KR101626806B1 - A frequency-modulating high-efficient terahertz transceiver - Google Patents

A frequency-modulating high-efficient terahertz transceiver Download PDF

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KR101626806B1
KR101626806B1 KR1020140094768A KR20140094768A KR101626806B1 KR 101626806 B1 KR101626806 B1 KR 101626806B1 KR 1020140094768 A KR1020140094768 A KR 1020140094768A KR 20140094768 A KR20140094768 A KR 20140094768A KR 101626806 B1 KR101626806 B1 KR 101626806B1
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South Korea
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active layer
spc
thz
photoconductive antenna
nga
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KR1020140094768A
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Korean (ko)
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KR20160013423A (en
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전태인
노삼규
지영빈
이상준
오승재
박현상
정기영
김상훈
김준오
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한국해양대학교 산학협력단
한국표준과학연구원
연세대학교 산학협력단
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Priority to KR1020140094768A priority Critical patent/KR101626806B1/en
Priority to PCT/KR2015/007709 priority patent/WO2016013898A1/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating

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  • Engineering & Computer Science (AREA)
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Abstract

The present invention is directed to a high efficiency THz transceiver capable of frequency modulation.
A high efficiency THz transceiver capable of frequency modulation according to the present invention includes: an active layer; A photoconductive antenna positioned on one side of the active layer; A nano grid antenna (NGA) formed on the photoconductive antenna; A semiconductor substrate located on the other side of the active layer; And a surface plasmon combiner (SPC) positioned at an interface between the upper surface of the substrate and the active layer, wherein the active layer is formed of an InGaAs thin film or an InGaAs / InAlAs multilayer quantum well layer (MQW layer) Wherein the photoconductive antenna comprises: a metal parallel transmission line extending parallel to a predetermined length; A central protrusion protruding symmetrically to face inward from a central region of the metal parallel transmission line; And electrode pads extending symmetrically at both ends of the metal parallel transmission line.
The NGA may be located at the central protruding portion of the photoconductive antenna, and at least one pattern may be patterned and continuously arranged. The SPC may be formed on the lower surface of the active layer or may be formed by periodically patterning the plurality of patterns so as to form a concentric circle. Alternatively, the SPC may be formed of a metal material.
A high efficiency THz transceiver capable of frequency modulation according to the present invention can be applied to a THz wave transmitter (Tx) or a receiver (Rx) composed of discrete elements or a THz wave generating and detecting a THz wave by a single photoconductive antenna on a single substrate It can be applied to transceivers and can be applied to Tx and Rx integrated on a single substrate at a certain interval, so that THz waves can be transmitted and detected in individual devices or single devices.
According to the above configuration, the high-efficiency THz transceiver capable of frequency modulation according to the present invention can increase the generation output and the measurement sensitivity of the THz wave by integrating the NGA and the SPC, and at the same time, the THz wave generated with a constant band width becomes the surface plasmon resonance structure So that the frequency can be modulated. Thus, frequency selectivity can be obtained.

Description

[0001] A FREQUENCY-MODULATING HIGH-EFFICIENT TERAHERTZ TRANSCEIVER < RTI ID = 0.0 >

The present invention relates to a high-efficiency terahertz (THz) transceiver capable of frequency modulation, and more particularly to a transceiver having a Nano Grating Antenna (NGA) and a Surface Plasmon Coupler (SPC) To a high-efficiency THz transceiver capable of frequency modulation capable of modulating a frequency and raising the output and measurement sensitivity of a THz wave.

The terahertz (THz) wave is an electromagnetic wave having a frequency ranging from 100 GHz to 10 THz between an infrared ray and a microwave. Recently, due to the development of advanced technology, the THz wave has been recognized as a future radio resource, ), BT (Bio Technology) and so on.

In particular, the THz wave propagates like a visible ray and transmits a variety of materials such as radio waves, so it is used not only for basic science such as physics, chemistry, biology, medicine, but also for detection of counterfeit bills, drugs, explosives, biochemical weapons, It is expected to be widely used in the fields of general industry, defense, security, etc. because it is possible to inspect structures non-destructively. Also, in the field of information communication, it is expected that THz technology will be widely used in 40Gbit / s wireless communication, high-speed data processing, and inter-satellite communication.

On the other hand, many techniques for measuring the spectroscopic characteristics of a sample with respect to the THz wave frequency region using the THz time domain spectroscopy (TDS) have been developed. In particular, studies on the development of THz waves and measurement devices have been actively carried out. In particular, the conventional photoconductive antenna has a higher output than other THz wave generating devices and measuring devices, and the desired electromagnetic characteristics And it is widely used in a large number of THz wave spectroscopy devices, and research on the THz wave spectroscopy device is also active.

