KR101639939B1 - Vacuum pressure proportional control valve, valve body, and forming method for flow path of valve body - Google Patents

Abstract

A problem to be solved by the present invention is to provide a vacuum pressure proportional control valve, a valve body, and a flow path forming method of a valve body that can be miniaturized while ensuring conductance. The valve body 2 of the vacuum pressure proportional control valve 1A has first and second ports 21 and 25 formed on the same axis and first and second ports 21 and 25 which are orthogonal to the axes of the first and second ports 21 and 25 A valve hole 22 communicating with the first port 21 formed coaxially with the bottomed opening 23 and a valve hole 22 communicating with the first port 21 and a valve hole 22 communicating with the bottom A valve seat 26 formed around the opening portion opened to the bottom wall 23a of the opening 23 and a U-shaped flow passage 24 for communicating the bottomed opening 23 with the second port 25, And the U-shaped flow passage 24 is formed along the axis of the opening 23 having a bottom on the outer side of the valve seat 26 and having a U-shape in which the ring is opened on the side of the first port, And the closure member 27 is provided on the bottom surface 2b to block the U-shaped flow passage 24. The U-

Description

TECHNICAL FIELD [0001] The present invention relates to a vacuum pressure proportional control valve, a valve body, and a valve body,

A valve body includes a first port and a second port formed on a coaxial shaft, and a second port formed coaxially with the valve body. The valve body includes a valve body, a valve body, and an actuator provided on the valve body. A valve hole formed coaxially with the bottom opening and communicating with the first port, the valve hole being formed in a direction orthogonal to the axis of the first and second ports, A valve seat formed along the periphery of the opening portion opened to the bottom wall of the bottomed opening portion and having a valve body contacting or spaced from the valve seat and a communication path communicating the bottomed opening portion with the second port, A control valve, a valve body, and a valve body.

For example, a semiconductor manufacturing apparatus is constituted by connecting various fluid control devices to a reaction vessel through a pipe in order to control the flow rate and pressure of various gas supplied to and exhausted from the reaction vessel with high accuracy to improve the product quality . One of the fluid control devices is a vacuum pressure proportional control valve. The vacuum pressure proportional control valve is disposed between the reaction vessel and the vacuum pump, and controls the flow rate of exhaust gas when the gas is exhausted from the reaction vessel to the vacuum pump in proportion to the stroke.

Fig. 9 is a sectional view of a main part of a conventional vacuum pressure proportional control valve 101. Fig. The valve body 102 has the first port 102a communicating with the second port 102e through the valve hole 102b, the bottomed opening portion 102c and the inclined flow path 102d. The valve body 103 is contained in the bottomed opening portion 102c and linearly reciprocates according to the driving force applied from the actuator 104. [ The valve body 103 has a tapered valve body 103a corresponding to the tapered valve seat surface 102f. The O-ring 105 is provided on the valve body 103 in a state in which a portion thereof protrudes from the tapered valve body 103a and elastically deformed between the valve seat surface 102f and the valve body 103. [ The bellows 106 is retractably disposed in the bottomed opening 102c and prevents gas from leaking from the bottomed opening 102c into the actuator 104. [

In the vacuum pressure proportional control valve 101, the first port 102a is connected to the reaction vessel 110 through the pipe 111, and the second port 102e is connected to the vacuum pump 120 . The vacuum pressure proportional control valve 101 does not apply driving force to the valve element 103 while the film processing is being performed in the reaction vessel 110 and closes the valve. Thereby, even if the vacuum pump 120 is driven, the reaction vessel 110 is not evacuated.

The vacuum pressure proportional control valve 101 is disposed on the upstream side (the first port 102a side) and the downstream side (the second port 102e) with the valve seat surface 102f interposed therebetween, The differential pressure of the pressure difference between the pressure side and the pressure side is increased. Therefore, the vacuum pressure proportional control valve 101 raises the valve body 103 slightly so as to leak the gas from between the O-ring 105 and the valve seat surface 102f. As a result, the gas in the reaction vessel 110 starts to be exhausted at a minute flow rate so as not to wind up the particles.

Thereafter, when the internal pressure of the reaction vessel 110 drops to a predetermined pressure, the vacuum pressure proportional control valve 101 further raises the valve body 103 and increases the exhaust flow rate. At this point, the differential pressure between the upstream side and the downstream side of the vacuum pressure proportional control valve 101 is sufficiently small. As a result, the exhaust flow rate is increased so that the gas does not wind up the particles, and the exhaust time is shortened. The vacuum pressure proportional control valve 101 returns to the valve closed state when the internal pressure of the reaction container 110 reaches the target vacuum pressure.

With such a vacuum pressure proportional control valve 101, it is possible to shorten the exhaust time for exhausting the gas from the reaction vessel 110 so as to prevent the particles from being rolled up (see, for example, Patent Document 1).

