KR101631821B1 - Improved Line Light Source Module, and Light Irradiation Apparatus and Method Having the Same - Google Patents

Abstract

The present invention discloses an improved line light source module, and a light irradiation apparatus and method including the same. The line light source module of the present invention comprises: a plurality of line light sources configured to contain a plurality of light source units comprising a plurality of light-emitting diode chips emitting lights of different wavelengths, and a common electrode and a signal electrode for external connection which are connected to each of the light-emitting diode chips; a regular polygonal fixing block, having a regular polygonal surface on which each of the line light sources is mounted; and a frame in which the regular polygonal fixing block is rotatably mounted, wherein the common electrode and the signal electrode for external connection are respectively in contact with a pair of contact members provided on a horizontal member of the frame.

Description

TECHNICAL FIELD [0001] The present invention relates to an improved line light source module, an improved light source module having the improved line light source module,

The present invention relates to an improved line light source module, a light irradiation device having the same, and a light irradiation method.

More specifically, the present invention provides a plurality of line light sources emitting different wavelengths from each other on a regular polygonal surface of a rotatable regular polygonal fixed block, wherein the regular polygonal fixed block is mounted on a frame, A plurality of line light sources corresponding to various wavelengths used in a light irradiation apparatus used in an inspection apparatus, a curing apparatus, or the like can be provided as one module It is not necessary to replace the line light source of the corresponding wavelength when it is required to use a line light source of a different wavelength in the light irradiation apparatus and it is not necessary to set the whole process time the tact time is remarkably shortened, the productivity is greatly increased, and each of the wavelengths Since the use of some components (for example, some lens elements) used in the line light source of the light source of the present invention is unnecessary, the manufacturing cost of the entire apparatus can be remarkably reduced, And to a survey method.

In general, an exposure apparatus is used in a flat panel display (FPD) and a printed circuit board (PCB) technology. More specifically, the exposure apparatus includes a plurality of identical or different patterns, such as electrodes or dots, on a glass substrate or a printed circuit board (PCB) (E.g., an electrode circuit pattern, a color filter, a black matrix, or an electromagnetic interference (EMI) filter), or to form patterns that constitute circuitry on the PCB Is used. These patterns are generally formed by coating a photoresist (PR) solution or a metal paste (hereinafter collectively referred to as "coating solution") such as copper (Cu), silver (Ag) There is used a light irradiation apparatus for inspecting or hardening a pattern using a beam emitted from a light source on a coated pattern.

A line light source module is used as one of the light irradiation devices described above. Such a line light source module is disclosed in, for example, " Line light source and line light source module for an exposure apparatus, exposure apparatus for forming a pattern having the same, and exposure system " Filed as Application No. 10-2010-0110077, and described in Korean Patent No. 10-1087787, filed on Nov. 22,

More specifically, FIG. 1A is a plan view of a conventional line light source module, FIG. 1B is a partial plan view of a line light source used in the line light source module shown in FIG. 1A, and a partial perspective view of the line light source module .

1A and 1B, a conventional line light source module 111 includes a line light source 110; And a microlens array 120 mounted on a lower portion of the line light source 110 and composed of a plurality of microlenses 122 and 124 for focusing a beam emitted from the line light source 110.

The line light source module 111 includes a plurality of first and second ultraviolet light emitting diode chips 112a and 112b and a plurality of third and fourth ultraviolet light emitting diode chips 114a and 114b, And a common electrode 116 for connecting the common signals of the common electrode 116 to each other. The common electrode 116 can be configured so that a maximum number of ultraviolet light emitting diode chips are included in the line light source 110 of the line light source module 111 for an exposure apparatus.

The conventional line light source module 111 outputs control signals to the plurality of first and second ultraviolet LED chips 112a and 112b and the plurality of third and fourth ultraviolet LED chips 114a and 114b And an external signal electrode 118 for external connection. In this case, among the first through fourth ultraviolet light-emitting diode chips 112a through 114b, the anode is the common electrode 116, the cathode is the external connection signal electrode 118, The cathode of the first to fourth ultraviolet LED chips 112a to 114b may be the common electrode 116 and the anode may be the external connection signal electrode 118. [ The plurality of first to fourth ultraviolet LED chips 112a, ..., and 114b may be individually controlled through the external signal electrode 118 for external connection.

The microlens array 120 includes a plurality of first to fourth ultraviolet LED chips 112a to 114b arranged in a line with the centers of the plurality of first to fourth ultraviolet LED chips 112a to 114b constituting the line light source 110, And fourth microlenses 122a, ..., and 124b.

