KR101631138B1 - Liquid leakage detection device - Google Patents

Abstract

And to provide a liquid leakage detection device capable of outputting a detection signal at an appropriate timing. The liquid leakage detection device 10 includes a first liquid leakage detection part for detecting a leaked liquid introduced into the first introduction part 25 to generate a first detection signal, A second liquid leakage detection section for detecting a leaked liquid introduced into the first and second detection sections and generating a second detection signal based on at least a first detection signal among the first detection signals and the second detection signals, And an output control section for outputting a liquid leak detection signal.

Description

[0001] LIQUID LEAKAGE DETECTION DEVICE [0002]

The present invention relates to a liquid leakage detection device.

Conventionally, in a factory, there is a case where a liquid leaks from a manufacturing apparatus for a production line and a pipe for supplying liquid to the manufacturing apparatus. The liquid leakage from the manufacturing apparatus or the piping may lead to breakage of the factory facility or manufacturing failure. Particularly, in a semiconductor manufacturing line or a food processing line, leakage of liquid from a manufacturing apparatus or piping is likely to lead to breakage of a factory facility or manufacturing failure. Therefore, conventionally, a manufacturing apparatus and a piping of a factory are equipped with a liquid leakage detecting device for detecting a liquid leakage from a manufacturing apparatus or a piping (for example, see Patent Document 1).

In order to prevent breakage of a factory facility or product failure, a liquid leakage detection apparatus of this kind immediately stopped the production apparatus when a small amount of liquid leakage was detected from the production apparatus.

[Patent Document 1] JP-A-2004-53560

In such a liquid leakage detection apparatus, the production apparatus is immediately stopped simply by detecting a small amount of liquid leakage from the production apparatus. However, in the case of a small amount of liquid leakage from the manufacturing apparatus, there is a case that the factory facility is not damaged or the product is not defective without immediately stopping the manufacturing apparatus. In this case, since the manufacturing apparatus is stopped even though it is not necessary to stop the manufacturing apparatus originally, the manufacturing time of the product is shortened and the productivity of the manufacturing apparatus is lowered. Further, in the case where the manufacturing apparatus monitored by the liquid leakage detecting apparatus is stopped during each manufacturing step, the product which has been in the middle of each of the manufacturing steps needs to be again manufactured or discarded, thereby lowering the productivity of the manufacturing apparatus.

An object of the present invention is to provide a liquid leakage detection device capable of outputting a liquid leakage detection signal at an appropriate timing.

According to an aspect of the present invention, there is provided a liquid leakage detection device including: a first introduction part for introducing a liquid leakage; a second detection part for detecting a liquid leak introduced into the first introduction part and generating a first detection signal; A second liquid leakage detection portion for detecting a leaked liquid introduced into the second introduction portion and generating a second detection signal; and a second liquid leakage detection portion for detecting a leakage liquid introduced into the second introduction portion, And an output control section for outputting a liquid leak detection signal in accordance with the amount of the liquid leakage generated based on at least one of the first and second detection signals.

According to the invention described above, it is possible to provide a liquid leakage detection device that can output a liquid leakage detection signal at an appropriate timing, thereby reducing the productivity of the production apparatus.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic structural view showing an example of the installation of a liquid leakage detection device. Fig.
2 is a side view of the liquid leakage detection device of the first embodiment.
3 is a bottom view of the liquid leakage detection device of Fig.
4 is a front view of the liquid leakage detection device of Fig.
5 is a schematic configuration diagram of the sensor main body according to the first embodiment.
Figs. 6 and 7 are diagrams showing the principle of liquid leakage detection in the first introduction portion. Fig.
Figs. 8 and 9 are diagrams showing the principle of liquid leakage detection in the second inlet portion. Fig.
10 is a bottom view of the liquid leakage detection device of the second embodiment.
11 is a schematic configuration diagram of the sensor main body according to the second embodiment.

≪ First Embodiment >

Hereinafter, a first embodiment will be described with reference to Figs. 1 to 9. Fig.

1, the liquid leakage detection device 10 is provided with a bolt B on a bottom surface 12 provided with a manufacturing apparatus 11 in the factory, W (see Fig. 7, etc.). When the liquid leakage detection device 10 detects the leaked liquid W from the production device 11, the liquid leakage detection device 10 transmits the stop signal St to the production device 11 via the cable 13, 11).

Fig. 2 is a side view of the liquid leakage detection device 10, Fig. 3 is a bottom view of the liquid leakage detection device 10, and Fig. 4 is a front view of the liquid leakage detection device 10. Fig. 2, the liquid leakage detection device 10 includes a sensor main body 15 for detecting the leaked liquid W, a base portion 15 for fixing the sensor main body 15 to the bottom surface 12, Section, 16).

The base 16 includes a base 21 fixed to the base 12 and a base 20 extending from the side of the base 21 and supporting the base 15 .