Japanese Patent No. 3854433

However, in recent years, miniaturization and integration of semiconductor manufacturing apparatuses are progressing. Accordingly, the vacuum pressure proportional control valve 101 is required to be downsized. The valve body 102 of the vacuum pressure proportional control valve 101 has an opening 102c in which the cutting drill is in the bottom to communicate the bottomed opening 102c formed in the orthogonal direction with the second port 102e, Is inserted into the inner wall on the side of the second port 102e side of the bottomed opening portion 102c from the upper end opening portion of the bottomed opening portion 102c so as to be in abutment contact with the front end portion and is obliquely cut from the inner wall of the bottomed opening portion 102c toward the second port 102e And the inclined passage 102d are formed. As a result, the valve body 102 is configured such that the distance between the first side face 102g on which the first port 102a is opened and the second side face 102h on which the second port 102e is opened is long, . Therefore, the valve size of the vacuum pressure proportional control valve 101 is not sufficiently small.

In addition, in recent years, microfabrication of semiconductors is proceeding. As a result, the vacuum pressure proportional control valve 101 is required to have a wide control range. The vacuum pressure proportional control valve 101 is opened in a circular shape on the inner wall of the second port 102e side of the opening portion 102c with the inclined passage 102d. On the other hand, the flow path of the gas flowing from the valve hole 102b to the bottom opening portion 102c has an annular or circular shape. Thereby, the gas has to flow toward the bottomed opening portion 102c over the entire circumference of the valve seat surface 102f, and then to flow toward the inclined flow path 102d. When the gas flows into the inclined passage 102d from the bottom opening 102c because the sectional area of the passage is drastically narrowed between the bottomed opening 102c and the inclined passage 102d, In some cases. Therefore, the conventional vacuum pressure proportional control valve 101 has insufficient conductance as compared with the flow path cross-sectional area.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a vacuum pressure proportional control valve, a valve body, and a flow path forming method of a valve body that can be miniaturized while securing conductance.

In order to solve the above problems, one aspect of the present invention has the following configuration.

(1) A valve device comprising: a valve body; a valve body contained in the valve body; and an actuator provided on the valve body and imparting a driving force to the valve body, A second port formed in a direction orthogonal to an axis of the first port and the second port and having an opening with a bottom for accommodating the valve body; Wherein the valve seat is formed along a periphery of an opening portion that is opened to a bottom wall of the bottomed opening portion and in which the valve body is in contact with or spaced from the valve seat, And a communication path for communicating the two ports, characterized in that the communication path has a U-shape in which a ring is opened on the first port side, and the valve A U-shaped channel formed along the axis of the opening having the bottom on the outer side of the seat and open to the bottom surface opposed to the actuator mounting surface on which the actuator of the valve body is mounted, And a closing member for blocking the flow path.

(2) In the configuration described in (1), preferably, in the U-shaped flow path, the flow path cross-sectional area of a cross section cut in a direction orthogonal to the axial direction is larger than an opening area of the opening portion of the valve hole.

(3) In the configuration described in (2), preferably, the flow path diameter of the first port, the valve hole, and the second port are the same, and the valve seat is located at a position slightly higher than the normal portion of the second port Respectively.

(4) In the configuration according to any one of (1) to (3), preferably, the valve body has a rectangular parallelepiped shape and is provided on the outer peripheral surface of the valve body to heat the valve body.

(5) According to still another aspect of the present invention, there is provided a valve device comprising a first port and a second port formed on a coaxial shaft, and a second port formed in a direction orthogonal to the axes of the first and second ports, A valve hole formed coaxially with the bottomed opening and communicating with the first port; and a valve hole formed along the periphery of the opening portion opened to the bottom wall of the bottomed opening portion. Wherein the valve body has a valve seat in contact with or spaced from the valve seat, and a communication passage communicating the bottom opening with the second port, wherein the communication passage opens the first port side And is formed in a U-shape along the axis of the opening having the bottom on the outer side of the valve seat, and is opposed to the actuator mounting surface on which the actuator of the valve body is provided A U-shaped flow path opened to the bottom surface, and a closing member installed on the bottom surface to close the U-shaped flow path.

(6) According to another aspect of the present invention, there is provided a flow path forming method of a valve body in which an actuator for imparting a driving force to a valve element is installed, the method comprising the steps of: A valve hole forming step of forming a valve hole having a diameter smaller than that of the bottomed opening in a coaxial relationship with the bottomed opening from the actuator mounting surface And a U-shaped U-shaped U-shaped U-shaped U-shaped U-shaped U-shaped U-shaped U-shaped U-shaped U-shaped U-shaped U-shaped U-shaped U-shaped U-shaped U-shaped U-shaped U- A flow path is formed between the bottom surface opposed to the actuator mounting surface and the axis of the opening having the bottom A first port formed so as to communicate with the valve hole from a first side surface in a direction in which the ring of the U-shaped flow path is opened, and a second port formed so as to communicate with the valve hole, A port forming step of providing a second port communicating with the U-shaped flow path from a second side opposite to the first side on a coaxial basis; a step of fixing the closing member closing the U- And a U-shaped flow passage closing process.