In addition, in the conventional line light source module 111, a heat generation problem occurs by simultaneous driving of the first to fourth ultraviolet LED chips 112a, ..., and 114b constituting the line light source 110 . In order to solve such a problem, the conventional line light source module 111 may further include a support member 130 mounted on the upper (or back) surface of the line light source 110. [

1C is a view schematically showing a line light source module and a light irradiation device according to a first embodiment of the prior art. FIG. 1D is a diagram illustrating a specific configuration of a plurality of line light sources used in the line light source module shown in FIG. Fig.

1C and 1D, the line light source module 111 according to the first embodiment of the related art includes a plurality of light source units 113a and 113b each composed of a plurality of light emitting diode chips 112a, 112b and 112c And a plurality of line light sources 110a, 110b, and 110c formed of a common electrode 116 and an external signal electrode 118, which are connected to the plurality of light emitting diode chips 112a, 112b, and 112c, ; A support member 130 on which the plurality of line light sources 110a, 110b, and 110c are mounted; And a frame 102 on which the support member 130 is mounted.

The light irradiation apparatus 100 according to the first embodiment of the related art includes a plurality of light source units 113a, 113b, and 113c each composed of a plurality of light emitting diode chips 112a, 112b, and 112c, A plurality of line light sources 110a, 110b and 110c constituted by a common electrode 116 connected to the light emitting diode chips 112a, 112b and 112c and an external signal electrode 118; A support member 130 on which the plurality of line light sources 110a, 110b, and 110c are mounted; A frame 102 on which the support member 130 is mounted; The light source unit is provided below the light source unit so as to be relatively movable with respect to the frame, and light emitted from any one of the light source units is reduced, And a lens member 140 for forming an image on an object (not shown).

1E is a view schematically showing a line light source module and a light irradiation device according to a second embodiment of the prior art.

Referring to FIG. 1E and FIG. 1D, the line light source module 111 according to the second embodiment of the prior art is exactly the same as the line light source module 111 according to the first embodiment of the prior art shown in FIG. 1C .

The light irradiation apparatus 100 according to the second embodiment of the present invention includes a plurality of light source units 113a, 113b, and 113c each composed of a plurality of light emitting diode chips 112a, 112b, and 112c, A plurality of line light sources 110a, 110b and 110c constituted by a common electrode 116 connected to the light emitting diode chips 112a, 112b and 112c and an external signal electrode 118; A support member 130 on which the plurality of line light sources 110a, 110b, and 110c are mounted; A frame 102 on which the support member 130 is mounted; 113b and 113c and the light emitted from each of the plurality of light source units 113a to 113c is reduced so that an object on the substrate 150 (not shown) And a plurality of lens members 140a, 140b, and 140c for imaging the light beams.

A common electrode 116 constituting a plurality of line light sources 110a, 110b and 110c used in the line light source module 111 and the light irradiation device 100 according to the first and second embodiments of the prior art, The signal electrode 118 for external connection may be implemented as a printed circuit board (PCB), and each of the plurality of line light sources 110a, 110b, and 110c may be referred to as an LED PCB module.

Also, the support member 130 has a heat sink function of the plurality of light emitting diode chips 112a, 112b, and 112c.

The plurality of light emitting diode chips 112a constituting the light source unit 113a, the plurality of light emitting diode chips 112b constituting the light source unit 113b and the plurality of light emitting diode chips 112b constituting the light source unit 113c, (E.g., visible light, ultraviolet light of 365 nm, and ultraviolet light of 405 nm), respectively.

The line light source module 111 and the light irradiation device 100 according to the first and second embodiments of the conventional art described above can be applied to the substrate 150 by using an object (not shown) (for example, Alignment marks, etc.), which can be used to cure or inspect, in which case the following problems arise.

The line light source module 111 and the light illuminating device 100 according to the first embodiment of the prior art shown in FIG. 1C may be used to illuminate an object (not shown) (e.g., a specific pattern) on the substrate 150 The pattern formed by the coating solution 1 should be inspected or cured by using the light source unit 113b and the pattern formed by the coating solution 2 different from the coating solution 1 should be inspected or cured by using the light source unit 113a Or hardened. In this case, when the pattern formation position P is located below the light source unit 113b, in order to inspect or cure the pattern using the light source unit 113a, the light source unit 113a is mounted on the lens member 140 Since the wavelengths of the light beams generated by the light source unit 113b and the light source unit 113a are different from each other as well as the frame 102 is moved to the right side so as to be positioned at the light source unit 113a Since the position of the light source unit 113a is changed according to the movement of the frame 102, the height between the light source unit 113a and the substrate 150 can be changed Therefore, a new setting process for adjusting the height is required. thereafter. The entire process time is increased.

