KR101634095B1 - Electric moving and injection equipment for Crucible - Google Patents

Abstract

The present invention relates to a method and apparatus for accurately transporting a crucible (71) filled with a raw material (polysilicon and dopant, etc.) to a main chamber of an ingot growing apparatus by using an electric conveying means, (1) according to claim 1, characterized in that the electric transporting means (5) comprises a plurality of wheels, a loading table (2) installed at one end of the electric transporting means (5) (20) vertically installed at one end and moving up and down by the elevating means, a lifting plate (25) installed on the lifting masts (19) (20) A first boom frame 45 horizontally installed on the front portion of the elevating plate 25, a second boom frame 46 connected to the end of the first boom frame 45 so as to be able to appear and disappear, A cylinder 51 which is provided at the end of the second boom rope 46, And the arm 66 and the crucible ring 67 is provided in the bottom side end portion of the arm 66, and is configured to include a rotating means for rotating the arm 66 in the crucible seated position.

Description

Technical Field [0001] The present invention relates to an electric crucible,

The present invention relates to an electric crucible transporting and feeding apparatus, and more particularly, to a crucible transporting and feeding apparatus using an electric crucible transporting and feeding apparatus, in which crucibles filled with (loaded) a raw material (polysilicon and dopant, etc.) So that it can be accurately put into and put into the main chamber of the ingot growing apparatus by using the boom bar.

Generally, an ingot growing apparatus by the Czochralski crystal growth method is a method of growing a silicon ingot (hereinafter referred to as a 'growth furnace'), for example, a crucible provided in a hot zone region A solid material such as polysilicon (or gallium arsenide) and impurities is supplied (supplied), heated and melted by an electric heater to form a silicon melt (Hot Melt), and then a single crystal seed is contacted with the silicon melt A silicon ingot having a predetermined length and a predetermined diameter is obtained.

Stacking for filling the quartz crucible with polysilicon and dopant, Vacuum for maintaining the growth furnace at a high vacuum, Melting for melting the polysilicon, Dipping to bring the melt into contact with the seed → Necking to raise the diameter as much as possible to avoid defects → Shouldering to increase the diameter of the ingot → Body to grow the length of the ingot A silicon ingot is obtained through various processes such as growth (growth) of the ingot, tailing which reduces the diameter of the ingot, and cooling down which cools the ingot.

On the other hand, as the size of the ingot becomes larger, the length of the ingot becomes longer and the amount of polysilicon to be loaded increases, so that the total weight of the crucible exceeds 300 kg. In order to prevent external impurities from entering the crucible, the furnace is filled with polysilicon (dopant or the like) in a separate clean room and then moved to the main chamber to set up the furnace. If it is settled in the main chamber, it is difficult to fix it, so it must be seated correctly and there should be no problems with centering.

Since a single crucible lift is fixedly installed between two ingot growing devices which are installed adjacent to each other, the crucible filled with the raw material is loaded by a method of lifting the crucible filled in the raw material into the passive carrying cart, and then the crucible is pushed close to the crucible lift The crucible is lifted by using the crucible lift, and then the crucible is placed and placed in the crucible position of the main chamber. Therefore, the work is inconvenient and difficult. In addition, since one crucible lift is required for each two ingot growing apparatuses, Not only the total cost of the apparatus is increased but also a lot of installation space is occupied.

In addition, when the crucible having a weight exceeding 300 kg is loaded or moved in the cart, or when the crucible is moved to the crucible position by being moved to the fixed lift, the crucible is crashed or broken due to breakage of impact or vacuum attraction force.

Korean Patent Laid-Open Publication No. 10-2012-0003700 (entitled "Crucible Transfer Device," issued on Jan. 11, 2012) Korean Patent Registration No. 10-0847263 (entitled "Crucible for Ingot Production," issued on July 18, 2008) Korean Utility Model Application Publication No. 20-2009-0005635 (Title: Feeding device for crucible crucible, 2009. 06. 10. Utility Model Release)

The present invention relates to an electric crucible capable of stably transporting a crucible filled with a raw material (polysilicon and dopant or the like) by installing a precisely controlled boom bar on an electric transportation truck and then quickly and accurately placing the crucible in the main chamber of the ingot growing apparatus. And to provide a transporting and feeding device.