Generally, the THz wave generation principle of the THz-wave photoconductive antenna is such that the photoelectrons excited by the femtosecond (fs: 10 -15 second) laser pulse incident on the substrate are accelerated along the potential difference between the driving electrodes, And the THz wave is radiated to the opposite side of the surface where the THz waves are present. On the other hand, when a THz wave is measured using a photoconductive antenna, a potential difference is not generated on the driving electrode, and a current generated when the excited photoelectrons due to the femtosecond laser pulse is accelerated by the THz wave incident on the opposite side of the driving electrode The THz wave is measured.

On the other hand, in the acquisition of the THz wave spectroscopy and image, the output of the generated element and the sensitivity of the measurement element are very important parameters, and development of a device having high output and high sensitivity is required steadily. In addition, there is a demand for the development of high efficiency THz generation and detection device and high-performance device such as frequency modulation for application to various fields of THz wave technology. In addition, the conventional THz wave transmission / reception apparatus is configured to generate or detect THz waves by a separate element in which a transmitter (Tx) and a receiver (Rx) each having a respective photoconductive antenna are separated, There is a problem that the size and application of the apparatus are limited.

Domestic Registration No. 10-1382258 (Registered on April 01, 2014) Domestic registered patent No. 10-0952050 (registered on April 01, 2010) Domestic Registration No. 10-1337091 (Registered on November 28, 2012)

The present invention can increase the generation output and measurement sensitivity of a THz wave by integrating a nano grating antenna (NGA) and a surface plasmon combiner (SPC), and at the same time, a THz wave generated with a constant band width passes through a surface plasmon resonance structure, Modulation THz transceiver capable of frequency modulation capable of having frequency selectivity.

Further, the present invention can be applied to a THz wave transmitter (Tx) or a receiver (Rx) composed of individual elements, or to be applied to THz waves Tx and Rx integrated on a single substrate, A high-efficiency THz transceiver capable of frequency modulation capable of transmitting and detecting waves.

It is another object of the present invention to provide a high-efficiency THz transceiver capable of frequency modulation that can be used safely even when applied to medical equipment that should be targeted to a human body.

The various problems to be solved by the present invention are not limited to the above-mentioned problems, and other problems not mentioned can be clearly understood by those skilled in the art from the following description.

A high efficiency THz transceiver capable of frequency modulation according to the present invention includes: an active layer; A photoconductive antenna positioned on one side of the active layer; A nano grid antenna (NGA) formed on the photoconductive antenna; A semiconductor substrate located on the other side of the active layer; And a surface plasmon combiner (SPC) positioned at an interface between the upper surface of the substrate and the active layer, wherein the active layer is formed of indium gallium arsenide (InGaAs) epilayer or InGaAs / indium aluminum Arsenide (InAlAs) multilayer quantum well layer (MQW layer), the photoconductive antenna comprising: a metal parallel transmission line extending parallel to a predetermined length; A central protrusion protruding symmetrically to face inward from a central region of the metal parallel transmission line; And electrode pads extending symmetrically at both ends of the metal parallel transmission line.

The NGA may be located at the central protruding portion of the photoconductive antenna, and at least one pattern may be patterned and continuously arranged.

The substrate may be formed of an insulator or a semi-insulating semiconductor substrate.

The SPC may be located on the lower surface of the active layer.

The SPC may be formed by periodically patterning a plurality of patterns so as to form concentric circles, or may be formed in other shapes, and may be formed of a metal material.

Also, a high-efficiency THz transceiver capable of frequency modulation according to the present invention includes: an active layer; A transmitter (Tx) located on the active layer and transmitting a THz wave; A receiver Rx positioned at a predetermined distance from the Tx to detect a THz wave formed in the low temperature growth active layer on the active layer; An NGA located on the Rx; A substrate located on the other side of the active layer; And SPC located at an interface between the upper surface of the substrate and the active layer, wherein the active layer is formed of an InGaAs thin film or an InGaAs / InAlAs MQW, and Rx is a low temperature growth active layer; And a photovoltaic antenna formed on the low-temperature growth active layer, wherein the photovoltaic antenna comprises: a metal parallel transmission line extending parallel to a predetermined length; A central protrusion protruding symmetrically to face inward from a central region of the metal parallel transmission line; And electrode pads extending symmetrically at both ends of the metal parallel transmission line.

