KR101605570B1 - Method of making an electrowetting device, apparatus for carrying out the method and electrowetting device - Google Patents

Method of making an electrowetting device, apparatus for carrying out the method and electrowetting device Download PDF

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KR101605570B1
KR101605570B1 KR1020107013594A KR20107013594A KR101605570B1 KR 101605570 B1 KR101605570 B1 KR 101605570B1 KR 1020107013594 A KR1020107013594 A KR 1020107013594A KR 20107013594 A KR20107013594 A KR 20107013594A KR 101605570 B1 KR101605570 B1 KR 101605570B1
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substrate
sealing member
fluid
electrowetting
surface area
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KR1020107013594A
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KR20100110787A (en
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하리 씨.엠. 헤르멘스
찰스 알.엠. 시미드갈
로버트 에이. 하예스
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리쿠아비스타 비.브이.
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid

Abstract

A manufacturing method of an electrowetting device includes a first substrate, a second substrate, and a sealing member. The method comprising: a first step of applying a first fluid and a second fluid on the first substrate, wherein the first and second fluids are immiscible, a second sequential step of attaching the sealing member to the first substrate, step; Attaching the sealing member to the second substrate, forming a cavity surrounded by the first substrate, the second substrate, and the sealing member by the attachment of the sealing member, A second fluid; And curing the sealing member.

Figure 112010039372526-pct00001

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrowetting device manufacturing method, an apparatus for implementing the method, and an electrowetting device,

The present invention relates to a method for manufacturing an electrowetting device, an apparatus for implementing the method and an electrowetting device manufactured according to the method.

The display device comprises two substrates which are sealed together to form a cavity containing means which generally exhibits a display effect. In an LC display device, this means is a liquid crystal material. There are two general manufacturing methods for LC display devices. The first method aligns the pattern of the sealing material on the substrate and attaches the second substrate to the sealing material to form a cavity between the two substrates. The cavity has an opening through which the cavity is typically filled with LC material under vacuum.

A second method, referred to as so-called one-drop filling, is known from U.S. Patent Publication No. 2005/0094084 among others. The sealing material is arranged on the substrate in a closed pattern to form a series of opening containers. An LC material drop is provided within each container. A second substrate is attached to the sealing material, closing the container and forming a series of sealed cavities filled with the LC material. The size of a droplet is precisely selected to prevent over filling or filling deficiency of the cavity.

Applying these display technologies to electrowetting devices is a difficult process that can not produce satisfactory operation devices with low yields. In particular, when the device is an electrowetting device, filling of the cavities often results in unacceptable nonuniformity of the display effect on the display surface.

Therefore, it is an object of the present invention to provide an improved method of manufacturing an electrowetting device, and to provide an apparatus for performing the method and an improvement of the electrowetting device.

An object of the present invention is to provide a method of manufacturing an electrowetting device including a first substrate, a second substrate and a sealing member, the method comprising: applying a first fluid and a second fluid on the first substrate; The first and second fluids are nonmixable; A subsequent second step of attaching the sealing member to the first substrate; Attaching the sealing member to the second substrate, forming a cavity surrounded by the first substrate, the second substrate, and the sealing member by the attachment of the sealing member, A second fluid; And curing the sealing member.

In the final device, the sealing member is attached to both the first substrate and the second substrate. The invention relates in particular to the step of attaching the sealing member to the substrate and the ordering of the other steps of manufacturing the device.

The method applies the first fluid and the second fluid to the first substrate before attaching the sealing member to the first substrate. The sealing member connects the first and second substrates in a prepared device. The cavity containing the fluids is surrounded by the first substrate, the second substrate, and the sealing member. During application of the first and second fluids onto the first substrate, the first substrate is substantially free of obstructions such as protrusions of the sealing member. The obstacle affects the amount of fluid on the substrate. If the surface of the first substrate is substantially flat, the amount of fluid will only depend on the wettability of the surface and the properties of the two fluids. Therefore, the method according to the present invention also allows better control of the fluid volume compared to prior art methods using a substrate with a sealing member.

The method according to the present invention does not require the precise amount of fluid required in the liquid dropping method of the prior art. The method is particularly well suited for producing an apparatus in which water in an electrowetting device, for example, a second fluid is water and a first fluid is oil.