The electric crucible transporting and feeding device of the present invention comprises: an electric transporting means (5) provided with a plurality of wheels (3); A loading table (2) installed at one end of the electric vehicle (5); An elevating mast (19) (20) vertically installed at one end of the loading table (2) and moving up and down by the elevating means; A lifting plate 25 mounted on the lifting masts 19 and 20 and lifted and lowered; A first boom bar 45 horizontally installed on a front portion of the elevating plate 25; A second boom stand 46 coupled to the end of the first boom stand 45 so as to be able to freely open and close; An impending / descending cylinder 51 for taking in / out the second boom rope 46; An arm 66 installed on an end of the second boom rope 46; A crucible hook 67 provided at an end of the bottom surface of the arm 66; Rotating means for rotating the arm 66; And control means; A first boom bar 45 horizontally installed on a front portion of the elevating plate 25; A second boom frame 46 which is superimposed and joined to the hollow portion of the first boom frame 45 so as to be able to protrude and retract; A sliding bearing installed at the overlapping portion of the first boom frame (45) and the second boom frame (46); A pushing / detaching cylinder 51 mounted on a bracket 52 fixed to the hollow side of the first boom frame 45 with a pin 53; A rod 54 of a protruding and retracting cylinder 51 provided with a pin 56 on a bracket 55 fixed to the inner side of the second boom rope 46; Sliding bearings (48) respectively engaged with the concave grooves (45b) formed in the inner side surface (45a) of the first boom frame (45) and contacting the outer side surfaces of the second boom rods (46); Sliding bearings 49 respectively engaged with the concave grooves 46b formed on the outer side surface 46a of the second boom rope 46 and contacting the inner side surfaces 45a of the first boom rope 45; , Wherein the rotating means includes a speed reducer (60) installed on the end of the second boom rope (46); A servo motor 61 installed at one side of the speed reducer 60; A timing belt 64 connecting the timing pulley 62 of the speed reducer 60 and the timing pulley 63 of the servo motor 61; An arm 66 fixed to the output shaft 65 of the speed reducer 60; A crucible ring (67) for hooking a crucible (71) on the bottom end face of the arm (66); And the turning radius L1 of the crucible ring 67 is the distance from the output shaft 65 of the speed reducer 60 to the crucible ring 67 and the distance between the center of the crucible support 69 and the center of the speed reducer 60 And the distance L2 to the output shaft 65 is equal to the turning radius L1 of the crucible ring 67. [

The present invention has an effect that the crucible having a weight of 300 kg or more can be stably transported by using the electric transporting means, and then the precisely controlled first boom bar can be used to accurately position the crucible in the main chamber.

Since the crucible is loaded and then transported to a specific ingot growing apparatus among a plurality of ingot growing apparatuses (electric type) for putting and placing the crucible, it is easy to work, and a single crucible It is not necessary to install them in a fixed form, so that the equipment cost is greatly reduced, and the space utilization is very high since the installation space (facility space) is not occupied much.

The present invention can accurately mount the crucible on the crucible support (or the graphite crucible) by precisely controlling the operator while visually observing the descent and the seating state of the crucible by approaching the main chamber by the operator using the wireless remote controller, There is no need to do so.

The present invention has an effect that the hot zone of the ingot growing apparatus can be raised and lowered as well as the crucible is transported, put in, and seated using the first boom bar provided with the elevating means.

The present invention is a very useful invention having an effect of preventing fall or breakage due to impact or breakage of vacuum attraction force due to stable movement of the crucible after loading the crucible on the pedestal of the electric vehicle.