In the vacuum pressure proportional control valve of the above configuration, the bottomed opening formed in a direction orthogonal to the valve body and the second port communicate with each other through the U-shaped flow passage. The U-shaped flow path is formed on the outer side of the valve seat and in a U-shape with a ring opened on the first port side. As a result, the U-shaped flow path is provided in a substantially annular shape on the outer side of the valve seat to avoid the first port and the valve hole, and the fluid flowing annularly from the valve hole to the bottom opening easily tends to flow. The U-shaped flow path is formed along the axis of the opening with the bottom. As a result, the valve body has a short distance between the first side opening of the first port and the second side opening of the second port. The U-shaped flow path is provided so as to open on the bottom surface of the valve body. Thereby, the U-shaped flow path is formed without being restricted by the opening with the bottom. The valve body is provided with a closing member on its bottom surface to block the U-shaped flow passage, and the first port communicates with the second port through the valve hole, the opening with the bottom, and the U-shaped flow passage.

In the vacuum pressure proportional control valve having such a valve body, when the actuator does not apply a driving force to the valve body, the valve body contacts the valve seat, and the fluid does not flow from the first port to the second port.

On the other hand, when the valve body is lifted with a driving force from the actuator, the fluid flows out from the space between the valve seat and the valve body to the bottom opening at a flow rate proportional to the stroke, 2 port. The fluid has a property of flowing in a flowing place. As a result, the fluid flowing from the first port to the valve hole flows in a large amount from the position close to the second port to the opening with the bottom, flows into the U-shaped flow path, and flows to the second port. That is, the fluid flowing from the first port to the valve hole hardly flows out to the portion where the U-shaped flow path is not formed, and does not generate the staying portion or the turbulent flow portion in the bottomed opening portion. Therefore, even if the U-shaped flow path is formed in a U-shape with the ring on the first port side, the fluid supplied to the first port smoothly flows to the second port through the valve hole, Flows.

Therefore, according to the vacuum pressure proportional control valve having the above-described configuration, the valve body is formed in the axial direction of the U-shaped flow path for communicating the bottom opening with the second port, so that the first and second ports, The distance between the planes of the second side face is shortened, and the installation area becomes small. As a result, the vacuum pressure proportional control valve has a small valve size. According to the vacuum pressure proportional control valve having the above-described configuration, the valve body 2 has a U-shaped channel formed in a U-shape with a ring opened on the first port side, The U-shaped flow path is formed in a substantially annular shape on the outer side of the valve seat, so that the fluid tends to flow into the U-shaped flow path through the opening having the bottom from the valve hole. Accordingly, since the vacuum pressure proportional control valve and the valve body smoothly flow from the first port to the second port through the valve hole, the bottomed opening, and the U-shaped flow path, conductance is ensured.

In the vacuum pressure proportional control valve, for example, when the reaction vessel connected to the first port is in a high vacuum state, the number of molecules of the fluid supplied to the first port is reduced. In this case, if the molecules hit each other, the flow of the fluid may be deteriorated. However, in the U-shaped flow path, the flow path cross-sectional area of the cross section cut in a direction orthogonal to the axial direction is larger than the opening area of the opening portion that opens to the bottom wall of the bottomed opening. As a result, the fluid having a small number of molecules flows into the U-shaped flow path without causing the molecules to bombard each other after flowing out from the entire circumference of the valve hole to the bottom opening. Therefore, according to the vacuum pressure proportional control valve having the above-described configuration, even a fluid having a small number of molecules can easily flow through the valve body, thereby ensuring the conductance.

In the vacuum pressure proportional control valve of the above construction, since the flow path diameter between the first port, the valve hole and the second port is the same and the valve seat is provided at a position slightly higher than the normal portion of the second port, And flows linearly from the first port to the second port through the valve hole and the U-shaped flow path, thereby ensuring the conductance.

In addition, the vacuum pressure proportional control valve of the above-described configuration has a rectangular parallelepiped shape in the valve body, and is provided on the outer peripheral surface of the valve body to heat the valve body.

In the valve body flow path forming method having the above structure, in the step of forming the bottom opening, an opening having a bottom for accommodating the valve body is formed in a cylindrical shape from the actuator mounting surface of the valve body. Thereafter, in the valve hole forming step, the valve hole having a smaller diameter than the opening having the bottom from the actuator mounting surface is formed coaxially with the opening having the bottom. As a result, a valve seat is provided on the bottom wall of the bottomed opening portion along the outer periphery of the opening portion of the valve hole. Then, in the U-shaped flow path forming process, a U-shaped U-shaped flow path having a ring opened on one side from the bottom surface opposed to the actuator mounting surface and outside the valve seat is formed along the axis of the bottomed opening portion , And communicates with an opening having a bottom. In the port forming step, the first port is formed so that the U-shaped flow path communicates with the valve hole from the first side surface of the valve body in the direction of opening the ring, and the second port, which faces the first side surface of the valve body, And a second port formed so as to communicate with the U-shaped flow path from the first port and the second port. Then, in the U-shaped channel closing process, a closing member is provided on the bottom surface to block the U-shaped channel.