The low-temperature growth active layer may be composed of a low-temperature grown InGaAs thin film or an InGaAs / InAlAs MQW.

The NGA may be located at the central protruding portion of the Rx photoconductive antenna, and at least one pattern may be patterned and continuously arranged.

The substrate may be formed of an insulator or a semi-insulating semiconductor substrate.

The SPC may be located on the lower surface of the active layer.

The SPC may be formed by periodically patterning a plurality of patterns so as to form concentric circles, or may be formed in other shapes, and may be formed of a metal material.

The high efficiency THz transceiver capable of frequency modulation according to the present invention can integrate a nano grid antenna (NGA) and a surface plasmon combiner (SPC) to increase the generation output and measurement sensitivity of a THz wave, And the frequency can be modulated while passing through the surface plasmon resonance structure, so that frequency selectivity can be obtained.

Also, the high-efficiency THz transceiver capable of frequency modulation according to the present invention can be applied to a THz wave transmitter (Tx) or a receiver (Rx) composed of individual elements, or to a THz transceiver that generates and detects THz waves by a single photoconductive antenna And can be applied to THz waves Tx and Rx integrated on a single substrate, so that THz waves can be transmitted and detected in an individual element or a single element.

In addition, the high-efficiency THz transceiver capable of frequency modulation according to the present invention can be safely used even when applied to a medical device that should be targeted to a human body.

It will be appreciated that embodiments of the technical idea of the present invention can provide various effects not specifically mentioned.

1 is a cross-sectional view of a high-efficiency THz transceiver capable of frequency modulation according to a first embodiment of the technical idea of the present invention.
FIG. 2 is a top view of a substrate in a high-efficiency THz transceiver capable of frequency modulation according to a first embodiment of the technical idea of the present invention.
FIG. 3 is a bottom view of a substrate in a high-efficiency THz transceiver capable of frequency modulation according to a first embodiment of the technical idea of the present invention.
FIGS. 4 and 5 are enlarged views of a nano grating antenna (NGA) portion in a high-efficiency THz transceiver capable of frequency modulation according to a first embodiment of the technical idea of the present invention.
FIG. 6 is a view for explaining an example of a surface plasmon combiner (SPC) in a high-efficiency THz transceiver capable of frequency modulation according to a first embodiment of the technical idea of the present invention.
FIG. 7 is a view showing another modification of the formation position of the SPC in the high-efficiency THz transceiver capable of frequency modulation according to the first embodiment of the technical idea of the present invention.
8 is a perspective view illustrating a high-efficiency THz transceiver capable of frequency modulation according to a second embodiment of the technical idea of the present invention.
FIG. 9 is a view showing another modification of the formation position of the SPC in the high-efficiency THz transceiver capable of frequency modulation according to the second embodiment of the technical idea of the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS The advantages and features of the present invention, and how to accomplish them, will become apparent by reference to the embodiments described in detail below with reference to the accompanying drawings. However, the present invention is not limited to the embodiments described herein but may be embodied in other forms. Rather, the embodiments disclosed herein are provided so that the disclosure can be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the drawings, the thicknesses of layers and regions are exaggerated for clarity.

Terms such as top, bottom, top, bottom, or top, bottom, etc. are used to distinguish relative positions in components. For example, in the case of naming the upper part of the drawing as upper part and the lower part as lower part in the drawings for convenience, the upper part may be named lower part and the lower part may be named upper part without departing from the scope of right of the present invention .

The terminology used in this application is used only to describe a specific embodiment and is not intended to limit the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise. In this application, the terms "comprises", "having", and the like are used to specify that a feature, a number, a step, an operation, an element, a part or a combination thereof is described in the specification, But do not preclude the presence or addition of one or more other features, integers, steps, operations, components, parts, or combinations thereof.

Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries are to be interpreted as having a meaning consistent with the meaning in the context of the relevant art and are to be construed as ideal or overly formal in meaning unless explicitly defined in the present application Do not.

Hereinafter, a preferred embodiment of a high-efficiency THz transceiver capable of frequency modulation according to a first embodiment of the technical idea of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a cross-sectional view of a high-efficiency THz transceiver capable of frequency modulation according to a first embodiment of the present invention. FIG. 2 is a cross- FIG. 3 is a bottom view of the substrate in a high-efficiency THz transceiver capable of frequency modulation according to the first embodiment of the technical idea of the present invention, and FIGS. 4 and 5 are cross- FIG. 6 is an enlarged view of a portion of a nano grid antenna (NGA) in a high-efficiency THz transceiver capable of frequency modulation according to an embodiment of the present invention. FIG. 6 is a cross- FIG. 7 is a diagram for explaining an example of a combiner (SPC) according to the first embodiment of the present invention. FIG. The available high efficiency THz transceiver is a view showing another modified example of the positions of formation of the surface plasmon combiner (SPC).