1 is a side view showing an example of the present invention.
2 is a plan view showing an example of the present invention.
3 is a front view showing an example of the present invention, in which the elevating mast is lowered
4 is a front view showing an example of the present invention,
5 is a plan sectional view of a part of the boom of the present invention shown as one example of the present invention.
6 is a plan view of the driving part shown as one example of the present invention.
7 is a side view of the driving unit shown as one example of the present invention.
8 is a plan sectional view of the elevating mast portion shown as one example of the present invention.
9 is an enlarged cross-sectional view of the boom frame and the sliding bearing shown in Fig.
10 is a cross-sectional view taken along line AA 'of FIG.
11 is a sectional view taken along the line BB 'in Fig.
12 is a circuit block diagram of the control means shown as one example of the present invention.
13 is a block diagram of a wireless remote control circuit shown in an example of the present invention.
14 is a front view of a wireless remote control shown in an example of the present invention.
15 to 21: Side view of the crucible transporting state in the present invention.
22 shows a state in which the transportation crucible shown in Fig. 22 is seated on the crucible base.
Fig. 23 is a vacuum release state of the transportation crucible shown as one example of the present invention. Fig.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In the following description of the embodiments of the present invention, the same components as in the drawings are denoted by the same reference numerals as possible, and detailed descriptions of known configurations and functions are omitted so as not to obscure the gist of the present invention. May be different from what is actually implemented with the schematized drawings in order to easily describe the embodiments of the present invention.

1 and 2 are a side view and a plan view of an electric crucible transporting and feeding device 1 shown in an example of the present invention. Fig. 3 is a front view of a state in which a lifting mast is lowered, and Fig. 4 is a front view A first boom bar 45 is installed at one end of the electric transportation truck 5 so as to precisely control the elevation and the rotation of the electric transport truck 5 so that the ingot grows without loading the heavy crucible 71 of 300 kg or more into the cart, To the device and then directly into and into the main chamber.

That is, there are provided an electric vehicle 5 having a plurality of wheels 3 and 4, a loading table 2 installed at one end of the electric vehicle 5, A lift steel plate 25 mounted on the lift masts 19 and 20 and raised and lowered by the lift mast 19 and 20 mounted on the lift steel plate 25 and moving up and down by the lift means; A first boom frame 45 horizontally installed on the front part of the first boom frame 45; a second boom frame 46 connected to the end of the first boom frame 45 so as to protrude and retract; A crucible ring 67 provided at an end of a bottom surface of the arm 66 and a crucible ring 67 provided at an end of the arm 66 ) To a predetermined position, and control means and the like.

The present invention further includes a wireless remote control 97 that can be placed in a manner of precise control while the operator approaches the main chamber of the ingot growing apparatus and visually observes the falling and seating state of the crucible 71.

The present invention further includes a crucible support (69) on which the crucible (71) is temporarily seated when the crucible (71) is carried.

The present invention is capable of precisely controlling the height of the crucible (71) having a weight of 300 kg or more by raising and lowering means for raising and lowering the boom bar provided in the electric crucible transporting and charging device (1) to a predetermined height The crucible 71 having the weight is precisely controlled to the seating position by the rotating means including the servo mechanism.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an electric crucible transporting and feeding device 1 of the present invention will be described in detail.

In the electric vehicle 5 according to the present invention, a plurality of wheels 3, 4 such as two front wheels and two rear wheels are provided at the lower portion of the main body, a plate-like loading table 2 is provided at one side, A drive unit 6 for driving the front wheel 4 and a transmission 7 and a battery 11 are provided on one side of the vehicle body 1. A steering device 8 for steering the front wheel 4 and a steering wheel 9 , And the drive motor 6 is configured such that the speed and the braking force are varied by the switch and the controller 95. Since the electric vehicle 5 is used or applied to other industrial fields, detailed description and illustration are omitted. 3A and 3B are shaft members on which the rear wheel 3 is mounted.

A proximity sensor 93 for preventing collision is installed at a lower portion of one side of the electric transporting means 5 by sensing nearby objects or objects when the electric crucible transporting and charging device 1 moves to a destination, And a switch 90 connected to the controller 95 and composed of a plurality of switches for precisely controlling the electric crucible transporting and charging device 1 is installed at one side of the main body, And a plurality of push buttons of the remote controller 97 and corresponding push buttons.