In the line light source module 111 and the light irradiation device 100 according to the second embodiment of the prior art shown in FIG. 1E, in the case of the pattern inspection or curing described above, the pattern is inspected using the light source unit 113a Not only the light source unit 113a and the lens member 140a must move the frame 102 to the right to move the light source unit 113b and the lens member 140b to the positions on the lens member 140b, Since the position of the light source unit 113a is changed according to the movement of the frame 102, the height between the light source unit 113a and the substrate 150 may be changed, so that a new setting process for adjusting the height is still required do. thereafter. In the line light source module 111 and the light irradiation device 100 according to the second embodiment of the related art, not only the number of lens elements, which are components to be used, increases but also the whole process time is increased.

In addition, in the prior art, in Korean Patent Application No. 10-2012-0053542 filed on May 21, 2012 under the name of the invention entitled " Dimmer for Microscope ", the Korean Patent registered on August 3, 2012 No. 10-1172840 discloses a technique in which a plurality of LEDs having different wavelengths of emitted light are used and light of different wavelengths is successively irradiated onto the specimen while a light guide for a microscope The device is described in detail.

More specifically, FIG. 2A is a perspective view schematically showing a conventional dimming apparatus for a microscope, FIG. 2B is a perspective view schematically showing a motor unit of the dimming apparatus for a microscope shown in FIG. 2A, 2B is an exploded perspective view schematically showing the motor portion of the light modulation device for a microscope shown in Figs.

Referring to FIGS. 2A to 2C, a conventional dimmer 200 for a microscope comprises a housing part 210, a motor part 240; A connector portion 230; A cooling water portion 250; A heat dissipation unit 270; And a control unit 280.

The housing part 210 includes a lower housing 211 and an upper housing 212. The upper housing 212 is detachably engaged with the lower housing 211 to close the open both sides and the upper portion of the lower housing 211.

The motor unit 240 is installed in the lower housing 211 and includes a motor 241; A cooling disk 242; And a coupling plate 246. The cooling disk 242 is disposed on the front side of the motor 241 and is coupled to the rotation shaft of the motor 241 and rotated.

In addition, a plurality of LED chips 290 are coupled to the front surface of the cooling disk 242 at a predetermined interval. The plurality of LED chips 290 emit light of different wavelengths. A flow path 244 through which cooling water can flow is formed inside the cooling disk 242 so that heat is exchanged between the heat generated during the operation of the LED chip 290 and the low temperature cooling water flowing through the flow path.

The coupling plate 246 is disposed on the rear side of the motor 241 and is coupled to the rotation shaft of the motor 241 and rotated together with the cooling disk 242. The coupling plate 246 is coupled to a substrate (not shown) connected to a plurality of LED chips 290. The wiring connecting between the substrate and the LED chip 290 is coupled with the cooling disk 242 The plate 246 is also coupled to the motor 241 and rotated.

The connector 230 is coupled to the front surface of the lower housing 211 and includes a base plate 231 which overlaps a portion of the front surface of the lower housing 211, And a plurality of insertion holes 233 are formed spaced apart from each other at regular intervals to connect the inner and outer portions of the lower housing 211 to each other. And a connecting plate 232.

As described above, since the plurality of LED chips 290 emitting light of different wavelengths are spaced apart from each other by a predetermined distance and are coupled to the front surface of the cooling disk 242 in the conventional microscope light modulation device 200, When the operation button is pressed after inserting one light guide into the insertion hole 233, the motor 241 is rotated so that the LED chip 290 of the wavelength is aligned with the light guide, and the light of the corresponding wavelength is sequentially The following problems still arise.

In order to prevent the wiring connecting between the substrate and the LED chip 290 from being twisted when the cooling disk 242 is rotated in the conventional dimming device 200 for a microscope according to the related art, And the use of a separate coupling plate 246 which is coupled to the rotation axis of the motor 241 and which must be rotated together with the cooling disk 242 is required.

Further, since two wirings (input and output wirings) are required for one LED chip 290, a plurality of LEDs 112a, 112b and 112c, respectively, as shown in Figs. 1C to 1E When the line light sources 110a 110b and 110c are used, a considerable number of wires are required. In this case, there arises a problem that the size of the cooling disk 242, the coupling plate 246, and the motor 241 must be considerably increased in order to prevent the wiring from being twisted.

Therefore, a new method for solving the above-mentioned problems is required.