Therefore, according to the valve body flow path forming method having the above-described configuration, since the U-shaped flow path can be formed along the axis of the opening with the bottom without being restricted by the opening with the bottom, Can be simply manufactured.

1 is a sectional view of a main portion of a vacuum pressure proportional control valve according to a first embodiment of the present invention, showing a valve closed state.
Fig. 2 shows the valve-opened state of the vacuum pressure proportional control valve shown in Fig.
3 is an external perspective view of the valve body shown in Fig.
4 is a sectional view taken along the line AA in Fig.
5 is a sectional view taken along line BB of Fig.
FIG. 6 is a view for explaining the flow of fluid in the vacuum pressure control valve of FIG. 1; FIG.
7 is an external perspective view of a vacuum pressure proportional control valve according to a second embodiment of the present invention.
8 is a cross-sectional view of a main portion of the vacuum pressure proportional control valve shown in Fig.
9 is a sectional view of a main portion of a conventional vacuum pressure proportional control valve.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of a flow path forming method of a vacuum pressure proportional control valve, a valve body and a valve body according to the present invention will be described with reference to the drawings.

(First Embodiment)

1 is a sectional view of a main portion of a vacuum pressure proportional control valve 1A according to a first embodiment of the present invention. Fig. 2 shows the valve-opened state of the vacuum pressure proportional control valve 1A shown in Fig. The vacuum pressure proportional control valve 1A has an external appearance by providing the actuator 4 on the valve body 2. The vacuum pressure proportional control valve 1A is configured so that the valve element 3 rises in accordance with the driving force applied from the actuator 4 and controls the fluid at a flow rate proportional to the stroke. The vacuum pressure proportional control valve 1A is provided with a U-shaped flow passage 24 for communicating the bottomed opening 23 with the second port 25 in the valve body 2 .

The actuator 4 is connected to the valve element 3 so that the valve rod 41 protrudes so as to reciprocate linearly in the opening 23 having the bottom. The valve body 3 is always pressed in the direction of the valve seat by the compression spring 42. The bellows 5 is disposed in the bottomed opening 23 and is expanded and contracted in accordance with the stroke of the valve body 3 to prevent the fluid from leaking from the bottomed opening 23 to the actuator 4. [ The bellows 5 is fitted in the valve body 2 and the actuator 4 in a state in which the upper end portion 5g is fitted to the fitting concave portion 2g.

The valve body 3 is constructed by fixing the fixing plate 32 to the lower end portion 5b of the bellows 5 via the O-ring 31 with a fixing screw 33. [ The dove tail groove 34 is formed in a ring shape between the lower end portion 5b and the fixed plate 32 and the O-ring 31 is elastically deformed by projecting a part from the valve body 3 toward the valve seat 26 side The O-ring 31 is held. The vacuum pressure proportional control valve 1A performs sealing by bringing the O-ring 31 into close contact with the valve seat 26 by the urging force of the compression spring 42. [

3 is an external perspective view of the valve body 2 shown in Fig. The valve body 2 has a rectangular parallelepiped shape having an upper surface (actuator mounting surface) 2a, a bottom surface 2b and first to fourth side surfaces 2c, 2d, 2e and 2f.

As shown in Fig. 1, the valve body 2 is formed of a metal (SUS or the like) having high heat resistance and high corrosion resistance. The valve body 2 is formed such that the first port 21 communicates with the second port 25 through the valve hole 22, the bottomed opening 23 and the U- .

The first port 21 and the second port 25 are provided on the opposite first and second side surfaces 2c and 2d of the valve body 2 so as to facilitate connection of the valve body 2 to the straight pipe. . The bottomed opening 23 is formed such that its axial line L1 is displaced toward the first port 21 side with respect to the center line L2 of the valve body 2, that is, coaxial with the actuator 4. The bottomed opening 23 is formed in a columnar shape in a direction orthogonal to the axial lines of the first and second ports 21 and 25 from the upper surface 2a of the valve body 2, And the bellows 5 is housed. The bottomed opening 23 is formed such that the bottom wall 23a is located slightly higher than the top portion 25a of the second port 25.

The valve hole 22 is formed coaxially with the bottom opening 23 from the top surface 2a and communicates with the first port 21. The valve hole 22 is formed to have a smaller diameter than the bottomed opening 23. The valve seat 26 is provided flat along the periphery of the opening portion where the valve hole 22 is opened to the bottom wall 23a of the bottomed opening portion 23.

4 is a sectional view taken along the line AA in Fig. 5 is a sectional view taken along line BB of Fig. The U-shaped flow passage 24 is formed on the outer side of the valve seat 26 and in a U-shape that opens the ring on the first port 21 side. In other words, the U-shaped flow path 24 is formed in the shape of an arc with a ring opened on the first port 21 side with the axis L1 (see Fig. 1) of the bottomed opening 23 as the center. As a result, the U-shaped flow passage 24 is formed in a substantially annular shape along the outside of the valve seat 26 while avoiding the first port 21 and the valve hole 22, And the region into which the fluid flowing out into the opening 23 flows is expanded.