The stand 2 is composed of a plate fixed to the upper surface of the frames 12 and 13 connected to the main body.

The crucible 71 is mounted on the upper surface of the loading table 2 so that the crucible 71 can be supported by the crucible 71 when the electric crucible transporting and feeding apparatus 1 of the present invention is running, And the crucible 69 is provided with a buffer means so that the impact is not transmitted to the crucible 71 being conveyed.

A circular support base 68 having a higher height than the crucible base 69 is provided around the crucible base 69 so that the crucible 71 seated on the crucible base 69 as shown in Fig. The inclination or fall of the crucible 71 is prevented even if an external force or an impact is applied.

A pair of left and right fixed masts 15 and 16 are vertically arranged on one side of the upper surface of the loading table 2 and a plurality of horizontal frames 17 18 are vertically installed to be rigid.

Spacing pieces 15a and 16a having a predetermined thickness are fixed by welding or the like between the fixed masts 15 and 16 and the horizontal frames 17 and 18 to form the fixed mast 15, The elevating masts 19 and 20 can be raised and lowered smoothly without disturbance by maintaining a constant interval between the elevating masts 16 and the elevating masts 19 and 20.

A pair of elevating masts 19 and 20 are vertically installed inside the fixed masts 15 and 16 and horizontal frames 39 and 40 are fixed to the upper and lower portions of the elevating masts 19 and 20 And is configured to move up and down at a predetermined height by the guide of the fixed masts 15 (16) and the elevating means.

The fixed masts 15 and 16 are structured such that the guide grooves 15a and 16a are opposed to each other and the elevating masts 19 and 20 are also provided with guide grooves 19a and 20a The upper and lower portions of the outer surfaces of the elevating masts 19 and 20 are coupled to the guide grooves 15a and 16a of the fixed masts 15 and 16 as shown in Figs. The guide grooves 19a and 20a of the elevating masts 19 and 20 are formed so that the elevating masts 19 and 20 can be elevated and lowered, The wheels 27, 28, 29 and 30 provided on the shaft brackets 25a and 25b fixed to the upper and lower sides of the lift plate 25 are respectively coupled to the lift plate 25 Can rise and fall at a predetermined height.

A first boom frame 45 is horizontally fixed to a front portion of the elevating masts 19 and 20. A second boom frame 46 is provided at an end of the first boom frame 45 and is projected and retracted by a projecting / An arm 66 is provided at the end of the second boom rope 46 to be rotated by the rotating means and a crucible 71 is attached to the end of the bottom surface of the arm 66, A ring 67 is provided. The crucible ring 67 can be installed to rotate freely.

The elevating means includes an elevating cylinder 31 vertically installed on the upper surface of the loading table 2, a shaft member 33 horizontally installed at the end of the rod 32 of the elevating cylinder 31, A shaft member 33 provided on both sides of the lower portion of the shaft bracket 34 and a shaft member 33 provided on both sides of the shaft member 33, A pair of support pieces 43 and 44 fixed to both sides of the horizontal frame 17 of the fixed masts 15 and 16 and a pair of support pieces 43 and 44 fixed to both sides of the lower portion of the lift plate 25 One end of each of the support pieces 41 and 42 and the chain sprocket 35 and 36 is fixed to the support pieces 41 and 42 and the other end of the chain pieces is supported by the support pieces 43 and 44, And chains 37 and 38, respectively, which are fixed to the frame.

The chains 37 and 38 coupled to the chain sprockets 35 and 36 are fixed to the support pieces 43 and 44 of the horizontal frame 17 at their other ends, One end of which is fixed to one of the first and second boom rods 41 and 42 and the lift plate 25 is fixed to the first boom rope 45 and the second boom rope 46 and the arm 66, The tension of the chains 37 and 38 is always maintained.

A limit switch 91 is provided on one side of the loading table 2 and a contact of the limit switch 91 is pressed to the lower end of the elevating masts 19 The pressing member 92 is fixed and controlled so that the elevating masts 19 and 20 are not excessively lowered.