1. Korean Patent No. 10-1087787 2. Korean Patent No. 10-1172840

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems of the prior art, and it is an object of the present invention to provide a plurality of line light sources emitting different wavelengths from each other on a regular polygonal surface of a rotatable regular polygonal fixed block, And the frame is provided with a pair of contact members connected to each pair of electrode portions of the plurality of line light sources, whereby a plurality of contact lenses corresponding to various wavelengths used in the light irradiation apparatus used in the inspection apparatus, It is possible to provide a line light source of a different wavelength in a light irradiating apparatus, and when it is required to use a line light source of a different wavelength, it is not necessary to replace and set the line light source of the corresponding wavelength, The total process time (tact time) due to the replacement setting and the like is remarkably shortened, and the productivity is greatly increased An improved line light source module in which the manufacturing cost of the entire apparatus can be remarkably reduced since the use of some components (for example, some lens elements) used in each line light source emitting different wavelengths is unnecessary, and And a light irradiation apparatus and a light irradiation method having the same.

A line light source module according to a first aspect of the present invention includes a plurality of light source units each comprising a plurality of light emitting diode chips emitting light of different wavelengths, a common electrode connected to each of the plurality of light emitting diode chips, A plurality of line light sources constituted by signal electrodes for connection; A regular polygonal fixed block having a regular polygonal surface on which the plurality of line light sources are mounted; And a frame to which the regular polygonal fixed block is rotatably mounted, wherein the common electrode and the signal electrode for external connection are each connected to a pair of contact members provided on a horizontal member of the frame.

A light irradiation apparatus according to a second aspect of the present invention includes a plurality of light source units each comprising a plurality of light emitting diode chips emitting light of different wavelengths, a common electrode connected to each of the plurality of light emitting diode chips, A plurality of line light sources constituted by signal electrodes for connection; A regular polygonal fixed block having a regular polygonal surface on which the plurality of line light sources are mounted; A frame in which the regular polygon fixing block is rotatably mounted; A pair of contact members provided on the horizontal member of the frame and respectively connected to the common electrode and the signal electrode for external connection; A pair of power supply members connected to the pair of contact members and a pair of cables, respectively, for supplying power to the pair of contact members; And a lens member provided at a lower portion of the horizontal member and configured to image the different light beams emitted from the plurality of light source units to an object on the substrate.

The light irradiation method according to the third aspect of the present invention is characterized in that a) a plurality of line light sources mounted on regular polygonal surfaces provided on a regular polygonal fixed block, using one line light source for emitting light of a first wavelength, Irradiating the object on the substrate with light of the first wavelength through a lens member provided at a lower portion of the light source; b) moving the regular polygonal fixed block in an upward direction of the frame; rotating the regular polygonal fixed block with respect to the rotation axis of the frame by a predetermined angle so that the other one of the plurality of line light sources emitting the light of the second wavelength is positioned on the lens member; d) moving the regular polygonal fixed block to a predetermined position in a downward direction of the frame; And e) irradiating light of a second wavelength to the object on the substrate through the lens member using the other one of the line light sources.

The following advantages can be achieved by using the improved line light source module according to the present invention, the light irradiation device having the same, and the light irradiation method.

1. It is possible to provide a plurality of line light sources corresponding to various wavelengths used in a light irradiation apparatus used for an inspection apparatus or a curing apparatus as a single module.

2. When it is required to use line light sources of different wavelengths in the light irradiation apparatus, it is not necessary to set the replacement light source with the line light source of the corresponding wavelength.

3. When applied to the mass production process, the total process time (tact time) due to the replacement setting of the line light source, etc. is remarkably shortened and the productivity is greatly increased.

4. The use of some components (e.g., lens elements) used in each line light source emitting different wavelengths is unnecessary.

5. The manufacturing cost of the entire apparatus is significantly reduced.

Further advantages of the present invention can be clearly understood from the following description with reference to the accompanying drawings, in which like or similar reference numerals denote like elements.

1A is a plan view of a conventional line light source module.
1B is a partial plan view of a line light source used in the line light source module shown in FIG. 1A and a partial perspective view of the line light source module.
1C is a schematic view of a line light source module and a light irradiation device according to a first embodiment of the related art.
FIG. 1D is a plan view showing a specific configuration of a plurality of line light sources used in the line light source module shown in FIG. 1C.
FIG. 1E is a view schematically showing a line light source module and a light irradiation device according to a second embodiment of the prior art.
2A is a perspective view schematically showing a conventional dimming device for a microscope.
Fig. 2B is a perspective view schematically showing the motor portion of the dimming device for a microscope shown in Fig. 2A. Fig.
2C is an exploded perspective view schematically showing the motor portion of the light modulation device for a microscope shown in FIG. 2A.
3A is a side view schematically showing a line light source module and a light irradiation device according to an embodiment of the present invention.
FIG. 3B is a front view of the line light source module and the light irradiation device according to the embodiment of the present invention shown in FIG. 3A, viewed from direction A. FIG.
3C is a plan view showing a specific configuration of a plurality of line light sources used in the line light source module shown in FIGS. 3A and 3B.
FIG. 3D is a side view schematically showing the rotation state of the line light source module in the line light source module and the light irradiation device according to the embodiment of the present invention.
3E to 3H are side views for explaining a method of replacing a line light source module having different wavelengths in the line light source module and the light irradiation device according to an embodiment of the present invention.
4 is a flowchart showing a light irradiation method according to an embodiment of the present invention.