The U-shaped flow passage 24 has a width between the inner circumferential surface 22a of the valve hole 22 and the inner circumferential surface 24b of the U-shaped flow passage withstand the load of the compression spring 42, 31 to the valve seat 26 to seal them. As a result, the width of the valve seat 26 in the radial direction is narrowed to the width required for the seal, and the inter-surface distance W1 between the first and second side surfaces 2c and 2d is shortened.

As shown in Fig. 1, the U-shaped flow passage 24 is formed along the axis L1 of the bottomed opening portion 23, and the bottomed opening portion 23 and the second port 25 are communicated with each other. 9), the valve body 2 is provided with the first and second side surfaces 2c (see Fig. 9) and the second side surface 2e (see Fig. 9), as compared with the case where the bottomed opening portion 102c and the second port 102e are communicated with each other through the inclined flow path 102d , 2d are shortened. The U-shaped flow passage 24 is provided so as to open on the bottom surface 2b. As a result, the U-shaped flow path 24 can be formed without being restricted by the bottomed opening portion 23. That is, as shown in Fig. 4, the U-shaped flow path 24 can arbitrarily enlarge the radius R1 from the center P1 to the U-shaped flow path outer circumferential surface 24a to set the flow path cross-sectional area.

In this embodiment, the U-shaped flow passage 24 has a sectional area of a cross section cut in a direction orthogonal to the axial direction of the bottom opening portion 23, The radius R1 is set so as to be larger than the opening area of the opening portion opened to the bottom wall 23a.

2, the U-shaped flow path 24 is formed to the same extent as the position where the valve element 3 is disposed when the valve element 3 is lifted up to the maximum stroke. In order to make it easier for fluid to flow from the valve hole 22 into the U-shaped flow passage 24 through the bottomed opening 23 in the entire stroke.

1, the U-shaped flow path 24 formed as described above is attached to the closing member 27 provided on the bottom surface 2b of the valve body 2 by using a fixing bolt or an adhesive material It is blocked by. On the bottom surface 2b, a mounting groove 2h is formed in a ring shape on the outer side of the U-shaped flow path 24, and a seal member 28 is mounted. The seal member 28 is pressed between the closing member 27 and the bottom surface 2b so as to prevent fluid leakage.

5, the flow path diameters X1, X2, and X3 of the first port 21, the valve hole 22, and the second port 25 are the same diameter. 1, the valve seat 26 is provided at a position slightly higher than the top portion 25a of the second port 25. As shown in Fig. In addition, the valve seat 26 is formed as a planar flat surface in a direction orthogonal to the axis L1 of the valve hole 22 and the opening 23 having the bottom. This allows the fluid to flow linearly from the first port 21 to the second port 25 through the valve hole 22, the bottomed opening 23, the U-shaped flow path 24, .

3, the flange of the pipe 111 (Fig. 1) is brought into surface contact with the first side face 2c of the valve body 2 along the outer periphery of the opening of the first port 21, A plurality of fixing holes 29 are formed at regular intervals. The second side surface 2d is also provided with a fixing hole 29 around the second port 25 in the same manner as the first side surface 2c. Thereby, it is not necessary to provide a flange or a joint for connecting the pipes 111 and 121 to the first and second side surfaces 2c and 2d, and the valve body 2 has the first and second side surfaces 2c and 2d, 2d is shortened.

1, the valve body 2 is configured so that the actuator 4 is moved in a state in which the axis L1 of the actuator 4 is displaced in parallel to the first port 21 side with respect to the center line L2 of the valve body 2, Is provided on the upper surface 2a. The valve body 2 is extended to the region between the inner wall 23b and the second side face 2d of the bottomed opening 23 to form the U-shaped flow passage 24, (Because the first port 21 can be shortened), the thickness between the inner wall 23b of the first side surface 23 and the first side surface 2c can be reduced, There is no extra thickness, and it becomes compact.

Next, the flow path forming method of the valve body 2 will be described. First, in the step of forming an opening with a bottom, an opening 23 having a bottom from the upper surface 2a of the valve body 2 is formed into a cylindrical shape by cutting or the like.

Subsequently, in the valve hole forming step, the valve hole 22 having a smaller diameter than the bottom opening portion 23 is formed coaxially with the bottom opening portion 23 from the top surface 2a by cutting or the like. Thereby, the valve seat 26 is formed.

Then, in the U-shaped flow path forming process, the U-shaped flow path 24 is formed along the axis of the bottom opening 23 from the bottom surface 2b and communicated with the bottom opening 23.

The first port 21 and the second port 25 are communicated with the valve hole 22 and the U-shaped flow path 24 from the first and second side surfaces 2c and 2d in the port forming step And the first port 21 and the second port 25 are disposed coaxially.

Then, in the U-shaped flow passage closing process, the closing member 27 is provided on the bottom surface 2b and the U-shaped flow passage 24 is closed.

According to this flow path forming method of the valve body 2, since the U-shaped flow path 24 can be formed along the axis of the opening portion 23 having the bottom, without being restricted by the bottomed opening portion 23, It is possible to form the U-shaped channel 24 having a larger cross-sectional area than that of the valve hole 22 in the valve body 2. Therefore, according to the flow path forming method of the valve body 2, it is possible to easily manufacture the small valve body 2 that can secure conductance.