Therefore, when the rod 32 of the elevating cylinder 31 is immersed and descended, the shaft member 33 is lowered, so that the elevating masts 19 and 20 to which the shaft member 33 is fixed, The chain sprockets 35 and 36 to which the chains 37 and 38 are coupled in the downward direction and rotate in the clockwise direction in FIG. The descent height of the first boom frame 45 is controlled and determined according to the immersion degree of the rod 32 of the elevating cylinder 31. [

When the pressing member 92 provided below the elevating masts 19 and 20 presses the operating piece of the limit switch 91 when the elevating mast 19 or 20 descends and the contact is turned on, (19) and (20) is stopped, an excessive lowering is prevented.

Conversely, when the rod 32 of the lifting cylinder 31 protrudes and rises, the lifting mast 19 (20) to which the shaft member 33 is fixed is raised as shown in Figs. 4, 15 The chain sprockets 35 and 36 to which the tension chains 37 and 38 are coupled rotate in the counterclockwise direction in FIG. The height of the first boom frame 45 is also controlled and determined according to the degree of projection of the rod 32 of the elevating cylinder 31. [

As shown in FIG. 5, the second boom frame 46 is superposed and coupled to the hollow portion of the first boom frame 45 horizontally installed on the front portion of the elevating plate 25, A plurality of slide bearings 48 and 49 are provided in the overlapping portion of the second boom frame 46 and a protruding and retracting cylinder 51 is provided on the bracket 52 fixed to the side face of the hollow portion of the first boom frame 45, The end of the rod 54 of the protruding and retracting cylinder 51 is provided with a pin 56 so that the protruding and retracting cylinder 51 is provided on the bracket 55 fixed to the inner side surface of the second boom rope 46, The second boom frame 46 is also protruded when the rod 54 of the appearance-taking cylinder 51 protrudes. Conversely, when the rod 54 of the appearance-taking cylinder 51 is immersed, The degree of protrusion (or immersion) of the second boom stand 46 is determined according to the degree of protrusion (or immersion) of the second boom rope 46.

In the present invention, the second boom frame 46 coupled to the first boom frame 45 is preferably polygonal or hexagonal so as not to rotate as shown in FIGS. 10 and 11, and the first boom frame 45 is also preferably polygonal or hexagonal , The first boom frame (45) and the second boom frame (46) are formed with a gap so that the sliding bearings (48) and (49) can slide.

A plurality of sliding bearings 48 and 49 provided between the first boom frame 45 and the second boom frame 46 are arranged in the width direction of the first boom frame 46 so that the second boom frame 46 can freely protrude / Sliding bearings 48 which are respectively engaged with the concave grooves 45b formed in the inner side surface 45a of the first boom frame 45 and brought into contact with the outer surface of the second boom frame 46, And a sliding bearing 49 which is respectively engaged with the concave groove 46b formed on the outer side surface 46a of the second boom rope 46 and which is in contact with the inner side surface 45a of the first boom rope 45, do.

The sliding bearings 48 and 49 are made of a metal having a lower coefficient of friction than that of the first and second boom stands 45 and 46 so that when the second boom stand 46 comes in and out, It is preferable to reduce the replacement cost by causing the sliding bearings 48 and 49 to be worn first than the two boom stands 45 and 46. [ For example, when the first and second boom ropes 45 and 46 are steel or stainless steel, the sliding bearings 48 and 49 may be made of copper or brass.

The rotating means for rotating the arm 66 includes a speed reducer 60 provided at the end of the second boom rope 46, a servo motor 61 provided at one side of the speed reducer 60, A timing belt 64 connecting the pulley 62 and the timing pulley 63 of the servo motor 61 and an arm 66 fixed to the output shaft 65 of the speed reducer 60, A crucible ring 67 for hooking a crucible 71 is provided on the bottom surface of the end portion so that the arm 66 is rotated in the clockwise direction (A direction) or counterclockwise (Direction B) while moving to the crucible 71 seating position. The servo motor 61, the speed reducer 60, the timing pulleys 62 and 63, and the timing belt 64 are mounted inside the case 58 and protected.

