent image and photoluminescence image simultaneous measurement apparatus KR101642132B1 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09211084A (en) * 1996-02-05 1997-08-15 Takaoka Electric Mfg Co Ltd Method and device for inspecting semiconductor device
JP2005516223A (en) * 2002-01-30 2005-06-02 ブレーキー、ジェームズ・エヌ Signal processing circuit for optical sensor
KR101276609B1 (en) * 2012-02-10 2013-06-20 아주대학교산학협력단 High speed measurement apparatus of photocurrent image
KR20130135730A (en) * 2010-05-26 2013-12-11 인핸스트 스펙트로메트리, 인코포레이티드 An apparatus and method for detecting raman and photoluminescence spectra of a substance

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09211084A (en) * 1996-02-05 1997-08-15 Takaoka Electric Mfg Co Ltd Method and device for inspecting semiconductor device
JP2005516223A (en) * 2002-01-30 2005-06-02 ブレーキー、ジェームズ・エヌ Signal processing circuit for optical sensor
KR20130135730A (en) * 2010-05-26 2013-12-11 인핸스트 스펙트로메트리, 인코포레이티드 An apparatus and method for detecting raman and photoluminescence spectra of a substance
KR101276609B1 (en) * 2012-02-10 2013-06-20 아주대학교산학협력단 High speed measurement apparatus of photocurrent image

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