KR20080093189A - Gas leakage sensing system for gas supply device and method for gas leakage sensing - Google Patents
Gas leakage sensing system for gas supply device and method for gas leakage sensing Download PDFInfo
- Publication number
- KR20080093189A KR20080093189A KR1020070036763A KR20070036763A KR20080093189A KR 20080093189 A KR20080093189 A KR 20080093189A KR 1020070036763 A KR1020070036763 A KR 1020070036763A KR 20070036763 A KR20070036763 A KR 20070036763A KR 20080093189 A KR20080093189 A KR 20080093189A
- Authority
- KR
- South Korea
- Prior art keywords
- gas
- gas line
- refraction
- supply device
- line
- Prior art date
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/38—Investigating fluid-tightness of structures by using light
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D5/00—Protection or supervision of installations
- F17D5/02—Preventing, monitoring, or locating loss
- F17D5/06—Preventing, monitoring, or locating loss using electric or acoustic means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Abstract
The present invention relates to a gas leak detection system and a gas leak detection method of a gas supply device. The gas leak detection system of a gas supply device according to the present invention provides a passage for gas supply, and includes a gas line having some transparent pipes; ; A light emitter for irradiating light to a transparent section of the gas line; A refraction detection sensor for detecting a refraction angle of light passing through the transparent tube; And a comparator configured to determine whether the gas leaks by comparing the refraction angle detected by the refraction detection sensor with a reference refraction angle, and to generate an interlock signal when determining a gas leak in the gas line. According to the present invention, it is possible to prevent a process failure of the semiconductor manufacturing equipment and to increase the operation efficiency of the gas supply device.
Description
1 is a structural diagram showing a gas supply apparatus according to the prior art,
2 is a structural diagram of a gas leak detection system of a gas supply device according to an embodiment of the present invention;
3 is an enlarged structural diagram of the sensor detecting unit of FIG. 2;
4 is a block diagram inside the comparator of FIG. 2,
5 is a flow chart of a gas leak detection method according to another embodiment of the present invention.
* Description of reference signs for the main parts of the drawings *
104: gas line 108: transparent tube
110: light emitter 112: refraction detection sensor
114: Comparator
The present invention relates to a gas leak detection system and an operation method of a gas supply device, and more particularly, to prevent and minimize process defects in a semiconductor manufacturing facility, and to increase the operation efficiency of the gas supply device. It relates to a leak detection system and a method of operation.
In general, in the semiconductor industry, as semiconductor devices become highly integrated and highly functional, a more efficient semiconductor manufacturing apparatus is required. Particularly, among the semiconductor manufacturing apparatuses, a manufacturing apparatus using gas is widely used, and an etching process using gas may correspond to this.
Therefore, a gas supply device for supplying a gas to a process chamber, which is a space where the process is performed, is required to perform a process using gas. However, when gas is supplied to the process chamber through the gas supply device, the gas often leaks to the outside during gas supply.
Hereinafter, the gas supply apparatus according to the prior art will be described.
1 is a structural diagram showing a
As shown in FIG. 1, the
The
The
The
As such, when the gas is supplied from the outside and the gas is delivered through the
However, according to the related art, when a gas leakage situation occurs in the
Accordingly, an object of the present invention is to provide a gas leak detection system and a gas leak detection method of a gas supply device that can overcome the problems of the prior art as described above.
Another object of the present invention is to provide a gas leak detection system and a gas leak detection method of the gas supply device for preventing and minimizing the process failure.
Still another object of the present invention is to provide a gas leak detection system and a gas leak detection method of a gas supply device for increasing the operation efficiency of the gas supply device.
According to an aspect of the present invention for achieving some of the above technical problems, the gas leak detection system of the gas supply device according to the present invention, provides a passage for gas supply, a gas line having some transparent tube And a light emitter for irradiating light to the transparent tube of the gas line, a refraction sensor for detecting the refraction angle of the light passing through the transparent tube, and a refraction angle detected by the refraction sensor to determine whether the gas is leaked. And a comparator for generating an interlock signal when determining a gas leak in the gas line.
