KR101628267B1 - Pressure sensor - Google Patents
Pressure sensor Download PDFInfo
- Publication number
- KR101628267B1 KR101628267B1 KR1020140145504A KR20140145504A KR101628267B1 KR 101628267 B1 KR101628267 B1 KR 101628267B1 KR 1020140145504 A KR1020140145504 A KR 1020140145504A KR 20140145504 A KR20140145504 A KR 20140145504A KR 101628267 B1 KR101628267 B1 KR 101628267B1
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- KR
- South Korea
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- electrode pattern
- flexible substrate
- sensor element
- electrically connected
- pressure sensor
- Prior art date
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Abstract
A pressure sensor is initiated. The pressure sensor includes a flexible substrate electrically connected to the sensor element and the sensor element. The flexible board includes a terminal connection portion connected to the connector terminal, a drive chip mounting portion on which the drive chip is mounted, and an electrode pattern formed on at least one surface of the flexible substrate and electrically connected to the sensor element. The sensor element includes a connection terminal portion electrically connected to the electrode pattern of the flexible substrate.
Description
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pressure sensor, and more particularly to a technique related to electrical connection between a sensor element constituting a pressure sensor and a circuit board.
Pressure sensors are devices that measure absolute or relative pressures, and capacitive, piezoelectric, and piezoresistive types are well known. For reference, Korean Patent Publication No. 10-1013186 discloses a pressure sensor in which a pressure sensor chip made of a silicon material is stably attached to an integral base of a metal material.
The proposed invention aims to improve the electrical connection structure of the pressure sensor.
According to an aspect, a pressure sensor includes a flexible substrate electrically connected to a sensor element and a sensor element. The flexible board includes a terminal connection portion connected to the connector terminal, a drive chip mounting portion on which the drive chip is mounted, and an electrode pattern formed on at least one surface of the flexible substrate and electrically connected to the sensor element. The sensor element includes a connection terminal portion electrically connected to the electrode pattern of the flexible substrate.
According to an aspect of the present invention, the connection terminal portion of the sensor element includes a via hole electrically connected to a pressure sensing electrode pattern for sensing pressure, which is filled with a conductive material, and a via hole formed in contact with the via hole on the surface of the sensor element, And a surface electrode pattern electrically connected to the pattern.
According to one aspect, the electrode patterns of the flexible substrate are formed on both sides of the substrate and are electrically connected to each other.
According to one aspect, the flexible substrate further includes a grounding piece extending from the substrate to contact and electrically ground the housing.
In the proposed invention, a driving chip is mounted on a flexible substrate, and is electrically connected to a connector and a sensor element. Therefore, a separate substrate for driving chip mounting is not required, and the flexible substrate is directly soldered to the sensor element, thereby reducing the number of solder pieces.
In addition, it has a structure that enables soldering by heat welding or the like instead of conventional wire brazing which is difficult and requires manual work.
1 is a perspective view of a pressure sensor according to an embodiment.
2 is a cross-sectional view of a pressure sensor according to an embodiment.
3 is an exploded perspective view of a pressure sensor according to an embodiment.
4 is a plan view of a flexible substrate according to one embodiment.
5 is a top view of a sensor element according to one embodiment.
6 is a cross-sectional view of a sensor element according to one embodiment.
7 is a plan view of a sensor element in which a flexible substrate and a flexible substrate are electrically connected according to an embodiment.
8 is a plan view of a flexible substrate according to another embodiment.
BRIEF DESCRIPTION OF THE DRAWINGS The foregoing and further aspects of the present invention will become more apparent from the following detailed description of preferred embodiments with reference to the accompanying drawings. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 is a perspective view of a pressure sensor according to an embodiment, FIG. 2 is a cross-sectional view of a pressure sensor according to an embodiment, and FIG. 3 is an exploded perspective view of a pressure sensor according to an embodiment. The pressure sensor includes a connector (100) and a housing (200). The
The
The
4 is a plan view of a flexible substrate according to one embodiment. 4, the
FIG. 5 is a plan view of a sensor element according to one embodiment, and FIG. 6 is a cross-sectional view of a sensor element according to an embodiment. The
7 is a plan view of a sensor element in which a flexible substrate and a flexible substrate are electrically connected according to an embodiment. The
8 is a plan view of a flexible substrate according to another embodiment. The basic structure is the same as in Fig. However, the
The present invention has been described with reference to the preferred embodiments. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. Therefore, the disclosed embodiments should be considered in an illustrative rather than a restrictive sense. The scope of the present invention is defined by the appended claims rather than by the foregoing description, and all differences within the scope of equivalents thereof should be construed as being included in the present invention.
100: connector 110: terminal
200: housing 300: soft substrate
310: terminal hole 320: driving chip mounting part
330: electrode pattern 340: grounding piece
400: sensor element 410: via hole
420: surface electrode pattern 430: conductive material
Claims (4)
A sensor element including a pressure sensing electrode pattern for sensing the pressure of the membrane and a connection terminal portion for electrically connecting the electrode pattern of the flexible substrate to the pressure sensing electrode pattern,
The connection terminal portion of the sensor element is:
A via hole filled with a conductive material and electrically connected to the pressure sensing electrode pattern; And
A surface electrode pattern formed to abut the via hole on the surface of the sensor element and being electrically connected to the electrode pattern of the flexible substrate;
.
Wherein the electrode pattern of the flexible substrate is formed on both sides of the substrate and is electrically connected to each other.
Further comprising a grounding piece extending from the substrate and contacting the housing to electrically ground it.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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KR1020140145504A KR101628267B1 (en) | 2014-10-24 | 2014-10-24 | Pressure sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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KR1020140145504A KR101628267B1 (en) | 2014-10-24 | 2014-10-24 | Pressure sensor |
Publications (2)
Publication Number | Publication Date |
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KR20160048574A KR20160048574A (en) | 2016-05-04 |
KR101628267B1 true KR101628267B1 (en) | 2016-06-21 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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KR1020140145504A KR101628267B1 (en) | 2014-10-24 | 2014-10-24 | Pressure sensor |
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KR (1) | KR101628267B1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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KR20230057644A (en) * | 2021-10-22 | 2023-05-02 | 대양전기공업 주식회사 | Pressure sensor unit |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4765004B2 (en) | 2006-09-04 | 2011-09-07 | 富士電機株式会社 | Semiconductor device and manufacturing method thereof |
Family Cites Families (4)
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JPH0765004B2 (en) * | 1986-03-28 | 1995-07-12 | 臼井国際産業株式会社 | Heat and corrosion resistant paint |
JPH10197377A (en) * | 1996-12-27 | 1998-07-31 | Hokuriku Electric Ind Co Ltd | Pressure sensor module |
KR100834337B1 (en) * | 2006-09-29 | 2008-06-02 | 주식회사 케이이씨 | Pressure sensor device and manufacturing method thereof |
KR101013186B1 (en) | 2008-07-16 | 2011-02-10 | 주식회사 케이이씨 | Pressure sensor device and manufacturing method thereof |
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2014
- 2014-10-24 KR KR1020140145504A patent/KR101628267B1/en active IP Right Grant
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP4765004B2 (en) | 2006-09-04 | 2011-09-07 | 富士電機株式会社 | Semiconductor device and manufacturing method thereof |
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KR20160048574A (en) | 2016-05-04 |
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