The seating position of the crucible 71 is either the crucible support 69 provided on the stage 2 or the crucible support 82 located in the main chamber of the ingot growing apparatus.

2, the turning radius L1 of the crucible ring 67 provided on the arm 66 is the distance from the output shaft 65 of the speed reducer 60 to the crucible ring 67, The distance L2 from the central portion of the crucible support 69 to the output shaft 65 of the speed reducer 60 is set to be equal to the turning radius of the crucible ring 67 It is necessary to keep the distance L2 by protruding or immersing the second boom stand 46 by operating the appearance-taking cylinder 51 and then lowering the crucible 71 as shown in FIG. 19 The stable conveyance to the ingot growing apparatus can be achieved and the circular supporting table 68 positioned on the outside can prevent the excessive force or shock The crucible 71 is prevented from tilting or falling down . Reference numeral 68a in Fig. 2 is a centering control member capable of centering the crucible 71 as necessary.

12 is a control means shown in an example of the present invention. In the input of the controller 95, a plurality of switch pads are provided for controlling the running of the electric crucible transporting and charging device 1 and the first boom bar 45 A limit switch 91 for detecting (detecting or controlling) the lowering limit of the elevating masts 19 and 20 and a limit switch 91 for detecting the lower limit of the elevating masts 19 and 20 when the electric crucible transporting and feeding device 1 moves, And a proximity sensor 93 that detects the proximity sensor 93 and inputs it to the controller 95 are connected, respectively.

The wireless communication unit 96 is connected to the input and output of the controller 95 so as to control the electric crucible transporting and feeding apparatus 1 by using the wireless remote control 97. An output of the controller 95 A drive motor 6 for driving the electric vehicle 5 and an electromagnetic brake; a servomotor 61 and an encoder for precisely rotating the arm 66; an elevating cylinder And a battery 11 which is mounted on the conveying means 5 and supplies operating power to the second boom rope 46. The second boom rope 46 is connected to the second boom rope 46,

13 is a circuit block diagram of the wireless remote controller 97 shown in FIG. 13, a keypad is connected to an input of a control unit, a memory is connected to an input / output of the control unit, and a transmission unit and a display unit are connected to the output of the control unit. When the wireless remote controller 97 transmits a radio wave control signal, the wireless remote controller 97 receives the control signal from the wireless communication unit 96 and inputs it to the controller 95 so that the electric crucible transporting and feeding apparatus 1 of the present invention is wirelessly controlled.

14 is a front view of a wireless remote controller 97 shown in the embodiment of the present invention. The circuit block diagram shown in Fig. 13 is mounted inside a main body 98 of a size that can be easily held and handled with one hand, The antenna is embedded in the main body 98 or patterned (or wired) on the printed board mounted on the main body 98 since the antenna is a short distance of several tens to several hundred cm.

An operation indicator 100 that lights or blinks when a button is operated is provided on an upper portion of the front surface of the main body 98. A plurality of push buttons are provided at the center of the front surface of the main body 98, .

The plurality of push buttons include a power button 101 for turning on / off the operation power of the first boom arm 45 and the servo motor 61, The elevating masts 19 and 20 and the first boom frame 45 and the second boom frame 46 are raised and lowered in such a manner that the emergency button 102 for stopping the operation of the elevating cylinder 31 and the rod 32 of the elevating cylinder 31 are raised, The elevating mast 19 and 20 and the first boom bar 31 are moved upward and downward by a method in which the elevating button 103 for slowly raising the arm 66 and the crucible hook 67 and the rod 32 of the elevating cylinder 31 are lowered and immersed, A descending button 104 for slowly lowering the second boom rope 46, the arm 66 and the crucible ring 67 and a rod 54 of the projecting / detaching cylinder 51 are projected from the second boom rope 45, A backward button 106 for slowly introducing the second boom frame 46 by a method of immersing the rod 54 of the projecting and retracting cylinder 51 and a backward button 106 for slowly moving the servomotor 61 ) In the forward direction A right button 107 for slowly rotating the arm 66 in the counterclockwise direction and a right button 108 for slowly rotating the arm 66 in the clockwise direction by rotating the servo motor 61 in the opposite direction, And a knob or a necklace 99 is provided on the upper part of the main body 98 to precisely control the electric crucible transporting and feeding apparatus 1 of the present invention.