The gas supplied to the gas line may be H 2 O. The light irradiated from the light emitter may be disposed adjacent to the gas line at a position to vertically incident the gas line. The comparator compares the refraction angle input by the refraction angle sensed by the refraction detection sensor and the refraction angle input through the input unit with respect to the reference refraction angle, and when the refraction angle is different from the reference refraction angle, gas leakage occurs in the gas line. It may be provided with a comparison detecting unit for detecting and an output unit for outputting an interlock signal when the gas leak is recognized.
According to another aspect of the present invention for achieving some of the above technical problem, the gas leak detection method of the gas supply device according to the present invention is a) having a gas line having a portion of the transparent section and transparent of the gas line Irradiating light with a tube to sense an angle of refraction; b) recognizing that a gas leak occurs in the gas line when the angles of refraction are different from each other in comparison with the reference angles of refraction; And c) generating and outputting an interlock signal to the outside when the gas leak is recognized to block the gas supply in the gas line.
The step b) may further include the step of allowing the gas supply in the gas line to continue when the reference refractive angle and the refractive angle are the same.
According to the configuration of the present invention, it is possible to prevent and minimize the process failure of the semiconductor manufacturing equipment, and to increase the operation efficiency of the gas supply device.
Hereinafter, an embodiment of the present invention will be described in detail with reference to the accompanying drawings without any intention other than to provide a thorough understanding of the present invention to those skilled in the art.
2 is a structural diagram of a gas
As shown in FIG. 2, the gas
The
For example, when H 2 O (B) in a liquid state is supplied to the
The
The
The
The
Hereinafter, the sensing process of the
The
In this case, when the reference refractive angle and the next sensed refractive angle are different, the interlock signal ILS is recognized so that the gas leakage occurs in the
Hereinafter, the sensing process of the gas leak detection system will be described in more detail.
3 is an enlarged structural diagram of the sensing unit of FIG. 2.
As shown in FIG. 3, when light is irradiated from the
When the light is irradiated by using the
At this time, through the Snell's law (Snell's law) the angle of refraction, each different depending on the type of gas in the gas line
This can be explained. Snell's law is as follows. 'sin / sin i = n 2 / n 1 '(where i is the angle of incidence, Is the refractive angle, n 1 is the refractive index of the incident medium, and n 2 is the refractive index of the refractive medium.)That is, when light is incident on the same incidence medium at the same incidence angle, the refractive angle is changed as the refractive medium is changed.
It can also be seen that the difference.Therefore, when the leakage of the gaseous H 2 O (B ') from the outside to enter the
Hereinafter, the comparator of the gas leak detection system will be described in more detail.
4 is a block diagram inside the
As shown in FIG. 4, the comparator includes an
The
The
If the reference refraction angle α and the next sensed refraction angle β are the same, it is recognized that no gas leak occurs in the
However, if the reference refraction angle α and the next sensed refraction angle β are different from each other, it is determined that the external gas in the
The
Therefore, the
5 is a flow chart of a gas leak detection method according to another embodiment of the present invention.
As shown in Figure 5, the gas leak detection method first opens the gas valve in the flow controller to supply gas to the gas line (S10). After gas is supplied to the gas line, light is scanned into the gas line (S12).
After injecting the light into the gas line, after sensing the refractive angle of the light, and outputs it (S14). After outputting the refraction angle, it is checked whether the refraction angle is equal to the reference refraction angle (S16).
When the refraction angle and the reference refraction angle are the same, the gas line is sensed that the gas is normally supplied, the next refraction angle is sensed (S14) and the operation is repeated to compare with the reference refraction angle (S16).
In this case, if the refractive angle and the reference refractive angle are different from each other, it is determined that a gas leak occurs in the gas line (S18). After the gas leak is determined, the gas valve in the flow controller is closed (S20).