Next, the operation of the vacuum pressure proportional control valve 1A will be described. As shown in FIG. 1, the vacuum pressure proportional control valve 1A is provided in a straight pipe connecting the reaction vessel 110 and the vacuum pump 120. In this case, the vacuum pressure proportional control valve 1A is configured such that the flange (not shown) of the pipe 111 connected to the reaction vessel 110 is in contact with the first side face 2c, The first port 21 is connected to the pipe 111 by being twisted into the hole 29. Similarly, the second port 25 is connected to the pipe 121 connected to the vacuum pump 120.

In the reaction vessel 110, for example, a gas is supplied in a vacuum state to perform a film treatment, the gas is evacuated to a vacuum state, and then a separate gas is supplied and a separate film treatment is performed. In this case, the vacuum pressure proportional control valve 1A does not control the flow rate of the exhaust gas at the time of film processing, controls the flow rate of the exhaust gas, controls the minute flow rate of the exhaust gas at the time of exhaustion, After the pressure reduction, the exhaust gas is controlled to a large flow rate. Hereinafter, the operation of the vacuum pressure proportional control valve 1A will be described in detail.

The vacuum pressure proportional control valve 1A does not apply the driving force to the valve element 3 so that the valve element 3 is pressed against the compression spring 42 and the O- 31 are brought into close contact with the valve seat 26. As a result, the space between the reaction vessel 110 and the vacuum pump 120 is shut off, and even if the vacuum pump 120 is driven, the gas is not exhausted from the reaction vessel 110.

The vacuum pressure proportional control valve 1A at the end of the membrane treatment has a positive pressure on the upstream side (the reaction vessel side) than the valve seat 26 while a negative pressure on the downstream side (vacuum pump side) And the differential pressure between the upstream side and the downstream side is increased with the valve seat 26 therebetween. In this state, when the valve body 3 is raised so that the vacuum pressure proportional control valve 1A abruptly separates the O-ring 31 from the valve seat 26, the gas is exhausted from the reaction vessel 110 at once, Is rolled up in the reaction vessel (110). When the particles adhere to the product, there arises a problem that the product quality is deteriorated.

Therefore, the vacuum pressure proportional control valve 1A first controls the minute flow rate of the exhaust gas at the start of the exhaust, and makes the differential pressure between the upstream side and the downstream side small with the valve seat 26 therebetween. That is, the vacuum pressure proportional control valve 1A is configured so that the amount of elastic deformation of the O-ring 31 is reduced from the actuator 4 to the valve body 3 ). The valve element 3 slightly rises against the compression spring 42 to relax the urging force for urging the O-ring 31 against the valve seat 26. The gas flowing to the valve hole 22 leaks at a minute flow rate from the space between the O-ring 31 and the valve seat 26 to the bottom opening 23 according to the amount of elastic deformation of the O-ring 31 And flows to the second port 25 through the U-shaped flow passage 24. [

Here, the flow of the fluid flowing from the valve hole 22 to the U-shaped flow path 24 will be described with reference to FIG. 6 is a view for explaining the flow of the fluid in the vacuum pressure proportional control valve 1A. The arrows F1 to F7 shown in Fig. 6 indicate that the thicker the arrow is, the larger the flow rate is.

The gas flows to the lower surface of the valve body 3 when the valve is closed. On the other hand, the sealing surfaces of the O-ring 31 and the valve seat 26 are formed in an annular shape. Therefore, the gas flowing from the first port 21 to the valve hole 22 at the time of valve closing reduces the amount of elastic deformation of the O-ring 31, As shown in Fig. Since the U-shaped flow passage 24 is formed on the outer side of the valve seat 26 in a U-shape with a ring opened on the first port 21 side, the U-shaped flow passage 24 is formed in a substantially annular shape just outside the valve seat 26 Respectively. Therefore, the gas leaking annularly from between the O-ring 31 and the valve seat 26 is liable to flow into the U-shaped flow passage 24.

Here, the U-shaped flow path 24 opens the loop on the first port 21 side. It is conceivable that the gas generates a stay or a turbulent flow near the inner wall of the first port side of the opening 23 having the bottom. However, the fluid has a property of flowing in a flowable area. As shown in Fig. 1, in the vacuum pressure proportional control valve 1A, the second port 25 is connected to the vacuum pump 120 and is evacuated. The U-shaped flow passage 24 is provided in an arc shape on the side of the second port 25 of the valve seat 26. As a result, the gas flows from the second port 25 side of the valve seat 26 to the U-shaped flow passage 24 in a large amount and flows to the second port 25 as indicated by the arrow F1. The gas that has not flowed toward the second port 25 side of the valve seat 26 flows into the U-shaped flow passage 24 at a small flow rate as it is spaced from the second port 25, as indicated by arrows F2 to F7 And flows in the U-shaped flow path 24 toward the second port 25 in the negative pressure state. Therefore, even if the U-shaped flow path 24 has a ring on the side of the first port 21, the vacuum pressure proportional control valve 1A can be opened and closed in the vicinity of the inner wall of the first port side It is difficult to generate a stay or a turbulent portion.