The step of attaching the sealing member to the second substrate may be performed before or after the application of the fluid on the first substrate. The curing of the seal may be performed after the two substrates are bonded by the sealing member. Alternatively, the curing effect can be used with a delay, such that an initiator of the curing process, such as irradiation, is performed before bonding the substrate, and the curing occurs after the bonding.

The method is particularly suitable for enhancing an electrowetting device, such as a lens, an optical filter, a lab on a chip, and especially an electrowetting display device. The two substrates surrounding one cavity can form a display device including one pixel or a plurality of pixels.

In a special embodiment of the electrowetting device, the first fluid may be applied to both substrates. In this case, the fluid is preferably applied to all of the substrates before the sealing member is attached to the substrate.

The method may also be used to manufacture an electrowetting device comprising three or more substrates, each of the two substrates being connected by a sealing member. After the first two substrates are filled and connected using the method according to the present invention, this substrate pair can again be connected to the third substrate using this method. The first fluid may be applied to one or both of the respective substrate pairs.

The sealing member may be attached to the second substrate prior to joining the first and second substrates, and this application has the advantage that the sealing member can be attached to the second substrate without the presence of fluid. The sealing member may also be attached to the first substrate after applying the fluid on the first substrate and before joining the two substrates. The two substrates and the sealing member can also be combined in one operation.

The sealing member may be applied on the substrate in a specific pattern. This can be achieved by injecting the sealing material directly from the injector onto the substrate or by using screen printing. Alternatively, the sealing member is a patterned sealing member, a so-called seal frame, which is carried out before the attachment step and has a predetermined pattern. The use of such a sealing frame can simplify the manufacture of the device, for example, by using a patterned layer from a roll.

A particular embodiment of the patterned sealing member comprises in sequence a first layer of sealing material, a carrier of solid material and a second layer of sealing material. The layer of the sealing material and the carrier preferably have the form of a predetermined pattern. The carrier provides dimensional stability to the patterned sealing member and facilitates manipulation of the sealing material prior to application onto the substrate. The carrier will be part of the final device, thus helping to keep the two substrates at a predetermined spacing.

Sealing between the substrates can be made by aligning one patterned sealing member on top of another patterned sealing member. In this case, the seal comprises a sealing material, a first carrier, a sealing material, a second carrier, and a sealing material in this order.

The operation of the sealing member can be facilitated if it includes a peel layer or a liner. The release layer may also have a predetermined pattern. The release layer is preferably removed immediately before bonding the two substrates. During the time between application of the patterned sealing member onto the substrate and engagement of the two substrates, the sealing material will not be contaminated. The sealing member will also have a release layer on both sides. Before the sealing member is applied onto the substrate, one peeling layer is removed. Prior to bonding the two substrates, the other release layer is removed.

The method includes forming a pattern in the sealing member. The pattern can be formed in an appropriate manner, preferably using laser cutting or die cutting. The pattern may be formed in a sealing material, a carrier and / or a release layer.

In an electrowetting device, the second fluid is preferably conductive or polar, wherein the first substrate has a first surface area that is less wettable to the second fluid and a second surface that is more wettable to the second fluid , The method comprises applying the sealing material to the second surface area. After applying the first and second fluids onto the first substrate, the first fluid forms a thin layer on a region that is less wettable to the second fluid, and the second fluid covers the thin layer And with the first substrate in a second surface area that is more wettable to the second fluid.

When the sealing member is provided in the second surface area, the sealing material may be optimized to contact only the second fluid and to hold the second fluid inside the cavity. In contrast, when the sealing member is applied in the first surface area, the sealing material contacts both the first and second fluids. It is difficult to develop a sealing material capable of holding both the first and second fluids in the cavity. When the first and second fluids are oil and water, respectively, the sealing material is provided on a second surface area that is more hydrophilic than the first surface area.

The sealing member is preferably applied to the first substrate by attaching it to the second surface area of the first substrate through the layer of the second fluid present on the first substrate.

The sealing material may be attached to the substrate by applying pressure on the sealing member. Pressure application is a particularly reliable method for sealing the electrowetting device in particular. The sealing material can be cured using UV irradiation and application of increased temperature or the use of settling time as a single curing step or a combination thereof.