The high efficiency THz transceiver capable of frequency modulation according to the first embodiment of the technical idea of the present invention is configured to increase the generation output and the measurement sensitivity of the THz wave and includes the NGA 300 and the SPC 500, Is a device capable of modulating the frequency with increased sensitivity and sensitivity.

1 to 6, a high-efficiency THz transceiver capable of frequency modulation according to a first embodiment of the technical idea of the present invention includes an active layer, a photoconductive antenna 200 located on one side of the active layer, An NGA 300 formed on the substrate 200, a substrate 400 positioned on the other side of the substrate, and an SPC 500 positioned on the upper surface of the substrate 400.

The active layer 100 is made of an InGaAs thin film or an InGaAs / InAlAs MQW. On the upper side of the active layer 100, the photoconductive antenna 200 may be positioned in a subsequent process, and the substrate 400 may be positioned on the other side. The substrate 400 may be a semiconductor substrate 400 of an insulating or semi-insulating (SI) type. The substrate 400 may be formed of a GaAs material including semi-insulating gallium arsenide (SI-GaAs) or low temperature grown gallium arsenide (LTG-GaAs), or may be formed of a material such as indium phosphide (InP).

The photoconductive antenna 200 is disposed on one side of the active layer 100 and may be provided for generating or measuring a THz wave. The photoconductive antenna 200 may be configured to protrude upward.

The photoconductive antenna 200 includes a metal parallel transmission line 220 extending parallel to a predetermined length, a central protrusion 230 protruding symmetrically to face inward in a central region of the metal parallel transmission line 220, And electrode pads 210 extending symmetrically at both ends of the metal parallel transmission line 220.

The central protrusion 230 protruding from the central region of the metal parallel transmission line 220 serves as a dipole antenna. The electrode pads 210 formed on both ends of the metal parallel transmission line 220 may be connected to signal lines for electrical connection with external devices.

The NGA 300 is formed on the photoconductive antenna 200 and can be formed in a nano-sized lattice structure so that pulses of the femtosecond laser 50 are easily transmitted and highly efficient light conduction phenomenon can be exhibited. have.

When a laser pulse is incident on the NGA 300 formed on the photoconductive antenna 200, the laser beam is irradiated with a laser beam to generate a THz wave of a greater intensity than the photoconductive antenna 200 without the NGA 300. [ The degree of transmission of the pulse is increased and a highly efficient photoconductive phenomenon may occur. The NGA 300 is located at the center protruding portion 230 of the photoconductive antenna 200, and at least one of the gratings may be patterned and continuously arranged.

The NGA 300 has a structure in which a plurality of fine nano gratings 310 are striped. The shape, position, number and the like of the NGA 300 are determined by a femtosecond laser 50 and may be formed to have various shapes depending on the position on the photoconductive antenna 200. [

The NGA 300 forms a nano grid 310 that is smaller than the wavelength of the incident femtosecond laser 50 so that surface plasmon resonance occurs when the femtosecond laser 50 is incident. Thereby increasing the degree of transmission of the femtosecond laser 50 incident thereon. Accordingly, since the amount of photoelectrons to be excited is increased, the generation output and the measurement sensitivity of the THz wave can be improved.

The SPC 500 may be located on the upper surface of the substrate 400, that is, the interface between the active layer 100 and the substrate 400. The SPC 500 may be provided to modulate the frequency of the THz wave transmitted through the SPC 500. The SPC 500 may be formed by periodically patterning a plurality of patterns so as to form concentric circles, and may be formed of a metal material.

In the present invention, when the THz wave generated in the NGA 300 is transmitted through the SPC 500 having a periodic structure, only frequencies having a constant relation with the period of the metal are coupled and passed through the SPC 500 As a result, the THz wave transmitted through the SPC 500 can be outputted in a state where the specific frequency is modulated to a high degree.

When the laser pulse incident through the NGA 300 and absorbed by the active layer 100 generates a THz wave having an increased intensity and the generated THz wave satisfies a specific condition in the SPC 500, And only the frequency corresponding to the metal pattern period can be transmitted. As a result, the frequency selectivity can be realized by transmitting only the THz wave of the frequency related to the metal pattern period.