In addition, the vacuum pressure proportional control valve 1A is configured such that the first and second ports 21 and 25 are formed coaxially, and the valve seat 26 is in contact with the top portion 25a of the second port 25 It is installed in a slightly elevated position. As a result, the gas tends to flow linearly from the first port 21 to the second port 25 through the valve hole 22 and the U-shaped flow path 24. Further, since the valve seat 26 is provided flat, the flow velocity is not easily decelerated when the gas flows into the U-shaped flow passage 24 from the valve hole 22 through the valve seat 26. [ Therefore, the vacuum pressure proportional control valve 1A smoothly flows in the valve body 2 without changing the flow direction or the flow velocity of the gas, so that the conductance can be further secured.

The vacuum pressure proportional control valve 1A increases the driving force applied from the actuator 4 to the valve element 3 and increases the pressure of the O-ring 31) from the valve seat (26). The vacuum pressure proportional control valve 1A allows the gas to flow from the position closer to the second port 25 side of the valve seat 26 into the U-shaped flow passage 24, As shown in FIG. Therefore, the flow of the vacuum pressure proportional control valve 1A is maintained and the conductance is ensured even after switching from the minute flow rate control to the large flow rate control.

However, when the reaction vessel 110 is in a high vacuum state, the number of molecules of gas supplied to the first port 21 is reduced. If the molecules collide with each other, there is a fear that the gas having a small amount of molecules may cause a bad flow. The U-shaped flow passage 24 is formed so that the cross sectional flow path area of the cross section in the direction orthogonal to the axis is smaller than the opening area of the bottom wall 23a (valve seat 26) of the opening portion 23 in which the valve hole 22 is bottomed Is larger than the opening area of the portion. As a result, the gas with a small amount of molecules flows out from the entire circumference of the valve hole 22 to the bottom openings 23 and diffuses into the U-shaped flow path 24 without causing the molecules to bombard each other. Therefore, according to the vacuum pressure proportional control valve 1A, the turbulent flow portion and the turbulent flow portion are not generated in the opening portion 23 in which the gas is present even in the case of controlling the gas with a small amount of molecules, so that the conductance can be ensured.

1, the vacuum pressure proportional control valve 1A and the valve body 2 are connected to each other through a U-shaped flow passage 24 formed along the axis of the bottom opening portion 23, as described above, A vacuum pressure proportional control valve (not shown) for communicating the bottomed opening portion 102c and the second port 102e with the inclined flow path 102d by communicating the bottomed opening portion 23 with the second port 25 The distance W1 between the surfaces of the valve body 2 can be narrowed and the mounting area of the valve body 2 can be made smaller than the valve body 102 (see Fig. Since the installation area of the valve body 2 is reduced in this way, the vacuum pressure proportional control valve 1A has a smaller valve size.

The U-shaped flow path 24 for communicating the bottomed opening 23 with the second port 25 is connected to the first port 21 side of the vacuum pressure proportional control valve 1A via a U- The gas flowed out from the valve hole 22 to the bottom opening 23 flows into the bottomed opening 23 almost at a constant distance from the valve seat 22, And flows into the U-shaped flow passage (24) without generating any turbulence. The vacuum pressure proportional control valve 1A and the valve body 2 are connected to the first port 21 through the valve hole 22, the bottom opening portion 23 and the U- Since the gas flows smoothly into the bottomed opening portion 102c and the gas flows smoothly into the bottomed opening portion 102c and the bottomed opening portion 102c flows into the bottomed opening portion 102c, The conductance is secured as compared with the valve 101 (see Fig. 9).

(Second Embodiment)

Next, a second embodiment of the present invention will be described. 7 is an external perspective view of a vacuum pressure proportional control valve 1B according to a second embodiment of the present invention. 8 is a cross-sectional view of a main part of the vacuum pressure proportional control valve 1B shown in Fig. The vacuum pressure proportional control valve 1B of the second embodiment has the same configuration as the vacuum pressure proportional control valve 1A of the first embodiment except that it has the heating means 61. [

The heating means 61 shown in Figs. 7 and 8 is composed of the electrothermal heater 62 and the heat insulating material 63. Fig. The electrothermal heater 62 has a rod shape and is provided in the valve body 2 in a state of being fitted in the recess 64 formed in the valve body 2. Therefore, irregularities are hardly formed on the surface of the valve body 2 even when the electrothermal heater 62 is provided. The heat insulating material 63 is provided so as to cover the outer circumferential surface of the valve body 2 and insulates the valve body 2.

In such a vacuum pressure proportional control valve 1B, the valve body 2 is heated by the heating means 61, and the gas is not solidified in the flow path. The vacuum pressure proportional control valve 1B is provided with the heating means 61 (the electrothermal heater 62 and the heat insulating material 63) in a rectangular parallelepiped shape with little concavity and convexity on the outer peripheral surface of the valve body 2 And is easily detached and attached to the outer circumferential surface.