Hereinafter, the present invention will be described in detail with reference to embodiments and drawings of the present invention.

FIG. 3A is a side view schematically showing a line light source module and a light irradiation device according to an embodiment of the present invention, FIG. 3B is a sectional view of a line light source module and a light irradiation device according to an embodiment of the present invention, FIG. 3C is a plan view showing a specific configuration of a plurality of line light sources used in the line light source module shown in FIGS. 3A and 3B, and FIG. 3D is a plan view showing a line light source according to an embodiment of the present invention. FIG. 5 is a side view schematically showing the rotation state of the line light source module in the module and the light irradiation device. FIG.

3A to 3D, a line light source module 311 according to an embodiment of the present invention includes a plurality of light emitting diode chips 312a, 312b, and 312c that emit light of different wavelengths, And a signal electrode 318 for external connection are connected to the light source units 313a, 313b and 313c of the plurality of light emitting diode chips 312a, 312b and 312c and the plurality of light emitting diode chips 312a, 312b and 312c, (310a, 310b, 310c); A regular polygonal fixing block 330 having a regular polygonal surface on which the plurality of line light sources 310a, 310b and 310c are mounted; And a frame 302 to which the regular polygonal fixing block 330 is rotatably mounted and the common electrode 316 and the external connection signal electrode 318 are connected to a horizontal member 302a of the frame 302 And a pair of contact members 317 and 319 provided on the pair of contact members 317 and 319.

The light irradiating apparatus 300 according to an embodiment of the present invention includes a plurality of light source units 313a and 313b each composed of a plurality of light emitting diode chips 312a, 312b, and 312c that emit light of different wavelengths, A plurality of line light sources 310a, 310b, and 310c including a common electrode 316 and an external signal electrode 318 connected to the plurality of light emitting diode chips 312a, 312b, and 312c, ; A regular polygonal fixing block 330 having a regular polygonal surface on which the plurality of line light sources 310a, 310b and 310c are mounted; A frame 302 to which the regular polygonal fixing block 330 is rotatably mounted; A pair of contact members 317 and 319 provided on the horizontal member 302a of the frame 302 and respectively connected to the common electrode 316 and the external connection signal electrode 318; A pair of power supply members 307 and 309 connected to the pair of contact members 317 and 319 by a pair of cables 306 and 308 and supplying power to the pair of contact members 317 and 319; And a plurality of light source units 313a, 313b, and 313c that are provided at a lower portion of the horizontal member 302a and reduce light of different wavelengths emitted from the plurality of light source units 313a, 313b, and 313c to form an image on an object (not shown) And a lens member (340).

The plurality of line light sources 310a, 310b, and 310c used in the line light source module 311 and the light illuminating device 300 according to an embodiment of the present invention may include a plurality of lines And 110c have substantially the same configuration as the light sources 110a, 110b, and 110c. Thus, each of the plurality of line light sources 310a, 310b, and 310c may be referred to as an LED PCB module.

Further, the pair of cables 306 and 308 used in the light irradiation apparatus 300 according to an embodiment of the present invention may be implemented as a flexible printed circuit board (FPCB).

Hereinafter, the detailed configuration and operation of the line light source module 311 and the light irradiation device 300 according to an embodiment of the present invention will be described in detail.

Referring again to FIGS. 3A to 3D, the line light source module 311 according to an embodiment of the present invention includes a plurality of line light sources 310a, 310b, and 310c. The plurality of line light sources 310a, 310b, and 310c includes a plurality of light source units 313a, 313b, and 313c each including a plurality of light emitting diode chips 312a, 312b, and 312c that emit light of mutually different wavelengths, . For example, the plurality of light emitting diode chips 312a emit visible light, the plurality of light emitting diode chips 312b emit ultraviolet light of 365nm, and the plurality of light emitting diode chips 312c emit ultraviolet light of 405nm . The plurality of line light sources 310a, 310b and 310c includes a common electrode 316 connected to the plurality of light emitting diode chips 312a, 312b and 312c and a signal electrode 318 for external connection.

The plurality of line light sources 310a, 310b, and 310c are mounted on the regular polygonal surface of the regular polygon fixing block 330, respectively. Although the regular polygon fixing block 330 is an equilateral triangle fixed block and the plurality of line light sources 310a, 310b, and 310c are illustratively shown as being three line light sources in one embodiment of the present invention, It will be appreciated that the plurality of line light sources 310a, 310b, and 310c may be implemented as n line light sources, and the light source 330 may be an n-type fixed block (where n is a natural number of 3 or more).