As shown in Fig. 3, the fixing table 21 has a substantially tapered planar shape. The fixing table 21 is fixed to a central position of a proximal end portion (base end portion, right side in Fig. 3) And the insertion port 21a is formed to penetrate. The fixing table 21 has bolts B inserted into the bolt through holes 21a so that the lower surface 21b of the fixing table 21 is connected and fixed to the bottom surface 12 by bolts B in a state of contacting the bottom surface 21b. .

2, the fixing table 21 is provided with a narrow front end portion (in Fig. 2) so that a gap D1 is formed between the bottom surface 20a of the base 20 and the bottom surface 12, And the base 20 is extended from the side of the left side (left side). The clearance D1 between the lower surface 20a of the base 20 and the bottom surface 12 is set such that when the manufacturing apparatus 11 leaks liquid and the leaked liquid W flows into the gap D1, It is set to the interval at which the phenomenon occurs.

As shown in Fig. 3, the base 20 is formed in a cylindrical shape, and its lower surface 20a is formed of a light-transmitting resin. The base 20 is provided with a circular concave portion 20b (hereinafter referred to as a "circular concave portion") concave at a central position of its lower surface 20a.

When the liquid W leaked into the gap D1 between the lower surface 20a of the base 20 and the bottom surface 12 is leaked from the manufacturing apparatus 11, The liquid W leaked into the gap D1 between the lower surface of the base 20 (hereinafter, referred to as the "annular surface") and the bottom surface 12 other than the annular surface 20a , And then the liquid W leaked through the gap between the circular concave portion 20b and the bottom surface 12 flows.

Specifically, the leaked liquid W that has flowed into the gap D1 between the annular bottom surface 20c of the base 20 and the bottom surface 12 is first subjected to the capillary phenomenon and the newly generated leaked liquid W under the annular lower surface 20c is generated and spreads to the gap D1 between the annular lower surface 20c and the bottom surface 12. As a result, At this time, surface tension acts between the leaked liquid W and the annular lower surface 20c. Therefore, the pressure necessary for the liquid W leaked into the circular concave portion 20b away from the annular bottom 20a to flow into the gap Dl under the annular lower surface 20c It is larger than the pressure required to spread it.

The leaked liquid W flowing into the gap D1 between the annular lower surface 20c of the base 20 and the bottom surface 12 does not flow directly into the circular recess 20b, And is spread to the gap D1 between the bottom surface 20c and the bottom surface 12. [

The leaked liquid W spreads to both of the gap D1 between the annular lower surface 20c and the bottom surface 12 and the leaked liquid W is further generated, The pressure in the inflow direction flowing into the portion 20b becomes larger than the surface tension between the leaked liquid W and the annular lower surface 20c. As a result, the liquid W leaked into the circular concave portion 20b flows.

That is, when there is a small amount of leaked liquid W from the manufacturing apparatus 11, the leaked liquid W from the liquid leak detecting apparatus 10 is separated from the gap between the annular lower surface 20c and the bottom surface 12 (D1). On the other hand, when there is a large amount of leaked liquid W from the manufacturing apparatus 11, the leaked liquid W from the liquid leak detecting apparatus 10 is separated from the gap between the annular lower surface 20c and the bottom surface 12 (D1), and further flows into the circular concave portion 20B.

In this base 20, the first introduction part 25 is provided at a portion for detecting the leaked liquid W flowing into the annular lower surface 20c, and the leakage introduced into the circular recess 20b And a second inlet portion 26 is provided at a portion for detecting the liquid W that has been introduced. That is, the second introduction portion 26 is provided at a position farther away from the first introduction portion 25 with respect to the manufacturing apparatus 11, which is the source of the leaked liquid W. Therefore, the second introduction portion 26 is provided at a position where the amount of the generated liquid W becomes larger than the first introduction portion 25.

The first introduction part 25 is provided on the annular lower surface 20c on the side opposite to the fixing table 21 (left side in Fig. 3). The first introduction portion 25 has a concave portion 28 provided on the annular bottom surface 20c so as to be concave along the radial direction. The concave portion 28 has two inclined surfaces formed in a direction away from each other in the circumferential direction of the annular lower surface 20c from the ceiling surface 28a while having the innermost bottom surface thereof as the ceiling surface 28a, 1 emission surface 28b, and a second emission surface 28c (see Fig. 4). The first exit surface 28b and the first incident surface 28c are provided with an introduction portion for introducing the leaked liquid W.

The first introduction part 25 has a pair of first support rods 29 protruding downward from the annular lower surface 20c on both sides of the concave portion 28 (see Fig. 4). As shown in Fig. 2, the first support table 29 has a contact surface 29a which abuts the bottom surface 12. As shown in Fig. That is, the annular lower surface 20c is supported on the bottom surface 12 by the joint surface 29a of the first support table 29. [ The first support table 29 has an inclined surface 29b extending from the abutting surface 29a to the annular lower surface 20c toward the circular recess 20b (right side in Fig. 2).