The method according to the invention is particularly suitable for manufacturing a plurality of electrowetting devices wherein the first substrate is common to the device and the method comprises cutting the first substrate after forming the cavity. The cutting of the glass substrate can be performed using a scribe and break. The cutting is generally performed after the curing of the sealing material. The method includes providing a sealing member for each device and combining each of the second substrates with a common first substrate. After the sealing, the first substrate is cut. The process makes the shape of the second substrate different from that of the first substrate. The shape of the second substrate need not be suitable for the stripe breaker method.

The method may also be used to fabricate a plurality of devices having a common first substrate and a common second substrate. The method includes providing a sealing member and a second substrate common to the apparatus; Coupling the common first substrate and the common second substrate; And cutting the first substrate and the second substrate.

At least one of the above methods is preferably carried out in a continuous process. For example, the first substrate, the second substrate, and / or the sealing member may be fed from a roll. If the final product, the electrowetting device, is rolled into a roll and thus forms a roll-to-roll process, the process can be automated.

Another aspect of the present invention relates to an apparatus for manufacturing an electrowetting device using the method according to the present invention.

An electrowetting device according to the present invention comprises a first substrate and a second substrate coupled by a sealing member, the cavity forming a cavity comprising a first fluid and a second fluid which is conductive or polar, 1 fluid and the second fluid are immiscible and the first substrate has a first surface area that is less wettable to the second fluid and a second surface area that is more wettable to the second fluid, The sealing member is aligned on the second surface area.

Another electrowetting device in accordance with the present invention includes a first substrate and a second substrate coupled by a sealing member, forming a cavity, the cavity comprising a first fluid and a second fluid, which is conductive or polar, Wherein the first fluid and the second fluid are immiscible and the first substrate has a first surface area that is less wettable to the second fluid and a second surface area that is more wettable to the second fluid, The sealing member includes a pressure-sensitive adhesive. When the sealing material is a pressure-sensitive adhesive, the adhesion of the sealing can be relatively simply integrated by applying pressure in the method of manufacturing the electrowetting device.

The sealing member includes a carrier which is solid between the two layers of sealing material to form a member of well-defined thickness.

The first substrate and the second substrate have different shapes.

Other features and advantages of the invention will be apparent from the following description of preferred embodiments of the invention, given by way of example only and with reference to the accompanying drawings.

1A is a top view of a first substrate.
1B is a top view of the second substrate.
Figure 1c is a cross-sectional view of the substrate before assembly.
Figure 1d is a cross-sectional view of the substrate after assembly.
2A is a cross-sectional view of a sealing frame including a sealing material;
2B is a cross-sectional view of another sealing frame.
Figures 3a and 3b show two substrates before coupling.
Figure 4 is a cross-sectional and top view of a plurality of devices.
5 is a top view of a plurality of devices.
6 is a cross-sectional and top view of a plurality of devices.
Figure 7 shows an apparatus for manufacturing an apparatus.

Figure 1 shows the assembly of two substrates forming an electrowetting device according to the invention. An embodiment of an electrowetting device is an electrowetting device having four pixels. The electrowetting device includes a first fluid and a second fluid. The first and second fluids are immiscible. The first fluid is electrically non-conductive and can be, for example, an alkane such as hexadecane or a (silicone) oil. The first fluid is preferably opaque, but can be colored or white. The second fluid may be electrically conductive or polar and may be a salt fluid such as water or a calcium chloride fluid in a mixture of water and ethyl alcohol. The second fluid is preferably transparent, but may be colored or white, absorbent or reflective.

1A shows a top view of a first substrate. The first substrate includes four first surface areas (2) that are less wettable to the second fluid and a second surface area (3) that is more wettable to the second fluid. The second surface area surrounds the first surface area. The four first surface areas correspond to the four pixels of the display device and are aligned in the display area 4. [ When the first fluid is oil and the second fluid is water, the first surface area is hydrophobic and the second surface area is hydrophilic.

The wettability of the surface region can be obtained by appropriate selection of the substrate material, substrate surface treatment or application of the layer on the substrate surface. For clarity, the figures show the surface area as a layer. When the substrate material provides the characteristics of the second surface region 3, the second surface region extends to the edge of the substrate 1 in Fig.