In addition, the regular polygon fixing block 330 is rotatably mounted on the frame 302. For this purpose, the regular polygon fixing block 330 is mounted on the frame 302 by means of a rotary shaft 334 and an external adjustment knob 336.

The regular polygon fixing block 330 has a heat dissipating plate 332 for emitting heat generated from a plurality of light emitting diode chips 312a, 312b and 312c constituting a plurality of light source units 313a, 313b and 313c mounted on the regular polygonal surface, Function. To this end, the regular polygon fixing block 330, the rotating shaft 334, and the external adjusting knob 336 each have a hollow portion 332 along its longitudinal direction, and at one end of the external adjusting knob 336, an air supply member (not shown) such as an air blower is provided. It should be noted that although the air exhausting member (not shown) such as a vacuum device may be selectively provided at the other end of the external adjusting knob 336, this air exhausting member (not shown) is not necessarily used.

The light irradiation apparatus 300 according to an embodiment of the present invention may include a pair of contact members 317 and 319 provided on the horizontal member 302a of the frame 302 in addition to the line light source module 311 . The pair of contact members 317 and 319 are connected to the common electrode 316 and the external connection signal electrode 318, respectively. In this case, the pair of contact members 317 and 319 have coupling grooves (not shown) for coupling with the common electrode 316 and the signal electrode 318 for external connection. The coupling grooves (not shown) of the pair of contact members 317 and 319 are connected to the common electrode 316 and the external connection signal electrode 318 of the plurality of line light sources 310a, 310b and 310c, 310b, and 310c, which are emitted from the plurality of line light sources 310a, 310b, and 310c even when the regular polygonal fixing block 330 is moved up and down (vertically moved) and rotationally moved by a guide function when connected to the pair of contact members 317 and 319 Thereby allowing light of a wavelength to be imaged through the lens member 340 at the same position on the substrate 350.

The pair of contact members 317 and 319 are connected to a pair of power supply members 307 and 309 by a pair of cables 306 and 308, respectively. The pair of power supply members 307 and 309 supply power to the pair of contact members 317 and 319. In this case, the external connection signal electrode 318 is connected to each of the plurality of light emitting diode chips 312a, 312b and 312c (see FIG. 3c) Off operation can be controlled individually or in a group manner. For example, in the case where the number of the plurality of light emitting diode chips 312a is 10, the ten light emitting diode chips 312a may be turned on or off individually, or two or more groups (for example, the light emitting diode chips 312a) Only the first and second light emitting diode chips 312a are turned on or off or only the fifth to tenth light emitting diode chips 312a are turned on or off or all of the first to tenth light emitting diode chips 312a are on / Puffed, etc.) can be controlled on / off.

Further, a lens member 340 is provided below the horizontal member 302a. The lens member 340 reduces the light emitted from the plurality of light source units 313a, 313b, and 313c and forms an image on an object (not shown) on the substrate 350. [

Hereinafter, a method for replacing the line light source modules having different wavelengths will be described in detail.

More specifically, FIGS. 3E to 3H are side views for explaining a method of replacing a line light source module having different wavelengths in the line light source module and the light irradiation device according to an embodiment of the present invention.

3A to 3H, the line light source module 311 and the light irradiation device 300 according to an embodiment of the present invention may be mounted on an object (not shown) on the substrate 350, for example, The pattern formed by the coating liquid 1 should be inspected or cured using the light source unit 313b and the pattern formed by the coating liquid 2 different from the coating liquid 1 is used as a device for inspecting or hardening the pattern (for example, The light source unit 313a may need to be inspected or cured. For this purpose, in the line light source module 311 and the light irradiation device 300 according to the embodiment of the present invention, when the light source unit 313a is positioned above the lens member 340, the light source unit 313a The pattern formed by the coating 1 is inspected or cured (see FIG. 3E).

Thereafter, when it is necessary to use the light source unit 313c to inspect or cure the pattern formed by the coating solution 1, the regular polygonal fixing block 330 is fixed to the frame 302 by using, for example, a linear motor (See Fig. 3F).