In the first embodiment of the technical idea of the present invention, the SPC 500 is formed by periodically patterning a plurality of patterns so as to form a concentric circle, but the present invention is not limited to this, and various modifications such as a one-dimensional shape are possible.

In the first embodiment of the technical idea of the present invention, the SPC 500 is formed on the upper surface of the substrate 400. However, the forming position of the SPC 500 may be variously modified .

7, the SPC 500 is provided on the lower surface of the substrate 400, and a THz wave generated in the active layer 100 by laser pulses incident through the NGA 300 is incident on the substrate 400 400 may be changed and the position of the SPC 500 may be changed so as to be incident on the SPC.

8 is a perspective view illustrating a high-efficiency THz transceiver capable of frequency modulation according to a second embodiment of the technical idea of the present invention.

The high-efficiency THz transceiver capable of frequency modulation according to the second embodiment of the technical idea of the present invention can be applied to a single element in which a transmitter (Tx) 150 and a receiver (Rx) 180 are integrated, The modified portion will be mainly described in comparison with the first embodiment.

In the second embodiment of the technical idea of the present invention, the same reference numerals as those of the first embodiment can refer to the same components.

A high efficiency THz transceiver capable of frequency modulation according to a second embodiment of the present invention has an active layer 100, a Tx 150 and an Rx 180 formed on the active layer 100, a photoconductive antenna 200, And a SPC 500 disposed at an interface between the substrate 400 and the active layer 100. The active layer 100 is formed on the substrate 400,

The Tx 150 and the Rx 180 may be positioned on one side of the active layer 100 and the substrate 400 may be positioned on the other side of the active layer 100. The substrate 400 may be an insulating or semi-insulating semiconductor substrate 400. The substrate 400 may be formed of a GaAs material including SI-GaAs or LTG-GaAs, or may be formed of a material such as InP.

In the second embodiment of the technical idea of the present invention, the active layer 100 may be formed of an InGaAs thin film or an InGaAs / InAlAs MQW.

The Tx 150 may be disposed on the active layer 100 to transmit a THz wave. The Tx 150 is made of a metal line having a constant thickness and a line width, and may be formed of titanium or gold.

In the second embodiment of the present invention, the line width of the metal line of the Tx 150 (that is, the line width of the Tx 150 relative to the direction parallel to the active layer 100) is 10 to 300 . The thickness of the metal line of the Tx 150 (that is, the thickness of the Tx 150 relative to the direction perpendicular to the active layer 100) is 100 nm to 500 nm for Au and 10 nm to 50 nm for Ti .

The transmitter 150 is formed for the purpose of generating a THz wave using a photo-diode (pD) effect.

The Rx 180 is located on the low-temperature growth active layer 190 formed on the active layer 100 and is spaced from the transmitter 150 by a predetermined distance. In the second embodiment of the technical idea of the present invention, Can be equipped to detect THz waves with a high efficiency THz transceiver capable of frequency modulation.

For example, the Tx 150 and the Rx 180 may be spaced apart from each other by a predetermined horizontal distance. The Rx 180 may include a low temperature growth active layer 190 formed on the active layer 100 and a photoconductive antenna 200 disposed on the low temperature growth active layer 190.

The low-temperature growth active layer 190 may be an LTG InGaAs thin film deposited on the active layer 100 or an InGaAs / InAlAs MQW.

The photoconductive antenna 200 may be provided to detect the THz wave transmitted through the THz transceiver capable of frequency modulation according to the second embodiment of the technical idea of the present invention and protrude upward.

The photoconductive antenna 200 includes a metal parallel transmission line 220 extending parallel to a predetermined length, a central protrusion 230 protruding symmetrically to face inward in a central region of the metal parallel transmission line 220, And electrode pads 210 extending symmetrically at both ends of the metal parallel transmission line 220.

The central protrusion 230 protruding from the central region of the metal parallel transmission line 220 serves as a dipole antenna. The electrode pads 210 formed on both ends of the metal parallel transmission line 220 may be connected to signal lines for electrical connection with external devices.

The NGA 300 is formed on the photoconductive antenna 200 and can be formed into a nano-sized lattice structure to increase the degree of transmission of the femtosecond laser 50 and to exhibit a highly efficient photoconductive phenomenon have.

That is, when the laser pulse is incident on the NGA 300 formed on the photoconductive antenna 200, the NGA 300 is more sensitive than the photoconductive antenna 200 without the NGA 300 THz waves can be detected.