The first surface area may be formed by an amorphous fluoropolymer layer such as AF 1600 or another low surface energy polymer. Since the hydrophobic layer has a higher wettability for the first fluid than for the second fluid, the hydrophobic property allows the first fluid to preferentially adhere to the first surface area. The second surface region may be formed by a photoresist layer such as, for example, SU8. When a sealing material is applied to a surface or a surface region of a substrate or a substrate or a fluid is applied, the substrate is considered to include all the solid layers arranged on the substrate, such as the above-mentioned layer controlling wettability.

Wettability is related to the relative affinity of the fluid to the surface of the solid. The wettability increases as the affinity increases and can be measured by the contact angle formed between the fluid and the solid and measured inside the fluid. When the contact angle is 0 °, it increases from relative non-wettability at an angle of 90 ° or more to complete the wettability, in which case the fluid tends to form a film on the surface of the solid.

Fig. 1B shows a top view of the second substrate 5. Fig. The sealing material is aligned on the substrate in a predetermined pattern, in this embodiment the square 6 has a shape that surrounds the display area 4. The sealing material is provided using an injector adapted to follow a predetermined pattern. In order to prevent the non-uniform thickness of the material on the pattern due to the start of the implant, the implantation preferably starts outside the display area and then continues in a predetermined pattern. Alternatively, the sealing material may have the form of a sealing frame that can be aligned on the substrate.

1C shows a cross-sectional view of the first and second substrates 1 and 5 before assembling the two substrates. The cross-sectional view is taken along line A-A in Fig. Figure 1C also shows a string of sealing materials 6 in the cross-section.

The first substrate has a first fluid (7) adjacent only to the first surface area (2). A method of applying a first fluid onto a first substrate is to immerse the substrate in a bath of a second fluid, e.g., water. A first fluid, e.g., oil, is provided on the surface of the substrate by a dispenser that is immersed in the second fluid with an opening extending proximate the surface. The dispenser is moved on the surface in a direction perpendicular to the longitudinal direction of the opening. The first fluid is provided on the length of the dispenser which is a thin film of the first fluid. The surface includes a first surface area that is more wettable to the first fluid than a second fluid and a second surface area that is more wettable with respect to the second fluid so that the first fluid is adjacent to the first surface area, Do not cover the area.

When the above-described method of applying the first fluid is used, the step of joining the two substrates is preferably carried out in a tank of the second fluid. The second substrate 5 is injected into the bath, and care is taken so that air does not enter the substrate.

The two substrates 1 and 5 are aligned and pressed at the same time so that the two substrates acquire the desired mutual spacing as shown in Fig. The sealing material forms the sealing member 8 between the two substrates. The sealing member isolates the cavity (9) between the two substrates. The cavity includes a first fluid 7 adjacent the first surface area 2 and a second fluid 10 captured in the cavity. The drawings are schematic and some dimensions have been exaggerated for clarity.

The seal 8 is formed on the second surface region 3 which is a hydrophilic region in this embodiment. Since the first fluid is not adjacent to this region, the cavity side of the seal is only adjacent by the second fluid. The selection of the sealing material can be optimized for one fluid. If a seal is formed in one of the first areas, the first fluid will be adjacent the bottom of the seal and the second fluid will be adjacent to the top of the seal. It is relatively difficult to find a sealing material that can withstand two different fluids, such as first and second fluids.

The sealing material 6 is preferably a pressure sensitive adhesive (PSA), for example a 3M product. The material is attached to the substrate under pressure. The sealing member can be cured by irradiating UV light. The thickness of the sealing member is 10 to 100 mu m. Note that contact with oil significantly impairs adhesion of the pressure sensitive adhesive.

The substrate may be made of glass or polymer, for example, and may be rigid or soft. The display device shown in Fig. 1D has a viewing surface 12 and a back surface 13 on which an image or display formed by the display device is viewed. The first substrate 1 faces the backside; The second substrate (5) faces the viewing surface (12). In a separate example, the display can be viewed from the back 13. The display device may be reflective, transmissive or semi-transmissive.