Thereafter, the regular polygon fixing block 330 is rotated clockwise by 120 degrees with respect to the rotating shaft 334, for example, by using a rotating motor (not shown) (see FIG. 3G). Thereby, the light source unit 313c on the regular polygonal fixing block 330 is positioned on the upper side of the lens member 340. [ 3G, since the regular polygon fixing block 330 is implemented as the regular polygon fixing block 330, it rotates 120 degrees. However, if the regular polygon fixing block 330 is the fixed n-type fixing block 330, n. < / RTI >

Thereafter, the regular polygonal fixing block 330 is moved downward of the frame 302 by using a linear motor (not shown) (see FIG. 3H). As a result, the light source unit 313a on the regular polygon fixing block 330 is replaced with the light source unit 313c. In this case, since the light source unit 313a and the light source unit 313c emit light of mutually different wavelengths, the linear motor allows the light emitted from the light source unit 313c to pass through the lens member 340, The fixed polygon fixing block 330 is accurately and precisely moved downwardly of the frame 302 to a predetermined position that is formed at a predetermined position (not shown). That is, in the present invention, each light emitted from the light source unit 313a, the light source unit 313b, and the light source unit 313c is focused on an object (not shown) on the substrate 350 through the lens member 340 The light source unit 313a, the light source unit 313b, and the light source unit 313b to be used for inspection or curing when ascending and descending the regular polygonal fixing block 330 on the frame 302 are determined in advance, It should be noted that the regular polygonal fixing block 330 is lowered to a predetermined position (height) in accordance with the light source unit 313c. Accordingly, the lens member 340 does not need to be replaced in the present invention.

4 is a flowchart showing a light irradiation method according to an embodiment of the present invention.

Referring to FIG. 4, with reference to FIGS. 3A to 3H, a light irradiation method 400 according to an embodiment of the present invention includes a) a plurality of line light sources (not shown) mounted on a regular polygon surface, (Not shown) on the substrate 350 through a lens member 340 provided below the one line light source using one line light source that emits light of the first wavelength among the plurality of line light sources 310a, 310b, 310c, Irradiating light of the first wavelength (410); b) moving (420) the regular polygonal fixed block (330) upwardly of the frame (302); c) The regular polygonal fixing block 330 is fixed to the frame member 340 so that the other one of the plurality of line light sources 310a, 310b, 310c emits light of the second wavelength, (430) by a predetermined angle with respect to the rotation axis (334) of the first rotor (302); d) moving (440) the regular polygonal fixed block (330) to a predetermined position in the downward direction of the frame (302); And e) irradiating the object (not shown) on the substrate 350 with light of a second wavelength through the lens member 340 using the another line light source 450 .

The light irradiation method 400 according to the embodiment of the present invention may be applied to the steps b) to e) for another line light source that emits light of a third wavelength among the plurality of line light sources 310a, 310b, ) ≪ / RTI > step.

In addition, in the step c) of the light irradiation method 400 according to an embodiment of the present invention, the predetermined position may be a position of the light source 310a, 310b, or 310c, (Not shown) on the substrate 350 through the lens member 340. [0064] As shown in FIG.

In the light irradiation method 400 according to an embodiment of the present invention, a plurality of light emitting diode chips 312a, 312b, and 312c, which respectively constitute the plurality of line light sources 310a, 310b, and 310c, The common electrode 316 and the external connection signal electrode 318 are connected to a pair of contact members 317 and 319 provided on the horizontal member 302a of the frame 302, respectively.

As described above, when the line light source module 311, the light irradiation device 300, and the light irradiation method 400 according to the present invention are used, (1) the light irradiation device 400 used for the inspection device or the curing device, It is possible to provide a plurality of line light sources 310a, 310b, and 310b corresponding to various wavelengths used in the light source device 300 as one module, and 2) when use of a line light source of a different wavelength is required in the light source device 300 And 3) the production process is significantly increased due to the shortening of the total process time (tact time) due to the replacement setting of the line light source when applied to the mass production process, and 4) There is no need to use some components (for example, lens members) used in each of the line light sources to emit, and 5) the manufacturing cost of the entire apparatus is remarkably reduced.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are intended to be illustrative, of illustration, and not limitative of the invention, as various changes may be made therein without departing from the scope of the invention. It is not. Accordingly, the scope of the present invention should not be limited by the above-described exemplary embodiments, but should be determined only in accordance with the following claims and their equivalents.