The second introduction portion 26 is provided in the circular concave portion 20b. 3, the second introduction portion 26 includes an air hole 26a formed so as to pass through the central position of the circular concave portion 20b, a pair of air inlet holes 26a, 2 support stand 30. The pair of second supports 30 are formed so as to project further downward from the inner bottom surface of the circular concave portion 20b. The side surfaces of the pair of second support rods 30 facing each other, that is, the side facing the air hole 26a are inclined inward to form a second exit surface 26b and a second incident surface 26c, respectively . The second exit surface 26b and the second incident surface 26c are also provided as an introduction portion for introducing the leaked liquid W.

The base 20 is supported by abutting the first and second support rods 29 and 30 against the bottom surface 12 in a state in which the base portion 16 is provided on the bottom surface 12. Therefore, the swinging of the base 20 in the up-and-down direction (the up-and-down direction in Fig. 2) is prevented by the first and second supports 29 and 30.

As shown in Fig. 2, the base 20 has an air hole 34 passing through its outer circumferential surface. The air holes 34 are formed, for example, in a rectangular shape. An air passage 35 communicating with the air hole 26a (see FIG. 3) of the circular concave portion 20b and the air hole 34 is formed in the base 20.

That is, when the manufacturing apparatus 11 leaks liquid, if the leaked liquid W flows into the gap D1 between the annular lower surface 20a and the bottom surface 12, the circular recess 20b is filled with air It becomes stagnant. The liquid leakage detection device 10 ejects the air from the air hole 26a of the circular concave portion 20b to the outside through the air hole 35 on the outer circumferential surface via the air passage 35. [

The sensor main body 15 is fixed to the bottom surface 12, for example, in the form of a cylinder by being connected to the base 20. Fig. 5 is a schematic configuration diagram of the sensor main body 15. Fig. 5, the sensor body 15 includes a first light-projecting means 40a, a first light-receiving means 41a, a first detecting means 42a, a second light-projecting means 40b, a second light- 41b, second detection means 42b, and output control means 43 (output control portion). In the first embodiment, the first light projecting means 40a, the first light receiving means 41a and the first detecting means 42a constitute a first liquid leak detecting portion. The second light emitting means 40b, the second light receiving means 41b and the second detecting means 42b constitute a second liquid leak detecting portion.

3 and 4, the first light projecting means 40a and the first light receiving means 41a are disposed in the sensor body 15 when viewed from the lower surface of the liquid leak detecting apparatus 10, 20c at the first introduction part 25 of the first and second plates. The first light projecting means 40a and the first light receiving means 41a are provided at the first introduction portion 25 so that the leakage introduced into the gap D1 between the annular bottom surface 20c and the bottom surface 12 Thereby detecting the liquid W

6 and 7 are principle diagrams showing how the liquid leakage detection device 10 detects the leaked liquid W from the production device 11 in the first introduction part 25. As shown in Fig.

The first light projecting means 40a emits outgoing light toward the first exit surface 28b. 6, when the leaked liquid W does not flow into the gap D1 between the annular bottom surface 20c and the bottom surface 12, the outgoing light that has passed through the first exit surface 28b The transmitted light is refracted at a predetermined refraction angle on the first exit surface 28b.

The transmitted light refracted by the first exit surface 28b is incident on the first incident surface 28c when the leaked liquid W does not flow into the gap D1 between the annular bottom surface 20c and the bottom surface 12, As an incident light. The incident light is refracted at the first incidence surface 28c at a predetermined refraction angle and transmitted through the first incidence surface 28c. The incident light transmitted through the first incident surface 28c is incident on the first light receiving means 41a provided in the sensor main body 15. Thus, when the leaked liquid W does not flow into the gap D1 between the annular bottom surface 20c and the bottom surface 12, the first light-emitting means 40a to the first light-receiving means 41a The optical path L1 is formed.

On the contrary, when the liquid W leaked into the gap D1 between the annular bottom surface 20c and the bottom surface 12 flows, as shown in Fig. 7, on the first exit surface 28b, That is, the refraction angle of the transmitted light becomes large. Therefore, the transmitted light does not reach the first incident surface 28c out of the optical path L1.

The first light receiving unit 41a receives the incident light transmitted through the first incident surface 28c and generates the first light receiving signal Sr1 according to the received light amount of the incident light. Specifically, the amount of the leaked liquid W flowing into the gap D1 between the annular bottom surface 20c and the bottom surface 12 is small in the first light receiving means 41a, and as a result, As the amount of light received increases, the voltage value of the first light reception signal Sr1 increases. On the contrary, the first light receiving means 41a has a large amount of leaked liquid W flowing into the gap D1 between the annular bottom surface 20c and the bottom surface 12, and as a result, the light receiving amount of the incident light is small The voltage value of the first light receiving signal Sr1 is decreased.

The first detection means 42a receives the first light reception signal Sr1 from the first light reception means 41a. The first detection means 42a compares the first light reception signal Sr1 with a predetermined first reference voltage Vk1 and outputs the first detection signal Sd1 to the output control means 43 in accordance with the comparison result Supply.