Thus, by detecting whether a gas leak occurs in the gas line of the gas supply device, when the gas leakage occurs, the gas supply can be stopped.
As described above, in the gas leak detection system of the gas supply device, by adding the gas leak detection system to the gas supply device, it is possible to reduce process defects and increase the operation efficiency of the gas supply device.
The description of the above embodiments is merely given by way of example with reference to the drawings for a more thorough understanding of the present invention, and should not be construed as limiting the present invention. In addition, it will be apparent to those skilled in the art that various changes and modifications can be made without departing from the basic principles of the present invention.
As described above, according to the present invention, by adding a gas leak detection system to the gas supply device, it is possible to prevent and minimize the process defect of the semiconductor device manufacturing equipment, and to increase the operation efficiency of the gas supply device.
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020070036763A KR20080093189A (en) | 2007-04-16 | 2007-04-16 | Gas leakage sensing system for gas supply device and method for gas leakage sensing |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020070036763A KR20080093189A (en) | 2007-04-16 | 2007-04-16 | Gas leakage sensing system for gas supply device and method for gas leakage sensing |
Publications (1)
Publication Number | Publication Date |
---|---|
KR20080093189A true KR20080093189A (en) | 2008-10-21 |
Family
ID=40153802
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020070036763A KR20080093189A (en) | 2007-04-16 | 2007-04-16 | Gas leakage sensing system for gas supply device and method for gas leakage sensing |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR20080093189A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20160004009U (en) | 2015-05-13 | 2016-11-23 | 현대중공업 주식회사 | The device for detecting a gas leakage |
-
2007
- 2007-04-16 KR KR1020070036763A patent/KR20080093189A/en not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20160004009U (en) | 2015-05-13 | 2016-11-23 | 현대중공업 주식회사 | The device for detecting a gas leakage |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI541626B (en) | Gas flow test system and gas flow test unit | |
CN103782148B (en) | The leak check method of relief valve | |
US20070181192A1 (en) | Method and apparatus for monitoring gas flow amount in semiconductor manufacturing equipment | |
KR20190009713A (en) | Processing apparatus for target object and inspection method for processing apparatus | |
JP6541584B2 (en) | How to inspect a gas supply system | |
KR102101122B1 (en) | Apparatus and method thereof for water pipe using low nitrogen | |
US20210041122A1 (en) | Detecting system of liquid leakage inside the duct and the method thereof | |
KR20080093189A (en) | Gas leakage sensing system for gas supply device and method for gas leakage sensing | |
JP3717996B2 (en) | Chemical supply device | |
JP7292073B2 (en) | LEAK TESTING SYSTEM AND LEAKAGE TESTING METHOD | |
US20170075361A1 (en) | Method of inspecting gas supply system | |
JP2021110594A (en) | Inspection method for gas leakage detector, gas leakage inspection method, and gas leakage detector | |
KR101358087B1 (en) | Automatic precision test method and device for safety valve | |
KR20070029345A (en) | Apparatus for dispensing photosensitive solution in semiconductor device fabrication equipment | |
KR101774145B1 (en) | Gas leakage sensing apparatus | |
US20220214320A1 (en) | Instrument for elemental analysis | |
JP2005315784A (en) | Leak detecting method, and detector therefor | |
KR100470264B1 (en) | Tester for sensing leak of pressure and vacuum | |
KR101985809B1 (en) | Leakage testing equipment for electrostatic chuck | |
KR102270214B1 (en) | Abnomal checking system for valve or fluid | |
KR102492814B1 (en) | Leak inspection method using helium injection device and refurbishment method of semiconductior manufacturing equipment including the same | |
KR101760104B1 (en) | Apparatus for branching gas | |
KR100414303B1 (en) | Apparatus for preventing failure of detecting gas contamination in semiconductor wafer manufacturing equipment | |
JP6734724B2 (en) | Damage detection device for double container, damage detection method, and substrate processing device | |
JP6534577B2 (en) | Substrate processing equipment |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Withdrawal due to no request for examination |