The switch (90) provided on the electric transport means (5) can be operated by providing buttons corresponding to the plurality of push buttons.

Figs. 15 to 21 illustrate a process of transporting and placing the crucible 71 on and off. 15 is a side view of the electric crucible transporting and charging device 1 of the present invention in order to transport the crucible 71 placed on the base 80 of the clean room to the open-air growing device.

The crucible 71 is filled with a predetermined amount of solid raw material such as polysilicon (or gallium arsenide) as a raw material and a dopant, and then the lid 72 is joined to the upper part of the crucible 71 to be sealed. The crucible 71 and the lid 72 are firmly coupled to each other and the lower end of the wire 76 is connected to or connected to the ring 75 fixed to the three edge portions of the lid 72, And the upper end of the wire 76 is fixed to one hook 77 to be hooked on the crucible 67. An unillustrated vacuum gauge is installed at one end of the vacuum port 73 or the cover 72.

16 shows a state in which the lifting plate 25, the first boom frame 45, the crucible hook 67, and the like are moved to a predetermined height by operating the switch 90 or the wireless remote controller 97 of the stopped electric crucible transporting and feeding device 1 The hooks 77 to which the wire 76 is fixed are engaged with the crucible ring 67. In this state, The electric crucible transporting and feeding apparatus 1 is properly moved and stopped so that the crucible ring 67 is positioned directly above the crucible 71 or the second boom frame 46) is in a state of moderation.

17 shows a state in which the crucible 71 rises to a predetermined height when the lifting plate 25, the first boom stand 45 and the crucible ring 67 are raised to a predetermined height by the operation of the switch 90 or the wireless remote controller 97 18 shows a state in which the servo motor 61 is rotated by the operation of the switch 90 or the wireless remote controller 97 and the timing pulley 63 and the timing belt 64 and the timing pulley 62 and the speed reducer 60 The arm 66 provided on the output shaft 65 rotates at a predetermined angle while rotating so that the crucible 71 is positioned directly above the crucible support 69. Of course, 71 is not located, the crucible 71 is rotated by the switch 90 or the wireless remote controller 97 by driving the projecting / detaching cylinder 51 to adjust the projecting / retreating degree of the second boom stand 46, As shown in FIG.

19 shows a state in which the crucible 71 is lifted up to the crucible base 69 by the operation of the switch 90 or the wireless remote controller 97 while the lifting plate 25, the first boom frame 45 and the crucible ring 67 are lowered to a predetermined height, And in this state, in a state of approaching the ingot growing apparatus as a destination by driving and steering operation of the electric crucible transporting and introducing apparatus 1, the crucible base 1 The crucible 71 which has been seated on the crucible 71 is raised and then the arm 66 is rotated at a predetermined angle and the projecting and lowering cylinder 51 is driven to control the appearance of the second boom frame 46, 71 are elevated to be positioned directly above the crucible supporter 82 of the main chamber provided in the ingot growing apparatus. The crucible support 82 may be a graphite crucible or a crucible support including a graphite crucible and a pedestal 85, a drive shaft 86 and a drive means 87 may be provided at the bottom of the crucible support 82, 82, a heat-transfer heater 88 and a heat-shielding member 89 are provided.

21 shows that the lifting plate 25, the first boom stand 45 and the crucible ring 67 are lowered by the operation of the switch 90 or the wireless remote controller 97 and the crucible 71 is also lowered, 22 shows a state in which the wire hooks 77 are separated from the crucible ring 67 and the electric crucible transporting and feeding device 1 is moved to another place for the next operation 23 shows a state in which the lid 72 separated from the crucible 71 is removed while the vacuum of the vacuum port 73 is released and the crucible 71 is completely filled and put in place.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be taken by way of limitation, It is self-evident to those of ordinary skill.