For example, when the first detection means 42a receives the first light reception signal Sr1 having a voltage value equal to or higher than the first reference voltage Vk1, the first detection means 42a detects a gap between the annular lower surface 20c and the bottom surface 12 It is regarded that the liquid W leaked to the first electrode D1 is not flowing, thereby generating the first detection signal Sd1 of L level (non-detection mode). On the other hand, when the first detection means 42a receives the first light reception signal Sr1 having a voltage value lower than the first base voltage Vk1, the first detection means 42a detects the first light reception signal Sr1 having a voltage value smaller than the gap D1 between the annular bottom surface 20c and the bottom surface 12 (Detected mode) and generates the first detection signal Sd1 at the H level (detection mode).

2 and 3, the second light emitting means 40b and the second light receiving means 41b are arranged in the sensor body 15 in such a manner that a circular concave And is provided at the position of the second introduction portion 26 of the second portion 20b. The second light projecting means 40b and the second light receiving means 41b detect the liquid W that has flowed into the circular concave portion 20b at the second introduction portion 26. [

Figs. 8 and 9 are principle diagrams for detecting the leaked liquid W in the second lead-in portion.

The second light projecting means 40b emits the outgoing light toward the second exit surface 26b. 8, when the leaked liquid W does not flow into the circular concave portion 20b, the outgoing light, that is, the transmitted light that has passed through the second outgoing surface 26b is reflected by the second outgoing surface 26b And is refracted at a predetermined angle of refraction.

When the leaked liquid W does not flow into the circular concave portion 20b, the transmitted light refracted by the second exit surface 26b is incident on the second incident surface 26c as incident light. The incident light is refracted at the second incidence surface 26c at a predetermined refraction angle and transmitted through the second incidence surface 26c. The incident light transmitted through the second incident surface 26c is incident on the second light receiving means 41b provided in the sensor main body 15. 8, the optical path L2 from the second light-projecting means 40b to the second light-receiving means 41b does not flow when the leaked liquid W does not flow into the circular concave portion 20b, .

On the other hand, as shown in Fig. 9, when the liquid W leaked into the circular concave portion 20b flows, the refraction angle of the outgoing light, that is, the transmitted light, becomes large on the second exit surface 26b. Therefore, the transmitted light does not reach the second incident surface 26c out of the optical path L2.

The second light receiving means 41b receives the incident light transmitted through the second incident surface 26c and generates the second light receiving signal Sr2 in accordance with the received light amount of the incident light. More specifically, the second light receiving means 41b is arranged so that the smaller the amount of the leaked liquid W flowing into the circular concave portion 20b (that is, the larger the amount of received light), the larger the voltage value of the second light receiving signal Sr2 . On the other hand, the second light receiving means 41b is arranged so that the voltage value of the second light receiving signal Sr2 is made smaller as the amount of the leaked liquid W flowing into the circular concave portion 20b is larger do.

The second detecting means 42b receives the second light receiving signal Sr2 from the second light receiving means 41b. The second detecting means 42b compares the second light receiving signal Sr2 with a preset second reference voltage Vk2 and outputs the second detecting signal Sd2 to the output controlling means 43 in accordance with the comparison result Supply.

For example, when the second detection means 42b receives the second light reception signal Sr2 having a voltage value equal to or higher than the second reference voltage Vk2, the liquid W leaked into the circular concave portion 20b The second detection signal Sd2 at the L level (non-detection mode) is generated. Conversely, when the second detection means 42b receives the second light reception signal Sr2 having a voltage value smaller than the second reference voltage Vk2, the liquid W leaked into the circular recess portion 20b flows in And generates the second detection signal Sd2 at the H level (detection mode).

The output control means 43 receives the synchronization signal Ss from the first and second detection means Sd1 and Sd2 and the manufacturing apparatus 11 at the first and second detection means 42a and 42b. Here, the synchronous signal Ss is a signal for notifying the working range of the manufacturing apparatus 11, and becomes the L level when the manufacturing apparatus 11 is in operation, and becomes the H level for a predetermined time in each working range.

The output control means 43 outputs the stop signal St for stopping the manufacturing apparatus 11 to the manufacturing apparatus 11 in synchronization with the synchronous signal Ss based on the first and second detection signals Sd1 and Sd2 .

More specifically, when there is no leaked liquid W from the manufacturing apparatus 11, the output control means 43 outputs the first and second detection signals Sd1 and Sd2 of L level (non-detection mode) Receive. At this time, the output control means 43 outputs the stop signal St at the L level (operation mode) which does not stop the manufacturing apparatus 11 to the manufacturing apparatus 11.

When the leaked liquid W from the manufacturing apparatus 11 is small, the output control means 43 outputs the first detection signal Sd1 of H level (detection mode) and the L level (non-detection mode) The second detection signal Sd2. At this time, the output control means 43 outputs the stop signal St at the H level (stop mode) to the manufacturing apparatus 11 in synchronization with the synchronizing signal Ss at the H level (predetermined time). That is, the output control means 43 outputs the first detection signal Sd1 at the H level and the second detection signal Sd2 at the L level after a predetermined time has elapsed (the synchronization signal Ss is received And then outputs a stop signal St at the H level to the flip-flop.