The position of the first fluid 7 on the first surface region 2 can be controlled by an electric field applied through an electrode not shown in the figure. Details of the operation of electrodes and devices are described in International Patent Application WO 03/071346.

Figure 2 shows two different embodiments of the sealing member in the form of a sealing frame. Such a sealing frame enables a different method of applying the sealing material on the substrate than the above-described method using the injector. 2A shows a cross section of the sealing member 15. Fig. The sealing frame includes a layer of sealing material (16) having a predetermined shape necessary for sealing the cavity of the device. The sealing frame has a peeling layer 17 on one side as shown, but may be provided on both sides. The release layer provides strength to the sealing frame, facilitates its operability, and enables storage of the sealing frame on the roll. The release layer must be removed from the sealing material before the two substrates are bonded. The release layer will be removed immediately before the two substrates are bonded if the sealing frame is immersed in the bath of the second fluid. The release layer may have a predetermined shape but may have a plate shape or belt shape without a predetermined shape.

Figure 2B shows an alternative sealing member 18 having two layers 19 and 20 of sealing material on opposite sides of a carrier 21 of solid material, for example a polymer such as PET. The sealing material and the carrier have a predetermined shape. The sealing frame may have a release layer 22 indicated by a dotted line. The thickness of the layers of the sealing material is 25 mu m, and the thickness of the carrier is 25 mu m.

In the manufacturing process of the electrowetting device, the sealing member or sealing frame 15 or 18 may be attached to the second substrate 5 before the substrate is bonded to the first substrate. The cross-section of the substrates 1 and 5 before bonding is similar to that shown in Fig. Alternatively, the sealing frame may be attached to the first substrate after the fluid has been applied to the substrate. A cross-sectional view of the substrate prior to bonding is shown in Figure 3A. As shown in Fig. 3B, it is possible to arrange the sealing frame between the two substrates and press the two substrates and the sealing frame together.

The sealing frame may be manufactured in a predetermined pattern before being used in an apparatus for carrying out the method according to the present invention. The sealing frame may be an individual sealing frame to be lifted by the device from the reservoir or may be joined by, for example, a release layer to form a belt that can be dried.

Alternatively, the sealing frame can be cut as part of the manufacturing process. For this purpose, the apparatus requires a station where the sealing frame is cut by a laser or die. The patterned sealing frame is transferred from this station to the station to which the substrate is coupled.

The method of manufacturing an electrowetting device according to the present invention is particularly suitable for manufacturing a plurality of electrowetting devices on a single substrate. Figure 4 shows a cross-sectional and top view of a plurality of devices on a single substrate. In this embodiment, the number of devices is 12, and four devices are installed for each of three rows. The first substrate 25 has a pattern of first and second surface areas similar to those of Fig. 1A for each of the twelve devices 26. Fig. The surface area 27 between the devices has the same wettability as the second surface area. The first substrate is common to each of the devices, and each device 26 has its own second substrate 28.

During fabrication, the first and second fluids are applied to the first substrate 25. Subsequently, each of the second substrates 28 is bonded to the first substrate after being aligned at the proper position of the first substrate. The sealing material 29 can be applied by any one of the methods described above. When applied to a second substrate, each second substrate has a sealing material separately. When applied to the first substrate, the sealing material is applied in a single pattern for a total of twelve devices. The coupling is preferably carried out in a tank of the second liquid. After the sealing member is cured, the first substrate is cut to separate the device. If the first substrate is made of glass, the cutting will include a line breaking process.

Figure 5 shows a top view of a series of devices before cutting. The device has a common first substrate 30 and a separate second substrate 31. The second substrate is a special shape deviating from the rectangle, and can be relatively easily manufactured. However, it is relatively difficult to make such a shape when the device has a common second substrate, especially when the cut is staggered to require a brittle manner. The second substrate 31 may have a curved shape, for example, with a cavity in a dome shape.

6 shows a cross-sectional view and a top view of a plurality of devices having two substrates in common. The first substrate 35 has a pattern of first and second surface areas similar to the first substrate 25 in Fig. After filling the fluid, the second substrate 36 is bonded to the first substrate. When the second substrate 36 is patterned, for example, by a color filter arranged on one of its surfaces, the two substrates must be aligned prior to bonding. The sealing member 37 can be applied, for example, to the first or second substrate in a single pattern. After curing of the seal, the first and second substrates are cut. The figure shows that the comb lines 38 along the device on the second substrate will be cut at the substrate.