The present invention is not limited to the above-described embodiment, and various applications are possible.

(1) For example, in the above embodiment, the material of the valve body 2 is made of metal and the internal flow path is processed by cutting or the like, but the material of the valve body 2 is made of a resin having high corrosion resistance and heat resistance , The inner flow path may be processed by injection molding, cutting, or the like.

(2) For example, in the above embodiment, although the U-shaped flow path 24 is closed by the plate-like closing member 27, the U-shaped flow path 24 is closed by the closing member formed with the projection hermetically fitted into the U- The U-shaped flow path 24 may be covered. In this case, the projection may be formed at a height that does not overlap the second port 25. [ By forming these projections, the fluid easily flows from the U-shaped flow passage 24 to the second port 25 without clogging. In order to facilitate the flow of the fluid from the U-shaped flow path 24 to the second port 25, an inclined surface inclined from the first port 21 side toward the second port 25 side may be formed at the tip of the projection .

(3) For example, in the second embodiment, the rod-like heat transfer heater 62 is provided on the valve body 2, but a plate or sheet heater may be provided on the valve body 2.

1A, 1B: Vacuum pressure proportional control valve
2: Valve body
2a: upper surface (actuator mounting surface)
2b: bottom surface
2c: the first side
2d: second side
3:
4: Actuator
21: First port
22: valve hole
23: Opening with bottom
24: U-
25: Second port
26: Valve seat
27: Closure member
61: heating means

Claims (6)

The valve body includes a valve body, a valve body enclosed in the valve body, and an actuator provided on the valve body and imparting a driving force to the valve body. The valve body includes a first port and a second port formed coaxially with each other, An opening formed in a direction orthogonal to an axis of the first and second ports and having a bottom for accommodating the valve body; and an opening formed coaxially with the bottom opening and communicating with the first port A valve seat formed along the circumference of an opening portion that opens to the bottom wall of the bottomed opening and the valve hole is in contact with or spaced from the valve body; A vacuum pressure proportional control valve comprising a communication path for communicating,
Wherein the communication passage is formed in a U-shape having a ring-shaped one open to the first port side and is formed along an axis of the opening having the bottom outside the valve seat, and the actuator of the valve body A U-shaped flow path opened to a bottom surface opposed to an actuator mounting surface to be installed,
Wherein the U-shaped flow path has a flow path cross-sectional area of a cross section cut in a direction orthogonal to the axial direction is larger than an opening area of the opening portion of the valve hole,
And a closing member provided on the bottom surface to close the U-shaped flow path. delete The method according to claim 1,
The flow path diameter of the first port, the valve hole, and the second port are the same,
And the valve seat is provided at a position higher than a top portion of the second port. The method according to claim 1 or 3,
Wherein the valve body has a rectangular parallelepiped shape,
And a heating means provided on an outer circumferential surface of the valve body for heating the valve body. A first port and a second port formed on a coaxial phase, an opening formed in a direction orthogonal to the axes of the first and second ports, the bottom having the valve body accommodated therein, A valve seat formed on the valve seat and communicating with the first port, the valve seat being formed along a periphery of an opening portion opened to a bottom wall of the bottomed opening portion, the valve seat being in contact with or spaced from the valve seat, And a communication passage communicating the bottomed opening with the second port,
Wherein the communication passage is formed in a U-shape having a ring-shaped one open toward the first port side and is formed along the axis of the opening having the bottom outside the valve seat, and the actuator of the valve body Which is opened to the bottom surface opposed to the actuator mounting surface,
Wherein the U-shaped flow path has a flow path cross-sectional area of a cross section cut in a direction orthogonal to the axial direction is larger than an opening area of the opening portion of the valve hole,
And a closure member provided on the bottom surface to block the U-shaped flow passage. A method of forming a flow path of a valve body in which an actuator for imparting a driving force to a valve body is provided,
A bottomed opening forming step of forming an opening with a bottom for accommodating the valve body in a cylindrical shape from an actuator mounting surface on which the actuator is installed;
A valve hole forming step of forming, from the actuator mounting surface, a valve hole having a diameter smaller than that of the bottomed opening, coaxial with the bottomed opening;
Wherein the valve hole is formed along a periphery of an opening portion that is opened to a bottom wall of the bottomed opening portion and is formed in a U-shape in which one side of the annular shape is opened outside the valve seat, A U-shaped flow passage having a flow passage cross-sectional area of a cross section cut in a direction orthogonal to the axial direction is larger than an opening area of the opening portion of the valve hole from a bottom face opposing the actuator mounting face to an axial direction of the bottom- A U-shaped flow path forming step of forming a U-
A first port formed so as to communicate with the valve hole from a first side surface in a direction in which the annular shape of the U-shaped flow path is opened, and a second port formed so as to communicate with the U-shaped flow path from a second side surface opposite to the first side surface A port forming step of providing a second port on a coaxial plane,
And a U-shaped flow path closing step of installing a closing member for blocking the U-shaped flow path on the bottom surface.

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