More specifically, when receiving the first detection signal Sd1 of the H level (detection mode) and the second detection signal Sd2 of the L level (the non-detection mode), the output control means 43 outputs the signal The leaked liquid W from the manufacturing apparatus 11 flows into the gap D1 between the bottom surface 12 and the bottom surface 12 of the manufacturing apparatus 11, It is recognized that the wafer W is not introduced.

In this case, since the leaked liquid W from the manufacturing apparatus 11 does not flow into the circular concave portion 20b, the output control means 43 causes the leaked liquid W from the production apparatus 11 ) Is small. If the amount of liquid W leaked from the manufacturing apparatus 11 is small, it does not directly lead to breakage of the factory facility or product failure. For this reason, the output control means 43 is configured to stop the manufacturing apparatus 11 (control stop) after the work in progress is terminated.

The output control means 43 receives the first and second detection signals Sd1 and Sd2 at the H level (detection mode) when the leaked liquid W from the manufacturing apparatus 11 is a large amount. At this time, the output control means 43 outputs the stop signal St of the H level (stop mode) to the manufacturing apparatus 11. That is, when receiving the first and second detection signals Sd1 and Sd2 of the H level (detection mode), the output control means 43 outputs the gap D1 between the annular bottom surface 20c and the bottom surface 12, It is recognized that the leaked liquid W from the manufacturing apparatus 11 flows into the circular concave portion 20b and the leaked liquid W from the manufacturing apparatus 11 flows into the circular concave portion 20b.

In this case, since the leaked liquid W from the manufacturing apparatus 11 flows into the circular concave portion 20b as well, the output control means 43 can prevent the leaked liquid W) is large. If the amount of liquid W leaked from the manufacturing apparatus 11 is large, there is a possibility that the factory facility may be damaged or the product may be defective. For this reason, the output control means 43 immediately stops the manufacturing apparatus 11 (emergency stop) even if the work is in progress.

As described above, according to the present embodiment, the following effects are achieved first.

(1) The liquid leakage device 10 is provided with a first introduction part 25 provided at a site for detecting a small amount of leaked liquid W from the manufacturing device 11, a large amount of leakage from the production device 11 And a second introduction part 26 provided at a site for detecting the liquid W that has been detected. When the liquid leakage detection device 10 detects the liquid W leaked from the first introduction part 25, the manufacturing device 11 is stopped after the work in progress is completed, and the liquid leakage detection device 10 is stopped at the second introduction part 26 When the leaked liquid W is detected, the production apparatus 11 is immediately stopped even though the operation is in progress.

Therefore, when the amount of liquid W leaked from the manufacturing apparatus 11 is small, the productivity can be improved without wasting the product and the manufacturing time. In addition, when the amount of the liquid W leaked from the manufacturing apparatus 11 is large, it is possible to prevent breakage of the factory facility or product failure in advance. As a result, the liquid leakage detecting device 10 can reduce the productivity of the manufacturing apparatus 11 equipped with this apparatus.

(2) The liquid leakage detecting device 10 detects a small amount of leaking liquid W from the manufacturing apparatus 11 and outputs a synchronizing signal Ss (high level) (predetermined time) supplied from the manufacturing apparatus 11 The manufacturing apparatus 11 is stopped. Therefore, when the liquid leakage detection device 10 detects a small amount of leaked liquid W from the manufacturing device 11, the liquid leakage detection device 10 stops the manufacturing device 11 as soon as the operation in progress of the manufacturing device 11 is completed . As a result, the liquid leakage detecting apparatus 10 can further reduce the productivity of the manufacturing apparatus 11 equipped with this apparatus.

(3) The liquid leakage detection device 10 has a circular concave portion 20b concaved at the center of its lower surface 20a and determines whether the liquid W leaked into the circular concave portion 20b is flowing The amount of the leaked liquid W is determined. Therefore, only the lower surface 20a of the liquid leakage detection device 10 is concavely provided, and the annular bottom surface 20c, which is introduced when there is a small amount of leaked liquid W from the manufacturing apparatus 11, It is possible to easily form the circular concave portion 20b to be introduced when there is a large amount of leaked liquid W from the liquid crystal panel 11.

≪ Second Embodiment >

In the first embodiment, when the liquid leakage detection device 10 detects a small amount of leaked liquid W from the manufacturing device 11 at the position of the first introduction part 25, the liquid leakage detection device 10 advances the manufacturing device 11 The manufacturing apparatus 11 was immediately stopped when the large amount of leaking liquid W from the manufacturing apparatus 11 was detected at the position of the second introduction section 26. [

In the second embodiment, the liquid leakage detection device 50 detects the timing of stopping the manufacturing apparatus 11 in accordance with the time difference at which the leaked liquid W from the manufacturing apparatus 11 is detected at the positions of the two introduction sections .

Hereinafter, the liquid leakage detecting device 50 of the second embodiment will be described focusing on the differences from the first embodiment, with reference to Figs. 10 and 11. Fig. The same members as those shown in Figs. 1 to 9 are denoted by the same reference numerals, and the description of these elements is omitted for the sake of convenience.