The fabrication process of the electrowetting device can be fully automated. Prior to carrying out the method according to the invention, the first substrate is preferably applied to the substrate surface, for example an electrode, such as an electrode for reflection, absorption or transmission, electronic and optical layers, Characteristics. Similarly, the second substrate should have the necessary layers, for example a color filter. When working with a disconnected component such as a substrate and a sealing member, the component is picked up by a pick-and-place machine and assembled according to the method.

Figure 7 schematically shows an apparatus for manufacturing an electrowetting device using a roll-to-roll process. A tape 45 comprising a sealing frame is fed from a roll 46. The sealing frame includes a carrier material having adhesive properties on both sides. The optical cutting station 47 cuts a predetermined pattern from the carrier material and the adhesive, and cuts the carrier material into individual carriers. The carrier on the roll 46 may already have a predetermined pattern, in which case a cutting station is not required. The roll 48 provides a tape 49 having an individual second substrate attached thereto. The second substrate aligned under the tape 49 and the sealing frame aligned on top of the tape 45 are joined at the assembly station 50. Subsequently, the tape 45 is removed from the second substrate and the sealing member assembled by the rolls 51, and collected on the winding roll 52.

The roll 53 provides a tape 54 comprising a first substrate. The tapes 49 and 54 transfer the components into the bath 55 containing the second liquid 56. Inside the bath, a second substrate aligned under the tape 49 faces the first substrate aligned at the top of the tape 54. The filling-and-assembling station 57 is partially aligned on the top and inside of the bath, and sequentially performs two steps of filling the first substrate and bonding the two substrates. During the filling step, the spacing between the two tapes 49 and 54 is made large enough for the dispenser to pass through to dispense the first fluid on the first substrate. Dispensers are not shown in the drawings for clarity. After the filling step, the second substrate and the first substrate are aligned and intimately contacted. In the bonding step, the two substrates are pressed together, and the seal between the two substrates is cured to form an assembled device.

The two tapes 49 and 54 transfer the assembled device out of the bath 55. The roll 58 removes the tape 49 from the apparatus and guides it to the winding roll 59. The tape 54 holding the device is fed to the winding roll 60.

The foregoing embodiments are to be understood as illustrative examples of the present invention. Yet another embodiment of the present invention is predictable. Any feature described in connection with any embodiment may be used alone or in combination with other features described herein and may be used in combination with one or more other features of the other embodiments or combinations of other embodiments. Moreover, equivalents and modifications not described above may be employed without departing from the scope of the invention, which is defined in the appended claims.

Claims (25)