(1) - Electric crucible conveying and feeding device (2) - Loading rack
(3) (4) (21) (22) (23) (24) (27) (28) (29)
(5) - electric transport means (6) - drive motor
(7) - Transmission (8) - Steering device
(9) - steering wheel (11) - battery
(12) (13) -frame (15) (16) -fixed mast
(15a) (16a) (19a) (20a) - guide groove (17) (18) - horizontal frame
(19) (20) - Elevating mast (25a) (25b) (34) - Axial bracket
(25) - a lift plate (31) - a lift cylinder
(32) - the rod (33) of the lifting cylinder -
(35) (36) - chain sprocket (37) (38) - chain
(41) (42) (43) (44) - Support piece (45) - First boom bar
(46) - Second boom stand (48) (49) - Sliding bearing
(51) - Appearance cylinder (52) (55) - Bracket
(54) - rods (53) and (56) of the attracting /
(60) - Reduction gear (61) - Servo motor
(62) (63) - Timing pulley (64) - Timing belt
(65) - Output shaft (66) of the speed reducer -
(67) - Crucible ring (68) - Support
(69) (82) - Crucible base (71) - Crucible
(72) - cover (73) - vacuum port
(75) - ring (76) - wire
(77) - hook (90) - switch
(91) - limit switch (92) - pressing member
(93) proximity sensor (95) - controller
(96) - wireless communication unit (97) - wireless remote control
(98) - Main body (100) - Operation indicator
(101) - Power button (102) - Emergency button
(103) - Up button (104) - Down button
(105) - forward button (106) - reverse button
(107) - Left button (108) - Right button

Claims (1)

An electric vehicle 5 having a plurality of wheels 3, 4;
A loading table (2) installed at one end of the electric vehicle (5);
An elevating mast (19) (20) vertically installed at one end of the loading table (2) and moving up and down by the elevating means;
A lifting plate 25 mounted on the lifting masts 19 and 20 and lifted and lowered;
A first boom bar 45 horizontally installed on a front portion of the elevating plate 25;
A second boom stand 46 coupled to the end of the first boom stand 45 so as to be able to freely open and close;
An impending / descending cylinder 51 for taking in / out the second boom rope 46;
An arm 66 installed on an end of the second boom rope 46;
A crucible hook 67 provided at an end of the bottom surface of the arm 66;
Rotating means for rotating the arm 66; And control means;
A first boom bar 45 horizontally installed on a front portion of the elevating plate 25;
A second boom frame 46 which is superimposed and joined to the hollow portion of the first boom frame 45 so as to be able to protrude and retract;
A sliding bearing installed at the overlapping portion of the first boom frame (45) and the second boom frame (46);
A pushing / detaching cylinder 51 mounted on a bracket 52 fixed to the hollow side of the first boom frame 45 with a pin 53;
A rod 54 of a protruding and retracting cylinder 51 provided with a pin 56 on a bracket 55 fixed to the inner side of the second boom rope 46;
Sliding bearings (48) respectively engaged with the concave grooves (45b) formed in the inner side surface (45a) of the first boom frame (45) and contacting the outer side surfaces of the second boom rods (46);
Sliding bearings 49 respectively engaged with the concave grooves 46b formed on the outer side surface 46a of the second boom rope 46 and contacting the inner side surfaces 45a of the first boom rope 45;
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Wherein,
A speed reducer 60 provided on an end of the second boom rope 46;
A servo motor 61 installed at one side of the speed reducer 60;
A timing belt 64 connecting the timing pulley 62 of the speed reducer 60 and the timing pulley 63 of the servo motor 61;
An arm 66 fixed to the output shaft 65 of the speed reducer 60;
A crucible ring (67) for hooking a crucible (71) on the bottom end face of the arm (66);
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The turning radius L1 of the crucible ring 67 is the distance from the output shaft 65 of the speed reducer 60 to the crucible ring 67 and is set so that the center of the crucible support 69 and the output shaft 65 of the speed reducer 60, And the distance L2 from the crucible ring to the crucible ring is equal to the turning radius L1 of the crucible ring.

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