The structure of the nano grid antenna 300 has been described in detail in the first embodiment of the technical idea of the present invention, and a detailed description thereof will be omitted.

The substrate 400 has been described in detail in the first embodiment of the technical idea of the present invention, and a detailed description thereof will be omitted.

The SPC 500 may be located on the upper surface of the substrate 400, that is, the interface between the active layer 100 and the substrate 400. The SPC 500 may be provided to modulate the frequency of the THz wave transmitted through the SPC 500. The SPC 500 may be formed by periodically patterning a plurality of patterns so as to form concentric circles, and may be formed of a metal material.

The configuration and function of the SPC 500 have been described in detail in the first embodiment of the technical idea of the present invention, and a detailed description thereof will be omitted.

Also, in the second embodiment of the technical idea of the present invention, the SPC 500 is formed on the upper surface of the substrate 400. However, the forming position of the SPC 500 may be variously modified .

9, the SPC 500 is provided on the lower surface of the substrate 400, and a THz wave generated from the active layer 100 by light incident through the NGA 300 is incident on the substrate 400 400 may be changed and the position of the SPC 500 may be changed so as to be incident on the SPC.

While the present invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, It will be understood that the invention may be practiced. It is therefore to be understood that one embodiment described above is illustrative in all aspects and not restrictive.

50; Femtosecond laser 100; Active layer
150; Transmitter 180; receiving set
190; A low temperature growth active layer 200; Photoconductive antenna
210; Electrode pads 220; Metal parallel transmission line
230; A central protrusion 300; Nano grid antenna
310; Nano grid 400; Board
500; Surface plasmon coupler

Claims (12)

An active layer;
A photoconductive antenna positioned on one side of the active layer;
A nano grid antenna (NGA) formed on the photoconductive antenna;
A substrate located on the other side of the active layer; And
And a surface plasmon combiner (SPC) positioned at an interface between the upper surface of the substrate and the active layer,
The active layer is formed of InGaAs or InGaAs / InAlAs MQW,
The light-
A metal parallel transmission line extending parallel to a predetermined length;
Wherein the metal parallel transmission line includes a central protrusion protruding symmetrically to face inward from a central area; And
And an electrode pad extending symmetrically at both ends of the metal parallel transmission line,
Wherein the NGA is formed on the photoconductive antenna and increases the degree of transmission of the femtosecond laser.
The method according to claim 1,
Wherein the NGA is located at a central protruding portion of the photoconductive antenna, and at least one pattern is patterned and continuously arranged.
The method according to claim 1,
Wherein the active layer is formed of a homogeneous thin film or a heterostructured thin film containing MQW.
The method according to claim 1,
Wherein the SPC is located on a lower surface of the substrate.
The method according to claim 1,
Wherein the SPC is formed by periodically patterning a plurality of patterns so as to form a concentric circle, and is formed of a metal material.
delete The method according to claim 1,
A high-efficiency THz transceiver with frequency modulation used as a transceiver capable of generating and detecting THz waves with a single photoconductive antenna as a single element.
An active layer;
A transmitter positioned on the active layer and transmitting a THz wave at no voltage;
A receiver positioned at a predetermined distance from the transmitter and detecting a THz wave;
An NGA located on the receiver;
A substrate located on the other side of the active layer; And
And an SPC located at an interface between the upper surface of the substrate and the active layer,
Wherein the active layer is formed of a homogeneous thin film or a heteroepitaxial thin film containing MQW,
The receiver includes:
A low-temperature growth active layer formed on the active layer; And
And a photoconductive antenna formed on the low temperature growth active layer,
The light-
A metal parallel transmission line extending parallel to a predetermined length;
Wherein the metal parallel transmission line includes a central protrusion protruding symmetrically to face inward from a central area; And
And an electrode pad extending symmetrically at both ends of the metal parallel transmission line,
Wherein the NGA is formed on the photoconductive antenna and increases the degree of transmission of the femtosecond laser.
9. The method of claim 8,
Wherein the NGA is located at a central protruding portion of the photoconductive antenna, and at least one pattern is patterned and continuously arranged.
9. The method of claim 8,
Wherein the SPC is located on a lower surface of the substrate.
9. The method of claim 8,
Wherein the SPC is formed by periodically patterning a plurality of patterns so as to form a concentric circle, and is formed of a metal material.
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PCT/KR2015/007709 WO2016013898A1 (en) 2014-07-25 2015-07-24 High-efficiency terahertz transceiver enabling frequency modulation

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