A manufacturing method of an electrowetting device including a first substrate, a second substrate, and a sealing member,
A first step of applying a first fluid and a second fluid on the first substrate, the first and second fluids being immiscible with each other;
A second step subsequent to the first step of attaching the sealing member to the first substrate;
Attaching the sealing member to the second substrate; forming a cavity surrounded by the first substrate, the second substrate, and the sealing member upon attachment of the sealing member; A second fluid; And
Curing the sealing member
≪ / RTI > The method of claim 1, wherein attaching the sealing member to the second substrate comprises applying the sealing member on the second substrate in a predetermined pattern before coupling the first substrate and the second substrate , An electrowetting device manufacturing method. 5. The method of claim 1, further comprising the step of providing the sealing member as a patterned sealing member having a predetermined pattern. 4. The method of claim 3, wherein the sealing member comprises a first layer of sealing material, a carrier of solid material, and a second layer of sealing material, in this order. The method of claim 3 or 4, wherein the sealing member comprises a release layer. The method of claim 1, further comprising forming a pattern in the sealing member. The method of claim 1, further comprising forming a pattern in the sealing member using laser cutting or die cutting. The method of claim 1, wherein the second fluid is electroconductive or polar, the first substrate having a first surface area that is less wettable to the second fluid and a second surface area that is more wettable to the second fluid 2 surface, and the second step of attaching the sealing member to the first substrate comprises applying the sealing member to the second surface region. 9. The method of claim 8, wherein the second step of attaching the sealing member to the first substrate comprises: attaching the sealing member to the second surface region through the layer of second fluid present on the first substrate ≪ / RTI > The method of claim 1, wherein the sealing member is attached to the first and second substrates by applying pressure on the sealing member. The method of claim 1 or 10, wherein the step of curing the sealing member comprises the application of UV radiation or the heating of the sealing member. A method of manufacturing an electrowetting device according to claim 1, wherein the first substrate is common to the plurality of electrowetting devices, the method further comprising: providing the cavity for each of the plurality of electrowetting devices And cutting the first substrate after forming the first substrate. 13. The method of claim 12, further comprising: providing a sealing member and a second substrate for each of the plurality of electrowetting devices; And combining each of the second substrate and the first substrate. 14. The method of claim 13, wherein after the step of cutting the first substrate, the first substrate and the second substrate have different shapes. 13. The method of claim 12, further comprising: providing a second substrate common to the sealing member and the plurality of electrowetting devices; Coupling the first substrate and the second substrate; And cutting the first and second substrates. ≪ Desc / Clms Page number 22 > The method according to any one of claims 12 to 15, wherein at least one of the steps is performed in a continuous process. A method of manufacturing an electrowetting device according to any one of claims 1 to 4, 6 to 10, or 12 to 15, wherein at least one of the one or more electrowetting devices is an electrowetting display device, Way. An apparatus for manufacturing an electrowetting device using the method according to any one of claims 1 to 4, 6 to 10, or 12 to 15. In an electrowetting device,
A first substrate and a second substrate coupled by a sealing member and defining a cavity, the cavity comprising a first fluid and a second fluid that is conductive or polar, Wherein the first substrate has a first surface area that is less wettable to the second fluid and a second surface area that is more wettable to the second fluid, Lt; / RTI >
Wherein the sealing member comprises a carrier of solid material between two layers of a sealing material. In an electrowetting device,
A first substrate and a second substrate coupled by a sealing member and defining a cavity, the cavity comprising a first fluid and a second fluid that is conductive or polar, Wherein the first substrate has a first surface area that is less wettable to the second fluid and a second surface area that is more wettable to the second fluid, wherein the seal member is pressure sensitive adhesive,
Wherein the sealing member comprises a carrier of solid material between two layers of a sealing material. delete In a plurality of electrowetting devices,
A first substrate common to the plurality of electrowetting devices; And
A plurality of second substrates coupled to the first substrate by a sealing member and having a shape different from that of the first substrate and forming a cavity,
Wherein the cavity comprises a first fluid and a second fluid which is conductive or polar, the first fluid and the second fluid being immiscible with each other,
Wherein a first surface area of the first substrate is less wettable to the second fluid and a second surface area of the first substrate is more wettable to the second fluid,
And the sealing member is aligned on the second surface area. 22. The electrowetting device of claim 19 or 20, wherein the electrowetting device is an electrowetting display device. A method of manufacturing an electrowetting device comprising a first substrate, a second substrate, and a sealing member,
Applying a first fluid and a second fluid on the first substrate, the first and second fluids being immiscible with each other;
Attaching the sealing member to the first substrate;
Attaching the sealing member to the second substrate; And
The step of curing the sealing member
, ≪ / RTI &
Wherein when the first substrate and the second substrate are attached and cured, the sealing member forms a cavity surrounded by the first substrate, the second substrate, and the sealing member, And the second fluid. In a plurality of electrowetting devices,
A first substrate common to the plurality of electrowetting devices; And
A plurality of second substrates coupled to the first substrate by a sealing member and having a shape different from that of the first substrate and forming a cavity,
Wherein the cavity comprises a first fluid and a second fluid which is conductive or polar, the first fluid and the second fluid being immiscible with each other,
Wherein a first surface area of the first substrate is less wettable to the second fluid and a second surface area of the first substrate is more wettable to the second fluid,
Wherein the sealing member comprises a pressure sensitive adhesive.
KR1020107013594A 2007-11-21 2008-11-20 Method of making an electrowetting device, apparatus for carrying out the method and electrowetting device KR101605570B1 (en)

Applications Claiming Priority (2)

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