The lower surface 20a of the base 20 of the liquid leakage detection device 50 is not provided concave unlike the first embodiment. That is, the liquid leakage detection device 50 is not provided with the second introduction portion 26 of the first embodiment. The liquid leakage detecting device 50 is provided with a third inlet portion 51 provided at a position symmetrical to the second inlet portion 25 with the center point of the base 20 interposed therebetween in the lower surface 20a of the base 20 ). Since the third introduction portion 51 has the same configuration as the first introduction portion 25, detailed description thereof will be omitted. 10, the third light-projecting means 40c and the third light-receiving means 41c are provided in the sensor main body 51 in such a manner that the third introducing portion 51 ).

11, the third detecting means 42c receives the third light receiving signal Sr3 from the third light receiving means 41c in the same manner as the first detecting means 42a. The third detecting means 42c compares the third light receiving signal Sr3 with the preset first reference means Vk1, and generates the third detecting signal Sd3 according to the comparison result. In the second embodiment, the first light-emitting means 40a, the first light-receiving means 41a and the first detecting means 42a constitute a first liquid leak detecting portion, and the third light-emitting means 40c, The third light receiving means 41c and the third detecting means 42c constitute a second liquid leak detecting portion.

For example, when the third detecting means 42c receives the third light receiving signal Sr3 having a voltage value equal to or higher than the first reference voltage Vk1, the third detecting means 42c detects the third receiving portion 51 and the bottom surface 12 The third detection signal Sd3 of L level (non-detection mode) is generated by considering that the liquid W leaked into the gap is not flowing. On the other hand, when the third detection means 42c receives the third light reception signal Sr3 having a voltage value smaller than the first reference voltage Vk1, And the third detection signal Sd3 at the H level (detection mode) is generated.

That is, the first and third detection signals 42a and 42c respectively detect whether or not the liquid W leaking into the gap between the first and third introduction portions 25 and 51 and the bottom surface 12 is flowing And generates the first and third detection signals Sd1 and Sd3 according to the detection results, respectively. The first and third detection signals Sd1 and Sd3 are supplied to the time difference measurement means 52 and the output control means 43 as shown in Fig.

The time difference measurement means 52 measures a time difference (hereinafter referred to as a detection time difference C1) inputting the first and third detection signals Sd1 and Sd3 and outputs a delay corresponding to the detection time difference C1 And supplies the control signal Sc to the output control means 43. [

For example, the time difference measuring means 52 reduces the voltage value of the delay control signal Sc as the detection time difference C1 is short and the leakage of the leaked liquid W from the manufacturing apparatus 11 is quick . Conversely, the time difference measurement means 52 increases the voltage value of the delay control signal Sc as the detection time difference C1 becomes longer and the leakage of the leaked liquid W from the manufacturing apparatus 11 becomes slower.

The output control means 43 receives the first and third detection signals Sd1 and Sd3 from the first and third detection means 42a and 42c and the delay control signal Sc from the time difference measurement means 52 . Upon receiving the first and third detection signals Sd1 and Sd3 at the H level (detection mode), the output control means 43 delays the stop signal St in accordance with the delay control signal Sc, 11).

Specifically, the output control means 43 sets the delay time until the output of the stop signal St at the H level (stop mode) to the manufacturing apparatus 11 as the voltage value of the delay control means Sc becomes smaller . Conversely, as the voltage value of the delay control means Sc increases, the output control means 43 increases the delay time until outputting the stop signal St at the H level (stop mode) to the manufacturing apparatus 11 do.

That is, when the detection time difference C1 is short and the leakage of the leaked liquid W from the manufacturing apparatus 11 is fast, there is a possibility that the factory facility is damaged or the product is defective. , The manufacturing apparatus 11 is quickly stopped. On the contrary, when the elongation of the leaked liquid W from the manufacturing apparatus 11 is slow due to the long detection time difference C1, the output control means 43 does not directly lead to breakage of the factory facility or defective product, The manufacturing apparatus 11 is stopped late.

As described above, according to the present embodiment, the following effects are obtained.

(1) The liquid leakage detection device 50 has the first and third introduction parts 25 and 51 on its lower surface 20a. The liquid leakage detection device 50 detects a time difference C1 between the time when the liquid W leaked from the first inlet portion 25 is detected and the time when the liquid W leaked from the third inlet portion 51 is detected ), The timing of stopping the manufacturing apparatus 11 is delayed. Conversely, the shorter the time difference C1 is, the faster the timing of stopping the manufacturing apparatus 11 is made.

Therefore, the slower the leaked liquid of the leaked liquid W from the manufacturing apparatus 11, the longer the stopping time of the manufacturing apparatus 11 and the longer the manufacturing time. As a result, as compared with the first embodiment, when the leaked liquid W from the production apparatus 11 is detected, the operation time of the production apparatus 11 is lengthened, and the production time can be lengthened. As a result, the productivity of the production apparatus 11 equipped with the detection device can be further reduced.