102, 302: frames 110, 110a, 110b, 110c, 310a, 310b, 310c:
111, 311: Line light source modules 113a, 113b, 113c, 313a, 313b, 313c:
120: micro lens array 122, 122a, 124, 124a:
112a, 112b, 114a, 114b: ultraviolet light emitting diode chip 102, 302: frame
116, 116: common electrode 118, 318: corrugated electrode for external connection
130, 330: support member 140, 140a, 140b, 140c, 340:
150, 350: substrate 200: dimmer for microscope 210: housing part
211: lower housing 212: upper housing 230:
231: base plate 232: connecting plate 233: insertion hole 240:
241: Motor 242: Cooling disk 244: Flow path 246: Coupling plate
250: cooling water part 270: heat dissipating part 280: control part
290, 312a, 312b, 312c: (LED) light emitting diode chip 300:
302: horizontal member 306, 308: cable 307, 309: power supply member
330: regular polygonal fixed block 317, 319: contact member 332:
334: rotating shaft 336: external adjusting knob

Claims (16)

In the line light source module,
A plurality of light source units each composed of a plurality of light emitting diode chips emitting light of different wavelengths, a plurality of line light sources composed of a common electrode connected to each of the plurality of light emitting diode chips, and a signal electrode for external connection;
A regular polygonal fixed block having a regular polygonal surface on which the plurality of line light sources are mounted; And
The regular polygonal fixed block is rotatably mounted on a frame
/ RTI >
Wherein the common electrode and the external connection signal electrode are respectively connected to a pair of contact members provided on a horizontal member of the frame
Line light source module. The method according to claim 1,
Wherein the pair of cables are each implemented as a flexible printed circuit board (FPCB). The method according to claim 1,
Wherein the line light source module further comprises a rotation axis and an external adjustment knob for rotatably mounting the regular polygonal fixed block on the frame. The method of claim 3,
The regular polygonal fixing block, the rotation shaft, and the external adjustment knob each have a hollow portion along the longitudinal direction thereof,
An air supply member is provided at one end of the external adjustment knob,
An air exhausting member is selectively provided at the other end of the external control knob
Line light source module. The method according to claim 1,
Wherein the on / off operations of the plurality of light emitting diode chips are controlled individually or in a group manner. 6. The method according to any one of claims 1 to 5,
Wherein the pair of contact members has a coupling groove for coupling with the common electrode and the signal electrode for external connection, respectively. In the light irradiation apparatus,
A plurality of light source units each composed of a plurality of light emitting diode chips emitting light of different wavelengths, a plurality of line light sources composed of a common electrode connected to each of the plurality of light emitting diode chips, and a signal electrode for external connection;
A regular polygonal fixed block having a regular polygonal surface on which the plurality of line light sources are mounted;
A frame in which the regular polygon fixing block is rotatably mounted;
A pair of contact members provided on the horizontal member of the frame and respectively connected to the common electrode and the signal electrode for external connection;
A pair of power supply members connected to the pair of contact members and a pair of cables, respectively, for supplying power to the pair of contact members; And
And a lens member provided on a lower portion of the horizontal member to image the different light beams emitted from the plurality of light source units to form an image on an object on the substrate,
And irradiating the light. 8. The method of claim 7,
Wherein the pair of cables are each embodied as a flexible printed circuit board (FPCB). 8. The method of claim 7,
Wherein the line light source module further comprises a rotation axis and an external adjustment knob for rotatably mounting the regular polygonal fixed block on the frame. 10. The method of claim 9,
The regular polygonal fixing block, the rotation shaft, and the external adjustment knob each have a hollow portion along the longitudinal direction thereof,
An air supply member is provided at one end of the external adjustment knob,
An air exhausting member is selectively provided at the other end of the external control knob
Light irradiation device. 8. The method of claim 7,
Wherein the on / off operation of the plurality of light emitting diode chips is controlled individually or in a group manner. 12. The method according to any one of claims 7 to 11,
Wherein the pair of contact members have coupling grooves that respectively couple with the common electrode and the signal electrode for external connection. In the light irradiation method,
a) a plurality of line light sources mounted on a regular polygonal surface of a regular polygonal fixed block, each of the plurality of line light sources emitting light of a first wavelength, Irradiating the object with light of the first wavelength;
b) moving the regular polygonal fixed block in an upward direction of a frame on which the regular polygonal fixed block is rotatably mounted;
rotating the regular polygonal fixed block with respect to the rotation axis of the frame by a predetermined angle so that the other one of the plurality of line light sources emitting the light of the second wavelength is positioned on the lens member;
d) moving the regular polygonal fixed block to a predetermined position in a downward direction of the frame; And
e) irradiating light of a second wavelength to the object on the substrate through the lens member using the another line light source
≪ / RTI > 14. The method of claim 13,
And performing the steps b) to e) for another line light source that emits light of a third wavelength among the plurality of line light sources. 14. The method of claim 13,
Wherein in the step (c), the predetermined position is a position at which light of mutually different wavelengths emitted from each of the plurality of line light sources is caused to form an image on the object on the substrate through the lens member. 16. The method according to any one of claims 13 to 15,
Wherein a common electrode and a signal electrode for external connection, which are respectively connected to a plurality of light emitting diode chips constituting the plurality of line light sources, are connected to a pair of contact members provided on a horizontal member of the frame, respectively.

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