The above-described embodiment may be implemented in the following manner.

In each embodiment, the liquid leakage detection device 10 is formed in a columnar shape, but it may be formed in a polygonal shape. In this way, the same effects as those of the above-described embodiment can be obtained.

In the first embodiment, even when the first detection signal Sd1 is not received, the output control means 43 immediately outputs the stop signal St when receiving the second detection signal Sd2 And output it. For example, it is also conceivable that, when a large amount of leaked liquid W is generated, the leaked liquid W is detected only by the second detection means 42b, depending on the direction in which the leaked liquid W flows have. Therefore, in order to secure the safety, the output control means 43 is configured not only to receive the first and second detection signals Sd1 and Sd2 but also to receive the stop signal St To the manufacturing apparatus 11 immediately.

In the first embodiment, when the liquid leakage detection device 10 detects the liquid W leaked from the first introduction part 25, the manufacturing device 11 is stopped after the end of the work in progress. The timing for stopping the manufacturing apparatus 11 by detecting the liquid W leaked from the first introduction portion 25 is not particularly limited. For example, the liquid leakage detection device 10 may be configured to receive the first detection signal Sd1 at the H level from the first detection means 42a, (That is, any job end timing).

In the first embodiment, the first introduction part 25 is provided on the annular lower surface 20c, but a plurality of introduction parts for detecting the leaked liquid W are formed on the annular lower surface 20c at equally spaced intervals along the circumferential direction May be installed. The distance between the entrance of the leaked liquid W into the gap D1 between the annular bottom surface 20c and the bottom surface 12 and the introduction portion becomes close to each other. Therefore, the liquid leakage detection device 10 can quickly detect the leaked liquid W at the inlet portion.

In the first embodiment, the circular recess 20b is formed at the center of the lower surface 20a of the base 20 of the liquid leakage detecting device 10 and the second inlet 26 (26a) is formed in the circular recess 20b. ). However, the shape of the concave portion 20b is not limited to a circular shape. That is, the concave portion can be formed in any shape (for example, a rectangular shape) having a gap larger than the gap D1 between the annular bottom surface 20c and the bottom surface 12. The number of recesses provided in the lower surface 20a is not limited to one, but may be two or more.

For example, at least one annular groove may be formed in the annular lower surface 20c between the first introduction portion 25 and the second introduction portion 26. [ For example, the concave portion 20b is inclined so that the gap between the bottom surface 20a and the bottom surface 20a gradually increases from the inner end of the annular bottom surface 20c to the central position of the base 20 Shaped concave portion.

In the first embodiment, when the liquid leakage detection device 10 detects the liquid W leaked from the first introduction part 25, a small amount of leaked liquid W leaks from the production device 11 And the manufacturing apparatus 11 was stopped in synchronization with the synchronization signal Ss. The present invention is not limited thereto and the liquid leakage detection device 10 may be configured such that when the liquid W leaked from the first introduction part 25 is detected, the liquid leakage detection device 10 notifies the production device 11 that a small amount of the leaked liquid W has leaked And output an alarm signal to the manufacturing apparatus 11. [ In this case, the leaked liquid leakage detecting device 10 notifies the manufacturing device 11 that the leaked liquid W from the manufacturing device 11 has leaked. Thereafter, when the liquid leakage detection device 10 detects the liquid W leaked from the second introduction part 26, it is judged that a large amount of leaked liquid W has flowed out from the production device 11, (11).

In the first embodiment, the leaked liquid W introduced into the gap D1 between the annular bottom surface 20c and the bottom surface 12 is introduced to the first introduction portion 25 by the capillary phenomenon. The annular lower surface 20c is provided with the annular (or annular) projecting portion 25 along the circumferential direction at the first introduction portion 25 so that the annular lower surface 20c and the bottom surface 12 The leaked liquid W that has flowed into the gap D1 may be guided to the annular projecting portion to be introduced into the first introduction portion 25. [ The projected portion guides the outflowed liquid W flowing into the annular lower surface 20c to the concave portion 28 of the first introduction portion 25 and prevents the liquid W leaked from the first introduction portion 25, To quickly perform the detection of the < / RTI > As a result, the time from the detection of the first leaked liquid W at the position of the first inlet 25 to the detection of the leaked liquid W at the position of the second inlet 26 is prolonged . As a result, the controllability against the generation of the leaked liquid W can be enhanced, for example, the stop timing of the manufacturing apparatus 11 can be set unfavorably.

In the second embodiment, the liquid leakage detection device 50 detects the time when the liquid W leaked from the first introduction part 25 is detected and the time when the liquid W leaked from the third introduction part 51 is detected The timing of stopping the manufacturing apparatus 11 is changed based on the time difference C1 with time. The present invention is not limited to this and the liquid leakage detection device 50 can also stop the manufacturing apparatus 11 in units of respective required times in a series of operations of the manufacturing apparatus 11 based on the detection time difference C1 have.

In this manufacturing method, the liquid leakage detecting device 50 stops the manufacturing apparatus 11 as soon as the work in progress of the manufacturing apparatus 11 is completed. As a result, the liquid leakage detecting apparatus 10 can further reduce the productivity of the manufacturing apparatus 11 equipped with the detecting apparatus.

Further, when the detection time difference C1 is longer than the reference time, the liquid leakage detection device 50 starts the stop control of the manufacturing apparatus 11. Conversely, if the detection time difference C1 is shorter than the reference time, The detection device 50 may cause the manufacturing apparatus 11 to stop urgently.

Further, the liquid leakage detection device 50 outputs the stop signal St in synchronization with the synchronization signal Ss from the production apparatus 11 based on the detection time difference C1, .

In this control method, the liquid leakage detecting device 50 can stop the manufacturing apparatus 11 every time the work in progress of the manufacturing apparatus 11 is completed. As a result, the liquid leakage detection device 50 can further reduce the productivity of the production apparatus 11 equipped with the detection device.

In the second embodiment, the base 20 of the liquid leakage detection device 50 is not provided with the second introduction portion 26, unlike the first embodiment. The present invention is not limited to this, and the second introduction part 26 may be provided on the base 20 of the liquid leakage detection device 50 as in the first embodiment. In this case, in addition to the first liquid leak detecting portion 40a, 41a, 42a and the second liquid leak detecting portion 40c, 41c, 42c of the second embodiment, the second light emitting means 40b, 1 light receiving means 41b and first detection means 42a are provided in the liquid leakage detection device 50 as the third liquid leakage detection portion. In this configuration, the liquid leakage detection device 50 can stop the manufacturing apparatus 11 immediately upon detection of the liquid W leaked from the second introduction section 26, as in the first embodiment.

In the second embodiment, the position where the third introduction portion 51 is provided is not limited to the position shown in Fig. That is, the position of the third introduction portion 51 is not limited to the position symmetrical with the first introduction portion 25 with the center of the base 20 therebetween. For example, the third introduction portion 51 may be provided in the vicinity of the center of the lower surface 20a of the base 20.

Claims (10)

A liquid leakage detection device for detecting the occurrence of liquid leakage,
A first introduction part introducing a liquid leakage;
A first liquid leak detector for detecting a leaked liquid introduced into the first inlet to generate a first detection signal;
A second introduction part introducing the leaked liquid at a position different from the first introduction part;
A second liquid leakage detection unit for detecting a leakage liquid introduced into the second introduction unit and generating a second detection signal; And
And an output control section for outputting a liquid leak detection signal in accordance with the amount of the leaked liquid generated based on the first and second detection signals,
Wherein the output control unit comprises:
The liquid leakage detection signal is output after a predetermined time elapses from the reception of the first detection signal,
And outputs the liquid leak detection signal immediately upon receiving the second detection signal. delete The method according to claim 1,
Wherein the output control section outputs the liquid leak detection signal immediately upon receiving the second detection signal after receiving the first detection signal. The method according to claim 1,
Wherein the second introduction portion is provided at a position away from the first introduction portion with respect to the source of the liquid leakage. The method according to claim 1,
Wherein the output control section receives the synchronization signal from the outside and outputs the liquid leakage detection signal in synchronization with the synchronization signal. The method according to claim 1,
A gap is provided between the liquid leakage detection device and the bottom surface,
Wherein the first introduction portion is provided at an edge portion of a lower surface of the liquid leakage detection device,
Wherein the second lead-in portion is provided in a concave portion provided at a center of the lower surface of the liquid leakage detecting device. The method according to claim 6,
Wherein the concave portion is provided with an air hole communicating with the outside from the inner surface of the concave portion through the inside of the liquid leakage detecting device. The method according to claim 1,
Further comprising a time interval measuring section for measuring a time difference between a time when the first liquid leak detecting section has detected the leaked liquid and a time when the second liquid leak detecting section has detected the leaked liquid,
Wherein the output control section changes the timing of outputting the liquid leak detection signal based on the first and second detection signals and the time difference measured by the time interval measurement section . 9. The method of claim 8,
A third introduction part for introducing the leaked liquid at a position different from the first and second introduction parts; And
And a third liquid leak detecting portion for detecting the leaked liquid introduced into the third inlet portion to generate a third detection signal,
Wherein the output control unit comprises:
And when the third liquid leak detecting part detects the leaked liquid, outputs the liquid leak detection signal immediately. 9. The method according to any one of claims 1 to 8,
Wherein the first liquid leakage detection unit
A first light projecting means for irradiating light to the first introduction portion;
First light receiving means for receiving light from the first light projecting means through the first introduction portion; And
And first detection means for detecting the leaked liquid based on the amount of light received by the first light receiving means and generating the first detection signal,
The second liquid leakage detection unit
Second light projecting means for irradiating light to the second introduction portion;
Second light receiving means for receiving light from said second light projecting means through said second introduction portion; And
And second detection means for detecting the leaked liquid based on the amount of light received by the second light receiving means and generating the second detection signal.

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